<SEC-DOCUMENT>0001558370-24-001969.txt : 20240228
<SEC-HEADER>0001558370-24-001969.hdr.sgml : 20240228
<ACCEPTANCE-DATETIME>20240228150102
ACCESSION NUMBER:		0001558370-24-001969
CONFORMED SUBMISSION TYPE:	10-K/A
PUBLIC DOCUMENT COUNT:		101
CONFORMED PERIOD OF REPORT:	20231231
FILED AS OF DATE:		20240228
DATE AS OF CHANGE:		20240228

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-K/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		24694250

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-K/A
<SEQUENCE>1
<FILENAME>acls-20231231x10ka.htm
<DESCRIPTION>10-K/A
<TEXT>
<XBRL>
<?xml version='1.0' encoding='ASCII'?>
<html xmlns:us-gaap="http://fasb.org/us-gaap/2023" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:country="http://xbrl.sec.gov/country/2023" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:srt="http://fasb.org/srt/2023" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:dei="http://xbrl.sec.gov/dei/2023" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns="http://www.w3.org/1999/xhtml" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xs="http://www.w3.org/2001/XMLSchema-instance" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:acls="http://www.axcelis.com/20231231"><head><meta content="text/html" http-equiv="content-type"/><title></title></head><body><div style="margin-top:30pt;"></div><div style="display:none;"><ix:header><ix:hidden><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" xs:nil="true" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" name="us-gaap:CommitmentsAndContingencies" id="Hidden_RuVtRbialUakhzuY5veBMA"></ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" xs:nil="true" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" name="us-gaap:CommitmentsAndContingencies" id="Hidden_os9b_gA92E2W-iJwFT90CQ"></ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ" decimals="-3" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" id="Hidden_A-jAczExMkm5p9RtnsLWvQ">0</ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ" decimals="-3" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" id="Hidden_KXlZ99tkb0S-UOmjIwfd_A">0</ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A" decimals="-3" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" id="Hidden_IQX8aidHR0yp0Ml9ZFjnUw">0</ix:nonFraction><ix:nonNumeric contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_aJBAIjRPr0W6jnAzBiK7-w">http://fasb.org/us-gaap/2023#OtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" name="us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" id="Hidden_Xj95x6arJ0qR_QLqp0sQGg">http://fasb.org/us-gaap/2023#OtherLiabilitiesNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityRegistrantName" id="Hidden_cxFq7T_CJ0SSzwsOE91ATQ">AXCELIS TECHNOLOGIES INC</ix:nonNumeric><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" name="us-gaap:CommonStockSharesOutstanding" id="Hidden_anCz2TIc-0WfgFdz1LK9Aw">32685000</ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" name="us-gaap:CommonStockSharesOutstanding" id="Hidden_y4iAAkQixEqXhH4rkQdrXQ">32775000</ix:nonFraction><ix:nonNumeric contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_i2-EYNNJA0eUS-xr5rtGOg" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Hidden_zehA9llnJ0iptBHcvR7uFg">P22Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw" name="acls:ExtendedProductWarrantyPeriod" id="Hidden_tZFax8B4REGrwjj6O781Dw">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_4WmvFNfdLESy1k-c9Ty0ow">http://fasb.org/us-gaap/2023#OtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" name="us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" id="Hidden_wOYBbjMi40W2UbMQy9eAbw">http://fasb.org/us-gaap/2023#OtherLiabilitiesNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityCentralIndexKey" id="Narr_PdSqK02ItkSs4KzlmTkGzA">0001113232</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentFiscalYearFocus" id="Narr_3BSSus7SH0WlsCUhOs0EUw">2023</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentFiscalPeriodFocus" id="Narr_dpR-AWEKtkuIiLiNOYGvFg">FY</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:AmendmentFlag" id="Narr_X_XDwXJyG0qhWhdKkvLCMw">false</ix:nonNumeric></ix:hidden><ix:references><link:schemaRef xlink:type="simple" xlink:href="acls-20231231.xsd"/></ix:references><ix:resources><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">acls:AllowanceForDoubtfulAccountsAndReturnsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_Q9QhiFBD9UypWV-wU4smdg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_34gSCZl-h0errxThK-8WCg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">acls:AllowanceForDoubtfulAccountsAndReturnsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_MdUgjQT3H0-8E9eEhKTIDQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember__5vZm9qvmEyx4PGXJ2sJsQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_T1p77pG58E-62u-Xc6gndQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_aK2DEoB7_Eu88P7tq67wFQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_01MGxzKcEUWC9Vo419xZWg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_hTJUKZ2N_0S-6GH-oOyPOQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_V5F4suYLbkumL7sSh8HPjg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d27L0mnm8E6o0EBrLLjx4Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kkl8hIe8Z0WWHl_h4FC_PA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_lBvELhaCnUmktQXJBN6FVQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_EBneyNXtHUGp6uxp51hi_g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1vzZGp7IfUeAUTS7-QsIMw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_Lgnhf3xLCEGYzqAk3hvIQw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_eBavN9PHeUuERox8GtAOSA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UelRMQl0h0KQ-w3QHBxk5w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lT-MAUt2vUucO6TyYUISFA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_-_DnTv_YvEaDkQKe7LmNQw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Cj73mXbaM02Io4RY6pFEpA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_VEarHxZha0mjyeIA0BFTiw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_KNDxXdNZpkydy7gB3tHtqw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_uOkEC3DECUKHo7vPylY9jQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Rz3ajLtnREywZskVvE3Fmw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_hpz_xxymo0GvoQRlITpX4A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_ueAU0cUZWkCEoZ57czvWIQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_b4oP4P5xgEGsQW04yyL2vA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_vmAw9b532UyKEU9Sr1y8pA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_qkh1OMbVZUyknnxw8G32NQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:NonEmployeeMemberOfBoardOfDirectorMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Vgn0ucnjykmLprXk3j_aGA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:NonEmployeeMemberOfBoardOfDirectorMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_r2QDj_WbGU2MXA9cI6rdwA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:EmployeesMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_SfoAMMye2UK3lNLxNdJrFg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_country_US_UfW5MedWSkyujQ8Y0vkOtg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_7zwwQYKndk-1uFVAqMZYtw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_b0GGpw37D0OVb9OFN51NQg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_95SUhXL6YUOJ1QCn_y7deQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_SvkhLuNIGUmjUZq3-cDS2w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_IB6EAoZ92EKVMdwKs2Dl9Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_dErK4Bok0U6vJzw5OBG6Kw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember__am58s2p3kyHmrdJ-wmZEw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_8JwEleVAokWgoqUc3NxvTQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_NorthAmericaMember_JoPVnkw3mEm1Z6YC7LnFwg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_NorthAmericaMember_5SbsYIuKTE2oNfT3jl9X4Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_1bP-k2K0dEaaZvALjQivWQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_AfterMarketMember_JgLLb3ZvXkGxmtgfnUlokg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_CWF1GuDdgUmVH9UkggHm3A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_0SZ6e4zPJU2wVRZHZ2ZfQA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_AfterMarketMember_R3xczBeiI0u4XJaxTbqZqw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nbAeeKDfx0y_WvsTR2GHiw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember__L6CjCUYgkC3tvk_zUvMVA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_uSoKKtTL3EeayP_UYwb4aA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">us-gaap:AssetUnderConstructionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_hukGzR6rT0Sv-Xpf1xySNg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">acls:CompletedInternalUseAssetsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_6BiqVHo39E25KiWhAgwHWQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">us-gaap:AssetUnderConstructionMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_9EIzoIV5jku9H0iOx7c2eQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">acls:CompletedInternalUseAssetsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_sUEs6zlqCUiqrDtxx8jTkg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_by3yUhzzMUOHGUmsw6NmdA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_34ulAvTgIkqsxw-o7sAllQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:ConstructionInProgressMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_BJ81Px-3jUOOdA81zS1yUw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_rLpWCJ1ySU6lbxpkZu3LRg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_5qFeDvcA_0q_U037-XKGbA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:ConstructionInProgressMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_Rs_z9QPg402tAph_TIU5fg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2015-01-30</xbrli:startDate><xbrli:endDate>2015-01-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_MVnzW5NrJ0qmvFlQgL8X3g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_Iw5yocB58EylycBimPDlAw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Ekmsr9scYE--R8wCcnElug"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_pMa3RwqDJkqzoCPJs87n0g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_9fes20YJ4Ea1NPN1ZK-OqQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:ForeignCountryMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_qjTxbwBIV0alaooQFCEIKg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">acls:ResearchDevelopmentAndOtherTaxCreditMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">acls:FederalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_1QQS8yEFjUib8d8knVG_9A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_w8rDIieJWkWfpWIiv4XSUw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_NQsL3qslNkeZfRsITmZe9Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_QSwl2AmY80adkhffvz0gCg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_bXVg4s95EE6tnCE0idB63g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_DMi5sb8OTUuT5keU6YBerg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_4NfHaW5CA0yJLxDy_YXdhw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_rglxkDWFOESLtoer65iEHw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_0bkVSRvn3EaEnUCrA02baQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_v_arZAXy-EqBQBV34KuibQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_IIxy0K8yAk2AND2S5bQL0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_MwkElhV-1UmpfvM7cwqj0w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_RPglYXiqLEShpJtGT_g1Sw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VFBGeqEs2UCyy68A5JWZfw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_country_US_K0jdvGlMnki9BRPFAc8loA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_LwLoMmDLRkW5c14GGyfjfw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VkUGPFQLf0iBUBJcbnlQtg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_QN_LDNP680aHSIexTzcgIw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_pnJLSIdbRUOBVaF_N17T0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_GhM1iSAHW0adxS2rHrLKEg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_z97YRF5psk25FKK3ms7RSQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2024_To_12_31_2024_srt_StatementScenarioAxis_srt_ScenarioForecastMember_MJ_ZopQwbUyFzH4dIn7oYw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementScenarioAxis">srt:ScenarioForecastMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2024-01-01</xbrli:startDate><xbrli:endDate>2024-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_4_5_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_kkaSLd1LM0C9esG8HkUCVA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-04-05</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_28_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_ua0-Jcp4OUSOLk7dWfem3A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-28</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_i2-EYNNJA0eUS-xr5rtGOg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2015-01-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2015-01-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_c5IOe__eWka7z2RDpzRfUw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:InventoryValuationReserveMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_GLWI7xYFXUmyD_aD5jx5nQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:InventoryValuationReserveMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:SaleAndLeaseBackMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_mZ2W82yrpkiUQ17ZsA1AFA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_HDapt1gSVkub8a13ACadnA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_yyaUwrTP-EmOHl3wwJZx1w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_RegularEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_RegularEmployeesMember_X9LY_jFt8kaVFHrGbcG7ug"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:RegularEmployeesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_TdcImKyWREecvPdfWIEV-g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:HighlyCompensatedEmployeesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_WuYsBe_SrkujPEA1yzkt9A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4_x4EoJBaEiVAs7iwP-0lw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_zQ2Yn7utxkepTZdtD-MnNQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_Htd3q93xik6sWxKXUBlHVw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZvANrIAgnkGmVedWUzRlvQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KE7gAbB4B0-02qOjDlgwyA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_QoC2-fOGDU-wmEBEzv3VFA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_6qqFwdivGkiYvjlyTVTwCA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2012-05-02</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TzKiNwwh-USWhz8io11ABQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember__LfbETs_4Eyj_dMwV2UpJA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_urRrssC6x0WGz17x6E4Hvg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_mavXQ4xISEaAsWrZ0L8ZhA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Kw8meW5Ew0CwJoeC9iNRTg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_NNvZ4Hd_I0aMDgcN7QbpFw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_lsl0Qfi_V0WmHE7FGXZAiw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_m6CBlDItoUGdcd4Vqk0hnw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_TuSaOuIuF0-JMXXG4noSTA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_DEhEBCwN6kWhhs5ipCNeIw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_qoXIVx02EECBqzy5LRssRQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2023_5vHyfFaCY0GB3vehhk8X3w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2023-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_2_20_2024_dTjYacuAZ0yp8toLy22bhA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2024-02-20</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2021-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:EmployeesMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2012-05-12</xbrli:startDate><xbrli:endDate>2012-05-12</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_DwurvAbnrUK_uQzfnlVyRw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_TivY9CKrdEqLO9QwWaSgbg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">acls:ResearchDevelopmentAndOtherTaxCreditMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_CTeQSjjQTkinayDXQEOAEQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_9pxK086imEWWaL_mWlkxGA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_4rCodVjYiE-faP7-OqIxYA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_j9APXSaQMkyZFdzuTWJQkw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_u_36UcX1uEKf7qb2wqp-Dg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2022-01-01</xbrli:startDate><xbrli:endDate>2022-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_xdayt9hO7UeoxVaiKsu3xQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2023_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_UWPXctNjAU2YwBO-MipMgA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2023-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FcTXrGNUaEORf0WBQjUsjA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_0pN4ZKO8KEG3rNUdHqr_YQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_dPFQa6Iz_0yI2V8uS_VTkg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2022-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2023-01-01</xbrli:startDate><xbrli:endDate>2023-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:unit id="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw"><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A"><xbrli:measure>acls:customer</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA"><xbrli:measure>xbrli:pure</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g"><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw"><xbrli:divide><xbrli:unitNumerator><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unitNumerator><xbrli:unitDenominator><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unitDenominator></xbrli:divide></xbrli:unit><xbrli:unit id="Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw"><xbrli:measure>acls:segment</xbrli:measure></xbrli:unit></ix:resources></ix:header></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><div style="padding-top:1.0px;border-top:3.0pt solid #000000;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-top:1pt;border-top:1.0pt solid #000000;margin:0pt;"><span style="font-size:3pt;visibility:hidden;">&#8203;</span></p><a id="_a544baa4_1a3c_4f85_84ba_fbe67d4f2071"></a></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:16pt;font-weight:bold;">UNITED STATES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:16pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Washington, D.C. 20549</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:16pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FORM </b><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentType" id="Narr_sqBOdSGGZE2lA-L_fexggw"><b style="font-weight:bold;">10-K/A</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">(Amendment No. 1)</p><a id="_437c6420_b144_4704_a5a9_e9b7c97ba649"></a><a id="Tc_If1JsrVsGU25OuIQ797gAg_0_0"></a><a id="Tc_Rymlg0QpVUGaGWXUJvgpFQ_1_1"></a><a id="Tc_mvjrN2hpy0-VLj1XCvwy5w_2_0"></a><a id="Tc_KkVYA92Jz0S9myX0Cvu1Pg_3_1"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:top;width:13.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:7pt;padding-left:10.1pt;text-align:center;text-indent:-10.1pt;margin:0pt 0pt 3pt 0pt;"><b style="font-weight:bold;">(Mark One)</b></p></td><td style="vertical-align:bottom;width:86.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:6pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:13.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentAnnualReport" id="Tc_BeUrz8Xiwk21BES5-AU6VA_1_0"><b style="font-family:'Segoe UI Symbol';font-size:8pt;font-weight:bold;">&#9746;</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:86.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">ANNUAL REPORT PURSUANT TO SECTION&#160;13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF&#160;1934</b></p></td></tr><tr><td colspan="2" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-align:center;text-indent:-10.1pt;margin:3pt 0pt 3pt 0pt;"><b style="font-size:9pt;font-weight:bold;">For the fiscal year ended </b><ix:nonNumeric format="ixt:datemonthdayyearen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentPeriodEndDate" id="Narr_xRMQ9-TQAE-LVDNjUAUN0g"><ix:nonNumeric format="ixt:datemonthdayen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:CurrentFiscalYearEndDate" id="Narr_PU_Y6ogIskGwlNtdk0QsZA"><b style="font-size:9pt;font-weight:bold;">December 31</b></ix:nonNumeric><b style="font-size:9pt;font-weight:bold;">, 2023</b></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:13.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentTransitionReport" id="Tc_ABSqhZO860qYatnG6RUfOA_3_0"><b style="font-family:'Segoe UI Symbol';font-size:7pt;font-weight:bold;">&#9744;</b></ix:nonNumeric></p></td><td style="vertical-align:top;width:86.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">TRANSITION REPORT PURSUANT TO SECTION&#160;13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF&#160;1934</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">For the transition period from                    to                  </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:9pt;font-weight:bold;">Commission file number&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityFileNumber" id="Narr_pWWXkrodwUuU05dObACvoQ"><b style="font-size:9pt;font-weight:bold;">000-30941</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:16pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_cxFq7T_CJ0SSzwsOE91ATQ;"><b style="font-family:'Times New Roman','Times','serif';font-size:16pt;font-style:normal;font-weight:bold;">AXCELIS TECHNOLOGIES,&#160;INC.</b></span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">(Exact name of registrant as specified in its charter)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr><td style="vertical-align:top;width:49.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityIncorporationStateCountryCode" id="Narr_29ivor0FiEWRKO94cMKxzA"><b style="font-weight:bold;">Delaware</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;"><br/></b><span style="font-size:8pt;">(State or other jurisdiction</span><span style="font-size:8pt;"><br/></span><span style="font-size:8pt;">of incorporation or organization)</span></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityTaxIdentificationNumber" id="Narr_1Jo2_-FW8Umpma7nsFNXkw"><b style="font-weight:bold;">34-1818596</b></ix:nonNumeric><b style="font-size:8pt;font-weight:bold;"><br/></b><span style="font-size:8pt;">(IRS Employer Identification No.)</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityAddressAddressLine1" id="Narr_fxvYJQJdS06r4dEaPwUrJA"><b style="font-size:9pt;font-weight:bold;">108 Cherry Hill Drive</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityAddressCityOrTown" id="Narr_at5btn9kkEW_VzVbF-IRPw"><b style="font-size:9pt;font-weight:bold;">Beverly</b></ix:nonNumeric><b style="font-size:9pt;font-weight:bold;">, </b><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityAddressStateOrProvince" id="Narr_cney5IFScUOUJaq1I4ldeA"><b style="font-size:9pt;font-weight:bold;">Massachusetts</b></ix:nonNumeric><b style="font-size:9pt;font-weight:bold;"> </b><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityAddressPostalZipCode" id="Narr_-fme9cmKlkG6zTX0FlcAgA"><b style="font-size:9pt;font-weight:bold;">01915</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">(Address of principal executive offices) (zip code)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:9pt;font-weight:bold;">(</b><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:CityAreaCode" id="Narr_5ArevmzLX0WnOvL2Wz_ELQ"><b style="font-size:9pt;font-weight:bold;">978</b></ix:nonNumeric><b style="font-size:9pt;font-weight:bold;">)&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:LocalPhoneNumber" id="Narr_t14URSdqcEKFimtr3iDZIQ"><b style="font-size:9pt;font-weight:bold;">787-4000</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">(Registrant&#8217;s telephone number, including area code)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities registered pursuant to Section&#160;12(b) of the Act:</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_010442d4_bb85_4191_a541_112c13e74428"></a><div style="margin-left:0pt;"><a id="Tc_In-RlxtaeECsZpGDqYzjIw_1_0"></a><a id="Tc_owS1wdwaS0i3eJdTZpcjLA_1_1"></a><a id="Tc_UQIOwA-IEUmABweTBbtIww_1_2"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:31.51%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:35.14%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:33.33%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:31.51%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">Title of each class</p></td><td style="vertical-align:top;width:35.14%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">Trading symbol</p></td><td style="vertical-align:top;width:33.33%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;">Name of each exchange on which registered</p></td></tr><tr><td style="vertical-align:top;width:31.51%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:Security12bTitle" id="Tc_0RgS-gQ8YEqBCH8zjKc7-w_2_0"><span style="font-size:9pt;">Common Stock, $.001 par value</span></ix:nonNumeric></p></td><td style="vertical-align:top;width:35.14%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:TradingSymbol" id="Tc_iXstrBXH70aVZDNReX9kag_2_1"><span style="font-size:9pt;">ACLS</span></ix:nonNumeric></p></td><td style="vertical-align:top;width:33.33%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:exchnameen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:SecurityExchangeName" id="Tc_-N7WNu543kOgAYVDCQodcQ_2_2"><span style="font-size:9pt;">Nasdaq Global Select Market</span></ix:nonNumeric></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Securities registered pursuant to Section&#160;12(g) of the Act:</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">None</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by check mark if the registrant is a well-known seasoned issuer, as defined in Rule&#160;405 of the Securities Act.&#160;</span><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityWellKnownSeasonedIssuer" id="Narr_8yj45SMY7EexZ5ORT8O8uA"><span style="font-size:9pt;">Yes</span></ix:nonNumeric><span style="font-size:9pt;">&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span><span style="font-size:9pt;">&#160;No&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#9723;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by check mark if the registrant is not required to file reports pursuant to Section&#160;13 or Section&#160;15(d) of the Act.&#160;Yes&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#9723;</span><span style="font-size:9pt;">&#160;</span><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityVoluntaryFilers" id="Narr_As0kwwO4s0mf5vtnJx7KnQ"><span style="font-size:9pt;">No</span></ix:nonNumeric><span style="font-size:9pt;">&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by check mark whether the registrant (1)&#160;has filed all reports required to be filed by Section&#160;13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12&#160;months (or for such shorter period that the registrant was required to file such reports), and (2)&#160;has been subject to such filing requirements for the past 90&#160;days.&#160;</span><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityCurrentReportingStatus" id="Narr_mF67qq3p90KEJNrzmFtIQg"><span style="font-size:9pt;">Yes</span></ix:nonNumeric><span style="font-size:9pt;">&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span><span style="font-size:9pt;">&#160;No&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#9723;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by checkmark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule&#160;405 of Regulation&#160;S-T during the preceding 12&#160;months (or for such shorter period that the registrant was required to submit such files).&#160;</span><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityInteractiveDataCurrent" id="Narr_gElEfu_oP0mzP3TRhihcxA"><span style="font-size:9pt;">Yes</span></ix:nonNumeric><span style="font-size:9pt;">&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span><span style="font-size:9pt;">&#160;No&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#9723;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting company or an emerging growth company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer,&#8221; &#8220;smaller reporting company&#8221; and &#8220;emerging growth company&#8221; in Rule&#160;12b-2 of the Exchange Act.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:top;width:15.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><ix:nonNumeric format="ixt-sec:entityfilercategoryen" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityFilerCategory" id="Narr_kJq5MQheg0CoBMRsFLGVeA"><span style="font-size:8pt;">Large accelerated filer</span></ix:nonNumeric><span style="font-size:8pt;">&#160;</span><span style="font-family:'Times New Roman';font-size:8pt;">&#8999;</span></p></td><td style="vertical-align:top;width:18.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">Accelerated filer&#160;<span style="font-family:'Times New Roman';">&#9723;</span></p></td><td style="vertical-align:top;width:24.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">Non-accelerated filer&#160;<span style="font-family:'Times New Roman';">&#9723;</span></p></td><td style="vertical-align:top;width:19.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;">Smaller reporting company&#160;</span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntitySmallBusiness" id="Narr_GkxTCTF0bkK9Rwa2s-DRLA"><span style="font-family:'Segoe UI Symbol';font-size:7pt;">&#9744;</span></ix:nonNumeric></p></td><td style="vertical-align:top;width:21.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;">Emerging growth company&#160;</span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityEmergingGrowthCompany" id="Narr_fssWjSeeQEWa77qOmt1U4w"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">If an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. <span style="font-family:'Times New Roman';">&#9723;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by check mark whether the registrant has filed a report on and attestation to its management&#8217;s assessment of the effectiveness of its internal control over financial reporting under Section 404(b) of the Sarbanes-Oxley Act (15 U.S.C. 7262(b)) by the registered public accounting firm that prepared or issued its audit report. </span><ix:nonNumeric format="ixt:booleantrue" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:IcfrAuditorAttestationFlag" id="Narr_JP6AZUpKuEaH0uIxOOEiGg"><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;white-space:pre-wrap;">If securities are registered pursuant to Section 12(b) of the Act, indicate by check mark whether the financial statements of the registrant included in the filing reflect the correction of an error to previously issued financial statements.  </span><ix:nonNumeric format="ixt:booleanfalse" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:DocumentFinStmtErrorCorrectionFlag" id="Narr_MxW27812GEKHI5wEXvQ5Lw"><span style="font-size:9pt;">&#61551;</span></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Indicate by check mark whether any of those error corrections are restatements that required a recovery analysis of incentive-based compensation received by any of the registrant&#8217;s executive officers during the relevant recovery period pursuant to &#167;240.10D-1(b). &#61551;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;">Indicate by check mark whether the registrant is a shell company (as defined in Rule&#160;12b-2 of the Act).&#160;Yes&#160;</span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:EntityShellCompany" id="Narr_BtrxR3XUKUmhfPRQp0ErGg"><span style="font-family:'Segoe UI Symbol';font-size:8pt;">&#9744;</span></ix:nonNumeric><span style="font-size:9pt;">&#160;No&#160;</span><span style="font-family:'Times New Roman';font-size:9pt;">&#8999;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aggregate market value of the voting stock held by non-affiliates of the registrant as of June&#160;30, 2023: $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_6_30_2023_5vHyfFaCY0GB3vehhk8X3w" decimals="0" name="dei:EntityPublicFloat" id="Narr_1Dns9QrhJkGGfZKnVBoPIw">5,962,466,683</ix:nonFraction></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Number of shares outstanding of the registrant&#8217;s Common Stock, $0.001 par value, as of February 20, 2024: <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_2_20_2024_dTjYacuAZ0yp8toLy22bhA" decimals="INF" name="dei:EntityCommonStockSharesOutstanding" id="Narr_DE75xtXyOEyud9fl5usSAA">32,625,760</ix:nonFraction></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:3pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Documents incorporated by reference:</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Portions of the definitive Proxy Statement for Axcelis Technologies,&#160;Inc.&#8217;s Annual Meeting of Stockholders to be held on May&#160;9, 2024 are incorporated by reference into Part&#160;III of this Form&#160;10-K.</p><div style="padding-bottom:1.0px;border-bottom:3.0pt solid #000000;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-bottom:1pt;border-bottom:1.0pt solid #000000;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></div><p style="display:none;line-height:0pt;text-align:center;margin:0pt 0pt 12pt 0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:91.06%;border:0;margin:30pt 4.47% 30pt 4.47%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_ada6559b_5448_4ed1_8cdf_d876ad55afea"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">EXPLANATORY NOTE</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">This Amendment No.&#160;1 to our Annual Report on Form&#160;10-K&#160;(the &#8220;Amendment&#8221;) amends our previously filed Annual Report on Form&#160;10-K&#160;for the fiscal year ended December 31, 2023, filed with the Securities and Exchange Commission on February 23, 2024 (the &#8220;Form&#160;10-K&#8221;).&#160;This Amendment is being filed to correct a reference error in Item 8, and to correct erroneous date references in the opinions of our Independent Registered Public Accounting Firm (i) on Internal Control Over Financial Reporting appearing in Item 9A on page 34 of the Form 10-K and (ii) on the audit of our financial statements for the year ending December 31, 2023, appearing on pages 38 &#8211; 39 of the Form&#160;10-K, following Item 16, in response to Item 8 disclosure requirements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">This Amendment includes new certifications by our Principal Executive Officer and Principal Financial Officer as exhibits 31.1, 31.2, 32.1 and 32.2, and a new consent by Ernst &amp; Young LLP, Independent Registered Public Accounting Firm as Exhibit 23.1. Except as expressly set forth above, this Amendment does not, and does not purport to, amend, update or restate the information in any other item of the Form&#160;10-K&#160;or reflect any events that have occurred after the filing of the Form&#160;10-K.&#160;This Amendment consists solely of the cover page, this explanatory note, a replacement of Item 8 in the original Form 10-K, a replacement of Item 9A in the original Form 10-K, a replacement of Item 15 and related material in the original Form 10-K (in response to Item 8) and the signature page, the officer certifications, and the consent required to be filed as exhibits hereto.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_306c0738_3b84_4233_9478_a4c598dcbe47"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;</b><b style="font-weight:bold;white-space:pre-wrap;">8.  Financial Statements and Supplementary Data.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Response to this Item is submitted as a separate section of this report immediately following Item&#160;16.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_057421f3_3482_448b_a104_d183ca5a2a9e"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;</b><b style="font-weight:bold;white-space:pre-wrap;">9A.  Controls and Procedures.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Evaluation of Disclosure Controls and Procedures.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our management, with the participation of our principal executive officer and principal financial officer, has evaluated the effectiveness of our disclosure controls and procedures (as defined in Rule&#160;13a-15(e) under the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;)) as of the end of the period covered by this Annual Report on Form 10-K (the &#8220;Evaluation Date&#8221;). Based on this evaluation, our principal executive officer and principal financial officer concluded that, as of the Evaluation Date, these disclosure controls and procedures are effective.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Management&#8217;s Annual Report on Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management is responsible for establishing and maintaining adequate internal control over financial reporting, as such term is defined in Rule&#160;13a-15(f) under the Exchange Act. Because of its inherent limitations, internal control over financial reporting may not prevent or detect all misstatements. A control system, no matter how well designed and operated, can provide only reasonable assurance with respect to financial statement preparation and presentation. Projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management assessed the effectiveness of our internal control over financial reporting as of December 31, 2023. In making this assessment, management used the criteria set forth in the Committee of Sponsoring Organizations of the Treadway Commission (&#8220;COSO&#8221;) Internal Control&#8212;2013 Integrated Framework.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Based on this assessment, management has concluded that, as of December 31, 2023, our internal control over financial reporting is effective based on those criteria.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The independent registered public accounting firm of Ernst&#160;&amp; Young&#160;LLP, as auditors of our consolidated financial statements, has issued an attestation report on its assessment of our internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">2</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_512776af_e806_4a54_a36a_144acbf1e31c"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">To the Stockholders and the Board of Directors of Axcelis Technologies, Inc.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Opinion on Internal Control Over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">We have audited Axcelis Technologies, Inc.&#8217;s internal control over financial reporting as of December 31, 2023, based on criteria established in Internal Control&#8212;Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission (2013 framework) (the COSO criteria). In our opinion, Axcelis Technologies, Inc. (the Company) maintained, in all material respects, effective internal control over financial reporting as of December 31, 2023, based on the COSO criteria. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the 2023 consolidated financial statements of the Company and our report dated February 23, 2024 expressed an unqualified opinion thereon.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><b style="font-weight:bold;">Basis for Opinion</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">The Company&#8217;s management is responsible for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting included in the accompanying Management&#8217;s Annual Report on Internal Control over Financial Reporting. Our responsibility is to express an opinion on the Company&#8217;s internal control over financial reporting based on our audit. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">We conducted our audit in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether effective internal control over financial reporting was maintained in all material respects. &#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Our audit included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, testing and evaluating the design and operating effectiveness of internal control based on the assessed risk, and performing such other procedures as we considered necessary in the circumstances. We believe that our audit provides a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><b style="font-weight:bold;">Definition and Limitations of Internal Control Over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">A company&#8217;s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company&#8217;s internal control over financial reporting includes those policies and procedures that (1) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (2) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (3) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company&#8217;s assets that could have a material effect on the financial statements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">/s/ Ernst &amp; Young LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">Boston, Massachusetts</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">February 23, 2024</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">3</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Changes in Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">There was no change in our internal control over financial reporting (as defined in Rule&#160;13a-15(f) under the Exchange Act) identified in connection with the evaluation of our internal control that occurred during our fourth quarter that has materially affected, or is reasonably likely to materially affect, our internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_0f9c5842_cee2_4c06_b8fc_2dc4bfa42914"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;</b><b style="font-weight:bold;white-space:pre-wrap;">15.  Exhibits and Financial Statement Schedules.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;border:0;"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;">(a)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;">The following documents are filed as part of this Report:</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">1)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Financial Statements:</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:83.32%;"><tr style="height:1pt;"><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#Report_of_Independent_Registered_Account"><span style="font-style:normal;font-weight:normal;">Report of Independent Registered Public Accounting Firm</span></a> (PCAOB ID:<ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:AuditorFirmId" id="Narr_BFqWdJDDFUuwMTnq5bpg1A"> 42</ix:nonNumeric>)</p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">5</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#ConsolidatedStatementsofOperations_78708"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Operations &#8212; For the years ended December 31, 2023, 2022 and 2021</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">7</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#ConsolidatedStatementsofComprehensiveInc"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Comprehensive Income &#8212; For the years ended December 31, 2023, 2022 and 2021</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">8</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#ConsolidatedBalanceSheets_111583"><span style="font-style:normal;font-weight:normal;">Consolidated Balance Sheets &#8212; December 31, 2023 and 2022</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">9</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#StatementsofStockholdersEquity_804831"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Stockholders&#8217; Equity &#8212; For the years ended December 31, 2023, 2022 and 2021</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">10</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#ConsolidatedStatementsofCashFlow_556249"><span style="font-style:normal;font-weight:normal;">Consolidated Statements of Cash Flows &#8212; For the years ended December 31, 2023, 2022 and 2021</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">11</p></td></tr><tr><td style="vertical-align:top;width:92.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#NotestoConsolidatedFinancialStatements_7"><span style="font-style:normal;font-weight:normal;">Notes to Consolidated Financial Statements</span></a></p></td><td style="vertical-align:top;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:3.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">12</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">2)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Financial Statement Schedules:</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;">Schedule&#160;II&#8212;Valuation and Qualifying Accounts for the years ended December 31, 2023, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:36pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">3)</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Exhibits</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;">The exhibits filed as part of this Annual Report on Form&#160;10-K are listed on the Exhibit Index immediately preceding the signature page, which Exhibit Index is incorporated herein by reference.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;">All other schedules for which provision is made in the applicable regulation of the Securities and Exchange Commission are not required under the related instructions or are inapplicable, and therefore have been omitted.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">4</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_9a9985a6_ce17_4cd4_a835_ce8b0edf47b2"></a><a id="Report_of_Independent_Registered_Account"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;background:#ffffff;margin:0pt;"><b style="font-weight:bold;">Report of Independent Registered Public Accounting Firm</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">To the Stockholders and the Board of Directors of Axcelis Technologies, Inc.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><b style="font-weight:bold;">Opinion on the Financial Statements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;background:#ffffff;margin:0pt;">We have audited the accompanying consolidated balance sheets of Axcelis Technologies, Inc. (the Company) as of December 31, 2023 and 2022, the related consolidated statements of operations, comprehensive income, stockholders&#8217; equity and cash flows for each of the three years in the period ended December 31, 2023, and the related notes and financial statement schedule listed in the Index at Item 15(a) (collectively referred to as the &#8220;consolidated financial statements&#8221;). In our opinion, the consolidated financial statements present fairly, in all material respects, the financial position of the Company at December 31, 2023 and 2022, and the results of its operations and its cash flows for each of the three years in the period ended December 31, 2023, in conformity with U.S. generally accepted accounting principles. &#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">We also have audited, in accordance with the standards of the Public Company Accounting Oversight Board (United States) (PCAOB), the Company&#8217;s internal control over financial reporting as of December 31, 2023, based on criteria established in Internal Control&#8212;Integrated Framework issued by the Committee of Sponsoring Organizations of the Treadway Commission (2013 framework), and our report dated February 23, 2024 expressed an unqualified opinion thereon.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><b style="font-weight:bold;">Basis for Opinion </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;background:#ffffff;margin:0pt;">These financial statements are the responsibility of the Company&#8217;s management. Our responsibility is to express an opinion on the Company&#8217;s financial statements based on our audits. We are a public accounting firm registered with the PCAOB and are required to be independent with respect to the Company in accordance with the U.S. federal securities laws and the applicable rules and regulations of the Securities and Exchange Commission and the PCAOB. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;background:#ffffff;margin:0pt;">We conducted our audits in accordance with the standards of the PCAOB. Those standards require that we plan and perform the audit to obtain reasonable assurance about whether the financial statements are free of material misstatement, whether due to error or fraud. Our audits included performing procedures to assess the risks of material misstatement of the financial statements, whether due to error or fraud, and performing procedures that respond to those risks. Such procedures included examining, on a test basis, evidence regarding the amounts and disclosures in the financial statements. Our audits also included evaluating the accounting principles used and significant estimates made by management, as well as evaluating the overall presentation of the financial statements. We believe that our audits provide a reasonable basis for our opinion.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><b style="font-weight:bold;">Critical Audit Matters</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;background:#ffffff;margin:0pt;">The critical audit matters communicated below are matters arising from the current period audit of the financial statements that were communicated or required to be communicated to the audit committee and that: (1) relate to accounts or disclosures that are material to the financial statements and (2) involved our especially challenging, subjective or complex judgments. The communication of critical audit matters does not alter in any way our opinion on the consolidated financial statements, taken as a whole, and we are not, by communicating the critical audit matters below, providing separate opinions on the critical audit matters or on the accounts or disclosures to which they relate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Systems Revenue recognition</span><b style="font-weight:bold;"> </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><i style="font-style:italic;">Description of the Matter</i></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">As discussed in Note 2 and Note 3 to the consolidated financial statements, the Company generates revenue from the sale of ion implantation and other processing equipment used in the manufacture of semiconductor chips (&#8220;systems revenue&#8221;). The Company&#8217;s revenue contracts for systems have multiple performance obligations, including the systems themselves and obligations that are not delivered simultaneously with the systems. Systems revenue accounted for $883.6 million of the Company&#8217;s total revenue of $1.1 billion in 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">Auditing management&#8217;s recognition of revenue was challenging because of the higher extent of audit effort and because the amounts are material to the consolidated financial statements and related disclosures. During our risk assessment process, we identified a higher inherent risk related to revenue </p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">5</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"/><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"/><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">primarily due to the size of the account, as well as the focus on revenue from readers of the financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">How We Addressed the Matter in Our Audit</i></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">We obtained an understanding, evaluated the design and tested the operating effectiveness of controls over the Company&#8217;s systems revenue recognition process, including controls designed to mitigate the risk of override of controls. This included testing controls over management&#8217;s review of manual journal entries and revenue related account reconciliations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">To test systems revenue recognition, we reconciled revenue recognized to the Company&#8217;s general ledger to test completeness and performed substantive test of details over significant transactions deemed to be key items and a representative sample of the remaining transactions. &#160; For example, we selected and read a sample of arrangements to evaluate the completeness of the promised products and services and the related revenue recognized. We also confirmed directly with certain of the Company&#8217;s customers the terms of the selected system revenue arrangements. &#160; &#160;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-style:italic;font-weight:bold;">Estimate of Excess Inventory</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:6pt;font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">Description of the Matter</i></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">The Company&#8217;s inventories totaled $306.5 million, net, as of December 31, 2023. As described in Note 2 and Note 6 to the consolidated financial statements, the Company records a provision for estimated excess inventory. Management determines the provision using its assumptions of future materials usage, based on estimates of demand and market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">Auditing the Company&#8217;s provision for excess inventory is complex due to the highly judgmental nature of the factors used to estimate demand and market conditions. Specifically, the Company&#8217;s estimated materials usage may be significantly affected by management&#8217;s assumptions of forecasted system sales and the size and utilization of the installed base of systems. Management&#8217;s identification and measurement of these factors are forward looking and could be affected by future economic and market conditions that could have a significant effect on the excess inventory reserve.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;"><i style="font-style:italic;">How We Addressed the Matter in Our Audit</i></p></td><td style="vertical-align:top;width:2.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:82.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">We obtained an understanding, evaluated the design, and tested the operating effectiveness of internal controls, including management review controls, over the Company&#8217;s excess inventory reserve estimation process. This included management&#8217;s assessment of the assumptions and data underlying the excess inventory provision. For example, we tested controls over management&#8217;s review of its systems sales forecasts, as well as management&#8217;s review of the assumptions relating to the market size and utilization of installed systems. We also tested management&#8217;s controls over the completeness and accuracy of the data used in the estimation model. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">Our substantive audit procedures included, among others, evaluating the significant assumptions stated above and testing the accuracy and completeness of the underlying data used by management to compute the value of excess inventory. For example, we compared the quantities of on-hand inventories to historical and forecasted materials usage and evaluated adjustments to forecasts for specific product considerations, such as technological changes or alternative uses. We also assessed the historical accuracy of management&#8217;s estimates and performed sensitivity analyses over the significant assumptions to evaluate the changes in the excess inventory estimates that would result from changes in the underlying assumptions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">/s/ <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:AuditorName" id="Narr_PrwN_w9qWU2-wxTl25ho-Q">Ernst &amp; Young LLP</ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;">We have served as the Company&#8217;s auditor since 1999.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;background:#ffffff;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="dei:AuditorLocation" id="Narr_sA1WT_IGqE-cHOlUnClMwg">Boston, Massachusetts</ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;background:#ffffff;margin:0pt;">February 23, 2024</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">6</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_532639a2_a2cf_4846_a0bc_7b5e6f250b63"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="StatementsofOperations_982185"></a><a id="ConsolidatedStatementsofOperations_78708"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_96c4d6c2_0ac3_4029_a26e_72ed7d3fa0d1"></a><a id="Tc__pmLozutZ02-3p2VwxXfdQ_1_2"></a><a id="Tc_s41mpTJ2dEe4y-db3ZHZMQ_2_2"></a><a id="Tc_siRT2CNsbEWDgJk9Kysdlg_3_2"></a><a id="Tc_WCO_MlXA00WqCAv3Sj86Iw_3_5"></a><a id="Tc_UnxVdHaFGESyMFNJA3ha0A_3_8"></a><a id="Tc_xh6MGxRcjEm1CbsNzOMSEw_4_0"></a><a id="Tc__bbrpyeo5kKL9Q898Ych9Q_5_0"></a><a id="Tc_xltke-d4bUuIWSMrMZraeA_5_2"></a><a id="Tc_ijGLxF9MXEKLeHhE9muCYQ_5_5"></a><a id="Tc_2mUM7WKTfUuHjFTAuq9Egw_5_8"></a><a id="Tc_Gu-rU03z1kCzGxIhRMu86Q_6_0"></a><a id="Tc_XLJqH33joEaqteQ203BqYg_7_0"></a><a id="Tc_aR9jui-CJkmiSYMXYNP5iw_8_0"></a><a id="Tc_2RF4BYlMW0KifLq6U_nj3g_9_0"></a><a id="Tc_d8R1fXbs0k-bPj2Utvf5-A_10_0"></a><a id="Tc_iHmSWXK6fEOr6o2ODlMIyw_11_0"></a><a id="Tc_Gz9NGxQ63k6VpLA9QqHEMw_12_0"></a><a id="Tc_Q-hUh5CWpkG32nm2S9Nd4A_13_0"></a><a id="Tc_GklN67lYX0-W-1OsmjWLIw_14_0"></a><a id="Tc_d3n89E9y2UO-qLD_cWBg1Q_15_0"></a><a id="Tc_xJ1e4zV50EKFd1QesTOQ2A_16_0"></a><a id="Tc_9Xqb52Ml_0yp3qhp4U3KlA_17_0"></a><a id="Tc_n0hh9BjiUUeQXAGYHCK0-A_18_0"></a><a id="Tc_qD02IU3dok-Bthm2FtYIeQ_19_0"></a><a id="Tc_w1SZPWuieUKhSmd7xnLE5g_20_0"></a><a id="Tc_XEMEoK-Mg0G-fQyl83pwqA_21_0"></a><a id="Tc_d8Iz6Sitw0WTqsE-Go9FQg_22_0"></a><a id="Tc_tbTJRKMGe0m1opxBj4xwNw_23_0"></a><a id="Tc_U8I73HtziUeqNj0SJ7tMOQ_24_0"></a><a id="Tc_LEs23xY4NEWafxI3IeISXQ_25_0"></a><a id="Tc_SzZ9i0Vn_0OMPEvd-sUj6g_26_0"></a><a id="Tc_fo-h1MJ3i0yWRXdwEXJJDA_26_2"></a><a id="Tc_onHZ6qQo_kOlLlVt-dFs-A_26_5"></a><a id="Tc_KbUeYb052UOddmhlAlktLg_26_8"></a><a id="Tc_acVoXFiGn0iwNoCGkU2zaQ_27_0"></a><a id="Tc_WJL66hS8RUWGHkRlqrrhRA_28_0"></a><a id="Tc_aDc1UIz010eeKcC792t9qg_28_2"></a><a id="Tc_Rh5z28s2WE-WPS5Fy9OPqQ_28_5"></a><a id="Tc_AYNA4_zZkECQWTQeIVi20g_28_8"></a><a id="Tc_mhqruEpZlEG1KpZ6rcrJBQ_29_0"></a><a id="Tc_-QN1jLwnNkOns15P2HlB8w_29_2"></a><a id="Tc_OCFx6IhHAUWPhU3ZX7VbSw_29_5"></a><a id="Tc_2Nn_gB7a6UuQhd6GUmG5vA_29_8"></a><a id="Tc_JBpbck_XXUqlUvK9PB8UjA_30_0"></a><a id="Tc_LnjUaJlsqU2JCL3hxR7QPg_31_0"></a><a id="Tc_-YWfm62zGUezcfXs8PbjYA_32_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.27173615%;padding-left:0pt;padding-right:0pt;width:100.54%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Twelve&#160;months&#160;ended</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:44.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_sNgQNkU7FkSTPxzWPDaUbA_5_3">1,095,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_PV-EEJKm2kKs0mmZWQQ3OQ_5_6">890,582</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_f9u_gqNLSUGm3jUGXn9CNA_5_9">634,445</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_6BuZxf66dE-tI7sxEMkzYQ_6_3">34,954</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_qSQ-ANVwFU2RyIqkp8H6mQ_6_6">29,416</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_6tVLkhP5Bk2Zzc3rlvgDiQ_6_9">27,983</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_gbjZhkfvbEadpD4MZz-HJg_7_3">1,130,604</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc__O8XaQr30UmGJDVmpMsxKg_7_6">919,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_qSQIZBXlEUKUuNUsEMloGQ_7_9">662,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of revenue:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_Zc5i-8mfRUWXQi5f-vlrSA_9_3">608,112</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_8tC1SisX9EmIwjFe4KaSng_9_6">492,104</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_0oXuuqORXEiEUZ0SwR_u_g_9_9">349,558</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_2mrHCcxh2UOJFykATlJBrw_10_3">31,191</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_TJ9indn3P0-69QAyScLijw_10_6">26,104</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_NzvR3vAoBE-kzEIk92HgWA_10_9">26,425</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total cost of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_sRtk76wU80KKhlQBTPwM-g_11_3">639,303</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_zhqmQ-xXGk-3YJ8jcrnf_A_11_6">518,208</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_wdzIUm-nl0WFZoSnK9wUpg_11_9">375,983</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross profit</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_zytitxkYZ0mhZShG_rlKzA_12_3">491,301</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_yuw374jq60eLS1G1ed5xPQ_12_6">401,790</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_Z9i8HJQucUuLgVFLdhBgsQ_12_9">286,445</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Research and development</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_TJbVLUqH5UGfQAU7GlRbUg_14_3">96,907</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_fvx0XUOXpUij_sMnJShFWQ_14_6">78,356</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_LVsigZeKPESvLuvIgVry5A_14_9">65,431</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Sales and marketing</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_wYUrKtiVhkejafpWMBp_Pw_15_3">62,805</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_z2CrowIGJk6F09aHVudcjQ_15_6">53,599</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_ZicuEm4EVES20TQFBCo8cA_15_9">47,548</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">General and administrative</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_Ra-jQiLCJEuGJQAn0MXvkw_16_3">65,794</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_2-KqKuWsh0CHPgXWg7X-oA_16_6">57,474</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_xvZqHD6qQUKPkC9f3EnHmg_16_9">46,141</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total operating expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_Ehao_kcH8UCjgJbsR29C7Q_17_3">225,506</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_gNWVguCtX0aAEy0wPYhjTA_17_6">189,429</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_butQxQ5UbUWCEs-ttSZv1w_17_9">159,120</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income from operations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_RkdhFqiOH0O1mRH-R-Agzw_18_3">265,795</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_Vp3EZaarREyWOFs2szSxvw_18_6">212,361</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_DE1lfuYvDk-8Zh4l48dkIw_18_9">127,325</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other income (expense):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Interest income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_JPtzeQETGEyJj_n1JF3Vcg_20_3">18,199</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_viNjIDr_jkuKT1YrqDj6wQ_20_6">4,551</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_oBveIht8kE2AzpISx2N90w_20_9">209</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_g2frzK0BFUSJWfq1eP2yxg_21_3">5,347</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_2eW68htPq0O4hTncL5dhjA_21_6">5,576</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_0gz7SGLqGkqhd2SSCWHOPA_21_9">4,835</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_ETdS2SJmYkyd5iuwqIIPqg_22_3">48</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_tqsU0f7XU0al2bRNszA84Q_22_6">6,451</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_mLjwMxpANUOI19Dw5KGNiw_22_9">2,271</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total other income (expense)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" scale="3" id="Tc_JKltJOOpskGdeKjckwZ9Bw_23_3">12,804</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_Db6ceXw9NEC6w-8i6A8REw_23_6">7,476</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_tkSxrHvuUU26mC4Ug2ce0A_23_9">6,897</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_rBrV2oaaJE-Eesq90p-xlQ_24_3">278,599</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_SfYyIG1RPUKmgGKgHNhokA_24_6">204,885</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_vSsh6rHLi0OYNuNjzs2tRA_24_9">120,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_Fp5yuJM2VUW51JPoBOsFrg_25_3">32,336</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_7ie56CeCfkSbVOUYn7u3Ag_25_6">21,806</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_ShbmKbWkM0GrD_U-QRzN3g_25_9">21,778</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_XOkoCJEC3kuLo9fQpqaWLA_26_3">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_HBP1hK75QUu5OArRG55dqw_26_6">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_PEBZNkUbvkyGwaH142Pp_A_26_9">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_vN7OwOxyt06hiT7AOtNx1w_28_3">7.52</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_SejRcduUMkGvyLihDhJT3Q_28_6">5.54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_u1mipiDwgUGVQvhdWuxiTA_28_9">2.94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_oPd7k3mOJUuzlIjS7c-yow_29_3">7.43</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_SVfWb8AI0kCwzn7Wam5Nfg_29_6">5.46</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_gkertJlKPk-O8h-Fd9rG6A_29_9">2.88</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Shares used in computing net income per share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic weighted average shares of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_o-olcCAzI0KLpp-lipAOBw_31_3">32,758</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_raiqEG6znk2YGCCcRqi4eQ_31_6">33,043</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_IBU1geYCekyn70zhQmTuYA_31_9">33,555</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted weighted average shares of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.58%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_Y3QBezTTgUuDCZUDlp3owQ_32_3">33,165</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.77%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_MqnUZ3Og1k6o8UofhOvC2g_32_6">33,542</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.81%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_BCfosUtvBUKseumf5y7hEA_32_9">34,268</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">7</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_contentSection_b2718587_7835_449c_bd7c_"></a><a id="_14a1ded9_a80f_4538_a59a_2dbea0dcaaa4"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="ComprehensiveIncomeLoss_960515"></a><a id="ConsolidatedStatementsofComprehensiveInc"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Comprehensive Income</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_9e2d06a5_d7ee_4a13_aad7_1bccc1841fd6"></a><a id="Tc_bfxsO22Wr0q9W9KwQ-mv4A_1_2"></a><a id="Tc_P9f1MoKtjkSvA8scypogXA_2_2"></a><a id="Tc_bVmMsVODBk6mkSOmVPxBxw_3_2"></a><a id="Tc_Q-icghGpCkWxsOAIRmHNCA_3_5"></a><a id="Tc_OT1fxvCIUU6tymhVCyY9uA_3_8"></a><a id="Tc_j8gjOh9fYkiXhozn06Xc0Q_4_0"></a><a id="Tc_iry2vRwnYE6yLqS0HurVwA_4_2"></a><a id="Tc_ACrxSxWdOEaT-B4g6hJf8w_4_5"></a><a id="Tc_vVfyeaxkwEK4zEWi4kPIuQ_4_8"></a><a id="Tc_CDJuAOH3d0uMYD6fQP5hQg_5_0"></a><a id="Tc__roJwJ5dgkS4ofwAY0-ieg_6_0"></a><a id="Tc_x6cKQcC3Xkii7itCaWOICA_7_0"></a><a id="Tc_etOb_QL8uUenF2pEsUGhPA_8_0"></a><a id="Tc_EBpayuiMBkObgne2uaZzzg_9_0"></a><a id="Tc_6gB75zzo2E2pmn7OcNAQzQ_9_2"></a><a id="Tc_szIWNsWmREeX0kacAe2DFQ_9_5"></a><a id="Tc__3V50mqreEGxbDcHK39R4w_9_8"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Twelve&#160;months&#160;ended</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_wbNJ_2f_RU295jLAcCzxBw_4_3">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_K3YQt8kpZEaAqhz0sgpFFg_4_6">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_Ur9yvbgTk0e2Ze4EyJXiPA_4_9">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other comprehensive income (loss):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_ISRQpfknUU-2us6RYl2smg_6_3">38</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_J6b-ZqOW4UWMMbegZ3QTaA_6_6">4,058</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_BWgeNdtjNUetnK1iGd7ALQ_6_9">1,881</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Amortization of actuarial net gain and other adjustments from pension plan, net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_ZNwbozzAvUmCXGpVbuxaaA_7_3">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_IABzTeR8rUmQO6DahSMvew_7_6">325</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_ik2cSj3SaEeNcJJq1wbo-Q_7_9">211</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total other comprehensive income (loss) </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_22DsxBzjkUyXznhpC4LYiQ_8_3">122</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_wrxS3R9AHkSUjJt8HJiqUQ_8_6">3,733</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_UiBTPg-R_k-dKHYUwNQVeQ_8_9">1,670</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:68.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_b5pWfqU_k06UH41oswIZ9Q_9_3">246,385</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_bv06VuYZZEWB4wSH2D5x_A_9_6">179,346</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_-qxkfbqRYk2IBJ0j9NsAzA_9_9">96,980</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">8</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_contentSection_5e0d0572_8c14_42f2_ab23_"></a><a id="_2f4a0583_e548_428a_b87d_2bdd00d0b5f5"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="BalanceSheets_180416"></a><a id="ConsolidatedBalanceSheets_111583"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Balance Sheets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_78fd2bf4_8f7d_4c34_8841_6d8dbf117f5c"></a><a id="Tc_vHWJ5xmffUya7cU4M2C26Q_1_2"></a><a id="Tc_-hBdL2o7YUeY5ieyGeyQJQ_1_5"></a><a id="Tc_FWegxFysgUWuaBb7M9_0gA_2_2"></a><a id="Tc_uhbiuQwSNEK-SlsZEsaJHQ_2_5"></a><a id="Tc_14PD1AtE7EW2wjC2Ak8IQA_3_0"></a><a id="Tc_Xww1jXC_gEaEhOp4tbXbzA_4_0"></a><a id="Tc_yIAZTWfLtUuVuCuppVJ1Yg_5_0"></a><a id="Tc_vIyqjsEGfU6jxhjCb-o1CA_5_2"></a><a id="Tc_bC3jPTehbkmcX7pLJ5XdYQ_5_5"></a><a id="Tc_RE8tQfbzvEy2AbEY5-jkRw_6_0"></a><a id="Tc_2TlXI_BWjEeqvOkV-a9WmQ_7_0"></a><a id="Tc_9PUHfAP-PEO7bOpIGke1kQ_8_0"></a><a id="Tc_5lci2I3iFUy5Hy6m4mlIOA_9_0"></a><a id="Tc_ryBJqrK40EeYjRNxmBDJcQ_10_0"></a><a id="Tc_s96qx0r91E6kxvqPrRTY9Q_11_0"></a><a id="Tc_M-k-sDmvB02ediF97gR9TQ_12_0"></a><a id="Tc_YEidEKox-UCmAtlAxr2pRA_13_0"></a><a id="Tc_KqKUbuvYgUWs2YfIjPRjYA_14_0"></a><a id="Tc_bkJJYwutRkyZUo0ZkSCr5A_15_0"></a><a id="Tc_2kscpFNDMkOrM1Xbm2oYNw_16_0"></a><a id="Tc_TGy-BeWMW0CpZqN16hcFXQ_17_0"></a><a id="Tc_u0W50FREeEuiK6ySQPE1ow_17_2"></a><a id="Tc_f1QR4s58w0-u67AUIlj9sA_17_5"></a><a id="Tc_OK9g7tSuzEiBXBWWJMDCjA_18_0"></a><a id="Tc_IpQENyd9UU6pCl8VXPTQbQ_19_0"></a><a id="Tc_UsymI4pbi0yGlqJ7G9aTbg_20_0"></a><a id="Tc_4cwQwW2dl0CgZcO2x2ykJQ_20_2"></a><a id="Tc_Fj4xqjYLKU60VXDPNqHwMQ_20_5"></a><a id="Tc_klPWZcr7okiWgsIPqq8QZw_21_0"></a><a id="Tc_Bi7cUnds0EG-nN9LAIff_g_22_0"></a><a id="Tc_stynFbmlKEiJ-Z4x0RNL_w_23_0"></a><a id="Tc_31KoRP6aQUeYsCOMiwf9Fw_24_0"></a><a id="Tc_Rzqg4LTPT0isRnkcLhX4Yw_25_0"></a><a id="Tc_7U_0SCD1N0WLr6kaZ40BFg_26_0"></a><a id="Tc_5lLPO3udFEetznhoRVRLuw_27_0"></a><a id="Tc_YR-gNbyF1EeHORYC3Pigxg_28_0"></a><a id="Tc_sUYZ73vPZUqHOWgOJ8G__A_29_0"></a><a id="Tc_FhofVXcXwU6p_SD6cQU07w_30_0"></a><a id="Tc_uel7TTgg2k-hLc-hAT2P9g_31_0"></a><a id="Tc_zgoH8mC930inCnsWv2zEMA_32_0"></a><a id="Tc_ZOwerVn5KUW2mQI6o1w0gg_33_0"></a><a id="Tc_8fAhSQMzLkSriHrLWJcuKg_34_0"></a><a id="Tc_z1VvAJjHREmwcOeGg4LvtA_35_0"></a><a id="Tc_SXsn-qUeOke5cFmu_b9PXA_36_0"></a><a id="Tc__vPTecHl80OpKwVYIpX4mA_37_0"></a><a id="Tc_kVNv6bwPdkq_Co5J3MTegA_38_0"></a><a id="Tc_jqMqNTdc_kOGfyTk8IJXXQ_39_0"></a><a id="Tc_p65OVnS3zEytj_u-kvQa4w_39_2"></a><a id="Tc_5xBFIIfNJUaBb5_AxEp5Uw_39_5"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.65%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td colspan="7" style="vertical-align:bottom;width:98.86%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSETS</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_WsMBfRzMikmISykIvIfd6Q_5_3">167,297</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_Y0c2tWhe10uIqPkVqhKHyg_5_6">185,595</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_iAxmlgeqL0Cc5bw15rRJDA_6_3">338,851</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_zDL2sEysJUGuEjeecUmcbQ_6_6">246,571</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accounts receivable, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_enYgMB6rQ0uuY74_5Kf58w_7_3">217,964</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_FiDUT_1IzEW021vcrVz7EA_7_6">169,773</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Inventories, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_AdYARwLYDk6vvW1f1dZPvg_8_3">306,482</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_Kad8ZaM81UefeZWiSCOHnw_8_6">242,406</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_BvqhvULvcEuFxkjABd1vlw_9_3">49,397</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_WRe_XkTZOUywJ546RX6dIg_9_6">33,300</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_Z_oyRgymOkOZ_o9pKvz3zA_10_3">1,079,991</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_1dNqWJLUOUO4zjqZfmz2yQ_10_6">877,645</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_oTE1tYb0OUSB62alyjMUpg_11_3">53,971</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_Ckqx4m196kak8w0MHXHc6A_11_6">39,664</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_EZrp9L9dkkmkN4lP1XBoMw_12_3">30,716</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_H3zUR7yG-E-G1AIqUuAvkg_12_6">12,146</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finance lease assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_4dLmUvMQo0-O6WiNrom-qQ_13_3">16,632</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_joxUOt4Urk-gS-dCiE0nxg_13_6">17,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsNoncurrent" scale="3" id="Tc_z6jiNFH1SkGICiyrOw0L3w_14_3">6,654</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsNoncurrent" scale="3" id="Tc_rPn-cJgw0kqfKTmESX3VQg_14_6">752</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_TsEmyu6AX0am_CvKEacOrw_15_3">53,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_CIc_tIzqOECZvE5EBkXf1w_15_6">31,701</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_mBsbHw3frEmnc6VgDOxIrA_16_3">40,575</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_KVGHkGY71EKvcwjsc4rklQ_16_6">33,791</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_kEkhQb_D5kOAQ-JqVYWzoA_17_3">1,281,967</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_Q0G1ZAG4zE2raK-s6owmBQ_17_6">1,013,641</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="7" style="vertical-align:bottom;width:98.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">LIABILITIES AND STOCKHOLDERS&#8217; EQUITY</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accounts payable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_2kxRnuChkU-fbukU-V1Ewg_20_3">54,400</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_FLoqek3cnkyMCfKnWbF5Lw_20_6">62,346</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accrued compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_lcijb25XFE6djFzsmqReCw_21_3">31,445</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_h-1V57PrHEu7t0zwtDT_CA_21_6">35,540</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Warranty</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_kg3YixMFx0KNM22gyC-i3Q_22_3">14,098</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_ZE3PgA-bEk2GtLRlKZkVLQ_22_6">8,299</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_UOAML0jSYkS1uTNDWUj5SQ_23_3">6,164</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_01rZqmvJuUSaK-NzjjUw_g_23_6">4,304</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityCurrent" scale="3" id="Tc_yDlyhDaEtk2EroQPHU3fIw_24_3">164,677</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityCurrent" scale="3" id="Tc_Q3HA_oUHZUCxUe9FhkFeUA_24_6">123,471</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Current portion of finance lease obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_SVsSx3p1806HgPL_ubcdCg_25_3">1,511</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_LQTXXL-dV0KwJr9akcm0Og_25_6">1,229</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesCurrent" scale="3" id="Tc_-s6RLUWICkOmlmr08tgFqA_26_3">12,834</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesCurrent" scale="3" id="Tc_-R9CX9CnYUad1ATut_rlTw_26_6">12,943</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_bQ9eSy4cYEWvCVKyWwLHHQ_27_3">285,129</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_emdFRuH6XkOKBmmOgOCwTA_27_6">248,132</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term finance lease obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_C_zgG9r34Eu53rEAqIJaHA_28_3">43,674</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_pHyWmbZT7UCNL4kWm2_p5Q_28_6">45,185</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityNoncurrent" scale="3" id="Tc_aAx6r9HEx0mjtlnPAwW7RA_29_3">46,208</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityNoncurrent" scale="3" id="Tc_q-o6YfnfskimLwXF4soidQ_29_6">31,306</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other long-term liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_d0--RP018Eu2Dw_GM2cqPg_30_3">42,074</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_WeJTRit_-Ei_dWBzxnNJLA_30_6">21,762</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_98dKdSffS0a7DXYR02W_TA_31_3">417,085</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_0iH0xpMd-E2Pzh1qRzV2rg_31_6">346,385</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Commitments and contingencies (Note&#160;16)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders&#8217; equity:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Common stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_ukBsf_qYsk-QVejcYJaOqw"><ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_mC9L8Nk8akasSsSKtu50pw">0.001</ix:nonFraction></ix:nonFraction> par value, <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="3" id="Narr_3qVvkoTRgEKu8E-v5bGjQQ"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="3" id="Narr_AXTi9faETk2I83ObM5QOzA">75,000</ix:nonFraction></ix:nonFraction> shares authorized; <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="3" id="Narr_9J4H5adl2EGP6uPg1T_Clw">32,685</ix:nonFraction> shares issued and <span style="-sec-ix-hidden:Hidden_anCz2TIc-0WfgFdz1LK9Aw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">outstanding</span></span> at December 31, 2023; <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="3" id="Narr_aEGH9IbMs02YVDCdVKcs1A">32,775</ix:nonFraction> shares issued and <span style="-sec-ix-hidden:Hidden_y4iAAkQixEqXhH4rkQdrXQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">outstanding</span></span> at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValueOutstanding" scale="3" id="Tc_LPQSmqdGEU2khSg3bp77zw_34_3">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValueOutstanding" scale="3" id="Tc_h5WBUXO2fUKiAP2J_jtZzg_34_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapital" scale="3" id="Tc_fkqGbh81MEuo96Na-zn0-g_35_3">547,189</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapital" scale="3" id="Tc_hWpNqioGd0KrA0wngOPRhQ_35_6">550,299</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Retained earnings</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" scale="3" id="Tc_rFC8B93PZkWdzRk120k3PA_36_3">319,506</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" scale="3" id="Tc_QSEFY9oF2ketR46EPlWPgw_36_6">118,892</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accumulated other comprehensive loss</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_br5CjPRBSEiUQSg8EU7Dew_37_3">1,846</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_h3DnytopU0iBLyVCU8JrSA_37_6">1,968</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total stockholders&#8217; equity</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_mxdrLs8IQkO-GpGcQ0hOjA_38_3">864,882</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_t9KsqLMXsUiRv8CFh3LanA_38_6">667,256</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total liabilities and stockholders&#8217; equity</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_MdsH9bP0rE2h7BnOk-V-Ng_39_3">1,281,967</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_GWii2b_QkUqzXdZH7yuGfQ_39_6">1,013,641</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">9</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_contentSection_06757861_c75f_449f_a2dd_"></a><a id="_6b9fb875_83ad_4815_814f_23301a552e7a"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="StatementsofStockholdersEquity_804831"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_f1f9239d_5d93_4971_abfc_545262dfba19"></a><a id="Tc_kxrOobXWqk6fmOywohl6mg_1_11"></a><a id="Tc_0e9CgrLUbkiUwSyDckMLZg_1_14"></a><a id="Tc_bXKeqrOH_ESjyhgrfGYD5Q_2_8"></a><a id="Tc_wLubye7ANEy8-VK2BjSEeA_2_11"></a><a id="Tc_Et9-au5ii0qy85Txct1obQ_2_14"></a><a id="Tc_ukyLfyNZAUOKveadxuGGTg_2_17"></a><a id="Tc_Hk41d_kbMUyf51BEUSWvxQ_3_3"></a><a id="Tc_e5H9s1GoIUimMwxQnXPxug_3_8"></a><a id="Tc_Yl-9asB-Nk-6LeteOU_Y6w_3_11"></a><a id="Tc_Okng-5cYk0mqLWnBUxwPgw_3_14"></a><a id="Tc_eK7GV2_yTUCE35MO_XkkeQ_3_17"></a><a id="Tc_31wsaw8VzEyEm1DmnhZtUw_4_3"></a><a id="Tc_k40bbK4-50eDSRT6VTEowA_4_5"></a><a id="Tc_PbcYuD17TU277YxsQ4OC7w_4_8"></a><a id="Tc_SetytStiKkqBR5GLUM_r-A_4_11"></a><a id="Tc_6pRKfoFP8k2APR0SF3Pa6g_4_14"></a><a id="Tc_Pxx6L0FfTkS3mAJAM-71ng_4_17"></a><a id="Tc_XvYHjESx4ECo0e-mZAccPw_5_0"></a><a id="Tc_Lm18biGSHU-Z4LP57gdfhQ_5_5"></a><a id="Tc_nEHSMdl1UUy2kpPWfFApCQ_5_8"></a><a id="Tc_ExhD2HOMakmbsGFg-OrynA_5_11"></a><a id="Tc_IVXP_BoUC0qOaHSZWu_9rQ_5_14"></a><a id="Tc_rUARxDfhRUSNdlMLBhRh7Q_5_17"></a><a id="Tc__qlSyqwVKEGRfJ3kYDOy6A_6_0"></a><a id="Tc_uNbUWUDDSEievbLGwa59yw_6_3"></a><a id="Tc_KdW4_Pk6aEScone4K3XtRw_6_6"></a><a id="Tc_G5g_e4tp4Umx4_0FcIGGeQ_6_9"></a><a id="Tc_Dx-Scacqv0qlxIq9rPzarw_6_15"></a><a id="Tc_w7KaocVDeEO0ilbStUAEDQ_7_0"></a><a id="Tc_vg7jLJMG_0yq-IHLHUJA1g_7_3"></a><a id="Tc_n8s7BXMFhEyqkmaFZ6bPiQ_7_6"></a><a id="Tc_IUTX6LlSPUSBxzBoAh8WVQ_7_9"></a><a id="Tc_ZQ0Z87497Ui47HK52hjI6w_7_12"></a><a id="Tc_u3Qm7SYNi0GX7SY3q4VqBA_8_0"></a><a id="Tc_vSyLtb3bMkGRS7goO7XFfA_8_3"></a><a id="Tc_9wRUr0ljeUy8KnkzG5IgfA_8_6"></a><a id="Tc_S-TE3EZii0SE36UjeuqlXA_8_9"></a><a id="Tc_M_O0noMY5kWM5tCYhSm6jQ_8_12"></a><a id="Tc_KbHGWC2HvUmF9eZvxYAyTw_9_0"></a><a id="Tc_AUXP6Yz3xEy0Z2DUTKF1Lg_9_6"></a><a id="Tc_Tjz5IPIn_keAq61HdnMd8A_9_12"></a><a id="Tc_QLrBYlL7XEKK_mTtsy8Xfw_9_15"></a><a id="Tc_09Ihf8Feyk2Sk48JxHCHLA_10_0"></a><a id="Tc_FPSEgZmSl0Wos1FDIl4Neg_10_6"></a><a id="Tc_QydgibYpwUqrTw-fwV8_ww_10_12"></a><a id="Tc_o1I3ee60K06RiLnOfajTTw_10_15"></a><a id="Tc_n6-orro6s0KN1lAs9VG-_A_11_0"></a><a id="Tc_AiuIiCLjdE2OeL2T1RiBag_11_6"></a><a id="Tc_TaiuZi4__UWOYtgK-SI6kQ_11_12"></a><a id="Tc_qzgGjyrEzEqfaoK1nVH5TA_11_15"></a><a id="Tc_W5VmAGY06kmc9WOkMBg7QQ_12_0"></a><a id="Tc_NtWvUzIVdkWlnUhm124A-w_12_3"></a><a id="Tc_p_fiyxORBkSa34CVO8omwQ_12_6"></a><a id="Tc_WTiQ56DV2kyG7Li9jQUo7w_12_12"></a><a id="Tc_GV-B00PLcUa3HBPmHns3Hg_12_15"></a><a id="Tc_ZQTuR-1xtkODAtM8nPme9A_13_0"></a><a id="Tc_749c5rKXq0u6lYnVWJxKjQ_13_15"></a><a id="Tc_ROi9yBwd6EKHWKfSpVOY7g_14_0"></a><a id="Tc_9Y6HlrHKrUySb2zOhAo2cg_15_0"></a><a id="Tc_5barNRLsNE-veYwPmdTpKQ_15_3"></a><a id="Tc_9E0ugox2q0m_CzrJedfWog_15_6"></a><a id="Tc_OW2Sptg-dEKxD0jQWUuqOw_15_9"></a><a id="Tc_gbSXw4xG40OoSDwnk7pKmw_15_15"></a><a id="Tc_ul71IOMHeECGZPCNSo9Q9A_16_0"></a><a id="Tc_uOygv-OpyUW9_cfvqDP8JA_16_3"></a><a id="Tc_0cEkq_tGpkuYE6eU7l09LA_16_6"></a><a id="Tc_Xqep1dbBHkmtzTQeKSqQ4w_16_9"></a><a id="Tc_HuZvcdHnMUC50YHK9kx3QQ_16_12"></a><a id="Tc_CxFKEK33iU623a0C1ieNVg_17_0"></a><a id="Tc_s7bVCx4UXEGFdGjPdcSKeQ_17_3"></a><a id="Tc_y7hXhzXaAkGwbyFT5PHFSA_17_6"></a><a id="Tc_H3ygH5IJjkGYu-CW0_udsQ_17_9"></a><a id="Tc_xS4zaEECU0mXkwHfX9pN7A_17_12"></a><a id="Tc_vPQ_qkM1lE-KSZyGRulVpQ_18_0"></a><a id="Tc_na3niD449kK5V6S91FZW8Q_18_6"></a><a id="Tc_Ikgij4Hyq0SJH9U2NyCl1g_18_12"></a><a id="Tc_qcc4Lcld30mK_LuTkIGBRA_18_15"></a><a id="Tc_FgFEKgCQBk2eIUkqGq3b-g_19_0"></a><a id="Tc_ZdrRY9qJdEeq7tcvk7tVXQ_19_6"></a><a id="Tc_V2nEH1MRk0K0J1wgyVfDyw_19_12"></a><a id="Tc_m64dnz2eokSg36eU79snvA_19_15"></a><a id="Tc_0pI56I12W026H65tipK8HA_20_0"></a><a id="Tc_eAo1s2bOUkC1mCLvTpezGg_20_6"></a><a id="Tc_IALCaUdsBUKVOXun9VRl2g_20_12"></a><a id="Tc_aNpfY12zj0GPv-lKr-puJA_20_15"></a><a id="Tc_4muHZtD-GUCIkJbCOoXL_A_21_0"></a><a id="Tc_pi0wMHgVOk6ZnbG3vmGymw_21_3"></a><a id="Tc_0CGKOm0uHk6dnNBRZTZUgw_21_6"></a><a id="Tc_3edULqR6MkySj2xkvFAssw_21_12"></a><a id="Tc_8hZs-ZQoV0CBN8Z2AIyjFw_21_15"></a><a id="Tc_62kQ4DdeC0mMpT74n7pCWg_22_0"></a><a id="Tc_4tk7eSPGPEq787dCmiBSgg_22_6"></a><a id="Tc_oMobqhKRNUSTQ_QlGGTU5g_22_15"></a><a id="Tc_L3VDulLpskuNCqul-0PVYA_23_0"></a><a id="Tc_wcGxI1aQOkSFP_9xeYevEA_24_0"></a><a id="Tc_772gQOWNjE6g-d5USRwtXw_24_3"></a><a id="Tc_zXD8wP5GM0y_84xN7gnL8g_24_6"></a><a id="Tc_vWG0k_z180KO2sGksoUGBw_24_9"></a><a id="Tc_kFbYABzgJESK58vI-1IefA_24_15"></a><a id="Tc_udzbDbwm80qYkD_SQZWG6g_25_0"></a><a id="Tc_H89nPevk8UqMCDGRZfkHzw_25_3"></a><a id="Tc_VmxkuCmT6UiB9qcOEZxElw_25_6"></a><a id="Tc_MD98KBUFUEunYexZLnFJ3A_25_9"></a><a id="Tc_nBYzX49oS0Gx8gpvsjIesg_25_12"></a><a id="Tc_lvuMcs4NaU6mFrBzDHqDwg_26_0"></a><a id="Tc_6SaByKxeW0WyZYkw9MCxfw_26_3"></a><a id="Tc_9y58xGyMg0Op57lW-meJcA_26_6"></a><a id="Tc_FcIbaAYgQ0-OOQ4IhysyEg_26_9"></a><a id="Tc_XaTmiX2Zu0Octet0wiAXFw_26_12"></a><a id="Tc_TfJg-C7UFk2vpMfeopfmhQ_27_0"></a><a id="Tc_QHgoKslyvkCCrlDitAWDZg_27_6"></a><a id="Tc_e8BXiR5VUkOoMQIwJjEfrQ_27_12"></a><a id="Tc_ovSAyphN-0qzGyMchEdjew_27_15"></a><a id="Tc_oijGFotMl0-Jl-oh2c_dBA_28_0"></a><a id="Tc_oO2XwHFmrka-4VAkPtNMQA_28_6"></a><a id="Tc_yLRznEgW-0SDrJKPj-fBrw_28_12"></a><a id="Tc_QIMmwkbX4kmwLYUZHSW-0Q_28_15"></a><a id="Tc_tSJEVrCp00G0it4j23CACg_29_0"></a><a id="Tc_1oCM9uME1ky7Uf9RkN2yug_29_6"></a><a id="Tc_QScU6E8eB0ywFT46evbA9Q_29_12"></a><a id="Tc_yIzw59TN1Eu-qvDYHj7rCw_29_15"></a><a id="Tc_rLeNjA3RuUmlgHhnAIpfUg_30_0"></a><a id="Tc_YHC6e4I4D0u43qai64keTg_30_3"></a><a id="Tc_7XtMXNRLMkG0vj4Z0B8lrw_30_6"></a><a id="Tc_Qb-pu3kiYUep3B7knF6wEA_30_12"></a><a id="Tc_K_N5u3b2wkaXK9U7c0KCjA_30_15"></a><a id="Tc_FZ_Lbq2QHE2cpgAKIp3iKw_31_0"></a><a id="Tc_sRiN4bLxkEOEo4rvkOq2TA_31_6"></a><a id="Tc_x4js0JEU0UaRz6ogq851-w_31_15"></a><a id="Tc_Hn_xMGBVPUmVTNtULgQsmA_32_0"></a><a id="Tc_DhdYjuEPGk6XZtL0l4F6gA_32_5"></a><a id="Tc_roJfpTX_nkuZuAEZM6w4Fg_32_8"></a><a id="Tc_EqnIHlUBuEGwoeXHYeqXug_32_11"></a><a id="Tc_ga3WbquwA0yh9NVFqvjjTg_32_14"></a><a id="Tc_mwXgtzZe20eP2tHVtJGcfw_32_17"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:106.3%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit /</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Retained</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Stockholders&#8217;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:5.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Earnings</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income&#160;(Loss)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2020</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_eun1OmHuJ0GAaXO_xykh2A_5_3">33,633</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_3MIAx9JVRk-2l2Ob0zXs9g_5_6">34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_eBavN9PHeUuERox8GtAOSA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_9bPrKrbLskiVZidb4ocbaA_5_9">570,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_Lgnhf3xLCEGYzqAk3hvIQw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_Ma5MMxsKy0mWlCt5e6_fMw_5_12">91,969</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UelRMQl0h0KQ-w3QHBxk5w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_8yvI_bRgek21UDWrWseuaQ_5_15">3,435</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_HSvz-3t5jE-9D0H-eq6LrQ_5_18">481,602</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_pGtjlTQjXUOKpNmoiDAVzg_6_12">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_KVSpWN3TGEiuWNGG43HkRg_6_18">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_BgWcQBNehUGHA0bi_TrWMw_7_15">1,881</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_HeVVVGU0OEuDm_JM_HJYKQ_7_18">1,881</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Change in pension obligation, net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_RJ2FlM5EV0ylJN8k_sFjPw_8_15">211</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_7QTNEuXQak6Tqoi2wK5TBA_8_18">211</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercise of stock options</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_yrnCp2q7ekq_I_t-Y5JnBQ_9_3">396</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_j7vNVlX9OEebshozp_mQjw_9_9">3,687</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_45o0PEmUR0aSUpVWgUnLkg_9_18">3,687</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of stock under Employee Stock Purchase Plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_1y_vaZxRcEaUDZDOOescIA_10_3">26</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_93gPs7WXF0Oq5yP2CgTsRA_10_9">1,179</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_IQnZSCFrCkSk-co3XYBG2g_10_18">1,179</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of restricted common shares</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_sU7POqPOVEa1GKhPX_C7ig_11_3">326</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_oQT-SYCUpkuadbmS0T7OMA_11_9">6,564</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_xSmYMmFtykqNmWPPCAtC7w_11_18">6,564</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_Z-kIQ-4xSky129D1cCVqJQ_12_9">12,067</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_HLa4tKEmFUOuBDAt9vgUtQ_12_18">12,067</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_QQpxbZQsN0qlcaCgTHrqug_13_3">1,141</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_xBJpsail5kiAdhuS3B1h0Q_13_6">1</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_xoqEwD2_K0mZLC9YqjowsA_13_9">20,588</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_6F-1R1cRmUWEcgVVd7HGMQ_13_12">29,403</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_g4nZdlUjKku__QvL0dvKPw_13_18">49,992</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_OqWxzWXX8kih9qm9o2NJew_14_3">33,240</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_CzWiWxYP9UC8I0FSfliL_Q_14_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_EBneyNXtHUGp6uxp51hi_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_0qD3IxidpkeWR1uqZ_ek3w_14_9">559,883</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_lBvELhaCnUmktQXJBN6FVQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_0PCRL72BQUukanIMy67q6A_14_12">22,722</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1vzZGp7IfUeAUTS7-QsIMw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_tGzYj_22t0K2bVEKNkaMWQ_14_15">1,765</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_3oub_Z6z-E2JmcgSUrGiFA_14_18">538,959</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_9f-tHtmzGEasYggM_qQgRQ_15_12">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_Ph-zyRdsGEC8JUJGBh1F8g_15_18">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_thpP2E6ZE0-1JZ7HNA3wTg_16_15">4,058</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_S8GkJI7EEEWOiiUD6AmqXw_16_18">4,058</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Change in pension obligation, net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_tPRpyvdMSkKxIPl26LxlOA_17_15">325</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_4OYofH9V60e9G7VFC1j2WQ_17_18">325</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercise of stock options</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc__ktYnFlgSUG07sbUxjRjlg_18_3">103</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_U92RrQMAT0Kj1KbOV0Sxrg_18_9">1,247</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_TxxCSjI3PkKiCBdV7im-TA_18_18">1,247</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of stock under Employee Stock Purchase Plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_baDzkYudykuebYfnnB8_-A_19_3">29</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_NzRU7TDoJU-cM8hkKAo-NQ_19_9">1,662</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_mTRjp1qk2E2G6KtWgOrbnw_19_18">1,662</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of restricted common shares</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_qTH6sf_S1U-UKVlYZ1C2aQ_20_3">291</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_34LMz_ESd0a2BzFUtFggSw_20_9">9,907</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_mb9JqkrxiUOxCEU8JUhfSQ_20_18">9,907</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_VNqRsixw2ka5Az44Ah9-Qw_21_9">13,444</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_oS8VJOjULUuzojtyHZGUZA_21_18">13,444</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_bHV14FvSp02IJ5AiMMkhkw_22_3">888</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_OF8AMNR5SUSJSzmIodDBbw_22_9">16,030</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_dtoGvmlJVUyIt2dV_Rw2og_22_12">41,465</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_S7m46ntTEUK6maQ8FgQtDQ_22_18">57,495</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_B-SK1AnYN0uZUcFVu2QFcg_23_3">32,775</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_MZJI6i-ZkUuFCtN3W3na9w_23_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d27L0mnm8E6o0EBrLLjx4Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_IXA1nVqU802eGiu74t0qQA_23_9">550,299</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_V5F4suYLbkumL7sSh8HPjg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_kWN9T6J6Lk-UHZ-JOC8uKg_23_12">118,892</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kkl8hIe8Z0WWHl_h4FC_PA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_hwOmbAgtWEylXOqsBvjVjw_23_15">1,968</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc__XCrDtJwDESZ0zmVideM-A_23_18">667,256</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc__aJQBJQ_K0SLFyWpvXNAPg_24_12">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_GxMBTS939UGxi-b4NntmKA_24_18">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_kz489mg3zka6HEKYb6XWMw_25_15">38</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_sOLzZjFip0aFigFHyei08w_25_18">38</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Change in pension obligation, net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_Lw1EnttI20uzBblvgZw8qw_26_15">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_rjFIeIScRUW2du4F5HsD-g_26_18">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercise of stock options</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_ywQfp30MfEi1JfcUKYmv7g_27_3">3</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_t66vmxlcOku9-j9YaLJe3g_27_9">25</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_JjCnXtyL80CAAiQyKjVrOg_27_18">25</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of stock under Employee Stock Purchase Plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_5Lw5GUWHKEK097qqqB1Sug_28_3">16</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_tCTzQhwwzkunoQB4x5hzgw_28_9">2,057</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_QK_Jqr49Xke3gHHML1K6Lw_28_18">2,057</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Issuance of restricted common shares</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_Ot5knHhUYUqHkd1YKdXioA_29_3">271</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_nI83hwT4t0iBda6s3M1eaA_29_9">16,611</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_Qmxyeigw9UqVewtGAgPSbw_29_18">16,611</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_zG7_3W4rn02z0S9qgBkR4A_30_9">18,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_oiZSSB5st0Ghwq_bo6QKqA_30_18">18,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_x1R8yrtT3UO2nCVH0E9mDA_31_3">380</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_ILeV3IyLAUKtDW1pY9W_8g_31_9">6,850</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_AZjQvYrx6USCybmJ1tIv2g_31_12">45,649</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_mu8DwFKEkkaKt-CD8rRtbw_31_18">52,499</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:41.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_EcNbW3lPMkSbf8sCqsuQZA_32_3">32,685</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_GH9jzTcd8kW-uNYnBpQswg_32_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_01MGxzKcEUWC9Vo419xZWg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_0ygAAz-LhkOJCyBQ9LJpFQ_32_9">547,189</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.07%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_aK2DEoB7_Eu88P7tq67wFQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_rNSzz4FUr0mJfRxZdLHjIw_32_12">319,506</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_hTJUKZ2N_0S-6GH-oOyPOQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_D7QD3lWudEWwikOnG745Lw_32_15">1,846</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_VULx9_54DUOV55d4BT2QMA_32_18">864,882</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">10</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_d2c249c0_6806_4bd9_a4c0_9bdae204213a"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="StatementsofCashFlow_454915"></a><a id="ConsolidatedStatementsofCashFlow_556249"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Cash Flow</b><b style="font-weight:bold;">s</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_e8e54cfc_5455_4c7f_95ec_e50d299f89ab"></a><a id="Tc_xEvdOna3hEGBUXVtYEP_gw_1_2"></a><a id="Tc_deLZMT-Kbkez70F4acBQ6g_2_2"></a><a id="Tc_HEt3eSIpMke-S_GcDRhFUA_3_2"></a><a id="Tc_PuDWJkYobkq-FmAA9jqrcg_3_5"></a><a id="Tc_57sBcQIhFUaRXUvEd6myeA_3_8"></a><a id="Tc_ndQUghnbZkOGNYPhB29G6A_4_0"></a><a id="Tc_98GSFZQ4QEC54L48FoujeA_5_0"></a><a id="Tc_pMzweOVnvUOJzF_susKqGg_5_2"></a><a id="Tc_0tBp1kMVgE2KPKnms27GoA_5_5"></a><a id="Tc_0MPoYZ6JLUCBjHJN_fWf0Q_5_8"></a><a id="Tc_eNe9Bvwn3kmDfKnmGc5Yhw_6_0"></a><a id="Tc_yrW9FNimZEao5HIqaBDPog_7_0"></a><a id="Tc_hwkrQDUyJEyF7eap3MekMA_8_0"></a><a id="Tc_NPlPPlf-ekqudlt7lOsVWg_9_0"></a><a id="Tc_MeenR3HO30mU9cLCehyCuw_10_0"></a><a id="Tc_S6PSvME2J0GDtO910QBBZQ_10_6"></a><a id="Tc_uS3xJULvWUWrGJGQ_KciEQ_10_9"></a><a id="Tc_m2EUZBRvgU6Gr2O53OMmLg_11_0"></a><a id="Tc_Xk_FaFDYOU6qy_uh1-JiDA_12_0"></a><a id="Tc_0IyqUe2Vskif3KWBvYsBWQ_12_6"></a><a id="Tc_xXYar8OPwEyrElNi8W58Pg_12_9"></a><a id="Tc_YuLYmJbv2EuscMGqwCeKxg_13_0"></a><a id="Tc_EKJoTONesEGgsh3nFbjOXw_13_9"></a><a id="Tc_G84GpkqoC0yRaHQ5aW86jA_14_0"></a><a id="Tc_XzwwrqoSbEWOoFYd85UT2g_15_0"></a><a id="Tc_U-Kt0TWhTESlAbUMCE-nWw_16_0"></a><a id="Tc_dgGIptqlnkqsQ5cXbP8Y_w_17_0"></a><a id="Tc_BTXzJ6j0WEORGF7DOSI8hQ_18_0"></a><a id="Tc_nlLk77TT9EikGZY175V3tg_19_0"></a><a id="Tc_Vy9Tc1yA9UGQ1TFiYfGyAw_20_0"></a><a id="Tc_u8Zy-81yNUaTnW8KdadLrg_21_0"></a><a id="Tc_G8gP3aNErEaGSc9y_vXFrw_22_0"></a><a id="Tc_qEro0Wg_uUOCRF6T7dRwwA_24_0"></a><a id="Tc_OI6oSU558E2R4IuQkZ6reA_25_0"></a><a id="Tc_u4FCwhyt0EOOXKiX0etjsg_26_0"></a><a id="Tc_uNXCoh68hEuMsCiVTIS6hA_26_9"></a><a id="Tc_yMdtheOo60K_XoEm4uYWUQ_27_0"></a><a id="Tc_GV4SqcagdUGA6tn5LNlPgQ_27_6"></a><a id="Tc__IQDYSuv-EaagSoPNm8rGA_27_9"></a><a id="Tc_jo2X04xI_kuj45FftIHTcw_28_0"></a><a id="Tc_k6H93ZKSKUaccMmFpm-JMQ_30_0"></a><a id="Tc_tumkJKuGqEmg3NuErAK62g_31_0"></a><a id="Tc_v9bSsDHbYEW1tWQSxfzIdw_32_0"></a><a id="Tc_Tu71Bmz3kUSJ-wXMulA9Bw_33_0"></a><a id="Tc_N4WFO6zpPUyi7JI3aWA7Vg_34_0"></a><a id="Tc_EMvSz2P-E0WO7l3GYkYAOg_35_0"></a><a id="Tc_yDT4jvS5u0qhqfWEs45ung_36_0"></a><a id="Tc_WYtJXVfqVUGlNdQTDWXozQ_38_0"></a><a id="Tc_yayhoaUnIUyhk9QjCJXT8A_39_0"></a><a id="Tc_8ruuJLPMV0-Jj4opaGNQSQ_41_0"></a><a id="Tc_dtZO5ByyuEKX57RWwjCb6A_42_0"></a><a id="Tc_sETYICZgF0-OX6hMdiwmfQ_42_2"></a><a id="Tc_NXITUW54B0mQWRWLA6Di9w_42_5"></a><a id="Tc_FKignXSseEW6virMkyyYIg_42_8"></a><a id="Tc_gayZmhy6Bk65QgkGYMvv3Q_44_0"></a><a id="Tc_TnCeqBWSQUSrTrdeXxfzBA_45_0"></a><a id="Tc_T4mUEd46ak2hAqNIDp6fVQ_46_0"></a><a id="Tc_BDxclYijskCvtnlNL2uGvg_46_2"></a><a id="Tc_QPQ1calqSkO6xm-odYyTnQ_46_5"></a><a id="Tc_zktyOm4ciUWTxH6hiI3tYQ_46_8"></a><a id="Tc_NY9VhMh6yUqgmyi0drOc5A_47_0"></a><a id="Tc_bqrx529tAEu09_oBxJhapA_47_2"></a><a id="Tc_alPGmyYciESp1jCsKG17AA_47_5"></a><a id="Tc_xwYzVnWMdkubqVpTgLnIHw_47_8"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Twelve&#160;months&#160;ended</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.41%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from operating activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_-Ff2eF7Md0-GpS_mBiHRiw_5_3">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_sccXheOiO0OGwAPEs69IJA_5_6">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_h8TpnsTQ7UCVnySc8AWWTA_5_9">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Adjustments to reconcile net income to net cash provided by operating activities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_chjJPzwlhEG8reGZA7NOAg_7_3">13,069</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_OC-wwhuUo0iPYTgJnm5BaQ_7_6">11,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_aqkbREjF_ki1DyGIEl5QsA_7_9">10,818</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_Jx7yFKnq9ki2jyuH3oRYuQ_8_3">20,018</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_6NwBeMajw0CLU5iVbp5--Q_8_6">8,536</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_AsquGJpgwkGK4xz_K7MMzQ_8_9">20,257</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_DKtmlPnbvkqrVrcDVbW-ow_9_3">18,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_0du8QlF9W0yZSKKGJh7cgQ_9_6">13,444</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_GjMVwiIgw0-9GG4lEOu5NA_9_9">12,067</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Provision for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProvisionForDoubtfulAccounts" scale="3" id="Tc_7GAbx6t_4kylyP9dE7K7kQ_10_3">1,129</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Provision for excess and obsolete inventory</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:ProvisionForExcessAndObsoleteInventory" scale="3" id="Tc_nITz1hg9xkqjGnudyPZV-A_11_3">5,211</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:ProvisionForExcessAndObsoleteInventory" scale="3" id="Tc_R616yrlvrkeVzE5CofkoIA_11_6">4,565</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:ProvisionForExcessAndObsoleteInventory" scale="3" id="Tc_TXrqQELMTUirnAXsEYz-ow_11_9">3,755</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Accretion of discounts and premiums on marketable securities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccretionAmortizationOfDiscountsAndPremiumsInvestments" scale="3" id="Tc_GUlMi4XDU0qmsKYODU2EGQ_12_3">12,077</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Currency loss on foreign denominated transactions</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ForeignCurrencyTransactionGainLossBeforeTax" sign="-" scale="3" id="Tc_EEQGHMTa4UiBYx_cwe93rg_13_3">2,252</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ForeignCurrencyTransactionGainLossBeforeTax" sign="-" scale="3" id="Tc_29RT8c7GkEmenyd7BoWOuA_13_6">5,986</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Changes in operating assets&#160;and liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Accounts receivable</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsReceivable" scale="3" id="Tc_RdGclzrj9k2I0HqRbpnuEQ_15_3">50,755</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsReceivable" scale="3" id="Tc_hADtj1vvNkWmH4wQhH7HiQ_15_6">67,270</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsReceivable" scale="3" id="Tc_MOJ024laD0KNpusWBfznQw_15_9">18,146</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc__PX2Llf9IUunxqh6BlfAFg_16_3">69,957</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_UcQSKOfOzU2hqu05xXWpfQ_16_6">58,433</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_DRMiyQjL3kieGx3vtpFmng_16_9">39,023</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_MbuXgKOjmEaQOzO64lnY6w_17_3">16,046</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_YoqHM3lnEUaMa6CLlf-mfg_17_6">6,533</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_5AvOJMxt_UC35rqVrXLiVQ_17_9">3,955</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Accounts payable and other current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" sign="-" scale="3" id="Tc_25FtXU3uS0iaF5J2aPaujA_18_3">8,103</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_6UX1e2ghzUyUszcdZwG29g_18_6">31,392</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_FNK7kDAMRkarAUgsFjfUBg_18_9">22,046</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" scale="3" id="Tc_AivsPEtvsUeVYg-7RHgv1w_19_3">56,183</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" scale="3" id="Tc_iLXyDlbl-k6jzfwa0T8NbA_19_6">86,366</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" scale="3" id="Tc_ibPwUO2EYEa6j9vywHPCtA_19_9">45,385</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable" scale="3" id="Tc_4gmXpQLw30SPc9ENMohk9Q_20_3">3,786</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable" scale="3" id="Tc_7w1PHaGHi0aP43BtjhvdIQ_20_6">3,493</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable" scale="3" id="Tc_eApEbKexJ0ezt5AK2DkBGA_20_9">253</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Other assets and liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" scale="3" id="Tc_yXQCFWsGMEKcVxy_Tf1_8g_21_3">12,337</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" scale="3" id="Tc_b2to52XGRkixSWNZTxr4yA_21_6">625</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" scale="3" id="Tc_E81goEHJv0u7LvGYnzD9bw_21_9">1,917</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash provided by operating activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_wbQrcpEpp0-w7DP2xsdtag_22_3">156,869</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_-9aJUXy5-EKIxKblq-DVjg_22_6">215,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_as4oeN11F0SpzG_xHlqNHg_22_9">150,190</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from investing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Expenditures for property, plant and equipment and capitalized software</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_PgB8vJ2Gokq7-nmWuBU1xA_25_3">20,656</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_VkZWilTiN0mh_7c3O5j34Q_25_6">10,683</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_FVo1rcJKLk6paNl_iXey_Q_25_9">8,718</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Purchase of short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireShortTermInvestments" scale="3" id="Tc_3erQsb2eAU-GORtQOR3kww_26_3">388,809</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquireShortTermInvestments" scale="3" id="Tc_0CThpMbZukS0NL_S6RIXLg_26_6">246,571</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Maturities of short-term investments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" scale="3" id="Tc_56RPgmp1r02GzgvWuQ28ZA_27_3">308,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash used in investing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_THiIR5DWLESjLQ6Q_ru1qg_28_3">100,858</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_olGTS6c-XkavlQ5WDAZi5A_28_6">257,254</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_WTcuJ-KBB0aAbP49wUBDJQ_28_9">8,718</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from financing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Net settlement on restricted stock grants</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:NetSettlementOnRestrictedStockGrants" sign="-" scale="3" id="Tc_RKT1T7W7oUmcpxNKX3qyLQ_31_3">16,611</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:NetSettlementOnRestrictedStockGrants" sign="-" scale="3" id="Tc_X9uk9Q1-lECBZUYXId2RkA_31_6">9,907</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:NetSettlementOnRestrictedStockGrants" sign="-" scale="3" id="Tc_RPfi82-RR0-noryiASh8-g_31_9">6,564</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForRepurchaseOfCommonStock" scale="3" id="Tc_kqMwKzUkekaFv3KqkIxXXw_32_3">52,499</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForRepurchaseOfCommonStock" scale="3" id="Tc_tJMBKZPSm0qBjrykJ8a0BQ_32_6">57,495</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForRepurchaseOfCommonStock" scale="3" id="Tc_Ks4tHdosNEqqSzSFvj-3QQ_32_9">49,992</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Proceeds from Employee Stock Purchase Plan purchases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockPlans" scale="3" id="Tc_Qs2XwHSGsUOAcu1Ggtpa9Q_33_3">2,057</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockPlans" scale="3" id="Tc_aV8FDOWkfESVGt2gq6xfLg_33_6">1,662</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockPlans" scale="3" id="Tc_-s5TBwqiH0SCLUOmcxebXA_33_9">1,179</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Principal payments on finance lease obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_AgeRuHw2HEehlGsJETQf3Q_34_3">1,240</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_MTMhQMdt_Eaz8_b_1BFIAQ_34_6">987</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_4Q2YRK_ZbE-W8sUWGNXuQA_34_9">763</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Proceeds from exercise of stock options</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_wu_jbAmwYky5fBib_NTpIQ_35_3">25</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_JH-Nx6tvx0WYDIOarYy5sA_35_6">1,247</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_QDixxhhXZkWj9HYPoNbBRw_35_9">3,687</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash used in financing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_F2CXfWmR-0OfI8SMbZSgVg_36_3">68,268</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_KnJc5-m_y0SDYECMFDaqnA_36_6">65,480</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_k_f6xJHlOUK-qJSk1LIV_w_36_9">52,453</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of exchange rate changes on cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" sign="-" scale="3" id="Tc_8QvAFHx60kqv2kyKWZsqhw_38_3">139</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" sign="-" scale="3" id="Tc_ozhyJOknPUuQIU6JsWhcWQ_38_6">2,206</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" scale="3" id="Tc_7Qzmul4eTEadANYw9ym2hQ_38_9">2,429</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net (decrease) increase in cash, cash equivalents and restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" sign="-" scale="3" id="Tc_e_pb9mARDEyQAv7OWsOTrA_39_3">12,396</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" sign="-" scale="3" id="Tc_N5g7rtKmH0GOh2ILTOlT1A_39_6">109,333</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" scale="3" id="Tc_hlMvYEYRfk2hBcH1uiI-pg_39_9">91,448</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash, cash equivalents and restricted cash at beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_mXhR6gz3I0OMeeMcHTuutw_41_3">186,347</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_pVqqQJ8zDU2m5E-fqYT0pw_41_6">295,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_pYSs1gZDSkKpaV6TemEquA_41_9">204,232</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash, cash equivalents and restricted cash at end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_qLPtIOwgOUGmLuEw188R6w_42_3">173,951</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_RLQqvV9fJEK_TasNXhEACw_42_6">186,347</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_1kj2T07jWkSnd8ojtAS1XQ_42_9">295,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Supplemental disclosure of cash flow information</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash paid for:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_MiJ714ox7UO2c9zNdbd9WQ_46_3">54,217</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_4nRfH0BmLkm66DUUph3qeA_46_6">10,763</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxesPaidNet" scale="3" id="Tc_xF0EX4k4xEOmU9qnzJUelw_46_9">1,500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Interest</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_b0gisqBYKUCZzjCloVVgcg_47_3">4,874</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_ICLRrLbkc02pkrKboK83Fg_47_6">4,992</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestPaidNet" scale="3" id="Tc_cYfcPRPiv0KKhUZv3UreMw_47_9">5,086</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">11</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="NotestoConsolidatedFinancialStatements_7"></a><a id="NotestoConsolidatedFinancialStatements_5"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" id="Tb_6nfTmv8qv0qGDsEan6I4qg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;1. Nature of Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis Technologies,&#160;Inc. (&#8220;Axcelis&#8221; or the &#8220;Company&#8221;) was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition to equipment, we provide extensive aftermarket lifecycle products and services, including spare parts, equipment upgrades, maintenance services and customer training.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:SignificantAccountingPoliciesTextBlock" id="Tb_0FCu4g3290qWL7Jmrjwpww" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;2. Summary of Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in the footnotes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy" id="Tb_txqWR8_qzEaOg-YAKRiTBw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basis of Presentation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying consolidated financial statements include the consolidated accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Events occurring subsequent to December 31, 2023 have been evaluated for potential recognition or disclosure in the consolidated financial statements.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:UseOfEstimates" id="Tb_L2ULEv87lkqTfaq9xl2OtQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Use of Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, the realizable value of accounts receivable and inventories, warranty reserves, valuing stock-based compensation instruments and reserves relating to tax assets and liabilities. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" id="Tb_MH5wr6nRak2RwFdeEP1Kaw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Foreign Currency</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders&#8217; equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the years ended December 31, 2023, 2022, and 2021, we had foreign exchange losses of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ForeignCurrencyTransactionGainLossRealized" sign="-" scale="6" id="Narr_dpjRE3-RsEuFzEFZ8DG2bg">0.5</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ForeignCurrencyTransactionGainLossRealized" sign="-" scale="6" id="Narr_sAyQABxHukK381FipPmDUA">6.6</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ForeignCurrencyTransactionGainLossRealized" sign="-" scale="6" id="Narr__ubvQ2TgPESjdO9lRdNj3A">2.5</ix:nonFraction> million, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" id="Tb_5W7dy25xPUCe3gdxLHWR-Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash, Cash Equivalents and Short-term Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market funds, U.S. Government and Agency Securities and deposit accounts. Cash equivalents are carried on the balance sheet at fair market value. Short-term investments are h<span style="background:#ffffff;">ighly liquid investments with original maturities of greater than 90 days but less than one year from date of purchase and are carried on the balance sheet at amortized cost. Our short-term investments consist primarily of U.S. Government and Agency securities and are classified as held-to-maturity based on our positive intent and ability to hold the securities to maturity. Income related to these securities is recorded in interest income in the Consolidated Statements of&#160;Operations</span>.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">12</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont1" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont2"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:InventoryPolicyTextBlock" id="Tb_Mw3gvPK6DEuPVghsujKdIg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Inventories are carried at the lower of cost or net realizable value, determined using the first-in, first-out (&#8220;FIFO&#8221;) method. We periodically review our inventories and make provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or net realizable value. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record a provision for estimated excess inventory. The provision is determined using management&#8217;s assumptions of materials usage, based on estimates of demand, market conditions, and the size and utilization of our installed base. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:PropertyPlantAndEquipmentPolicyTextBlock" id="Tb_vCYyC8dpLk69rtYfKhvC_A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property, Plant and Equipment and Leased Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Property, plant and equipment are stated at cost, less accumulated depreciation and amortization.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility. As part of this sale, we also entered into a <ix:nonNumeric contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_gW_t-wFS3EWJO71GYrEQrg">22-year</ix:nonNumeric> lease agreement. We accounted for the sale leaseback transaction as a financing arrangement for financial reporting purposes. We retained the historical costs of the property and the related accumulated depreciation on our financial books within property, plant and equipment and will continue to depreciate the property for financial reporting purposes over the lesser of its remaining useful life or its initial lease term of <span style="-sec-ix-hidden:Hidden_zehA9llnJ0iptBHcvR7uFg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">22 years</span></span>. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:PropertyPlantAndEquipmentUsefulLivesTableTextBlock" id="Tb_XqrESFTRsE-Ehf7J9_mtuw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Asset&#160;Classification</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Estimated&#160;Useful&#160;Life</b></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land, buildings and equipment (under lease)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Lesser of the lease term or estimated useful life of the asset</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nbAeeKDfx0y_WvsTR2GHiw" format="ixt-sec:duryear" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_q9zUQ448QUOaf5yJgNr2Zw">3</ix:nonNumeric> to <ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember__L6CjCUYgkC3tvk_zUvMVA" format="ixt-sec:durwordsen" name="us-gaap:PropertyPlantAndEquipmentUsefulLife" id="Narr_g1H9knzLrUm8sSt58vKnSg">10 years</ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Repairs and maintenance costs are expensed as incurred. Expenditures greater than $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw" decimals="-2" format="ixt:numdotdecimal" name="acls:CostOfPropertyRepairsAndMaintenanceCapitalized" scale="3" id="Narr_p8brb_KkA0GPqBdElu_CGA">2.5</ix:nonFraction> thousand for renewals and betterments are capitalized and depreciated over their useful lives.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" id="Tb_0vDvu9Dl802KMaCIG3G1oQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(g)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is assessed by a comparison of the assets&#8217; carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We did not have any indicators of impairment during the period ending December 31, 2023. We did <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-6" format="ixt-sec:numwordsen" name="us-gaap:ImpairmentOfLongLivedAssetsHeldForUse" scale="6" id="Narr_7kIWVqF460eJLfJZypgLzg"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-6" format="ixt-sec:numwordsen" name="us-gaap:ImpairmentOfLongLivedAssetsHeldForUse" scale="6" id="Narr_CJeZvg-nPE2yI_CTIdGw0g"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-6" format="ixt-sec:numwordsen" name="us-gaap:ImpairmentOfLongLivedAssetsHeldForUse" scale="6" id="Narr_FkvBxJkK6U6SRk-9XWybfg">no</ix:nonFraction></ix:nonFraction></ix:nonFraction>t record an impairment charge in the years ended December 31, 2023, 2022, or 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Actual performance could be materially different from our current forecasts, which could impact estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in our relationships with significant customers. </p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ConcentrationRiskCreditRisk" id="Tb_yUq5VSnrVkGAlK1T06FJKQ" continuedAt="Tb_yUq5VSnrVkGAlK1T06FJKQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;"> (h)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Financial instruments that potentially subject us to concentrations of credit risk are principally cash equivalents, short-term investments and accounts receivable. Our cash equivalents and short-term investments are principally maintained in investment grade money-market funds, U.S. Government and Agency Securities and deposit accounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">13</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont2" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont3"><ix:continuation id="Tb_yUq5VSnrVkGAlK1T06FJKQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have no significant off-balance-sheet risk such as currency exchange contracts, option contracts or other hedging arrangements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our exposure to market risk for changes in interest rates relates primarily to cash equivalents and short-term investments. The primary objective of our investment activities is to preserve principal without significantly increasing risk. This is accomplished by investing in marketable investment grade securities. We do not use derivative financial instruments to manage our investment portfolio and do not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We perform ongoing credit evaluations of our customers&#8217; financial condition and generally require no collateral to secure accounts receivable. For selected overseas sales, we require customers to obtain letters of credit before product is shipped. We maintain an allowance for doubtful accounts based on our assessment of the collectability of accounts receivable. We review the allowance for doubtful accounts quarterly. We do not have any off-balance sheet credit exposure related to our customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our customers consist of semiconductor chip manufacturers located throughout the world and net sales to our <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_V1eAAmXnz0CdXWrJIaUhmA"><ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_P8orMyy5FECRpgSQH5f6qg"><ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_VIAwVbIYZ0O6g7ashx89IQ">ten</ix:nonFraction></ix:nonFraction></ix:nonFraction> largest customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_K1y6H6UtBEKVH_VDQVCbow">51.7</ix:nonFraction>%, <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_IQw_FcANyUmnMUhfAFPmig">59.4</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_4FwQJIK1lUGEouob4e3Acw">69.5</ix:nonFraction>% of revenue in 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the year ended December 31, 2023, we had <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_jHMAvpHzOEitHlodQvcF7Q">no</ix:nonFraction> customers representing <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_WuYsBe_SrkujPEA1yzkt9A" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_HPYkFNTEcEGhh96fzg4VOQ">10</ix:nonFraction>% or greater of total revenue. For the year ended December 31, 2022, we had <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_4rCodVjYiE-faP7-OqIxYA" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_KFo2u3PSTku7ZKE-iWw6HQ">two</ix:nonFraction> customers representing <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZvANrIAgnkGmVedWUzRlvQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_qEqfJg_Eh0abBOTb0JATSA">13.1</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_zQ2Yn7utxkepTZdtD-MnNQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr__hK0nSs_T0-O4gYoJyVHwg">11.5</ix:nonFraction>% of total revenue, respectively. For the year ended December 31, 2021, we had <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_u_36UcX1uEKf7qb2wqp-Dg" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_99Fn2f_jH0eK6i9u6JcQOw">two</ix:nonFraction> customers representing <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_6qqFwdivGkiYvjlyTVTwCA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_jkkyrqxyI0aYpYxtKt7GdQ">17.8</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_QoC2-fOGDU-wmEBEzv3VFA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_3mw4puCuC0SLLVaLaHtrog">15.4</ix:nonFraction>% of total revenue, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_9pxK086imEWWaL_mWlkxGA" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_SAPjRQvgKUyAnszs1J4jvw">one</ix:nonFraction> customer account for <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4_x4EoJBaEiVAs7iwP-0lw" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_Jv7spfxfC02cAh0hnTLgKg">12.2</ix:nonFraction>% of consolidated accounts receivable. As of December 31, 2022, we had <ix:nonFraction unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_j9APXSaQMkyZFdzuTWJQkw" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_ZIyCHOE_nky-85jHfL0pmQ">two</ix:nonFraction> customers account for <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KE7gAbB4B0-02qOjDlgwyA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_YTNp-b6Fw0yA6vHzrEChnQ">19.4</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_Htd3q93xik6sWxKXUBlHVw" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_V_bYa9V3LkaE-VciRQYbRA">11.5</ix:nonFraction>% of consolidated accounts receivable, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Some of the components and sub-assemblies included in our products are obtained either from a sole source or a limited group of suppliers. Disruption to our supply source, resulting either from economic conditions or other factors, could affect our ability to deliver products to our customers.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:RevenueRecognitionPolicyTextBlock" id="Tb_u3aDNj-KaEeiAu_4GhByKA" continuedAt="Tb_u3aDNj-KaEeiAu_4GhByKA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(i)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue Recognition</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognize revenue in accordance with Accounting Standards Codification (&#8220;ASC&#8221;) Topic 606, <i style="font-style:italic;">Revenue from Contracts with Customers </i>or (&#8220;ASC 606&#8221;). Under ASC 606, revenue is recognized when a customer obtains control of promised goods or services in an amount that reflects the consideration we expect to receive in exchange for those goods or services. We measure revenue based on the consideration specified in the customer arrangement, and revenue is recognized when the performance obligations in the customer arrangement are satisfied. A performance obligation is a promise in a contract to transfer a distinct product or service to the customer. The transaction price of a contract is allocated to each distinct performance obligation based upon the relative standalone selling price for each performance obligation and recognized as revenue when, or as, the customer receives the benefit of the performance obligation. To account for and measure revenue, we apply the following five steps:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the contract with the customer</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A contract with a customer exists when (i) we enter into an enforceable contract with a customer that defines each party&#8217;s rights regarding the goods or services to be transferred and identifies the related payment terms, (ii) the contract has commercial substance, and (iii) we determine that collection of substantially all consideration for goods and services that are transferred is probable based on the customer&#8217;s intent and ability to pay the promised consideration. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Performance obligations promised in a contract are identified based on the goods and services that will be transferred to the customer that are both capable of being distinct, whereby the customer can benefit from the good or service either on its own or together with other available resources, and are distinct in the context of the contract, whereby the transfer of the good or service is separately identifiable from other promises in the contract. To the extent a contract includes multiple promised goods and services, we must apply judgment to determine whether promised goods and services </p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">14</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont3" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont4"><ix:continuation id="Tb_u3aDNj-KaEeiAu_4GhByKA_cont1" continuedAt="Tb_u3aDNj-KaEeiAu_4GhByKA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">are capable of being distinct and distinct in the context of the contract. If these criteria are not met, the promised goods and services are accounted for as a combined performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Systems sales consist of multiple performance obligations, including the system itself and obligations that are not delivered simultaneously with the system. These undelivered obligations might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The Aftermarket business includes both products and services type arrangements. Performance obligations in these contracts consist of used tools, spare parts, equipment upgrades, maintenance services and customer training. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Customers who purchase new systems are provided an assurance-type warranty for <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw" format="ixt-sec:durwordsen" name="acls:ExtendedProductWarrantyPeriod" id="Narr_sQORL_8pM0OLnOlIHqFUVQ">one year</ix:nonNumeric> after acceptance of the tool. For aftermarket transactions, we provide customers an assurance-type warranty for <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA" format="ixt-sec:durwordsen" name="acls:ExtendedProductWarrantyPeriod" id="Narr_y0llugRqCUqP1-lfRUcCkA">90 days</ix:nonNumeric>. Customers can choose to purchase extended warranty terms with enhanced support similar to a service-type warranty ranging from <span style="-sec-ix-hidden:Hidden_tZFax8B4REGrwjj6O781Dw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span> to <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g" format="ixt-sec:durwordsen" name="acls:ExtendedProductWarrantyPeriod" id="Narr_E8CPiLeRMUq1pYfpj4OFwg">three years</ix:nonNumeric><span style="white-space:pre-wrap;">. In accordance with ASC 606, assurance-type warranties are not considered a performance obligation, whereas service-type warranties are.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Determine the transaction price </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price is determined based on the consideration to which we will be entitled in exchange for transferring goods and services to the customer. To the extent the transaction price includes variable consideration, we estimate the amount of variable consideration that should be included in the transaction price utilizing either the expected value method or the most likely amount method depending on the nature of the variable consideration. Variable consideration is included in the transaction price if, in our judgment, it is probable that a significant future reversal of cumulative revenue under the contract will not occur. Any estimates, including the effect of the constraint on variable consideration, are evaluated at each reporting period for any changes. In applying this guidance, Companies must also consider whether any significant financing components exist. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price for all transactions is based on the price reflected in the individual customer&#8217;s purchase order. Variable consideration has not been identified as a significant component of the transaction price for any of our transactions. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those transactions where all performance obligations will be satisfied within one year or less, we apply the practical expedient outlined in ASC 606-10-32-18. This practical expedient allows us not to adjust promised consideration for the effects of a significant financing component if we expect at contract inception that the period between when we transfer the promised good or service to a customer and when the customer pays for that good or service will be one year or less. For those transactions that are expected to be completed after one year, we have assessed that there are no significant financing components because any difference between the promised consideration and the cash selling price of the good or service is for reasons other than the provision of financing. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Allocate the transaction price to performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">If the contract contains a single performance obligation, the entire transaction price is allocated to the single performance obligation. Contracts that contain multiple performance obligations require an allocation of the transaction price to each performance obligation on a relative standalone selling price basis unless the transaction price is variable and meets the criteria to be allocated entirely to a performance obligation or to a distinct service that forms part of a single performance obligation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Where required, we determine standalone selling price (&#8220;SSP&#8221;) for each obligation based on consideration of both market and Company specific factors, including the selling price and profit margin for similar products, the cost to produce, and the anticipated margin.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those contracts that contain multiple performance obligations (primarily systems sales, as well as some aftermarket contracts requiring both time and material inputs), we must determine the SSP. We use a cost plus margin approach in determining the SSP for any materials related performance obligations (such as upgrades, spare parts, systems). To determine the SSP for labor related performance obligations (such as the labor component of installation), we use </p></ix:continuation></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">15</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont4" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont5"><ix:continuation id="Tb_u3aDNj-KaEeiAu_4GhByKA_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">directly observable inputs based on the standalone sale prices for these services. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Recognize revenue when or as we have satisfied a performance obligation </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We satisfy performance obligations either over time or at a point in time. Revenue is recognized over time if either 1) the customer simultaneously receives and consumes the benefits provided by the entity&#8217;s performance, 2) the entity&#8217;s performance creates or enhances an asset that the customer controls as the asset is created or enhanced, or 3) the entity&#8217;s performance does not create an asset with an alternative use to the entity and the entity has an enforceable right to payment for performance completed to date. If the entity does not satisfy a performance obligation over time, the related performance obligation is satisfied at a point in time by transferring the control of a promised good or service to a customer. Examples of control are using the asset to produce goods or services, enhance the value of other assets or settle liabilities, and holding or selling the asset. For over time recognition, ASC 606 requires us to select a single revenue recognition method for the performance obligation that faithfully depicts our performance in transferring control of the goods and services. The guidance allows entities to choose between two methods to measure progress toward complete satisfaction of a performance obligation: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Output methods - recognize revenue on the basis of direct measurements of the value to the customer of the goods or services transferred to date relative to the remaining goods or services promised under the contract (e.g., surveys of performance completed to date, appraisals of results achieved, milestones reached, time elapsed, and units produced or units delivered); and </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Input methods - recognize revenue on the basis of the entity&#8217;s efforts or inputs to the satisfaction of a performance obligation (e.g., resources consumed, labor hours expended, costs incurred, or time elapsed) relative to the total expected inputs to the satisfaction of that performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have the right to consideration from a customer in an amount that corresponds directly with the value to the customer of the entity&#8217;s performance completed to date (i.e., certain aftermarket contracts), as such we have elected a practical expedient to recognize revenue in the amount to which the entity has a right to invoice for such services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Product related revenues (whether for systems or aftermarket business) are recognized at a point in time, when they are shipped or delivered, depending on shipping terms.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">For installation services, revenue is recognized at a point in time, once the installation of the tool is complete. The nature of the installation services is such that the customer does not simultaneously receive and consume the benefits provided by the entity&#8217;s performance, nor does performance of installation services create or enhance an asset that the customer controls. Installation services do not create an asset with an alternative use to the entity, and the entity does not have an enforceable right to payment for performance completed to date.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Service-type warranties for any product are recognized over time, as these represent a stand ready obligation to service the product during the warranty period. Progress in the satisfaction of these performance obligations is measured using an input method of time elapsed. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Maintenance and service contracts are recognized over time.  Progress in the satisfaction of these performance obligations is measured using an input method of either time elapsed in the case of fixed period contracts, or labor hours expended, in the case of project-based contracts.</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" id="Tb_Tb9lQepmN0W7IKG7ydn9pQ" continuedAt="Tb_Tb9lQepmN0W7IKG7ydn9pQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(j)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recognizing Assets related to Recoverable Customer Contract Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;">We recognize an asset related to incremental costs incurred by us to obtain a contract with a customer if we expect to recover those costs. We will recognize an asset from costs incurred to fulfill a contract only if such costs relate directly to a contract with an entity that we can specifically identify, the costs incurred will generate or enhance resources that will be </p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">16</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont5" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont6"><ix:continuation id="Tb_Tb9lQepmN0W7IKG7ydn9pQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">used in satisfying performance obligations in the future, and the costs are expected to be recovered. Any assets recognized related to costs to obtain or fulfill a contract are amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"><span style="white-space:pre-wrap;">In substantially all of our business transactions, we incur incremental costs to obtain contracts with customers, in the form of sales commissions. We maintain a commission program which awards our employees for System sales, aftermarket activity and other individual goals. Under ASC 606, an asset is amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates. However, ASC 606 provides a practical expedient to allow for the recognition of commission expense when incurred if the amortization period of the asset that the entity otherwise would have recognized is one year or less. Based on the nature of our commission agreements, all commissions are expensed as incurred based upon the expectation that the amortization period would be one year or less.  </span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:ShippingAndHandlingCostsPolicyTextBlock" id="Tb_Qg-4IjGs00OVXeid4F33bw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(k)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and Handling Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Shipping and handling costs are included in cost of revenue.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy" id="Tb_-w5ZX2ygrk6FoE3yU2d3iQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(l)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally recognize compensation expense for all stock-based payments to employees and directors, including grants of stock options and restricted stock units, based on the grant-date fair value of those stock-based payments. For stock option awards, we use the Black-Scholes option pricing model, adjusted for expected forfeitures. Other valuation models may be utilized in the limited circumstances where awards with market-based vesting considerations, such as the price of our common stock, or performance-based awards, are granted. Stock-based compensation expense is recognized ratably over the requisite service period. For each stock option or restricted stock unit grant with vesting based on a combination of time, market or performance conditions, where vesting will occur if either condition is met, the related compensation costs are recognized over the shorter of the explicit service period or the derived service period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note&#160;13 for additional information relating to stock-based compensation.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:IncomeTaxPolicyTextBlock" id="Tb_4tutbzzCcU-c6iMIqcq-vA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(m)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax basis, and operating loss and tax credit carryforwards.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax basis accounting. We establish a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining our provision for income taxes, our deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. We evaluate the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. We recognize accrued interest related to unrecognized tax benefits as interest expense and penalties within operating expense in the consolidated statements of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note 18 for additional information relating to income taxes.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">17</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_XdZIBVR1pkOZHNMmWfhMuA_2_2"></a><a id="Tc_Kd55hLMqfEasuIUacgxUrw_3_2"></a><a id="Tc_QtT1jdHfEkaaq1-QwYrZhg_3_5"></a><a id="Tc_O3weMDTq2EWk8O_U9Zs4tg_3_8"></a><a id="Tc_1OlzWTPCpE-4mCMGkuQpIA_4_2"></a><a id="Tc_kJKjQOlzakuJpctg1FgQxQ_5_0"></a><a id="Tc_QxCPntZmnUyxYDr_Jkz68A_5_2"></a><a id="Tc_1mAtxHI8z0O2Lwhccq8Pgg_5_5"></a><a id="Tc_YvVSmxUFE0uB_NkysjQv3A_5_8"></a><a id="Tc_fXSpe0wRukuZnyr3YvAHrw_6_0"></a><a id="Tc_8dK8ugCOHkSM9h63WoF2XQ_7_0"></a><a id="Tc_OSb73Q5Cf0qTrNutLYI36g_8_0"></a><a id="Tc_F3BDePxCy0i528WNPUYuXQ_9_0"></a><a id="Tc_SUGVSEeaPUm-C1EMc4PYow_10_0"></a><a id="Tc_YFes3hKuuUiLuJpWCpsrJQ_10_2"></a><a id="Tc_vc8jM1mqek6WhlpHSZ2sWA_10_5"></a><a id="Tc_GW6foWfQCEOHhG6lVyBR7A_10_8"></a><a id="Tc_ZRSDieE060-YZSxF3c3gwg_11_0"></a><a id="Tc_6op0aHyuGEaNLMqsYNhn2Q_11_2"></a><a id="Tc_PjrvgYQWskqqzbctQy164g_11_5"></a><a id="Tc_-iHyeCe_lkSQ3nPcWh0XBg_11_8"></a><a id="Tc_S9UfNAYuPUyJxnGCoTh71w_1_2"></a><a id="Tc_HjhO7PPEkUmV7NIIKqAvNA_1_5"></a><a id="Tc_hLZR-fJkFk6ZgSEQlwXDsQ_2_2"></a><a id="Tc_g69Z0sSDl0ehwQ9PAYjUXA_2_5"></a><a id="Tc_UgvLFPWRXk-Ms-Jdqyg3og_2_8"></a><a id="Tc_lnpFNluApkq-PesqsGLa8w_3_2"></a><a id="Tc_ZEOLyREYy0yudp7aeDG2lw_4_0"></a><a id="Tc_aABHa8K5XkexsQk9cuhLww_4_2"></a><a id="Tc_KssVRa6fb0ylC2ZsjHnPLg_4_5"></a><a id="Tc_rjbGjLGCMU-VkIYV-EnDVg_4_8"></a><a id="Tc_Oi82-xCFukGTQgOXxCDYSg_5_0"></a><a id="Tc_PO98CY6by0OtjREY8AVpsQ_6_0"></a><a id="Tc__RZvwnCduUaAkHVWiYMZ9Q_6_2"></a><a id="Tc_CehgOK1F9E-iBrDzcbm7fw_6_5"></a><a id="Tc_Rm-ujJXdr0a_I5g_6-shbA_6_8"></a><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont6" continuedAt="Tb_0FCu4g3290qWL7Jmrjwpww_cont7"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:EarningsPerSharePolicyTextBlock" id="Tb_m0M5tEDE1EetfdN0gv_69Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(n)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Computation of Net Income per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of net income per share are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" id="Tb_x66FxO7v_kecMRBxdqLkaw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common stockholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_GguCRNg-Jkajvtcit0dsWg_5_3">246,263</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_tcf_6eKUIUeM_yEUfn6_0w_5_6">183,079</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc__RAX8b9JkUmntNh6kILZhw_5_9">98,650</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_i_bXSc2QKUujRRVjIYlKWA_6_3">32,758</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_ywRUONLXdUyULy4Xo6ttVw_6_6">33,043</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_e0YCc4--jEmRuFrr4hY5Sg_6_9">33,555</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Incremental options and RSUs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_ytZMQjvxOk2HUAwytCQ_aw_7_3">407</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_tO0Z6Qzu7keTIL5CZGpNAA_7_6">499</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_IqqXQxBNj0KUHTPPQ46C5g_7_9">713</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_nmXDgcspIEuSJziFRT-lFg_8_3">33,165</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_x5-ibSWp6EyU3Ky3_aVbLQ_8_6">33,542</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_NifakW4Eb0m1gJu4Gq3LRw_8_9">34,268</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_nPntI8V9bEaME9_iFA3C2w_10_3">7.52</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_hmKcSvrcSEuHJ7pp033CwA_10_6">5.54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_JRSC8kgC0Uu1WU2Cm4hZiw_10_9">2.94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_Uk8IZdsJtkaDGu9ZHrxT0A_11_3">7.43</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_ox5BTZYkjEicwgSWp3Ihdw_11_6">5.46</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_ADcwFdNXLEqXmoCqyZqKTQ_11_9">2.88</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Diluted weighted average common shares outstanding does not include restricted stock units outstanding to purchase <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_Ds6n_U5ngE2JygDWbMlMoA">6,025</ix:nonFraction>, <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_6AunEeAcxUupoxZMpTubVw">4,929</ix:nonFraction> and <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_xb8F04s7kk22pt5M6yAiEw">2,554</ix:nonFraction> common equivalent shares for the periods ended December 31, 2023, 2022 and 2021, respectively, as their effect would have been anti-dilutive.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" id="Tb_wO7eo7Qf8k6vfUqsflAP9w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(o)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Accumulated Other Comprehensive Loss</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table presents the changes in accumulated other comprehensive loss, net of tax, by component, for the year ended December 31, 2023:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" id="Tb_tDIILIVY10q2MzdfFMAzlg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_DEhEBCwN6kWhhs5ipCNeIw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_ejNN-Tl1YkOTstjItUZFzA_4_3">1,994</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_qoXIVx02EECBqzy5LRssRQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_EFP7l936FkG4_ZwqIQc-Bw_4_6">26</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_qRbYPnv5UEqrF42E94JTlg_4_9">1,968</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Ekmsr9scYE--R8wCcnElug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" scale="3" id="Tc_Vk2REVoxa0mH78iD_NlJLw_5_3">38</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_pMa3RwqDJkqzoCPJs87n0g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" scale="3" id="Tc_Pd9xVhN-Fku5OkzmQVG2Vw_5_6">84</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" scale="3" id="Tc_-vMzgRWAIke3JdCs_Ft2BA_5_9">122</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_m6CBlDItoUGdcd4Vqk0hnw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_41Fiau8N-0mI8zBS7DNXIQ_6_3">1,956</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_TuSaOuIuF0-JMXXG4noSTA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_bdKqukwfeEyHe5WT11P9xw_6_6">110</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_r8RhO2ES6UqY2FohM-X_dA_6_9">1,846</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock" id="Tb_wQi1UxNbvkqxVandK-_38Q" continuedAt="Tb_wQi1UxNbvkqxVandK-_38Q_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(p)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recent Accounting Guidance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:14pt 0pt 0pt 0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span><span style="font-size:10pt;">In November 2023 the Financial Accounting Standards Board (&#8220;FASB&#8221;) issued Accounting Standards Update 2023-07, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures</i><span style="font-size:10pt;"> ("ASU 2023-07"). ASU 2023-07 is intended to enhance disclosures for significant segment expenses for all public entities required to report segment information in accordance with ASC Topic 280, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting</i><span style="font-size:10pt;"> ("ASC 280"). ASC 280 requires a public entity to report for each reportable segment a measure of segment profit or loss that its chief operating decision maker (&#8220;CODM&#8221;) uses to assess segment performance and to make decisions about resource allocations. ASU 2023-07 is intended to improve financial reporting by requiring disclosure of incremental segment information on an annual and interim basis for all public entities to enable investors to develop more useful financial analyses. ASU 2023-07 is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024. Early adoption is permitted. A public entity should apply ASU 2023-07 retrospectively to all prior periods presented in the consolidated financial statements. The Company is currently evaluating the impact of </span><i style="font-size:10pt;font-style:italic;">ASU 2023-07</i><span style="font-size:10pt;"> on its future consolidated financial statements and related disclosures.</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">18</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_0FCu4g3290qWL7Jmrjwpww_cont7"><ix:continuation id="Tb_wQi1UxNbvkqxVandK-_38Q_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:14pt 0pt 0pt 0pt;">In December 2023 the FASB issued Accounting Standards Update 2023-09, <i style="font-style:italic;">Income Taxes (Topic 740): Improvements to Income Tax Disclosures </i>("ASU 2023-09")<i style="font-style:italic;">. </i><span style="color:#1d1c1d;">ASU 2023-09 is intended to enhance the transparency and decision usefulness of income tax disclosures. ASU 2023-09 addresses investor requests for enhanced income tax information primarily through changes to the rate reconciliation and income taxes paid information. Early adoption is permitted. A public entity should apply ASU 2023-09 prospectively to all annual periods beginning after December 15, 2024. The Company is currently evaluating the impact of ASU 2023-09 on its future consolidated financial statements and related disclosures</span><span style="color:#1d1c1d;">.</span></p></ix:continuation></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_contentSection_d6ce1257_e369_493a_9cf5_"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="Tc_NqWrFbCgY0O61nZpPukY_Q_1_2"></a><a id="Tc_cpox5hlF5kaiKkhdwT4vfA_2_2"></a><a id="Tc_jOHVSNgg30yOpD4A0V5Q3Q_3_2"></a><a id="Tc_fAcBB_ZA4EqeI6EgzoadDw_3_5"></a><a id="Tc_S7xIVUUFhkGhI9Pw5_5EXA_3_8"></a><a id="Tc_JHjlqCj24kWWdLN5fEGV2A_4_2"></a><a id="Tc_Ylj68vw-00uYHH_vzuSDFw_5_0"></a><a id="Tc_Z5USc_gCL0Swr9yYsOU0aw_5_2"></a><a id="Tc_MyFM6G6rYEmFLo6s7vhi5A_5_5"></a><a id="Tc_eSVo0nxWP0azQ1_zd0B2TQ_5_8"></a><a id="Tc_1jjnun6brEeA7t3fNwShnA_6_0"></a><a id="Tc_mjzR_bToOUOf8WfYyKeToQ_7_0"></a><a id="Tc_GxGyKGY04EKo8kYir-Ca9g_7_2"></a><a id="Tc_mL6O3VmwbkiyJsCWPUpW4w_7_5"></a><a id="Tc_VddV2AKjy0mrX51vYcAJEw_7_8"></a><a id="Tc_2VCQcvjTQka-etcUJakk-g_1_2"></a><a id="Tc_wLxjaycN2U2o-i1lgMMmiA_2_2"></a><a id="Tc_orFVqNqGoUacMZkEt8B0ZQ_3_2"></a><a id="Tc_1ES5q-kWikqWuXeA3CFwpw_3_5"></a><a id="Tc_NUZw_4ZukUqViA4piXogRw_3_8"></a><a id="Tc_JGTSOpWdz0O3xeZ6isJ2tg_4_2"></a><a id="Tc_jA-qqk2SAkSl5KjLvuqEGw_5_0"></a><a id="Tc_mt6PuhN2Dk6VmuR-eL1FfQ_5_2"></a><a id="Tc_Mc4LhUtM6UqGubLd8N3DIQ_5_5"></a><a id="Tc_zTsNDRVwm02sv4yMtO_aGg_5_8"></a><a id="Tc_mtP48Oc_Q0GOZHLIvmaYKQ_6_0"></a><a id="Tc_Z2fXFEQHNkeB6FzioqX5aQ_7_0"></a><a id="Tc_fxycPDtDwUulE3UGfeYCaw_8_0"></a><a id="Tc_xjOAlbV4TECcwrPRTt7rhw_8_2"></a><a id="Tc_qDAWW0fyg0udxmkQB0l2jQ_8_5"></a><a id="Tc__N6OwcLRzkyL7HNdBS-oaA_8_8"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:RevenueFromContractWithCustomerTextBlock" id="Tb_xs39fQDUn06AEuJnPNW32A" continuedAt="Tb_xs39fQDUn06AEuJnPNW32A_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note 3. Revenue</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We design, manufacture and service ion implantation and other processing equipment used in the fabrication of semiconductor chips and sell our products to leading semiconductor chip manufacturers worldwide. We offer a complete line of high energy, high current and medium current implanters for all application requirements. In addition, we provide extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance service and customer training. Our revenue recognition policies are set forth in Section (i) of Note 2, Summary of Significant Accounting Policies. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Alternative Operational Revenue Categories used by Management</b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">To reflect the organization of our business operations, management reviews revenue in two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#8220;CS&amp;I&#8221; or &#8220;aftermarket.&#8221; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Below are the revenues by categories used by management for the periods covered in this report:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" id="Tb_ETSzRuIpLUelY2mE1NQFVw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_fAcTxuHBe0K1reJOAheMQg_5_3">883,604</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_1bP-k2K0dEaaZvALjQivWQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc__Gp7nfa8Y0OoCJUbKfwlFg_5_6">692,061</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_0SZ6e4zPJU2wVRZHZ2ZfQA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_Mzr0YGUzv0St1ZpeaSj6RA_5_9">454,598</ix:nonFraction> </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_DijqUQxn_E6nSflnJEOVvA_6_3">247,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_AfterMarketMember_JgLLb3ZvXkGxmtgfnUlokg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_qk0mDzBf_0Gsv1n5xwPCkQ_6_6">227,937</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_AfterMarketMember_R3xczBeiI0u4XJaxTbqZqw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_La1BA1m07k2_cVQ1dwwzIw_6_9">207,830</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_hmmjTfD2a0S25xbtFE--ww_7_3">1,130,604</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_nBGM3-_DtU6KpE1ipHBimg_7_6">919,998</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_267Fa-yET0CDc9bIeAtu7Q_7_9">662,428</ix:nonFraction> </p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27.35pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Economic Factors Affecting our Revenue: Geographic Breakdown of Revenue</b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Global economic conditions have a direct impact on our revenue. We are substantially dependent on sales of our products and services to customers outside of the United States. Adverse economic conditions, political instability, potential adverse tax consequences, regulatory changes and volatility in exchange rates pose a risk that our clients may reduce, postpone or cancel spending for our products and services, which would impact our revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue by geographic markets is determined based upon the location to which our products are shipped and where our services are performed. Revenue in our principal geographic markets is as follows: </p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock" id="Tb_k5iEOzeYr0C90xLNsy_RPg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_NorthAmericaMember_JoPVnkw3mEm1Z6YC7LnFwg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_oFMj4vVVYEOGOhhSbc8p2w_5_3">174,810</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_NorthAmericaMember_5SbsYIuKTE2oNfT3jl9X4Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_HdnRfuDL_0uIeOuUwwZK1A_5_6">143,701</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_CWF1GuDdgUmVH9UkggHm3A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_Hi7mPMS8U0KlEGQ5c21QOQ_5_9">48,715</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_Ho12bK-5mEGO1mqDRvysvQ_6_3">811,308</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_JAbcQRglM0mfp3K1ck900g_6_6">673,752</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_TFyct3y9f0eoDpwim6htTg_6_9">516,105</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_OWUiaRPZiU-tf0KdObparQ_7_3">144,486</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_ieAXo8M6s0WYF5PP9J8hCQ_7_6">102,545</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_PUTMx_L13EKbJ38NVwp3bA_7_9">97,608</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_ycwbv0MEx0657_TlgegGBA_8_3">1,130,604</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_RKVZjsvkPkekd9XhimuUdQ_8_6">919,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_Mim_CLd1zU6SR8r5VJyo3A_8_9">662,428</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">19</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_f142f93c_b2f5_4933_93ed_117b7836adc4"></a><a id="Tc_1mMtyFhVekq6_r94cDJFWA_1_2"></a><a id="Tc_ge0oxrPex0us9mCNljpqkQ_2_2"></a><a id="Tc_cCgxVmbiAEum0eXctvT8JA_3_2"></a><a id="Tc_WvheUiA9k0y4GnyhozIxWQ_3_5"></a><a id="Tc_WQssNq88F0OBl7Nc_D77OQ_3_8"></a><a id="Tc_b_iI_Avoj0mqHJv5gd8k1Q_4_2"></a><a id="Tc_qI9OXwYaskW_6AO0HfBGTA_5_0"></a><a id="Tc_Wv1IC-q5Hk21XLoClN5D-g_5_2"></a><a id="Tc_0hul_sOiqk6cSyQ1qA6BNw_5_5"></a><a id="Tc_jDuW18sywUGBcnSEzvy0vw_5_8"></a><a id="Tc_6XPsIE-N4Uie2W-PyeJqrg_6_0"></a><a id="Tc_6qpnu_RvtUW2hCaWXmTFIA_7_0"></a><a id="Tc_IIpsWnxT4ESBP9ynFmt_Ew_8_0"></a><a id="Tc_BrclMMsrAEK1utW5-pXDOA_8_2"></a><a id="Tc_44K3E4xvJkOxoB-e1xBRqg_8_5"></a><a id="Tc_Q3nkr5fS6kSIUAE-4DopNw_8_8"></a><ix:continuation id="Tb_xs39fQDUn06AEuJnPNW32A_cont1"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27pt;"/><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Recognition of Deferred Revenue from Contract Liabilities </b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock" id="Tb_DH3X3e9u2Uez-_f3Ex8NjA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_cmr3rxu_0EOLrEu25fvzjA_5_3">154,777</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_FpvWQ33JcE6nNxHYvPHEjw_5_6">68,436</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_qWCBFiZvn0y_-tCnsjObxw_5_9">23,058</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_RTDEKp3sR0aYmwaVfTp20w_6_3">185,688</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_Nq_pY_7wyUmt6J4AlxxOUg_6_6">146,674</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_JVrD6O2f5kmmSPNm0_clow_6_9">66,349</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="vertical-align:bottom;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_iGCt09YMf0qFTvdobBQ6iA_7_3">129,580</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_T6uYQbSDnk2z5TNanIZzrw_7_6">60,333</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_Op-53fm39U-e9gqRmyiRSQ_7_9">20,971</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_8WeILkfVx0GEE-ZkHTidLw_8_3">210,885</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_YXJcmCrEykCqhsFb4oajgA_8_6">154,777</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_g6jUU56JjUSu3EkJto6jDw_8_9">68,436</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments received or amounts invoiced in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had deferred revenue of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="6" id="Narr_bJ3XT2sQe0exj6AMyWkpRw">210.9</ix:nonFraction>&#160;<span style="white-space:pre-wrap;">million. This represents the portion of the transaction price for contracts with customers allocated to the performance obligations that remain unsatisfied or partially unsatisfied.  Short-term deferred revenue of </span>$<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityCurrent" scale="6" id="Narr_45liduKdEEiLQy863sTzdw">164.7</ix:nonFraction>&#160;million as of December 31, 2023 represents performance obligations that are expected to be satisfied within the next 12 months. This amount relates primarily to prepayments made prior to system delivery as well as to installation and non-standard warranty performance obligations for system sales. Long-term deferred revenue of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityNoncurrent" scale="6" id="Narr_Qd2rTNuRzE2r7jPMmGwREA">46.2</ix:nonFraction>&#160;million as of December 31, 2023 relates to prepayments made prior to system delivery as well as to extended warranty performance obligations that we expect to be completed in excess of the next 12 months but within the next <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_DwurvAbnrUK_uQzfnlVyRw" format="ixt-sec:durwordsen" name="acls:PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" id="Narr_mk5ZZlhVhEua36z9F8XRCQ">24 months</ix:nonNumeric>. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The majority of our system transactions have payment terms that are <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw" decimals="2" format="ixt:numdotdecimal" name="acls:PercentageOfPaymentUponShipmentOfTool" scale="-2" id="Narr_b9DcHj6gR0u2J8LOxtzhVg">90</ix:nonFraction>% due upon shipment of the tool and <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw" decimals="2" format="ixt:numdotdecimal" name="acls:PercentageOfPaymentUponInstallation" scale="-2" id="Narr_HaAQTuj9uUuQLzFISCE1zg">10</ix:nonFraction>% due upon installation. Aftermarket transaction payment terms are such that payment is due either within <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw" format="ixt-sec:durday" name="acls:PeriodOfPaymentUponDeliveryOfParts" id="Narr_gvSYm3LMQU-gvYzhn6pXwA">30</ix:nonNumeric> or <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g" format="ixt-sec:durwordsen" name="acls:PeriodOfPaymentUponDeliveryOfParts" id="Narr_hcwif6YxFU6iK0XlAYvNBw">60 days</ix:nonNumeric> of service provided or delivery of parts. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Tc_tfnrXPBe3EGNN2Ns7J0k0A_1_1"></a><a id="Tc_ApqgiioGe0-UstTZxMT2aw_1_4"></a><a id="Tc_PTM2tdqklUq_GhryaXvkaQ_2_1"></a><a id="Tc_SdNpQMm0h0aFh4ZSWTKzsg_2_5"></a><a id="Tc_lUiUPZNv8kK7nJEymAxG5Q_3_1"></a><a id="Tc_xQWBOaKTekeweYAqtT4gtg_4_0"></a><a id="Tc_DoQFq3Ldn0SXVWaVaz2fvA_4_1"></a><a id="Tc_QNyn8xRFsUeVT9DlnmmuSg_4_4"></a><a id="Tc_uzHrFlV2Y0iG2ikPtJagrg_5_0"></a><a id="Tc_p0uhQqTSbUKpWuQWEQkkag_6_0"></a><a id="Tc_0VwFYqDGZky0-iBQYGcwlA_6_1"></a><a id="Tc_BuQLcVkVik2iWsVRCkIkjg_6_4"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:CashCashEquivalentsAndRestrictedCashTextBlock" id="Tb_qRvtFF4z4EeLNoKrVHxr_A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;4. Cash, cash equivalents and restricted cash </b></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:CashCashEquivalentsAndRestrictedCashTableTextBlock" id="Tb_ygMqAoqfI0mLPfmjpQc_sA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_ihANMfWMVk6Avy036Zlj1w_4_2">167,297</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_jd-vXY9FoEePVHLAfGaXOQ_4_5">185,595</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalents" scale="3" id="Tc_2URK7RAPy0qEwGdhcpbm1g_5_2">6,654</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalents" scale="3" id="Tc_8dlEhQRpoECp-Ywr2t9Q_g_5_5">752</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_Xs7f2tRUMUq4sr8N-MA0Zw_6_2">173,951</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_L_0PvFbZ-UK5EL0g1edbhQ_6_5">186,347</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_CTeQSjjQTkinayDXQEOAEQ" decimals="-5" format="ixt:numdotdecimal" name="acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" scale="6" id="Narr_Tjek51ilKkOxG1slLTsI0w">6.7</ix:nonFraction>&#160;million in restricted cash which relates to a $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_SfoAMMye2UK3lNLxNdJrFg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:SecurityDeposit" scale="6" id="Narr_4FisTIlpM06ubI5f_bgdeQ">5.9</ix:nonFraction> million cash collateral relating to our lease for our headquarters in Beverly, Massachusetts, a $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent" scale="6" id="Narr_C9vaiVz-gEmTnQQsVhoyAA">0.7</ix:nonFraction>&#160;million letter of credit relating to workers&#8217; compensation insurance and a $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="acls:DepositRelatingToCustomsActivity" scale="6" id="Narr_dhC4TWFTXUCUAYpvwg-ZEA">0.1</ix:nonFraction> million deposit relating to customs activity. </p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" id="Tb_41wiQvBPkkCTg8YSn2k0CA" continuedAt="Tb_41wiQvBPkkCTg8YSn2k0CA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;5. Accounts Receivable and Allowance for Credit Losses</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Axcelis maintains an allowance for credit losses, which represents an estimate of expected losses over the remaining contractual life of its receivables considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#8217;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in its receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">20</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_vyvPnhc59E6heFYhUT8lBw_1_2"></a><a id="Tc_SirzyF2krEOyK3461u_AOg_2_2"></a><a id="Tc_E1w8-uECakephnSDulmr2A_3_2"></a><a id="Tc_i-eYJiyFGkSZqglczrsOUQ_3_5"></a><a id="Tc_3cuYkE1usUGhX9wP3GCJ4g_4_2"></a><a id="Tc_NpenJWXSl0OT48BUjpSmLg_5_0"></a><a id="Tc_dPBIxrho6E6gpLP8utxHSA_5_2"></a><a id="Tc_HCM219cAbEaPR2-InZIooA_5_3"></a><a id="Tc_ZHW6zkIRikq5aoTaINkTnw_5_5"></a><a id="Tc_81QpmoUuTESPwEboutu8cg_5_6"></a><a id="Tc_txlGa4qekUaenVlM1QsmnQ_6_0"></a><a id="Tc_Dx05bnsQDEavbfF9Lr_o8A_6_6"></a><a id="Tc_TYvL1YAB60qlpxaa273S9A_7_0"></a><a id="Tc_I9oPhTiFWEywxM02MCbr8g_7_6"></a><a id="Tc_8zQquTN3g0W9kyUoBRrAUQ_8_0"></a><a id="Tc_a6d1XSnRC0qARTw1QVlFog_8_3"></a><a id="Tc_i63Fz3ytyU2Shic-PRaHXw_8_6"></a><a id="Tc_fUWhvTeFn06brjOnTsVXyA_9_0"></a><a id="Tc_j7nnFeW420Kq2ZcqZpQTww_9_2"></a><a id="Tc_aeQG3IJCMEqjgc_nW5QXAg_9_5"></a><a id="Tc_tWtmDbt7FUypHVLj73KAZA_9_6"></a><a id="Tc_qH-VWyUBnE6sDy2eYunnPg_1_2"></a><a id="Tc_xhwbmlBZoE-DrFca3ch0hw_2_2"></a><a id="Tc_MpL58ysuc0289n_4FmCk6g_2_5"></a><a id="Tc_EI-BebTogk2VfEbWEeLS_Q_3_2"></a><a id="Tc_I32Ym-vdy0OmsyNoWUKASw_4_0"></a><a id="Tc_tpeLxR2IH06vULdw6wdiRQ_4_2"></a><a id="Tc_foZYE_X0R0-QM03ZMoQIQQ_4_5"></a><a id="Tc_puQrPANHU0S7yS523t9YVg_5_0"></a><a id="Tc_VXD7lxYYPE6x1DD-vlY32g_5_6"></a><a id="Tc_KX0wNQKU30mYXaw7_xpFYA_6_0"></a><a id="Tc_Yke1073t90WHCOeZpa9rfA_6_2"></a><a id="Tc_cc2vBlGwu0SyTT1W_GoFKA_6_5"></a><ix:continuation id="Tb_41wiQvBPkkCTg8YSn2k0CA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect its customers&#8217; ability to pay. These factors may include the customer&#8217;s financial condition, past payment experience, and credit ratings from credit bureaus, as well as the value of the underlying collateral.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Management performs detailed reviews of its receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowance, while amounts recovered on previously written-off accounts increase the allowance. Changes to the allowance for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">The following table shows changes of the allowances for credit losses related to trade receivables for the twelve months ended December 31, 2023 and 2022, respectively:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock" id="Tb_oUp2lpYKmUihGTq1wLp0Ew" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProvisionForLoanLeaseAndOtherLosses" scale="3" id="Tc__4gKlwvuCUiSR-Nqo0S95Q_6_3">1,117</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs" scale="3" id="Tc_yN7l036QWk2hS25vIc8dVw_7_3">657</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="3" id="Tc_af31dLcT60K6dO-H-cF1aQ_9_3">460</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of accounts receivable are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock" id="Tb_Gsxh6BgfG0KSe200NhRH0g" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80.04%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trade receivables</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableGrossCurrent" scale="3" id="Tc_ljUy14E1h0m94hkL_a-27A_4_3">218,424</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableGrossCurrent" scale="3" id="Tc_Ydx9K1RUPUGSucVxuf4X-A_4_6">169,773</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="3" id="Tc_QCdviq-O9UW_T0thKGpjqw_5_3">460</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Trade receivables, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_5JAU1LoEkUOmxDtwJmfdRQ_6_3">217,964</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_1gswB_VVs0yAV9RwuE9eiw_6_6">169,773</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Tc_a575Gp_E1kCAOQczP1pmOw_1_2"></a><a id="Tc_BITroT3OXU6UWi3NTLdkYw_1_5"></a><a id="Tc_oCuunfhSd0awTXuIdmh-7Q_2_2"></a><a id="Tc_w0f5csoe0kmCMgu86SYJ0w_2_5"></a><a id="Tc_BZ6DuvrQzkmqHBdX0TZd3w_3_2"></a><a id="Tc_6e4tY9b250GwS-Xm5UIfmg_4_0"></a><a id="Tc_eG0O_vD_C0ulDtP1s8ZxGA_4_2"></a><a id="Tc_jPUj1KpDDE2qbd3zp3Bd8Q_4_5"></a><a id="Tc_tIRnHK_PNUKUUR0SjfwM6w_5_0"></a><a id="Tc_KPsXzzzVoUWnlGb_MSFdxg_6_0"></a><a id="Tc_VDhS3TjfAk-7ObPjonbSsA_7_0"></a><a id="Tc_krfq3-iKqUuP0dfuTlWSxg_7_2"></a><a id="Tc_2GQc8FqltU-7yamql_jlPw_7_5"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:InventoryDisclosureTextBlock" id="Tb_es-bp_6FzEa2GUuYRr6HTA" continuedAt="Tb_es-bp_6FzEa2GUuYRr6HTA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;6. Inventories, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of inventories are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfInventoryCurrentTableTextBlock" id="Tb_iitWJ3HDpUGy9LS31rVoTA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:81.19%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_fyX7gQjWv0uPnOlZ2WQHSQ_4_3">231,200</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_YGQfv9Th9kapEYET5yWrdQ_4_6">187,313</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_evbZIOpCukyBwkP0zKdUYw_5_3">45,373</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_ZLpd-2sXyEib0_s7UdLEUg_5_6">35,069</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_fosN0Lm8CUuhn2f0hiRYaw_6_3">29,909</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_Q5_R4v2WQ0KLJsf4hx5_EA_6_6">20,024</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Inventories, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_7u5RjCMq10qJrj_qoVdPXg_7_3">306,482</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_NxtvX5jH00C05fvPJtUZPA_7_6">242,406</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for our products or market conditions. We regularly evaluate our ability to realize the value of inventories based on a combination of factors including the following: forecasted sales and the size and utilization of our installed base,<span style="font-size:12pt;"> </span>estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. In 2023, we recorded a decrease of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInInventoryReserves" scale="6" id="Narr_sW8kVrEeNUqWURUNmiDSmw">1.5</ix:nonFraction> million in inventory reserves. At December 31, 2023 and 2022, inventories are stated net of inventory reserves of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_c5IOe__eWka7z2RDpzRfUw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:InventoryValuationReserves" scale="6" id="Narr_0uNzr1mre0yVTjV5FB_ftA">5.2</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_GLWI7xYFXUmyD_aD5jx5nQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:InventoryValuationReserves" scale="6" id="Narr_7WwqNzn4J0GfpASWT1Y1Mg">6.7</ix:nonFraction>&#160;million, respectively.</p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">21</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_es-bp_6FzEa2GUuYRr6HTA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">During the years ended December 31, 2023, 2022 and 2021, we recorded charges to cost of sales of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="acls:ChargesRelatedToReflectLowerOfCostOrMarketValue" scale="6" id="Narr_HFzdAxnT8Uq0ftavSXb-rw">5.2</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="acls:ChargesRelatedToReflectLowerOfCostOrMarketValue" scale="6" id="Narr_DxySxSK450C1Y-iO_KE-Pg">4.6</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="acls:ChargesRelatedToReflectLowerOfCostOrMarketValue" scale="6" id="Narr_NOdraym4B0SFP2Gagb3DkA">3.8</ix:nonFraction> million, respectively, to adjust inventories to their lower of cost or net realizable value.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have inventory on consignment at customer locations at December 31, 2023 and 2022, of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" scale="6" id="Narr_rwJn-Ni2zk-wp4p3FRKR2Q">6.5</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" scale="6" id="Narr_fPPCHUpNdEGZ5h_ZysNGFA">6.4</ix:nonFraction> million, respectively.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Tc_PqXUKOXdGUymOjOjsVttsA_1_2"></a><a id="Tc_1tv49H4kbkic7sr8xQZkNQ_2_2"></a><a id="Tc_fQJF95RTTUu9KqQWzZmqLA_2_5"></a><a id="Tc_DKWmvdhOIE6kQckxPXN9Eg_3_2"></a><a id="Tc_svgAeHBoDkiqBb4WlKrLkg_4_0"></a><a id="Tc_JXVb-jD7fUmIK1OQSW9AgQ_4_2"></a><a id="Tc_l-mx0TnW1k-A0aagCAWqKw_4_5"></a><a id="Tc_BAiYHVOq206SOsw8GsnITg_5_0"></a><a id="Tc_foQeVcQYekedQ6BhnwM3_g_6_0"></a><a id="Tc_ssZpmAD45U6gTJNsuLdTwA_7_0"></a><a id="Tc_wETd8SVY70e0iYaHKXjMRQ_8_0"></a><a id="Tc_JbI4vQ4fukWmeaPVGZp0Vg_9_0"></a><a id="Tc_YltaQjgH6k2ayq1wCxXdvw_9_2"></a><a id="Tc_e8L4FKH6lkmnjPM26C55WQ_9_5"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock" id="Tb_TRnsQkWr4EGEJvccpYHkgg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;7. Property, Plant and Equipment, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of property, plant and equipment are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:PropertyPlantAndEquipmentTextBlock" id="Tb_maJqWMF0A0GXWrQTWy9aOQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82.84%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land and buildings</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_by3yUhzzMUOHGUmsw6NmdA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_FmSA6_sWRESSe1NWKFUU1Q_4_3">21,802</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_rLpWCJ1ySU6lbxpkZu3LRg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_Bpfb8kpk0kK5sB7FwlvuEw_4_6">18,001</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_sUEs6zlqCUiqrDtxx8jTkg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_ABLYbr3kSkirnGhh17fPKA_5_3">41,547</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_BJ81Px-3jUOOdA81zS1yUw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_QfDDxdM8kUayN_WdKMk7IA_5_6">34,728</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_34ulAvTgIkqsxw-o7sAllQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_pi4EmBZ170elmwrcnq-frg_6_3">17,055</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_5qFeDvcA_0q_U037-XKGbA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_U7DbqE8nXE-KasEb0lagaA_6_6">10,189</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_spNHqSQOjEOCmPMh3P2kjQ_7_3">80,404</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentGross" scale="3" id="Tc_j_fM7pduu0qeDDr6yHxyNQ_7_6">62,918</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_InpDNnnp3EKPl_CjMZWNeg_8_3">26,433</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" scale="3" id="Tc_Mh9dfsLnM0Ccb7bPUpH2yg_8_6">23,254</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Property, plant and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_h2QR-Bcq8EKONJ-Nhc9Ihg_9_3">53,971</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_vYq4a6WCfE6aH5jQ3J76bQ_9_6">39,664</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation expense was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_GyzGzdnrOUCRq6-OJTPODQ">6.2</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_aqWs4FeM7k6CaQOap0eBWQ">5.1</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Depreciation" scale="6" id="Narr_UuxGhzWbLkOv5bkBCcaUhg">4.2</ix:nonFraction>&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively. </p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="Tc_eg-SYq_0IUOIro3FgIJrZw_1_2"></a><a id="Tc_wWCyFPZI40CUZA6kRom0Uw_2_2"></a><a id="Tc_CcVuqp6XfUmfVKe49bgWjQ_2_5"></a><a id="Tc_tilTXBHzUUaFSuTGpd_7jQ_3_2"></a><a id="Tc_cS1w7f0Jj0yKvjMRl5p6vQ_4_0"></a><a id="Tc_3W7UZ614NkW0gmqv0zLndQ_4_2"></a><a id="Tc_x2Uv3xUTdkmqmPAGmhB0mw_4_5"></a><a id="Tc_ICC5EyNU0kidzdqK6ohJPQ_5_0"></a><a id="Tc_jOp6CKeExEGBdkEDEFRBeQ_6_0"></a><a id="Tc_UuIZPKzE9EWq5qxo8WuQRQ_7_0"></a><a id="Tc_bLGDYP869UuZ7A1_Dwkh1A_8_0"></a><a id="Tc_2NCyj7BNBka39iBw6Kppzw_8_2"></a><a id="Tc_j9eojhuOP0WnHKlIbTfAYA_8_5"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:AssetsManufacturedForInternalUseDisclosureTextBlock" id="Tb_BfiiSrKrLkSrVVgTiF04HQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;8. Assets Manufactured for Internal Use, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Assets manufactured for internal use, included in other assets, are depreciated using the straight-line method over their <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q" format="ixt-sec:durwordsen" name="acls:PropertyPlantAndEquipmentOtherUsefulLife" id="Narr_njF6yajQAky4bajlmrMyPQ">10 year</ix:nonNumeric> estimated useful life. Their components are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfOtherAssetsTableTextBlock" id="Tb_DEN-D_ymZkGeSfT96NTbNA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal use assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_hukGzR6rT0Sv-Xpf1xySNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_sSksI09cuE-tH4r_3ig0vw_4_3">76,273</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_9EIzoIV5jku9H0iOx7c2eQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_iNsuQWPwvE-RgelEcEGI6g_4_6">61,603</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_uSoKKtTL3EeayP_UYwb4aA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_z13PMQBxX0mBQZfqvtxcPg_5_3">236</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_6BiqVHo39E25KiWhAgwHWQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_1fRcPpvCp0O-jWuLBJmxpw_5_6">2,629</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_n9zHum_MC0CqNJ3NCgZbBA_6_3">76,509</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOther" scale="3" id="Tc_6Jb2kvRms021I2pw_xp1XA_6_6">64,232</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation" scale="3" id="Tc_BQyH6FD50E-nzvfzP6RmcQ_7_3">39,588</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation" scale="3" id="Tc_On8dBrSFEkKVE1VhhNCEoA_7_6">33,992</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Assets manufactured for internal use, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOtherNet" scale="3" id="Tc_HpfPC_1kKUKl7QobXKT1Nw_8_3">36,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentOtherNet" scale="3" id="Tc_RY3s3d1Tm0qQ4I3O0OriGA_8_6">30,240</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">These products are used for research and development, training, and customer demonstration purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation expense was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OtherDepreciationAndAmortization" scale="6" id="Narr_6fhvYtqzH0-zmF1GyZmORw">5.6</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_MVnzW5NrJ0qmvFlQgL8X3g" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OtherDepreciationAndAmortization" scale="6" id="Narr_cjJP827okkyy_yVjW9mQ8w">5.2</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_Iw5yocB58EylycBimPDlAw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OtherDepreciationAndAmortization" scale="6" id="Narr_reFU43pWaE2UHXs74B0QJA">5.3</ix:nonFraction>&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:LeaseDisclosureTextBlock" id="Tb_V8cEXaNm6UC0RVAzT43h1g" continuedAt="Tb_V8cEXaNm6UC0RVAzT43h1g_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;9. Leases</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have operating leases for manufacturing, office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease in relation to the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. We review all agreements to determine if the agreement contains a lease component. An agreement contains a lease component if it provides the use of a specific physical space or a specific physical item. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognize operating lease obligations under Accounting Standards Codification - Leases (Topic 842). The guidance in Topic 842 requires recognition of lease assets and related liabilities on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. The value of the right-of-use asset is initially determined based on the net present value of the associated </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">22</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_dEDUEkuLfkOQNrbcgP_GjQ_1_3"></a><a id="Tc_tcnU0stYW0GMTGjMW1HkEQ_1_6"></a><a id="Tc_pH2gmcViREOPNB41fF5Tgw_2_0"></a><a id="Tc_HMy-dlRhlk6S4ZU714H5Rw_2_1"></a><a id="Tc_9Ue8t3M400OuTIxS3yUESw_2_3"></a><a id="Tc_v0qk_PXaBEW8ONSNIvZ1BA_2_6"></a><a id="Tc_WXEYQV_xYUWCjVPojZ3DDg_3_0"></a><a id="Tc_Rq5-7xl01UmH4NX9bEyfow_3_3"></a><a id="Tc_9ajef1LqZU2slzBHGDpUWQ_4_0"></a><a id="Tc_iP4kWv2svUKFd9J4Wvqjdw_4_1"></a><a id="Tc_Wrn-5EC2XUyY_2BxLCUaWg_4_3"></a><a id="Tc_l3zrPVOQHEe5oAe1NEK3Iw_4_6"></a><a id="Tc_EwC5BnmbpUedf0jW4QtBHA_5_0"></a><a id="Tc_AF_rL08_SUK8MvODLNEgrA_5_1"></a><a id="Tc_OYG-tHq5v0yjP8sOQDa01g_6_0"></a><a id="Tc_EnuziQ_uIUSHRxwRd8Merg_6_3"></a><a id="Tc_BCgW3ATe7UOPq1Mg42TxfQ_6_6"></a><a id="Tc_N4wLWzutr0uJxh5DoXQ_BA_7_0"></a><a id="Tc_aa00O0ioi0e7NBBNumr3lA_8_0"></a><a id="Tc_Hh35cK7OgE-RnXtI44WxgQ_9_0"></a><a id="Tc_vFfOjXFLx0GRXiDvxBf0Ow_9_3"></a><a id="Tc_L_hUotPRe0KoHbYopLmBrg_9_6"></a><a id="Tc_V9xxFc9Z1ka8zlVZR3P2KQ_10_0"></a><a id="Tc_TSVK-Npd1kaDm6xdZfe0aA_10_1"></a><a id="Tc_W05dy_mtekSMnRKj3IbLPw_11_0"></a><a id="Tc_ylwjvY-XKEuDvrMWtuSMAQ_12_0"></a><a id="Tc_TN7Y4KR9Q0G8x03lSLDiUg_13_0"></a><a id="Tc_NMg4HFbLC0adOA3YpDsfGA_13_1"></a><a id="Tc_-Brx9ykBf0OlwpdDa8PJKA_14_0"></a><a id="Tc_n-6hyk2jokKVAwwvo8c0tg_14_3"></a><a id="Tc_8WMgEqkW60qI9zRLlU9TZA_14_6"></a><a id="Tc_zV2sLzPB2EyzFkzlgDPI3g_16_0"></a><ix:continuation id="Tb_V8cEXaNm6UC0RVAzT43h1g_cont1" continuedAt="Tb_V8cEXaNm6UC0RVAzT43h1g_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">liability, and is adjusted for deferred costs and possible impairments, if any. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" format="ixt:booleantrue" name="us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend" id="Narr_DruIhn-So0CJWsBkwlrCOQ">options to renew</ix:nonNumeric>, with renewal terms that can extend the respective lease term <ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw" format="ixt-sec:duryear" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Narr_ar34bx-QtE2Crl-WPL6vIA">1</ix:nonNumeric> to <ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Narr_eacfeWlG7kC6xwrIe8oTZw">3 years</ix:nonNumeric>. The exercise of lease renewal options is at our sole discretion. For lease extensions that are reasonably certain to occur, we have included the renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements are limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:LeaseBalanceSheetDisclosureTableTextBlock" id="Tb_RQlPp8HARkGdhPDYaooAdw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:19.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_1ZKGM_BymUOYHKJAmIpiLg_4_4">30,716</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_orz_ls0r5UepsNtmlRQCdw_4_7">12,146</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets*</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc__pkVnOhwukqJewt3BPaRaw_5_4">16,632</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_B3rFCyiKfUWAElR8UTV0NA_5_7">17,942</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseRightOfUseAsset" scale="3" id="Tc__4QNvmJjcUaKt1Evs53I6g_6_4">47,348</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseRightOfUseAsset" scale="3" id="Tc_lm1pCyGggEu_4BsER6KoPg_6_7">30,088</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4WmvFNfdLESy1k-c9Ty0ow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_79LJwop7d0ConM_QFDxBtQ_9_4">4,978</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_xfA1T4QAtU2TuD9JltH2yA_9_7">5,367</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_s9pB4S5AiUu58PZQii68rg_10_4">1,511</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_Xy6LFqSRmU-uZ0X5u2tquA_10_7">1,229</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Non-current</b></p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating </p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_wOYBbjMi40W2UbMQy9eAbw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other long-term liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_IBrMTRlAmU6qRC3SgFpljQ_12_4">25,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_hSU5NsQwiU-v8qhtvde4Dw_12_7">6,931</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance </p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_j_S77cJ9x0GarrL6En9TSQ_13_4">43,674</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_qhTbEdKYFESYKHgoOSgwkA_13_7">45,185</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_LKaypFv8fU6FRir4BgV0ag_14_4">75,887</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_T__fYMxEjE2Wn2fOzm4jyA_14_7">58,712</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:95.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">*Finance lease assets are recorded net of accumulated depreciation of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="acls:FinanceLeaseAccumulatedDepreciation" scale="6" id="Narr_3RfZbORDx0StE-cD98_N5Q">46.4</ix:nonFraction> million and include $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PrepaidRent" scale="6" id="Narr_HwnZahMFIUe8VyCEuSeE5A">0.6</ix:nonFraction> million of prepaid financing costs as of December 31, 2023. Finance lease assets are recorded net of accumulated depreciation of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-5" format="ixt:numdotdecimal" name="acls:FinanceLeaseAccumulatedDepreciation" scale="6" id="Narr_AgRz840x3UOWAUuubvDy9g">45.9</ix:nonFraction> million and include $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PrepaidRent" scale="6" id="Narr_JAit6Dwyn0mqQisaf3HQoA">0.6</ix:nonFraction><span style="white-space:pre-wrap;"> million of prepaid financing costs as of December 31, 2022.  </span><br/><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">All of our office locations support selling and servicing functions. We also have a manufacturing facility in South Korea. Lease expense, depreciation expense relating to finance leased assets and interest expense relating to our finance lease obligation recognized within our consolidated statement of operations for the twelve-month periods ended December </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">23</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_E571A_1iyEqHuj17q1LjBQ_1_3"></a><a id="Tc_WLjqZVh_uU61l1ZyazSkWg_2_3"></a><a id="Tc_-Bb9I3ZZ-kCYpYMUPCXYOA_3_0"></a><a id="Tc_3OvZ6th-Y0u05rOKPSXHoQ_3_1"></a><a id="Tc_C2eDqz46JEGouTOIB7gXRQ_3_3"></a><a id="Tc_xrEK-PUwp06iWmOQgA5SLQ_3_6"></a><a id="Tc__RMb99xVeUWnRzVUaCkqHw_3_9"></a><a id="Tc_fRluWt8Wh06EMFHoQTocbw_4_0"></a><a id="Tc_OnZaRGmFUUGTUcx5qZzr-g_4_3"></a><a id="Tc_PKbuZxELkUObrNiAoegPrA_5_0"></a><a id="Tc_lB5zRyU_VUafd2d241iCbA_5_1"></a><a id="Tc_l_wk2mmDpEiSdJQ-v_zYcg_5_3"></a><a id="Tc__QGZWui5SUum0oJ_jENM5g_5_6"></a><a id="Tc_Wo1TJCtmA0CkxVDFt4QyYg_5_9"></a><a id="Tc_LCqgBxxmbkqY8BYEzLJodw_6_0"></a><a id="Tc_NgBMiokpokaLufPLK7HXnA_6_1"></a><a id="Tc_1LyzpnPSOkem1quBSl-ItQ_7_0"></a><a id="Tc_Y7v76V78vEC0F4mPLVlnFQ_7_1"></a><a id="Tc_Y9VKfPRB2EKY1IW6q63Jlw_8_0"></a><a id="Tc_lUW5jeoxlUae4J6jxcQD8Q_8_1"></a><a id="Tc_QGxXzsWkDEmR3pu-CYLvuw_9_0"></a><a id="Tc_xpliZv_1d0qHqFsgPmQj6w_9_3"></a><a id="Tc_-VDvqjfCTEKaWstIHRCKKA_9_6"></a><a id="Tc_4Z_ojoZ2_kCmcOeToElcbA_9_9"></a><a id="Tc_S17O6mpFXUWaF3A0XBkn6w_10_0"></a><a id="Tc_KJbZUifU70-spU_PJpgSSQ_11_0"></a><a id="Tc_hfMIQZ9qr0ygvQabfgYN-A_11_1"></a><a id="Tc_-7kqpkfQo0-ZGrBPtLFLcw_11_3"></a><a id="Tc_H6FyPFaFz0OENx9LI-4VxA_11_6"></a><a id="Tc_4NsceL6sxEy3l26ahmbOEw_11_9"></a><a id="Tc_g4mGQUl3Pk618k0Wk2d-bA_12_0"></a><a id="Tc_jnymZFvoZUKyxWOa8Q-1ag_12_1"></a><a id="Tc_Go4LRKngdkydefJ5NuXoQw_13_0"></a><a id="Tc_99lX9FZx90WZn55NNHlp2w_13_3"></a><a id="Tc_Yr_aI-H4wE2azH_eP0UQLQ_13_6"></a><a id="Tc_ajyR_7AJ8kmPIKG-gKFXTA_13_9"></a><a id="Tc_UmMVK_OsPUuQlsWJ7L8CzA_15_0"></a><a id="Tc_eiY-lzvTS0eSsJVzPkl0PQ_15_3"></a><a id="Tc_PzUVjvwzN0iUyoWtgm0WYg_15_6"></a><a id="Tc_lWtIh17Hv0-2JWOinORNww_15_9"></a><a id="Tc_OOc13ADAI0mWy2oPVMvbeg_17_0"></a><a id="Tc_l4TCUTaxrUCY0xtkBegllg_1_2"></a><a id="Tc_QPQo-I_jsEeI_3TwtiMwbw_1_5"></a><a id="Tc_bheY4tuSzke-VnzadrDy7A_1_8"></a><a id="Tc_-OlwLezF_ESGl4ZNmblKzA_2_0"></a><a id="Tc_M2GE4ZJYyE2B9sMojpjUYA_2_2"></a><a id="Tc_tJj6U4JNa0KmBjSqfivRFw_2_5"></a><a id="Tc_NRSniWz-FEqnwXN4NTGJHQ_2_8"></a><a id="Tc_IpDFRamK2UCeu-6boB9akQ_3_2"></a><a id="Tc_K_s8b1z-t0y3BscrZJIekw_4_0"></a><a id="Tc_295x-JnNDUOSoIXms-iTsw_4_2"></a><a id="Tc_6sKFPIq7YESdfSX4BKlovg_4_5"></a><a id="Tc_VkeAAZWCA0iePuQjY3sApg_4_8"></a><a id="Tc_Kh0hcRMeM0qVXsBajer36g_5_0"></a><a id="Tc_Obq3xOdJ206MhHzALJL-Kg_6_0"></a><a id="Tc_F8N2o60cFEa0ev6uh2QE8A_7_0"></a><a id="Tc_eyOOy-NSzECacZyVh4H_HQ_8_0"></a><a id="Tc_oPIHAKUBykmCrfSKuBN5Ig_9_0"></a><a id="Tc_P9QgCUY_AUmtlC0ufMT8sA_10_0"></a><a id="Tc_2M7LkQozCEGmSMDCrBa1OQ_10_2"></a><a id="Tc_5boBNqSeZ0aJv2nWJI-OQg_10_5"></a><a id="Tc_vOm_nt54hkqvgLZUxEfxoQ_10_8"></a><a id="Tc_R03pcS-IzkqFMOZo4y4anQ_11_0"></a><a id="Tc_WTTgS5JSlEa0FGiy3981pA_12_0"></a><a id="Tc_0KjTkHnRO0aIx3ZSbAdUSw_12_2"></a><a id="Tc_4HQvCm7NhkSjrIveM6QN-A_12_5"></a><a id="Tc_fwr3YkLgGk2NrBTzbA5tNg_12_8"></a><a id="Tc_OTIhPvlkQ0KhgUSIjWT_YA_14_0"></a><ix:continuation id="Tb_V8cEXaNm6UC0RVAzT43h1g_cont2" continuedAt="Tb_V8cEXaNm6UC0RVAzT43h1g_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">31, 2023, 2022 and 2021 are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:LeaseCostTableTextBlock" id="Tb_6tbDxFSsCkmFq_LB_V5q6w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:25.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Product / services*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_QSwl2AmY80adkhffvz0gCg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_feBNYCBDOUaGH1m-o6a5lQ_5_4">7,297</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_rglxkDWFOESLtoer65iEHw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_-10RpzLBbkyKY7eeHEChCw_5_7">5,427</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_MwkElhV-1UmpfvM7cwqj0w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_qf0PKI_Wske7HEqCU8ZIaQ_5_10">2,978</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_w8rDIieJWkWfpWIiv4XSUw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_ZUP7ecrYaEC5ono0ITKZCQ_6_4">587</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_DMi5sb8OTUuT5keU6YBerg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_GlwUl8ob8EupQA12QFu7IA_6_7">322</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_v_arZAXy-EqBQBV34KuibQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_gzqG1ohmXkCNq6QldKq0fw_6_10">430</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_1QQS8yEFjUib8d8knVG_9A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_HHoswrqAw0GfzcN_Py9iYQ_7_4">1,674</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_bXVg4s95EE6tnCE0idB63g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_zW-FicpTSU-ZPXud0Y1v4A_7_7">1,526</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_0bkVSRvn3EaEnUCrA02baQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_-Gug9BZioESNJ0JytCHOhA_7_10">1,605</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_NQsL3qslNkeZfRsITmZe9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_-hvGAfdD0kWWuRYOQ0_OzQ_8_4">1,111</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_4NfHaW5CA0yJLxDy_YXdhw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_HOgziTkD_U-QsyKg6mx5TQ_8_7">1,065</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_IIxy0K8yAk2AND2S5bQL0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_hAW6NiQ8jU-rVTKgjF5UYw_8_10">996</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_-NY5a4dCX0WxadlHLHXAPw_9_4">10,669</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_L87t0hHXNkq8fZQzERJgzQ_9_7">8,340</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_1nkEVv-a10qDpaWQRQoG5Q_9_10">6,009</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, Research and development, Sales and marketing and General and administrative</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_uv_1LhcD7E-B6TDX4TD_Ag_11_4">1,310</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_tXReuOqEOUGBOz-Q93LOdw_11_7">1,296</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_FFC_HZvqbE-6qr8RMl3M7A_11_10">1,306</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_qpsYdsU2CkS0GqBgHpV4zA_12_4">4,874</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_vnsMvmIMu0WxQZBynQIE4A_12_7">4,992</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_764UDWowP0ihSwLUaqtrZA_12_10">5,086</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_T3auLfhOPkKTWhhlM2McLA_13_4">6,184</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_TyM7Flvzqku_pqW99VJHAw_13_7">6,288</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_w94AnD980EOKFOcaY0a6_Q_13_10">6,392</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_I02iTID6AkW1nKOW3zfrnw_15_4">16,853</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_r0BAAev3BUGI0lE2r77a_A_15_7">14,628</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_N5j4XEDkZUi1qR-X1NbQhQ_15_10">12,401</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="11" style="vertical-align:bottom;width:96.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Product / services, sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_jH5MMxykMk2ABHmN4NaNyw">2.1</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_eBp-gx_5zkOrGlwcGFbbOw">1.8</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_ybptBt_X_EuMCImI7HFofg">1.9</ix:nonFraction> million for the years ended December 31, 2023, 2022 2021, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our corporate headquarters, shown below under finance leases, has an original lease term of <ix:nonNumeric contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" format="ixt-sec:durwordsen" name="us-gaap:LesseeFinanceLeaseTermOfContract1" id="Narr_6f-7dHg1jEOchIFYrI_j1w">22 years</ix:nonNumeric>. All other locations are treated as operating leases, with lease terms ranging from <ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw" format="ixt-sec:duryear" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_CYlBRMA1506GtxCN0t6CJQ">1</ix:nonNumeric> to <ix:nonNumeric contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_xCHRm1x_r0KH9DEhHPbxlA">16 years</ix:nonNumeric>. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" id="Group_FVy6p9S7uUOHzNhhmLurJw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_-qFcj7TfXU-yRAF7HJsdSw_4_3">6,252</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_QMjVxE1sf0WSbNbxCqiDDQ_4_6">6,529</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_RHbrLcOJDUOFssdVWDUQMg_4_9">12,781</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_VCO2F6nh-k-mqdD0Svc27A_5_3">5,930</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_-_HI3WD5_0WV20dHzX--1A_5_6">4,970</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_JijN7tb-bEO3fgeSJZYPIA_5_9">10,900</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_Ai2boDzK-kKJ-vXWIor8zQ_6_3">6,008</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc__wnFpQIem0OXziPCIaXVFg_6_6">3,613</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_Gi5T1NWCHEabda67mo5asQ_6_9">9,621</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_sLRdd3sGT0292DjfvmrrFw_7_3">6,128</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_IgZ3YEDqWU6W8dB1-SOvZA_7_6">2,530</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_xVQRBtI1jk2MoEiF2EU9Ig_7_9">8,658</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2028</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearFive" scale="3" id="Tc_J9KiczuEFUaA-5IqnxztwA_8_3">6,251</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive" scale="3" id="Tc_D0JShm0J9ky9z6AYYjUWbA_8_6">1,926</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" scale="3" id="Tc_Ncj5NbGUj0OQjjg0pxX9Rg_8_9">8,177</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueAfterYearFive" scale="3" id="Tc_AiId4pwm1UujJTyQscuNLA_9_3">55,336</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" scale="3" id="Tc_tNTn4BiYwka_b_GpSAk5bA_9_6">23,205</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" scale="3" id="Tc_x6-c6eW2fEKXKCsFhzlWqg_9_9">78,541</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDue" scale="3" id="Tc_CS_2DEpaSEGkOCUnblgmhA_10_3">85,905</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue" scale="3" id="Tc_XfFsjMWR4kqQ1SGqTc4U8w_10_6">42,773</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" scale="3" id="Tc_bIJFh_ptdk-1GmtLoK89pw_10_9">128,678</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc__sD7HHQgC0SRP4qgeztX8A_11_3">40,720</ix:nonFraction>)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_9hJ0b862YESeb-RoJDjS9w_11_6">12,071</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_qpkdeT2EsUOYd_bmuLPPfg_11_9">52,791</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiability" scale="3" id="Tc_1nDtunxSKky33L-IcGAUoQ_12_3">45,185</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_Uq2oVhyxuEeFfPJ3oS2yxw_12_6">30,702</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_9Z5NWpjbP0yEyUcUVmBLSw_12_9">75,887</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The table above does not include options to renew lease terms that are not reasonably certain of being exercised, nor leases signed but not yet commenced as of December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:LeaseQuantitativeDisclosureTableTextBlock" id="Tb_kyjGsV8ZGUyLUl0sSmMy9w" continuedAt="Tb_kyjGsV8ZGUyLUl0sSmMy9w_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">24</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_CbEA99XFVESrdpkxtEnPWg_1_2"></a><a id="Tc__PjXnZwCU02dSvET7j6WRA_2_0"></a><a id="Tc_dHvwZIwPbkaEtBl82waMyg_2_2"></a><a id="Tc_5uy8qNGIVUi40S-AVyTMgQ_3_0"></a><a id="Tc_Mz9b_6y_YEellV5QcwolKw_4_0"></a><a id="Tc_atw-uBrjsk2u5gZ0xwpLzA_5_0"></a><a id="Tc_u46w7CUr-UWtmNV1VD_KHQ_6_0"></a><a id="Tc_g1thy4cvFUSZjmH3f2rqsA_7_0"></a><a id="Tc_fjIj8EY7FU2z9lbgSwfbdg_8_0"></a><a id="Tc_pFoL9KRprE-00orQMcfJug_2_2"></a><a id="Tc_ZFYxtn_JVkaLQ5N3ji43Jg_3_0"></a><a id="Tc_2MbPqDN7REqIZ28twsnaTQ_3_2"></a><a id="Tc__on1mJcyyEeVtgIw0hq2Eg_3_5"></a><a id="Tc_uk3X4awB206gwKNkCB0qVA_3_8"></a><a id="Tc_Nz8FK21dtUWh8dqRcbOc9Q_4_2"></a><a id="Tc_VI1f7uP2eESPsnApTeODKg_5_0"></a><a id="Tc_yse-cVOFF0CjwCv2NQwBDA_5_2"></a><a id="Tc_91Ai8PiZsk6rFoZN7LAi0w_5_5"></a><a id="Tc_Pi63eXEA0kmqTVEHmIVS8g_5_8"></a><a id="Tc_9jN9jclI4EK8yd0DlYRE4A_6_0"></a><a id="Tc_N0nZYDL6U0CKkA0zRtmkjg_7_0"></a><a id="Tc_NuMRQObiPESzp5TdwC_PNw_8_0"></a><a id="Tc_F03rXP6nwkisFHssX9PRVA_9_0"></a><a id="Tc_PmLTzOhKOEuHmmcCVns7nA_9_3"></a><a id="Tc_REyyJT0gmE2SVhuE5HLuaA_9_6"></a><a id="Tc_thZWENObok6tQYWoi6H5ig_9_9"></a><ix:continuation id="Tb_V8cEXaNm6UC0RVAzT43h1g_cont3"><ix:continuation id="Tb_kyjGsV8ZGUyLUl0sSmMy9w_cont1"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" format="ixt-sec:duryear" name="us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1" id="Tc_erhPci7sNkqO8WFSHi6Upg_4_3"><span style="font-size:8pt;">11.5</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" format="ixt-sec:duryear" name="us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1" id="Tc_EgwREAimq0CyA99FlLCFpA_5_3"><span style="font-size:8pt;">13.1</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent" scale="-2" id="Tc_FPzMz3jZ5EulbCqw_pScXQ_7_3">5.5</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent" scale="-2" id="Tc_oVR9wImX7kKj62VnjPK_3A_8_3">10.5</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating section of our statement of cash flows. Our cash flows from our finance lease include an interest and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="acls:LeaseCashFlowInformationDisclosureTableTextBlock" id="Tb_WSsyGQQuiEy1IlxJslTdDQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="3" id="Tc_a-nHzWRmqUCtwIRROuYZnA_5_3">10,669</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="3" id="Tc_1l7zF5hupkSOeo8EBzbtbQ_5_6">8,340</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="3" id="Tc_fC2r_49VTkqsWGzk9hfMaQ_5_9">6,009</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestPaymentOnLiability" scale="3" id="Tc_LGAV_r8AS0ei22fjl346mA_6_3">4,874</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestPaymentOnLiability" scale="3" id="Tc_13Axu9yxdECeJym5nAlWWw_6_6">4,992</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestPaymentOnLiability" scale="3" id="Tc_gdrs6xJrvEiEyjwKLJE__A_6_9">5,086</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_goH-ueYG4EWtm8Ge2OPGjQ_7_3">1,240</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_nfi9nQZob0O8-M6JzgUYig_7_6">987</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_YandEreV-0ajZOoQkB_1VQ_7_9">763</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_tNiYhGbE0UiQfKR8ebbrhA_8_3">26,890</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_dVg61MQ2O0mkG_-W1dEbyw_8_6">6,173</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_DxU6swzg2UWFHdRLntoOZg_8_9">8,670</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="Tc_wA7mNGZ8ak6PJMTpbyCulw_2_2"></a><a id="Tc_-NZCn0gSO02_0QlFpWiFsA_3_2"></a><a id="Tc_5mZzcao1_0yZBssw4RP1zA_3_5"></a><a id="Tc_jek0ECyxL0-9NAM0IDLMCA_3_8"></a><a id="Tc_HD9CN1jX2ESfjLp5W1RAHw_4_2"></a><a id="Tc_Aao0JewrvE-NdTlHOOzc0w_5_0"></a><a id="Tc_LrMExNLuwEaJTrPta8cOLg_5_2"></a><a id="Tc_xjfhdwS_b06m_mg9EGGFhQ_5_5"></a><a id="Tc_oxSCuAF2aU-KPzzVAQwg4g_5_8"></a><a id="Tc_1y7trkpv8kyeu9grHEcrSw_6_0"></a><a id="Tc_jcFQun__mU-I-PA5Upng1Q_7_0"></a><a id="Tc_06zHdaIvrE6pcHPUWl4J7A_8_0"></a><a id="Tc_LlkKaQ5N6kCr9pWb_SwvNw_9_0"></a><a id="Tc_8KepOa1VOUKaauYWS0ncQg_9_2"></a><a id="Tc_Aij-FcQamECJuz-vCr2FoA_9_5"></a><a id="Tc_QE0VlTtwRESK2U3wIlqVdg_9_8"></a><a id="Tc_lfMNmf0sg0maHogvGNm60A_11_0"></a><a id="Tc_Mfj8btX9Y0yyAaeqDhfRqw_11_2"></a><a id="Tc_zS_x7HHhzEKPWFAcLGONGg_11_5"></a><a id="Tc_uzJnk2WIH06HwDPIBelWYg_11_8"></a><a id="Tc_QNcWoB3aRUGMj6m9pYKtIw_12_0"></a><a id="Tc_5_ngKN5z60OTcYQyPHpZuQ_13_0"></a><a id="Tc_SSM1S4ukY02DKPbO3lKF2g_13_2"></a><a id="Tc_aH3Be7AIdUSGawE030pJSw_13_5"></a><a id="Tc_qvZwPYmmhE2FNDGTzAHTug_13_8"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ProductWarrantyDisclosureTextBlock" id="Tb_1M4aafY-WE-V5EyXzyB4EA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;10. Product Warranty</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally offer a <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" format="ixt-sec:durwordsen" name="acls:ProductWarrantyPeriod" id="Narr_ttNTeTSOgEuvgTVE9ZiL-w">one-year</ix:nonNumeric> warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The changes in our product warranty liability are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock" id="Tb_0fCjyqKDuECQK538payqUQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc__F0o17G6QEK-UkaqWwtOJA_5_3">10,487</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_o4e0YBEAG066aNxnx8-EeQ_5_6">6,924</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_gKU6A_f3J0S33HWNZD1LCQ_5_9">4,612</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_xDBIEsW9T0qJZQdnFlQrsQ_6_3">12,893</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_z4zLpqDDi0uEHEk1ttYwlA_6_6">10,597</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_iUpmG1BybkewG_vXQP950g_6_9">7,808</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_gEPnHrBSAkmXsiYaAmWqRw_7_3">10,230</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_3ARfz9GZ5EGnnIHAroZo1w_7_6">6,798</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_2V4YzDwFakGrT_lBk1M8gQ_7_9">4,282</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_Bu3jM25j40Wu2tsaQY5Vug_8_3">3,607</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" sign="-" scale="3" id="Tc_QY_qL_-Vj02QQ1lbWYHCGw_8_6">236</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" sign="-" scale="3" id="Tc_wD-4PTrZMUKAfevT0MQQaA_8_9">1,214</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31 (end of period)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_dWEBzbIEXEqQwo6WmWwQhg_9_3">16,757</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_BEdP-obnnUOUESVBHy8LDg_9_6">10,487</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_HV01M4AFHUWqO-uKnFE1fg_9_9">6,924</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_bmOxUH9N9EG8sCOvMcJkUg_11_3">14,098</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_T8Ku04DFtUimoxl_8R53Lg_11_6">8,299</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_JwkYpnMgl0qJrNfnogLyDA_11_9">6,424</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term (within other long-term liabilities)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualNoncurrent" scale="3" id="Tc_k2GLwvn64kyil50hiv1sPw_12_3">2,659</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualNoncurrent" scale="3" id="Tc_yIiaKLUWmESspeq9boUqCw_12_6">2,188</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualNoncurrent" scale="3" id="Tc_qMfmenVtUU2wX2p3CHJ50w_12_9">500</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_sts-2U7_FE2_jqtMzwGU2A_13_3">16,757</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_7hvkeuzA5EWdsABJunf3vA_13_6">10,487</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_T44XYxnQx0eNDUvYDZyC3w_13_9">6,924</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">25</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:DebtDisclosureTextBlock" id="Tb_wzegq61XwkWBJhJu9Nl0IA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;11. Financing Arrangements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility for the sale price of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_Rs_z9QPg402tAph_TIU5fg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyHeldForSale" scale="6" id="Narr_8c_gGlfCfkCMwZ9PJDhpMg">48.9</ix:nonFraction> million. As part of the sale, we also entered into a <ix:nonNumeric contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_sHJvOKOamEWttzyDVvahBg">22-year</ix:nonNumeric> lease agreement with the buyer. The sale leaseback is accounted for as a financing arrangement for financial reporting purposes and, as such, we recorded a financing obligation of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="6" id="Narr_z-oSyrpg4kGOe17m9dfdKg">45.2</ix:nonFraction> million as of December 31, 2023, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="6" id="Narr_gm-cF8viMUaS5eyQ8OHciA">1.5</ix:nonFraction> million of which is classified within current liabilities. The associated lease payments include both an interest component and payment of principal, with the underlying liability being extinguished at the end of the original lease term. As of December 31, 2023, we had a security deposit of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:SecurityDeposit" scale="6" id="Narr_1rbsTVaIik-q7p9aK5U_XQ">5.9</ix:nonFraction> million related to this lease.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On April 5, 2023, we terminated the Senior Secured Credit Facilities Credit Agreement, as amended (the &#8220;Credit Agreement&#8221;), with Silicon Valley Bank that we entered into on July 31, 2020. The Credit Agreement provided for a revolving credit facility covering borrowings and letters of credit in an aggregate principal amount not to exceed $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_4_5_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_kkaSLd1LM0C9esG8HkUCVA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_fODFGRx7n0CYAFIpjgq5gw">40.0</ix:nonFraction> million. Our obligations under the Credit Agreement were secured by a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. Upon termination, these liens and all other obligations under the credit agreement, were released. A letter of credit issued by Silicon Valley Bank, a division of First Citizens Bank &amp; Trust Company (successor by purchase to the Federal Deposit Insurance Corporation as Receiver for Silicon Valley Bridge Bank, N.A.) as successor to Silicon Valley Bank in the amount of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_28_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_ua0-Jcp4OUSOLk7dWfem3A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LettersOfCreditOutstandingAmount" scale="6" id="Narr_tQ-FUrOMX0mSKRfAhwWa0g">5.9</ix:nonFraction><span style="white-space:pre-wrap;"> million securing our lease on our corporate headquarters was terminated on December 28, 2023.  The underlying cash collateral held at Silicon Valley Bank was released on December 28, 2023, in conjunction with the letter of credit termination.  A replacement, cash collateralized letter of credit was issued on December 14, 2023 with UBS Bank USA and is classified as long-term restricted cash on our balance sheet at December 31, 2023.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><a id="Tc_IkvLIi4Yc0eRQfqgske4Jg_1_2"></a><a id="Tc_0FZxVYgYT0W_Hg7AzC5XpQ_2_2"></a><a id="Tc_5fzos6aGUkK_S7SLY_vQEA_3_2"></a><a id="Tc_gCf_8fvisE2w2nNEXDOYuA_3_5"></a><a id="Tc_vIjokdtw2UOm_tgKk7Q1XA_4_2"></a><a id="Tc_rgWnCmOIT0OUdpwa-WP1UQ_5_0"></a><a id="Tc_XvV5OF_lfU6SMY9zijoTKQ_6_0"></a><a id="Tc_c5i9KYXZc0GB1ayt-pk1tw_7_0"></a><a id="Tc_GwV0BYnpGk-vnbiG38Cncw_7_2"></a><a id="Tc_Y--AmuT7qkGQTjgUA-Dadw_7_5"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock" id="Tb_3uTsx-v1_EeXmOYuHKDduA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;12. Employee Benefit Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Defined Contribution Plan</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Long-Term Investment Plan, a defined contribution plan. Eligible employees may contribute up to <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_RegularEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_RegularEmployeesMember_X9LY_jFt8kaVFHrGbcG7ug" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" scale="-2" id="Narr_1zi9B9EXdk241lkQmi3cXg">35</ix:nonFraction>% of their compensation on a before-tax basis subject to Internal Revenue Service (&#8220;IRS&#8221;) limitations. Highly compensated employees may contribute up to <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_TdcImKyWREecvPdfWIEV-g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" scale="-2" id="Narr_S3PV5xWh-kSo1zpyjWfjMQ">16</ix:nonFraction>% of their compensation on a before-tax basis subject to IRS limitations. In 2023, 2022 and 2021, we provided an employer match of <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" scale="-2" id="Narr_zhf_eR3_806UNodkXtpnYQ"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" scale="-2" id="Narr_tsSXN2ZcGUmPds0qM9ke6w"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" scale="-2" id="Narr_l6554A6wdU2Kw6eTSo75sA">50</ix:nonFraction></ix:nonFraction></ix:nonFraction>% of employees&#8217; pre-tax contributions on the first <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent" scale="-2" id="Narr_WB1nY8s08U6pjIzFDUhrQg">6</ix:nonFraction>% of eligible compensation. Total related matching contribution expense was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_V14KZN9uh0GfSKvg5Js9aw">3.4</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_ss1YaPvJhkOrBQoEslciJQ">2.7</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedContributionPlanCostRecognized" scale="6" id="Narr_n16Cv3LQa023lvwO6YpGlg">2.2</ix:nonFraction> million, for 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Compensation Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We operate in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have recorded an unfunded liability of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" scale="6" id="Narr_v-RZ4WABRkOEGA3l759hkg">3.2</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" scale="6" id="Narr_5VAalBPZMEicTS2cuCxsgg">3.5</ix:nonFraction> million at December 31, 2023 and 2022, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" id="Tb_YQz62JPHiUysNoxp9n4mtQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other long-term liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" scale="3" id="Tc_s7xu4kWRNkesv-SLAS0fEg_6_3">3,160</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" scale="3" id="Tc_EBPj_jZw8UifDWx0zlgwRA_6_6">3,516</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" scale="3" id="Tc_wNTFl_ee6EWuLc2_FmgSVA_7_3">3,160</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" scale="3" id="Tc_AGicPnznE0q0oLJ0hmHQNw_7_6">3,516</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The expense recorded in connection with these plans was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedBenefitPlanAdministrationExpenses" scale="6" id="Narr_eRIWY6yuPU6hriC_25Zw3g">1.7</ix:nonFraction>&#160;million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedBenefitPlanAdministrationExpenses" scale="6" id="Narr_Q1UBemUXG0WWeAd60TsyKg">1.5</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DefinedBenefitPlanAdministrationExpenses" scale="6" id="Narr_voSmpLFBoE6sOgc2TQ6x2g">1.5</ix:nonFraction>&#160;million during the years ended December 31, 2023, 2022 and 2021, respectively.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">26</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" id="Tb_n5-NHRcAP0e4zWmwbvRxGQ" continuedAt="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;13. Stock Award Plans and Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Equity Incentive Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan (the &#8220;2012 Equity Plan&#8221; or the &#8220;Plan&#8221;), which became effective on May&#160;2, 2012.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2012 Equity Plan, as amended, reserves <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_naxewLbTwEKuM5yP6gUdnA">9.5</ix:nonFraction>&#160;million shares of common stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_M6nYNpSrtUiygA6Q9tzOlA">0.001</ix:nonFraction><span style="white-space:pre-wrap;"> par value, for grant and permits the issuance of options, stock appreciation rights, restricted stock, restricted stock units, stock equivalents and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors, and consultants of the Company.  The total number of shares reserved for issuance under the Plan is the sum of </span><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw" decimals="-4" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" scale="6" id="Narr_bTnGJStpjUeRbPXQB4HB6A">7.76</ix:nonFraction> million shares approved by the shareholders, and <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw" decimals="-4" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" scale="6" id="Narr_0vQMidAWu0mAXnmBpwzsiA">1.78</ix:nonFraction> million shares added in accordance with the terms of the Plan as a result of the expiration or forfeiture of awards granted under our prior equity plan. Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) revert back to the Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The term of stock options granted under the Plan is specified in the award agreements. Unless a lesser term is otherwise specified by the Compensation Committee of the Company&#8217;s Board of Directors, option awards under the 2012 Equity Plan will expire <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_uOkEC3DECUKHo7vPylY9jQ" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_ttUeTZhWLEmjci_oNyFDsQ">seven years</ix:nonNumeric> from the date of grant. Under the terms of the Plan, the exercise price of a stock option may not be less than the fair market value of a share of the Company&#8217;s common stock on the date of grant. Under the 2012 Equity Plan, fair market value is defined as the last reported sale price of a share of the Company&#8217;s common stock on a national securities exchange as of any applicable date, as long as the Company&#8217;s shares are traded on such exchange.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Stock options granted to employees generally vest over a period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_0pbPj2-2P06AKJyFfSEF2w">four years</ix:nonNumeric>, while stock options granted to non-employee members of the Company&#8217;s Board of Directors generally vest over a period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Vgn0ucnjykmLprXk3j_aGA" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_4XKbRiZfO0una_5Sg8X0Kw">six months</ix:nonNumeric> and, once vested, are not affected by the director&#8217;s termination of service to the Company. In limited circumstances, the Company may grant stock option awards with market-based vesting conditions, such as the Company&#8217;s common stock price, or other performance conditions. Termination of service by an employee will cause options to cease vesting as of the date of termination, and in most cases, employees will have <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA" format="ixt-sec:durwordsen" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" id="Narr_R7NApvCMo02eG0in7LuNYw">90 days</ix:nonNumeric> after termination to exercise options that were vested as of the termination of employment. In general, retiring employees will have <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA" format="ixt-sec:durwordsen" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" id="Narr_jkqUuidln0airETOEtZwTg">one year</ix:nonNumeric> after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Restricted stock units granted to employees during 2023 had both service-based vesting provisions and performance-based vesting provisions. Restricted stock units granted to employees generally vest over a service period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_r2QDj_WbGU2MXA9cI6rdwA" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_D1OXeWxowkG1v8wjKK2QuQ">four years</ix:nonNumeric>, while restricted stock units granted to non-employee members of the Company&#8217;s Board of Directors in 2023 vest over a service period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_qkh1OMbVZUyknnxw8G32NQ" format="ixt-sec:durwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" id="Narr_Pf21h3B8dUeo8efn1tc8ig">one year</ix:nonNumeric>. We have granted restricted stock units to executive officers and other senior employees with performance vesting conditions, which may be subject to further service-based vesting terms. Unvested restricted stock unit awards expire upon termination of service to the Company. We settle restricted stock units upon vesting with newly issued common shares. <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_vmAw9b532UyKEU9Sr1y8pA" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_wIUjz2la50O7SrfynmbPNg"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_b4oP4P5xgEGsQW04yyL2vA" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_G7B3L1ZSmkCxuzXRQutOVA"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_ueAU0cUZWkCEoZ57czvWIQ" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_vpTmfv3-CU6mdOJ-6PnVZA">No</ix:nonFraction></ix:nonFraction></ix:nonFraction> restricted stock was granted during the three year period ended December 31, 2023. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" scale="6" id="Narr_qIjB5Hia2k-D-x_-XLDVfA">0.8</ix:nonFraction> million shares available for grant under the 2012 Equity Plan. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Narr_AKJfs8Dmo06BBKQYK7z0zw">three</ix:nonFraction> thousand options outstanding and <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="6" id="Narr_odCQSvD4sUyb-D0-JlLJnw">0.5</ix:nonFraction>&#160;million unvested restricted stock units outstanding under the 2012 Stock Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Employee Stock Purchase Plan</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2020 Employee Stock Purchase Plan (the &#8220;2020 ESPP&#8221;) provides our employees an opportunity to purchase common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A" decimals="2" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" scale="-2" id="Narr_iGmpUmh-V0Sn7o3-2b7VAQ">10</ix:nonFraction>% of the employee&#8217;s salary as elected by the participant, subject to certain caps set forth in the 2020 ESPP. Employees may purchase the Company&#8217;s common stock at <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" scale="-2" id="Narr_nxj_avZWYEi6m9CEmnx7hw">85</ix:nonFraction>% of its market price on the day the stock is purchased.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2020 ESPP is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense over each offering period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ" format="ixt-sec:durwordsen" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" id="Narr_p4GmR2xhQ0SrM9SvE7NREQ">six months</ix:nonNumeric>. </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">27</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_LN6qSJulFUu-hmYcr7rEYw_2_3"></a><a id="Tc__K0ncjdxkEm-RnKwDnCBbA_3_0"></a><a id="Tc_WYFp60Jj9kqyxgrIcXjOxA_4_0"></a><a id="Tc_5Oy1xNlZIkOGdwmyvNpURQ_4_3"></a><a id="Tc_BCeQMb4ycE6eth7hfphBvw_5_0"></a><a id="Tc_VTb38xt7zU6A58mT8n35TQ_6_0"></a><ix:continuation id="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont1" continuedAt="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Compensation expense relating to the 2020 ESPP was approximately $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_uU5O_W7pf0iDAbKecM6jwA">0.4</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_NNvZ4Hd_I0aMDgcN7QbpFw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_y4-Jjr1KW0Sf9BYo8TMuCw">0.3</ix:nonFraction> million, and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_lsl0Qfi_V0WmHE7FGXZAiw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_uPzWYrUH-UOPGQQw-L-UHA">0.2</ix:nonFraction> million for the years ended December 31, 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were approximately <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_KNDxXdNZpkydy7gB3tHtqw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" scale="6" id="Narr_s6GBKKDlTkSX7G9zHeODUQ">0.9</ix:nonFraction> million shares reserved for issuance and available for purchase under the 2020 ESPP, with <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="0" id="Narr_NKYFWwWNmkq2rhtT4r13vA">9,965</ix:nonFraction> shares purchased on that date to be issued pending settlement. Less than <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_T1p77pG58E-62u-Xc6gndQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="6" id="Narr_lbRdsC9OwUis7yXTus8ilw"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember__5vZm9qvmEyx4PGXJ2sJsQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="6" id="Narr_EFMsCyqYhE6w4FGHaU2SWQ"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="6" id="Narr_NdksTXVpU0Wz_YxMzmHIjQ">0.1</ix:nonFraction></ix:nonFraction></ix:nonFraction> million shares were purchased under the 2020 ESPP for each of the years ended December 31, 2023, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Valuation of Stock Options and Restricted Stock Units</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the purpose of valuing stock options with service conditions, we use the Black-Scholes option pricing model to calculate the grant-date fair value of an award. </p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" id="Tb_djBUPNQF3kmJmrYu1d0u5A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected volatility</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" scale="-2" id="Tc_i1nIxXeru0-fgBhhohl7dQ_3_3">53.07</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected term</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" id="Narr_i6Sj6eBQPU-6mMfpIGAW-Q">4.71</ix:nonNumeric> years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" scale="-2" id="Tc_M4Rncxh7sk-vUdm-5Phidg_5_3">1.22</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected dividend yield</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="4" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" scale="-2" id="Tc_3OjlOYVgU0e318vvyV5NoQ_6_3">0.00</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">There were <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" scale="0" id="Narr_SVKlh-zqz0iB-l99nKmakA"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" scale="0" id="Narr_fTIofcFX1ky_TOo7f339LA">no</ix:nonFraction></ix:nonFraction> stock option awards granted in 2023 and 2022. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The fair value of the Company&#8217;s restricted stock units is calculated based upon the fair market value of the Company&#8217;s stock at the date of grant.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Summary of Stock-based Compensation Expense</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We use the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. We estimate forfeitures at the time of grant and revise them, if necessary, in subsequent periods, if actual forfeitures differ from those estimates. The term &#8220;forfeitures&#8221; is distinct from &#8220;cancellations&#8221; or &#8220;expirations&#8221; and represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="2" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" scale="-2" id="Narr_q3jdqefgYESPAHbykghuDg"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="2" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" scale="-2" id="Narr_TWO7uU-Cc0GJ77RMzMKRHg"><ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="2" format="ixt:numdotdecimal" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" scale="-2" id="Narr_cVSQEKNuQE-hMs-uyc3pVQ">5</ix:nonFraction></ix:nonFraction></ix:nonFraction>% per year was applied to stock-based awards, including executive officer awards, for the years ended December 31, 2023, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the years ended December 31, 2023, 2022 and 2021, we recognized stock-based compensation expense of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_tgMqxMOBDECEnOyevleaWA">18.3</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_pRYpx3onDEm37CiO6urWwA">13.4</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_8UGp7TcSDkq8QUk4pg8X4A">12.1</ix:nonFraction>&#160;million, respectively. We present the expenses related to stock-based compensation in the same expense line items as cash compensation paid to our employees. For the years ended December 31, 2023, 2022 and 2021, we used restricted stock units in our annual equity compensation program. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The benefit of tax deductions in excess of recognized compensation cost is reported in the consolidated statements of cash flows as part of cash flows from operating activities. Axcelis had tax deductions in excess of recognized compensation cost of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="acls:BenefitOfTaxDeductionsInExcessOfCompensationCost" scale="6" id="Narr_nRefigZkN0uK1gMu-LPknA">10.2</ix:nonFraction> million for the year ended December 31, 2023 which resulted in a tax benefit of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" scale="6" id="Narr_Y-WzF-z8a0KqaYaEAvy2Zw">2.2</ix:nonFraction> million. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">28</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_dc8b1f78_cd1d_4000_a55d_8d8ceb5fb38b"></a><a id="Tc_k2wlT0xGuk2rxR986pvXaw_1_7"></a><a id="Tc_D8F2akpbBEuUbHq9SuxomQ_2_4"></a><a id="Tc_BafA5LlZh0-b7oOIJYk0AQ_2_7"></a><a id="Tc_Sdyr5Jk3PUGuVHp7DUQ3-g_3_4"></a><a id="Tc_aiy-3UmdR0aN-FhST0sqbQ_3_7"></a><a id="Tc_Of8DWdG_x02Qm7HP7tTdZA_3_9"></a><a id="Tc_17At5PjbukuGgXPwukhFIQ_4_4"></a><a id="Tc_5rfVcvWuYk2hhMcXMxtsZQ_4_7"></a><a id="Tc_NEIDEFxKDEuEWdbESK_MuQ_4_9"></a><a id="Tc_UB89xc27M02Tpn4MmyxgTw_5_2"></a><a id="Tc_bagWGLDqaU-kcfrHYR9MDQ_5_4"></a><a id="Tc_EyV_-4-tpkeEPXgWUNcKmA_5_7"></a><a id="Tc_KQ_zR57sM0ynjgk5rR_BpQ_5_9"></a><a id="Tc_gct2gjsK50KKlyejdUwANA_6_2"></a><a id="Tc_h10ZBwrpcUKcecZK32zh9A_6_7"></a><a id="Tc_JWzr7n6RwEWJgeYSFhIUTA_6_9"></a><a id="Tc_ZW5ELgohoEqC5TH-jY-1LQ_7_0"></a><a id="Tc_tqvCoD60ZU2S4t19w7M12g_7_4"></a><a id="Tc_5xqTcjkIdkaOWVVQwDWDgw_8_0"></a><a id="Tc__FEbW57Ld0yH2lFOCBGrEw_8_2"></a><a id="Tc_UiA5ZIiyXkqWC_wMNA5_Ng_8_5"></a><a id="Tc_0T1vpo9NnkOB_P24pVvYoA_9_0"></a><a id="Tc_x9EQCDjuYk6Q9xyPIwImfA_10_0"></a><a id="Tc_pfY7zyIIikuGc-I4WaNwUQ_10_2"></a><a id="Tc_QZFec1JhPEOZ1rG3MgW9rQ_10_5"></a><a id="Tc_OiaY1nSEW0iZ9qJFbp8BSA_11_0"></a><a id="Tc_jViI1U5W9EKjmGMOPN4f9A_11_2"></a><a id="Tc_bGu8XWd1kkCB_G4glgzHRA_11_5"></a><a id="Tc_mOIaguso00C5myALKM8wsg_12_0"></a><a id="Tc_2_1A9sp1XUCPzeNQRvwPQA_12_4"></a><a id="Tc_6KYfPkCKs06JE0NgybIZZA_12_9"></a><a id="Tc_SRF2jcvTV0-S_4-0Am07yQ_13_0"></a><a id="Tc_EYJ77I6jqUuSZ88X9MsV5Q_13_4"></a><a id="Tc_4SpO8xHdg0yxjXDzrHuXrw_13_9"></a><a id="Tc_vJGhV3IrfEOCM_eBnoeJYw_14_0"></a><a id="Tc_Gf3RXtoRn02S4tJ5U9dRoQ_14_4"></a><a id="Tc_SuYU5p3cqUKlkRURnZ9dTQ_14_9"></a><a id="_c759eba7_1e32_430a_b0b2_073e57972db4"></a><a id="_c759eba7_1e32_430a_b0b2_073e57972db4_2"></a><a id="_c759eba7_1e32_430a_b0b2_073e57972db4_3"></a><a id="_c759eba7_1e32_430a_b0b2_073e57972db4_4"></a><a id="Tc_MJxIv1M7ikuEAKs2poZZ9Q_1_4"></a><a id="Tc_Y-wQVt1cRUqQw2wtNUx3cw_2_4"></a><a id="Tc_VSk-I2Bk7UqAkcEeoo4kHQ_3_2"></a><a id="Tc_Xy9gMrhFLky6hxujElArTw_3_4"></a><a id="Tc_9EkpuxvKWUCXLz9640-eig_4_2"></a><a id="Tc_MZH_E5NgIUiy5IQTTuPKlQ_5_0"></a><a id="Tc_ZrrkBmzA00WTbzxponJBRw_5_4"></a><a id="Tc_jnTjXCYxqk-W3La-7uxv-A_6_0"></a><a id="Tc_UlTgz2yJNkORIRfuYZy5eQ_7_0"></a><a id="Tc_yPu07NIywE-90aQlEP16Bw_8_0"></a><a id="Tc_6z7G7xwu0U2VmbPlcp2Y1w_9_0"></a><a id="Tc_YnQKaX95BkqiGeuL-MWpOQ_9_4"></a><ix:continuation id="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont2" continuedAt="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Stock Option Awards </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table summarizes the stock option activity for the year ended December 31, 2023:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" id="Tb_BsamaH0WYkWOmfpj411trA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Price</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Term</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(years)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_DVShAAFN6UeQnXBBqeGy6A_7_2">5</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_rUtxA3_vHUCvCQIIbSw_XQ_7_5">43.33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_NM5Fv5mFiEOQI1EI940saA_9_2">2</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" scale="0" id="Tc_Wjvv2K9D_0aqSoD54yRd6Q_9_5">13.75</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Canceled</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" scale="3" id="Tc_WjXZnBrjUU22KDWdHu9-PQ_12_2">3</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_utmbgYebFEStAc2xKqEsVQ_12_5">61.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" id="Tc_n3UVJsQQI0Sa_UVKrxCwjg_12_7">4.9</ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" scale="3" id="Tc_FnyNjBCdMEKecp9vPAdqSw_12_10">204</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercisable at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" scale="3" id="Tc_0rdHtVBMw0yf7ZxNW52e-A_13_2">2</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" scale="0" id="Tc_ati5gzXzskW5grjb3RHjLA_13_5">61.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" id="Tc_YCyxE30v-0GCVs9UdpgB_Q_13_7">4.9</ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" scale="3" id="Tc_gVC91bIZYE2yFsw3EbJ3Jw_13_10">102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Options Vested at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" scale="3" id="Tc_UCLnJ3FMBEe6sbs8Z5xCLg_14_2">2</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" scale="0" id="Tc_U0YM0cVQQ0y6hvNkH5fczA_14_5">61.81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" format="ixt-sec:duryear" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" id="Tc_R4N7GhqaU02XPvBRf7yWbQ_14_7">4.9</ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" scale="3" id="Tc_BHRhlidtu0-sNMLK6wmN_Q_14_10">102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The total intrinsic value, which is defined as the difference between the market price at exercise and the price paid by the employee to exercise the options, for options exercised during the years ended December 31, 2023, 2022 and 2021 was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" scale="6" id="Narr__oANReorrEyg5MZPEY4NNA">0.2</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" scale="6" id="Narr_Vws3Go_ja0eh70LLZdK8aQ">5.4</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" scale="6" id="Narr_rX34pIOygEeeA1MKBX9x-A">12.8</ix:nonFraction>&#160;million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For both the years ended December 31, 2023 and 2022, <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" scale="0" id="Narr_tXqdgCcumkm80fuIH8NU6w"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" scale="0" id="Narr_ohtzn4zuo0KRBuzrndirlw">750</ix:nonFraction></ix:nonFraction> stock options vested, respectively. <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" scale="0" id="Narr_DCjnvqVctUaXwrksgpuJBw">No</ix:nonFraction> stock options vested for the year ended December 31, 2021. As of December 31, 2023, there was less than $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_HDapt1gSVkub8a13ACadnA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" scale="6" id="Narr_V5nKeuhQfEOw6ga0MNHYmg">0.1</ix:nonFraction> million of unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Restricted Stock Units and Restricted Stock</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Restricted stock units represent the Company&#8217;s unfunded and unsecured promise to issue shares of the common stock at a future date, subject to the terms of the Award Agreement issued under the 2012 Equity Incentive Plan. Restricted stock unit awards granted in 2023 included time vested share awards and awards with performance vesting conditions. Restricted stock awards are issued shares of common stock that are subject to forfeiture on terms described in the Award Agreement, and may be granted under the 2012 Equity Incentive Plan. <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_ld-AGck6VEGgfQiDyR3rHw"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_1WnuVH7ogE69Fa_O3suOug"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A" decimals="-3" format="ixt-sec:numwordsen" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="0" id="Narr_iRdbZSy12kmag90AzF31KQ">No</ix:nonFraction></ix:nonFraction></ix:nonFraction> restricted stock awards were granted, or vested, during the years ended December 31, 2023, 2022 and 2021. The fair value of a restricted stock unit and restricted stock award is charged to expense ratably over the applicable service period. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an incentive in motivating selected employees and directors to achieve long-term corporate objectives.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Changes in the Company&#8217;s non-vested restricted stock units for the year ended December 31, 2023 is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" id="Tb_mgxTWqzbVE2k23XTMYn9Zg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted-Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date&#160;Fair</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares/units</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value&#160;per&#160;Share</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_iynMtLQPnUOj5Btf6raalA_5_2">725</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_sRfMBrlS9EKs5E_M12TbLQ_5_5">39.23</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" scale="3" id="Tc_v8ePdSXIRUqxbxyuFlq3QQ_6_2">220</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_cSDdLphL0EyniQpSB4OrYg_6_5">125.11</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" scale="3" id="Tc_2Gv1EABSLUS__EWeDzWXGA_7_2">397</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Tc_1uT9ZYbzP0WSiStN2st_mg_7_5">131.71</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" scale="3" id="Tc_wgIAN3xhbUKYKGQ7d0yqFw_8_2">10</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" scale="0" id="Tc_vqw7_GWV1kWhRxAi-yyYuQ_8_5">51.94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:13pt;"><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" scale="3" id="Tc_0e8kEfnEc0qpGZmgpe6gNw_9_2">538</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" scale="0" id="Tc_VRdWVwi2jEG5LRkeSapwAQ_9_5">77.22</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The weighted average grant-date fair value of restricted stock units granted for the years ended December 31, 2023, 2022 and 2021 was $<ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Narr_oZFlOoJUF0eZebiGiWU3ag">125.11</ix:nonFraction>, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Rz3ajLtnREywZskVvE3Fmw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Narr_MwNu8iPZPUKd07msRMsxRQ">55.47</ix:nonFraction> and $<ix:nonFraction unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_hpz_xxymo0GvoQRlITpX4A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" scale="0" id="Narr__wO6VbGTtUKK0u8KsnkJ7Q">38.54</ix:nonFraction>, respectively. Most restricted stock units provide for net share settlement to cover the employee&#8217;s personal income tax withholding obligations on vesting of the employee&#8217;s restricted stock units. Vesting activity above reflects shares vested before net share settlement. As of December 31, 2023, there was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_mZ2W82yrpkiUQ17ZsA1AFA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" scale="6" id="Narr__L-YR0BgJEGNvvd7tljAxA">31.7</ix:nonFraction> million of total forfeiture-adjusted unrecognized compensation cost related to non-vested restricted stock units </p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">29</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_n5-NHRcAP0e4zWmwbvRxGQ_cont3"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">granted under the 2012 Equity Incentive Plan. That cost is expected to be recognized over a weighted-average period of <ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_yyaUwrTP-EmOHl3wwJZx1w" format="ixt-sec:duryear" name="us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" id="Narr_Tig-lFobUE-l47PMd5XV7A">2.7</ix:nonNumeric>&#160;years.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:StockholdersEquityNoteDisclosureTextBlock" id="Tb_ZyEcqHu0uUOLd0WopctycQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;14. Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We may issue up to <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="6" id="Narr_oJbBeC2U_06dXBbh3pdM6A"><ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="6" id="Narr_fEBCdIypWU2lBfVPLrwngA">75</ix:nonFraction></ix:nonFraction> million shares of common stock without additional shareholder approval. At December 31, 2023 and 2022, there were <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesOutstanding" scale="6" id="Narr_Sy_LrSoQAUuBoNlRtiE_uw">32.7</ix:nonFraction> million and <ix:nonFraction unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesOutstanding" scale="6" id="Narr_1z6sG1hYdk6VdAk17stlYA">32.8</ix:nonFraction> million outstanding shares of common stock, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><a id="_260ac8b8_3332_4f4d_b2b8_f3c6b1f5ef65"></a><a id="Tc__-bz_7iGo0CFiDA9PyU55A_1_2"></a><a id="Tc_m9LndtLVSk6_eAmBW_Pbqw_2_2"></a><a id="Tc_1lrLu-SadUqfr00F4AsqHg_3_2"></a><a id="Tc_GKrW2VHogUqNaXUXPtmt7g_3_5"></a><a id="Tc_leJueyz1yU6eXCQPQKZIig_3_8"></a><a id="Tc_E6ZMVGjs-kiZv3Kfrjwovw_3_11"></a><a id="Tc_umqEViJCoES83RT10ed65Q_4_2"></a><a id="Tc_RHCj4rcDLkmmmmmjcE4Mqw_5_0"></a><a id="Tc_ytqBHqG0pU6LHA7XONqD0w_6_0"></a><a id="Tc_U50T0rirw0iUdCZ1X2qKYQ_7_0"></a><a id="Tc_JYd3NnkJQkmhi23D-dGd9A_7_2"></a><a id="Tc_FtD9W9wwY0Wbw5HWXpIicA_7_5"></a><a id="Tc_1T0XI-dKqkaijPaMxUqPpQ_7_6"></a><a id="Tc_imPTp3aqhU2_UJukkuGudw_7_8"></a><a id="Tc_OToNiObAc0C6xn0KxpvRgA_7_9"></a><a id="Tc_SHb7ENB40kiqYXwm9gwc9w_7_11"></a><a id="Tc_oqEEuvDmEUa2pyf4gDtoMQ_8_0"></a><a id="Tc_JN2Vdcnb2UKXw5syvc_rSQ_8_6"></a><a id="Tc_8kDulRnhVUysV6j-hAy5pQ_8_9"></a><a id="Tc_K5-6sXbrSUy7182r7DH7BA_9_0"></a><a id="Tc_sk870tppGUiTuPo35BqZyA_9_2"></a><a id="Tc_PQ2MpWz2i0mOWU_59a-sVg_9_5"></a><a id="Tc_TFOehjf8ZU-35ghBrSJATQ_9_6"></a><a id="Tc_5DvanctOg06UVv6Xe5mNDg_9_8"></a><a id="Tc__WskfJ-1T0qzJSULAyKFUQ_9_9"></a><a id="Tc_re2KlfyADka1hPPb4qKUNw_9_11"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:FairValueDisclosuresTextBlock" id="Tb_gmONnDbM6UiX-KFOU0_oag" continuedAt="Tb_gmONnDbM6UiX-KFOU0_oag_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;15. Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Fair Value Hierarchy</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#8217;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="font-style:italic;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;1</i>&#8212;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="font-style:italic;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;2</i>&#8212;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;3</i>&#8212;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Assets and Liabilities Measured at Fair Value</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our money market funds and short-term investments with maturities of 90 days or less at time of purchase are included in cash and cash equivalents in the consolidated balance sheets. Short-term investments with maturities greater than 90 days but not greater than 365 days are included in short-term investments in the consolidated balance sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth Company&#8217;s assets which are measured at fair value by level within the fair value hierarchy.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" id="Tb_qc6CzfXfgE-mWkpE37qu2w" continuedAt="Tb_qc6CzfXfgE-mWkpE37qu2w_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TzKiNwwh-USWhz8io11ABQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_JRP1fPtGQ0CngqkrqNnqDQ_7_3">118,278</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember__LfbETs_4Eyj_dMwV2UpJA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_SNILLz8gOEuwEL6mG14Uig_7_12">118,278</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lT-MAUt2vUucO6TyYUISFA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_DRGJ3TNgsE6dkWApKHANDg_8_3">339,240</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_-_DnTv_YvEaDkQKe7LmNQw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_rnZBjCZCd0q03cfH9Ma4GQ_8_12">339,240</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_xdayt9hO7UeoxVaiKsu3xQ" decimals="-3" format="ixt:numdotdecimal" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" scale="3" id="Tc_aKPPmlTZ8UeG4W_elJHsRg_9_3">457,518</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_UWPXctNjAU2YwBO-MipMgA" decimals="-3" format="ixt:numdotdecimal" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" scale="3" id="Tc_vcDpRKEVX0mQeSLEnnKa6A_9_12">457,518</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">30</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_c4254afb_2420_49a0_8907_be6098a2270a"></a><a id="Tc_FjBlxvofSUqpp-gTjsj_Kw_1_2"></a><a id="Tc_mhvn0lUshEKWFnLMozmZTg_2_2"></a><a id="Tc_lN0Ijxzs0EiCA6fOkW4Lbg_3_2"></a><a id="Tc_MPLO3G4gw0-iPefo_Hzxcg_3_5"></a><a id="Tc_BwMSx0IO-UGsyb_wkzPBSw_3_8"></a><a id="Tc_DOT0EaJBFky6UQSBZUn4lw_3_11"></a><a id="Tc_R9xzMuPKqEWHKUcKrrf5bQ_4_2"></a><a id="Tc_zhExddx-aU605oIPMG9mlw_5_0"></a><a id="Tc_FWqDTKR8DU6bCtbq2Cm2Dg_6_0"></a><a id="Tc_hPcnm-1vcESY3zIATKHh3g_7_0"></a><a id="Tc_xEdLiiKYFUWktVgmk3Wntw_7_2"></a><a id="Tc_jHfbBb94EUWwDUhcagEmMQ_7_5"></a><a id="Tc_aqO6rxgB0ECYpRVXso7glQ_7_8"></a><a id="Tc_04Jj_nNyVECJyDZVR9-CKQ_7_9"></a><a id="Tc_WNRbHbbYykOxTkw1ysaclA_7_11"></a><a id="Tc_yQ7dMT-XW0y0IGvOWyNBNw_8_0"></a><a id="Tc_H98U3kQ2WU2NzKX3q-fYvQ_8_6"></a><a id="Tc_xTsFoiSa0U-G-NDjGi8LCw_8_9"></a><a id="Tc_0WSlF06jr0OEYUFI6-sETA_9_0"></a><a id="Tc_lCUfXFcvjUKfjCcU3kMQ5Q_9_2"></a><a id="Tc_fN5DfArof06O_WhAmGQHXA_9_5"></a><a id="Tc_O5kF4xK-5EyjV7NF01WBKw_9_8"></a><a id="Tc_4Vpb3ucnHkyYekeyjor7Ig_9_9"></a><a id="Tc_NCfqMxt2GECy_l7jGG57yQ_9_11"></a><ix:continuation id="Tb_gmONnDbM6UiX-KFOU0_oag_cont1"><ix:continuation id="Tb_qc6CzfXfgE-mWkpE37qu2w_cont1"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_mavXQ4xISEaAsWrZ0L8ZhA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_rLzvxC4WIUOr1JcuBB8lNg_7_3">111,771</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_urRrssC6x0WGz17x6E4Hvg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_XWqiNfWj4E-z-9hfPQnH2w_7_6">25,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Kw8meW5Ew0CwJoeC9iNRTg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_3-hRL256CE-NTlt_zkaBVQ_7_12">136,771</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Cj73mXbaM02Io4RY6pFEpA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_UZHE8tsOSkWk8fTVTmvPWg_8_3">245,247</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_VEarHxZha0mjyeIA0BFTiw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShortTermInvestments" scale="3" id="Tc_My3DViJFAEW6sWXbnPZGkg_8_12">245,247</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_0pN4ZKO8KEG3rNUdHqr_YQ" decimals="-3" format="ixt:numdotdecimal" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" scale="3" id="Tc_fpDSPy3Sd0qc1LMmFHfzKQ_9_3">357,018</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FcTXrGNUaEORf0WBQjUsjA" decimals="-3" format="ixt:numdotdecimal" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" scale="3" id="Tc_L7WWSIsfBEupLcxktdfN_w_9_6">25,000</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_dPFQa6Iz_0yI2V8uS_VTkg" decimals="-3" format="ixt:numdotdecimal" name="acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" scale="3" id="Tc_JeIvyMlZ5k-2d4P6ERH9SQ_9_12">382,018</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:CommitmentsAndContingenciesDisclosureTextBlock" id="Tb_XSHvDGFInkWdh6imodRuVQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;16. Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In addition to the finance and operating leases discussed in Note 9, we have purchase commitments and other contingency considerations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Purchase Commitments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have contracts and purchase orders for inventory and other expenditures of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LongTermPurchaseCommitmentAmount" scale="6" id="Narr_OQbU2soHkUOeR5L9mAKlrA">304.1</ix:nonFraction>&#160;million at December 31, 2023, approximately $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2024_To_12_31_2024_srt_StatementScenarioAxis_srt_ScenarioForecastMember_MJ_ZopQwbUyFzH4dIn7oYw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LongTermPurchaseCommitmentAmount" scale="6" id="Narr_B3YLYgh4KUe1I9k96mAm6A">293.8</ix:nonFraction> million are expected to occur in 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Litigation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations. We are, from time to time, a party to litigation that arises in the normal course of our business operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Indemnifications</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:SegmentReportingDisclosureTextBlock" id="Tb_QybFNUfxJUOJilVgxAuncg" continuedAt="Tb_QybFNUfxJUOJilVgxAuncg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;17. Business Segment and Geographic Region Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We operate in <ix:nonFraction unitRef="Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="INF" format="ixt-sec:numwordsen" name="us-gaap:NumberOfReportableSegments" scale="0" id="Narr_j8AovvjTOECI6c8xtVEltQ">one</ix:nonFraction> business segment, which is the manufacture of capital equipment for the semiconductor chip manufacturing industry. The principal market for semiconductor capital equipment is semiconductor chip manufacturers. Substantially all sales are made directly by us to our customers located in the United States, Europe and Asia Pacific.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our ion implantation systems product line includes high current, medium current and high energy implanters. Other legacy processing products include curing and thermal processing systems. In addition to new equipment, we provide post-sales equipment service and support, including spare parts, equipment upgrades, used equipment, maintenance services and customer training.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">31</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_6b1Xf2cARU6HrD6Llc8HZQ_1_2"></a><a id="Tc_e79m6zoA6UeexNUCUAmUVQ_2_2"></a><a id="Tc_vI_ahnCASk2m2wzmlsJKZw_2_5"></a><a id="Tc_g62IiehF_UyGs-OQra7ftA_2_8"></a><a id="Tc_GCcMwDzTpUCZMA-j6zqYSA_3_2"></a><a id="Tc_GhoBS5-7Zk2uOJ9SKcFjsg_4_0"></a><a id="Tc_R1TXFgEg1kmX1kl3XAfQPQ_4_2"></a><a id="Tc_xm-MylyeNkKHwP6OZY8eAA_4_5"></a><a id="Tc_69kzQs5KyUmJR2DxGoIr4A_4_8"></a><a id="Tc_DSc11RMB7U6fkBxC2SwUgw_5_0"></a><a id="Tc_bBfUm4MmwkeAkxGV_bztqQ_6_0"></a><a id="Tc_2bNigqVOfUeBjov462x2ww_6_2"></a><a id="Tc__T6oSeXUd0O4zj-CqNpnsw_6_5"></a><a id="Tc_BSZH8CLl3UaWDo9nAO7mQw_6_8"></a><a id="Tc_0uav4de3QkedGNJchLuj7w_1_5"></a><a id="Tc_3zNfjtgTQE2ivW213KDdaA_2_2"></a><a id="Tc_zHhm0kMLNUyD6RbwHTsmzA_2_5"></a><a id="Tc_DYxIjRHWm0CDdQeipdloGg_3_2"></a><a id="Tc_HYNZL6NyXEWmqr_9MuWzEw_4_0"></a><a id="Tc_2nnj-ZOovEiySN6ILazq2A_5_0"></a><a id="Tc_LEMcXdTYQES7FkpCVWO8lw_5_2"></a><a id="Tc_I4o8rCBlpUGJVD-Gsmq8NQ_5_5"></a><a id="Tc_8We1ktVWr0GeYHnB3ntL9A_6_0"></a><a id="Tc_df_5WWwYjECo3fjdZAASHA_7_0"></a><a id="Tc_Wikuw14bi0mtT0YEpTJzQQ_8_2"></a><a id="Tc_zhiI3vUQMEOq7J2itPNtbQ_8_5"></a><a id="Tc_kdc7rub97Uqw0XaqxrTHHQ_9_0"></a><a id="Tc_BgozGUJql0-r18VXjE998Q_10_0"></a><a id="Tc_5q-Z9tcGVUuHC12ioYwtOQ_10_2"></a><a id="Tc_JZCU6KDcDkGs1TwBs3wGQA_10_5"></a><a id="Tc_4A0Z385deUyDpN9pPcTAmw_11_0"></a><a id="Tc_oK97FrmUnUeBsz02hFNvOw_12_0"></a><a id="Tc_jN5HFXX0eE6uaySh_yvSTw_13_2"></a><a id="Tc_cgtdDhDkekG7OW1gyYl0Aw_13_5"></a><a id="Tc_Hrz1Uc15F0iA4mLi51F9tA_14_0"></a><a id="Tc_4GvuasUh-UW5H9oZIP957A_15_0"></a><a id="Tc_StJjkdbdf02aZkYvh0xqNg_15_2"></a><a id="Tc_ue72xBa69kK-jN47QA6Qpw_15_5"></a><a id="Tc_Nx-yQlzph0uM1lVgMfvuFg_16_0"></a><a id="Tc_l2TX_X8NLkizJkUHXPo00g_17_0"></a><a id="Tc_Hx2LJsSkQU-3YVljBAxyOQ_18_2"></a><a id="Tc_56FkZFEv_0yszx-8V9tYQQ_18_5"></a><ix:continuation id="Tb_QybFNUfxJUOJilVgxAuncg_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Revenue by product lines is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" id="Tb_gWydj2y2XkW4f4ESU_G_5w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.44786835%;padding-left:0pt;padding-right:0pt;width:100.89%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Ion implantation systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_b0GGpw37D0OVb9OFN51NQg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_vLV9MRr-aES4Szg2zkPLwQ_4_3">1,111,278</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_IB6EAoZ92EKVMdwKs2Dl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_vxZwPzMJ-0WduX_Sbke30g_4_6">898,132</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_8JwEleVAokWgoqUc3NxvTQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_uirwsSeT7ki74XXFPITvZw_4_9">645,504</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_7zwwQYKndk-1uFVAqMZYtw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_M8SS3DJehkmE2P2A0fFR3w_5_3">19,326</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_SvkhLuNIGUmjUZq3-cDS2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_UN6KkJuxFECyvME4sCQFYg_5_6">21,866</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember__am58s2p3kyHmrdJ-wmZEw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_kQ2HB8zaF0esYKKwmKRrVg_5_9">16,924</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Total revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_YAcV40PN_USyirGkxbtM3Q_6_3">1,130,604</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_HQLIiSayPEy6pjeOl-BCpg_6_6">919,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_5kGzM3IQVk-0is9nxqCJag_6_9">662,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Revenue and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" id="Tb_csqUJvBHKEORYjzz-I_OsA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-Lived</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Revenue</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_country_US_UfW5MedWSkyujQ8Y0vkOtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_lQwheoXVMEmTxesZ7z-hJQ_5_3">749,288</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_country_US_K0jdvGlMnki9BRPFAc8loA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_kjoqM8N9Qk6pOAnU0w7A4Q_5_6">86,482</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_GujVTPpJ8k6zqGASryUANw_6_3">45,583</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_RPglYXiqLEShpJtGT_g1Sw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_DCbYIABhrESfXrvvc1Z_OA_6_6">382</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_WcM44-7f-EC50dKLVWmv-w_7_3">335,733</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VFBGeqEs2UCyy68A5JWZfw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_phOjM2MVa0mhdLCugZUkQw_7_6">4,040</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_LF5itZHj_kW7-lbq3dzGLw_8_3">1,130,604</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_zCHxfedo6kaa0fKMAg_66A_8_6">90,904</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_95SUhXL6YUOJ1QCn_y7deQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_K5G4PjfVZkG_vg3ymSasOw_10_3">634,081</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_QN_LDNP680aHSIexTzcgIw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_TIHcU6dKEEyxFglJz-Vwcw_10_6">66,227</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_dqq8upRkMUC7NVk2zwMzBQ_11_3">38,963</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_LwLoMmDLRkW5c14GGyfjfw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_dAXuYAkEcUir7JKUi592mQ_11_6">212</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_9Z1QAN2M4k-QAzrl8sU7Pg_12_3">246,954</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VkUGPFQLf0iBUBJcbnlQtg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_peC54mFc00eQACAAc1lBnA_12_6">3,464</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_QHfiha4i70KzWZ5wciXC7g_13_3">919,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_UQT4T1MzYk-4vgdo884MdQ_13_6">69,903</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_dErK4Bok0U6vJzw5OBG6Kw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_o75HZOoDxE2sNt5p_WvxOw_15_3">519,408</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_z97YRF5psk25FKK3ms7RSQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_PEoLWTPlGUmH_gFsjdBl2A_15_6">63,590</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_KDPdtZVk20yq3VzflhP3mw_16_3">36,622</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_pnJLSIdbRUOBVaF_N17T0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_rgBC_fUemkW976l-vz5CJA_16_6">191</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_jLtaHIAWS0iCLvXEmgUzWg_17_3">106,398</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_GhM1iSAHW0adxS2rHrLKEg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_zk7hl8tcUU6LJBj79zpMrg_17_6">3,194</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_p4lk0xq95UmI_GoFOiL-UQ_18_3">662,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NoncurrentAssets" scale="3" id="Tc_ehu3xQk5NEWuoqqYnO55zA_18_6">66,975</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Long-lived assets consist of property, plant and equipment, net, and assets manufactured for internal use, net. Operations in Asia Pacific consist of manufacturing, sales and service organizations. Operations in Europe consist of sales and service organizations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">International revenue, which includes export sales from U.S. manufacturing facilities to foreign customers and sales by foreign subsidiaries and branches, was $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="6" id="Narr_bJn0Q1AJRE2_JaP6POMSJg">950.4</ix:nonFraction> million (<ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_4d_AjG3Z4UW5KxpGMWqSNg">84.1</ix:nonFraction>% of total revenue), $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="6" id="Narr_Y6MFgZDgmU621MPU91Wy_A">776.3</ix:nonFraction>&#160;million (<ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_6GL62RXDH0eq3spMvE2YLQ">84.4</ix:nonFraction>% of total revenue) and $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="6" id="Narr_g895_Yw6c0SbTZokZDvMTA">613.5</ix:nonFraction>&#160;million (<ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_EpLSOtLtMkCM0o-MaEWlsg">92.6</ix:nonFraction>% of total revenue) in 2023, 2022 and 2021, respectively. </p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">32</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_Hlk126077341"></a><a id="Tc_CCAMSzehy0e2KZw8hrV7lw_1_2"></a><a id="Tc_Xu7zILa77kKW9M86iDidog_2_2"></a><a id="Tc_aE3iOw3tbEe4B0UZfZaMpA_2_5"></a><a id="Tc_hI0TOO0jSk2iY6zXCISOFA_2_8"></a><a id="Tc_BnCiExa-fUCq27uy5qsgEQ_3_2"></a><a id="Tc_6d2FtTwIt0SNUHJhqX632g_4_0"></a><a id="Tc_y8Sq9MD4Zk-diZ1MFiFcdg_4_2"></a><a id="Tc_DAAGJp4d30WNL1vOuQu6nA_4_5"></a><a id="Tc_0_Spq1r4w0CCkCuYlM8q2w_4_8"></a><a id="Tc_ZdPkxfcYIkWRbUgRZY9dEQ_5_0"></a><a id="Tc_p19XmQr7VkSWgZGVu9bRJA_6_0"></a><a id="Tc_PsTboXmhI0qTp060vnixeA_6_2"></a><a id="Tc_dZ0wVkWegES3O2gEKiyr1Q_6_5"></a><a id="Tc_lBffQ1Kj3EusVPnp7yzZkw_6_8"></a><a id="Tc_MpQDjWntp0W64QomIyiAbg_1_2"></a><a id="Tc_dSFayblFBkGl5CtS4RoEXg_2_2"></a><a id="Tc_LlRNGhHn_UW7skCEGHZtNw_2_5"></a><a id="Tc_LQdQ50_hN0CbAw8Oqs5CNg_2_8"></a><a id="Tc__CTvd-q_E0SA8sG7bjso9A_3_2"></a><a id="Tc_X248m44tHEqINM3DGffebg_4_0"></a><a id="Tc_321tNIGMokmtUyBL66Hk6A_5_0"></a><a id="Tc_hLuItXLCfUOyHWHfVgplxg_6_0"></a><a id="Tc_DtlTOLZ_s0OmhyPzXZ0Xkg_6_2"></a><a id="Tc_ZCyOPY5UcU6bfJRzOGx_8Q_6_5"></a><a id="Tc_2lnDAsG7XkedXAo6UmEWTg_6_8"></a><a id="Tc_tUlYq1h_dEesl1IKNbAJbA_6_9"></a><a id="Tc_ettQetf2U0eQx1k0tse3mA_7_0"></a><a id="Tc_2SAhNRRrlUC0uaVDON50mQ_8_0"></a><a id="Tc_31PfOREx4UKZcfTE9uc1Og_9_0"></a><a id="Tc_LnE0jBjgbkiYomtsapAw4A_10_0"></a><a id="Tc_3JGyC4z13EiBqxneMRHZSg_11_0"></a><a id="Tc_70AISXXZ50Sgnuo8rrb58g_12_0"></a><a id="Tc_bFXlvnY3Kkeo0T0FHNOMLQ_13_0"></a><a id="Tc_AAbXOFCkOka2PWEZiKvVIA_14_0"></a><a id="Tc_tF4NUy1spk6zlKxkBcU3FQ_15_0"></a><a id="Tc_thGvUh63DE6tJao8vZFNdw_15_2"></a><a id="Tc_tzLoVVAo0Eu6JPIcRheadA_15_5"></a><a id="Tc_QlVKrwk3mEKv0YQo_OOTYQ_15_8"></a><a id="Tc_IooP-VHN2Uqtmtjm1bBb-Q_1_2"></a><a id="Tc_Zl0xCQzohkeHAGVVh27OEQ_2_2"></a><a id="Tc_RVVYIHe3UUmpEnwFizqbxQ_2_5"></a><a id="Tc_idL2GGICeEiipzu1wMSdRg_2_8"></a><a id="Tc_f2sDNsvtMU-k1x4hPwnD0Q_3_2"></a><a id="Tc__ndGYwGdkkuOk1-UnJvTQw_4_0"></a><a id="Tc_GIUZvRvU_0S0dF2Eb922Yw_4_2"></a><a id="Tc_CaKauLMLlEi9czcBMNrhmQ_4_5"></a><a id="Tc_v-6mVirEKkWw6CWL3qRVIQ_4_8"></a><a id="Tc_mU-PNXoSVUSf9YgDeDqYhg_5_0"></a><a id="Tc_g0UEWpQAn02y8VmE2wggXg_6_0"></a><a id="Tc_hzghuX3mSEyMn-g5-P7T3w_7_0"></a><a id="Tc_fgs1i3NsnEavZCjvsByEsQ_8_0"></a><a id="Tc_j1a2qqxY_UqFSFg326sZ1w_9_0"></a><a id="Tc_sOTSUN2oO0Wu-Ieel4AV8A_10_0"></a><a id="Tc_h9MKYEx7EUmttmfw0N46YA_11_0"></a><a id="Tc_hQxJG7V_j0aD3qDDLgXKzg_12_0"></a><a id="Tc_PbY34caN8k-TcomsUG1-Yg_13_0"></a><a id="Tc_0pTcFCx73E2LXd_nGvBz3A_14_0"></a><a id="Tc_VgkiqOdGnE-lW24jy5OIgQ_15_0"></a><a id="Tc_mKQYlGoNwUG7HiEiGB6S_g_15_9"></a><a id="Tc_RuBiTdX6-02gGoLf35YwXA_16_0"></a><a id="Tc_1o61rW47L0-FQrXjuSPpNA_17_0"></a><a id="Tc_TIk-M2BkhU-whGdALI9GJQ_17_2"></a><a id="Tc_vaeKjoi3wU2zCMMMo9v0lg_17_5"></a><a id="Tc_IIdiGTTG9EW6_-G-5jralg_17_8"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:IncomeTaxDisclosureTextBlock" id="Tb_vWlRn7INaUGx72kRp9aI2Q" continuedAt="Tb_vWlRn7INaUGx72kRp9aI2Q_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;18. Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income before income taxes is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" id="Tb_uurBE3VZKkWshNQ0DxATrw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_DIKbzVYkfkyVbZnQ-l2Akw_4_3">270,842</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_WQxm7lusm0ahBgdadz2s3A_4_6">198,028</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" scale="3" id="Tc_Bx6DIGpKHEC4bq8Yp4ZRog_4_9">116,380</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_hatKAAGzQUKcWvCD7IvhCw_5_3">7,757</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_DScc9jfzRUmXLaMj3Ecqcw_5_6">6,857</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" scale="3" id="Tc_ptK5UKRNXkm9-HGIOtGj6g_5_9">4,048</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_Ow2Lp8q3kkOkFc4ZVD10uQ_6_3">278,599</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_ijttRj4lDUebwekHER121w_6_6">204,885</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_ja0R0npnsUmcmNU9aS0A6g_6_9">120,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Provision for income taxes is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" id="Tb_09kfYBwYREKsXdeHSmKhbw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentFederalTaxExpenseBenefit" scale="3" id="Tc_gonqMEhgqkyMa5kjA8hn4Q_6_3">46,871</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentFederalTaxExpenseBenefit" scale="3" id="Tc_X8PujVpbX0e-sGGB9jRSIQ_6_6">8,430</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_O3n4FVHMDkaJVvC9naAuig_7_3">1,985</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_VQ8wDpjRN0qi9FLJQ5anaA_7_6">1,716</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentStateAndLocalTaxExpenseBenefit" scale="3" id="Tc_w4ru1iyfx02tZbIEGK3N-w_7_9">82</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_umIFLutO8keKfuINjiJmhA_8_3">3,498</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_9ifioiP_2kyql_7BFVpfYg_8_6">3,124</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentForeignTaxExpenseBenefit" scale="3" id="Tc_0trMK86a90aXN0jdP_uUwQ_8_9">1,439</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_zwHHGY7FQUKLJXodOZCtVw_9_3">52,354</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_YSXIZrr95UWbwedZIKcAJQ_9_6">13,270</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CurrentIncomeTaxExpenseBenefit" scale="3" id="Tc_sMVF9bVVoUGG2FdAm9iw-g_9_9">1,521</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_eVYin-rPbUyPCpSdb2ZNXg_11_3">18,526</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_YExCIdwNx0eVNMm8FPpKyQ_11_6">9,097</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredFederalIncomeTaxExpenseBenefit" scale="3" id="Tc_6bdVULYOI0-nCJKp_2QzpQ_11_9">20,521</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_CHDyZwBscUGQrl6Y1kQFEg_12_3">440</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_c-V5A40hGkG6b5fbOG00hQ_12_6">102</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit" scale="3" id="Tc_GACqT9iVbESc4HT5FtzQtw_12_9">406</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_phoOf2hEDkGqa8VEvcTxtw_13_3">1,052</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_5d8GAilb50Ss8u-hXDvGgw_13_6">459</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredForeignIncomeTaxExpenseBenefit" sign="-" scale="3" id="Tc_0T-i20OThkuYmmcUAss_EQ_13_9">670</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" sign="-" scale="3" id="Tc_8OlocWX280uItkB3DoKrxw_14_3">20,018</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" scale="3" id="Tc_QIiKzIxnc0yGoNOd0GzOhg_14_6">8,536</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" scale="3" id="Tc_SJUtTuINCkO969H5a1RtcA_14_9">20,257</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_Y--rpiyMH0K6Unw4RK3sew_15_3">32,336</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_P_TuSaIVfEGlo8LpQrNyyw_15_6">21,806</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_esuaCJDyA0SKKXdjrhz8og_15_9">21,778</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate of <ix:nonFraction unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateContinuingOperations" scale="-2" id="Narr_zAh86jUV_EampZK5R62jpg">11.6</ix:nonFraction>% is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" id="Tb_ixib9ndBoEu-ZqtO3Vbsgw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes at the United States statutory rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" scale="3" id="Tc_rLakQ9V-Xk2NdyUqV_6Kvw_4_3">58,506</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" scale="3" id="Tc_FGpfiGxEAk26wHQMe4VWvQ_4_6">43,026</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" scale="3" id="Tc_YgE58JWXVEaq91YznQXmaw_4_9">25,290</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">State income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" scale="3" id="Tc_-4_SdC3NQUWQ8MfwFJl5gA_5_3">1,033</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" scale="3" id="Tc_vwXSv0QQg0aZ6wCYaBxyzA_5_6">1,075</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes" scale="3" id="Tc_rEei9TJKBUWC8rnji8p3Pw_5_9">387</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" scale="3" id="Tc_0cHClhb11Uu77J4EYWdJHg_6_3">1,978</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" scale="3" id="Tc_xPcYqoeSKU2UmyK8LIQRPg_6_6">680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" sign="-" scale="3" id="Tc_riJACm2dnEC7fvMYvzocoA_6_9">1,443</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign income tax rate differentials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" scale="3" id="Tc_JVDvghqgMke1TNOc0X7eyw_7_3">329</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" scale="3" id="Tc_vgpZAkKJBUWtzcfRmipmGg_7_6">289</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential" scale="3" id="Tc_mS5Onpq2CkSPywR5zrcekw_7_9">152</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" sign="-" scale="3" id="Tc_ZoKikyAcqUC635hAxWY9rw_8_3">6,718</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" sign="-" scale="3" id="Tc_9BEOZyBG30WIkC7l1IQW7g_8_6">3,818</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" sign="-" scale="3" id="Tc_owdv2HmO4UqfQPtTqQyINw_8_9">3,658</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal revenue code section 162(m) limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation" scale="3" id="Tc_MYTXmBd48kePX95SCJ3-Cw_9_3">4,488</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation" scale="3" id="Tc_QzLqeAfpi0OBG9WTb3zq6g_9_6">2,692</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation" scale="3" id="Tc_RG6OfJGstUmGP-swn9tckQ_9_9">1,481</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit expirations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" scale="3" id="Tc_Fl7Pv9Af1UmGus3DMbm_1g_10_3">784</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" scale="3" id="Tc_-4rkIoqsIUi55jLQIGBKVw_10_6">1,181</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" scale="3" id="Tc_VGEUTcynP06jNurWRJvccg_10_9">2,342</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rate change</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate" scale="3" id="Tc_hpsDPMlVxkSZvgRxP5S76A_11_3">44</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate" scale="3" id="Tc_QyIohW_oEka-veeMkfIw1g_11_6">94</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate" scale="3" id="Tc_6dltLDZjXEOVDmNDH7rYiQ_11_9">159</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit generation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCredits" scale="3" id="Tc_LMEI7L4I2kas-0gOlRmJ6w_12_3">6,900</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCredits" scale="3" id="Tc_788LAQdaP0y7nB2z6uhh2Q_12_6">4,764</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationTaxCredits" scale="3" id="Tc_7JoUgKUN4Ua30vEAOcJkAg_12_9">3,096</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Discrete items, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherReconcilingItems" scale="3" id="Tc_pajcGCMP20e_7d2ugt6GXg_13_3">2,161</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherReconcilingItems" scale="3" id="Tc_AfNVhtm-V02Nx2ssr4O5og_13_6">206</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherReconcilingItems" scale="3" id="Tc_uS0YdPdGu0Wwj35pWQzpjA_13_9">72</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">GILTI inclusion</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount" scale="3" id="Tc_37Ueut44TEegF3aQdadO3Q_14_3">45</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount" scale="3" id="Tc_i2T5_A6IM0-2le4ZwqU8Gw_14_6">69</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount" scale="3" id="Tc_2am7uDhsVUGUJwNtiLvx9Q_14_9">301</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign-derived intangible income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount" scale="3" id="Tc_OgKHy_-GNEmcmyLsEVi_6Q_15_3">24,052</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount" scale="3" id="Tc_uhSA69taok67W7mEQNlMYQ_15_6">20,526</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_YN2S9DEurEe09qXIoSvEMw_16_3">638</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" scale="3" id="Tc_VNzCQQerhESguWE6UgaLKA_16_6">1,602</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxReconciliationOtherAdjustments" sign="-" scale="3" id="Tc__MYE1X9YoU--82Z6aLpDvA_16_9">209</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_MAm53P6f2kKY4-qf87mxIw_17_3">32,336</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_KNx4_P87wUSiaKYrmV96YQ_17_6">21,806</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_jFrasxU4V0OIKvoHx9nOsg_17_9">21,778</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;background:#ffff00;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">33</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_j2gC6xa4mEWiyFtsg6eOlg_1_2"></a><a id="Tc_lepghNGN20G8r11g9HPchA_2_2"></a><a id="Tc_nENjs94Z6kKicmFPovpKGQ_2_5"></a><a id="Tc_Nw7kkPgqE0yWnaRZScD4Tg_3_2"></a><a id="Tc_euZ1sc8WakuNX0eQoQefUA_4_0"></a><a id="Tc_9T-z54BJgkif0ymytLQkAA_5_0"></a><a id="Tc_MMlkMrO9mUKY6DISXud2qQ_5_2"></a><a id="Tc_ewLHR26cv0Guz3zyn3yLPQ_5_5"></a><a id="Tc_TwnUCjt5L0yHogjW2wXt4A_6_0"></a><a id="Tc_43ud3TqLwEqB1jURcUcyVQ_7_0"></a><a id="Tc_1-lHp0f1ukmxB2YPUpB6Nw_7_6"></a><a id="Tc_ZyyAIrdXO0614MCwALrbOQ_8_0"></a><a id="Tc_y0cfzDWpAkSIB8XAZI9S8g_9_0"></a><a id="Tc_ONlDtbZSu0WzfnO0q_qElA_10_0"></a><a id="Tc_c_YUUmLrGUSo86J1tkj_kw_11_0"></a><a id="Tc_2Bg24r2DpkiRPY7w7aTG6Q_12_0"></a><a id="Tc_axBicbgJcEmDPmbEhFIWqw_13_0"></a><a id="Tc_p1lVekKookuJzs6ppA1GDA_14_0"></a><a id="Tc_yPdQV_5FvEuDXY869c2QaQ_15_0"></a><a id="Tc_nYtyeLhh90mVavhaRRQoLg_16_0"></a><a id="Tc_tdGtFqCWSU-elVN234Ib7w_17_0"></a><a id="Tc_tBGyOZsNRUW01YITZXJW1A_18_0"></a><a id="Tc_2Nk_P2UWa0OPyOPAb9HUgA_19_0"></a><a id="Tc_0F8usStf6USYESoLLl4STw_20_0"></a><a id="Tc_lPn4xFFY802Y4LrbiIq9yQ_21_0"></a><a id="Tc_CnxtLDi1akCoKuQDv0FYmg_21_3"></a><a id="Tc_Ok_d1y8MEk-lKCAVAhekvg_22_0"></a><a id="Tc_rru7B938jUC6-xxSWSjS0g_23_0"></a><a id="Tc_z1Mv6DMGTEKVKzFyGe8QBA_24_0"></a><a id="Tc_c2uKlcesIE-U6p7DocXBwA_25_0"></a><a id="Tc_u9ygwDy_mkeE5jCMr_I2zQ_25_2"></a><a id="Tc_6uTpfNBVu0-Nvk-a4rX1sg_25_5"></a><ix:continuation id="Tb_vWlRn7INaUGx72kRp9aI2Q_cont1" continuedAt="Tb_vWlRn7INaUGx72kRp9aI2Q_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Significant components of long-term deferred income taxes are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" id="Tb_CT0qu7pqAk6KDEx6CU6ZQw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" scale="3" id="Tc_lDoeJWv1cEWlUfE0GfN3eg_5_3">96</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" scale="3" id="Tc_3rfS7lgHAE6YDYHWomWxkQ_5_6">291</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Foreign net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign" scale="3" id="Tc_Ho32baDKsk6dazfDsKYOqQ_6_3">182</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign" scale="3" id="Tc_ov3DiUzLykyBh2kcoY9Gng_6_6">276</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Federal tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" scale="3" id="Tc_SXxacdp3nEGAW7uAnM7O5w_7_3">1,999</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" scale="3" id="Tc_knTXLyw1YUC_hnQWFTjnAg_8_3">9,560</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" scale="3" id="Tc_75m71c6KV0y43_NHUw_KEQ_8_6">8,683</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Property, plant and equipment</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment" scale="3" id="Tc_d0skMcJoeUihIQquxJCtqQ_9_3">6,979</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment" scale="3" id="Tc__YokG5-eV02eojko6tFzkw_9_6">8,755</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Operating lease liability</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetOperatingLeaseLiabilities" scale="3" id="Tc_zvUigwUZJEiOHAazRbUyBg_10_3">5,564</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetOperatingLeaseLiabilities" scale="3" id="Tc_MB64XcWwG0eALMVj6dVAYw_10_6">1,564</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Accrued compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" scale="3" id="Tc_rUGEarCpfkyw_o6wHvzLwg_11_3">242</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" scale="3" id="Tc_txGVa8h4y0ip2nBRMQLlsA_11_6">276</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Inventories</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_nggt4Av4r0qJjp93iWsxgg_12_3">804</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsInventory" scale="3" id="Tc_90_e9aUh80Oiykzw5ZwQ7A_12_6">1,613</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Stock compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_5uZqsTjiVUqfg6lzESlTAg_13_3">1,790</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" scale="3" id="Tc_5CXUOtCt2UaOEw8IW0CEdA_13_6">1,620</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Warranty</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_wXFLKh3gOEmkBVjJWL48Ag_14_3">3,108</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" scale="3" id="Tc_Cv8uug_e2k6w4HytdZN9PA_14_6">1,993</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferred revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_0Kq8m5rVmUy5GmavV4oovw_15_3">6,389</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsDeferredIncome" scale="3" id="Tc_LR-wvW6R-kePnrjaEEDiPw_15_6">4,501</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Capitalized research and development costs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" scale="3" id="Tc_Lt81yyIf70m8krFuDjps0w_16_3">38,036</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" scale="3" id="Tc_Teb-deGC1k-2eXQivnu0lg_16_6">18,067</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent" scale="3" id="Tc_O5jTma2Vg0WONVDmmee7PA_17_3">74,749</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent" scale="3" id="Tc_6-9VfjGPYUi3fWv430zAww_17_6">47,639</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Valuation allowance</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_hvhnED0_CkSwG4N2z4BkiQ_18_3">10,963</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="3" id="Tc_Gfk2P732VEe3iB0WpOn75Q_18_6">8,370</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_J0U7HGCP1U-aVvpmISvQeQ_19_3">63,786</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsGross" scale="3" id="Tc_0sl2DPeoQEe6bMZWetfQjQ_19_6">39,269</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Intangible assets</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" scale="3" id="Tc_ImVYgegLaEK5ZvhT4uVL2w_21_6">176</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Right-of-use asset</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_wpC5dbVWBECoAN9Lrh0elQ_22_3">9,155</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesLeasingArrangements" scale="3" id="Tc_InenGW_cB0KpGL1OQT7ZsQ_22_6">5,400</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Other</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesOther" scale="3" id="Tc_fTIRTr7VqEKlgfwoSXgu9Q_23_3">1,203</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxLiabilitiesOther" scale="3" id="Tc_A8dDKRPFck-YYFyZ_qjPhQ_23_6">1,992</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_ndB03VLgyUqz9zvcK8EShQ_24_3">10,358</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxLiabilities" scale="3" id="Tc_3KWeMqaLFEKiZ_iA3kScDg_24_6">7,568</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Deferred taxes, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsLiabilitiesNet" scale="3" id="Tc_AS_Vp4NBJUC4mTEQaepsEw_25_3">53,428</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsLiabilitiesNet" scale="3" id="Tc_q1TohZ6A0k-nS59sn0rdOQ_25_6">31,701</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:3pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">Changes in tax rates and tax laws are accounted for in the period of enactment. Our deferred tax assets and liabilities are measured at the enacted tax rate expected to apply when these temporary differences are expected to be realized or settled. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">At December 31, 2023, we had $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsLiabilitiesNet" scale="6" id="Narr_Kg6BYC62KEqVO_Xao0DZsg">53.4</ix:nonFraction> million of net deferred tax assets worldwide relating to capitalized R&amp;D costs and other temporary differences, which are available to reduce income taxes in future years. The increase in our deferred tax assets from the prior year was primarily due to a $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" scale="6" id="Narr_yqwJsIO0UEiEjbP_BC3nIA">20.0</ix:nonFraction> million increase relating to capitalized R&amp;D costs. At December 31, 2023, we maintained a $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="6" id="Narr_9WI1szKlS0-3mCdkw6oaZg">11.0</ix:nonFraction> million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these attributes. This represents an increase of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount" scale="6" id="Narr_JqtyyaiAN0KndBH_XX9ArQ">2.6</ix:nonFraction> million from the prior year. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At December 31, 2023, we had state net operating loss carryforwards of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_47ztwQFshUOm2R1-kJ5MRg">0.1</ix:nonFraction> million. State net operating losses will expire between 2024 and 2034. At December 31, 2023, we have foreign net operating loss carryforwards of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_9fes20YJ4Ea1NPN1ZK-OqQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_EYqSV8Fcakejsxv9G3UG2Q">0.2</ix:nonFraction> million. The majority of our foreign net operating losses have an unlimited carryforward period.<span style="font-size:12pt;"> </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At December 31, 2023, we had research and development and other tax credit carryforwards of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_qjTxbwBIV0alaooQFCEIKg" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:OperatingLossCarryforwards" scale="6" id="Narr_wWL3-FAYJUSgf-DTVS0GtQ">15.2</ix:nonFraction> million. These carry forwards are subject to an uncertain tax position reserve of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_TivY9CKrdEqLO9QwWaSgbg" decimals="-5" format="ixt:numdotdecimal" name="acls:OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" scale="6" id="Narr_vShI-bBdT06ipJNPjVXoiQ">3.0</ix:nonFraction> million. These credits can be used to reduce future federal and state income tax liabilities and expire principally between 2024 and 2035.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;background:#ffffff;margin:0pt;">A provision of the Tax Cuts and Jobs Act (&#8220;TCJA&#8221;) took effect in 2022, creating a significant change to our treatment of research and experimental expenditures. Historically, businesses had the option of deducting R&amp;D expenses in the year incurred or capitalizing and amortizing the costs over five years. The TCJA provision eliminates this option and requires R&amp;D expenses associated with research conducted in the U.S. to be capitalized and amortized over a five-year period. For expenses associated with research outside of the United States, R&amp;D expenses are capitalized and amortized over a 15-year period. The Company has included the tax impact of capitalizing and amortizing these costs over the required periods in their tax provision for the year ended December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">34</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_Yr39Ivhh7k-44Jl3mmcKDA_1_3"></a><a id="Tc_3dYvt3oonUWvZuxBXgp5NQ_2_2"></a><a id="Tc_OGO4apyWHUi2EeEopv3-zA_2_5"></a><a id="Tc_Npmdn5gWm0mvT2MjDcNsJA_2_8"></a><a id="Tc_6BRT5aPlYE-rzz8Z9HaHlQ_3_2"></a><a id="Tc_ZshBiLroxUGX_uiCSp_BCQ_4_0"></a><a id="Tc_LRzYDcODzEOzbt1tS_qSAA_4_2"></a><a id="Tc_cOBTkFVVR027glqOx0Ebuw_4_5"></a><a id="Tc_CuApvpp1VUOovCA6-0lc8w_4_8"></a><a id="Tc_bQt6yzGcgk-xjGkhLNYlQg_5_0"></a><a id="Tc_It4nydOUfUS6k5tNJv-khw_6_0"></a><a id="Tc_FxZccQP2-0W1u_M-91rXHw_6_3"></a><a id="Tc_1rgnEdi3ikqOuScAmAdbzw_6_9"></a><a id="Tc_4fobE4p_Z0iVxOEF9DFO1g_7_0"></a><a id="Tc_O4tNbh9MQ0-TpdVl6MJRMg_7_3"></a><a id="Tc_AELu9gtXDEurxsGRLsPQHw_7_6"></a><a id="Tc_RkX5FLHPIkuhVB1xeuKJTQ_8_0"></a><a id="Tc_zU05_xvP2Uu-hTm-QkxxMw_9_0"></a><a id="Tc_KNQ22P07XEOa26UEgHHYHQ_9_2"></a><a id="Tc_FA5B13nOskuVs0uYJe4h8w_9_5"></a><a id="Tc_aXTqarKVoUmolXO5FSp1fA_9_8"></a><a id="Tc_QhopO69pfUyBNC_Xkpyb0Q_11_0"></a><a id="Tc_qGyi73Ikn0GpPpfafNkaOw_11_2"></a><a id="Tc_OsQSyJ8fUU2THF5j-Ct6ew_11_5"></a><a id="Tc_Qaj5zquayEaLqeU0mb7igw_11_8"></a><a id="Tc_Wa0Tm_aSwUKkglOXLOhujQ_11_9"></a><a id="Tc_BWM3iDRyQkmXt5hOvMuF9Q_12_0"></a><a id="Tc_hjrxVc_epEGaCM-ieV3n5A_13_0"></a><a id="Tc_4_GvxB-8JkK9lGDACe0Twg_13_2"></a><a id="Tc_l48wVTMwtkeF4xS6lfR49A_13_5"></a><a id="Tc_-rUdgtWMHU6T-XdvMQv7WA_13_8"></a><ix:continuation id="Tb_vWlRn7INaUGx72kRp9aI2Q_cont2"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">We consider the undistributed earnings of our foreign subsidiaries as of December 31, 2023 to be indefinitely reinvested and, accordingly, no U.S. income taxes have been provided thereon. As of December 31, 2023, the amount of cash associated with indefinitely reinvested foreign earnings was approximately $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UndistributedEarningsOfForeignSubsidiaries" scale="6" id="Narr_k9N3BApcNEyzK7SNUh10vQ">11.8</ix:nonFraction> million. We have not, nor do we anticipate the need to, repatriate funds to the United States to satisfy domestic liquidity needs arising in the ordinary course of business, including liquidity needs associated with our domestic debt service requirements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">We and our subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. We and most foreign subsidiaries are subject to income tax examinations by tax authorities for all years dating back to 2009. Our policy is to recognize interest related to unrecognized tax benefits as interest expense and penalties as operating expenses. We believe that we have appropriate support for the income tax positions taken and to be taken on our tax returns and that our accruals for tax liabilities are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">At December 31, 2023, we had unrecognized tax benefits related to uncertain tax positions of $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="6" id="Narr_Lnxw3nwXCkOFnBtyHt1mlg">11.9</ix:nonFraction> million, $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-5" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" scale="6" id="Narr_UdN_Bxr8pE6sAJLUSWLnjA">8.3</ix:nonFraction> million of which is recorded as a long-term liability, and the remainder of which reduced the Company&#8217;s state deferred tax assets and the offsetting valuation allowance. We recognized $<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense" scale="6" id="Narr_1hmkeCVFLk-cZTG_FHOaMQ">0.5</ix:nonFraction> million in interest and penalty expenses for the year ended December 31, 2023 relating to these uncertain tax positions. These unrecognized tax benefits, if recognized, would reduce the effective tax rate and also reverse associated accrued interest and penalty expenses.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" id="Tb_xJwONT19fkKZBQIVnkUOmA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:26.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_39a7BbhzQ0Wr-w3fY7Yk7A_4_3">10,443</ix:nonFraction></p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_hf1UNwYt1EOggLFhUZjzkA_4_6">9,961</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_1m8-FjEEJECOe4imXpOVYQ_4_9">10,044</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_gr26fnpczk6No00y7-bHxQ_5_3">271</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_EKkv6UWKgUWYdXk3Z7vwFQ_5_6">122</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" scale="3" id="Tc_f2CqnYQjW0S6oyhRnwX8vg_5_9">546</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decreases in unrecognized tax benefits related to settlements with tax authorities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" scale="3" id="Tc_wAz-fH4yQEKSkSvPMWk2Hw_6_6">708</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" scale="3" id="Tc_sm6NPkQ-_0iQIij0sJI94w_7_9">472</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc__qEk24aFxEiIRLCE108uFA_8_3">1,754</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_YHEw0capEU-hcH-Pyn607g_8_6">1,312</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" scale="3" id="Tc_kym8pZ0Ux0WX-l8y2EVhNw_8_9">935</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_FoI9obOBAkWjZvZGuGyI_A_9_3">11,926</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_uWNUs2CAwkOHfQihiYY0sA_9_6">10,443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_EUwl39aEVEm7xSKxae-pRg_9_9">9,961</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as other long-term liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" scale="3" id="Tc_i7qJ7v_20EWEJyhLbMem1g_11_3">8,344</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" scale="3" id="Tc_EtzaIPnbrkCMgr6SzTag-Q_11_6">7,190</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as a decrease in deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" scale="3" id="Tc_qzm_oJKZ-UCIFaRKwAJNoQ_12_3">3,582</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" scale="3" id="Tc_eNzgV8eDn0WGi_2ODsdvVw_12_6">3,253</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" scale="3" id="Tc_tvuNSbsFJUS63WanWPQ6gQ_12_9">9,961</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_63k4XntXcUumjD5KZPzKcw_13_3">11,926</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_jIan4smwkk2nwvBLaVfx8w_13_6">10,443</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:UnrecognizedTaxBenefits" scale="3" id="Tc_u3vsnVennEG6FJLB6374xA_13_9">9,961</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;background:#ffff00;">&#8203;</span></p></ix:nonNumeric></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_contentSection_4ba95dbb_2718_4603_8d5f_"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">35</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><a id="_afecfed8_d721_42fd_a77a_d35e910a65e6"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:12pt;font-weight:bold;">Schedule&#160;II&#8212;Valuation and Qualifying Accounts</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:12pt;font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:12pt;font-weight:bold;">(In thousands)</b></p><a id="Tc_4ZY3oXkgq0KlKTTkxVYuTQ_1_2"></a><a id="Tc_PAkXoSeNwkaxXzwThdC0EQ_1_5"></a><a id="Tc_lxQ-x87y70m6vZaTkIzpEg_1_11"></a><a id="Tc_2hk63E3RSEiPXK6THiZZCQ_2_2"></a><a id="Tc_4vLJW7UwJU-IpujMeEaVSw_2_5"></a><a id="Tc_zQ91ak9ikEqtXtL9orcOYA_2_11"></a><a id="Tc_YeX5MqSFj0iZ-l-TJpEWEQ_3_2"></a><a id="Tc_EOqqhA1N70uz8RN7vhL6qw_3_5"></a><a id="Tc_ioToV6lcEka0MH_X9Rz9og_3_8"></a><a id="Tc_95BXw_36FUO70nd4HCI-xQ_3_11"></a><a id="Tc_PLlCUAIzqkOWdp2iq_Lugw_4_0"></a><a id="Tc_KoBSi2TNW02mqR4pGdtX9g_5_0"></a><a id="Tc_3KXrX-yAiUinEq4RPQ2mzg_5_2"></a><a id="Tc_nKiv9p0DHU2f7clQGkFj0A_5_3"></a><a id="Tc_qm3J2NcGSEmpXa6bO_2Ptw_5_5"></a><a id="Tc_stby26FbJkm3-aZ41ErbMw_5_8"></a><a id="Tc_fmBiAumoYkuo-79y5vId1A_5_11"></a><a id="Tc_ie-TRrzkaE2tFY2ruHFhnQ_6_0"></a><a id="Tc_J_07T-c0QkeZJFlLhJyRSg_7_0"></a><a id="Tc_piicU276HUKgd9wTBK3kuQ_8_0"></a><a id="Tc_J8r4a3xWq02Z93XMlSVYCQ_8_2"></a><a id="Tc_O7LRJbHYEUGfjQrJUksP6Q_8_3"></a><a id="Tc_9dmjtymTiE-G34nc57wYkA_8_5"></a><a id="Tc_VAG0P5bqnkmZb61i7Ja4VQ_8_6"></a><a id="Tc_ajuZuneO7EWFIFnf0alU5g_8_8"></a><a id="Tc_otu5Nc9sNkix8hNxiSyt6A_8_9"></a><a id="Tc_76Oxb26430S8nZIaypI4UA_8_11"></a><a id="Tc_aTYVpVFxg0a7dRU8zI6PrQ_8_12"></a><a id="Tc_fck-trqFzkKnMbG502KWLg_9_0"></a><a id="Tc_JKeN803JR0GHnBERYUKCug_10_0"></a><a id="Tc_WaofILWSK06JnILWZA1b0w_11_0"></a><a id="Tc_Sn2waQtgUkC1pvsDuBhBNw_11_2"></a><a id="Tc_U0y2M_YNLEmiciTXWuMbOA_11_3"></a><a id="Tc_vlL6zuL-lkuDyRLNkRuiLg_11_5"></a><a id="Tc_ukae7WbUqUSX6HMmgunvsA_11_6"></a><a id="Tc_m74CbLGG6EeLVX-7Q6WgKQ_11_8"></a><a id="Tc_6VnP2fGxzEmnmedBnUSUbA_11_9"></a><a id="Tc_4D4IMCBHnkCSUJDX6fTp1A_11_11"></a><a id="Tc_lpbdVuXRs0OGnVrZDCuEOg_11_12"></a><a id="Tc_K-eKlJWn4UaisujcD8OtXw_12_0"></a><ix:nonNumeric contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA" name="srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" id="Tb_gFuQdrCnZUiOLLmKbJ3ugw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_7VomIgveA0qOD77XkB31mA_5_6">1,117</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" sign="-" scale="3" id="Tc_a1RLJrE9IEaBMR1I_XURRQ_5_9">657</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_34gSCZl-h0errxThK-8WCg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_rpb5VTrh-0WhZoF21aO2ww_5_12">460</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_zIXnNH6DwEaMbPC7b5MvIQ_6_3">8,370</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_ZpaUBFY2qEOYw9gSzPqqCg_6_6">3,196</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" sign="-" scale="3" id="Tc_mN4FQl3W1UOjb4nHDfNOPQ_6_9">603</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_Q9QhiFBD9UypWV-wU4smdg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_iuBLpWgioU27geCVe62v9w_6_12">10,963</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_OPBC9zY-UUCAtXCdwsxHAw_9_3">7,689</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_sBPpAk7CMUSB1z5A_T4jOA_9_6">1,529</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" sign="-" scale="3" id="Tc_tUAZzz1DCUG8PcMIn2_rJA_9_9">848</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_pBVxSyMFSUO-p8hP0Mc7oA_9_12">8,370</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_MdUgjQT3H0-8E9eEhKTIDQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_96dd6r2j3EGKNTkSRqKy1Q_12_3">9,133</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense" scale="3" id="Tc_jcp4sFY08Uy-_Y0MPAnGbQ_12_6">780</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesDeductions" sign="-" scale="3" id="Tc_zMwa9559HUCGWB2GNDUWdQ_12_9">2,224</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw" contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ValuationAllowancesAndReservesBalance" scale="3" id="Tc_JcPwjxSWt0aGnxYS5WWA0g_12_12">7,689</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">36</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;min-height:11.5pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:1pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_cd3f26d5_34db_46d5_a65f_d14bdb62b918"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit Index</b></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:7.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:89.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></th></tr><tr><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:7.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exhibit</b><b style="font-weight:bold;"><br/></b><b style="font-weight:bold;">No.</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></th><th style="font-weight:normal;text-align:left;vertical-align:bottom;width:89.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Description</b></p></th></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">23.1</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="acls-20231231xex23d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Consent of Ernst&#160;&amp; Young&#160;LLP, Independent Registered Public Accounting Firm. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">31.1</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="acls-20231231xex31d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of the Principal Executive Officer under Exchange Act Rule&#160;13a-14(a)/15d-14(a) (Section&#160;302 of the Sarbanes-Oxley Act), dated February 28, 2024. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">31.2</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="acls-20231231xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of the Principal Financial Officer under Exchange Act Rule&#160;13a-14(a)/15d-14(a) (Section&#160;302 of the Sarbanes-Oxley Act), dated February 28, 2024. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">32.1</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="acls-20231231xex32d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of the Principal Executive Officer pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (Section&#160;906 of the Sarbanes-Oxley Act), dated February 28, 2024. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">32.2</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;font-family:&quot;'Times New Roman','Times','serif'&quot;;" href="acls-20231231xex32d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-style:normal;font-weight:normal;">Certification of the Principal Financial Officer pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (Section&#160;906 of the Sarbanes-Oxley Act), dated February 28, 2024. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">101</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following materials from the Company&#8217;s Form&#160;10-K for the year ended December 31, 2023, formatted in eXtensible Business Reporting Language (XBRL): (i)&#160;Consolidated Statements of Operations, (ii)&#160;Consolidated Statement of Comprehensive Income (iii)&#160;Consolidated Balance Sheets, (iv)&#160;Consolidated Statements of Equity, (v)&#160;Consolidated Statements of Cash Flows, and (vi)&#160;Notes to Consolidated Financial Statements.</p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:7.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">104</p></td><td style="vertical-align:top;width:2.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:89.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cover Page Interactive Data File (formatted as iXBRL and contained in Exhibit 101).</p></td></tr></table><div style="font-family:'Times New Roman','Times','serif';font-size:10.0pt;margin-bottom:0pt;margin-top:0pt;min-height:1.19em;position:relative;width:100%;"><div style="background-color:#000000;height:1pt;position:relative;top:0.6em;width:25.0%;border:none;margin:0 auto 0 0;"><a id="_ff0d3ffa_f46b_4394_8287_63b48de019f0"></a></div></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 12pt 0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">37</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Signatures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of Section&#160;13 or 15(d) of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:46.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:50.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-variant:small-caps;">AXCELIS TECHNOLOGIES,&#160;INC.</span></p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:46.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:46.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">By:</p></td><td style="vertical-align:bottom;width:46.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">/s/ <span style="font-variant:small-caps;">Russell J. Low</span></p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:46.29%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Russell J. Low,</p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:46.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">President and Chief Executive Officer</i></p></td></tr><tr><td style="vertical-align:top;width:49.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10.1pt;text-indent:-10.1pt;margin:0pt;">Dated: February 28, 2024</p></td><td style="vertical-align:top;width:4.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:46.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of the Securities Exchange Act of 1934, this report has been signed below by the following persons on behalf of the Registrant and in the capacities and on the date indicated.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr><td style="vertical-align:middle;width:40.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><b style="font-weight:bold;">Signature</b></p></td><td style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:middle;width:36.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Title</b></p></td><td style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:middle;width:16.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Date</b></p></td></tr><tr><td style="vertical-align:middle;width:40.96%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:36.08%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:16.47%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:40.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;">/s/ <span style="font-variant:small-caps;white-space:pre-wrap;">Russell J.  Low</span></p></td><td rowspan="2" style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td rowspan="2" style="vertical-align:middle;width:36.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 1pt 0pt;">Director and Principal Executive Officer</p></td><td rowspan="2" style="vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td rowspan="2" style="vertical-align:middle;width:16.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">February 28, 2024</p></td></tr><tr><td style="vertical-align:middle;width:40.96%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;">Russell J. Low</p></td><td style="display:none;vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:36.08%;border-top:1px solid #000000;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:16.47%;border-top:1px solid #000000;margin:0pt;padding:0pt;"/></tr><tr><td style="vertical-align:middle;width:40.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:36.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 1pt 0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;width:16.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;width:40.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;">/s/ <span style="font-variant:small-caps;">James G. Coogan</span></p></td><td rowspan="2" style="vertical-align:top;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td rowspan="2" style="vertical-align:middle;width:36.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Principal Accounting and Financial Officer</p></td><td rowspan="2" style="vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td rowspan="2" style="vertical-align:middle;width:16.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">February 28, 2024</p></td></tr><tr><td style="vertical-align:middle;width:40.96%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:10pt;text-align:center;text-indent:-10pt;margin:0pt;">James G. Coogan</p></td><td style="display:none;vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:36.08%;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:3.24%;margin:0pt;padding:0pt;"/><td style="display:none;vertical-align:middle;width:16.47%;margin:0pt;padding:0pt;"/></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 12pt 0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_contentSection_28304540_4f20_4ec5_bf03_"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">38</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;margin-left:9.41%;margin-right:9.41%;margin-top:30pt;page-break-after:avoid;width:81.18%;border:0;"></div></body></html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>2
<FILENAME>acls-20231231xex23d1.htm
<DESCRIPTION>EX-23.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  10.5.122.0--><!--Created on: 2/28/2024 07:56:53 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Exhibit&#160;23.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">We consent to the incorporation by reference in the following Registration Statements:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">(1)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Registration Statements (Form&#160;S-8 Nos.&#160;333-181750, 333-188967, 333-196157, 333-204544, 333-211673, 333-218225 and 333-231634) pertaining to the 2012 Equity Incentive Plan of Axcelis Technologies,&#160;Inc.,</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 0pt 54pt;"><font style="margin-left:0pt;visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">(2)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Registration Statement (Form&#160;S-8 No.&#160;333-238770) pertaining to the 2020 Employee Stock Purchase Plan of Axcelis Technologies,&#160;Inc.,</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">(3)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Registration Statement (Form&#160;S-8 No.&#160;333-120356) pertaining to the 2000 Stock Plan and 2012 Equity Incentive Plan, and</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 0pt 36pt;"><font style="margin-left:0pt;visibility:hidden;">&#8203;</font></p><table border="0" cellpadding="0" cellspacing="0" style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:18pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;">(4)</td><td style="padding:0pt;"><font style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">Registration Statement (Form S-3 No. 333-273639) and related Prospectus of Axcelis Technologies, Inc. for the registration of common stock, preferred stock, warrants, debt securities and units;</font></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">of our reports dated February 23, 2024, with respect to the consolidated financial statements and schedule of Axcelis Technologies, Inc. and the effectiveness of internal control over financial reporting of Axcelis Technologies, Inc. included in this Amendment No. 1 on Form 10-K/A of Axcelis Technologies, Inc. for the year ended December&#160;31, 2023. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">/s/ Ernst &amp; Young LLP</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Boston, Massachusetts<br>February 28, 2024</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:24pt 0pt 0pt 0pt;">1</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>3
<FILENAME>acls-20231231xex31d1.htm
<DESCRIPTION>EX-31.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  10.5.122.0--><!--Created on: 2/28/2024 07:56:49 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Exhibit&#160;31.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">of the Principal Executive Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Pursuant to Rule&#160;13a-14(a)/15d-14(a) (implementing Section&#160;302 of the Sarbanes-Oxley Act)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 9pt 0pt;">I, Russell J. Low, certify that:</p><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">1.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">I have reviewed this annual report on Form&#160;10-K/A (Amendment #1) of Axcelis Technologies,&#160;Inc.;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">2.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">3.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the company as of, and for, the periods presented in this report;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">4.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">The company&#8217;s other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f) and 15d-15(f)) for the company and have:</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(a)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the company, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(b)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(c)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Evaluated the effectiveness of the company&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(d)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Disclosed in this report any change in the company&#8217;s internal control over financial reporting that occurred during the company&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the company&#8217;s internal control over financial reporting; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">5.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">The company&#8217;s other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the company&#8217;s auditors and the audit committee of the company&#8217;s board of directors (or persons performing the equivalent functions):</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(a)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the company&#8217;s ability to record, process, summarize and report financial information; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;">(b)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:3.6pt;padding-right:3.6pt;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;">Date: February 28, 2024</p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">/s/ <font style="font-variant:small-caps;">Russell J. Low</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;border-top:1px solid #000000;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">Russell J. Low,</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><i style="font-style:italic;">Chief Executive Officer and President</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:24pt 0pt 0pt 0pt;">1</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>4
<FILENAME>acls-20231231xex31d2.htm
<DESCRIPTION>EX-31.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  10.5.122.0--><!--Created on: 2/28/2024 07:56:49 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Exhibit&#160;31.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">of the Principal Financial Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Pursuant to Rule&#160;13a-14(a)/15d-14(a) (implementing Section&#160;302 of the Sarbanes-Oxley Act)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 9pt 0pt;">I, James Coogan, certify that:</p><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">1.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">I have reviewed this annual report on Form&#160;10-K/A (Amendment #1) of Axcelis Technologies,&#160;Inc.;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">2.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">3.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the company as of, and for, the periods presented in this report;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">4.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">The company&#8217;s other certifying officer(s) and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f) and 15d-15(f)) for the company and have:</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(a)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the company, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(b)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(c)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Evaluated the effectiveness of the company&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(d)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">Disclosed in this report any change in the company&#8217;s internal control over financial reporting that occurred during the company&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the company&#8217;s internal control over financial reporting; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">5.</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">The company&#8217;s other certifying officer(s) and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the company&#8217;s auditors and the audit committee of the company&#8217;s board of directors (or persons performing the equivalent functions):</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">(a)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:9pt;margin-top:0pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the company&#8217;s ability to record, process, summarize and report financial information; and</p></td></tr></table><table border="0" cellpadding="0" cellspacing="0"><tr><td style="width:36pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:36pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;">(b)</p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin-bottom:0pt;margin-top:0pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:46.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;">Date: February 28, 2024</p></td><td style="vertical-align:top;width:3.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:46.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">/s/ <font style="font-variant:small-caps;">James Coogan</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:3.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:46.29%;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">James Coogan,</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:3.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:46.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><i style="font-style:italic;">Executive Vice President and Chief Financial Officer</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:24pt 0pt 0pt 0pt;">1</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>5
<FILENAME>acls-20231231xex32d1.htm
<DESCRIPTION>EX-32.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  10.5.122.0--><!--Created on: 2/28/2024 07:56:53 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">AXCELIS TECHNOLOGIES,&#160;INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Certification of the Chief Executive Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt 0pt 12pt 0pt;">The undersigned Chief Executive Officer of Axcelis Technologies,&#160;Inc., a Delaware corporation, hereby certifies, for the purposes of Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (as implemented by Section&#160;906 of the Sarbanes-Oxley Act of 2002) as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt 0pt 12pt 0pt;">This Form&#160;10-K/A (Amendment #1) annual report fully complies with the requirements of section&#160;13(a) or 15(d) of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt;">IN WITNESS WHEREOF, the undersigned has executed this Certification as of February 28, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:3.6pt;padding-right:3.6pt;width:100%;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">/s/ <font style="font-variant:small-caps;">Russell J. low</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;border-top:1px solid #000000;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">Russell J. Low</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt 3.59pt 0pt 3.59pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><i style="font-style:italic;">Chief Executive Officer and President of Axcelis Technologies,&#160;Inc.</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:24pt 0pt 0pt 0pt;">1</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>6
<FILENAME>acls-20231231xex32d2.htm
<DESCRIPTION>EX-32.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  10.5.122.0--><!--Created on: 2/28/2024 07:57:06 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;32.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">AXCELIS TECHNOLOGIES,&#160;INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Certification of the Chief Financial Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt 0pt 12pt 0pt;"><b style="font-weight:bold;">Pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt 0pt 12pt 0pt;">The undersigned Chief Financial Officer of Axcelis Technologies,&#160;Inc., a Delaware corporation, hereby certifies, for the purposes of Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (as implemented by Section&#160;906 of the Sarbanes-Oxley Act of 2002) as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt 0pt 12pt 0pt;">This Form&#160;10-K/A (Amendment #1) annual report fully complies with the requirements of section&#160;13(a) or 15(d) of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:36pt;margin:0pt;">IN WITNESS WHEREOF, the undersigned has executed this Certification as of February 28, 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;background:#ffffff;" align="center"><tr style="height:1pt;"><td style="vertical-align:top;white-space:nowrap;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:3.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:46.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;white-space:nowrap;width:50%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:3.41%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">&#160;&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:top;width:46.58%;background:#ffffff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">/s/ <font style="font-variant:small-caps;">James Coogan</font></p></td></tr><tr><td style="vertical-align:top;white-space:nowrap;width:50%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:3.41%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:46.58%;background:#ffffff;border-top:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;">James Coogan</p></td></tr><tr><td style="vertical-align:top;white-space:nowrap;width:50%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:10pt;text-indent:-10pt;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:3.41%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><font style="margin-bottom:0pt;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:46.58%;background:#ffffff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt 0pt 1pt 0pt;"><i style="font-style:italic;">Executive Vice President and Chief Financial Officer of </i><i style="font-style:italic;"><br></i><i style="font-style:italic;">Axcelis Technologies,&#160;Inc.</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:24pt 0pt 0pt 0pt;">1</p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>7
<FILENAME>acls-20231231.xsd
<DESCRIPTION>EX-101.SCH
<TEXT>
<XBRL>
<?xml version="1.0" encoding="utf-8"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/28/2024 7:57:16 PM-->
<!--Modified on: 2/28/2024 7:57:16 PM-->
<xsd:schema targetNamespace="http://www.axcelis.com/20231231" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xl="http://www.xbrl.org/2003/XLink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:attributeFormDefault="unqualified" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:country="http://xbrl.sec.gov/country/2023" xmlns:us-gaap="http://fasb.org/us-gaap/2023" xmlns:us-types="http://fasb.org/us-types/2023" xmlns:negated="http://www.xbrl.org/2009/role/negated" xmlns:srt-types="http://fasb.org/srt-types/2023" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2022-03-31" xmlns:acls="http://www.axcelis.com/20231231" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:currency="http://xbrl.sec.gov/currency/2023" xmlns:us-roles="http://fasb.org/us-roles/2023" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:sic="http://xbrl.sec.gov/sic/2023" xmlns:srt-roles="http://fasb.org/srt-roles/2023" xmlns:stpr="http://xbrl.sec.gov/stpr/2023" xmlns:utr="http://www.xbrl.org/2009/utr" xmlns:exch="http://xbrl.sec.gov/exch/2023" xmlns:naics="http://xbrl.sec.gov/naics/2023" xmlns:srt="http://fasb.org/srt/2023" xmlns:deprecated="http://www.xbrl.org/2009/role/deprecated" xmlns:net="http://www.xbrl.org/2009/role/net" xmlns:dei="http://xbrl.sec.gov/dei/2023" xmlns:dtr="http://www.xbrl.org/2009/dtr" xmlns:xbrldi="http://xbrl.org/2006/xbrldi">
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStandardAndCustomAxisDomainDefaults" id="DisclosureStandardAndCustomAxisDomainDefaults">
        <link:definition>99900 - Disclosure - Standard And Custom Axis Domain Defaults</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00100 - Statement - Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" id="StatementConsolidatedStatementsOfComprehensiveIncome">
        <link:definition>00200 - Statement - Consolidated Statements of Comprehensive Income</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00300 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00500 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails">
        <link:definition>40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" id="DisclosureCashCashEquivalentsAndRestrictedCashDetails">
        <link:definition>40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails">
        <link:definition>40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" id="DisclosureInventoriesNetDetails">
        <link:definition>40601 - Disclosure - Inventories, net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2">
        <link:definition>40604 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Cal 2</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" id="DisclosurePropertyPlantAndEquipmentNetDetails">
        <link:definition>40701 - Disclosure - Property, Plant and Equipment, net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" id="DisclosureAssetsManufacturedForInternalUseNetComponentsDetails">
        <link:definition>40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" id="DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails">
        <link:definition>40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" id="DisclosureLeasesLeaseCostDetails">
        <link:definition>40903 - Disclosure - Leases - Lease Cost (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails">
        <link:definition>40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" id="DisclosureProductWarrantyDetails">
        <link:definition>41001 - Disclosure - Product Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" id="DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails">
        <link:definition>41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" id="DisclosureFairValueMeasurementsDetails">
        <link:definition>41501 - Disclosure - Fair Value Measurements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" id="DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails">
        <link:definition>41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" id="DisclosureIncomeTaxesProvisionForIncomeTaxesDetails">
        <link:definition>41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" id="DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails">
        <link:definition>41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" id="DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails">
        <link:definition>41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00305 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" id="StatementConsolidatedStatementsOfStockholdersEquity">
        <link:definition>00400 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureNatureOfBusiness" id="DisclosureNatureOfBusiness">
        <link:definition>10101 - Disclosure - Nature of Business</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenue" id="DisclosureRevenue">
        <link:definition>10301 - Disclosure - Revenue</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" id="DisclosureCashCashEquivalentsAndRestrictedCash">
        <link:definition>10401 - Disclosure - Cash, cash equivalents and restricted cash</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNet" id="DisclosureInventoriesNet">
        <link:definition>10601 - Disclosure - Inventories, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarranty" id="DisclosureProductWarranty">
        <link:definition>11001 - Disclosure - Product Warranty</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangements" id="DisclosureFinancingArrangements">
        <link:definition>11101 - Disclosure - Financing Arrangements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurements" id="DisclosureFairValueMeasurements">
        <link:definition>11501 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies" id="DisclosureCommitmentsAndContingencies">
        <link:definition>11601 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>11801 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies" id="DisclosureSummaryOfSignificantAccountingPoliciesPolicies">
        <link:definition>20202 - Disclosure - Summary of Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables" id="DisclosureSummaryOfSignificantAccountingPoliciesTables">
        <link:definition>30203 - Disclosure - Summary of Significant Accounting Policies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" id="DisclosureCashCashEquivalentsAndRestrictedCashTables">
        <link:definition>30403 - Disclosure - Cash, cash equivalents and restricted cash (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesTables">
        <link:definition>30503 - Disclosure - Accounts Receivable and Allowance for Credit Losses (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetTables" id="DisclosureInventoriesNetTables">
        <link:definition>30603 - Disclosure - Inventories, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables" id="DisclosurePropertyPlantAndEquipmentNetTables">
        <link:definition>30703 - Disclosure - Property, Plant and Equipment, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables" id="DisclosureAssetsManufacturedForInternalUseNetTables">
        <link:definition>30803 - Disclosure - Assets Manufactured for Internal Use, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyTables" id="DisclosureProductWarrantyTables">
        <link:definition>31003 - Disclosure - Product Warranty (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables" id="DisclosureEmployeeBenefitPlansTables">
        <link:definition>31203 - Disclosure - Employee Benefit Plans (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables" id="DisclosureStockAwardPlansAndStockBasedCompensationTables">
        <link:definition>31303 - Disclosure - Stock Award Plans and Stock Based Compensation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" id="DisclosureFairValueMeasurementsTables">
        <link:definition>31503 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables" id="DisclosureBusinessSegmentAndGeographicRegionInformationTables">
        <link:definition>31703 - Disclosure - Business Segment and Geographic Region Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesTables" id="DisclosureIncomeTaxesTables">
        <link:definition>31803 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails">
        <link:definition>40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails">
        <link:definition>40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails">
        <link:definition>40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails">
        <link:definition>40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" id="DisclosureRevenueDetails">
        <link:definition>40301 - Disclosure - Revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" id="DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails">
        <link:definition>40302 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" id="DisclosureInventoriesNetAdditionalInformationDetails">
        <link:definition>40602 - Disclosure - Inventories, net - Additional Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" id="DisclosureLeasesDetails">
        <link:definition>40901 - Disclosure - Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" id="DisclosureFinancingArrangementsDetails">
        <link:definition>41101 - Disclosure - Financing Arrangements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" id="DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails">
        <link:definition>41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" id="DisclosureStockAwardPlansAndStockBasedCompensationDetails">
        <link:definition>41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquityDetails" id="DisclosureStockholdersEquityDetails">
        <link:definition>41401 - Disclosure - Stockholders' Equity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" id="DisclosureCommitmentsAndContingenciesDetails">
        <link:definition>41601 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails">
        <link:definition>41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails">
        <link:definition>41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails" id="DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails">
        <link:definition>41805 - Disclosure - Income Taxes - Unrecognized Tax Benefits (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" id="DisclosureIncomeTaxesOperatingLossCarryforwardsDetails">
        <link:definition>41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" id="DisclosureScheduleIiValuationAndQualifyingAccountsDetails">
        <link:definition>41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies" id="DisclosureSummaryOfSignificantAccountingPolicies">
        <link:definition>10201 - Disclosure - Summary of Significant Accounting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses" id="DisclosureAccountsReceivableAndAllowanceForCreditLosses">
        <link:definition>10501 - Disclosure - Accounts Receivable and Allowance for Credit Losses</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet" id="DisclosurePropertyPlantAndEquipmentNet">
        <link:definition>10701 - Disclosure - Property, Plant and Equipment, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet" id="DisclosureAssetsManufacturedForInternalUseNet">
        <link:definition>10801 - Disclosure - Assets Manufactured for Internal Use, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeases" id="DisclosureLeases">
        <link:definition>10901 - Disclosure - Leases</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans" id="DisclosureEmployeeBenefitPlans">
        <link:definition>11201 - Disclosure - Employee Benefit Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation" id="DisclosureStockAwardPlansAndStockBasedCompensation">
        <link:definition>11301 - Disclosure - Stock Award Plans and Stock Based Compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquity" id="DisclosureStockholdersEquity">
        <link:definition>11401 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation" id="DisclosureBusinessSegmentAndGeographicRegionInformation">
        <link:definition>11701 - Disclosure - Business Segment and Geographic Region Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" id="DisclosureScheduleIiValuationAndQualifyingAccounts">
        <link:definition>11901 - Disclosure - Schedule II Valuation and Qualifying Accounts</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueTables" id="DisclosureRevenueTables">
        <link:definition>30303 - Disclosure - Revenue (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesTables" id="DisclosureLeasesTables">
        <link:definition>30903 - Disclosure - Leases (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails" id="DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails">
        <link:definition>40201 - Disclosure - Summary of Significant Accounting Policies - Foreign Currency (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" id="DisclosureRevenueDeferredRevenueDetails">
        <link:definition>40303 - Disclosure - Revenue - Deferred revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails" id="DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails">
        <link:definition>40501 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" id="DisclosureLeasesCashFlowByLeaseTypeDetails">
        <link:definition>40905 - Disclosure - Leases - Cash Flow by Lease Type (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails" id="DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails">
        <link:definition>41701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails" id="DisclosureIncomeTaxesAdditionalInformationDetails">
        <link:definition>41806 - Disclosure - Income Taxes - Additional Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20231231_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://xbrl.sec.gov/dei/2023" schemaLocation="https://xbrl.sec.gov/dei/2023/dei-2023.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/2022-03-31" schemaLocation="https://www.xbrl.org/dtr/type/2022-03-31/types.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd" />
  <xsd:import namespace="http://fasb.org/us-gaap/2023" schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2023" schemaLocation="https://xbrl.sec.gov/country/2023/country-2023.xsd" />
  <xsd:import namespace="http://fasb.org/srt/2023" schemaLocation="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd" />
  <xsd:element name="SecondLargestCustomerMember" id="acls_SecondLargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EquityIncentivePlan2012Member" id="acls_EquityIncentivePlan2012Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="AssetsManufacturedForInternalUseDisclosureAbstract" id="acls_AssetsManufacturedForInternalUseDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="LargestCustomerMember" id="acls_LargestCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="TenLargestCustomersMember" id="acls_TenLargestCustomersMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ConcentrationRiskNumberOfCustomers" id="acls_ConcentrationRiskNumberOfCustomers" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element name="HighlyCompensatedEmployeesMember" id="acls_HighlyCompensatedEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="IonImplantationSystemsServicesAndRoyaltiesMember" id="acls_IonImplantationSystemsServicesAndRoyaltiesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="OtherProductsSystemsServicesAndRoyaltiesMember" id="acls_OtherProductsSystemsServicesAndRoyaltiesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" name="DeferredTaxAssetsLiabilitiesGrossNoncurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" name="UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" name="UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element name="AssetsManufacturedForInternalUseMember" id="acls_AssetsManufacturedForInternalUseMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EmployeeStockPurchasePlanAbstract" id="acls_EmployeeStockPurchasePlanAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" type="xbrli:durationItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="EmployeesMember" id="acls_EmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_NonEmployeeMemberOfBoardOfDirectorMember" name="NonEmployeeMemberOfBoardOfDirectorMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element name="RegularEmployeesMember" id="acls_RegularEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" name="DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element name="StockOptionAwardsMember" id="acls_StockOptionAwardsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="PropertyPlantAndEquipmentUsefulLivesTableTextBlock" id="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" type="xbrli:durationItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="DefinedContributionPlanLineItems" id="acls_DefinedContributionPlanLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" id="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" id="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element name="ResearchDevelopmentAndOtherTaxCreditMember" id="acls_ResearchDevelopmentAndOtherTaxCreditMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element id="acls_AllowanceForDoubtfulAccountsAndReturnsMember" name="AllowanceForDoubtfulAccountsAndReturnsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" name="ChargesRelatedToReflectLowerOfCostOrMarketValue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" name="LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" name="EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_DepositRelatingToCustomsActivity" name="DepositRelatingToCustomsActivity" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" name="DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_SaleAndLeaseBackMember" name="SaleAndLeaseBackMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_BeverlyPropertyOwnerLlcMember" name="BeverlyPropertyOwnerLlcMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashAbstract" name="CashCashEquivalentsAndRestrictedCashAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTextBlock" name="CashCashEquivalentsAndRestrictedCashTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" name="CashCashEquivalentsAndRestrictedCashTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" name="MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_ProvisionForExcessAndObsoleteInventory" name="ProvisionForExcessAndObsoleteInventory" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_ServicesMember" name="ServicesMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_AfterMarketMember" name="AfterMarketMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponShipmentOfTool" name="PercentageOfPaymentUponShipmentOfTool" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" abstract="false" />
  <xsd:element id="acls_PeriodOfPaymentUponDeliveryOfParts" name="PeriodOfPaymentUponDeliveryOfParts" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PercentageOfPaymentUponInstallation" name="PercentageOfPaymentUponInstallation" nillable="true" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" abstract="false" />
  <xsd:element id="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" name="RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" name="PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ExtendedProductWarrantyPeriod" name="ExtendedProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" name="RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_AssetsManufacturedForInternalUseDisclosureTextBlock" name="AssetsManufacturedForInternalUseDisclosureTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeAxis" name="InternalUsedAssetsTypeAxis" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrldt:dimensionItem" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_InternalUsedAssetsTypeDomain" name="InternalUsedAssetsTypeDomain" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CompletedInternalUseAssetsMember" name="CompletedInternalUseAssetsMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_NewSystemsRevenueMember" name="NewSystemsRevenueMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseDisclosureTextBlock" name="LeaseDisclosureTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_OperatingAndFinanceLeaseRightOfUseAsset" name="OperatingAndFinanceLeaseRightOfUseAsset" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiability" name="OperatingAndFinanceLeaseLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseAccumulatedDepreciation" name="FinanceLeaseAccumulatedDepreciation" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_FinanceLeaseCost" name="FinanceLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseBalanceSheetDisclosureTableTextBlock" name="LeaseBalanceSheetDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_LeaseCashFlowInformationDisclosureTableTextBlock" name="LeaseCashFlowInformationDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ShortTermAndVariableLeaseCost" name="ShortTermAndVariableLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_LeaseQuantitativeDisclosureTableTextBlock" name="LeaseQuantitativeDisclosureTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" name="WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" name="FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" name="LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_ContractWithCustomerLiabilityDeferralOfRevenue" name="ContractWithCustomerLiabilityDeferralOfRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_DeferredTaxAssetOperatingLeaseLiabilities" name="DeferredTaxAssetOperatingLeaseLiabilities" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" />
  <xsd:element id="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" name="OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_ShippingAndHandlingCostsPolicyTextBlock" name="ShippingAndHandlingCostsPolicyTextBlock" nillable="true" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" />
  <xsd:element id="acls_NetSettlementOnRestrictedStockGrants" name="NetSettlementOnRestrictedStockGrants" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_SiliconValleyBankMember" name="SiliconValleyBankMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_IncreaseInInventoryReserves" name="IncreaseInInventoryReserves" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element id="acls_FederalMember" name="FederalMember" nillable="true" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" />
  <xsd:element id="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" name="CostOfPropertyRepairsAndMaintenanceCapitalized" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" name="DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" />
  <xsd:element id="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" name="OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" />
  <xsd:element name="PropertyPlantAndEquipmentOtherUsefulLife" id="acls_PropertyPlantAndEquipmentOtherUsefulLife" type="xbrli:durationItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="ProductOrServiceMember" id="acls_ProductOrServiceMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" />
  <xsd:element name="CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" id="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="instant" abstract="false" xbrli:balance="debit" />
  <xsd:element name="EarningsPerShareDetailAbstract" id="acls_EarningsPerShareDetailAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="BenefitOfTaxDeductionsInExcessOfCompensationCost" id="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="UsGovernmentSecuritiesAndAgencyInvestmentsMember" id="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="true" />
  <xsd:element name="DeferredTaxLiabilitiesInternalRevenueCodeLimitation" id="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="debit" />
  <xsd:element name="IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" id="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" abstract="false" xbrli:balance="credit" />
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>8
<FILENAME>acls-20231231_cal.xml
<DESCRIPTION>EX-101.CAL
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/28/2024 7:57:16 PM-->
<!--Modified on: 2/28/2024 7:57:16 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance">
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfComprehensiveIncome" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNetDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosurePropertyPlantAndEquipmentNetDetails" roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureProductWarrantyDetails" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470334222355" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470334222355" xlink:to="us-gaap_OperatingIncomeLoss_638447470334222355" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_638447470334222355" xlink:to="us-gaap_GrossProfit_638447470334222355" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_638447470334222355" xlink:to="us-gaap_Revenues_638447470334222355" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_638447470334222355" xlink:to="us-gaap_CostOfGoodsAndServicesSold_638447470334222355" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_638447470334222355" xlink:to="us-gaap_OperatingExpenses_638447470334222355" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_638447470334222355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638447470334222355" xlink:to="us-gaap_ResearchAndDevelopmentExpense_638447470334222355" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638447470334222355" xlink:to="us-gaap_SellingAndMarketingExpense_638447470334232357" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_638447470334222355" xlink:to="us-gaap_GeneralAndAdministrativeExpense_638447470334232357" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470334222355" xlink:to="us-gaap_NonoperatingIncomeExpense_638447470334232357" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_638447470334232357" xlink:to="us-gaap_InvestmentIncomeInterest_638447470334232357" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_638447470334232357" xlink:to="us-gaap_InterestExpense_638447470334232357" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_638447470334232357" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_638447470334232357" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638447470334232357" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638447470334232357" order="2" use="optional" weight="-1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470334242356" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470334242356" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470334242356" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470334242356" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470334242356" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470334242356" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470334242356" order="1" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470334242356" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470334242356" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470334242356" order="2" use="optional" weight="-1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_638447470334242356" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_AssetsCurrent_638447470334242356" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638447470334242356" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470334252353" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638447470334242356" xlink:to="us-gaap_ShortTermInvestments_638447470334252353" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638447470334242356" xlink:to="us-gaap_AccountsReceivableNetCurrent_638447470334252353" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638447470334242356" xlink:to="us-gaap_InventoryNet_638447470334252353" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_638447470334242356" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638447470334252353" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638447470334252353" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638447470334252353" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_638447470334252353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_638447470334252353" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_638447470334262342" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_638447470334262342" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent_638447470334262342" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities_638447470334262342" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638447470334262342" xlink:to="us-gaap_LiabilitiesCurrent_638447470334262342" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_638447470334262342" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_AccountsPayableCurrent_638447470334262342" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_638447470334272344" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_638447470334272344" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470334272344" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_638447470334272344" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_638447470334272344" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_638447470334272344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_638447470334262342" xlink:to="us-gaap_OtherLiabilitiesCurrent_638447470334272344" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638447470334262342" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470334282338" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638447470334262342" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470334282338" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_638447470334262342" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_638447470334282338" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity_638447470334282338" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638447470334282338" xlink:to="us-gaap_CommonStockValueOutstanding_638447470334282338" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital_638447470334282338" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638447470334282338" xlink:to="us-gaap_AdditionalPaidInCapital_638447470334282338" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_638447470334292336" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638447470334282338" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_638447470334292336" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470334292336" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_638447470334282338" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470334292336" order="4" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638447470334292336" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638447470334292336" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_638447470334292336" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_638447470334292336" order="1" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_ProfitLoss_638447470334302411" order="2" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_638447470334302411" order="3" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_DepreciationDepletionAndAmortization_638447470334302411" order="4" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_638447470334302411" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638447470334302411" order="6" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_ShareBasedCompensation_638447470334302411" order="7" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProvisionForExcessAndObsoleteInventory" xlink:label="acls_ProvisionForExcessAndObsoleteInventory_638447470334302411" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="acls_ProvisionForExcessAndObsoleteInventory_638447470334302411" order="8" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_638447470334312339" order="9" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInInventories_638447470334312339" order="10" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638447470334312339" order="11" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638447470334312339" order="12" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638447470334312339" order="13" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_638447470334312339" order="14" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638447470334312339" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470334292336" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638447470334312339" order="15" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470334322337" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470334322337" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638447470334322337" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470334322337" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638447470334322337" order="1" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_638447470334322337" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470334322337" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_638447470334322337" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireShortTermInvestments" xlink:label="us-gaap_PaymentsToAcquireShortTermInvestments_638447470334322337" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470334322337" xlink:to="us-gaap_PaymentsToAcquireShortTermInvestments_638447470334322337" order="3" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_638447470334332355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" xlink:to="us-gaap_FinanceLeasePrincipalPayments_638447470334332355" order="1" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NetSettlementOnRestrictedStockGrants" xlink:label="acls_NetSettlementOnRestrictedStockGrants_638447470334332355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" xlink:to="acls_NetSettlementOnRestrictedStockGrants_638447470334332355" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_638447470334332355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_638447470334332355" order="3" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_638447470334332355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_638447470334332355" order="4" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans_638447470334343130" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470334332355" xlink:to="us-gaap_ProceedsFromStockPlans_638447470334343130" order="5" use="optional" weight="1" priority="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" xlink:type="extended" xlink:title="40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470334343130" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470334343130" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_638447470334343130" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_638447470334343130" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470334352361" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470334352361" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_638447470334352361" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_638447470334352361" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" xlink:type="extended" xlink:title="40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableGrossCurrent" xlink:label="us-gaap_AccountsReceivableGrossCurrent_638447470334352361" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableGrossCurrent_638447470334352361" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470334352361" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470334352361" order="2" use="optional" weight="-1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Inventories, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_635454461843894040" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_638447470334352361" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_638447470334352361" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_638447470334362353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_638447470334362353" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_638447470334362353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_638447470334362353" order="3" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" xlink:type="extended" xlink:title="40604 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Cal 2" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334362353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334362353" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_638447470334362353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_638447470334362353" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_638447470334362353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_638447470334362353" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_638447470334372344" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_638447470334372344" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470334372344" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334372344" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_638447470334372344" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_638447470334372344" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_638447470334372344" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_638447470334382349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_638447470334382349" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_638447470334382349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_638447470334382349" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470334382349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470334382349" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334382349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638447470334382349" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638447470334392359" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638447470334392359" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638447470334392359" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638447470334392359" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638447470334392359" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638447470334392359" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638447470334392359" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638447470334392359" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638447470334392359" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638447470334392359" order="6" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Property, Plant and Equipment, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_638447470334402345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_638447470334402345" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638447470334402345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638447470334402345" order="2" use="optional" weight="-1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_638447470334402345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_638447470334402345" order="1" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOther" xlink:label="us-gaap_PropertyPlantAndEquipmentOther_638447470334402345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:to="us-gaap_PropertyPlantAndEquipmentOther_638447470334402345" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xlink:type="extended" xlink:title="40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638447470334402345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638447470334402345" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470334412352" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470334412352" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_638447470334412352" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_638447470334412352" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470334412352" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470334412352" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638447470334412352" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638447470334412352" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_638447470334412352" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_638447470334412352" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40903 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost_638447470334482353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_OperatingLeaseCost_638447470334482353" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost_638447470334482353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="acls_FinanceLeaseCost_638447470334482353" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_638447470334482353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_FinanceLeaseCost_638447470334482353" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_638447470334482353" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense_638447470334482353" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_FinanceLeaseCost_638447470334482353" xlink:to="us-gaap_FinanceLeaseInterestExpense_638447470334482353" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_638447470334492367" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiability_638447470334492367" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_OperatingAndFinanceLeaseLiability_638447470334492367" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_638447470334492367" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638447470334492367" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_638447470334492367" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" xlink:to="us-gaap_OperatingLeaseLiability_638447470334492367" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Product Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470334502358" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470334502358" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_638447470334502358" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_638447470334502358" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" xlink:type="extended" xlink:title="41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_638447470334502358" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_638447470334502358" order="1" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments_638447470334512354" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:to="us-gaap_ShortTermInvestments_638447470334512354" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_638447470334512354" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_638447470334512354" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" xlink:type="extended" xlink:title="41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_635948468418709688" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638447470334512354" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_635948468418709688" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638447470334512354" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638447470334512354" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_635948468418709688" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638447470334512354" order="2" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" xlink:type="extended" xlink:title="41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470334512354" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470334512354" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470334512354" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638447470334522349" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470334512354" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638447470334522349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470334512354" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638447470334522349" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470334522349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470334522349" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_638447470334522349" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638447470334522349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470334522349" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638447470334522349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470334522349" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit_638447470334532350" order="3" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" xlink:type="extended" xlink:title="41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_638447470334532350" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_638447470334532350" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_638447470334532350" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_638447470334532350" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationTaxCredits" xlink:label="us-gaap_IncomeTaxReconciliationTaxCredits_638447470334532350" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationTaxCredits_638447470334532350" order="5" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_638447470334542351" order="6" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_638447470334542351" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_638447470334542351" order="8" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638447470334542351" order="9" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638447470334542351" order="10" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638447470334542351" order="11" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638447470334542351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638447470334542351" order="12" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638447470334552345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit_1" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638447470334552345" order="13" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" xlink:type="extended" xlink:title="41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_638447470334552345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_638447470334552345" order="1" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesOther" xlink:label="us-gaap_DeferredTaxLiabilitiesOther_638447470334552345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638447470334552345" xlink:to="us-gaap_DeferredTaxLiabilitiesOther_638447470334552345" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638447470334552345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638447470334552345" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638447470334552345" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638447470334552345" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities_638447470334552345" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638447470334552345" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredTaxAssetsGross_638447470334562349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_638447470334562349" order="1" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross_638447470334562349" xlink:to="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_638447470334562349" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_638447470334562349" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638447470334562349" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638447470334562349" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638447470334562349" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsInventory_638447470334572355" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_638447470334572355" order="6" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetOperatingLeaseLiabilities" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="acls_DeferredTaxAssetOperatingLeaseLiabilities_638447470334572355" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_638447470334572355" order="8" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_638447470334572355" order="9" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_638447470334572355" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_638447470334572355" order="10" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_638447470334582351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_638447470334582351" order="11" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_638447470334582351" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470334562349" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_638447470334582351" order="12" use="optional" weight="1" />
  </calculationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>9
<FILENAME>acls-20231231_def.xml
<DESCRIPTION>EX-101.DEF
<TEXT>
<XBRL>
<?xml version="1.0" encoding="utf-8"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/28/2024 7:57:16 PM-->
<!--Modified on: 2/28/2024 7:57:16 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt">
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNetAdditionalInformationDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosurePropertyPlantAndEquipmentNetDetails" roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFinancingArrangementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockAwardPlansAndStockBasedCompensationDetails" roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCommitmentsAndContingenciesDetails" roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureScheduleIiValuationAndQualifyingAccountsDetails" roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:arcroleRef arcroleURI="http://www.esma.europa.eu/xbrl/esef/arcrole/wider-narrower" xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd#wider-narrower" />
  <link:roleRef roleURI="http://www.axcelis.com/role/DisclosureStandardAndCustomAxisDomainDefaults" xlink:href="acls-20231231.xsd#DisclosureStandardAndCustomAxisDomainDefaults" xlink:type="simple" />
  <roleRef xlink:type="simple" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd#eedm" roleURI="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" />
  <definitionLink xlink:role="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xlink:type="extended" xlink:title="Extensible Enumeration Domain Members" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract_1" xlink:title="us-gaap_AssetsAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_1" xlink:title="us-gaap_OperatingLeaseRightOfUseAsset_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_AssetsAbstract_1" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_AssetsAbstract_1 To us-gaap_OperatingLeaseRightOfUseAsset_1" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_1" xlink:title="us-gaap_FinanceLeaseRightOfUseAsset_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_AssetsAbstract_1" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_AssetsAbstract_1 To us-gaap_FinanceLeaseRightOfUseAsset_1" order="2" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAbstract" xlink:label="us-gaap_LiabilitiesAbstract" xlink:title="us-gaap_LiabilitiesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_1" xlink:title="us-gaap_OtherLiabilitiesCurrent_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesAbstract" xlink:to="us-gaap_OtherLiabilitiesCurrent_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesAbstract To us-gaap_OtherLiabilitiesCurrent_1" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_1" xlink:title="us-gaap_OtherLiabilitiesNoncurrent_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesAbstract" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesAbstract To us-gaap_OtherLiabilitiesNoncurrent_1" order="2" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract_1" xlink:title="us-gaap_LiabilitiesCurrentAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_1" xlink:title="us-gaap_FinanceLeaseLiabilityCurrent_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_LiabilitiesCurrentAbstract_1" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_LiabilitiesCurrentAbstract_1 To us-gaap_FinanceLeaseLiabilityCurrent_1" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccrualForEnvironmentalLossContingencies" xlink:label="us-gaap_AccrualForEnvironmentalLossContingencies" xlink:title="us-gaap_AccrualForEnvironmentalLossContingencies" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilities" xlink:label="us-gaap_OtherLiabilities" xlink:title="us-gaap_OtherLiabilities" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_3" xlink:title="us-gaap_FinanceLeaseLiabilityCurrent_3" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_OtherLiabilities" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_3" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_OtherLiabilities To us-gaap_FinanceLeaseLiabilityCurrent_3" order="1" priority="0" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_1" xlink:title="us-gaap_FinanceLeaseLiabilityNoncurrent_1" />
    <definitionArc xlink:type="arc" xlink:from="us-gaap_OtherLiabilities" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:title="definition:us-gaap_OtherLiabilities To us-gaap_FinanceLeaseLiabilityNoncurrent_1" order="2" priority="0" />
  </definitionLink>
  <link:definitionLink xlink:role="http://www.axcelis.com/role/DisclosureStandardAndCustomAxisDomainDefaults" xlink:type="extended" xlink:title="99900 - Disclosure - Standard And Custom Axis Domain Defaults">
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentInformationDocumentAxis" xlink:label="dei_DocumentInformationDocumentAxis_1" xlink:title="dei_DocumentInformationDocumentAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentDomain" xlink:label="dei_DocumentDomain_1" xlink:title="dei_DocumentDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="dei_DocumentInformationDocumentAxis_1" xlink:to="dei_DocumentDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:dei_DocumentInformationDocumentAxis_1 To dei_DocumentDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis_1" xlink:title="srt_StatementScenarioAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain_1" xlink:title="srt_ScenarioUnspecifiedDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_StatementScenarioAxis_1" xlink:to="srt_ScenarioUnspecifiedDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_StatementScenarioAxis_1 To srt_ScenarioUnspecifiedDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_1" xlink:title="srt_ProductOrServiceAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_1" xlink:title="srt_ProductsAndServicesDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_ProductOrServiceAxis_1" xlink:to="srt_ProductsAndServicesDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_ProductOrServiceAxis_1 To srt_ProductsAndServicesDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_1" xlink:title="us-gaap_StatementEquityComponentsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_1" xlink:title="us-gaap_EquityComponentDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_StatementEquityComponentsAxis_1" xlink:to="us-gaap_EquityComponentDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_StatementEquityComponentsAxis_1 To us-gaap_EquityComponentDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ConsolidatedEntitiesAxis" xlink:label="srt_ConsolidatedEntitiesAxis_1" xlink:title="srt_ConsolidatedEntitiesAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ConsolidatedEntitiesDomain" xlink:label="srt_ConsolidatedEntitiesDomain_1" xlink:title="srt_ConsolidatedEntitiesDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_ConsolidatedEntitiesAxis_1" xlink:to="srt_ConsolidatedEntitiesDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_ConsolidatedEntitiesAxis_1 To srt_ConsolidatedEntitiesDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_1" xlink:title="us-gaap_PlanNameAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_1" xlink:title="us-gaap_PlanNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_PlanNameAxis_1" xlink:to="us-gaap_PlanNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_PlanNameAxis_1 To us-gaap_PlanNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_1" xlink:title="us-gaap_AwardTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" xlink:title="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AwardTypeAxis_1" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AwardTypeAxis_1 To us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_1" xlink:title="srt_RangeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_1" xlink:title="srt_RangeMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_RangeAxis_1" xlink:to="srt_RangeMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_RangeAxis_1 To srt_RangeMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_1" xlink:title="us-gaap_IncomeStatementLocationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_1" xlink:title="us-gaap_IncomeStatementLocationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeStatementLocationAxis_1" xlink:to="us-gaap_IncomeStatementLocationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeStatementLocationAxis_1 To us-gaap_IncomeStatementLocationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InitialApplicationPeriodCumulativeEffectTransitionAxis" xlink:label="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionAxis_1" xlink:title="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InitialApplicationPeriodCumulativeEffectTransitionDomain" xlink:label="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionDomain_1" xlink:title="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionAxis_1" xlink:to="us-gaap_InitialApplicationPeriodCumulativeEffectTransitionDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_InitialApplicationPeriodCumulativeEffectTransitionAxis_1 To us-gaap_InitialApplicationPeriodCumulativeEffectTransitionDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" xlink:title="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember_1" xlink:title="us-gaap_TypeOfAdoptionMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1" xlink:to="us-gaap_TypeOfAdoptionMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_1 To us-gaap_TypeOfAdoptionMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_1" xlink:title="srt_StatementGeographicalAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_1" xlink:title="srt_SegmentGeographicalDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_StatementGeographicalAxis_1" xlink:to="srt_SegmentGeographicalDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_StatementGeographicalAxis_1 To srt_SegmentGeographicalDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis_1" xlink:title="us-gaap_LongtermDebtTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain_1" xlink:title="us-gaap_LongtermDebtTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_LongtermDebtTypeAxis_1" xlink:to="us-gaap_LongtermDebtTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_LongtermDebtTypeAxis_1 To us-gaap_LongtermDebtTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" xlink:title="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" xlink:title="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_1" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_PropertyPlantAndEquipmentByTypeAxis_1 To us-gaap_PropertyPlantAndEquipmentTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_1" xlink:title="srt_CounterpartyNameAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_1" xlink:title="srt_RepurchaseAgreementCounterpartyNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_CounterpartyNameAxis_1" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_CounterpartyNameAxis_1 To srt_RepurchaseAgreementCounterpartyNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_1" xlink:title="us-gaap_FairValueByMeasurementFrequencyAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_1" xlink:title="us-gaap_FairValueMeasurementFrequencyDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis_1" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByMeasurementFrequencyAxis_1 To us-gaap_FairValueMeasurementFrequencyDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" xlink:title="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" xlink:title="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis_1" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByFairValueHierarchyLevelAxis_1 To us-gaap_FairValueMeasurementsFairValueHierarchyDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_1" xlink:title="us-gaap_FairValueByMeasurementBasisAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_1" xlink:title="us-gaap_PortionAtFairValueFairValueDisclosureMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByMeasurementBasisAxis_1" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByMeasurementBasisAxis_1 To us-gaap_PortionAtFairValueFairValueDisclosureMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis_1" xlink:title="us-gaap_FairValueByAssetClassAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_1" xlink:title="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_FairValueByAssetClassAxis_1" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_FairValueByAssetClassAxis_1 To us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis_1" xlink:title="us-gaap_CreditFacilityAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain_1" xlink:title="us-gaap_CreditFacilityDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_CreditFacilityAxis_1" xlink:to="us-gaap_CreditFacilityDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_CreditFacilityAxis_1 To us-gaap_CreditFacilityDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermDebtTypeAxis" xlink:label="us-gaap_ShortTermDebtTypeAxis_1" xlink:title="us-gaap_ShortTermDebtTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermDebtTypeDomain" xlink:label="us-gaap_ShortTermDebtTypeDomain_1" xlink:title="us-gaap_ShortTermDebtTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ShortTermDebtTypeAxis_1" xlink:to="us-gaap_ShortTermDebtTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ShortTermDebtTypeAxis_1 To us-gaap_ShortTermDebtTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis_1" xlink:title="us-gaap_IncomeTaxAuthorityAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_1" xlink:title="us-gaap_IncomeTaxAuthorityDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeTaxAuthorityAxis_1" xlink:to="us-gaap_IncomeTaxAuthorityDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeTaxAuthorityAxis_1 To us-gaap_IncomeTaxAuthorityDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_1" xlink:title="us-gaap_ConcentrationRiskByBenchmarkAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_1" xlink:title="us-gaap_ConcentrationRiskBenchmarkDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_1" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ConcentrationRiskByBenchmarkAxis_1 To us-gaap_ConcentrationRiskBenchmarkDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_1" xlink:title="us-gaap_ConcentrationRiskByTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_1" xlink:title="us-gaap_ConcentrationRiskTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_1" xlink:to="us-gaap_ConcentrationRiskTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ConcentrationRiskByTypeAxis_1 To us-gaap_ConcentrationRiskTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis_1" xlink:title="srt_MajorCustomersAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_1" xlink:title="srt_NameOfMajorCustomerDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_MajorCustomersAxis_1" xlink:to="srt_NameOfMajorCustomerDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_MajorCustomersAxis_1 To srt_NameOfMajorCustomerDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsForChangeInAccountingPrincipleAxis" xlink:label="us-gaap_AdjustmentsForChangeInAccountingPrincipleAxis_1" xlink:title="us-gaap_AdjustmentsForChangeInAccountingPrincipleAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ChangeInAccountingPrincipleMember" xlink:label="us-gaap_ChangeInAccountingPrincipleMember_1" xlink:title="us-gaap_ChangeInAccountingPrincipleMember_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_AdjustmentsForChangeInAccountingPrincipleAxis_1" xlink:to="us-gaap_ChangeInAccountingPrincipleMember_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_AdjustmentsForChangeInAccountingPrincipleAxis_1 To us-gaap_ChangeInAccountingPrincipleMember_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RestatementAxis" xlink:label="srt_RestatementAxis_1" xlink:title="srt_RestatementAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RestatementDomain" xlink:label="srt_RestatementDomain_1" xlink:title="srt_RestatementDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_RestatementAxis_1" xlink:to="srt_RestatementDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_RestatementAxis_1 To srt_RestatementDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeAxis" xlink:label="acls_InternalUsedAssetsTypeAxis_1" xlink:title="acls_InternalUsedAssetsTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeDomain" xlink:label="acls_InternalUsedAssetsTypeDomain_1" xlink:title="acls_InternalUsedAssetsTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="acls_InternalUsedAssetsTypeAxis_1" xlink:to="acls_InternalUsedAssetsTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:acls_InternalUsedAssetsTypeAxis_1 To acls_InternalUsedAssetsTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ChangeInAccountingEstimateByTypeAxis" xlink:label="us-gaap_ChangeInAccountingEstimateByTypeAxis_1" xlink:title="us-gaap_ChangeInAccountingEstimateByTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ChangeInAccountingEstimateTypeDomain" xlink:label="us-gaap_ChangeInAccountingEstimateTypeDomain_1" xlink:title="us-gaap_ChangeInAccountingEstimateTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ChangeInAccountingEstimateByTypeAxis_1" xlink:to="us-gaap_ChangeInAccountingEstimateTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ChangeInAccountingEstimateByTypeAxis_1 To us-gaap_ChangeInAccountingEstimateTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" xlink:title="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_1" xlink:title="us-gaap_ValuationAllowancesAndReservesDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis_1" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_ValuationAllowancesAndReservesTypeAxis_1 To us-gaap_ValuationAllowancesAndReservesDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis" xlink:label="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" xlink:title="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain" xlink:label="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" xlink:title="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1" xlink:to="us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_IncomeStatementBalanceSheetAndAdditionalDisclosuresByDisposalGroupsIncludingDiscontinuedOperationsAxis_1 To us-gaap_DisposalGroupsIncludingDiscontinuedOperationsNameDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis_1" xlink:title="srt_TitleOfIndividualAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain_1" xlink:title="srt_TitleOfIndividualWithRelationshipToEntityDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="srt_TitleOfIndividualAxis_1" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:srt_TitleOfIndividualAxis_1 To srt_TitleOfIndividualWithRelationshipToEntityDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis_1" xlink:title="us-gaap_BalanceSheetLocationAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain_1" xlink:title="us-gaap_BalanceSheetLocationDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_BalanceSheetLocationAxis_1" xlink:to="us-gaap_BalanceSheetLocationDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_BalanceSheetLocationAxis_1 To us-gaap_BalanceSheetLocationDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis_1" xlink:title="us-gaap_SubsequentEventTypeAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain_1" xlink:title="us-gaap_SubsequentEventTypeDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_SubsequentEventTypeAxis_1" xlink:to="us-gaap_SubsequentEventTypeDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_SubsequentEventTypeAxis_1 To us-gaap_SubsequentEventTypeDomain_1" order="1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis_1" xlink:title="us-gaap_TaxCreditCarryforwardAxis_1" />
    <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_1" xlink:title="us-gaap_TaxCreditCarryforwardNameDomain_1" />
    <link:definitionArc xlink:type="arc" xlink:from="us-gaap_TaxCreditCarryforwardAxis_1" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_1" use="optional" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:title="definition:us-gaap_TaxCreditCarryforwardAxis_1 To us-gaap_TaxCreditCarryforwardNameDomain_1" order="1" />
  </link:definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_ServicesMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RevenuesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_Revenues" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CostOfRevenueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfGoodsAndServicesSold" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_GrossProfit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OperatingExpensesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_ResearchAndDevelopmentExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_SellingAndMarketingExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_GeneralAndAdministrativeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpenses" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OperatingIncomeLoss" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_InvestmentIncomeInterest" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_InterestExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_NonoperatingIncomeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncomeTaxExpenseBenefit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_EarningsPerShareAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AdditionalPaidInCapitalMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_RetainedEarningsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_SharesOutstanding" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockholdersEquity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="13" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="14" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" xlink:type="extended" xlink:title="40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LandAndBuildingMember" xlink:label="us-gaap_LandAndBuildingMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LandAndBuildingMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="srt_CounterpartyNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_BeverlyPropertyOwnerLlcMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CostOfPropertyRepairsAndMaintenanceCapitalized" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetImpairmentChargesAbstract" xlink:label="us-gaap_AssetImpairmentChargesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_AssetImpairmentChargesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" xlink:label="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AssetImpairmentChargesAbstract" xlink:to="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" xlink:type="extended" xlink:title="40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_AccountsReceivableMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CreditConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="srt_MajorCustomersAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_TenLargestCustomersMember" xlink:label="acls_TenLargestCustomersMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_TenLargestCustomersMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_LargestCustomerMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_SecondLargestCustomerMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="acls_ConcentrationRiskNumberOfCustomers" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" xlink:type="extended" xlink:title="40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_StatementTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_AfterMarketMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_NewSystemsRevenueMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ExtendedProductWarrantyPeriod" xlink:label="acls_ExtendedProductWarrantyPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="acls_ExtendedProductWarrantyPeriod" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" xlink:type="extended" xlink:title="40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_NewSystemsRevenueMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_AfterMarketMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PercentageOfPaymentUponInstallation" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xlink:type="extended" xlink:title="40302 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_NewSystemsRevenueMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_AfterMarketMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_StatementGeographicalAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_NorthAmericaMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_AsiaPacificMember" xlink:label="srt_AsiaPacificMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_AsiaPacificMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_EuropeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_LongtermDebtTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_LongtermDebtTypeAxis" xlink:to="us-gaap_LongtermDebtTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_LongtermDebtTypeDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_StatementTable" xlink:to="srt_CounterpartyNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_BeverlyPropertyOwnerLlcMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RestrictedCashAndCashEquivalents" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_StatementLineItems" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_SecurityDeposit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_StatementLineItems" xlink:to="acls_DepositRelatingToCustomsActivity" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" xlink:type="extended" xlink:title="40602 - Disclosure - Inventories, net - Additional Information (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryCurrentTable" xlink:label="us-gaap_InventoryCurrentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_InventoryCurrentTable" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserveMember" xlink:label="us-gaap_InventoryValuationReserveMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_InventoryValuationReserveMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryLineItems" xlink:label="us-gaap_InventoryLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_InventoryLineItems" xlink:to="us-gaap_InventoryCurrentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IncreaseInInventoryReserves" xlink:label="acls_IncreaseInInventoryReserves" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_InventoryLineItems" xlink:to="acls_IncreaseInInventoryReserves" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserves" xlink:label="us-gaap_InventoryValuationReserves" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_InventoryLineItems" xlink:to="us-gaap_InventoryValuationReserves" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_InventoryLineItems" xlink:to="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" xlink:label="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_InventoryLineItems" xlink:to="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Property, Plant and Equipment, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LandAndBuildingMember" xlink:label="us-gaap_LandAndBuildingMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LandAndBuildingMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_ConstructionInProgressMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_Depreciation" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseMember" xlink:label="acls_AssetsManufacturedForInternalUseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="acls_AssetsManufacturedForInternalUseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeAxis" xlink:label="acls_InternalUsedAssetsTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="acls_InternalUsedAssetsTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeDomain" xlink:label="acls_InternalUsedAssetsTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="acls_InternalUsedAssetsTypeAxis" xlink:to="acls_InternalUsedAssetsTypeDomain" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CompletedInternalUseAssetsMember" xlink:label="acls_CompletedInternalUseAssetsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_InternalUsedAssetsTypeDomain" xlink:to="acls_CompletedInternalUseAssetsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetUnderConstructionMember" xlink:label="us-gaap_AssetUnderConstructionMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_InternalUsedAssetsTypeDomain" xlink:to="us-gaap_AssetUnderConstructionMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PropertyPlantAndEquipmentOtherUsefulLife" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="acls_PropertyPlantAndEquipmentOtherUsefulLife" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOther" xlink:label="us-gaap_PropertyPlantAndEquipmentOther" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentOther" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherNet" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherDepreciationAndAmortization" xlink:label="us-gaap_OtherDepreciationAndAmortization" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_OtherDepreciationAndAmortization" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesDetails" xlink:type="extended" xlink:title="40901 - Disclosure - Leases (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40903 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="us-gaap_IncomeStatementLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProductOrServiceMember" xlink:label="acls_ProductOrServiceMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="acls_ProductOrServiceMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_SellingAndMarketingExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LeaseCostAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_OperatingLeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_FinanceLeaseInterestExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="acls_FinanceLeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="acls_ShortTermAndVariableLeaseCost" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="srt_CounterpartyNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_BeverlyPropertyOwnerLlcMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_PrepaidRent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Financing Arrangements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_CounterpartyNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_BeverlyPropertyOwnerLlcMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_SiliconValleyBankMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="acls_SaleAndLeaseBackMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_SecurityDeposit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LettersOfCreditOutstandingAmount" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DefinedContributionPlanTable" xlink:to="srt_TitleOfIndividualAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_TitleOfIndividualAxis" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RegularEmployeesMember" xlink:label="acls_RegularEmployeesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="acls_RegularEmployeesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_HighlyCompensatedEmployeesMember" xlink:label="acls_HighlyCompensatedEmployeesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="acls_HighlyCompensatedEmployeesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DefinedContributionPlanLineItems" xlink:label="acls_DefinedContributionPlanLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="us-gaap_DefinedContributionPlanTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="us-gaap_DefinedContributionPlanCostRecognized" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EquityIncentivePlan2012Member" xlink:label="acls_EquityIncentivePlan2012Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="acls_EquityIncentivePlan2012Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_EmployeeStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="acls_StockOptionAwardsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockMember" xlink:label="us-gaap_RestrictedStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="4" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_TitleOfIndividualAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_TitleOfIndividualAxis" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeesMember" xlink:label="acls_EmployeesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="acls_EmployeesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NonEmployeeMemberOfBoardOfDirectorMember" xlink:label="acls_NonEmployeeMemberOfBoardOfDirectorMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="acls_NonEmployeeMemberOfBoardOfDirectorMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="5" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeeStockPurchasePlanAbstract" xlink:label="acls_EmployeeStockPurchasePlanAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_EmployeeStockPurchasePlanAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_EmployeeStockPurchasePlanAbstract" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_EmployeeStockPurchasePlanAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_EmployeeStockPurchasePlanAbstract" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_EmployeeStockPurchasePlanAbstract" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="13" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="14" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="15" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="16" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="17" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="18" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="19" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="20" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementsRecurringMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel1Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel2Member" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementBasisAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByMeasurementBasisAxis" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="4" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByAssetClassAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ShortTermInvestments" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" xlink:type="extended" xlink:title="41601 - Disclosure - Commitments and Contingencies (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="srt_StatementScenarioAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_ScenarioUnspecifiedDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioForecastMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:label="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermPurchaseCommitmentAmount" xlink:label="us-gaap_LongTermPurchaseCommitmentAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:to="us-gaap_LongTermPurchaseCommitmentAmount" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" xlink:type="extended" xlink:title="41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:label="acls_IonImplantationSystemsServicesAndRoyaltiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_IonImplantationSystemsServicesAndRoyaltiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:label="acls_OtherProductsSystemsServicesAndRoyaltiesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_OtherProductsSystemsServicesAndRoyaltiesMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:label="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:to="us-gaap_Revenues" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" xlink:type="extended" xlink:title="41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="srt_StatementGeographicalAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2023/country-2023.xsd#country_US" xlink:label="country_US" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_US" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_EuropeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_AsiaPacificMember" xlink:label="srt_AsiaPacificMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_AsiaPacificMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonUsMember" xlink:label="us-gaap_NonUsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="srt_SegmentGeographicalDomain" xlink:to="us-gaap_NonUsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="us-gaap_GeographicConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_GeographicConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_Revenues" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_NoncurrentAssets" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xlink:type="extended" xlink:title="41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_OperatingLossCarryforwardsTable" xlink:to="us-gaap_TaxCreditCarryforwardAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ResearchDevelopmentAndOtherTaxCreditMember" xlink:label="acls_ResearchDevelopmentAndOtherTaxCreditMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="acls_ResearchDevelopmentAndOtherTaxCreditMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_OperatingLossCarryforwardsTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FederalMember" xlink:label="acls_FederalMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="acls_FederalMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_ForeignCountryMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwards" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xlink:type="extended" xlink:title="41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AllowanceForDoubtfulAccountsAndReturnsMember" xlink:label="acls_AllowanceForDoubtfulAccountsAndReturnsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="acls_AllowanceForDoubtfulAccountsAndReturnsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:label="us-gaap_MovementInValuationAllowancesAndReservesRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_MovementInValuationAllowancesAndReservesRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions" priority="1" use="optional" />
  </definitionLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>10
<FILENAME>acls-20231231_lab.xml
<DESCRIPTION>EX-101.LAB
<TEXT>
<XBRL>
<?xml version="1.0" encoding="utf-8"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/28/2024 7:57:16 PM-->
<!--Modified on: 2/28/2024 7:57:16 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrldt="http://xbrl.org/2005/xbrldt">
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" roleURI="http://www.xbrl.org/2009/role/negatedLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:labelLink xlink:type="extended" xlink:role="http://www.xbrl.org/2003/role/link">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CoverAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document and Entity Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentInformationTable" xlink:label="dei_DocumentInformationTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentInformationTable" xlink:to="dei_DocumentInformationTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentInformationTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Information [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II-Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentType" xlink:label="dei_DocumentType" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentType_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Type</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentAnnualReport" xlink:to="dei_DocumentAnnualReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentAnnualReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Annual Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentTransitionReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Transition Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentPeriodEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Period End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFileNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity File Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityRegistrantName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Registrant Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Incorporation, State or Country Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Tax Identification Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Address Line One</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressCityOrTown_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, City or Town</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressStateOrProvince_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, State or Province</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressPostalZipCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Postal Zip Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CityAreaCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">City Area Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_LocalPhoneNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Local Phone Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Security12bTitle_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Title of 12(b) Security</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_TradingSymbol_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trading Symbol</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SecurityExchangeName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security Exchange Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityWellKnownSeasonedIssuer" xlink:to="dei_EntityWellKnownSeasonedIssuer_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityWellKnownSeasonedIssuer_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Well-known Seasoned Issuer</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityVoluntaryFilers" xlink:to="dei_EntityVoluntaryFilers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityVoluntaryFilers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Voluntary Filers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCurrentReportingStatus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Current Reporting Status</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Interactive Data Current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFilerCategory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Filer Category</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntitySmallBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Small Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Emerging Growth Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_IcfrAuditorAttestationFlag" xlink:to="dei_IcfrAuditorAttestationFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ICFR Auditor Attestation Flag</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ICFR Auditor Attestation Flag</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFinStmtErrorCorrectionFlag" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFinStmtErrorCorrectionFlag" xlink:to="dei_DocumentFinStmtErrorCorrectionFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Financial Statement Error Correction [Flag]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityShellCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Shell Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPublicFloat" xlink:to="dei_EntityPublicFloat_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityPublicFloat_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Public Float</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Common Stock, Shares Outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorName" xlink:label="dei_AuditorName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorName" xlink:to="dei_AuditorName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorFirmId" xlink:to="dei_AuditorFirmId_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorFirmId_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Firm ID</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorLocation" xlink:to="dei_AuditorLocation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditorLocation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Auditor Location</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CurrentFiscalYearEndDate" xlink:to="dei_CurrentFiscalYearEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Fiscal Year End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalYearFocus" xlink:to="dei_DocumentFiscalYearFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalYearFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Year Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalPeriodFocus" xlink:to="dei_DocumentFiscalPeriodFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Period Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCentralIndexKey_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Central Index Key</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AmendmentFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amendment Flag</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_IncomeStatementAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Operations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductOrServiceAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductOrServiceAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductsAndServicesDomain" xlink:to="srt_ProductsAndServicesDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductsAndServicesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductMember" xlink:to="us-gaap_ProductMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ServicesMember" xlink:to="acls_ServicesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ServicesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Service or group of services that are sold by the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ServicesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Services</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_RevenuesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenues [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Revenues" xlink:to="us-gaap_Revenues_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Revenues_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenues</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Revenues_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfRevenueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Revenue [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of revenue:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfGoodsAndServicesSold" xlink:to="us-gaap_CostOfGoodsAndServicesSold_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Goods and Services Sold</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total cost of revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_GrossProfit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Profit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross profit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpensesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating expenses:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpense" xlink:to="us-gaap_ResearchAndDevelopmentExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingAndMarketingExpense" xlink:to="us-gaap_SellingAndMarketingExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling and Marketing Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales and marketing</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GeneralAndAdministrativeExpense" xlink:to="us-gaap_GeneralAndAdministrativeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and Administrative Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and administrative</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpenses" xlink:to="us-gaap_OperatingExpenses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating expenses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_OperatingIncomeLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Income (Loss)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income from operations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nonoperating Income (Expense) [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other income (expense):</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentIncomeInterest" xlink:to="us-gaap_InvestmentIncomeInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investment Income, Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpense" xlink:to="us-gaap_InterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNonoperatingIncomeExpense" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Nonoperating Income (Expense)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonoperatingIncomeExpense" xlink:to="us-gaap_NonoperatingIncomeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nonoperating Income (Expense)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total other income (expense)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income tax provision</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income tax provision</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Available to Common Stockholders, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income available to common stockholders</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Computation of Net Earnings per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income per share:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasic" xlink:to="us-gaap_EarningsPerShareBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDiluted" xlink:to="us-gaap_EarningsPerShareDiluted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares used in computing net income per share:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic weighted average shares of common stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average shares of common stock outstanding used in computing basic income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted weighted average shares of common stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average shares of common stock used in computing diluted net income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:to="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss):</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign currency translation adjustments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive (Income) Loss, Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of actuarial net gain and other adjustments from pension plan, net of tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in pension obligation, net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total other comprehensive income (loss)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_StatementOfFinancialPositionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfFinancialPositionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Balance Sheets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_AssetsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ASSETS</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AssetsCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current assets:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, at Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermInvestments" xlink:to="us-gaap_ShortTermInvestments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShortTermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShortTermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term investments (U.S. Government Securities and Agency Investments)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Net, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade receivable, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Expense and Other Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant and equipment, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right of use asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseRightOfUseAsset" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease assets, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxAssetsNet" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsNoncurrent" xlink:to="us-gaap_OtherAssetsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Assets, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Assets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">LIABILITIES AND STOCKHOLDERS' EQUITY</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableCurrent" xlink:to="us-gaap_AccountsPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee-related Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount classified as current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesCurrent" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityCurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityCurrent" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance liabilities current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current portion of finance lease obligation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OtherLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_LiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance liabilities noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term finance lease obligation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesNoncurrent" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other long-term liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_Liabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingencies" xlink:to="us-gaap_CommitmentsAndContingencies_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and contingencies (Note 16)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' equity:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockValueOutstanding" xlink:to="us-gaap_CommonStockValueOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockValueOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Value, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockValueOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, $0.001 par value, 75,000 shares authorized; 32,685 shares issued and outstanding at December 31, 2023; 32,775 shares issued and outstanding at December 31, 2022</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapital" xlink:to="us-gaap_AdditionalPaidInCapital_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapital_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid in Capital</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdditionalPaidInCapital_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional paid-in capital</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsAccumulatedDeficit" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained Earnings (Accumulated Deficit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained earnings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at December 31, 2023</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at December 31, 2022</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated other comprehensive loss</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_StockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities and stockholders' equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockParOrStatedValuePerShare" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesAuthorized" xlink:to="us-gaap_CommonStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of common stock authorized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesIssued" xlink:to="us-gaap_CommonStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesOutstanding" xlink:to="us-gaap_CommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of common stock outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_StatementEquityComponentsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Components [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_EquityComponentDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquityComponentDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Component [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockMember" xlink:to="us-gaap_CommonStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalMember" xlink:to="us-gaap_AdditionalPaidInCapitalMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid-in Capital</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsMember" xlink:to="us-gaap_RetainedEarningsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Deficit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharesOutstanding" xlink:to="us-gaap_SharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercised (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise of stock options (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Stock Options Exercised</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise of stock options</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Employee Stock Purchase Plans</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of stock under Employee Stock Purchase Plan (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares purchased under the plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Employee Stock Purchase Plan</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of stock under Employee Stock Purchase Plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Restricted Stock Award, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of restricted common shares (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of restricted common shares</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodShares" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury shares returned to authorized, Shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodValue" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury shares returned to authorized, Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_StatementOfCashFlowsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfCashFlowsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Cash Flows</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from operating activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProfitLoss" xlink:to="us-gaap_ProfitLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to reconcile net income to net cash provided by operating activities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepreciationDepletionAndAmortization" xlink:to="us-gaap_DepreciationDepletionAndAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation, Depletion and Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation and amortization</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensation" xlink:to="us-gaap_ShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProvisionForDoubtfulAccounts" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for Doubtful Accounts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for doubtful accounts</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProvisionForExcessAndObsoleteInventory" xlink:label="acls_ProvisionForExcessAndObsoleteInventory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ProvisionForExcessAndObsoleteInventory" xlink:to="acls_ProvisionForExcessAndObsoleteInventory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ProvisionForExcessAndObsoleteInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of provision related to write-down of excess and obsolete inventory.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ProvisionForExcessAndObsoleteInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for excess and obsolete inventory</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ProvisionForExcessAndObsoleteInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for excess and obsolete inventory</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments" xlink:to="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accretion (Amortization) of Discounts and Premiums, Investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accretion of discounts and premiums on marketable securities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Transaction Gain (Loss), before Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Currency loss on foreign denominated transactions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Operating Capital [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in operating assets and liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInInventories" xlink:to="us-gaap_IncreaseDecreaseInInventories_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Prepaid Expense and Other Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Payable and Accrued Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable and other current liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease In Contract With Customer Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Income Taxes Payable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Other Operating Assets and Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets and liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by operating activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from investing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expenditures for property, plant and equipment and capitalized software</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireShortTermInvestments" xlink:label="us-gaap_PaymentsToAcquireShortTermInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireShortTermInvestments" xlink:to="us-gaap_PaymentsToAcquireShortTermInvestments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquireShortTermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Short-term Investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquireShortTermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase of short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Maturities, Prepayments and Calls of Short-Term Investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maturities of short-term investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash used in investing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from financing activities</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NetSettlementOnRestrictedStockGrants" xlink:label="acls_NetSettlementOnRestrictedStockGrants" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_NetSettlementOnRestrictedStockGrants" xlink:to="acls_NetSettlementOnRestrictedStockGrants_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_NetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The net cash inflow or outflow from cash and cash items that are not available for withdrawal or usage.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_NetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Settlement On Restricted Stock Grants</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_NetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net settlement on restricted stock grants</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments for Repurchase of Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromStockPlans" xlink:to="us-gaap_ProceedsFromStockPlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromStockPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Stock Plans</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromStockPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Employee Stock Purchase Plan purchases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeasePrincipalPayments" xlink:to="us-gaap_FinanceLeasePrincipalPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Principal Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Principal payments on finance lease obligation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing cash outflows from finance leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromStockOptionsExercised" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Stock Options Exercised</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from exercise of stock options</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash used in financing activities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of exchange rate changes on cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net (decrease) increase in cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash at end of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash at beginning of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SupplementalCashFlowElementsAbstract" xlink:label="us-gaap_SupplementalCashFlowElementsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SupplementalCashFlowElementsAbstract" xlink:to="us-gaap_SupplementalCashFlowElementsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SupplementalCashFlowElementsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Supplemental Cash Flow Elements [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SupplementalCashFlowElementsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Supplemental disclosure of cash flow information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxesPaidNet" xlink:to="us-gaap_IncomeTaxesPaidNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes Paid, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPaidNet" xlink:to="us-gaap_InterestPaidNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Paid</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_InterestPaidNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nature of Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nature of Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_AccountingPoliciesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountingPoliciesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of Significant Accounting Policies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SignificantAccountingPoliciesTextBlock" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SignificantAccountingPoliciesTextBlock" xlink:to="us-gaap_SignificantAccountingPoliciesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Significant Accounting Policies [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of Significant Accounting Policies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">N/A</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The entire disclosure of cash, cash equivalents and restricted cash.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Cash Equivalents And Restricted Cash [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableNetAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables and Allowances for Credit Losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:to="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loans, Notes, Trade and Other Receivables Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivables and Allowances for Credit Losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureTextBlock" xlink:to="us-gaap_InventoryDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, net.</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, net</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:to="acls_AssetsManufacturedForInternalUseDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets Manufactured for Internal Use, net</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:to="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The entire disclosure of assets manufactured for internal use. This includes details regarding cost, accumulated depreciation and uses of the assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets Manufactured For Internal Use Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets Manufactured for Internal Use, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeasesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeasesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseDisclosureTextBlock" xlink:label="acls_LeaseDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseDisclosureTextBlock" xlink:to="acls_LeaseDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The entire disclosure of information about leases.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyDisclosureTextBlock" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureTextBlock" xlink:to="us-gaap_DebtDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Benefit Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pension and Other Postretirement Benefits Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Benefit Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Award Plans and Stock Based Compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of Compensation Related Costs, Share-based Payments [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Award Plans and Stock Based Compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Note Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresTextBlock" xlink:to="us-gaap_FairValueDisclosuresTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Disclosures [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_SegmentReportingAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SegmentReportingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Segment and Geographic Region Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingDisclosureTextBlock" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Reporting Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Business Segment and Geographic Region Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureTextBlock" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ValuationAndQualifyingAccountsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ValuationAndQualifyingAccountsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II-Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Valuation and Qualifying Accounts Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II-Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy" xlink:label="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy" xlink:to="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidation, Subsidiaries or Other Investments, Consolidated Entities, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basis of Presentation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UseOfEstimates" xlink:label="us-gaap_UseOfEstimates" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UseOfEstimates" xlink:to="us-gaap_UseOfEstimates_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UseOfEstimates_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Use of Estimates, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UseOfEstimates_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Use of Estimates</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Transactions and Translations Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" xlink:to="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of accounting policy for cash and cash equivalents and short term investments, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, And Short Term Investments Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents and Short-term Investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryPolicyTextBlock" xlink:to="us-gaap_InventoryPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment and Leased Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:to="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of Long-Lived Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskCreditRisk" xlink:to="us-gaap_ConcentrationRiskCreditRisk_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Credit Risk, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Risk and Off-Balance Sheet Risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="us-gaap_RevenueRecognitionPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRecognitionPolicyTextBlock" xlink:to="us-gaap_RevenueRecognitionPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueRecognitionPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue Recognition, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueRecognitionPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue Recognition</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" xlink:label="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" xlink:to="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of recognizing assets related to recoverable customer contract costs.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognizing Assets Related to Recoverable Customer Contract Costs [Policy text block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognizing Assets related to Recoverable Customer Contract Costs</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShippingAndHandlingCostsPolicyTextBlock" xlink:label="acls_ShippingAndHandlingCostsPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShippingAndHandlingCostsPolicyTextBlock" xlink:to="acls_ShippingAndHandlingCostsPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShippingAndHandlingCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shipping and Handling Costs.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShippingAndHandlingCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shipping and Handling Costs [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShippingAndHandlingCostsPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shipping and Handling Costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-Based Compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPolicyTextBlock" xlink:to="us-gaap_IncomeTaxPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerSharePolicyTextBlock" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerSharePolicyTextBlock" xlink:to="us-gaap_EarningsPerSharePolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Computation of Net Income per Share</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" xlink:label="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" xlink:to="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of accounting policy for accumulated other comprehensive income.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Loss</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:to="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Accounting Pronouncements, Policy [Policy Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recent Accounting Guidance</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" xlink:label="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" xlink:to="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of useful life of physical assets used in the normal conduct of business and not intended for resale.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Useful Lives [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of estimated useful lives of the related assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of net income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in accumulated other comprehensive loss, net of tax</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:to="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue From External Customers By Discipline Areas Table Text Block</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue by discipline</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:to="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Geographic Areas [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue by geographic markets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Asset and Liability [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Contract liabilities</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure for cash, cash equivalents and restricted cash.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Cash Equivalents And Restricted Cash [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:to="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Allowance for Credit Loss [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of allowances for credit losses related to trade receivables</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock" xlink:label="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock" xlink:to="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Accounts, Notes, Loans and Financing Receivable [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of accounts receivable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Inventory, Current [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of property, plant and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfOtherAssetsTableTextBlock" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfOtherAssetsTableTextBlock" xlink:to="us-gaap_ScheduleOfOtherAssetsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Other Assets [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of assets manufactured for internal use</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:to="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease balance sheet.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Balance Sheet Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of operating and finance lease right-of-use assets and related lease obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostTableTextBlock" xlink:to="us-gaap_LeaseCostTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of lease costs</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:to="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating And Finance Lease Liability Maturity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of future minimum operating and finance leases</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:to="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease quantitative information.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Quantitative Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of weighted-average remaining lease term and discount rates</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:to="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease cash flow information.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Cash Flow Information Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of cash outflows by lease type</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Product Warranty Liability [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of product warranty liability</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:label="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:to="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Amounts Recognized in Balance Sheet [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of classification of liabilities in Consolidated Balance Sheets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of estimated weighted-average assumptions used in calculation of fair value of options granted</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Summary of stock option activity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:to="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in the Company's non-vested restricted stock units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Company's assets and liabilities by level within the fair value hierarchy</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Products and Services [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue by product lines</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue and long-lived assets by geographic region</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:to="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of income before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of provision for income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Deferred Tax Assets and Liabilities [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of significant components of current and long-term deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:to="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of the beginning and ending balance of unrecognized tax benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign Currency Transaction Gain (Loss), Realized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign exchange gains (losses) realized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_CounterpartyNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CounterpartyNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Counterparty Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Counterparty Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_BeverlyPropertyOwnerLlcMember" xlink:to="acls_BeverlyPropertyOwnerLlcMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_BeverlyPropertyOwnerLlcMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to Beverly Property Owner LLC</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_BeverlyPropertyOwnerLlcMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Beverly Property Owner LLC</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LandAndBuildingMember" xlink:label="us-gaap_LandAndBuildingMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LandAndBuildingMember" xlink:to="us-gaap_LandAndBuildingMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LandAndBuildingMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Land and building</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingMember" xlink:to="us-gaap_BuildingMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BuildingMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Building</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MachineryAndEquipmentMember" xlink:to="us-gaap_MachineryAndEquipmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Machinery and equipment</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeAxis" xlink:to="srt_RangeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeMember" xlink:to="srt_RangeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MinimumMember" xlink:to="srt_MinimumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MinimumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MaximumMember" xlink:to="srt_MaximumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MaximumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant and equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets manufactured for internal use</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Useful Life</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Useful life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseTermOfContract" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating Lease Term Of Contract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease term</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CostOfPropertyRepairsAndMaintenanceCapitalized" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CostOfPropertyRepairsAndMaintenanceCapitalized" xlink:to="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The aggregate costs of keeping the property in good condition and are capitalized and depreciated over the life of the property.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Property Repairs and Maintenance, Capitalized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capitalized cost of property repairs and maintenance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetImpairmentChargesAbstract" xlink:label="us-gaap_AssetImpairmentChargesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetImpairmentChargesAbstract" xlink:to="us-gaap_AssetImpairmentChargesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetImpairmentChargesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Impairment Charges [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetImpairmentChargesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of Long-Lived Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" xlink:label="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" xlink:to="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of Long-Lived Assets Held-for-use</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Impairment of long-lived assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SalesRevenueNetMember" xlink:to="us-gaap_SalesRevenueNetMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableMember" xlink:to="us-gaap_AccountsReceivableMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_ConcentrationRiskTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerConcentrationRiskMember" xlink:to="us-gaap_CustomerConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer concentration risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditConcentrationRiskMember" xlink:to="us-gaap_CreditConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit concentration risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_MajorCustomersAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MajorCustomersAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="srt_NameOfMajorCustomerDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_TenLargestCustomersMember" xlink:label="acls_TenLargestCustomersMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_TenLargestCustomersMember" xlink:to="acls_TenLargestCustomersMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_TenLargestCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the ten largest customers on whom the entity significantly relies giving rise to aggregate concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_TenLargestCustomersMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ten largest customers</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LargestCustomerMember" xlink:to="acls_LargestCustomerMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents one customer on whom the entity significantly relies giving rise to the largest single concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">First customer</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SecondLargestCustomerMember" xlink:to="acls_SecondLargestCustomerMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SecondLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents one customer on whom the entity significantly relies giving rise to the second largest single concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SecondLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Second customer</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Risk</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ConcentrationRiskNumberOfCustomers" xlink:to="acls_ConcentrationRiskNumberOfCustomers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Number of Customers</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskPercentage1" xlink:to="us-gaap_ConcentrationRiskPercentage1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of concentration risk</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AfterMarketMember" xlink:to="acls_AfterMarketMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_AfterMarketMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to Aftermarket.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AfterMarketMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aftermarket</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_NewSystemsRevenueMember" xlink:to="acls_NewSystemsRevenueMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_NewSystemsRevenueMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to revenue arising from the sale of new systems, a product line of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_NewSystemsRevenueMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Systems</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ExtendedProductWarrantyPeriod" xlink:label="acls_ExtendedProductWarrantyPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ExtendedProductWarrantyPeriod" xlink:to="acls_ExtendedProductWarrantyPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ExtendedProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the extended period for which the warranty is offered for the products sold.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ExtendedProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Extended Product Warranty Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_ExtendedProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product warranty period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Anti-dilutive common equivalent shares excluded from calculation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Incremental Common Shares Attributable to Dilutive Effect of Share-based Payment Arrangements</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Incremental options and RSUs</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EarningsPerShareDetailAbstract" xlink:label="acls_EarningsPerShareDetailAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_EarningsPerShareDetailAbstract" xlink:to="acls_EarningsPerShareDetailAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_EarningsPerShareDetailAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">n/a</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_EarningsPerShareDetailAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share Detail [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_EarningsPerShareDetailAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income per share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive (Loss) Income [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedTranslationAdjustmentMember" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign currency</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined benefit pension plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive (Loss) Income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in accumulated other comprehensive (loss) income, net of tax</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive (Income) Loss, Reclassification Adjustment from AOCI, Pension and Other Postretirement Benefit Plans, Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income and pension reclassification</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="us-gaap_DisaggregationOfRevenueTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiability" xlink:to="us-gaap_ContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PercentageOfPaymentUponShipmentOfTool" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the percentage of payment terms due upon shipment of the system.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of Payment Upon Shipment of Tool</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon shipment of the system, as a percent</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PercentageOfPaymentUponInstallation" xlink:to="acls_PercentageOfPaymentUponInstallation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the percentage of payment terms due upon acceptance.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of Payment Upon Installation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon acceptance, as a percent</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PeriodOfPaymentUponDeliveryOfParts" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period for payment upon delivery of parts.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period of Payment Upon Delivery of Parts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon delivery of parts, period</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" xlink:to="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period for payment upon delivery of parts.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period Of Unsatisfied Extended Warranty Performance Obligations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unsatisfied extended warranty performance obligations, period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_StatementGeographicalAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementGeographicalAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_SegmentGeographicalDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_SegmentGeographicalDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NorthAmericaMember" xlink:to="srt_NorthAmericaMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NorthAmericaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">North America</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_AsiaPacificMember" xlink:label="srt_AsiaPacificMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_AsiaPacificMember" xlink:to="srt_AsiaPacificMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_AsiaPacificMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asia Pacific</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_EuropeMember" xlink:to="srt_EuropeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_EuropeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Europe</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer, Excluding Assessed Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:to="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Deferral Of Revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferral of revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Revenue Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognition of deferred revenue</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents [Abstract]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongtermDebtTypeAxis" xlink:to="us-gaap_LongtermDebtTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongtermDebtTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongtermDebtTypeDomain" xlink:to="us-gaap_LongtermDebtTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongtermDebtTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevolvingCreditFacilityMember" xlink:to="us-gaap_RevolvingCreditFacilityMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving credit facility</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalents" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term restricted cash</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Portion of Availability Used to Support Outstanding Letters of Credit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted cash which relates to support of outstanding letters of credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SecurityDeposit" xlink:to="us-gaap_SecurityDeposit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SecurityDeposit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security Deposit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SecurityDeposit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security deposit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Workers' Compensation Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter of credit related to workers' compensation insurance</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DepositRelatingToCustomsActivity" xlink:to="acls_DepositRelatingToCustomsActivity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of deposits relating customs activity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit Relating To Customs Activity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit related to customs activity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for Doubtful Accounts Receivable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for doubtful accounts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Allowance for Credit Loss, Writeoff</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charge-offs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProvisionForLoanLeaseAndOtherLosses" xlink:label="us-gaap_ProvisionForLoanLeaseAndOtherLosses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProvisionForLoanLeaseAndOtherLosses" xlink:to="us-gaap_ProvisionForLoanLeaseAndOtherLosses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProvisionForLoanLeaseAndOtherLosses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for Loan, Lease, and Other Losses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProvisionForLoanLeaseAndOtherLosses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for credit losses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableGrossCurrent" xlink:label="us-gaap_AccountsReceivableGrossCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableGrossCurrent" xlink:to="us-gaap_AccountsReceivableGrossCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableGrossCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Gross, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableGrossCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trade receivables</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryCurrentTable" xlink:label="us-gaap_InventoryCurrentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryCurrentTable" xlink:to="us-gaap_InventoryCurrentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryCurrentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Current [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryLineItems" xlink:label="us-gaap_InventoryLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryLineItems" xlink:to="us-gaap_InventoryLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_InventoryLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net additional information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryRawMaterialsNetOfReserves" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Raw Materials, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Raw materials</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWorkInProcessNetOfReserves" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Work in Process, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Work in process</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Finished Goods, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finished goods (completed systems)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserveMember" xlink:label="us-gaap_InventoryValuationReserveMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryValuationReserveMember" xlink:to="us-gaap_InventoryValuationReserveMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryValuationReserveMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory valuation reserve</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IncreaseInInventoryReserves" xlink:label="acls_IncreaseInInventoryReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_IncreaseInInventoryReserves" xlink:to="acls_IncreaseInInventoryReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_IncreaseInInventoryReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in inventory reserves which was driven by write-down of excess inventory related to legacy products.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_IncreaseInInventoryReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in Inventory Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_IncreaseInInventoryReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in inventory reserves</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserves" xlink:label="us-gaap_InventoryValuationReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryValuationReserves" xlink:to="us-gaap_InventoryValuationReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryValuationReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory Valuation Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryValuationReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory reserves</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" xlink:to="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the amount charged to cost of sales due to reflect the lower of cost or market value.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charges Related to Reflect Lower of Cost or Market Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charges to cost of sales due to lower of cost or market value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" xlink:label="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" xlink:to="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Inventory, Materials, Supplies and Merchandise under Consignment, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory on consignment at customer locations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConstructionInProgressMember" xlink:to="us-gaap_ConstructionInProgressMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConstructionInProgressMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Construction in progress</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentGross" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated depreciation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Depreciation" xlink:to="us-gaap_Depreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Depreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation expense</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseMember" xlink:label="acls_AssetsManufacturedForInternalUseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AssetsManufacturedForInternalUseMember" xlink:to="acls_AssetsManufacturedForInternalUseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_AssetsManufacturedForInternalUseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the details pertaining to assets manufactured for internal use and reported a part as other assets within the balance sheet.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AssetsManufacturedForInternalUseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets Manufactured for Internal Use</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeAxis" xlink:label="acls_InternalUsedAssetsTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_InternalUsedAssetsTypeAxis" xlink:to="acls_InternalUsedAssetsTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_InternalUsedAssetsTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Information by type of assets used for internal purpose and not intended to sale.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_InternalUsedAssetsTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Internal Used Assets Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeDomain" xlink:label="acls_InternalUsedAssetsTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_InternalUsedAssetsTypeDomain" xlink:to="acls_InternalUsedAssetsTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_InternalUsedAssetsTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Listing of assets used for internal purpose which are not intended to sale.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_InternalUsedAssetsTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Internal Used Assets Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CompletedInternalUseAssetsMember" xlink:label="acls_CompletedInternalUseAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CompletedInternalUseAssetsMember" xlink:to="acls_CompletedInternalUseAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CompletedInternalUseAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to internal used assets that have been completed and placed into use.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CompletedInternalUseAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Internal use assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetUnderConstructionMember" xlink:label="us-gaap_AssetUnderConstructionMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetUnderConstructionMember" xlink:to="us-gaap_AssetUnderConstructionMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetUnderConstructionMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Construction in process</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PropertyPlantAndEquipmentOtherUsefulLife" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PropertyPlantAndEquipmentOtherUsefulLife" xlink:to="acls_PropertyPlantAndEquipmentOtherUsefulLife_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Useful life of other long lived assets used in the normal conduct of business and not intended for resale.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Other Useful Life</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Useful life</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOther" xlink:label="us-gaap_PropertyPlantAndEquipmentOther" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentOther" xlink:to="us-gaap_PropertyPlantAndEquipmentOther_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Other, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Other, Accumulated Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated depreciation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Other, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets manufactured for internal use, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherDepreciationAndAmortization" xlink:label="us-gaap_OtherDepreciationAndAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherDepreciationAndAmortization" xlink:to="us-gaap_OtherDepreciationAndAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherDepreciationAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Depreciation and Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherDepreciationAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation expense</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="us-gaap_LesseeLeaseDescriptionTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeaseDescriptionTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Lease, Description [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Lease, Description [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Existence of Option to Extend [true false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Option to extend</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Renewal Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Renewal term</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's right to use underlying asset under operating and finance lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating And Finance Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total leased assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating liabilities current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating liabilities noncurrent</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="acls_OperatingAndFinanceLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Present value of lessee's discounted obligation for lease payments from operating and finance lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating and Finance Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease liabilities</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseAccumulatedDepreciation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceLeaseAccumulatedDepreciation" xlink:to="acls_FinanceLeaseAccumulatedDepreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The cumulative amount of depreciation of finance leased assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Accumulated Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease, accumulated depreciation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidRent" xlink:to="us-gaap_PrepaidRent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidRent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Rent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PrepaidRent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid rent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PrepaidRent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid financing costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_IncomeStatementLocationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProductOrServiceMember" xlink:label="acls_ProductOrServiceMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ProductOrServiceMember" xlink:to="acls_ProductOrServiceMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ProductOrServiceMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to product or service member.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ProductOrServiceMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product / services*</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpenseMember" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingAndMarketingExpenseMember" xlink:to="us-gaap_SellingAndMarketingExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingAndMarketingExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales and marketing*</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GeneralAndAdministrativeExpenseMember" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and administrative*</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCostAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseCost" xlink:to="us-gaap_OperatingLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Right-of-Use Asset, Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation of leased assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseInterestExpense" xlink:to="us-gaap_FinanceLeaseInterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest on lease liabilities</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceLeaseCost" xlink:to="acls_FinanceLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of finance lease cost recognized by lessee for lease contract.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total finance lease cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_LeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease cost</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShortTermAndVariableLeaseCost" xlink:to="acls_ShortTermAndVariableLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of short-term and variable lease cost.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term And Variable Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term lease and variable lease costs</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease Liabilities, Payments, Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments finance lease</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2028</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease obligations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease Liabilities, Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments operating lease</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2028</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due after Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease obligations</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">n/a.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance And Operating Lease Liabilities Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments finance and operating lease</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee operating and finance lease liability payments due next twelve months.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2026</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2027</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2028</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due After Year Five</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">n/a.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Remaining Lease Term And Discount Rate [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease term and discount rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Finance Lease, Term of Contract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases -Weighted-average remaining lease term (in years)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance leases - Weighted-average remaining lease term (in years)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Discount Rate, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases - Weighted-average discount rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Weighted Average Discount Rate, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance leases - Weighted-average discount rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeasePayments" xlink:to="us-gaap_OperatingLeasePayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating cash outflows from operating leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Interest Payment on Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating cash outflows from finance leases</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right-of-Use Asset Obtained in Exchange for Operating Lease Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease assets obtained in exchange for operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProductWarrantyPeriod" xlink:label="acls_ProductWarrantyPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ProductWarrantyPeriod" xlink:to="acls_ProductWarrantyPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period for which the warranty is offered for the products sold.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product warranty period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:to="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Movement in Standard and Extended Product Warranty, Increase (Decrease) [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in standard product warranty liability</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrual_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at September 30 (end of period)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at January 1 (beginning of year)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total warranty liability</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Warranties Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranties issued during the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPayments" xlink:to="us-gaap_ProductWarrantyAccrualPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Settlements made during the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Preexisting, Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in estimate of liability for pre-existing warranties during the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:to="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Balance Sheet Classification [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product warranty classification</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualNoncurrent" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount classified as long-term (within other long-term liabilities)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Long-term Debt Instruments [Table]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SiliconValleyBankMember" xlink:to="acls_SiliconValleyBankMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SiliconValleyBankMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to Silicon Valley Bank.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SiliconValleyBankMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Silicon Valley Bank</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SaleAndLeaseBackMember" xlink:to="acls_SaleAndLeaseBackMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SaleAndLeaseBackMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the sale and leaseback transaction.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SaleAndLeaseBackMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sale leaseback obligation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditFacilityAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_CreditFacilityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditFacilityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale of Property Held-for-sale</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from sale of corporate headquarters</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum borrowing capacity under the credit facility</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LettersOfCreditOutstandingAmount" xlink:to="us-gaap_LettersOfCreditOutstandingAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letters of Credit Outstanding, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter of credit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanTable" xlink:to="us-gaap_DefinedContributionPlanTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_TitleOfIndividualAxis" xlink:to="srt_TitleOfIndividualAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_TitleOfIndividualAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Title of Individual [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Relationship to Entity [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RegularEmployeesMember" xlink:label="acls_RegularEmployeesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_RegularEmployeesMember" xlink:to="acls_RegularEmployeesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_RegularEmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the regular employees of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_RegularEmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Regular employees</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_HighlyCompensatedEmployeesMember" xlink:label="acls_HighlyCompensatedEmployeesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_HighlyCompensatedEmployeesMember" xlink:to="acls_HighlyCompensatedEmployeesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_HighlyCompensatedEmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the highly compensated employees of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_HighlyCompensatedEmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Highly compensated employees</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DefinedContributionPlanLineItems" xlink:label="acls_DefinedContributionPlanLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DefinedContributionPlanLineItems" xlink:to="acls_DefinedContributionPlanLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DefinedContributionPlanLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line items represent financial concepts included in a table. These concepts are used to disclose reportable information.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DefinedContributionPlanLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DefinedContributionPlanLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Maximum Annual Contributions Per Employee, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum contribution per employee under the Axcelis Long-Term Investment Plan (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Employer Matching Contribution, Percent of Match</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employer contributed by eligible participants</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Employer Matching Contribution, Percent of Employees' Gross Pay</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pre-tax compensation contributed</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanCostRecognized" xlink:to="us-gaap_DefinedContributionPlanCostRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Contribution Plan, Cost Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined contribution plan expenses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Defined Benefit Plans Disclosures [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Benefit Plan Disclosure [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Compensation Plans</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pension and Other Postretirement Defined Benefit Plans, Liabilities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Classification of liabilities in the Consolidated Balance Sheets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pension and Other Postretirement Defined Benefit Plans, Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other long-term liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Pension and Other Postretirement Defined Benefit Plans, Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedBenefitPlanAdministrationExpenses" xlink:label="us-gaap_DefinedBenefitPlanAdministrationExpenses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanAdministrationExpenses" xlink:to="us-gaap_DefinedBenefitPlanAdministrationExpenses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DefinedBenefitPlanAdministrationExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined Benefit Plan, Administration Expenses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DefinedBenefitPlanAdministrationExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan expenses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameDomain" xlink:to="us-gaap_PlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EquityIncentivePlan2012Member" xlink:label="acls_EquityIncentivePlan2012Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_EquityIncentivePlan2012Member" xlink:to="acls_EquityIncentivePlan2012Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_EquityIncentivePlan2012Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to 2012 Equity Incentive Plan of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_EquityIncentivePlan2012Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity incentive plan 2012</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_AwardTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AwardTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Award Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Award [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeStockMember" xlink:to="us-gaap_EmployeeStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Stock Purchase Plan</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedStockUnitsRSUMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Stock Units</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_StockOptionAwardsMember" xlink:to="acls_StockOptionAwardsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_StockOptionAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract that gives the holder the right, but not the obligation, either to purchase or to sell a certain number of shares of stock at a predetermined price for a specified period of time.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_StockOptionAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Option Awards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockMember" xlink:label="us-gaap_RestrictedStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedStockMember" xlink:to="us-gaap_RestrictedStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted stock</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeesMember" xlink:label="acls_EmployeesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_EmployeesMember" xlink:to="acls_EmployeesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_EmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the employees of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_EmployeesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employees</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NonEmployeeMemberOfBoardOfDirectorMember" xlink:label="acls_NonEmployeeMemberOfBoardOfDirectorMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_NonEmployeeMemberOfBoardOfDirectorMember" xlink:to="acls_NonEmployeeMemberOfBoardOfDirectorMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_NonEmployeeMemberOfBoardOfDirectorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the non-employee members of the entity's Board of Directors.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_NonEmployeeMemberOfBoardOfDirectorMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Non-employee members of Board of Director</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-Based Compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares of common stock originally reserved for future grant</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Expiration period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vesting period</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period after termination to exercise share-based awards that were vested.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangement by Share Based Payment Award, Period after Termination to Exercise Awards that were Vested</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period after termination to exercise awards that were vested</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period after termination to retiring employees to exercise vested share-based awards.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangement by Share Based Payment Award Period after Termination to Retiring Employees to Exercise Vested Awards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period after termination to retiring employees to exercise vested awards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares of common stock available for future grants</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares authorized for issuance under share-based payment arrangement which is approved by shareholders.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Authorized, Number of Shares Approved by Shareholders</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares approved</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares authorized for issuance under share-based payment arrangement as a result of expiration or forfeiture of awards under prior equity plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Authorized, Number of Shares from Expirations or Forfeitures of Prior Equity Plan</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares from expirations or forfeitures</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeeStockPurchasePlanAbstract" xlink:label="acls_EmployeeStockPurchasePlanAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_EmployeeStockPurchasePlanAbstract" xlink:to="acls_EmployeeStockPurchasePlanAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_EmployeeStockPurchasePlanAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Stock Purchase Plan [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_EmployeeStockPurchasePlanAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Stock Purchase Plan</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the amount of payroll deductions, expressed as a percentage of employees' salary, subject to certain caps set forth in the employee stock purchase plan, through which purchases are made.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Arrangement by Share Based Payment, Award Payroll Deductions as Percentage of Employees Salary</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payroll deductions as a percentage of employee's salary</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase price as a percentage of the market value of a common stock on the day the stock is purchased</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the offering period over which compensation expense is amortized.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Arrangement by Share Based Payment Award Offering Period Over which Compensation Expense is Amortized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Offering period over which compensation expense is amortized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-Based Compensation Expense</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the estimated annual forfeiture rate of the unvested portion of share-based compensation awards, based on historical analysis.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Arrangement by Share Based Payment, Award Fair Value Assumptions Forfeiture Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forfeiture rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpense" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allocated Share-based Compensation Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" xlink:to="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The aggregate cash inflow comprised of the amount received from (a) employees to acquire the entity's shares under incentive awards, including stock option exercises and restricted stock arrangements, and (b) the excess tax benefit arising from such transactions.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Benefit Of Tax Deductions In Excess of Compensation Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Benefit of tax deductions in excess of recognized compensation cost</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Tax Benefit from Compensation Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax benefit</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimated weighted-average assumptions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted-average expected volatility (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted-average expected term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Risk-free interest rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expected dividend yield (as a percent)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested, Number of Shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vested (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercisable (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Vested at the end of the period (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Exercise Price</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercised (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercisable at the end of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Exercise Price</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Vested at the end of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Arrangement by Share Based Payment Award Options, Weighted Average Remaining Contractual Term [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Remaining Contractual Term</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercisable at the end of the period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Remaining Contractual Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Vested at the end of the period</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation, Arrangement by Share Based Payment, Award, Options Aggregate Intrinsic Value [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Aggregate Intrinsic Value</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercisable at the end of the period (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Vested at the end of the period (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Additional Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional disclosure</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total intrinsic value of options exercised (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Not yet Recognized, Stock Options</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total forfeiture adjusted unrecognized compensation cost (in dollars)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted-average period over which unrecognized compensation cost is expected to be recognized</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares/units</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vested (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forfeited (in shares)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted-Average Grant Date Fair Value per Share</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the end of the period (in dollars per share)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Outstanding at the beginning of the period (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Granted (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Vested (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forfeited (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="us-gaap_ScheduleOfStockByClassTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_ScheduleOfStockByClassTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfStockByClassTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Stock by Class [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ClassOfStockLineItems" xlink:label="us-gaap_ClassOfStockLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_ClassOfStockLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ClassOfStockLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Class of Stock [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ClassOfStockLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements, Recurring and Nonrecurring [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement Frequency [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Measurement Frequency [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsRecurringMember" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recurring</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Hierarchy [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Hierarchy [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel1Member" xlink:to="us-gaap_FairValueInputsLevel1Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Level 1</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel2Member" xlink:to="us-gaap_FairValueInputsLevel2Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Level 2</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueByAssetClassAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Class [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Class [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Includes fund that invests in short-term money-market instruments, for example, but not limited to, commercial paper, banker's acceptances, repurchase agreements, United States government securities, certificates of deposit, and other highly liquid securities including Agency investments, all of which are considered cash equivalents.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money market funds, US Government Securities and Agency Investments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money market funds, U.S. Government Securities and Agency Investments</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:to="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information related to U.S. Government Securities and Agency Investments.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">US Government Securities and Agency Investments [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">U.S. Government Securities and Agency Investments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementBasisAxis" xlink:to="us-gaap_FairValueByMeasurementBasisAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement Basis [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Portion at Fair Value Measurement [Member]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimate of fair value measurement</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, Fair Value Disclosure</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:to="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. All of the above and Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents And Short Term Investments, Fair Value Disclosure</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_StatementScenarioAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementScenarioAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Scenario [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioUnspecifiedDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScenarioUnspecifiedDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Scenario, Unspecified [Domain]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScenarioForecastMember" xlink:to="srt_ScenarioForecastMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ScenarioForecastMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Forecast [Member]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:label="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:to="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Purchase Commitments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermPurchaseCommitmentAmount" xlink:label="us-gaap_LongTermPurchaseCommitmentAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermPurchaseCommitmentAmount" xlink:to="us-gaap_LongTermPurchaseCommitmentAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongTermPurchaseCommitmentAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Purchase Commitment, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongTermPurchaseCommitmentAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contracts and purchase orders for inventory and other expenditures</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfReportableSegments" xlink:to="us-gaap_NumberOfReportableSegments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of Reportable Segments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of business segments</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Products and Services [Table]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:label="acls_IonImplantationSystemsServicesAndRoyaltiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:to="acls_IonImplantationSystemsServicesAndRoyaltiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_IonImplantationSystemsServicesAndRoyaltiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the ion implantation systems, services, and royalties, a product line of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_IonImplantationSystemsServicesAndRoyaltiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Ion implantation systems and services</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:label="acls_OtherProductsSystemsServicesAndRoyaltiesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:to="acls_OtherProductsSystemsServicesAndRoyaltiesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OtherProductsSystemsServicesAndRoyaltiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the other products systems, services, and royalties of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OtherProductsSystemsServicesAndRoyaltiesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other systems and services</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:label="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:to="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customer [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue by product lines</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Revenues from External Customers and Long-Lived Assets [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2023/country-2023.xsd#country_US" xlink:label="country_US" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_US" xlink:to="country_US_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="country_US_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">United States</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonUsMember" xlink:label="us-gaap_NonUsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonUsMember" xlink:to="us-gaap_NonUsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NonUsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">International</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="us-gaap_GeographicConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GeographicConcentrationRiskMember" xlink:to="us-gaap_GeographicConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GeographicConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographic concentration risk</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenues from External Customers and Long-Lived Assets [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue and long-lived assets by geographic region</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NoncurrentAssets" xlink:to="us-gaap_NoncurrentAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NoncurrentAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-Lived Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NoncurrentAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-Lived Assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (loss) before income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Domestic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">United States</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Foreign</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Components of Income Tax Expense (Benefit), Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes (Benefits)</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Income Tax Expense (Benefit), Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentFederalTaxExpenseBenefit" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Federal Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current State and Local Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentForeignTaxExpenseBenefit" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Foreign Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense (Benefit), Continuing Operations [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Federal Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred State and Local Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Foreign Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" xlink:to="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations after allocation of valuation allowance.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense Benefit After Valuation Allowance Allocation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total deferred</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract" xlink:label="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract" xlink:to="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Amount [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Federal income tax rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes at the United States statutory rate</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of change in valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign income tax rate differentials</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-based Compensation Cost, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock based compensation</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" xlink:to="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets attributable to internal Revenue Code 162(m) limitation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Internal Revenue Code Limitation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Internal revenue code section 162(m) limitation</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" xlink:to="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to credit expirations.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Credit Expirations, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit expirations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Change in Enacted Tax Rate, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Rate change</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationTaxCredits" xlink:label="us-gaap_IncomeTaxReconciliationTaxCredits" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationTaxCredits" xlink:to="us-gaap_IncomeTaxReconciliationTaxCredits_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationTaxCredits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Tax Credit, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncomeTaxReconciliationTaxCredits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit generation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Other Reconciling Items, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Discrete items, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, GILTI, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">GILTI inclusion</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, FDII, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign-derived intangible income</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, Other Adjustments, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract" xlink:label="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract" xlink:to="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net of Valuation Allowance, Noncurrent Classification [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Significant components of long-term deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Operating Loss Carryforwards, State and Local</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State net operating loss carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Operating Loss Carryforwards, Foreign</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign net operating loss carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Credit Carryforwards, General Business</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal tax credit carryforwards</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" xlink:to="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local tax credit carryforwards.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Credit Carryforwards, State and Local</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">State tax credit carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment" xlink:to="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Property, Plant and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant and equipment</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetOperatingLeaseLiabilities" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxAssetOperatingLeaseLiabilities" xlink:to="acls_DeferredTaxAssetOperatingLeaseLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from operating lease liabilities.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Asset, Operating Lease Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease liability</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:to="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets Tax Deferred Expense Compensation and Benefits Employee Compensation Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsInventory" xlink:to="us-gaap_DeferredTaxAssetsInventory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Inventory</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsInventory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock compensation</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Warranty Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsDeferredIncome" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Deferred Income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" xlink:to="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from capitalized research and development costs expensed in connection with a business combination.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Capitalized Research and Development Costs</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Capitalized research and development costs</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:to="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets (Liabilities) Gross Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Valuation Allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax liabilities:</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Intangible Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Intangible assets</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Leasing Arrangements</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right-of-use asset</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesOther" xlink:label="us-gaap_DeferredTaxLiabilitiesOther" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesOther" xlink:to="us-gaap_DeferredTaxLiabilitiesOther_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxLiabilitiesOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Other</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_DeferredTaxLiabilitiesOther_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Liabilities, Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross deferred tax liabilities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:to="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred taxes, net</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardTable" xlink:label="us-gaap_TaxCreditCarryforwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardTable" xlink:to="us-gaap_TaxCreditCarryforwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardLineItems" xlink:label="us-gaap_TaxCreditCarryforwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardLineItems" xlink:to="us-gaap_TaxCreditCarryforwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TaxCreditCarryforwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax credit carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:to="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reconciliation of the beginning and ending balance of unrecognized tax benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefits" xlink:to="us-gaap_UnrecognizedTaxBenefits_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at end of year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at beginning of year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized tax benefits related to uncertain tax positions</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Decrease Resulting from Settlements with Taxing Authorities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Decreases in unrecognized tax benefits related to settlements with tax authorities</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:to="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Reduction Resulting from Lapse of Applicable Statute of Limitations</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:to="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits Recorded as Other Long Term Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recorded as other long-term liability</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:to="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits Recorded as Decrease in Deferred Tax Assets and Offsetting Valuation Allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recorded as a decrease in deferred tax assets</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" xlink:label="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" xlink:to="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of increase in deferred tax asset due to capitalized research and development cost.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in Deferred Asset, Capitalized Research and Development Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in deferred tax asset</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UndistributedEarningsOfForeignSubsidiaries" xlink:label="us-gaap_UndistributedEarningsOfForeignSubsidiaries" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UndistributedEarningsOfForeignSubsidiaries" xlink:to="us-gaap_UndistributedEarningsOfForeignSubsidiaries_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UndistributedEarningsOfForeignSubsidiaries_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Undistributed Earnings of Foreign Subsidiaries</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UndistributedEarningsOfForeignSubsidiaries_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash associated with indefinitely reinvested foreign earnings</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest and penalty expense recognized related to unrecognized tax benefits</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwardsTable" xlink:to="us-gaap_OperatingLossCarryforwardsTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwardsTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards [Table]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tax Credit Carryforward, Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ResearchDevelopmentAndOtherTaxCreditMember" xlink:label="acls_ResearchDevelopmentAndOtherTaxCreditMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ResearchDevelopmentAndOtherTaxCreditMember" xlink:to="acls_ResearchDevelopmentAndOtherTaxCreditMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ResearchDevelopmentAndOtherTaxCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research Development and Other Tax Credits.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ResearchDevelopmentAndOtherTaxCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development and other tax credit carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxAuthorityAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Authority [Axis]</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_IncomeTaxAuthorityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxAuthorityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Authority [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FederalMember" xlink:label="acls_FederalMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FederalMember" xlink:to="acls_FederalMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FederalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the designated tax department of the government of the United States of America entitled to levy and collect income taxes from the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FederalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Federal</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCountryMember" xlink:to="us-gaap_ForeignCountryMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ForeignCountryMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating loss carryforwards</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwards" xlink:to="us-gaap_OperatingLossCarryforwards_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net operating loss carryforwards</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" xlink:to="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of operating loss carryforwards are subject to an uncertain tax position reserve.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Loss Carryforwards are Subject to Uncertain Tax Position Reserve</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Uncertain tax position</label>
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AllowanceForDoubtfulAccountsAndReturnsMember" xlink:label="acls_AllowanceForDoubtfulAccountsAndReturnsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_AllowanceForDoubtfulAccountsAndReturnsMember" xlink:to="acls_AllowanceForDoubtfulAccountsAndReturnsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_AllowanceForDoubtfulAccountsAndReturnsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">A valuation allowance for trade and other receivables due to the entity that are expected to be uncollectible and valuation allowance for the amount of products sold that the entity expects to be returned by the purchaser.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_AllowanceForDoubtfulAccountsAndReturnsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for doubtful accounts and returns</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax valuation allowance</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:label="us-gaap_MovementInValuationAllowancesAndReservesRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:to="us-gaap_MovementInValuationAllowancesAndReservesRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MovementInValuationAllowancesAndReservesRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Movement in Valuation Allowances and Reserves [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_MovementInValuationAllowancesAndReservesRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesBalance" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at End of Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at Beginning of Period</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Charged to Cost and Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charged to Costs and Expenses</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDeductions" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowances and Reserves, Deductions</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deductions</label>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>11
<FILENAME>acls-20231231_pre.xml
<DESCRIPTION>EX-101.PRE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="utf-8"?>
<!--XBRL document created with Toppan Merrill Bridge  10.5.0.8 -->
<!--Based on XBRL 2.1-->
<!--Created on: 2/28/2024 7:57:16 PM-->
<!--Modified on: 2/28/2024 7:57:16 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance">
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DocumentDocumentAndEntityInformation" roleURI="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfComprehensiveIncome" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedBalanceSheetsParenthetical" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureNatureOfBusiness" roleURI="http://www.axcelis.com/role/DisclosureNatureOfBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPolicies" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenue" roleURI="http://www.axcelis.com/role/DisclosureRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCashCashEquivalentsAndRestrictedCash" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAccountsReceivableAndAllowanceForCreditLosses" roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNet" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosurePropertyPlantAndEquipmentNet" roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAssetsManufacturedForInternalUseNet" roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeases" roleURI="http://www.axcelis.com/role/DisclosureLeases" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureProductWarranty" roleURI="http://www.axcelis.com/role/DisclosureProductWarranty" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFinancingArrangements" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlans" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockAwardPlansAndStockBasedCompensation" roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockholdersEquity" roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFairValueMeasurements" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurements" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCommitmentsAndContingencies" roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformation" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxes" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxes" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureScheduleIiValuationAndQualifyingAccounts" roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesPolicies" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesTables" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueTables" roleURI="http://www.axcelis.com/role/DisclosureRevenueTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCashCashEquivalentsAndRestrictedCashTables" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAccountsReceivableAndAllowanceForCreditLossesTables" roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNetTables" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosurePropertyPlantAndEquipmentNetTables" roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAssetsManufacturedForInternalUseNetTables" roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesTables" roleURI="http://www.axcelis.com/role/DisclosureLeasesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureProductWarrantyTables" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlansTables" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockAwardPlansAndStockBasedCompensationTables" roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFairValueMeasurementsTables" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationTables" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesTables" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" roleURI="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureRevenueDeferredRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails" roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" roleURI="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNetDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureInventoriesNetAdditionalInformationDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosurePropertyPlantAndEquipmentNetDetails" roleURI="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" roleURI="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureLeasesCashFlowByLeaseTypeDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureProductWarrantyDetails" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFinancingArrangementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" roleURI="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockAwardPlansAndStockBasedCompensationDetails" roleURI="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureStockholdersEquityDetails" roleURI="http://www.axcelis.com/role/DisclosureStockholdersEquityDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureCommitmentsAndContingenciesDetails" roleURI="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" roleURI="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesAdditionalInformationDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20231231.xsd#DisclosureScheduleIiValuationAndQualifyingAccountsDetails" roleURI="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <presentationLink xlink:role="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" xlink:type="extended" xlink:title="00090 - Document - Document and Entity Information" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentType" xlink:label="dei_DocumentType_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType_638447470335742367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentAnnualReport_638447470335742367" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentTransitionReport_638447470335742367" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate_638447470335742367" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber_638447470335742367" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName_638447470335742367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName_638447470335742367" order="6" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode_638447470335752372" order="7" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber_638447470335752372" order="8" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1_638447470335752372" order="9" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown_638447470335752372" order="10" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince_638447470335752372" order="11" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode_638447470335752372" order="12" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode_638447470335752372" order="13" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber_638447470335752372" order="14" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle_638447470335752372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle_638447470335752372" order="15" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol_638447470335762354" order="16" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName_638447470335762354" order="17" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityWellKnownSeasonedIssuer_638447470335762354" order="18" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityVoluntaryFilers_638447470335762354" order="19" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCurrentReportingStatus_638447470335762354" order="20" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInteractiveDataCurrent_638447470335762354" order="21" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFilerCategory_638447470335762354" order="22" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness_638447470335762354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntitySmallBusiness_638447470335762354" order="23" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany_638447470335772352" order="24" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_IcfrAuditorAttestationFlag_638447470335772352" order="25" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFinStmtErrorCorrectionFlag" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFinStmtErrorCorrectionFlag_638447470335772352" order="26" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityShellCompany_638447470335772352" order="27" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityPublicFloat_638447470335772352" order="28" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding_638447470335772352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCommonStockSharesOutstanding_638447470335772352" order="29" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorName" xlink:label="dei_AuditorName_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorName_638447470335782361" order="30" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorFirmId_638447470335782361" order="31" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorLocation_638447470335782361" order="32" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CurrentFiscalYearEndDate_638447470335782361" order="33" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalYearFocus_638447470335782361" order="34" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalPeriodFocus_638447470335782361" order="35" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey_638447470335782361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey_638447470335782361" order="36" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag_638447470335792351" order="37" use="optional" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract_635454443247847540" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementAbstract_635454443247847540" xlink:to="us-gaap_StatementTable_638447470335792351" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470335792351" xlink:to="srt_ProductOrServiceAxis_638447470335792351" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638447470335792351" xlink:to="srt_ProductsAndServicesDomain_638447470335792351" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470335792351" xlink:to="us-gaap_ProductMember_638447470335792351" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470335792351" xlink:to="acls_ServicesMember_638447470335792351" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470335792351" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470335792351" xlink:to="us-gaap_StatementLineItems_638447470335792351" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_RevenuesAbstract_638447470335802363" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesAbstract_638447470335802363" xlink:to="us-gaap_Revenues_638447470335802363" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_CostOfRevenueAbstract_638447470335802363" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract_638447470335802363" xlink:to="us-gaap_CostOfGoodsAndServicesSold_638447470335802363" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_GrossProfit_638447470335802363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_OperatingExpensesAbstract_638447470335802363" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638447470335802363" xlink:to="us-gaap_ResearchAndDevelopmentExpense_638447470335802363" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638447470335802363" xlink:to="us-gaap_SellingAndMarketingExpense_638447470335802363" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638447470335802363" xlink:to="us-gaap_GeneralAndAdministrativeExpense_638447470335802363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_638447470335802363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_638447470335802363" xlink:to="us-gaap_OperatingExpenses_638447470335802363" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_OperatingIncomeLoss_638447470335812349" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" xlink:to="us-gaap_InvestmentIncomeInterest_638447470335812349" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" xlink:to="us-gaap_InterestExpense_638447470335812349" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_638447470335812349" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_638447470335812349" xlink:to="us-gaap_NonoperatingIncomeExpense_638447470335812349" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470335812349" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638447470335812349" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638447470335812349" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335822352" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_EarningsPerShareAbstract_638447470335822352" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470335822352" xlink:to="us-gaap_EarningsPerShareBasic_638447470335822352" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470335822352" xlink:to="us-gaap_EarningsPerShareDiluted_638447470335822352" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335792351" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638447470335822352" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638447470335822352" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470335822352" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638447470335822352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_638447470335822352" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638447470335822352" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335832352" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470335832352" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470335832352" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_638447470335832352" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_638447470335832352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_638447470335832352" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_638447470335832352" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_AssetsAbstract_638447470335842364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_AssetsCurrentAbstract_638447470335842364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470335842364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_ShortTermInvestments_638447470335842364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_AccountsReceivableNetCurrent_638447470335842364" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_InventoryNet_638447470335842364" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_638447470335842364" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_638447470335842364" xlink:to="us-gaap_AssetsCurrent_638447470335842364" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638447470335842364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638447470335842364" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_638447470335842364" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_638447470335842364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_638447470335842364" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_638447470335852359" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_OtherAssetsNoncurrent_638447470335852359" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_638447470335842364" xlink:to="us-gaap_Assets_638447470335852359" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_AccountsPayableCurrent_638447470335852359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_638447470335852359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470335852359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470335852359" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_638447470335862371" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_638447470335862371" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_638447470335862371" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_OtherLiabilitiesCurrent_638447470335862371" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_638447470335852359" xlink:to="us-gaap_LiabilitiesCurrent_638447470335862371" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470335862371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470335862371" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_638447470335862371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_638447470335862371" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_Liabilities_638447470335872354" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_CommitmentsAndContingencies_638447470335872354" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_StockholdersEquityAbstract_638447470335872354" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638447470335872354" xlink:to="us-gaap_CommonStockValueOutstanding_638447470335872354" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638447470335872354" xlink:to="us-gaap_AdditionalPaidInCapital_638447470335872354" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_638447470335872354" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638447470335872354" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_638447470335872354" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638447470335872354" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470335882395" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_638447470335872354" xlink:to="us-gaap_StockholdersEquity_638447470335882395" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_638447470335852359" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_638447470335882395" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" xlink:type="extended" xlink:title="00305 - Statement - Consolidated Balance Sheets (Parenthetical)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_638447470335882395" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesAuthorized_638447470335882395" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued_638447470335882395" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesIssued_638447470335882395" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesOutstanding_638447470335892358" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementTable_638447470335892358" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470335892358" xlink:to="us-gaap_StatementEquityComponentsAxis_638447470335892358" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470335892358" xlink:to="us-gaap_CommonStockMember_638447470335892358" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470335892358" xlink:to="us-gaap_AdditionalPaidInCapitalMember_638447470335892358" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470335892358" xlink:to="us-gaap_RetainedEarningsMember_638447470335892358" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470335892358" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_638447470335892358" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470335892358" xlink:to="us-gaap_EquityComponentDomain_638447470335892358" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470335892358" xlink:to="us-gaap_StatementLineItems_638447470335892358" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470335892358" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_638447470335892358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_SharesOutstanding_638447470335892358" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockholdersEquity_638447470335902364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470335902364" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_638447470335902364" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_638447470335902364" order="5" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638447470335902364" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_638447470335902364" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638447470335902364" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_638447470335902364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_638447470335902364" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_638447470335912372" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_638447470335912372" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_638447470335912372" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares_638447470335912372" order="13" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue_638447470335912372" order="14" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_SharesOutstanding_638447470335912372" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_638447470335912372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_638447470335892358" xlink:to="us-gaap_StockholdersEquity_638447470335912372" order="16" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_638447470335972356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_ProfitLoss_638447470335972356" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_DepreciationDepletionAndAmortization_638447470335982375" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_638447470335982375" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_ShareBasedCompensation_638447470335982375" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="us-gaap_ProvisionForDoubtfulAccounts_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_ProvisionForDoubtfulAccounts_638447470335982375" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProvisionForExcessAndObsoleteInventory" xlink:label="acls_ProvisionForExcessAndObsoleteInventory_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="acls_ProvisionForExcessAndObsoleteInventory_638447470335982375" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments" xlink:label="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments_638447470335982375" order="6" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionGainLossBeforeTax" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossBeforeTax_638447470335982375" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_638447470335982375" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_638447470335982375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInInventories_638447470335982375" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_638447470335992358" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_638447470335992358" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_638447470335992358" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_638447470335992358" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_638447470335982375" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_638447470335992358" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_638447470335972356" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_638447470335992358" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_638447470335992358" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsToAcquireShortTermInvestments" xlink:label="us-gaap_PaymentsToAcquireShortTermInvestments_638447470335992358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" xlink:to="us-gaap_PaymentsToAcquireShortTermInvestments_638447470335992358" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments_638447470336002352" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_638447470335992358" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_638447470336002352" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NetSettlementOnRestrictedStockGrants" xlink:label="acls_NetSettlementOnRestrictedStockGrants_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="acls_NetSettlementOnRestrictedStockGrants_638447470336002352" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_638447470336002352" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="us-gaap_ProceedsFromStockPlans_638447470336002352" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="us-gaap_FinanceLeasePrincipalPayments_638447470336002352" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_638447470336002352" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_638447470336002352" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470336012356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_638447470336002352" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_638447470336012356" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638447470336012356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_638447470336012356" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_638447470336012356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_638447470336012356" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638447470336012356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638447470336012356" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6384474703360123561" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6384474703360123561" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SupplementalCashFlowElementsAbstract" xlink:label="us-gaap_SupplementalCashFlowElementsAbstract_638447470336012356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_SupplementalCashFlowElementsAbstract_638447470336012356" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet_638447470336022358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SupplementalCashFlowElementsAbstract_638447470336012356" xlink:to="us-gaap_IncomeTaxesPaidNet_638447470336022358" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet_638447470336022358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SupplementalCashFlowElementsAbstract_638447470336012356" xlink:to="us-gaap_InterestPaidNet_638447470336022358" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureNatureOfBusiness" xlink:type="extended" xlink:title="10101 - Disclosure - Nature of Business" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_638447470336022358" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_638447470336022358" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies" xlink:type="extended" xlink:title="10201 - Disclosure - Summary of Significant Accounting Policies" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SignificantAccountingPoliciesTextBlock" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock_638447470336032370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract_1" xlink:to="us-gaap_SignificantAccountingPoliciesTextBlock_638447470336032370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenue" xlink:type="extended" xlink:title="10301 - Disclosure - Revenue" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_638447470336032370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock_638447470336032370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" xlink:type="extended" xlink:title="10401 - Disclosure - Cash, cash equivalents and restricted cash" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_638447470336032370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTextBlock_638447470336032370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses" xlink:type="extended" xlink:title="10501 - Disclosure - Accounts Receivable and Allowance for Credit Losses" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_638447470336032370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_638447470336032370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNet" xlink:type="extended" xlink:title="10601 - Disclosure - Inventories, net" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock_638447470336032370" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureTextBlock_638447470336032370" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet" xlink:type="extended" xlink:title="10701 - Disclosure - Property, Plant and Equipment, net" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_638447470336042365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_638447470336042365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet" xlink:type="extended" xlink:title="10801 - Disclosure - Assets Manufactured for Internal Use, net" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureTextBlock" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_638447470336042365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:to="acls_AssetsManufacturedForInternalUseDisclosureTextBlock_638447470336042365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeases" xlink:type="extended" xlink:title="10901 - Disclosure - Leases" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseDisclosureTextBlock" xlink:label="acls_LeaseDisclosureTextBlock_638447470336042365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseDisclosureTextBlock_638447470336042365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarranty" xlink:type="extended" xlink:title="11001 - Disclosure - Product Warranty" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_638447470336052359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock_638447470336052359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangements" xlink:type="extended" xlink:title="11101 - Disclosure - Financing Arrangements" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock_638447470336052359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureTextBlock_638447470336052359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans" xlink:type="extended" xlink:title="11201 - Disclosure - Employee Benefit Plans" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_638447470336052359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock_638447470336052359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation" xlink:type="extended" xlink:title="11301 - Disclosure - Stock Award Plans and Stock Based Compensation" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_638447470336062379" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_1" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_638447470336062379" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockholdersEquity" xlink:type="extended" xlink:title="11401 - Disclosure - Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_638447470336062379" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_638447470336062379" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurements" xlink:type="extended" xlink:title="11501 - Disclosure - Fair Value Measurements" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock_638447470336062379" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresTextBlock_638447470336062379" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies" xlink:type="extended" xlink:title="11601 - Disclosure - Commitments and Contingencies" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_638447470336072382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_638447470336072382" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation" xlink:type="extended" xlink:title="11701 - Disclosure - Business Segment and Geographic Region Information" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_638447470336072382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock_638447470336072382" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxes" xlink:type="extended" xlink:title="11801 - Disclosure - Income Taxes" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_638447470336072382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_638447470336072382" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts" xlink:type="extended" xlink:title="11901 - Disclosure - Schedule II Valuation and Qualifying Accounts" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_638447470336082364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies" xlink:type="extended" xlink:title="20202 - Disclosure - Summary of Significant Accounting Policies (Policies)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy" xlink:label="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy_638447470336082364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UseOfEstimates" xlink:label="us-gaap_UseOfEstimates_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_UseOfEstimates_638447470336082364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_638447470336082364" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock_638447470336082364" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_InventoryPolicyTextBlock_638447470336082364" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_638447470336082364" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_638447470336082364" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ConcentrationRiskCreditRisk_638447470336082364" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="us-gaap_RevenueRecognitionPolicyTextBlock_638447470336082364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_RevenueRecognitionPolicyTextBlock_638447470336082364" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock" xlink:label="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock_638447470336092360" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShippingAndHandlingCostsPolicyTextBlock" xlink:label="acls_ShippingAndHandlingCostsPolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="acls_ShippingAndHandlingCostsPolicyTextBlock_638447470336092360" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_638447470336092360" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_IncomeTaxPolicyTextBlock_638447470336092360" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerSharePolicyTextBlock" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_EarningsPerSharePolicyTextBlock_638447470336092360" order="14" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock" xlink:label="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock_638447470336092360" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_638447470336092360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_638447470336092360" order="16" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables" xlink:type="extended" xlink:title="30203 - Disclosure - Summary of Significant Accounting Policies (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock" xlink:label="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock_638447470336102359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_638447470336102359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_638447470336102359" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueTables" xlink:type="extended" xlink:title="30303 - Disclosure - Revenue (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_638447470336102359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_638447470336102359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_638447470336102359" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" xlink:type="extended" xlink:title="30403 - Disclosure - Cash, cash equivalents and restricted cash (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_638447470336102359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_638447470336102359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables" xlink:type="extended" xlink:title="30503 - Disclosure - Accounts Receivable and Allowance for Credit Losses (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_638447470336112364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_638447470336112364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock" xlink:label="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock_638447470336112364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock_638447470336112364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetTables" xlink:type="extended" xlink:title="30603 - Disclosure - Inventories, net (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_638447470336112364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_638447470336112364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables" xlink:type="extended" xlink:title="30703 - Disclosure - Property, Plant and Equipment, net (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_638447470336112364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock_638447470336112364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables" xlink:type="extended" xlink:title="30803 - Disclosure - Assets Manufactured for Internal Use, net (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfOtherAssetsTableTextBlock" xlink:label="us-gaap_ScheduleOfOtherAssetsTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:to="us-gaap_ScheduleOfOtherAssetsTableTextBlock_638447470336122365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesTables" xlink:type="extended" xlink:title="30903 - Disclosure - Leases (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseBalanceSheetDisclosureTableTextBlock_638447470336122365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeaseCostTableTextBlock_638447470336122365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_638447470336122365" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseQuantitativeDisclosureTableTextBlock_638447470336122365" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_638447470336122365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseCashFlowInformationDisclosureTableTextBlock_638447470336122365" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyTables" xlink:type="extended" xlink:title="31003 - Disclosure - Product Warranty (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_638447470336132366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_638447470336132366" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables" xlink:type="extended" xlink:title="31203 - Disclosure - Employee Benefit Plans (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock" xlink:label="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_638447470336132366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock_638447470336132366" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables" xlink:type="extended" xlink:title="31303 - Disclosure - Stock Award Plans and Stock Based Compensation (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_638447470336132366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_638447470336132366" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_638447470336132366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_638447470336132366" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_638447470336132366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_638447470336132366" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" xlink:type="extended" xlink:title="31503 - Disclosure - Fair Value Measurements (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_638447470336142476" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_638447470336142476" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables" xlink:type="extended" xlink:title="31703 - Disclosure - Business Segment and Geographic Region Information (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_638447470336142476" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock_638447470336142476" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_638447470336142476" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_638447470336142476" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesTables" xlink:type="extended" xlink:title="31803 - Disclosure - Income Taxes (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock" xlink:label="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_638447470336142476" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock_638447470336142476" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_638447470336152361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_638447470336152361" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_638447470336152361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_638447470336152361" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_638447470336152361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_638447470336152361" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_638447470336152361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_638447470336152361" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails" xlink:type="extended" xlink:title="40201 - Disclosure - Summary of Significant Accounting Policies - Foreign Currency (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized_638447470336152361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossRealized_638447470336152361" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails" xlink:type="extended" xlink:title="40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" xlink:to="srt_CounterpartyNameAxis_638447470336162541" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CounterpartyNameAxis_638447470336162541" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336162541" xlink:to="acls_BeverlyPropertyOwnerLlcMember_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336162541" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336162541" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LandAndBuildingMember" xlink:label="us-gaap_LandAndBuildingMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336162541" xlink:to="us-gaap_LandAndBuildingMember_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336162541" xlink:to="us-gaap_BuildingMember_638447470336162541" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336162541" xlink:to="us-gaap_MachineryAndEquipmentMember_638447470336162541" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" xlink:to="srt_RangeAxis_638447470336162541" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336162541" xlink:to="srt_RangeMember_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638447470336162541" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336162541" xlink:to="srt_MinimumMember_638447470336162541" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336162541" xlink:to="srt_MaximumMember_638447470336172360" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336162541" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_638447470336172360" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336172360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CostOfPropertyRepairsAndMaintenanceCapitalized" xlink:label="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" xlink:to="acls_CostOfPropertyRepairsAndMaintenanceCapitalized_638447470336172360" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetImpairmentChargesAbstract" xlink:label="us-gaap_AssetImpairmentChargesAbstract_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336172360" xlink:to="us-gaap_AssetImpairmentChargesAbstract_638447470336172360" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ImpairmentOfLongLivedAssetsHeldForUse" xlink:label="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse_638447470336172360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetImpairmentChargesAbstract_638447470336172360" xlink:to="us-gaap_ImpairmentOfLongLivedAssetsHeldForUse_638447470336172360" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails" xlink:type="extended" xlink:title="40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_ConcentrationRiskTable_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638447470336182361" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336182361" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336182361" xlink:to="us-gaap_SalesRevenueNetMember_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336182361" xlink:to="us-gaap_AccountsReceivableMember_638447470336182361" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638447470336182361" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_638447470336182361" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_638447470336182361" xlink:to="us-gaap_ConcentrationRiskTypeDomain_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_638447470336182361" xlink:to="us-gaap_CustomerConcentrationRiskMember_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_638447470336182361" xlink:to="us-gaap_CreditConcentrationRiskMember_638447470336182361" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638447470336182361" xlink:to="srt_MajorCustomersAxis_638447470336182361" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis_638447470336182361" xlink:to="srt_NameOfMajorCustomerDomain_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_TenLargestCustomersMember" xlink:label="acls_TenLargestCustomersMember_638447470336182361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638447470336182361" xlink:to="acls_TenLargestCustomersMember_638447470336182361" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638447470336182361" xlink:to="acls_LargestCustomerMember_638447470336192359" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_638447470336182361" xlink:to="acls_SecondLargestCustomerMember_638447470336192359" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_638447470336182361" xlink:to="us-gaap_ConcentrationRiskLineItems_638447470336192359" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_638447470336192359" xlink:to="acls_ConcentrationRiskNumberOfCustomers_638447470336192359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_638447470336192359" xlink:to="us-gaap_ConcentrationRiskPercentage1_638447470336192359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails" xlink:type="extended" xlink:title="40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_StatementTable_638447470336192359" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336192359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336192359" xlink:to="srt_RangeAxis_638447470336192359" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336192359" xlink:to="srt_RangeMember_638447470336202362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336202362" xlink:to="srt_MinimumMember_638447470336202362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336202362" xlink:to="srt_MaximumMember_638447470336202362" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336192359" xlink:to="srt_ProductOrServiceAxis_638447470336202362" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638447470336202362" xlink:to="srt_ProductsAndServicesDomain_638447470336202362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336202362" xlink:to="acls_AfterMarketMember_638447470336202362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336202362" xlink:to="acls_NewSystemsRevenueMember_638447470336202362" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336192359" xlink:to="us-gaap_StatementLineItems_638447470336202362" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ExtendedProductWarrantyPeriod" xlink:label="acls_ExtendedProductWarrantyPeriod_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336202362" xlink:to="acls_ExtendedProductWarrantyPeriod_638447470336202362" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails" xlink:type="extended" xlink:title="40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_638447470336202362" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract_638447470336202362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_638447470336202362" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470336202362" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_638447470336212360" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470336202362" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_638447470336212360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470336202362" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_638447470336212360" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470336202362" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_638447470336212360" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EarningsPerShareDetailAbstract" xlink:label="acls_EarningsPerShareDetailAbstract_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_638447470336202362" xlink:to="acls_EarningsPerShareDetailAbstract_638447470336212360" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EarningsPerShareDetailAbstract_638447470336212360" xlink:to="us-gaap_EarningsPerShareBasic_638447470336212360" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EarningsPerShareDetailAbstract_638447470336212360" xlink:to="us-gaap_EarningsPerShareDiluted_638447470336212360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails" xlink:type="extended" xlink:title="40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638447470336212360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_638447470336212360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638447470336212360" xlink:to="us-gaap_StatementEquityComponentsAxis_638447470336212360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470336212360" xlink:to="us-gaap_EquityComponentDomain_638447470336222364" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638447470336222364" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_638447470336222364" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638447470336222364" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_638447470336222364" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_638447470336212360" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638447470336222364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_638447470336222364" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638447470336222364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638447470336222364" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_638447470336222364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax_638447470336222364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638447470336222364" xlink:to="us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax_638447470336222364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_6384474703362223641" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_638447470336222364" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_6384474703362223641" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTable_638447470336232382" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336232382" xlink:to="srt_ProductOrServiceAxis_638447470336232382" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638447470336232382" xlink:to="srt_ProductsAndServicesDomain_638447470336232382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336232382" xlink:to="acls_NewSystemsRevenueMember_638447470336232382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336232382" xlink:to="acls_AfterMarketMember_638447470336232382" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336232382" xlink:to="srt_RangeAxis_638447470336232382" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336232382" xlink:to="srt_RangeMember_638447470336232382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638447470336232382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336232382" xlink:to="srt_MinimumMember_638447470336232382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336232382" xlink:to="srt_MaximumMember_638447470336242369" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336232382" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="us-gaap_ContractWithCustomerLiability_638447470336242369" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_638447470336242369" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_638447470336242369" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool_638447470336242369" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="acls_PercentageOfPaymentUponInstallation_638447470336242369" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts_638447470336242369" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations" xlink:label="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_638447470336242369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336242369" xlink:to="acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations_638447470336242369" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xlink:type="extended" xlink:title="40302 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTable_638447470336252360" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336252360" xlink:to="srt_ProductOrServiceAxis_638447470336252360" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638447470336252360" xlink:to="srt_ProductsAndServicesDomain_638447470336252360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336252360" xlink:to="acls_NewSystemsRevenueMember_638447470336252360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AfterMarketMember" xlink:label="acls_AfterMarketMember_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336252360" xlink:to="acls_AfterMarketMember_638447470336252360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336252360" xlink:to="srt_StatementGeographicalAxis_638447470336252360" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis_638447470336252360" xlink:to="srt_SegmentGeographicalDomain_638447470336252360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember_638447470336252360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336252360" xlink:to="srt_NorthAmericaMember_638447470336252360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_AsiaPacificMember" xlink:label="srt_AsiaPacificMember_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336252360" xlink:to="srt_AsiaPacificMember_638447470336262392" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336252360" xlink:to="srt_EuropeMember_638447470336262392" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_638447470336252360" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_638447470336262392" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_638447470336262392" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_638447470336262392" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" xlink:type="extended" xlink:title="40303 - Disclosure - Revenue - Deferred revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_638447470336262392" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_638447470336262392" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="acls_ContractWithCustomerLiabilityDeferralOfRevenue_638447470336262392" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_638447470336272376" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_638447470336272376" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:to="us-gaap_StatementTable_638447470336272376" order="1" use="optional" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336272376" xlink:to="us-gaap_LongtermDebtTypeAxis_638447470336272376" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongtermDebtTypeAxis_638447470336272376" xlink:to="us-gaap_LongtermDebtTypeDomain_638447470336272376" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongtermDebtTypeDomain_638447470336272376" xlink:to="us-gaap_RevolvingCreditFacilityMember_638447470336272376" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336272376" xlink:to="srt_CounterpartyNameAxis_638447470336272376" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CounterpartyNameAxis_638447470336272376" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336272376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336272376" xlink:to="acls_BeverlyPropertyOwnerLlcMember_638447470336272376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470336272376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336272376" xlink:to="us-gaap_StatementLineItems_638447470336272376" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_638447470336282371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_638447470336282371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_638447470336282371" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_638447470336282371" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="us-gaap_SecurityDeposit_638447470336282371" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_638447470336282371" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity_638447470336282371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336272376" xlink:to="acls_DepositRelatingToCustomsActivity_638447470336282371" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails" xlink:type="extended" xlink:title="40501 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470336292369" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_638447470336292369" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProvisionForLoanLeaseAndOtherLosses" xlink:label="us-gaap_ProvisionForLoanLeaseAndOtherLosses_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_ProvisionForLoanLeaseAndOtherLosses_638447470336292369" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_6384474703362923691" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_6384474703362923691" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails" xlink:type="extended" xlink:title="40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableGrossCurrent" xlink:label="us-gaap_AccountsReceivableGrossCurrent_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableGrossCurrent_638447470336292369" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_638447470336292369" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_638447470336292369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableNetCurrent_638447470336292369" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Inventories, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract_635454461843844040" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_638447470336302367" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_638447470336302367" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_638447470336302367" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryNet_638447470336302367" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails" xlink:type="extended" xlink:title="40602 - Disclosure - Inventories, net - Additional Information (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryCurrentTable" xlink:label="us-gaap_InventoryCurrentTable_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryCurrentTable_638447470336302367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryCurrentTable_638447470336302367" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336302367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336302367" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_638447470336302367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserveMember" xlink:label="us-gaap_InventoryValuationReserveMember_638447470336302367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain_638447470336302367" xlink:to="us-gaap_InventoryValuationReserveMember_638447470336302367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryLineItems" xlink:label="us-gaap_InventoryLineItems_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryCurrentTable_638447470336302367" xlink:to="us-gaap_InventoryLineItems_638447470336312362" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IncreaseInInventoryReserves" xlink:label="acls_IncreaseInInventoryReserves_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryLineItems_638447470336312362" xlink:to="acls_IncreaseInInventoryReserves_638447470336312362" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_InventoryValuationReserves" xlink:label="us-gaap_InventoryValuationReserves_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryLineItems_638447470336312362" xlink:to="us-gaap_InventoryValuationReserves_638447470336312362" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ChargesRelatedToReflectLowerOfCostOrMarketValue" xlink:label="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryLineItems_638447470336312362" xlink:to="acls_ChargesRelatedToReflectLowerOfCostOrMarketValue_638447470336312362" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment" xlink:label="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryLineItems_638447470336312362" xlink:to="us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment_638447470336312362" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Property, Plant and Equipment, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336312362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336312362" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336312362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336312362" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336312362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LandAndBuildingMember" xlink:label="us-gaap_LandAndBuildingMember_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336312362" xlink:to="us-gaap_LandAndBuildingMember_638447470336312362" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember_638447470336312362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336312362" xlink:to="us-gaap_MachineryAndEquipmentMember_638447470336312362" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336312362" xlink:to="us-gaap_ConstructionInProgressMember_638447470336322365" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336312362" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_638447470336322365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_638447470336322365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_638447470336322365" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336322365" xlink:to="us-gaap_Depreciation_638447470336322365" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:label="acls_AssetsManufacturedForInternalUseDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_AssetsManufacturedForInternalUseDisclosureAbstract" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336322365" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336322365" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336322365" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336322365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336322365" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336322365" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AssetsManufacturedForInternalUseMember" xlink:label="acls_AssetsManufacturedForInternalUseMember_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336322365" xlink:to="acls_AssetsManufacturedForInternalUseMember_638447470336332363" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeAxis" xlink:label="acls_InternalUsedAssetsTypeAxis_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336322365" xlink:to="acls_InternalUsedAssetsTypeAxis_638447470336332363" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_InternalUsedAssetsTypeDomain" xlink:label="acls_InternalUsedAssetsTypeDomain_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_InternalUsedAssetsTypeAxis_638447470336332363" xlink:to="acls_InternalUsedAssetsTypeDomain_638447470336332363" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CompletedInternalUseAssetsMember" xlink:label="acls_CompletedInternalUseAssetsMember_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_InternalUsedAssetsTypeDomain_638447470336332363" xlink:to="acls_CompletedInternalUseAssetsMember_638447470336332363" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AssetUnderConstructionMember" xlink:label="us-gaap_AssetUnderConstructionMember_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_InternalUsedAssetsTypeDomain_638447470336332363" xlink:to="us-gaap_AssetUnderConstructionMember_638447470336332363" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_638447470336322365" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_PropertyPlantAndEquipmentOtherUsefulLife" xlink:label="acls_PropertyPlantAndEquipmentOtherUsefulLife_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" xlink:to="acls_PropertyPlantAndEquipmentOtherUsefulLife_638447470336332363" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOther" xlink:label="us-gaap_PropertyPlantAndEquipmentOther_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" xlink:to="us-gaap_PropertyPlantAndEquipmentOther_638447470336332363" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation_638447470336332363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentOtherNet" xlink:label="us-gaap_PropertyPlantAndEquipmentOtherNet_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" xlink:to="us-gaap_PropertyPlantAndEquipmentOtherNet_638447470336332363" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OtherDepreciationAndAmortization" xlink:label="us-gaap_OtherDepreciationAndAmortization_638447470336332363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems_638447470336332363" xlink:to="us-gaap_OtherDepreciationAndAmortization_638447470336332363" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesDetails" xlink:type="extended" xlink:title="40901 - Disclosure - Leases (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_638447470336342363" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336342363" xlink:to="srt_RangeAxis_638447470336342363" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336342363" xlink:to="srt_RangeMember_638447470336342363" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336342363" xlink:to="srt_MinimumMember_638447470336342363" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336342363" xlink:to="srt_MaximumMember_638447470336342363" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_638447470336342363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336342363" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_638447470336342363" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336342363" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_638447470336352378" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336342363" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_638447470336352378" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xlink:type="extended" xlink:title="40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638447470336352378" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_638447470336352378" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseRightOfUseAsset_638447470336352378" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_638447470336352378" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638447470336352378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent_638447470336352378" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_638447470336352378" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_638447470336362378" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470336362378" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470336362378" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_638447470336362378" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470336362378" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiability_638447470336362378" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseAccumulatedDepreciation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_FinanceLeaseAccumulatedDepreciation_638447470336362378" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_PrepaidRent_638447470336362378" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40903 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_638447470336362378" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_638447470336362378" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336362378" xlink:to="us-gaap_IncomeStatementLocationAxis_638447470336372373" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis_638447470336372373" xlink:to="us-gaap_IncomeStatementLocationDomain_638447470336372373" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProductOrServiceMember" xlink:label="acls_ProductOrServiceMember_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638447470336372373" xlink:to="acls_ProductOrServiceMember_638447470336372373" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638447470336372373" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_638447470336372373" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638447470336372373" xlink:to="us-gaap_SellingAndMarketingExpenseMember_638447470336372373" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_638447470336372373" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember_638447470336372373" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336362378" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_638447470336372373" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336372373" xlink:to="us-gaap_LeaseCostAbstract_638447470336372373" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="us-gaap_OperatingLeaseCost_638447470336372373" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_638447470336372373" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_638447470336372373" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense_638447470336382363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="us-gaap_FinanceLeaseInterestExpense_638447470336382363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost_638447470336382363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="acls_FinanceLeaseCost_638447470336382363" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost_638447470336382363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="us-gaap_LeaseCost_638447470336382363" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost_638447470336382363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_638447470336372373" xlink:to="acls_ShortTermAndVariableLeaseCost_638447470336382363" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_638447470336382363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_638447470336382363" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336382363" xlink:to="srt_RangeAxis_638447470336392385" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336392385" xlink:to="srt_RangeMember_638447470336392385" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336392385" xlink:to="srt_MinimumMember_638447470336392385" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336392385" xlink:to="srt_MaximumMember_638447470336392385" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336382363" xlink:to="srt_CounterpartyNameAxis_638447470336392385" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CounterpartyNameAxis_638447470336392385" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336392385" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336392385" xlink:to="acls_BeverlyPropertyOwnerLlcMember_638447470336392385" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_638447470336382363" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336392385" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336392385" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_638447470336402365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_638447470336402365" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_638447470336402365" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_638447470336402365" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470336402365" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue_638447470336402365" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_638447470336402365" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability_638447470336402365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_638447470336392385" xlink:to="us-gaap_FinanceLeaseLiability_638447470336402365" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336412359" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_638447470336412359" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_638447470336412359" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_638447470336412359" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_638447470336412359" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_638447470336412359" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_638447470336412359" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_638447470336412359" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_638447470336422357" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336412359" xlink:to="us-gaap_OperatingLeaseLiability_638447470336422357" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_638447470336422357" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_638447470336422357" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_638447470336422357" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_638447470336422357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_638447470336422357" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive_638447470336432479" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive_638447470336432479" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_638447470336432479" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_638447470336432479" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_638447470336422357" xlink:to="acls_OperatingAndFinanceLeaseLiability_638447470336432479" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_638447470336392385" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_638447470336442356" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_PrepaidRent_638447470336442356" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_638447470336442356" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1_638447470336442356" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336442356" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_638447470336442356" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_638447470336442356" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_638447470336452357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_638447470336452357" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_638447470336452357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_638447470336452357" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_638447470336452357" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_638447470336432479" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_638447470336452357" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" xlink:type="extended" xlink:title="40905 - Disclosure - Leases - Cash Flow by Lease Type (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeasePayments_638447470336462376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability_638447470336462376" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeasePrincipalPayments_638447470336462376" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_638447470336462376" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Product Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ProductWarrantyPeriod" xlink:label="acls_ProductWarrantyPeriod_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="acls_ProductWarrantyPeriod_638447470336462376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" xlink:to="us-gaap_ProductWarrantyAccrual_638447470336472374" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_638447470336472374" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" xlink:to="us-gaap_ProductWarrantyAccrualPayments_638447470336472374" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_638447470336472374" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_6384474703364723741" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_638447470336462376" xlink:to="us-gaap_ProductWarrantyAccrual_6384474703364723741" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_638447470336472374" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_638447470336472374" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_638447470336472374" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_638447470336472374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_638447470336472374" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_638447470336472374" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_63844747033647237412" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_638447470336472374" xlink:to="us-gaap_ProductWarrantyAccrual_63844747033647237412" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Financing Arrangements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable_638447470336482371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638447470336482371" xlink:to="srt_CounterpartyNameAxis_638447470336482371" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CounterpartyNameAxis_638447470336482371" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336482371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336482371" xlink:to="acls_BeverlyPropertyOwnerLlcMember_638447470336482371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_638447470336482371" xlink:to="acls_SiliconValleyBankMember_638447470336482371" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638447470336482371" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336482371" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_638447470336482371" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336482371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336482371" xlink:to="us-gaap_BuildingMember_638447470336482371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_638447470336482371" xlink:to="acls_SaleAndLeaseBackMember_638447470336482371" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis_638447470336482371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638447470336482371" xlink:to="us-gaap_CreditFacilityAxis_638447470336482371" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityAxis_638447470336482371" xlink:to="us-gaap_CreditFacilityDomain_638447470336492367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityDomain_638447470336492367" xlink:to="us-gaap_RevolvingCreditFacilityMember_638447470336492367" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_638447470336482371" xlink:to="us-gaap_DebtInstrumentLineItems_638447470336492367" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_638447470336492367" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_638447470336492367" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_638447470336492367" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_638447470336492367" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_SecurityDeposit_638447470336492367" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_638447470336492367" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_638447470336492367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_638447470336492367" xlink:to="us-gaap_LettersOfCreditOutstandingAmount_638447470336492367" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanTable" xlink:label="us-gaap_DefinedContributionPlanTable_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_DefinedContributionPlanTable_638447470336502360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanTable_638447470336502360" xlink:to="srt_TitleOfIndividualAxis_638447470336502360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualAxis_638447470336502360" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336502360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_RegularEmployeesMember" xlink:label="acls_RegularEmployeesMember_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336502360" xlink:to="acls_RegularEmployeesMember_638447470336502360" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_HighlyCompensatedEmployeesMember" xlink:label="acls_HighlyCompensatedEmployeesMember_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336502360" xlink:to="acls_HighlyCompensatedEmployeesMember_638447470336502360" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DefinedContributionPlanLineItems" xlink:label="acls_DefinedContributionPlanLineItems_638447470336502360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedContributionPlanTable_638447470336502360" xlink:to="acls_DefinedContributionPlanLineItems_638447470336502360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_DefinedContributionPlanLineItems_638447470336502360" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_638447470336512371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_DefinedContributionPlanLineItems_638447470336502360" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch_638447470336512371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent" xlink:label="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_DefinedContributionPlanLineItems_638447470336502360" xlink:to="us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent_638447470336512371" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedContributionPlanCostRecognized" xlink:label="us-gaap_DefinedContributionPlanCostRecognized_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_DefinedContributionPlanLineItems_638447470336502360" xlink:to="us-gaap_DefinedContributionPlanCostRecognized_638447470336512371" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails" xlink:type="extended" xlink:title="41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_638447470336512371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_638447470336512371" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent_638447470336512371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_638447470336512371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract_638447470336512371" xlink:to="us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent_638447470336512371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DefinedBenefitPlanAdministrationExpenses" xlink:label="us-gaap_DefinedBenefitPlanAdministrationExpenses_638447470336522374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_DefinedBenefitPlanAdministrationExpenses_638447470336522374" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_638447470336522374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="us-gaap_PlanNameAxis_638447470336522374" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_638447470336522374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_638447470336522374" xlink:to="us-gaap_PlanNameDomain_638447470336522374" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EquityIncentivePlan2012Member" xlink:label="acls_EquityIncentivePlan2012Member_638447470336522374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_638447470336522374" xlink:to="acls_EquityIncentivePlan2012Member_638447470336522374" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_638447470336532372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="us-gaap_AwardTypeAxis_638447470336532372" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_638447470336532372" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" xlink:to="us-gaap_EmployeeStockMember_638447470336622375" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_638447470336622375" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" xlink:to="acls_StockOptionAwardsMember_638447470336622375" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RestrictedStockMember" xlink:label="us-gaap_RestrictedStockMember_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_638447470336622375" xlink:to="us-gaap_RestrictedStockMember_638447470336622375" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="us-gaap_StatementEquityComponentsAxis_638447470336622375" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_638447470336622375" xlink:to="us-gaap_EquityComponentDomain_638447470336622375" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_638447470336622375" xlink:to="us-gaap_CommonStockMember_638447470336622375" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualAxis" xlink:label="srt_TitleOfIndividualAxis_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="srt_TitleOfIndividualAxis_638447470336622375" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336622375" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualAxis_638447470336622375" xlink:to="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336622375" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeesMember" xlink:label="acls_EmployeesMember_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336622375" xlink:to="acls_EmployeesMember_638447470336632366" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_NonEmployeeMemberOfBoardOfDirectorMember" xlink:label="acls_NonEmployeeMemberOfBoardOfDirectorMember_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain_638447470336622375" xlink:to="acls_NonEmployeeMemberOfBoardOfDirectorMember_638447470336632366" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="srt_RangeAxis_638447470336632366" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_RangeMember" xlink:label="srt_RangeMember_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_638447470336632366" xlink:to="srt_RangeMember_638447470336632366" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_638447470336632366" xlink:to="srt_MaximumMember_638447470336632366" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_638447470336522374" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized_638447470336632366" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_638447470336632366" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_638447470336632366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_638447470336632366" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_638447470336642361" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested_638447470336642361" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards_638447470336642361" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_638447470336642361" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders_638447470336642361" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan_638447470336642361" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EmployeeStockPurchasePlanAbstract" xlink:label="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary_638447470336652362" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent_638447470336652362" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized_638447470336652362" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_EmployeeStockPurchasePlanAbstract_638447470336642361" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_638447470336652362" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_638447470336652362" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate_638447470336652362" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_638447470336662360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_638447470336662360" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_BenefitOfTaxDeductionsInExcessOfCompensationCost" xlink:label="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_638447470336662360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" xlink:to="acls_BenefitOfTaxDeductionsInExcessOfCompensationCost_638447470336662360" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_638447470336662360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract_638447470336652362" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_638447470336662360" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_638447470336662360" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_638447470336662360" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638447470336672544" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_638447470336672544" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638447470336672544" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_638447470336672544" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638447470336672544" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_638447470336662360" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_638447470336672544" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638447470336672544" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638447470336672544" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_638447470336682365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_638447470336682365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares_638447470336682365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares_638447470336682365" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638447470336682365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_638447470336682365" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638447470336682365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_638447470336682365" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_638447470336682365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_638447470336682365" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber_638447470336692364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_638447470336672544" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber_638447470336692364" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" order="14" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_638447470336692364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_638447470336692364" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_638447470336692364" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_638447470336692364" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_6384474703366923641" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_6384474703366923641" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_638447470336702367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_638447470336702367" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice_638447470336702367" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_638447470336692364" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice_638447470336702367" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_638447470336712530" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_638447470336712530" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_638447470336712530" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_638447470336712530" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2_638447470336712530" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_638447470336712530" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_638447470336712530" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1_638447470336712530" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_638447470336712530" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract_638447470336712530" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1_638447470336712530" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_638447470336722371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_638447470336722371" order="16" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_638447470336722371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_638447470336722371" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue_638447470336722371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_638447470336722371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_638447470336722371" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1_638447470336722371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_638447470336722371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract_638447470336722371" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue_638447470336722371" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638447470336732365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638447470336732365" order="17" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_638447470336732365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638447470336732365" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue_638447470336732365" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_638447470336732365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638447470336732365" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions_638447470336732365" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_638447470336732365" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract_638447470336732365" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_638447470336732365" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" order="18" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638447470336742368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638447470336742368" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638447470336742368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_638447470336742368" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_638447470336742368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_638447470336742368" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_638447470336752366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod_638447470336752366" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638447470336752366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_638447470336742368" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_638447470336752366" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_638447470336632366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" order="19" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638447470336752366" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638447470336752366" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638447470336762363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_638447470336762363" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_638447470336762363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_638447470336762363" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_638447470336762363" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue_638447470336762363" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638447470336772387" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_638447470336752366" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_638447470336772387" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockholdersEquityDetails" xlink:type="extended" xlink:title="41401 - Disclosure - Stockholders' Equity (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized_638447470336782387" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_CommonStockSharesAuthorized_638447470336782387" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding_638447470336782387" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_CommonStockSharesOutstanding_638447470336782387" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract_635627129166575150" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract_635627129166575150" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_638447470336782387" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_638447470336782387" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis_638447470336782387" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_638447470336792384" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain_638447470336792384" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_638447470336792384" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_638447470336792384" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis_638447470336792384" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638447470336792384" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638447470336792384" xlink:to="us-gaap_FairValueInputsLevel1Member_638447470336792384" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_638447470336792384" xlink:to="us-gaap_FairValueInputsLevel2Member_638447470336792384" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" xlink:to="us-gaap_FairValueByAssetClassAxis_638447470336792384" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByAssetClassAxis_638447470336792384" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_638447470336792384" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_638447470336792384" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_638447470336792384" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_638447470336792384" xlink:to="acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_638447470336792384" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_638447470336792384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" xlink:to="us-gaap_FairValueByMeasurementBasisAxis_638447470336792384" order="4" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementBasisAxis_638447470336792384" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_638447470336802369" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember_638447470336802369" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember_638447470336802369" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_638447470336782387" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638447470336802369" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638447470336802369" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_638447470336802369" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638447470336802369" xlink:to="us-gaap_ShortTermInvestments_638447470336802369" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure" xlink:label="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_638447470336802369" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_638447470336802369" xlink:to="acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure_638447470336802369" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails" xlink:type="extended" xlink:title="41601 - Disclosure - Commitments and Contingencies (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_637184140768868621" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_637184140768868621" xlink:to="us-gaap_StatementTable_638447470336812376" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336812376" xlink:to="srt_StatementScenarioAxis_638447470336812376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementScenarioAxis_638447470336812376" xlink:to="srt_ScenarioUnspecifiedDomain_638447470336812376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ScenarioUnspecifiedDomain_638447470336812376" xlink:to="srt_ScenarioForecastMember_638447470336812376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336812376" xlink:to="us-gaap_StatementLineItems_638447470336812376" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract" xlink:label="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336812376" xlink:to="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_638447470336812376" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_LongTermPurchaseCommitmentAmount" xlink:label="us-gaap_LongTermPurchaseCommitmentAmount_638447470336812376" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract_638447470336812376" xlink:to="us-gaap_LongTermPurchaseCommitmentAmount_638447470336812376" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails" xlink:type="extended" xlink:title="41701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_NumberOfReportableSegments_638447470336822381" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails" xlink:type="extended" xlink:title="41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable" xlink:label="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_638447470336822381" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_638447470336822381" xlink:to="srt_ProductOrServiceAxis_638447470336822381" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_638447470336822381" xlink:to="srt_ProductsAndServicesDomain_638447470336822381" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IonImplantationSystemsServicesAndRoyaltiesMember" xlink:label="acls_IonImplantationSystemsServicesAndRoyaltiesMember_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336822381" xlink:to="acls_IonImplantationSystemsServicesAndRoyaltiesMember_638447470336822381" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OtherProductsSystemsServicesAndRoyaltiesMember" xlink:label="acls_OtherProductsSystemsServicesAndRoyaltiesMember_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_638447470336822381" xlink:to="acls_OtherProductsSystemsServicesAndRoyaltiesMember_638447470336822381" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems" xlink:label="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable_638447470336822381" xlink:to="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_638447470336822381" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_638447470336822381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems_638447470336822381" xlink:to="us-gaap_Revenues_638447470336822381" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails" xlink:type="extended" xlink:title="41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" xlink:to="srt_StatementGeographicalAxis_638447470336832882" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis_638447470336832882" xlink:to="srt_SegmentGeographicalDomain_638447470336832882" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2023/country-2023.xsd#country_US" xlink:label="country_US_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336832882" xlink:to="country_US_638447470336832882" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336832882" xlink:to="srt_EuropeMember_638447470336832882" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_AsiaPacificMember" xlink:label="srt_AsiaPacificMember_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336832882" xlink:to="srt_AsiaPacificMember_638447470336832882" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NonUsMember" xlink:label="us-gaap_NonUsMember_638447470336832882" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_638447470336832882" xlink:to="us-gaap_NonUsMember_638447470336832882" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336842382" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_638447470336842382" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336842382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_638447470336842382" xlink:to="us-gaap_SalesRevenueNetMember_638447470336842382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_638447470336842382" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_638447470336842382" xlink:to="us-gaap_ConcentrationRiskTypeDomain_638447470336842382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="us-gaap_GeographicConcentrationRiskMember_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_638447470336842382" xlink:to="us-gaap_GeographicConcentrationRiskMember_638447470336842382" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_638447470336832882" xlink:to="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_638447470336842382" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_638447470336842382" xlink:to="us-gaap_Revenues_638447470336842382" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_638447470336842382" xlink:to="us-gaap_NoncurrentAssets_638447470336842382" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1_638447470336842382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_638447470336842382" xlink:to="us-gaap_ConcentrationRiskPercentage1_638447470336842382" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails" xlink:type="extended" xlink:title="41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_638447470336852372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_638447470336852372" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638447470336852372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_638447470336852372" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_638447470336852372" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638447470336852372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_638447470336852372" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_638447470336852372" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470336852372" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract_638447470336852372" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_638447470336852372" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails" xlink:type="extended" xlink:title="41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_1" xlink:to="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit_638447470336862383" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_638447470336862383" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_638447470336862383" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_638447470336862383" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638447470336862383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_638447470336862383" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_638447470336872408" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_638447470336872408" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation" xlink:label="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation_638447470336872408" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract_638447470336862383" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638447470336872408" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails" xlink:type="extended" xlink:title="41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract" xlink:label="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_2" xlink:to="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_638447470336872408" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_EffectiveIncomeTaxRateContinuingOperations_638447470336872408" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_638447470336882374" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_638447470336882374" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_638447470336882374" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_638447470336882374" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_638447470336882374" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation" xlink:label="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation_638447470336882374" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount" xlink:label="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount_638447470336882374" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_638447470336882374" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationTaxCredits" xlink:label="us-gaap_IncomeTaxReconciliationTaxCredits_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationTaxCredits_638447470336882374" order="10" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_638447470336882374" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_638447470336882374" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount_638447470336882374" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_638447470336892368" order="13" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_638447470336892368" order="14" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract_638447470336872408" xlink:to="us-gaap_IncomeTaxExpenseBenefit_638447470336892368" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails" xlink:type="extended" xlink:title="41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract" xlink:label="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_3" xlink:to="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_638447470336892368" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_638447470336892368" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal_638447470336892368" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_638447470336892368" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign_638447470336892368" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness_638447470336902434" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal" xlink:label="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal_638447470336902434" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment" xlink:label="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment_638447470336902434" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetOperatingLeaseLiabilities" xlink:label="acls_DeferredTaxAssetOperatingLeaseLiabilities_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="acls_DeferredTaxAssetOperatingLeaseLiabilities_638447470336902434" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent" xlink:label="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent_638447470336902434" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsInventory" xlink:label="us-gaap_DeferredTaxAssetsInventory_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsInventory_638447470336902434" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost_638447470336902434" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves" xlink:label="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638447470336902434" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves_638447470336902434" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsDeferredIncome" xlink:label="us-gaap_DeferredTaxAssetsDeferredIncome_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsDeferredIncome_638447470336912384" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts" xlink:label="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts_638447470336912384" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent" xlink:label="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent_638447470336912384" order="13" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_638447470336912384" order="14" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_638447470336892368" xlink:to="us-gaap_DeferredTaxAssetsGross_638447470336912384" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract_638447470336892368" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" order="2" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_638447470336912384" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesLeasingArrangements" xlink:label="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" xlink:to="us-gaap_DeferredTaxLiabilitiesLeasingArrangements_638447470336912384" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxLiabilitiesOther" xlink:label="us-gaap_DeferredTaxLiabilitiesOther_638447470336912384" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" xlink:to="us-gaap_DeferredTaxLiabilitiesOther_638447470336912384" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_638447470336922423" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_638447470336922423" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_638447470336922423" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_638447470336912384" xlink:to="us-gaap_DeferredTaxAssetsLiabilitiesNet_638447470336922423" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails" xlink:type="extended" xlink:title="41805 - Disclosure - Income Taxes - Unrecognized Tax Benefits (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_635579655659780324" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward" xlink:label="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract_635579655659780324" xlink:to="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_638447470336922423" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefits_638447470336922423" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_638447470336922423" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions_638447470336922423" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities" xlink:label="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities_638447470336932382" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_638447470336932382" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_638447470336932382" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="us-gaap_UnrecognizedTaxBenefits_638447470336932382" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_638447470336932382" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_638447470336932382" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward_638447470336922423" xlink:to="acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance_638447470336932382" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails" xlink:type="extended" xlink:title="41806 - Disclosure - Income Taxes - Additional Information (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsLiabilitiesNet" xlink:label="us-gaap_DeferredTaxAssetsLiabilitiesNet_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_DeferredTaxAssetsLiabilitiesNet_638447470336942386" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost" xlink:label="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost_638447470336942386" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_638447470336942386" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_638447470336942386" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UndistributedEarningsOfForeignSubsidiaries" xlink:label="us-gaap_UndistributedEarningsOfForeignSubsidiaries_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UndistributedEarningsOfForeignSubsidiaries_638447470336942386" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefits_638447470336942386" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability" xlink:label="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability_638447470336942386" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense_638447470336942386" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails" xlink:type="extended" xlink:title="41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsTable" xlink:label="us-gaap_OperatingLossCarryforwardsTable_638447470336942386" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_OperatingLossCarryforwardsTable_638447470336942386" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsTable_638447470336942386" xlink:to="us-gaap_TaxCreditCarryforwardAxis_638447470336952383" order="1" use="optional" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardAxis_638447470336952383" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_638447470336952383" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_ResearchDevelopmentAndOtherTaxCreditMember" xlink:label="acls_ResearchDevelopmentAndOtherTaxCreditMember_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain_638447470336952383" xlink:to="acls_ResearchDevelopmentAndOtherTaxCreditMember_638447470336952383" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsTable_638447470336942386" xlink:to="us-gaap_IncomeTaxAuthorityAxis_638447470336952383" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis_638447470336952383" xlink:to="us-gaap_IncomeTaxAuthorityDomain_638447470336952383" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_FederalMember" xlink:label="acls_FederalMember_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638447470336952383" xlink:to="acls_FederalMember_638447470336952383" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ForeignCountryMember" xlink:label="us-gaap_ForeignCountryMember_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain_638447470336952383" xlink:to="us-gaap_ForeignCountryMember_638447470336952383" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwardsLineItems" xlink:label="us-gaap_OperatingLossCarryforwardsLineItems_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsTable_638447470336942386" xlink:to="us-gaap_OperatingLossCarryforwardsLineItems_638447470336952383" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems_638447470336952383" xlink:to="us-gaap_OperatingLossCarryforwards_638447470336952383" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve" xlink:label="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_638447470336952383" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLossCarryforwardsLineItems_638447470336952383" xlink:to="acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve_638447470336952383" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails" xlink:type="extended" xlink:title="41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="us-gaap_StatementTable_638447470336962371" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336962371" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_638447470336962371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20231231.xsd#acls_AllowanceForDoubtfulAccountsAndReturnsMember" xlink:label="acls_AllowanceForDoubtfulAccountsAndReturnsMember_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain_638447470336962371" xlink:to="acls_AllowanceForDoubtfulAccountsAndReturnsMember_638447470336962371" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain_638447470336962371" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_638447470336962371" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_638447470336962371" xlink:to="us-gaap_StatementLineItems_638447470336962371" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_MovementInValuationAllowancesAndReservesRollForward" xlink:label="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_638447470336962371" xlink:to="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_638447470336962371" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_638447470336962371" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_638447470336972381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_638447470336972381" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_638447470336972381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions_638447470336972381" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_638447470336972381" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInValuationAllowancesAndReservesRollForward_638447470336962371" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_638447470336972381" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="5" />
  </presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158768224">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - USD ($)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Feb. 20, 2024</div></th>
<th class="th"><div>Jun. 30, 2023</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Document and Entity Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">10-K/A<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentAnnualReport', window );">Document Annual Report</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentTransitionReport', window );">Document Transition Report</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Dec. 31,  2023<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">000-30941<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">AXCELIS TECHNOLOGIES INC<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">34-1818596<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">108 Cherry Hill Drive<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Beverly<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">MA<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">01915<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">978<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">787-4000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, $.001 par value<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ACLS<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityWellKnownSeasonedIssuer', window );">Entity Well-known Seasoned Issuer</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityVoluntaryFilers', window );">Entity Voluntary Filers</a></td>
<td class="text">No<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCurrentReportingStatus', window );">Entity Current Reporting Status</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityInteractiveDataCurrent', window );">Entity Interactive Data Current</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFilerCategory', window );">Entity Filer Category</a></td>
<td class="text">Large Accelerated Filer<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntitySmallBusiness', window );">Entity Small Business</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_IcfrAuditorAttestationFlag', window );">ICFR Auditor Attestation Flag</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentFinStmtErrorCorrectionFlag', window );">Document Financial Statement Error Correction [Flag]</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityShellCompany', window );">Entity Shell Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityPublicFloat', window );">Entity Public Float</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5,962,466,683<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCommonStockSharesOutstanding', window );">Entity Common Stock, Shares Outstanding</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">32,625,760<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorName', window );">Auditor Name</a></td>
<td class="text">Ernst & Young LLP<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorFirmId', window );">Auditor Firm ID</a></td>
<td class="text"> 42<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AuditorLocation', window );">Auditor Location</a></td>
<td class="text">Boston, Massachusetts<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CurrentFiscalYearEndDate', window );">Current Fiscal Year End Date</a></td>
<td class="text">--12-31<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentFiscalYearFocus', window );">Document Fiscal Year Focus</a></td>
<td class="text">2023<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentFiscalPeriodFocus', window );">Document Fiscal Period Focus</a></td>
<td class="text">FY<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0001113232<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorFirmId">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>PCAOB issued Audit Firm Identifier</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorFirmId</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:nonemptySequenceNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorLocation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorLocation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AuditorName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AuditorName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:internationalNameItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentAnnualReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as an annual report.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentAnnualReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFinStmtErrorCorrectionFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates whether any of the financial statement period in the filing include a restatement due to error correction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-K<br> -Number 229<br> -Section 402<br> -Subsection w<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFinStmtErrorCorrectionFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentTransitionReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as a transition report.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Forms 10-K, 10-Q, 20-F<br> -Number 240<br> -Section 13<br> -Subsection a-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentTransitionReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCurrentReportingStatus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCurrentReportingStatus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInteractiveDataCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-T<br> -Number 232<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInteractiveDataCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityPublicFloat">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityPublicFloat</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityShellCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityShellCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntitySmallBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates that the company is a Smaller Reporting Company (SRC).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntitySmallBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityVoluntaryFilers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityVoluntaryFilers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityWellKnownSeasonedIssuer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityWellKnownSeasonedIssuer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_IcfrAuditorAttestationFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-K<br> -Number 249<br> -Section 310<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 20-F<br> -Number 249<br> -Section 220<br> -Subsection f<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 40-F<br> -Number 249<br> -Section 240<br> -Subsection f<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_IcfrAuditorAttestationFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159104624">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Operations - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 1,130,604<span></span>
</td>
<td class="nump">$ 919,998<span></span>
</td>
<td class="nump">$ 662,428<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Total cost of revenue</a></td>
<td class="nump">639,303<span></span>
</td>
<td class="nump">518,208<span></span>
</td>
<td class="nump">375,983<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">491,301<span></span>
</td>
<td class="nump">401,790<span></span>
</td>
<td class="nump">286,445<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingExpensesAbstract', window );"><strong>Operating expenses:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research and development</a></td>
<td class="nump">96,907<span></span>
</td>
<td class="nump">78,356<span></span>
</td>
<td class="nump">65,431<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SellingAndMarketingExpense', window );">Sales and marketing</a></td>
<td class="nump">62,805<span></span>
</td>
<td class="nump">53,599<span></span>
</td>
<td class="nump">47,548<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_GeneralAndAdministrativeExpense', window );">General and administrative</a></td>
<td class="nump">65,794<span></span>
</td>
<td class="nump">57,474<span></span>
</td>
<td class="nump">46,141<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingExpenses', window );">Total operating expenses</a></td>
<td class="nump">225,506<span></span>
</td>
<td class="nump">189,429<span></span>
</td>
<td class="nump">159,120<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Income from operations</a></td>
<td class="nump">265,795<span></span>
</td>
<td class="nump">212,361<span></span>
</td>
<td class="nump">127,325<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpenseAbstract', window );"><strong>Other income (expense):</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InvestmentIncomeInterest', window );">Interest income</a></td>
<td class="nump">18,199<span></span>
</td>
<td class="nump">4,551<span></span>
</td>
<td class="nump">209<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestExpense', window );">Interest expense</a></td>
<td class="num">(5,347)<span></span>
</td>
<td class="num">(5,576)<span></span>
</td>
<td class="num">(4,835)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Other, net</a></td>
<td class="num">(48)<span></span>
</td>
<td class="num">(6,451)<span></span>
</td>
<td class="num">(2,271)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpense', window );">Total other income (expense)</a></td>
<td class="nump">12,804<span></span>
</td>
<td class="num">(7,476)<span></span>
</td>
<td class="num">(6,897)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income before income taxes</a></td>
<td class="nump">278,599<span></span>
</td>
<td class="nump">204,885<span></span>
</td>
<td class="nump">120,428<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">32,336<span></span>
</td>
<td class="nump">21,806<span></span>
</td>
<td class="nump">21,778<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="nump">$ 246,263<span></span>
</td>
<td class="nump">$ 183,079<span></span>
</td>
<td class="nump">$ 98,650<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Net income per share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic</a></td>
<td class="nump">$ 7.52<span></span>
</td>
<td class="nump">$ 5.54<span></span>
</td>
<td class="nump">$ 2.94<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted</a></td>
<td class="nump">$ 7.43<span></span>
</td>
<td class="nump">$ 5.46<span></span>
</td>
<td class="nump">$ 2.88<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract', window );"><strong>Shares used in computing net income per share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic weighted average shares of common stock</a></td>
<td class="nump">32,758<span></span>
</td>
<td class="nump">33,043<span></span>
</td>
<td class="nump">33,555<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted weighted average shares of common stock</a></td>
<td class="nump">33,165<span></span>
</td>
<td class="nump">33,542<span></span>
</td>
<td class="nump">34,268<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=us-gaap_ProductMember', window );">Product</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 1,095,650<span></span>
</td>
<td class="nump">$ 890,582<span></span>
</td>
<td class="nump">$ 634,445<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Total cost of revenue</a></td>
<td class="nump">608,112<span></span>
</td>
<td class="nump">492,104<span></span>
</td>
<td class="nump">349,558<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_ServicesMember', window );">Services</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">34,954<span></span>
</td>
<td class="nump">29,416<span></span>
</td>
<td class="nump">27,983<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Total cost of revenue</a></td>
<td class="nump">$ 31,191<span></span>
</td>
<td class="nump">$ 26,104<span></span>
</td>
<td class="nump">$ 26,425<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 924<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479941/924-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2(a),(d))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfRevenueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfRevenueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-15<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-7<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 16: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 52<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-52<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-15<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-7<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 15: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 52<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-52<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate total of expenses of managing and administering the affairs of an entity, including affiliates of the reporting entity, which are not directly or indirectly associated with the manufacture, sale or creation of a product or product line.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(2)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GeneralAndAdministrativeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 17: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 19: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1,2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(11))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 25<br> -Paragraph 1<br> -SubTopic 20<br> -Topic 940<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481913/940-20-25-1<br><br>Reference 9: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-8<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-9<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-10<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -SubTopic 20<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482659/740-20-45-2<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -SubTopic 10<br> -Topic 235<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-10<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 3<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483581/946-220-45-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(3))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482925/835-30-45-3<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.9)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (210.5-03(11))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 835<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483013/835-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentIncomeInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentIncomeInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 5<br> -Subparagraph (SAB Topic 6.B)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-5<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-11<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate amount of income or expense from ancillary business-related activities (that is to say, excluding major activities considered part of the normal operations of the business).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NonoperatingIncomeExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpenses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpenses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpensesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpensesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (expense) related to nonoperating activities, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.9)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 730<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482916/730-10-50-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 912<br> -SubTopic 730<br> -Name Accounting Standards Codification<br> -Section 25<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482517/912-730-25-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 985<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481283/985-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Revenues">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Revenues</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingAndMarketingExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate total amount of expenses directly related to the marketing or selling of products or services.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingAndMarketingExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 16<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-16<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=us-gaap_ProductMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=us-gaap_ProductMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_ServicesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_ServicesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159078336">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Comprehensive Income - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Consolidated Statements of Comprehensive Income</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="nump">$ 246,263<span></span>
</td>
<td class="nump">$ 183,079<span></span>
</td>
<td class="nump">$ 98,650<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Other comprehensive income (loss):</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="nump">38<span></span>
</td>
<td class="num">(4,058)<span></span>
</td>
<td class="num">(1,881)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Amortization of actuarial net gain and other adjustments from pension plan, net of tax</a></td>
<td class="nump">84<span></span>
</td>
<td class="nump">325<span></span>
</td>
<td class="nump">211<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax', window );">Total other comprehensive income (loss)</a></td>
<td class="nump">122<span></span>
</td>
<td class="num">(3,733)<span></span>
</td>
<td class="num">(1,670)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Comprehensive income</a></td>
<td class="nump">$ 246,385<span></span>
</td>
<td class="nump">$ 179,346<span></span>
</td>
<td class="nump">$ 96,980<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(24))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(26))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(22))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1A<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1B<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 5<br> -Subparagraph (SAB Topic 6.B)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-5<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-11<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (i-k)<br> -SubTopic 10<br> -Topic 220<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-10A<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-19<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-11<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-19<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 20<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-20<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481674/830-30-50-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 17<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481694/830-30-45-17<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(19))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482765/220-10-50-4<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482765/220-10-50-5<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481694/830-30-45-20<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(21))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1B<br><br>Reference 11: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 15<br> -SubTopic 10<br> -Topic 220<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482739/220-10-55-15<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847156104944">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 167,297<span></span>
</td>
<td class="nump">$ 185,595<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestments', window );">Short-term investments</a></td>
<td class="nump">338,851<span></span>
</td>
<td class="nump">246,571<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Accounts receivable, net</a></td>
<td class="nump">217,964<span></span>
</td>
<td class="nump">169,773<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
<td class="nump">306,482<span></span>
</td>
<td class="nump">242,406<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">49,397<span></span>
</td>
<td class="nump">33,300<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">1,079,991<span></span>
</td>
<td class="nump">877,645<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant and equipment, net</a></td>
<td class="nump">53,971<span></span>
</td>
<td class="nump">39,664<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease assets</a></td>
<td class="nump">30,716<span></span>
</td>
<td class="nump">12,146<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAsset', window );">Finance lease assets, net</a></td>
<td class="nump">16,632<span></span>
</td>
<td class="nump">17,942<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsNoncurrent', window );">Long-term restricted cash</a></td>
<td class="nump">6,654<span></span>
</td>
<td class="nump">752<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxAssetsNet', window );">Deferred income taxes</a></td>
<td class="nump">53,428<span></span>
</td>
<td class="nump">31,701<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other assets</a></td>
<td class="nump">40,575<span></span>
</td>
<td class="nump">33,791<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Assets', window );">Total assets</a></td>
<td class="nump">1,281,967<span></span>
</td>
<td class="nump">1,013,641<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">54,400<span></span>
</td>
<td class="nump">62,346<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Accrued compensation</a></td>
<td class="nump">31,445<span></span>
</td>
<td class="nump">35,540<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Warranty</a></td>
<td class="nump">14,098<span></span>
</td>
<td class="nump">8,299<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes</a></td>
<td class="nump">6,164<span></span>
</td>
<td class="nump">4,304<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityCurrent', window );">Deferred revenue</a></td>
<td class="nump">164,677<span></span>
</td>
<td class="nump">123,471<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Current portion of finance lease obligation</a></td>
<td class="nump">1,511<span></span>
</td>
<td class="nump">1,229<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesCurrent', window );">Other current liabilities</a></td>
<td class="nump">12,834<span></span>
</td>
<td class="nump">12,943<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">285,129<span></span>
</td>
<td class="nump">248,132<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="nump">43,674<span></span>
</td>
<td class="nump">45,185<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityNoncurrent', window );">Long-term deferred revenue</a></td>
<td class="nump">46,208<span></span>
</td>
<td class="nump">31,306<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesNoncurrent', window );">Other long-term liabilities</a></td>
<td class="nump">42,074<span></span>
</td>
<td class="nump">21,762<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">417,085<span></span>
</td>
<td class="nump">346,385<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingencies', window );">Commitments and contingencies (Note 16)</a></td>
<td class="text"> <span></span>
</td>
<td class="text"> <span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityAbstract', window );"><strong>Stockholders' equity:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockValueOutstanding', window );">Common stock, $0.001 par value, 75,000 shares authorized; 32,685 shares issued and outstanding at December 31, 2023; 32,775 shares issued and outstanding at December 31, 2022</a></td>
<td class="nump">33<span></span>
</td>
<td class="nump">33<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapital', window );">Additional paid-in capital</a></td>
<td class="nump">547,189<span></span>
</td>
<td class="nump">550,299<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Retained earnings</a></td>
<td class="nump">319,506<span></span>
</td>
<td class="nump">118,892<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive loss</a></td>
<td class="num">(1,846)<span></span>
</td>
<td class="num">(1,968)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
<td class="nump">864,882<span></span>
</td>
<td class="nump">667,256<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total liabilities and stockholders' equity</a></td>
<td class="nump">$ 1,281,967<span></span>
</td>
<td class="nump">$ 1,013,641<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax, of accumulated increase (decrease) in equity from transaction and other event and circumstance from nonowner source.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-14A<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-14<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapital">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of excess of issue price over par or stated value of stock and from other transaction involving stock or stockholder. Includes, but is not limited to, additional paid-in capital (APIC) for common and preferred stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(18))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapital</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-25<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-12<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(12))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(18))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 13: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 14: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 23: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 26: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(11))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-25<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 11: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 20: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingencies">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(19))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(15))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.17)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.25)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingencies</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValueOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value of all classes of common stock held by shareholders. May be all or portion of the number of common shares authorized. These shares exclude common shares repurchased by the entity and held as treasury shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(16)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValueOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-25<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-12<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(14))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 19: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br><br>Reference 20: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br><br>Reference 21: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 22: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19-26)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(25))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(32))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-25<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-5<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 19: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br><br>Reference 20: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481404/852-10-50-7<br><br>Reference 21: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.21)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of noncurrent assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidExpenseAndOtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 360<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480842/942-360-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as noncurrent. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-8<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -SubTopic 210<br> -Topic 954<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480632/954-210-45-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated undistributed earnings (deficit).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480990/946-20-50-11<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(17))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(3))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShortTermInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShortTermInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of equity (deficit) attributable to parent. Excludes temporary equity and equity attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-12<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(19))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.6-05(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-2<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(6))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(7))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 9: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 11: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 12: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 13: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 14: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480418/310-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847160420992">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets (Parenthetical) - $ / shares<br> shares in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementOfFinancialPositionAbstract', window );"><strong>Consolidated Balance Sheets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.001<span></span>
</td>
<td class="nump">$ 0.001<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, shares authorized</a></td>
<td class="nump">75,000<span></span>
</td>
<td class="nump">75,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">32,685<span></span>
</td>
<td class="nump">32,775<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">32,685<span></span>
</td>
<td class="nump">32,775<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(16)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.6-05(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-2<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(16)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(7))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfFinancialPositionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfFinancialPositionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R6.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158827952">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Statements of Stockholders' Equity - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th"><div>Common Stock</div></th>
<th class="th"><div>Additional Paid-in Capital</div></th>
<th class="th"><div>Accumulated Deficit</div></th>
<th class="th"><div>Accumulated Other Comprehensive Income (Loss)</div></th>
<th class="th"><div>Total</div></th>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2020</a></td>
<td class="nump">33,633<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2020</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">$ 570,102<span></span>
</td>
<td class="num">$ (91,969)<span></span>
</td>
<td class="nump">$ 3,435<span></span>
</td>
<td class="nump">$ 481,602<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">98,650<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">98,650<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,881)<span></span>
</td>
<td class="num">(1,881)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">211<span></span>
</td>
<td class="nump">211<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">396<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,687<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,687<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of stock under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">26<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of stock under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,179<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,179<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">326<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,564)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,564)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,067<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">12,067<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(1,141)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="num">$ (1)<span></span>
</td>
<td class="num">(20,588)<span></span>
</td>
<td class="num">(29,403)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(49,992)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2021</a></td>
<td class="nump">33,240<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2021</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">559,883<span></span>
</td>
<td class="num">(22,722)<span></span>
</td>
<td class="nump">1,765<span></span>
</td>
<td class="nump">538,959<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">183,079<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">183,079<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,058)<span></span>
</td>
<td class="num">(4,058)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">325<span></span>
</td>
<td class="nump">325<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">103<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,247<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,247<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of stock under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">29<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of stock under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,662<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,662<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">291<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(9,907)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(9,907)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,444<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,444<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(888)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(16,030)<span></span>
</td>
<td class="num">(41,465)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(57,495)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2022</a></td>
<td class="nump">32,775<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2022</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">550,299<span></span>
</td>
<td class="nump">118,892<span></span>
</td>
<td class="num">(1,968)<span></span>
</td>
<td class="nump">667,256<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">246,263<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">246,263<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">38<span></span>
</td>
<td class="nump">38<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">84<span></span>
</td>
<td class="nump">84<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">25<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">25<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of stock under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">16<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of stock under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,057<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,057<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">271<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(16,611)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(16,611)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">18,269<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">18,269<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(380)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(6,850)<span></span>
</td>
<td class="num">(45,649)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(52,499)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2023</a></td>
<td class="nump">32,685<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2023</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">$ 547,189<span></span>
</td>
<td class="nump">$ 319,506<span></span>
</td>
<td class="num">$ (1,846)<span></span>
</td>
<td class="nump">$ 864,882<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 35<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480483/718-10-35-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481089/718-20-55-13<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481089/718-20-55-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInStockholdersEquityRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 5<br> -Subparagraph (SAB Topic 6.B)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-5<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-11<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (i-k)<br> -SubTopic 10<br> -Topic 220<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-10A<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-19<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-11<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-19<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 20<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-20<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued which are neither cancelled nor held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period as a result of an employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period related to Restricted Stock Awards, net of any shares forfeited.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Aggregate change in value for stock issued during the period as a result of employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value of stock related to Restricted Stock Awards issued during the period, net of the stock value of such awards forfeited.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Value of stock issued as a result of the exercise of stock options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29-31)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockRepurchasedDuringPeriodShares">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares that have been repurchased during the period and have not been retired and are not held in treasury. Some state laws may govern the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 505<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481004/946-505-50-2<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-03(i)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479886/946-10-S99-3<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockRepurchasedDuringPeriodShares</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockRepurchasedDuringPeriodValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Equity impact of the value of stock that has been repurchased during the period and has not been retired and is not held in treasury. Some state laws may mandate the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 205<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480767/946-205-45-4<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 505<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481004/946-505-50-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockRepurchasedDuringPeriodValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of equity (deficit) attributable to parent. Excludes temporary equity and equity attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-12<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(19))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.6-05(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-2<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(6))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(7))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 8: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 9: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 10: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 11: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 12: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 13: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 14: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480418/310-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>R7.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847157595248">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Cash Flows - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Cash flows from operating activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net income</a></td>
<td class="nump">$ 246,263<span></span>
</td>
<td class="nump">$ 183,079<span></span>
</td>
<td class="nump">$ 98,650<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net income to net cash provided by operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">13,069<span></span>
</td>
<td class="nump">11,607<span></span>
</td>
<td class="nump">10,818<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Deferred income taxes</a></td>
<td class="num">(20,018)<span></span>
</td>
<td class="nump">8,536<span></span>
</td>
<td class="nump">20,257<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Stock-based compensation expense</a></td>
<td class="nump">18,269<span></span>
</td>
<td class="nump">13,444<span></span>
</td>
<td class="nump">12,067<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProvisionForDoubtfulAccounts', window );">Provision for doubtful accounts</a></td>
<td class="nump">1,129<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ProvisionForExcessAndObsoleteInventory', window );">Provision for excess and obsolete inventory</a></td>
<td class="nump">5,211<span></span>
</td>
<td class="nump">4,565<span></span>
</td>
<td class="nump">3,755<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments', window );">Accretion of discounts and premiums on marketable securities</a></td>
<td class="num">(12,077)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionGainLossBeforeTax', window );">Currency loss on foreign denominated transactions</a></td>
<td class="nump">2,252<span></span>
</td>
<td class="nump">5,986<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsReceivable', window );">Accounts receivable</a></td>
<td class="num">(50,755)<span></span>
</td>
<td class="num">(67,270)<span></span>
</td>
<td class="num">(18,146)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
<td class="num">(69,957)<span></span>
</td>
<td class="num">(58,433)<span></span>
</td>
<td class="num">(39,023)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other current assets</a></td>
<td class="num">(16,046)<span></span>
</td>
<td class="num">(6,533)<span></span>
</td>
<td class="num">(3,955)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities', window );">Accounts payable and other current liabilities</a></td>
<td class="num">(8,103)<span></span>
</td>
<td class="nump">31,392<span></span>
</td>
<td class="nump">22,046<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability', window );">Deferred revenue</a></td>
<td class="nump">56,183<span></span>
</td>
<td class="nump">86,366<span></span>
</td>
<td class="nump">45,385<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable', window );">Income taxes</a></td>
<td class="nump">3,786<span></span>
</td>
<td class="nump">3,493<span></span>
</td>
<td class="nump">253<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet', window );">Other assets and liabilities</a></td>
<td class="num">(12,337)<span></span>
</td>
<td class="num">(625)<span></span>
</td>
<td class="num">(1,917)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash provided by operating activities</a></td>
<td class="nump">156,869<span></span>
</td>
<td class="nump">215,607<span></span>
</td>
<td class="nump">150,190<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract', window );"><strong>Cash flows from investing activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Expenditures for property, plant and equipment and capitalized software</a></td>
<td class="num">(20,656)<span></span>
</td>
<td class="num">(10,683)<span></span>
</td>
<td class="num">(8,718)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsToAcquireShortTermInvestments', window );">Purchase of short-term investments</a></td>
<td class="num">(388,809)<span></span>
</td>
<td class="num">(246,571)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments', window );">Maturities of short-term investments</a></td>
<td class="nump">308,607<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash used in investing activities</a></td>
<td class="num">(100,858)<span></span>
</td>
<td class="num">(257,254)<span></span>
</td>
<td class="num">(8,718)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract', window );"><strong>Cash flows from financing activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_NetSettlementOnRestrictedStockGrants', window );">Net settlement on restricted stock grants</a></td>
<td class="num">(16,611)<span></span>
</td>
<td class="num">(9,907)<span></span>
</td>
<td class="num">(6,564)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PaymentsForRepurchaseOfCommonStock', window );">Repurchase of common stock</a></td>
<td class="num">(52,499)<span></span>
</td>
<td class="num">(57,495)<span></span>
</td>
<td class="num">(49,992)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromStockPlans', window );">Proceeds from Employee Stock Purchase Plan purchases</a></td>
<td class="nump">2,057<span></span>
</td>
<td class="nump">1,662<span></span>
</td>
<td class="nump">1,179<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeasePrincipalPayments', window );">Principal payments on finance lease obligation</a></td>
<td class="num">(1,240)<span></span>
</td>
<td class="num">(987)<span></span>
</td>
<td class="num">(763)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Proceeds from exercise of stock options</a></td>
<td class="nump">25<span></span>
</td>
<td class="nump">1,247<span></span>
</td>
<td class="nump">3,687<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash used in financing activities</a></td>
<td class="num">(68,268)<span></span>
</td>
<td class="num">(65,480)<span></span>
</td>
<td class="num">(52,453)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations', window );">Effect of exchange rate changes on cash and cash equivalents</a></td>
<td class="num">(139)<span></span>
</td>
<td class="num">(2,206)<span></span>
</td>
<td class="nump">2,429<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect', window );">Net (decrease) increase in cash, cash equivalents and restricted cash</a></td>
<td class="num">(12,396)<span></span>
</td>
<td class="num">(109,333)<span></span>
</td>
<td class="nump">91,448<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents and restricted cash at beginning of period</a></td>
<td class="nump">186,347<span></span>
</td>
<td class="nump">295,680<span></span>
</td>
<td class="nump">204,232<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents and restricted cash at end of period</a></td>
<td class="nump">173,951<span></span>
</td>
<td class="nump">186,347<span></span>
</td>
<td class="nump">295,680<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowElementsAbstract', window );"><strong>Supplemental disclosure of cash flow information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaidNet', window );">Income taxes</a></td>
<td class="nump">54,217<span></span>
</td>
<td class="nump">10,763<span></span>
</td>
<td class="nump">1,500<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InterestPaidNet', window );">Interest</a></td>
<td class="nump">$ 4,874<span></span>
</td>
<td class="nump">$ 4,992<span></span>
</td>
<td class="nump">$ 5,086<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_NetSettlementOnRestrictedStockGrants">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The net cash inflow or outflow from cash and cash items that are not available for withdrawal or usage.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_NetSettlementOnRestrictedStockGrants</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ProvisionForExcessAndObsoleteInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of provision related to write-down of excess and obsolete inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ProvisionForExcessAndObsoleteInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The sum of the periodic adjustments of the differences between securities' face values and purchase prices that are charged against earnings. This is called accretion if the security was purchased at a discount and amortization if it was purchased at premium. As a noncash item, this element is an adjustment to net income when calculating cash provided by or used in operations using the indirect method.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-8<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -SubTopic 230<br> -Topic 830<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481877/830-230-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 830<br> -SubTopic 230<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481877/830-230-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeasePrincipalPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow for principal payment on finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeasePrincipalPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionGainLossBeforeTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of realized and unrealized gain (loss) from foreign currency transaction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(7))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 35<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482014/830-20-35-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481956/830-20-45-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481926/830-20-50-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 17<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481839/830-10-45-17<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ForeignCurrencyTransactionGainLossBeforeTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 912<br> -SubTopic 310<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482312/912-310-45-11<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in prepaid expenses, and assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPaidNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 17<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-17<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-25<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPaidNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-25<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForRepurchaseOfCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to reacquire common stock during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-15<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForRepurchaseOfCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-13<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquireShortTermInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for securities or other assets acquired, which qualify for treatment as an investing activity and are to be liquidated, if necessary, within the current operating cycle. Includes cash flows from securities classified as trading securities that were acquired for reasons other than sale in the short-term.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-13<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquireShortTermInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from maturities, prepayments, calls and collections of all investments, including securities and other assets, having ready marketability and intended by management to be liquidated, if necessary, within the current operating cycle. Includes cash flows from securities classified as trading securities that were acquired for reasons other than sale in the short-term.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-13<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from exercise of option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-14<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 718<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockPlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow associated with the amount received from the stock plan during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-14<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockPlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-8<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-9<br><br>Reference 8: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-11<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 205<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 3<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480767/946-205-45-3<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483581/946-220-45-7<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(16))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(1)(d))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481231/810-10-45-19<br><br>Reference 16: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482765/220-10-50-6<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 18: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 29: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 30: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 31: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br><br>Reference 32: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 205<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483499/205-20-50-7<br><br>Reference 33: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 4J<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481175/810-10-55-4J<br><br>Reference 34: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 4K<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481175/810-10-55-4K<br><br>Reference 35: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1A<br><br>Reference 36: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-1B<br><br>Reference 37: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-2<br><br>Reference 38: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br><br>Reference 39: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 810<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForDoubtfulAccounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense (reversal of expense) for expected credit loss on accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 326<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479319/326-20-50-13<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForDoubtfulAccounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of noncash expense for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SupplementalCashFlowElementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SupplementalCashFlowElementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>R8.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164612096">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Nature of Business<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Nature of Business</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock', window );">Nature of Business</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;1. Nature of Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis Technologies,&#160;Inc. (&#8220;Axcelis&#8221; or the &#8220;Company&#8221;) was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition to equipment, we provide extensive aftermarket lifecycle products and services, including spare parts, equipment upgrades, maintenance services and customer training.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480424/946-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480424/946-10-50-2<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 810<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//810/tableOfContent<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 205<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//205/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>R9.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158641648">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SignificantAccountingPoliciesTextBlock', window );">Summary of Significant Accounting Policies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;2. Summary of Significant Accounting Policies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in the footnotes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basis of Presentation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying consolidated financial statements include the consolidated accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Events occurring subsequent to December 31, 2023 have been evaluated for potential recognition or disclosure in the consolidated financial statements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Use of Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, the realizable value of accounts receivable and inventories, warranty reserves, valuing stock-based compensation instruments and reserves relating to tax assets and liabilities. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Foreign Currency</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders&#8217; equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the years ended December 31, 2023, 2022, and 2021, we had foreign exchange losses of $0.5 million, $6.6 million, and $2.5 million, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash, Cash Equivalents and Short-term Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market funds, U.S. Government and Agency Securities and deposit accounts. Cash equivalents are carried on the balance sheet at fair market value. Short-term investments are h<span style="background:#ffffff;">ighly liquid investments with original maturities of greater than 90 days but less than one year from date of purchase and are carried on the balance sheet at amortized cost. Our short-term investments consist primarily of U.S. Government and Agency securities and are classified as held-to-maturity based on our positive intent and ability to hold the securities to maturity. Income related to these securities is recorded in interest income in the Consolidated Statements of&#160;Operations</span>.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Inventories are carried at the lower of cost or net realizable value, determined using the first-in, first-out (&#8220;FIFO&#8221;) method. We periodically review our inventories and make provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or net realizable value. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record a provision for estimated excess inventory. The provision is determined using management&#8217;s assumptions of materials usage, based on estimates of demand, market conditions, and the size and utilization of our installed base. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property, Plant and Equipment and Leased Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Property, plant and equipment are stated at cost, less accumulated depreciation and amortization.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility. As part of this sale, we also entered into a 22-year lease agreement. We accounted for the sale leaseback transaction as a financing arrangement for financial reporting purposes. We retained the historical costs of the property and the related accumulated depreciation on our financial books within property, plant and equipment and will continue to depreciate the property for financial reporting purposes over the lesser of its remaining useful life or its initial lease term of <span style="-sec-ix-hidden:Hidden_zehA9llnJ0iptBHcvR7uFg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">22 years</span></span>. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Asset&#160;Classification</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Estimated&#160;Useful&#160;Life</b></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land, buildings and equipment (under lease)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Lesser of the lease term or estimated useful life of the asset</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">3 to 10 years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Repairs and maintenance costs are expensed as incurred. Expenditures greater than $2.5 thousand for renewals and betterments are capitalized and depreciated over their useful lives.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(g)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is assessed by a comparison of the assets&#8217; carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We did not have any indicators of impairment during the period ending December 31, 2023. We did not record an impairment charge in the years ended December 31, 2023, 2022, or 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Actual performance could be materially different from our current forecasts, which could impact estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in our relationships with significant customers. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;"> (h)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Financial instruments that potentially subject us to concentrations of credit risk are principally cash equivalents, short-term investments and accounts receivable. Our cash equivalents and short-term investments are principally maintained in investment grade money-market funds, U.S. Government and Agency Securities and deposit accounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have no significant off-balance-sheet risk such as currency exchange contracts, option contracts or other hedging arrangements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our exposure to market risk for changes in interest rates relates primarily to cash equivalents and short-term investments. The primary objective of our investment activities is to preserve principal without significantly increasing risk. This is accomplished by investing in marketable investment grade securities. We do not use derivative financial instruments to manage our investment portfolio and do not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We perform ongoing credit evaluations of our customers&#8217; financial condition and generally require no collateral to secure accounts receivable. For selected overseas sales, we require customers to obtain letters of credit before product is shipped. We maintain an allowance for doubtful accounts based on our assessment of the collectability of accounts receivable. We review the allowance for doubtful accounts quarterly. We do not have any off-balance sheet credit exposure related to our customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our customers consist of semiconductor chip manufacturers located throughout the world and net sales to our ten largest customers accounted for 51.7%, 59.4% and 69.5% of revenue in 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the year ended December 31, 2023, we had no customers representing 10% or greater of total revenue. For the year ended December 31, 2022, we had two customers representing 13.1% and 11.5% of total revenue, respectively. For the year ended December 31, 2021, we had two customers representing 17.8% and 15.4% of total revenue, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had one customer account for 12.2% of consolidated accounts receivable. As of December 31, 2022, we had two customers account for 19.4% and 11.5% of consolidated accounts receivable, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Some of the components and sub-assemblies included in our products are obtained either from a sole source or a limited group of suppliers. Disruption to our supply source, resulting either from economic conditions or other factors, could affect our ability to deliver products to our customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(i)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue Recognition</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognize revenue in accordance with Accounting Standards Codification (&#8220;ASC&#8221;) Topic 606, <i style="font-style:italic;">Revenue from Contracts with Customers </i>or (&#8220;ASC 606&#8221;). Under ASC 606, revenue is recognized when a customer obtains control of promised goods or services in an amount that reflects the consideration we expect to receive in exchange for those goods or services. We measure revenue based on the consideration specified in the customer arrangement, and revenue is recognized when the performance obligations in the customer arrangement are satisfied. A performance obligation is a promise in a contract to transfer a distinct product or service to the customer. The transaction price of a contract is allocated to each distinct performance obligation based upon the relative standalone selling price for each performance obligation and recognized as revenue when, or as, the customer receives the benefit of the performance obligation. To account for and measure revenue, we apply the following five steps:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the contract with the customer</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A contract with a customer exists when (i) we enter into an enforceable contract with a customer that defines each party&#8217;s rights regarding the goods or services to be transferred and identifies the related payment terms, (ii) the contract has commercial substance, and (iii) we determine that collection of substantially all consideration for goods and services that are transferred is probable based on the customer&#8217;s intent and ability to pay the promised consideration. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Performance obligations promised in a contract are identified based on the goods and services that will be transferred to the customer that are both capable of being distinct, whereby the customer can benefit from the good or service either on its own or together with other available resources, and are distinct in the context of the contract, whereby the transfer of the good or service is separately identifiable from other promises in the contract. To the extent a contract includes multiple promised goods and services, we must apply judgment to determine whether promised goods and services </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">are capable of being distinct and distinct in the context of the contract. If these criteria are not met, the promised goods and services are accounted for as a combined performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Systems sales consist of multiple performance obligations, including the system itself and obligations that are not delivered simultaneously with the system. These undelivered obligations might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The Aftermarket business includes both products and services type arrangements. Performance obligations in these contracts consist of used tools, spare parts, equipment upgrades, maintenance services and customer training. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Customers who purchase new systems are provided an assurance-type warranty for one year after acceptance of the tool. For aftermarket transactions, we provide customers an assurance-type warranty for 90 days. Customers can choose to purchase extended warranty terms with enhanced support similar to a service-type warranty ranging from <span style="-sec-ix-hidden:Hidden_tZFax8B4REGrwjj6O781Dw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span> to three years<span style="white-space:pre-wrap;">. In accordance with ASC 606, assurance-type warranties are not considered a performance obligation, whereas service-type warranties are.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Determine the transaction price </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price is determined based on the consideration to which we will be entitled in exchange for transferring goods and services to the customer. To the extent the transaction price includes variable consideration, we estimate the amount of variable consideration that should be included in the transaction price utilizing either the expected value method or the most likely amount method depending on the nature of the variable consideration. Variable consideration is included in the transaction price if, in our judgment, it is probable that a significant future reversal of cumulative revenue under the contract will not occur. Any estimates, including the effect of the constraint on variable consideration, are evaluated at each reporting period for any changes. In applying this guidance, Companies must also consider whether any significant financing components exist. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price for all transactions is based on the price reflected in the individual customer&#8217;s purchase order. Variable consideration has not been identified as a significant component of the transaction price for any of our transactions. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those transactions where all performance obligations will be satisfied within one year or less, we apply the practical expedient outlined in ASC 606-10-32-18. This practical expedient allows us not to adjust promised consideration for the effects of a significant financing component if we expect at contract inception that the period between when we transfer the promised good or service to a customer and when the customer pays for that good or service will be one year or less. For those transactions that are expected to be completed after one year, we have assessed that there are no significant financing components because any difference between the promised consideration and the cash selling price of the good or service is for reasons other than the provision of financing. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Allocate the transaction price to performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">If the contract contains a single performance obligation, the entire transaction price is allocated to the single performance obligation. Contracts that contain multiple performance obligations require an allocation of the transaction price to each performance obligation on a relative standalone selling price basis unless the transaction price is variable and meets the criteria to be allocated entirely to a performance obligation or to a distinct service that forms part of a single performance obligation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Where required, we determine standalone selling price (&#8220;SSP&#8221;) for each obligation based on consideration of both market and Company specific factors, including the selling price and profit margin for similar products, the cost to produce, and the anticipated margin.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those contracts that contain multiple performance obligations (primarily systems sales, as well as some aftermarket contracts requiring both time and material inputs), we must determine the SSP. We use a cost plus margin approach in determining the SSP for any materials related performance obligations (such as upgrades, spare parts, systems). To determine the SSP for labor related performance obligations (such as the labor component of installation), we use </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">directly observable inputs based on the standalone sale prices for these services. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Recognize revenue when or as we have satisfied a performance obligation </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We satisfy performance obligations either over time or at a point in time. Revenue is recognized over time if either 1) the customer simultaneously receives and consumes the benefits provided by the entity&#8217;s performance, 2) the entity&#8217;s performance creates or enhances an asset that the customer controls as the asset is created or enhanced, or 3) the entity&#8217;s performance does not create an asset with an alternative use to the entity and the entity has an enforceable right to payment for performance completed to date. If the entity does not satisfy a performance obligation over time, the related performance obligation is satisfied at a point in time by transferring the control of a promised good or service to a customer. Examples of control are using the asset to produce goods or services, enhance the value of other assets or settle liabilities, and holding or selling the asset. For over time recognition, ASC 606 requires us to select a single revenue recognition method for the performance obligation that faithfully depicts our performance in transferring control of the goods and services. The guidance allows entities to choose between two methods to measure progress toward complete satisfaction of a performance obligation: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Output methods - recognize revenue on the basis of direct measurements of the value to the customer of the goods or services transferred to date relative to the remaining goods or services promised under the contract (e.g., surveys of performance completed to date, appraisals of results achieved, milestones reached, time elapsed, and units produced or units delivered); and </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Input methods - recognize revenue on the basis of the entity&#8217;s efforts or inputs to the satisfaction of a performance obligation (e.g., resources consumed, labor hours expended, costs incurred, or time elapsed) relative to the total expected inputs to the satisfaction of that performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have the right to consideration from a customer in an amount that corresponds directly with the value to the customer of the entity&#8217;s performance completed to date (i.e., certain aftermarket contracts), as such we have elected a practical expedient to recognize revenue in the amount to which the entity has a right to invoice for such services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Product related revenues (whether for systems or aftermarket business) are recognized at a point in time, when they are shipped or delivered, depending on shipping terms.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">For installation services, revenue is recognized at a point in time, once the installation of the tool is complete. The nature of the installation services is such that the customer does not simultaneously receive and consume the benefits provided by the entity&#8217;s performance, nor does performance of installation services create or enhance an asset that the customer controls. Installation services do not create an asset with an alternative use to the entity, and the entity does not have an enforceable right to payment for performance completed to date.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Service-type warranties for any product are recognized over time, as these represent a stand ready obligation to service the product during the warranty period. Progress in the satisfaction of these performance obligations is measured using an input method of time elapsed. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Maintenance and service contracts are recognized over time.  Progress in the satisfaction of these performance obligations is measured using an input method of either time elapsed in the case of fixed period contracts, or labor hours expended, in the case of project-based contracts.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(j)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recognizing Assets related to Recoverable Customer Contract Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;">We recognize an asset related to incremental costs incurred by us to obtain a contract with a customer if we expect to recover those costs. We will recognize an asset from costs incurred to fulfill a contract only if such costs relate directly to a contract with an entity that we can specifically identify, the costs incurred will generate or enhance resources that will be </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">used in satisfying performance obligations in the future, and the costs are expected to be recovered. Any assets recognized related to costs to obtain or fulfill a contract are amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"><span style="white-space:pre-wrap;">In substantially all of our business transactions, we incur incremental costs to obtain contracts with customers, in the form of sales commissions. We maintain a commission program which awards our employees for System sales, aftermarket activity and other individual goals. Under ASC 606, an asset is amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates. However, ASC 606 provides a practical expedient to allow for the recognition of commission expense when incurred if the amortization period of the asset that the entity otherwise would have recognized is one year or less. Based on the nature of our commission agreements, all commissions are expensed as incurred based upon the expectation that the amortization period would be one year or less.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(k)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and Handling Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Shipping and handling costs are included in cost of revenue.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(l)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally recognize compensation expense for all stock-based payments to employees and directors, including grants of stock options and restricted stock units, based on the grant-date fair value of those stock-based payments. For stock option awards, we use the Black-Scholes option pricing model, adjusted for expected forfeitures. Other valuation models may be utilized in the limited circumstances where awards with market-based vesting considerations, such as the price of our common stock, or performance-based awards, are granted. Stock-based compensation expense is recognized ratably over the requisite service period. For each stock option or restricted stock unit grant with vesting based on a combination of time, market or performance conditions, where vesting will occur if either condition is met, the related compensation costs are recognized over the shorter of the explicit service period or the derived service period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note&#160;13 for additional information relating to stock-based compensation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(m)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax basis, and operating loss and tax credit carryforwards.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax basis accounting. We establish a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining our provision for income taxes, our deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. We evaluate the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. We recognize accrued interest related to unrecognized tax benefits as interest expense and penalties within operating expense in the consolidated statements of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note 18 for additional information relating to income taxes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(n)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Computation of Net Income per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of net income per share are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common stockholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 246,263</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 183,079</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 98,650</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,758</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,043</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,555</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Incremental options and RSUs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 407</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 499</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 713</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,165</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,542</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,268</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.43</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.46</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.88</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Diluted weighted average common shares outstanding does not include restricted stock units outstanding to purchase 6,025, 4,929 and 2,554 common equivalent shares for the periods ended December 31, 2023, 2022 and 2021, respectively, as their effect would have been anti-dilutive.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(o)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Accumulated Other Comprehensive Loss</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table presents the changes in accumulated other comprehensive loss, net of tax, by component, for the year ended December 31, 2023:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,994)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,968)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 38</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 122</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,956)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,846)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(p)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recent Accounting Guidance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:14pt 0pt 0pt 0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span><span style="font-size:10pt;">In November 2023 the Financial Accounting Standards Board (&#8220;FASB&#8221;) issued Accounting Standards Update 2023-07, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures</i><span style="font-size:10pt;"> ("ASU 2023-07"). ASU 2023-07 is intended to enhance disclosures for significant segment expenses for all public entities required to report segment information in accordance with ASC Topic 280, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting</i><span style="font-size:10pt;"> ("ASC 280"). ASC 280 requires a public entity to report for each reportable segment a measure of segment profit or loss that its chief operating decision maker (&#8220;CODM&#8221;) uses to assess segment performance and to make decisions about resource allocations. ASU 2023-07 is intended to improve financial reporting by requiring disclosure of incremental segment information on an annual and interim basis for all public entities to enable investors to develop more useful financial analyses. ASU 2023-07 is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024. Early adoption is permitted. A public entity should apply ASU 2023-07 retrospectively to all prior periods presented in the consolidated financial statements. The Company is currently evaluating the impact of </span><i style="font-size:10pt;font-style:italic;">ASU 2023-07</i><span style="font-size:10pt;"> on its future consolidated financial statements and related disclosures.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:14pt 0pt 0pt 0pt;">In December 2023 the FASB issued Accounting Standards Update 2023-09, <i style="font-style:italic;">Income Taxes (Topic 740): Improvements to Income Tax Disclosures </i>("ASU 2023-09")<i style="font-style:italic;">. </i><span style="color:#1d1c1d;">ASU 2023-09 is intended to enhance the transparency and decision usefulness of income tax disclosures. ASU 2023-09 addresses investor requests for enhanced income tax information primarily through changes to the rate reconciliation and income taxes paid information. Early adoption is permitted. A public entity should apply ASU 2023-09 prospectively to all annual periods beginning after December 15, 2024. The Company is currently evaluating the impact of ASU 2023-09 on its future consolidated financial statements and related disclosures</span><span style="color:#1d1c1d;">.</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SignificantAccountingPoliciesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for all significant accounting policies of the reporting entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483426/235-10-50-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 235<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//235/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SignificantAccountingPoliciesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>R10.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847163902016">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerTextBlock', window );">Revenue</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note 3. Revenue</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We design, manufacture and service ion implantation and other processing equipment used in the fabrication of semiconductor chips and sell our products to leading semiconductor chip manufacturers worldwide. We offer a complete line of high energy, high current and medium current implanters for all application requirements. In addition, we provide extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance service and customer training. Our revenue recognition policies are set forth in Section (i) of Note 2, Summary of Significant Accounting Policies. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(a)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Alternative Operational Revenue Categories used by Management</b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">To reflect the organization of our business operations, management reviews revenue in two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#8220;CS&amp;I&#8221; or &#8220;aftermarket.&#8221; </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Below are the revenues by categories used by management for the periods covered in this report:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">883,604 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">692,061 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">454,598 </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 247,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 227,937</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 207,830</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">1,130,604 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">919,998 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">662,428 </p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27.35pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(b)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Economic Factors Affecting our Revenue: Geographic Breakdown of Revenue</b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Global economic conditions have a direct impact on our revenue. We are substantially dependent on sales of our products and services to customers outside of the United States. Adverse economic conditions, political instability, potential adverse tax consequences, regulatory changes and volatility in exchange rates pose a risk that our clients may reduce, postpone or cancel spending for our products and services, which would impact our revenue. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue by geographic markets is determined based upon the location to which our products are shipped and where our services are performed. Revenue in our principal geographic markets is as follows: </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">174,810</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">143,701</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">48,715</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">811,308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">673,752</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">516,105</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">144,486</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">102,545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">97,608</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">662,428</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:27pt;"></td><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">(c)</td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;">Recognition of Deferred Revenue from Contract Liabilities </b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 154,777</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,436</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 185,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 66,349</p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="vertical-align:bottom;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (129,580)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (60,333)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (20,971)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 210,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 154,777</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,436</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments received or amounts invoiced in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had deferred revenue of $210.9&#160;<span style="white-space:pre-wrap;">million. This represents the portion of the transaction price for contracts with customers allocated to the performance obligations that remain unsatisfied or partially unsatisfied.  Short-term deferred revenue of </span>$164.7&#160;million as of December 31, 2023 represents performance obligations that are expected to be satisfied within the next 12 months. This amount relates primarily to prepayments made prior to system delivery as well as to installation and non-standard warranty performance obligations for system sales. Long-term deferred revenue of $46.2&#160;million as of December 31, 2023 relates to prepayments made prior to system delivery as well as to extended warranty performance obligations that we expect to be completed in excess of the next 12 months but within the next 24 months. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The majority of our system transactions have payment terms that are 90% due upon shipment of the tool and 10% due upon installation. Aftermarket transaction payment terms are such that payment is due either within 30 or 60 days of service provided or delivery of parts. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of revenue from contract with customer to transfer good or service and to transfer nonfinancial asset. Includes, but is not limited to, disaggregation of revenue, credit loss recognized from contract with customer, judgment and change in judgment related to contract with customer, and asset recognized from cost incurred to obtain or fulfill contract with customer. Excludes insurance and lease contracts.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-9<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-10<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-15<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-12<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-12<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-12<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-12<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-12<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-13<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Topic 606<br> -Publisher FASB<br> -URI https://asc.fasb.org//606/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R11.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164178448">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashAbstract', window );"><strong>Cash, cash equivalents and restricted cash</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashTextBlock', window );">Cash, cash equivalents and restricted cash</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;4. Cash, cash equivalents and restricted cash </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">167,297 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">185,595 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">6,654 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">752 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">173,951 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">186,347 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had $6.7&#160;million in restricted cash which relates to a $5.9 million cash collateral relating to our lease for our headquarters in Beverly, Massachusetts, a $0.7&#160;million letter of credit relating to workers&#8217; compensation insurance and a $0.1 million deposit relating to customs activity. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>N/A</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of cash, cash equivalents and restricted cash.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>23
<FILENAME>R12.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164527072">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accounts Receivable and Allowance for Credit Losses<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivables and Allowances for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock', window );">Receivables and Allowances for Credit Losses</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;5. Accounts Receivable and Allowance for Credit Losses</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Axcelis maintains an allowance for credit losses, which represents an estimate of expected losses over the remaining contractual life of its receivables considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#8217;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in its receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;">The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect its customers&#8217; ability to pay. These factors may include the customer&#8217;s financial condition, past payment experience, and credit ratings from credit bureaus, as well as the value of the underlying collateral.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">Management performs detailed reviews of its receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowance, while amounts recovered on previously written-off accounts increase the allowance. Changes to the allowance for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;">The following table shows changes of the allowances for credit losses related to trade receivables for the twelve months ended December 31, 2023 and 2022, respectively:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (657)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 460</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of accounts receivable are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80.04%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trade receivables</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 218,424</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 169,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (460)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Trade receivables, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,964</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 169,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//310-10/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>R13.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164655040">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories, net<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureTextBlock', window );">Inventories, net</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;6. Inventories, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of inventories are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:81.19%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 231,200</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 187,313</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 45,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,069</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,909</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Inventories, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 306,482</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 242,406</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for our products or market conditions. We regularly evaluate our ability to realize the value of inventories based on a combination of factors including the following: forecasted sales and the size and utilization of our installed base,<span style="font-size:12pt;"> </span>estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. In 2023, we recorded a decrease of $1.5 million in inventory reserves. At December 31, 2023 and 2022, inventories are stated net of inventory reserves of $5.2&#160;million and $6.7&#160;million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">During the years ended December 31, 2023, 2022 and 2021, we recorded charges to cost of sales of $5.2 million, $4.6 million and $3.8 million, respectively, to adjust inventories to their lower of cost or net realizable value.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have inventory on consignment at customer locations at December 31, 2023 and 2022, of $6.5 million and $6.4 million, respectively.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 330<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//330/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>R14.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164666960">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant and Equipment, net<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant and Equipment, net.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock', window );">Property, Plant and Equipment, net</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;7. Property, Plant and Equipment, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of property, plant and equipment are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82.84%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land and buildings</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,802</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18,001</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,547</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17,055</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,189</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 80,404</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 62,918</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (26,433)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23,254)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Property, plant and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,971</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,664</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation expense was $6.2&#160;million, $5.1&#160;million and $4.2&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 360<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//360/tableOfContent<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -SubTopic 360<br> -Topic 958<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480321/958-360-50-6<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -SubTopic 360<br> -Topic 958<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480321/958-360-50-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -SubTopic 360<br> -Topic 958<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480321/958-360-50-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>R15.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164587056">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Assets Manufactured for Internal Use, net<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_AssetsManufacturedForInternalUseDisclosureAbstract', window );"><strong>Assets Manufactured for Internal Use, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_AssetsManufacturedForInternalUseDisclosureTextBlock', window );">Assets Manufactured for Internal Use, net</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;8. Assets Manufactured for Internal Use, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Assets manufactured for internal use, included in other assets, are depreciated using the straight-line method over their 10 year estimated useful life. Their components are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal use assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 76,273</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 61,603</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 236</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,629</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 76,509</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,232</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (39,588)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33,992)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Assets manufactured for internal use, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">These products are used for research and development, training, and customer demonstration purposes.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation expense was $5.6&#160;million, $5.2&#160;million and $5.3&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_AssetsManufacturedForInternalUseDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_AssetsManufacturedForInternalUseDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_AssetsManufacturedForInternalUseDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of assets manufactured for internal use. This includes details regarding cost, accumulated depreciation and uses of the assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_AssetsManufacturedForInternalUseDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>R16.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847160229152">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LeaseDisclosureTextBlock', window );">Leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;9. Leases</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have operating leases for manufacturing, office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease in relation to the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. We review all agreements to determine if the agreement contains a lease component. An agreement contains a lease component if it provides the use of a specific physical space or a specific physical item. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognize operating lease obligations under Accounting Standards Codification - Leases (Topic 842). The guidance in Topic 842 requires recognition of lease assets and related liabilities on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. The value of the right-of-use asset is initially determined based on the net present value of the associated </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">liability, and is adjusted for deferred costs and possible impairments, if any. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more options to renew, with renewal terms that can extend the respective lease term 1 to 3 years. The exercise of lease renewal options is at our sole discretion. For lease extensions that are reasonably certain to occur, we have included the renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements are limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:19.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,716</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,146</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets*</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 16,632</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 17,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,348</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,088</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4WmvFNfdLESy1k-c9Ty0ow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,367</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,511</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,229</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Non-current</b></p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating </p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_wOYBbjMi40W2UbMQy9eAbw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other long-term liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 25,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,931</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance </p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 43,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 45,185</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 75,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 58,712</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:95.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">*Finance lease assets are recorded net of accumulated depreciation of $46.4 million and include $0.6 million of prepaid financing costs as of December 31, 2023. Finance lease assets are recorded net of accumulated depreciation of $45.9 million and include $0.6<span style="white-space:pre-wrap;"> million of prepaid financing costs as of December 31, 2022.  </span><br/><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">All of our office locations support selling and servicing functions. We also have a manufacturing facility in South Korea. Lease expense, depreciation expense relating to finance leased assets and interest expense relating to our finance lease obligation recognized within our consolidated statement of operations for the twelve-month periods ended December </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">31, 2023, 2022 and 2021 are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:25.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Product / services*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,297</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,427</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 587</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 322</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 430</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,526</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,605</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,111</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,065</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 996</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,669</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,340</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, Research and development, Sales and marketing and General and administrative</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,310</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,296</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,306</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,874</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,992</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,184</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,392</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 16,853</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 14,628</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,401</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="11" style="vertical-align:bottom;width:96.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Product / services, sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $2.1 million, $1.8 million and $1.9 million for the years ended December 31, 2023, 2022 2021, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our corporate headquarters, shown below under finance leases, has an original lease term of 22 years. All other locations are treated as operating leases, with lease terms ranging from 1 to 16 years. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,252</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,529</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,781</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,930</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,900</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,008</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,613</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 9,621</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,128</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,530</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,658</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2028</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,251</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,336</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 23,205</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 78,541</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 85,905</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 42,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 128,678</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (40,720)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (12,071)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (52,791)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 45,185</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,702</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 75,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The table above does not include options to renew lease terms that are not reasonably certain of being exercised, nor leases signed but not yet commenced as of December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">11.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">13.1</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">5.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">10.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating section of our statement of cash flows. Our cash flows from our finance lease include an interest and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,669</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,340</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,874</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,992</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 987</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 763</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 26,890</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,670</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of information about leases.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>28
<FILENAME>R17.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164637152">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyDisclosureTextBlock', window );">Product Warranty</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;10. Product Warranty</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally offer a one-year warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The changes in our product warranty liability are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,612</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,893</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,597</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,808</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,230)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4,282)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (236)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,214)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31 (end of period)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14,098</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,299</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,424</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term (within other long-term liabilities)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,659</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,188</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for standard and extended product warranties and other product guarantee contracts, including a tabular reconciliation of the changes in the guarantor's aggregate product warranty liability for the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>29
<FILENAME>R18.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164583472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Financing Arrangements<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtDisclosureTextBlock', window );">Financing Arrangements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;11. Financing Arrangements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility for the sale price of $48.9 million. As part of the sale, we also entered into a 22-year lease agreement with the buyer. The sale leaseback is accounted for as a financing arrangement for financial reporting purposes and, as such, we recorded a financing obligation of $45.2 million as of December 31, 2023, $1.5 million of which is classified within current liabilities. The associated lease payments include both an interest component and payment of principal, with the underlying liability being extinguished at the end of the original lease term. As of December 31, 2023, we had a security deposit of $5.9 million related to this lease.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On April 5, 2023, we terminated the Senior Secured Credit Facilities Credit Agreement, as amended (the &#8220;Credit Agreement&#8221;), with Silicon Valley Bank that we entered into on July 31, 2020. The Credit Agreement provided for a revolving credit facility covering borrowings and letters of credit in an aggregate principal amount not to exceed $40.0 million. Our obligations under the Credit Agreement were secured by a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. Upon termination, these liens and all other obligations under the credit agreement, were released. A letter of credit issued by Silicon Valley Bank, a division of First Citizens Bank &amp; Trust Company (successor by purchase to the Federal Deposit Insurance Corporation as Receiver for Silicon Valley Bridge Bank, N.A.) as successor to Silicon Valley Bank in the amount of $5.9<span style="white-space:pre-wrap;"> million securing our lease on our corporate headquarters was terminated on December 28, 2023.  The underlying cash collateral held at Silicon Valley Bank was released on December 28, 2023, in conjunction with the letter of credit termination.  A replacement, cash collateralized letter of credit was issued on December 14, 2023 with UBS Bank USA and is classified as long-term restricted cash on our balance sheet at December 31, 2023.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(c))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 470<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//470/tableOfContent<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (g)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1C<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1C<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1C<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1C<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1E<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1E<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1I<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1I<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1I<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>30
<FILENAME>R19.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164583472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Employee Benefit Plans<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CompensationAndRetirementDisclosureAbstract', window );"><strong>Employee Benefit Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock', window );">Employee Benefit Plans</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;12. Employee Benefit Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Defined Contribution Plan</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Long-Term Investment Plan, a defined contribution plan. Eligible employees may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service (&#8220;IRS&#8221;) limitations. Highly compensated employees may contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. In 2023, 2022 and 2021, we provided an employer match of 50% of employees&#8217; pre-tax contributions on the first 6% of eligible compensation. Total related matching contribution expense was $3.4 million, $2.7 million and $2.2 million, for 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Compensation Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We operate in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have recorded an unfunded liability of $3.2 million and $3.5 million at December 31, 2023 and 2022, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other long-term liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,516</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,516</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The expense recorded in connection with these plans was $1.7&#160;million, $1.5&#160;million and $1.5&#160;million during the years ended December 31, 2023, 2022 and 2021, respectively.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CompensationAndRetirementDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CompensationAndRetirementDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for retirement benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 70<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480794/715-70-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 17<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480482/715-20-55-17<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iv)(03)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (q)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (l)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//715/tableOfContent<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (o)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (p)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (r)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480126/715-20-S99-2<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 60<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480266/715-60-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>R20.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164637152">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Award Plans and Stock Based Compensation<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Award Plans and Stock Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock', window );">Stock Award Plans and Stock Based Compensation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;13. Stock Award Plans and Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Equity Incentive Plans</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan (the &#8220;2012 Equity Plan&#8221; or the &#8220;Plan&#8221;), which became effective on May&#160;2, 2012.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2012 Equity Plan, as amended, reserves 9.5&#160;million shares of common stock, $0.001<span style="white-space:pre-wrap;"> par value, for grant and permits the issuance of options, stock appreciation rights, restricted stock, restricted stock units, stock equivalents and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors, and consultants of the Company.  The total number of shares reserved for issuance under the Plan is the sum of </span>7.76 million shares approved by the shareholders, and 1.78 million shares added in accordance with the terms of the Plan as a result of the expiration or forfeiture of awards granted under our prior equity plan. Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) revert back to the Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The term of stock options granted under the Plan is specified in the award agreements. Unless a lesser term is otherwise specified by the Compensation Committee of the Company&#8217;s Board of Directors, option awards under the 2012 Equity Plan will expire seven years from the date of grant. Under the terms of the Plan, the exercise price of a stock option may not be less than the fair market value of a share of the Company&#8217;s common stock on the date of grant. Under the 2012 Equity Plan, fair market value is defined as the last reported sale price of a share of the Company&#8217;s common stock on a national securities exchange as of any applicable date, as long as the Company&#8217;s shares are traded on such exchange.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Stock options granted to employees generally vest over a period of four years, while stock options granted to non-employee members of the Company&#8217;s Board of Directors generally vest over a period of six months and, once vested, are not affected by the director&#8217;s termination of service to the Company. In limited circumstances, the Company may grant stock option awards with market-based vesting conditions, such as the Company&#8217;s common stock price, or other performance conditions. Termination of service by an employee will cause options to cease vesting as of the date of termination, and in most cases, employees will have 90 days after termination to exercise options that were vested as of the termination of employment. In general, retiring employees will have one year after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Restricted stock units granted to employees during 2023 had both service-based vesting provisions and performance-based vesting provisions. Restricted stock units granted to employees generally vest over a service period of four years, while restricted stock units granted to non-employee members of the Company&#8217;s Board of Directors in 2023 vest over a service period of one year. We have granted restricted stock units to executive officers and other senior employees with performance vesting conditions, which may be subject to further service-based vesting terms. Unvested restricted stock unit awards expire upon termination of service to the Company. We settle restricted stock units upon vesting with newly issued common shares. No restricted stock was granted during the three year period ended December 31, 2023. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were 0.8 million shares available for grant under the 2012 Equity Plan. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were three thousand options outstanding and 0.5&#160;million unvested restricted stock units outstanding under the 2012 Stock Plan.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Employee Stock Purchase Plan</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2020 Employee Stock Purchase Plan (the &#8220;2020 ESPP&#8221;) provides our employees an opportunity to purchase common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to 10% of the employee&#8217;s salary as elected by the participant, subject to certain caps set forth in the 2020 ESPP. Employees may purchase the Company&#8217;s common stock at 85% of its market price on the day the stock is purchased.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2020 ESPP is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense over each offering period of six months. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Compensation expense relating to the 2020 ESPP was approximately $0.4 million, $0.3 million, and $0.2 million for the years ended December 31, 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, there were approximately 0.9 million shares reserved for issuance and available for purchase under the 2020 ESPP, with 9,965 shares purchased on that date to be issued pending settlement. Less than 0.1 million shares were purchased under the 2020 ESPP for each of the years ended December 31, 2023, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Valuation of Stock Options and Restricted Stock Units</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the purpose of valuing stock options with service conditions, we use the Black-Scholes option pricing model to calculate the grant-date fair value of an award. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected volatility</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">53.07%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected term</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.71 years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1.22%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected dividend yield</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">0.00%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">There were no stock option awards granted in 2023 and 2022. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The fair value of the Company&#8217;s restricted stock units is calculated based upon the fair market value of the Company&#8217;s stock at the date of grant.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Summary of Stock-based Compensation Expense</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We use the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. We estimate forfeitures at the time of grant and revise them, if necessary, in subsequent periods, if actual forfeitures differ from those estimates. The term &#8220;forfeitures&#8221; is distinct from &#8220;cancellations&#8221; or &#8220;expirations&#8221; and represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of 5% per year was applied to stock-based awards, including executive officer awards, for the years ended December 31, 2023, 2022 and 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the years ended December 31, 2023, 2022 and 2021, we recognized stock-based compensation expense of $18.3 million, $13.4 million and $12.1&#160;million, respectively. We present the expenses related to stock-based compensation in the same expense line items as cash compensation paid to our employees. For the years ended December 31, 2023, 2022 and 2021, we used restricted stock units in our annual equity compensation program. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The benefit of tax deductions in excess of recognized compensation cost is reported in the consolidated statements of cash flows as part of cash flows from operating activities. Axcelis had tax deductions in excess of recognized compensation cost of $10.2 million for the year ended December 31, 2023 which resulted in a tax benefit of $2.2 million. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Stock Option Awards </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table summarizes the stock option activity for the year ended December 31, 2023:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Price</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Term</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(years)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43.33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13.75</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Canceled</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercisable at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Options Vested at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The total intrinsic value, which is defined as the difference between the market price at exercise and the price paid by the employee to exercise the options, for options exercised during the years ended December 31, 2023, 2022 and 2021 was $0.2 million, $5.4&#160;million and $12.8&#160;million, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For both the years ended December 31, 2023 and 2022, 750 stock options vested, respectively. No stock options vested for the year ended December 31, 2021. As of December 31, 2023, there was less than $0.1 million of unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Restricted Stock Units and Restricted Stock</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Restricted stock units represent the Company&#8217;s unfunded and unsecured promise to issue shares of the common stock at a future date, subject to the terms of the Award Agreement issued under the 2012 Equity Incentive Plan. Restricted stock unit awards granted in 2023 included time vested share awards and awards with performance vesting conditions. Restricted stock awards are issued shares of common stock that are subject to forfeiture on terms described in the Award Agreement, and may be granted under the 2012 Equity Incentive Plan. No restricted stock awards were granted, or vested, during the years ended December 31, 2023, 2022 and 2021. The fair value of a restricted stock unit and restricted stock award is charged to expense ratably over the applicable service period. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an incentive in motivating selected employees and directors to achieve long-term corporate objectives.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Changes in the Company&#8217;s non-vested restricted stock units for the year ended December 31, 2023 is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted-Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date&#160;Fair</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares/units</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value&#160;per&#160;Share</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 725</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39.23</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125.11</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (397)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 131.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51.94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:13pt;"><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 538</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 77.22</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The weighted average grant-date fair value of restricted stock units granted for the years ended December 31, 2023, 2022 and 2021 was $125.11, $55.47 and $38.54, respectively. Most restricted stock units provide for net share settlement to cover the employee&#8217;s personal income tax withholding obligations on vesting of the employee&#8217;s restricted stock units. Vesting activity above reflects shares vested before net share settlement. As of December 31, 2023, there was $31.7 million of total forfeiture-adjusted unrecognized compensation cost related to non-vested restricted stock units </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">granted under the 2012 Equity Incentive Plan. That cost is expected to be recognized over a weighted-average period of 2.7&#160;years.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//718/tableOfContent<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (l)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R21.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164585472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Stockholders' Equity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;14. Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We may issue up to 75 million shares of common stock without additional shareholder approval. At December 31, 2023 and 2022, there were 32.7 million and 32.8 million outstanding shares of common stock, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for equity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-13<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-13<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-14<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481062/946-235-50-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481062/946-235-50-2<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 505<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481004/946-505-50-6<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480237/815-40-50-6<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(e)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//505/tableOfContent<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-13<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (g)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-13<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-13<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-14<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 14<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-14<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 16<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-16<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-18<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-18<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 18<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-18<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R22.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164662240">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresTextBlock', window );">Fair Value Measurements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;15. Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Fair Value Hierarchy</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#8217;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="font-style:italic;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;1</i>&#8212;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="font-style:italic;margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;2</i>&#8212;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"><i style="font-style:italic;">Level&#160;3</i>&#8212;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Assets and Liabilities Measured at Fair Value</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our money market funds and short-term investments with maturities of 90 days or less at time of purchase are included in cash and cash equivalents in the consolidated balance sheets. Short-term investments with maturities greater than 90 days but not greater than 365 days are included in short-term investments in the consolidated balance sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth Company&#8217;s assets which are measured at fair value by level within the fair value hierarchy.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 118,278</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 118,278</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 339,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 339,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 111,771</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 136,771</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 245,247</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 245,247</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 357,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 382,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R23.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164621216">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Commitments and Contingencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;16. Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In addition to the finance and operating leases discussed in Note 9, we have purchase commitments and other contingency considerations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Purchase Commitments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have contracts and purchase orders for inventory and other expenditures of $304.1&#160;million at December 31, 2023, approximately $293.8 million are expected to occur in 2024.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Litigation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations. We are, from time to time, a party to litigation that arises in the normal course of our business operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Indemnifications</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for commitments and contingencies.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 440<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482648/440-10-50-4<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 450<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//450/tableOfContent<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 954<br> -SubTopic 440<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480327/954-440-50-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 440<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482648/440-10-50-4<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 440<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//440/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>35
<FILENAME>R24.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847157765840">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment and Geographic Region Information<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Business Segment and Geographic Region Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Business Segment and Geographic Region Information</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;17. Business Segment and Geographic Region Information</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We operate in one business segment, which is the manufacture of capital equipment for the semiconductor chip manufacturing industry. The principal market for semiconductor capital equipment is semiconductor chip manufacturers. Substantially all sales are made directly by us to our customers located in the United States, Europe and Asia Pacific.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our ion implantation systems product line includes high current, medium current and high energy implanters. Other legacy processing products include curing and thermal processing systems. In addition to new equipment, we provide post-sales equipment service and support, including spare parts, equipment upgrades, used equipment, maintenance services and customer training.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Revenue by product lines is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.44786835%;padding-left:0pt;padding-right:0pt;width:100.89%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Ion implantation systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">1,111,278 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 898,132</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 645,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,326</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Total revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 662,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Revenue and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-Lived</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Revenue</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 749,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 86,482</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45,583</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 382</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 335,733</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 90,904</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 634,081</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 66,227</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 38,963</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 212</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 246,954</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 69,903</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 519,408</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,590</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,622</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 191</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,194</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 662,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 66,975</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Long-lived assets consist of property, plant and equipment, net, and assets manufactured for internal use, net. Operations in Asia Pacific consist of manufacturing, sales and service organizations. Operations in Europe consist of sales and service organizations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">International revenue, which includes export sales from U.S. manufacturing facilities to foreign customers and sales by foreign subsidiaries and branches, was $950.4 million (84.1% of total revenue), $776.3&#160;million (84.4% of total revenue) and $613.5&#160;million (92.6% of total revenue) in 2023, 2022 and 2021, respectively. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-15<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//280/tableOfContent<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 26<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-26<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 34<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-34<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-21<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-21<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>36
<FILENAME>R25.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164609200">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;18. Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income before income taxes is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 270,842</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 198,028</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 116,380</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,048</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 278,599</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Provision for income taxes is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 46,871</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,430</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,985</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,716</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,498</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,439</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52,354</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13,270</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,521</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (18,526)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,097</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,521</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (440)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (102)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 406</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,052)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (459)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (670)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,018)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,536</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,336</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,806</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,778</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate of 11.6% is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes at the United States statutory rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 58,506</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,290</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">State income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 387</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,443)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign income tax rate differentials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 329</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 289</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 152</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,718)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,818)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,658)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal revenue code section 162(m) limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,488</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,692</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,481</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit expirations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 784</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,181</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,342</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rate change</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 44</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit generation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,900)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4,764)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,096)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Discrete items, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,161</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 72</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">GILTI inclusion</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 69</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 301</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign-derived intangible income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (24,052)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,526)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 638</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (209)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,336</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,806</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,778</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Significant components of long-term deferred income taxes are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 96</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 291</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Foreign net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 276</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Federal tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,560</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,683</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Property, plant and equipment</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,755</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Operating lease liability</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Accrued compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 242</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 276</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Inventories</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 804</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,613</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Stock compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,790</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,620</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Warranty</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,108</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,993</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferred revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,389</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,501</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Capitalized research and development costs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 38,036</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18,067</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 74,749</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,639</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Valuation allowance</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,963)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,370)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,786</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Intangible assets</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (176)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Right-of-use asset</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (9,155)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,400)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Other</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,203)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,992)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,568)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Deferred taxes, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 31,701</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:3pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">Changes in tax rates and tax laws are accounted for in the period of enactment. Our deferred tax assets and liabilities are measured at the enacted tax rate expected to apply when these temporary differences are expected to be realized or settled. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">At December 31, 2023, we had $53.4 million of net deferred tax assets worldwide relating to capitalized R&amp;D costs and other temporary differences, which are available to reduce income taxes in future years. The increase in our deferred tax assets from the prior year was primarily due to a $20.0 million increase relating to capitalized R&amp;D costs. At December 31, 2023, we maintained a $11.0 million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these attributes. This represents an increase of $2.6 million from the prior year. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At December 31, 2023, we had state net operating loss carryforwards of $0.1 million. State net operating losses will expire between 2024 and 2034. At December 31, 2023, we have foreign net operating loss carryforwards of $0.2 million. The majority of our foreign net operating losses have an unlimited carryforward period.<span style="font-size:12pt;"> </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At December 31, 2023, we had research and development and other tax credit carryforwards of $15.2 million. These carry forwards are subject to an uncertain tax position reserve of $3.0 million. These credits can be used to reduce future federal and state income tax liabilities and expire principally between 2024 and 2035.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;background:#ffffff;margin:0pt;">A provision of the Tax Cuts and Jobs Act (&#8220;TCJA&#8221;) took effect in 2022, creating a significant change to our treatment of research and experimental expenditures. Historically, businesses had the option of deducting R&amp;D expenses in the year incurred or capitalizing and amortizing the costs over five years. The TCJA provision eliminates this option and requires R&amp;D expenses associated with research conducted in the U.S. to be capitalized and amortized over a five-year period. For expenses associated with research outside of the United States, R&amp;D expenses are capitalized and amortized over a 15-year period. The Company has included the tax impact of capitalizing and amortizing these costs over the required periods in their tax provision for the year ended December 31, 2023.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">We consider the undistributed earnings of our foreign subsidiaries as of December 31, 2023 to be indefinitely reinvested and, accordingly, no U.S. income taxes have been provided thereon. As of December 31, 2023, the amount of cash associated with indefinitely reinvested foreign earnings was approximately $11.8 million. We have not, nor do we anticipate the need to, repatriate funds to the United States to satisfy domestic liquidity needs arising in the ordinary course of business, including liquidity needs associated with our domestic debt service requirements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">We and our subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. We and most foreign subsidiaries are subject to income tax examinations by tax authorities for all years dating back to 2009. Our policy is to recognize interest related to unrecognized tax benefits as interest expense and penalties as operating expenses. We believe that we have appropriate support for the income tax positions taken and to be taken on our tax returns and that our accruals for tax liabilities are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;">At December 31, 2023, we had unrecognized tax benefits related to uncertain tax positions of $11.9 million, $8.3 million of which is recorded as a long-term liability, and the remainder of which reduced the Company&#8217;s state deferred tax assets and the offsetting valuation allowance. We recognized $0.5 million in interest and penalty expenses for the year ended December 31, 2023 relating to these uncertain tax positions. These unrecognized tax benefits, if recognized, would reduce the effective tax rate and also reverse associated accrued interest and penalty expenses.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:26.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (271)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (122)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (546)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decreases in unrecognized tax benefits related to settlements with tax authorities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (708)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (472)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,754</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,312</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 935</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 11,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as other long-term liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,344</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,190</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as a decrease in deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,582</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,253</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 11,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480990/946-20-50-13<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//740/tableOfContent<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 14<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-14<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 21<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-21<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 270<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482526/740-270-50-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-17<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.5.Q1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 11.C)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-2<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482603/740-30-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>37
<FILENAME>R26.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164582240">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II Valuation and Qualifying Accounts<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ValuationAndQualifyingAccountsAbstract', window );"><strong>Schedule II-Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock', window );">Schedule II-Valuation and Qualifying Accounts</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Charged&#160;to</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Balance&#160;at</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Beginning&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Costs&#160;and</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">End&#160;of</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Expenses</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deductions</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 657</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 460</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,370</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,196</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 603</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,963</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,689</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,529</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 848</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,370</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts and returns</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,133</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 780</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,224</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,689</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 12<br> -Subsection 09<br> -Publisher SEC<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>srt_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ValuationAndQualifyingAccountsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ValuationAndQualifyingAccountsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>srt_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>38
<FILENAME>R27.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155821088">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Policies)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy', window );">Basis of Presentation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basis of Presentation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying consolidated financial statements include the consolidated accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Events occurring subsequent to December 31, 2023 have been evaluated for potential recognition or disclosure in the consolidated financial statements.</p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Use of Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, the realizable value of accounts receivable and inventories, warranty reserves, valuing stock-based compensation instruments and reserves relating to tax assets and liabilities. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock', window );">Foreign Currency</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Foreign Currency</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders&#8217; equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the Consolidated Statements of Operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the years ended December 31, 2023, 2022, and 2021, we had foreign exchange losses of $0.5 million, $6.6 million, and $2.5 million, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock', window );">Cash, Cash Equivalents and Short-term Investments</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash, Cash Equivalents and Short-term Investments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market funds, U.S. Government and Agency Securities and deposit accounts. Cash equivalents are carried on the balance sheet at fair market value. Short-term investments are h<span style="background:#ffffff;">ighly liquid investments with original maturities of greater than 90 days but less than one year from date of purchase and are carried on the balance sheet at amortized cost. Our short-term investments consist primarily of U.S. Government and Agency securities and are classified as held-to-maturity based on our positive intent and ability to hold the securities to maturity. Income related to these securities is recorded in interest income in the Consolidated Statements of&#160;Operations</span>.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Inventories are carried at the lower of cost or net realizable value, determined using the first-in, first-out (&#8220;FIFO&#8221;) method. We periodically review our inventories and make provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or net realizable value. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record a provision for estimated excess inventory. The provision is determined using management&#8217;s assumptions of materials usage, based on estimates of demand, market conditions, and the size and utilization of our installed base. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.</p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock', window );">Property, Plant and Equipment and Leased Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property, Plant and Equipment and Leased Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Property, plant and equipment are stated at cost, less accumulated depreciation and amortization.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility. As part of this sale, we also entered into a 22-year lease agreement. We accounted for the sale leaseback transaction as a financing arrangement for financial reporting purposes. We retained the historical costs of the property and the related accumulated depreciation on our financial books within property, plant and equipment and will continue to depreciate the property for financial reporting purposes over the lesser of its remaining useful life or its initial lease term of <span style="-sec-ix-hidden:Hidden_zehA9llnJ0iptBHcvR7uFg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">22 years</span></span>. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Asset&#160;Classification</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Estimated&#160;Useful&#160;Life</b></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land, buildings and equipment (under lease)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Lesser of the lease term or estimated useful life of the asset</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">3 to 10 years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Repairs and maintenance costs are expensed as incurred. Expenditures greater than $2.5 thousand for renewals and betterments are capitalized and depreciated over their useful lives.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock', window );">Impairment of Long-Lived Assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(g)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is assessed by a comparison of the assets&#8217; carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We did not have any indicators of impairment during the period ending December 31, 2023. We did not record an impairment charge in the years ended December 31, 2023, 2022, or 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Actual performance could be materially different from our current forecasts, which could impact estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in our relationships with significant customers. </p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentration of Risk and Off-Balance Sheet Risk</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;"> (h)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Financial instruments that potentially subject us to concentrations of credit risk are principally cash equivalents, short-term investments and accounts receivable. Our cash equivalents and short-term investments are principally maintained in investment grade money-market funds, U.S. Government and Agency Securities and deposit accounts.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have no significant off-balance-sheet risk such as currency exchange contracts, option contracts or other hedging arrangements.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our exposure to market risk for changes in interest rates relates primarily to cash equivalents and short-term investments. The primary objective of our investment activities is to preserve principal without significantly increasing risk. This is accomplished by investing in marketable investment grade securities. We do not use derivative financial instruments to manage our investment portfolio and do not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We perform ongoing credit evaluations of our customers&#8217; financial condition and generally require no collateral to secure accounts receivable. For selected overseas sales, we require customers to obtain letters of credit before product is shipped. We maintain an allowance for doubtful accounts based on our assessment of the collectability of accounts receivable. We review the allowance for doubtful accounts quarterly. We do not have any off-balance sheet credit exposure related to our customers.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our customers consist of semiconductor chip manufacturers located throughout the world and net sales to our ten largest customers accounted for 51.7%, 59.4% and 69.5% of revenue in 2023, 2022 and 2021, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the year ended December 31, 2023, we had no customers representing 10% or greater of total revenue. For the year ended December 31, 2022, we had two customers representing 13.1% and 11.5% of total revenue, respectively. For the year ended December 31, 2021, we had two customers representing 17.8% and 15.4% of total revenue, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of December 31, 2023, we had one customer account for 12.2% of consolidated accounts receivable. As of December 31, 2022, we had two customers account for 19.4% and 11.5% of consolidated accounts receivable, respectively. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Some of the components and sub-assemblies included in our products are obtained either from a sole source or a limited group of suppliers. Disruption to our supply source, resulting either from economic conditions or other factors, could affect our ability to deliver products to our customers.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueRecognitionPolicyTextBlock', window );">Revenue Recognition</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(i)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue Recognition</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognize revenue in accordance with Accounting Standards Codification (&#8220;ASC&#8221;) Topic 606, <i style="font-style:italic;">Revenue from Contracts with Customers </i>or (&#8220;ASC 606&#8221;). Under ASC 606, revenue is recognized when a customer obtains control of promised goods or services in an amount that reflects the consideration we expect to receive in exchange for those goods or services. We measure revenue based on the consideration specified in the customer arrangement, and revenue is recognized when the performance obligations in the customer arrangement are satisfied. A performance obligation is a promise in a contract to transfer a distinct product or service to the customer. The transaction price of a contract is allocated to each distinct performance obligation based upon the relative standalone selling price for each performance obligation and recognized as revenue when, or as, the customer receives the benefit of the performance obligation. To account for and measure revenue, we apply the following five steps:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">1)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the contract with the customer</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A contract with a customer exists when (i) we enter into an enforceable contract with a customer that defines each party&#8217;s rights regarding the goods or services to be transferred and identifies the related payment terms, (ii) the contract has commercial substance, and (iii) we determine that collection of substantially all consideration for goods and services that are transferred is probable based on the customer&#8217;s intent and ability to pay the promised consideration. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">2)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Identify the performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Performance obligations promised in a contract are identified based on the goods and services that will be transferred to the customer that are both capable of being distinct, whereby the customer can benefit from the good or service either on its own or together with other available resources, and are distinct in the context of the contract, whereby the transfer of the good or service is separately identifiable from other promises in the contract. To the extent a contract includes multiple promised goods and services, we must apply judgment to determine whether promised goods and services </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">are capable of being distinct and distinct in the context of the contract. If these criteria are not met, the promised goods and services are accounted for as a combined performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Systems sales consist of multiple performance obligations, including the system itself and obligations that are not delivered simultaneously with the system. These undelivered obligations might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The Aftermarket business includes both products and services type arrangements. Performance obligations in these contracts consist of used tools, spare parts, equipment upgrades, maintenance services and customer training. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Customers who purchase new systems are provided an assurance-type warranty for one year after acceptance of the tool. For aftermarket transactions, we provide customers an assurance-type warranty for 90 days. Customers can choose to purchase extended warranty terms with enhanced support similar to a service-type warranty ranging from <span style="-sec-ix-hidden:Hidden_tZFax8B4REGrwjj6O781Dw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;">one</span></span> to three years<span style="white-space:pre-wrap;">. In accordance with ASC 606, assurance-type warranties are not considered a performance obligation, whereas service-type warranties are.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">3)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Determine the transaction price </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price is determined based on the consideration to which we will be entitled in exchange for transferring goods and services to the customer. To the extent the transaction price includes variable consideration, we estimate the amount of variable consideration that should be included in the transaction price utilizing either the expected value method or the most likely amount method depending on the nature of the variable consideration. Variable consideration is included in the transaction price if, in our judgment, it is probable that a significant future reversal of cumulative revenue under the contract will not occur. Any estimates, including the effect of the constraint on variable consideration, are evaluated at each reporting period for any changes. In applying this guidance, Companies must also consider whether any significant financing components exist. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The transaction price for all transactions is based on the price reflected in the individual customer&#8217;s purchase order. Variable consideration has not been identified as a significant component of the transaction price for any of our transactions. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those transactions where all performance obligations will be satisfied within one year or less, we apply the practical expedient outlined in ASC 606-10-32-18. This practical expedient allows us not to adjust promised consideration for the effects of a significant financing component if we expect at contract inception that the period between when we transfer the promised good or service to a customer and when the customer pays for that good or service will be one year or less. For those transactions that are expected to be completed after one year, we have assessed that there are no significant financing components because any difference between the promised consideration and the cash selling price of the good or service is for reasons other than the provision of financing. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">4)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Allocate the transaction price to performance obligations in the contract</i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">If the contract contains a single performance obligation, the entire transaction price is allocated to the single performance obligation. Contracts that contain multiple performance obligations require an allocation of the transaction price to each performance obligation on a relative standalone selling price basis unless the transaction price is variable and meets the criteria to be allocated entirely to a performance obligation or to a distinct service that forms part of a single performance obligation. </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Where required, we determine standalone selling price (&#8220;SSP&#8221;) for each obligation based on consideration of both market and Company specific factors, including the selling price and profit margin for similar products, the cost to produce, and the anticipated margin.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For those contracts that contain multiple performance obligations (primarily systems sales, as well as some aftermarket contracts requiring both time and material inputs), we must determine the SSP. We use a cost plus margin approach in determining the SSP for any materials related performance obligations (such as upgrades, spare parts, systems). To determine the SSP for labor related performance obligations (such as the labor component of installation), we use </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">directly observable inputs based on the standalone sale prices for these services. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">5)</td><td style="padding:0pt;"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;">Recognize revenue when or as we have satisfied a performance obligation </i></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We satisfy performance obligations either over time or at a point in time. Revenue is recognized over time if either 1) the customer simultaneously receives and consumes the benefits provided by the entity&#8217;s performance, 2) the entity&#8217;s performance creates or enhances an asset that the customer controls as the asset is created or enhanced, or 3) the entity&#8217;s performance does not create an asset with an alternative use to the entity and the entity has an enforceable right to payment for performance completed to date. If the entity does not satisfy a performance obligation over time, the related performance obligation is satisfied at a point in time by transferring the control of a promised good or service to a customer. Examples of control are using the asset to produce goods or services, enhance the value of other assets or settle liabilities, and holding or selling the asset. For over time recognition, ASC 606 requires us to select a single revenue recognition method for the performance obligation that faithfully depicts our performance in transferring control of the goods and services. The guidance allows entities to choose between two methods to measure progress toward complete satisfaction of a performance obligation: </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Output methods - recognize revenue on the basis of direct measurements of the value to the customer of the goods or services transferred to date relative to the remaining goods or services promised under the contract (e.g., surveys of performance completed to date, appraisals of results achieved, milestones reached, time elapsed, and units produced or units delivered); and </p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Input methods - recognize revenue on the basis of the entity&#8217;s efforts or inputs to the satisfaction of a performance obligation (e.g., resources consumed, labor hours expended, costs incurred, or time elapsed) relative to the total expected inputs to the satisfaction of that performance obligation.</p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"><span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have the right to consideration from a customer in an amount that corresponds directly with the value to the customer of the entity&#8217;s performance completed to date (i.e., certain aftermarket contracts), as such we have elected a practical expedient to recognize revenue in the amount to which the entity has a right to invoice for such services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Product related revenues (whether for systems or aftermarket business) are recognized at a point in time, when they are shipped or delivered, depending on shipping terms.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">For installation services, revenue is recognized at a point in time, once the installation of the tool is complete. The nature of the installation services is such that the customer does not simultaneously receive and consume the benefits provided by the entity&#8217;s performance, nor does performance of installation services create or enhance an asset that the customer controls. Installation services do not create an asset with an alternative use to the entity, and the entity does not have an enforceable right to payment for performance completed to date.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Service-type warranties for any product are recognized over time, as these represent a stand ready obligation to service the product during the warranty period. Progress in the satisfaction of these performance obligations is measured using an input method of time elapsed. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="white-space:pre-wrap;">Maintenance and service contracts are recognized over time.  Progress in the satisfaction of these performance obligations is measured using an input method of either time elapsed in the case of fixed period contracts, or labor hours expended, in the case of project-based contracts.</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock', window );">Recognizing Assets related to Recoverable Customer Contract Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(j)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recognizing Assets related to Recoverable Customer Contract Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;">We recognize an asset related to incremental costs incurred by us to obtain a contract with a customer if we expect to recover those costs. We will recognize an asset from costs incurred to fulfill a contract only if such costs relate directly to a contract with an entity that we can specifically identify, the costs incurred will generate or enhance resources that will be </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">used in satisfying performance obligations in the future, and the costs are expected to be recovered. Any assets recognized related to costs to obtain or fulfill a contract are amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"><span style="white-space:pre-wrap;">In substantially all of our business transactions, we incur incremental costs to obtain contracts with customers, in the form of sales commissions. We maintain a commission program which awards our employees for System sales, aftermarket activity and other individual goals. Under ASC 606, an asset is amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates. However, ASC 606 provides a practical expedient to allow for the recognition of commission expense when incurred if the amortization period of the asset that the entity otherwise would have recognized is one year or less. Based on the nature of our commission agreements, all commissions are expensed as incurred based upon the expectation that the amortization period would be one year or less.  </span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShippingAndHandlingCostsPolicyTextBlock', window );">Shipping and Handling Costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(k)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and Handling Costs</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Shipping and handling costs are included in cost of revenue.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Stock-Based Compensation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(l)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally recognize compensation expense for all stock-based payments to employees and directors, including grants of stock options and restricted stock units, based on the grant-date fair value of those stock-based payments. For stock option awards, we use the Black-Scholes option pricing model, adjusted for expected forfeitures. Other valuation models may be utilized in the limited circumstances where awards with market-based vesting considerations, such as the price of our common stock, or performance-based awards, are granted. Stock-based compensation expense is recognized ratably over the requisite service period. For each stock option or restricted stock unit grant with vesting based on a combination of time, market or performance conditions, where vesting will occur if either condition is met, the related compensation costs are recognized over the shorter of the explicit service period or the derived service period.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note&#160;13 for additional information relating to stock-based compensation.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxPolicyTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(m)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income Taxes</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax basis, and operating loss and tax credit carryforwards.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax basis accounting. We establish a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining our provision for income taxes, our deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. We evaluate the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. We recognize accrued interest related to unrecognized tax benefits as interest expense and penalties within operating expense in the consolidated statements of operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">See Note 18 for additional information relating to income taxes.</p><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerSharePolicyTextBlock', window );">Computation of Net Income per Share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(n)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Computation of Net Income per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of net income per share are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common stockholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 246,263</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 183,079</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 98,650</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,758</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,043</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,555</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Incremental options and RSUs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 407</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 499</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 713</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,165</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,542</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,268</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.43</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.46</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.88</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Diluted weighted average common shares outstanding does not include restricted stock units outstanding to purchase 6,025, 4,929 and 2,554 common equivalent shares for the periods ended December 31, 2023, 2022 and 2021, respectively, as their effect would have been anti-dilutive.</p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock', window );">Accumulated Other Comprehensive Loss</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(o)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Accumulated Other Comprehensive Loss</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table presents the changes in accumulated other comprehensive loss, net of tax, by component, for the year ended December 31, 2023:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,994)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,968)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 38</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 122</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,956)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,846)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Recent Accounting Guidance</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(p)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recent Accounting Guidance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:14pt 0pt 0pt 0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span><span style="font-size:10pt;">In November 2023 the Financial Accounting Standards Board (&#8220;FASB&#8221;) issued Accounting Standards Update 2023-07, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures</i><span style="font-size:10pt;"> ("ASU 2023-07"). ASU 2023-07 is intended to enhance disclosures for significant segment expenses for all public entities required to report segment information in accordance with ASC Topic 280, </span><i style="font-size:10pt;font-style:italic;">Segment Reporting</i><span style="font-size:10pt;"> ("ASC 280"). ASC 280 requires a public entity to report for each reportable segment a measure of segment profit or loss that its chief operating decision maker (&#8220;CODM&#8221;) uses to assess segment performance and to make decisions about resource allocations. ASU 2023-07 is intended to improve financial reporting by requiring disclosure of incremental segment information on an annual and interim basis for all public entities to enable investors to develop more useful financial analyses. ASU 2023-07 is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024. Early adoption is permitted. A public entity should apply ASU 2023-07 retrospectively to all prior periods presented in the consolidated financial statements. The Company is currently evaluating the impact of </span><i style="font-size:10pt;font-style:italic;">ASU 2023-07</i><span style="font-size:10pt;"> on its future consolidated financial statements and related disclosures.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:14pt 0pt 0pt 0pt;">In December 2023 the FASB issued Accounting Standards Update 2023-09, <i style="font-style:italic;">Income Taxes (Topic 740): Improvements to Income Tax Disclosures </i>("ASU 2023-09")<i style="font-style:italic;">. </i><span style="color:#1d1c1d;">ASU 2023-09 is intended to enhance the transparency and decision usefulness of income tax disclosures. ASU 2023-09 addresses investor requests for enhanced income tax information primarily through changes to the rate reconciliation and income taxes paid information. Early adoption is permitted. A public entity should apply ASU 2023-09 prospectively to all annual periods beginning after December 15, 2024. The Company is currently evaluating the impact of ASU 2023-09 on its future consolidated financial statements and related disclosures</span><span style="color:#1d1c1d;">.</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for accumulated other comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for cash and cash equivalents and short term investments, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of recognizing assets related to recoverable customer contract costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShippingAndHandlingCostsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Shipping and Handling Costs.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShippingAndHandlingCostsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskCreditRisk">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for credit risk.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 825<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480981/942-825-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -SubTopic 10<br> -Topic 275<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskCreditRisk</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for subsidiaries or other investments that are consolidated, including the accounting treatment for intercompany accounts or transactions and any noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 810<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481203/810-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerSharePolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for computing basic and diluted earnings or loss per share for each class of common stock and participating security. Addresses all significant policy factors, including any antidilutive items that have been excluded from the computation and takes into account stock dividends, splits and reverse splits that occur after the balance sheet date of the latest reporting period but before the issuance of the financial statements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerSharePolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 830<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//830/tableOfContent<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for recognizing and measuring the impairment of long-lived assets. An entity also may disclose its accounting policy for long-lived assets to be sold. This policy excludes goodwill and intangible assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 360<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.CC)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480091/360-10-S99-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 05<br> -Paragraph 4<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482338/360-10-05-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-03(h)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479886/946-10-S99-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-17<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 25<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-25<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-28<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 19<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-19<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482765/220-10-50-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-20<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483489/210-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483426/235-10-50-4<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 912<br> -SubTopic 330<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482105/912-330-50-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 330<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//330/tableOfContent<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 330<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483080/330-10-50-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 330<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483080/330-10-50-4<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 6<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 270<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482989/270-10-45-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -SubTopic 360<br> -Topic 958<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480321/958-360-50-6<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -SubTopic 360<br> -Topic 958<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480321/958-360-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRecognitionPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for revenue. Includes revenue from contract with customer and from other sources.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483426/235-10-50-4<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (e)<br> -SubTopic 10<br> -Topic 235<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483426/235-10-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRecognitionPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(v)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.C.Q3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479830/718-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.1.Q5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479830/718-10-S99-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.3.Q2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479830/718-10-S99-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.D.2.Q6)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479830/718-10-S99-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -Name Accounting Standards Codification<br> -Publisher FASB<br> -URI https://asc.fasb.org//718/tableOfContent<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UseOfEstimates">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-9<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-4<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 275<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -SubTopic 10<br> -Topic 275<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -SubTopic 10<br> -Topic 275<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-11<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -SubTopic 10<br> -Topic 275<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-12<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UseOfEstimates</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>39
<FILENAME>R28.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158316928">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock', window );">Schedule of estimated useful lives of the related assets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Asset&#160;Classification</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Estimated&#160;Useful&#160;Life</b></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land, buildings and equipment (under lease)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Lesser of the lease term or estimated useful life of the asset</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">3 to 10 years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock', window );">Schedule of components of net income per share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income available to common stockholders</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 246,263</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 183,079</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 98,650</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,758</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,043</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,555</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Incremental options and RSUs</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 407</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 499</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 713</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted average shares of common stock used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,165</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 33,542</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,268</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.52</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7.43</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5.46</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2.88</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock', window );">Schedule of changes in accumulated other comprehensive loss, net of tax</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,994)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,968)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive income and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 38</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 84</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 122</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,956)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 110</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,846)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of useful life of physical assets used in the normal conduct of business and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accumulated other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-14A<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 830<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481674/830-30-50-1<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 830<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481694/830-30-45-20<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>40
<FILENAME>R29.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158316800">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock', window );">Schedule of revenue by discipline</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:46.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:46.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">883,604 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">692,061 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">454,598 </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 247,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 227,937</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 207,830</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">1,130,604 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">919,998 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">662,428 </p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock', window );">Schedule of revenue by geographic markets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:38.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:38.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">174,810</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">143,701</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">48,715</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">811,308</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">673,752</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">516,105</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">144,486</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">102,545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">97,608</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">662,428</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock', window );">Schedule of Contract liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="10" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 154,777</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,436</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 185,688</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 146,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 66,349</p></td></tr><tr><td style="vertical-align:bottom;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="vertical-align:bottom;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (129,580)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (60,333)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (20,971)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 210,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 154,777</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 68,436</p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of receivable, contract asset, and contract liability from contract with customer. Includes, but is not limited to, change in contract asset and contract liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-10<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of revenue from external customers by geographic areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph a<br> -SubTopic 10<br> -Topic 280<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>41
<FILENAME>R30.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164583472">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashAbstract', window );"><strong>Cash, cash equivalents and restricted cash</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashTableTextBlock', window );">Schedule of reconciliation of cash, cash equivalents and restricted cash</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">167,297 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">185,595 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">6,654 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">752 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">173,951 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">186,347 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>N/A</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for cash, cash equivalents and restricted cash.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>42
<FILENAME>R31.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158765168">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accounts Receivable and Allowance for Credit Losses (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivables and Allowances for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock', window );">Schedule of allowances for credit losses related to trade receivables</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:25.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:11.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (657)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr><tr><td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 460</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock', window );">Components of accounts receivable</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80.04%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Trade receivables</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 218,424</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 169,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Allowance for doubtful accounts</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (460)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Trade receivables, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 217,964</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 169,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of allowance for credit loss on accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 326<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479319/326-20-50-13<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the various types of trade accounts and notes receivable and for each the gross carrying value, allowance, and net carrying value as of the balance sheet date. Presentation is categorized by current, noncurrent and unclassified receivables.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.3,4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>43
<FILENAME>R32.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847160234944">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories, net (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock', window );">Schedule of components of inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:81.19%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 231,200</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 187,313</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 45,373</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,069</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,909</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 20,024</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Inventories, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 306,482</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 242,406</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(c))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483489/210-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfInventoryCurrentTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>44
<FILENAME>R33.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164637152">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant and Equipment, net (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentAbstract', window );"><strong>Property, Plant and Equipment, net.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentTextBlock', window );">Schedule of components of property, plant and equipment</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82.84%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Land and buildings</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,802</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18,001</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Machinery and equipment</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 41,547</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 34,728</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 17,055</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,189</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 80,404</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 62,918</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (26,433)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (23,254)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Property, plant and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,971</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,664</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>45
<FILENAME>R34.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164601840">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Assets Manufactured for Internal Use, net (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_AssetsManufacturedForInternalUseDisclosureAbstract', window );"><strong>Assets Manufactured for Internal Use, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfOtherAssetsTableTextBlock', window );">Schedule of components of assets manufactured for internal use</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal use assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 76,273</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 61,603</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Construction in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 236</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,629</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total cost</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 76,509</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 64,232</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Accumulated depreciation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (39,588)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (33,992)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Assets manufactured for internal use, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 30,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_AssetsManufacturedForInternalUseDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_AssetsManufacturedForInternalUseDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfOtherAssetsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amounts of other assets. This disclosure includes other current assets and other noncurrent assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfOtherAssetsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>46
<FILENAME>R35.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158673392">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LeaseBalanceSheetDisclosureTableTextBlock', window );">Schedule of operating and finance lease right-of-use assets and related lease obligations</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:19.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,716</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,146</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets*</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 16,632</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 17,942</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,348</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,088</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating</p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4WmvFNfdLESy1k-c9Ty0ow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other current liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,367</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance</p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,511</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,229</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Non-current</b></p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating </p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_wOYBbjMi40W2UbMQy9eAbw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;">Other long-term liabilities</span></span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 25,724</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,931</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance </p></td><td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 43,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 45,185</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease liabilities</b></p></td><td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 75,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 58,712</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:51.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:19.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:95.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">*Finance lease assets are recorded net of accumulated depreciation of $46.4 million and include $0.6 million of prepaid financing costs as of December 31, 2023. Finance lease assets are recorded net of accumulated depreciation of $45.9 million and include $0.6<span style="white-space:pre-wrap;"> million of prepaid financing costs as of December 31, 2022.  </span><br/><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostTableTextBlock', window );">Schedule of lease costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:25.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Product / services*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,297</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,427</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 587</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 322</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 430</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,674</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,526</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,605</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,111</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,065</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 996</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,669</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,340</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, Research and development, Sales and marketing and General and administrative</p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,310</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,296</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,306</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,874</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,992</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,184</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,392</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 16,853</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 14,628</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,401</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="11" style="vertical-align:bottom;width:96.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Product / services, sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $2.1 million, $1.8 million and $1.9 million for the years ended December 31, 2023, 2022 2021, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock', window );">Schedule of future minimum operating and finance leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,252</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,529</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 12,781</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,930</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,970</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,900</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2026</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,008</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,613</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 9,621</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2027</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,128</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,530</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,658</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2028</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,251</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,336</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 23,205</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 78,541</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 85,905</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 42,773</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 128,678</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (40,720)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (12,071)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (52,791)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 45,185</p></td><td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 30,702</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 75,887</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LeaseQuantitativeDisclosureTableTextBlock', window );">Schedule of weighted-average remaining lease term and discount rates</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">11.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">13.1</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">5.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">10.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LeaseCashFlowInformationDisclosureTableTextBlock', window );">Schedule of cash outflows by lease type</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 10,669</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,340</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,009</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,874</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,992</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,086</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 987</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 763</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 26,890</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,173</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,670</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseBalanceSheetDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease balance sheet.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseBalanceSheetDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseCashFlowInformationDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease cash flow information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseCashFlowInformationDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseQuantitativeDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease quantitative information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseQuantitativeDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of lessee's lease cost. Includes, but is not limited to, interest expense for finance lease, amortization of right-of-use asset for finance lease, operating lease cost, short-term lease cost, variable lease cost and sublease income.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>47
<FILENAME>R36.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164851888">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Schedule of product warranty liability</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,612</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 12,893</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,597</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,808</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,230)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,798)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4,282)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,607</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (236)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,214)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31 (end of period)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 14,098</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,299</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,424</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term (within other long-term liabilities)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,659</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,188</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 500</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,487</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>48
<FILENAME>R37.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164814336">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Employee Benefit Plans (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CompensationAndRetirementDisclosureAbstract', window );"><strong>Employee Benefit Plans</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock', window );">Schedule of classification of liabilities in Consolidated Balance Sheets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other long-term liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,516</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,160</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,516</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CompensationAndRetirementDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CompensationAndRetirementDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amounts that are recognized in the balance sheet (or statement of financial position) for pension plans and/or other employee benefit plans, showing separately the assets and current and noncurrent liabilities (if applicable) recognized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>R38.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164595664">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Award Plans and Stock Based Compensation (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Award Plans and Stock Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock', window );">Schedule of estimated weighted-average assumptions used in calculation of fair value of options granted</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected volatility</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:middle;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">53.07%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Weighted-average expected term</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">4.71 years</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Risk-free interest rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">1.22%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expected dividend yield</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">0.00%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Summary of stock option activity</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Remaining</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Aggregate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Exercise</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Contractual</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Intrinsic</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Options</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Price</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Term</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(years)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43.33</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercised</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (2)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13.75</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Canceled</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Expired</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Exercisable at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Options Vested at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">61.81</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">4.9</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 102</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Schedule of changes in the Company's non-vested restricted stock units</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Weighted-Average</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Grant&#160;Date&#160;Fair</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares/units</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Value&#160;per&#160;Share</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 725</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39.23</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Granted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 125.11</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Vested</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (397)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 131.71</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Forfeited</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 51.94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:13pt;"><td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Outstanding at December 31, 2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 538</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 77.22</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)<br> -SubTopic 10<br> -Topic 718<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)<br> -SubTopic 10<br> -Topic 718<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 718<br> -SubTopic 10<br> -Subparagraph (f)(2)<br> -Name Accounting Standards Codification<br> -Paragraph 2<br> -Section 50<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R39.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164827552">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock', window );">Schedule of Company's assets and liabilities by level within the fair value hierarchy</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 118,278</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 118,278</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 339,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 339,240</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 457,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents and other short-term investments:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 111,771</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 136,771</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Short-term investments (U.S. Government Securities and Agency Investments)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 245,247</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 245,247</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 357,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,000</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 382,018</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets and liabilities, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>51
<FILENAME>R40.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159035584">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment and Geographic Region Information (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Business Segment and Geographic Region Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock', window );">Schedule of revenue by product lines</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.44786835%;padding-left:0pt;padding-right:0pt;width:100.89%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Ion implantation systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;">1,111,278 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 898,132</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 645,504</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other systems and services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 19,326</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,866</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 16,924</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Total revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 662,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock', window );">Schedule of revenue and long-lived assets by geographic region</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Long-Lived</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Revenue</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 749,288</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 86,482</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45,583</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 382</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 335,733</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,040</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,130,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 90,904</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 634,081</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 66,227</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 38,963</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 212</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 246,954</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,464</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 919,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 69,903</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 519,408</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,590</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Europe</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 36,622</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 191</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 106,398</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,194</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 662,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 66,975</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>52
<FILENAME>R41.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158986464">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Tables)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock', window );">Schedule of income before income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 270,842</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 198,028</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 116,380</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,757</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,857</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,048</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income before income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 278,599</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 204,885</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 120,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock', window );">Schedule of provision for income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">United States</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 46,871</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,430</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,985</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,716</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 82</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,498</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,124</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,439</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total current</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 52,354</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 13,270</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,521</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Federal</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (18,526)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,097</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,521</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">State</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (440)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (102)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 406</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,052)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (459)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (670)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Total deferred</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,018)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,536</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 20,257</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,336</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,806</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,778</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock', window );">Schedule of reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income taxes at the United States statutory rate</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 58,506</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 43,026</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 25,290</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">State income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,075</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 387</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of change in valuation allowance</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,978</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 680</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,443)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign income tax rate differentials</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 329</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 289</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 152</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stock-based compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,718)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,818)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,658)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Internal revenue code section 162(m) limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,488</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,692</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,481</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit expirations</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 784</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,181</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,342</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Rate change</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 44</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 94</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 159</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Credit generation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (6,900)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (4,764)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (3,096)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Discrete items, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 2,161</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 206</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 72</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">GILTI inclusion</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 45</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 69</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 301</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Foreign-derived intangible income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (24,052)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (20,526)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 638</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (209)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 32,336</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,806</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 21,778</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock', window );">Schedule of significant components of current and long-term deferred income taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 96</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 291</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Foreign net operating loss carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 182</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 276</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Federal tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,999</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    State tax credit carryforwards</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,560</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,683</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Property, plant and equipment</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,979</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,755</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Operating lease liability</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 5,564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,564</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Accrued compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 242</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 276</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Inventories</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 804</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,613</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Stock compensation</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,790</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,620</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Warranty</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,108</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,993</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferred revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 6,389</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 4,501</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Capitalized research and development costs</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 38,036</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 18,067</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 74,749</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 47,639</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Valuation allowance</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,963)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (8,370)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 63,786</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 39,269</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred tax liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Intangible assets</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (176)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Right-of-use asset</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (9,155)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (5,400)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">    Other</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,203)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (1,992)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross deferred tax liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (10,358)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (7,568)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">      Deferred taxes, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 53,428</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 31,701</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock', window );">Schedule of reconciliation of the beginning and ending balance of unrecognized tax benefits</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;background:#ffff00;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:26.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Year ended December 31,</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2023</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2022</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at beginning of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:top;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,044</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (271)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (122)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (546)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Decreases in unrecognized tax benefits related to settlements with tax authorities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (708)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (472)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,754</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 1,312</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 935</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 11,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as other long-term liability</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 8,344</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 7,190</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Recorded as a decrease in deferred tax assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,582</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 3,253</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Balance at end of year</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 11,926</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 10,443</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 9,961</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;background:#ffff00;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Paragraph 9<br> -Section 50<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Paragraph 2<br> -Section 50<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Paragraph 12<br> -Section 50<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of income before income tax between domestic and foreign jurisdictions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the change in unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 217<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482663/740-10-55-217<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>53
<FILENAME>R42.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159089824">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Foreign Currency (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ForeignCurrencyTransactionGainLossRealized', window );">Foreign exchange gains (losses) realized</a></td>
<td class="num">$ (0.5)<span></span>
</td>
<td class="num">$ (6.6)<span></span>
</td>
<td class="num">$ (2.5)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ForeignCurrencyTransactionGainLossRealized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before tax, of realized gain (loss) from foreign currency transaction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 946<br> -SubTopic 830<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480167/946-830-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 6<br> -Subparagraph (a)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483581/946-220-45-6<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-07(7)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-1<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 830<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481956/830-20-45-1<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 830<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481926/830-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ForeignCurrencyTransactionGainLossRealized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>54
<FILENAME>R43.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158555600">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details) - USD ($)<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AssetImpairmentChargesAbstract', window );"><strong>Impairment of Long-Lived Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ImpairmentOfLongLivedAssetsHeldForUse', window );">Impairment of long-lived assets</a></td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CostOfPropertyRepairsAndMaintenanceCapitalized', window );">Capitalized cost of property repairs and maintenance</a></td>
<td class="nump">$ 2,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">16 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Useful life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Useful life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC | Land and building</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">22 years<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC | Building</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">22 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CostOfPropertyRepairsAndMaintenanceCapitalized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs of keeping the property in good condition and are capitalized and depreciated over the life of the property.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CostOfPropertyRepairsAndMaintenanceCapitalized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetImpairmentChargesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetImpairmentChargesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOfLongLivedAssetsHeldForUse">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate amount of write-downs for impairments recognized during the period for long lived assets held for use (including those held for disposal by means other than sale).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 360<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-2<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482130/360-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOfLongLivedAssetsHeldForUse</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseTermOfContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseTermOfContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandAndBuildingMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandAndBuildingMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>55
<FILENAME>R44.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158544192">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Concentration of Risk (Details) - customer<br></strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Total revenue | Customer concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ConcentrationRiskNumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">2<span></span>
</td>
<td class="nump">2<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Total revenue | Customer concentration risk | Ten largest customers</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ConcentrationRiskNumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">10<span></span>
</td>
<td class="nump">10<span></span>
</td>
<td class="nump">10<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="nump">51.70%<span></span>
</td>
<td class="nump">59.40%<span></span>
</td>
<td class="nump">69.50%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Total revenue | Customer concentration risk | First customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13.10%<span></span>
</td>
<td class="nump">17.80%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Total revenue | Customer concentration risk | Second customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="nump">11.50%<span></span>
</td>
<td class="nump">15.40%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts receivable | Credit concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ConcentrationRiskNumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">1<span></span>
</td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts receivable | Credit concentration risk | First customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="nump">12.20%<span></span>
</td>
<td class="nump">19.40%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts receivable | Credit concentration risk | Second customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ConcentrationRiskNumberOfCustomers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ConcentrationRiskNumberOfCustomers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 954<br> -SubTopic 310<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481027/954-310-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-21<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-20<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-18<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-20<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_TenLargestCustomersMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_TenLargestCustomersMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_LargestCustomerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_LargestCustomerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_SecondLargestCustomerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_SecondLargestCustomerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>56
<FILENAME>R45.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159007584">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Revenue Recognition (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_AfterMarketMember', window );">Aftermarket</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ExtendedProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">90 days<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ExtendedProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum | Aftermarket</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ExtendedProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum | Aftermarket</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ExtendedProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">3 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ExtendedProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the extended period for which the warranty is offered for the products sold.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ExtendedProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_AfterMarketMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_AfterMarketMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>57
<FILENAME>R46.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158858144">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Net Income per Share (Details) - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Summary of Significant Accounting Policies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Anti-dilutive common equivalent shares excluded from calculation</a></td>
<td class="nump">6,025<span></span>
</td>
<td class="nump">4,929<span></span>
</td>
<td class="nump">2,554<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Net income per share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income available to common stockholders</a></td>
<td class="nump">$ 246,263<span></span>
</td>
<td class="nump">$ 183,079<span></span>
</td>
<td class="nump">$ 98,650<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average shares of common stock outstanding used in computing basic income per share</a></td>
<td class="nump">32,758<span></span>
</td>
<td class="nump">33,043<span></span>
</td>
<td class="nump">33,555<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements', window );">Incremental options and RSUs</a></td>
<td class="nump">407<span></span>
</td>
<td class="nump">499<span></span>
</td>
<td class="nump">713<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Weighted average shares of common stock used in computing diluted net income per share</a></td>
<td class="nump">33,165<span></span>
</td>
<td class="nump">33,542<span></span>
</td>
<td class="nump">34,268<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_EarningsPerShareDetailAbstract', window );"><strong>Net income per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic</a></td>
<td class="nump">$ 7.52<span></span>
</td>
<td class="nump">$ 5.54<span></span>
</td>
<td class="nump">$ 2.94<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted</a></td>
<td class="nump">$ 7.43<span></span>
</td>
<td class="nump">$ 5.46<span></span>
</td>
<td class="nump">$ 2.88<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_EarningsPerShareDetailAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>n/a</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_EarningsPerShareDetailAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-15<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-7<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 16: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 52<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-52<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-15<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (e)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 815<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480175/815-40-65-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-7<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 15: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 52<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482635/260-10-55-52<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 7<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-7<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of share based payment arrangements using the treasury stock method.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480454/718-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-22<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 23<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-23<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-28A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-3<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-11<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-4<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 5<br> -Subparagraph (SAB Topic 6.B)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-5<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-11<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-60B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 16<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-16<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482662/260-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 260<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482689/260-10-45-10<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>58
<FILENAME>R47.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158935120">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2023 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive (loss) income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2022</a></td>
<td class="num">$ (1,968)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="nump">122<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2023</a></td>
<td class="num">(1,846)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember', window );">Foreign currency</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive (loss) income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2022</a></td>
<td class="num">(1,994)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="nump">38<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2023</a></td>
<td class="num">(1,956)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember', window );">Defined benefit pension plan</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive (loss) income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2022</a></td>
<td class="nump">26<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="nump">84<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2023</a></td>
<td class="nump">$ 110<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AOCIAttributableToParentNetOfTaxRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax, of accumulated increase (decrease) in equity from transaction and other event and circumstance from nonowner source.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-14A<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-11<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 40<br> -Name Accounting Standards Codification<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480016/944-40-65-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-14<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax, of reclassification adjustment from accumulated other comprehensive (income) loss for net periodic benefit cost (credit) of defined benefit plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 15<br> -SubTopic 10<br> -Topic 220<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-15<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 11<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-11<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 17A<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482790/220-10-45-17A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>R48.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155623536">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Deferred revenue</a></td>
<td class="nump">$ 210,885<span></span>
</td>
<td class="nump">$ 154,777<span></span>
</td>
<td class="nump">$ 68,436<span></span>
</td>
<td class="nump">$ 23,058<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityCurrent', window );">Short-term deferred revenue</a></td>
<td class="nump">164,677<span></span>
</td>
<td class="nump">123,471<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityNoncurrent', window );">Long-term deferred revenue</a></td>
<td class="nump">$ 46,208<span></span>
</td>
<td class="nump">$ 31,306<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations', window );">Unsatisfied extended warranty performance obligations, period</a></td>
<td class="text">24 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PercentageOfPaymentUponShipmentOfTool', window );">Payment upon shipment of the system, as a percent</a></td>
<td class="nump">90.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PercentageOfPaymentUponInstallation', window );">Payment upon acceptance, as a percent</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_AfterMarketMember', window );">Aftermarket | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PeriodOfPaymentUponDeliveryOfParts', window );">Payment upon delivery of parts, period</a></td>
<td class="text">30 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_AfterMarketMember', window );">Aftermarket | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PeriodOfPaymentUponDeliveryOfParts', window );">Payment upon delivery of parts, period</a></td>
<td class="text">60 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PercentageOfPaymentUponInstallation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of payment terms due upon acceptance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PercentageOfPaymentUponInstallation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PercentageOfPaymentUponShipmentOfTool">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of payment terms due upon shipment of the system.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PercentageOfPaymentUponShipmentOfTool</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PeriodOfPaymentUponDeliveryOfParts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the period for payment upon delivery of parts.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PeriodOfPaymentUponDeliveryOfParts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the period for payment upon delivery of parts.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisaggregationOfRevenueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-5<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 8: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (g)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisaggregationOfRevenueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_AfterMarketMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_AfterMarketMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>60
<FILENAME>R49.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158582160">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue - Revenue by discipline &amp; geographical areas (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">$ 1,130,604<span></span>
</td>
<td class="nump">$ 919,998<span></span>
</td>
<td class="nump">$ 662,428<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_NorthAmericaMember', window );">North America</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">174,810<span></span>
</td>
<td class="nump">143,701<span></span>
</td>
<td class="nump">48,715<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_AsiaPacificMember', window );">Asia Pacific</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">811,308<span></span>
</td>
<td class="nump">673,752<span></span>
</td>
<td class="nump">516,105<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_EuropeMember', window );">Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">144,486<span></span>
</td>
<td class="nump">102,545<span></span>
</td>
<td class="nump">97,608<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">883,604<span></span>
</td>
<td class="nump">692,061<span></span>
</td>
<td class="nump">454,598<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_AfterMarketMember', window );">Aftermarket</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">$ 247,000<span></span>
</td>
<td class="nump">$ 227,937<span></span>
</td>
<td class="nump">$ 207,830<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisaggregationOfRevenueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-5<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 4: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br><br>Reference 8: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 91<br> -Subparagraph (g)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479777/606-10-55-91<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisaggregationOfRevenueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 924<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479941/924-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 5<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-5<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_NorthAmericaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_NorthAmericaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_AsiaPacificMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_AsiaPacificMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_EuropeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_EuropeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_AfterMarketMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_AfterMarketMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>61
<FILENAME>R50.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847157776912">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue - Deferred revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Balance, beginning of the period</a></td>
<td class="nump">$ 154,777<span></span>
</td>
<td class="nump">$ 68,436<span></span>
</td>
<td class="nump">$ 23,058<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ContractWithCustomerLiabilityDeferralOfRevenue', window );">Deferral of revenue</a></td>
<td class="nump">185,688<span></span>
</td>
<td class="nump">146,674<span></span>
</td>
<td class="nump">66,349<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized', window );">Recognition of deferred revenue</a></td>
<td class="num">(129,580)<span></span>
</td>
<td class="num">(60,333)<span></span>
</td>
<td class="num">(20,971)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Balance, end of the period</a></td>
<td class="nump">$ 210,885<span></span>
</td>
<td class="nump">$ 154,777<span></span>
</td>
<td class="nump">$ 68,436<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ContractWithCustomerLiabilityDeferralOfRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ContractWithCustomerLiabilityDeferralOfRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479837/606-10-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 606<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479806/606-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityRevenueRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>62
<FILENAME>R51.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159059152">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 167,297<span></span>
</td>
<td class="nump">$ 185,595<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalents', window );">Long-term restricted cash</a></td>
<td class="nump">6,654<span></span>
</td>
<td class="nump">752<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Total cash, cash equivalents and restricted cash</a></td>
<td class="nump">173,951<span></span>
</td>
<td class="nump">$ 186,347<span></span>
</td>
<td class="nump">$ 295,680<span></span>
</td>
<td class="nump">$ 204,232<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent', window );">Letter of credit related to workers' compensation insurance</a></td>
<td class="nump">700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DepositRelatingToCustomsActivity', window );">Deposit related to customs activity</a></td>
<td class="nump">100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SecurityDeposit', window );">Security Deposit</a></td>
<td class="nump">5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember', window );">Revolving credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit', window );">Restricted cash which relates to support of outstanding letters of credit</a></td>
<td class="nump">$ 6,700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DepositRelatingToCustomsActivity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of deposits relating customs activity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DepositRelatingToCustomsActivity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-8<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 24<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-24<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482913/230-10-50-8<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(1)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SecurityDeposit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SecurityDeposit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations and payables pertaining to claims incurred of a workers compensation nature.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(24))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>63
<FILENAME>R52.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164732368">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2023 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivables and Allowances for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs', window );">Charge-offs</a></td>
<td class="num">$ (657)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProvisionForLoanLeaseAndOtherLosses', window );">Provision for credit losses</a></td>
<td class="nump">1,117<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Balance, end of period</a></td>
<td class="nump">$ 460<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of allowance for credit loss on accounts receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 326<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479344/326-20-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481962/310-10-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of direct write-downs of accounts receivable charged against the allowance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 326<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479319/326-20-50-13<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForLoanLeaseAndOtherLosses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense related loan transactions, lease transactions, credit loss from transactions other than loan and lease transactions, and other loss based on assessment of uncollectability from the counterparty to reduce the account to their net realizable value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 11B<br> -Subparagraph (c)(2)<br> -SubTopic 10<br> -Topic 310<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481962/310-10-50-11B<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.11)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForLoanLeaseAndOtherLosses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>64
<FILENAME>R53.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158613584">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivables and Allowances for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableGrossCurrent', window );">Trade receivables</a></td>
<td class="nump">$ 218,424<span></span>
</td>
<td class="nump">$ 169,773<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Allowance for doubtful accounts</a></td>
<td class="num">(460)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Trade receivable, net</a></td>
<td class="nump">$ 217,964<span></span>
</td>
<td class="nump">$ 169,773<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableGrossCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, before allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(3)(a)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableGrossCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481990/310-10-45-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of allowance for credit loss on accounts receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 326<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479344/326-20-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 310<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481962/310-10-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>65
<FILENAME>R54.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847160278544">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Inventories, net (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsNetOfReserves', window );">Raw materials</a></td>
<td class="nump">$ 231,200<span></span>
</td>
<td class="nump">$ 187,313<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work in process</a></td>
<td class="nump">45,373<span></span>
</td>
<td class="nump">35,069<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods (completed systems)</a></td>
<td class="nump">29,909<span></span>
</td>
<td class="nump">20,024<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
<td class="nump">$ 306,482<span></span>
</td>
<td class="nump">$ 242,406<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 330<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480581/330-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 330<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480581/330-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(3))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 330<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480581/330-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>66
<FILENAME>R55.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155728192">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories, net - Additional Information (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryLineItems', window );"><strong>Inventories, net additional information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_IncreaseInInventoryReserves', window );">Increase in inventory reserves</a></td>
<td class="nump">$ 1.5<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ChargesRelatedToReflectLowerOfCostOrMarketValue', window );">Charges to cost of sales due to lower of cost or market value</a></td>
<td class="nump">5.2<span></span>
</td>
<td class="nump">$ 4.6<span></span>
</td>
<td class="nump">$ 3.8<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment', window );">Inventory on consignment at customer locations</a></td>
<td class="nump">6.5<span></span>
</td>
<td class="nump">6.4<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_InventoryValuationReserveMember', window );">Inventory valuation reserve</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryLineItems', window );"><strong>Inventories, net additional information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_InventoryValuationReserves', window );">Inventory reserves</a></td>
<td class="nump">$ 5.2<span></span>
</td>
<td class="nump">$ 6.7<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ChargesRelatedToReflectLowerOfCostOrMarketValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the amount charged to cost of sales due to reflect the lower of cost or market value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ChargesRelatedToReflectLowerOfCostOrMarketValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncreaseInInventoryReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Increase in inventory reserves which was driven by write-down of excess inventory related to legacy products.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_IncreaseInInventoryReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryValuationReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of valuation reserve for inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 5.BB)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480581/330-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryValuationReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Gross amount of inventory owned by the entity but in the hands of a customer, typically a reseller.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_InventoryValuationReserveMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_InventoryValuationReserveMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>67
<FILENAME>R56.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847157661680">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Property, Plant and Equipment, net (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
<td class="nump">$ 80,404<span></span>
</td>
<td class="nump">$ 62,918<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation</a></td>
<td class="num">(26,433)<span></span>
</td>
<td class="num">(23,254)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Net</a></td>
<td class="nump">53,971<span></span>
</td>
<td class="nump">39,664<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Depreciation', window );">Depreciation expense</a></td>
<td class="nump">6,200<span></span>
</td>
<td class="nump">5,100<span></span>
</td>
<td class="nump">$ 4,200<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandAndBuildingMember', window );">Land and building</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
<td class="nump">21,802<span></span>
</td>
<td class="nump">18,001<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Machinery and equipment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
<td class="nump">41,547<span></span>
</td>
<td class="nump">34,728<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_ConstructionInProgressMember', window );">Construction in progress</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, plant and equipment</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Gross</a></td>
<td class="nump">$ 17,055<span></span>
</td>
<td class="nump">$ 10,189<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(14))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Depreciation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Depreciation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 360<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 852<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481372/852-10-55-10<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 360<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480842/942-360-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandAndBuildingMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandAndBuildingMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_ConstructionInProgressMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_ConstructionInProgressMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>68
<FILENAME>R57.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159061280">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Assets Manufactured for Internal Use, net - Components (Details) - Assets Manufactured for Internal Use - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_PropertyPlantAndEquipmentOtherUsefulLife', window );">Useful life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentOther', window );">Total cost</a></td>
<td class="nump">$ 76,509<span></span>
</td>
<td class="nump">$ 64,232<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation', window );">Accumulated depreciation</a></td>
<td class="num">(39,588)<span></span>
</td>
<td class="num">(33,992)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentOtherNet', window );">Assets manufactured for internal use, net</a></td>
<td class="nump">36,921<span></span>
</td>
<td class="nump">30,240<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OtherDepreciationAndAmortization', window );">Depreciation expense</a></td>
<td class="nump">5,600<span></span>
</td>
<td class="nump">5,200<span></span>
</td>
<td class="nump">$ 5,300<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_AssetsManufacturedForInternalUseMember', window );">Internal use assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentOther', window );">Total cost</a></td>
<td class="nump">76,273<span></span>
</td>
<td class="nump">61,603<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_AssetsManufacturedForInternalUseMember', window );">Construction in process</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Assets manufactured for internal use</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentOther', window );">Total cost</a></td>
<td class="nump">$ 236<span></span>
</td>
<td class="nump">$ 2,629<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PropertyPlantAndEquipmentOtherUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Useful life of other long lived assets used in the normal conduct of business and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PropertyPlantAndEquipmentOtherUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherDepreciationAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense charged against earnings to allocate the cost of tangible and intangible assets over their remaining economic lives, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -SubTopic 10<br> -Topic 230<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-28<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherDepreciationAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of other physical assets used in the normal conduct of business to produce goods and services and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -SubTopic 10<br> -Topic 360<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482099/360-10-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentOtherNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount after depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentOtherNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_AssetsManufacturedForInternalUseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_AssetsManufacturedForInternalUseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_InternalUsedAssetsTypeAxis=acls_CompletedInternalUseAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_InternalUsedAssetsTypeAxis=acls_CompletedInternalUseAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_InternalUsedAssetsTypeAxis=us-gaap_AssetUnderConstructionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_InternalUsedAssetsTypeAxis=us-gaap_AssetUnderConstructionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>69
<FILENAME>R58.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155742224">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2023</div></th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend', window );">Option to extend</a></td>
<td class="text">true<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Renewal term</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Renewal term</a></td>
<td class="text">3 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeLeaseDescriptionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeLeaseDescriptionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether lessee has option to extend operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseRenewalTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseRenewalTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>70
<FILENAME>R59.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155756912">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease assets</a></td>
<td class="nump">$ 30,716<span></span>
</td>
<td class="nump">$ 12,146<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAsset', window );">Finance lease assets</a></td>
<td class="nump">16,632<span></span>
</td>
<td class="nump">17,942<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseRightOfUseAsset', window );">Total leased assets</a></td>
<td class="nump">47,348<span></span>
</td>
<td class="nump">30,088<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating liabilities current</a></td>
<td class="nump">$ 4,978<span></span>
</td>
<td class="nump">$ 5,367<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Other Liabilities, Current<span></span>
</td>
<td class="text">Other Liabilities, Current<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Finance liabilities current</a></td>
<td class="nump">$ 1,511<span></span>
</td>
<td class="nump">$ 1,229<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Operating liabilities noncurrent</a></td>
<td class="nump">$ 25,724<span></span>
</td>
<td class="nump">$ 6,931<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Other Liabilities, Noncurrent<span></span>
</td>
<td class="text">Other Liabilities, Noncurrent<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Finance liabilities noncurrent</a></td>
<td class="nump">$ 43,674<span></span>
</td>
<td class="nump">$ 45,185<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiability', window );">Total lease liabilities</a></td>
<td class="nump">75,887<span></span>
</td>
<td class="nump">58,712<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_FinanceLeaseAccumulatedDepreciation', window );">Finance lease, accumulated depreciation</a></td>
<td class="nump">46,400<span></span>
</td>
<td class="nump">45,900<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PrepaidRent', window );">Prepaid financing costs</a></td>
<td class="nump">$ 600<span></span>
</td>
<td class="nump">$ 600<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceLeaseAccumulatedDepreciation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of depreciation of finance leased assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceLeaseAccumulatedDepreciation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes noncurrent operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>enum2:enumerationSetItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidRent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (g)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 340<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483032/340-10-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 340<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 05<br> -Paragraph 5<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482955/340-10-05-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidRent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>71
<FILENAME>R60.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155600528">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases - Lease Cost (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">$ 10,669<span></span>
</td>
<td class="nump">$ 8,340<span></span>
</td>
<td class="nump">$ 6,009<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAssetAmortization', window );">Depreciation of leased assets</a></td>
<td class="nump">1,310<span></span>
</td>
<td class="nump">1,296<span></span>
</td>
<td class="nump">1,306<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseInterestExpense', window );">Interest on lease liabilities</a></td>
<td class="nump">4,874<span></span>
</td>
<td class="nump">4,992<span></span>
</td>
<td class="nump">5,086<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_FinanceLeaseCost', window );">Total finance lease cost</a></td>
<td class="nump">6,184<span></span>
</td>
<td class="nump">6,288<span></span>
</td>
<td class="nump">6,392<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCost', window );">Total lease cost</a></td>
<td class="nump">16,853<span></span>
</td>
<td class="nump">14,628<span></span>
</td>
<td class="nump">12,401<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShortTermAndVariableLeaseCost', window );">Short-term lease and variable lease costs</a></td>
<td class="nump">2,100<span></span>
</td>
<td class="nump">1,800<span></span>
</td>
<td class="nump">1,900<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=acls_ProductOrServiceMember', window );">Product / services*</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">7,297<span></span>
</td>
<td class="nump">5,427<span></span>
</td>
<td class="nump">2,978<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember', window );">Research and development</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">587<span></span>
</td>
<td class="nump">322<span></span>
</td>
<td class="nump">430<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember', window );">Sales and marketing*</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">1,674<span></span>
</td>
<td class="nump">1,526<span></span>
</td>
<td class="nump">1,605<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember', window );">General and administrative*</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">$ 1,111<span></span>
</td>
<td class="nump">$ 1,065<span></span>
</td>
<td class="nump">$ 996<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of finance lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShortTermAndVariableLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of short-term and variable lease cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShortTermAndVariableLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseInterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of interest expense on finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-4<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseInterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAssetAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-4<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAssetAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=acls_ProductOrServiceMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=acls_ProductOrServiceMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>72
<FILENAME>R61.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155388496">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments finance lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2024</a></td>
<td class="nump">$ 6,252<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo', window );">2025</a></td>
<td class="nump">5,930<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree', window );">2026</a></td>
<td class="nump">6,008<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour', window );">2027</a></td>
<td class="nump">6,128<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive', window );">2028</a></td>
<td class="nump">6,251<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive', window );">Thereafter</a></td>
<td class="nump">55,336<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">85,905<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(40,720)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiability', window );">Finance lease obligations</a></td>
<td class="nump">45,185<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments operating lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2024</a></td>
<td class="nump">6,529<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo', window );">2025</a></td>
<td class="nump">4,970<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree', window );">2026</a></td>
<td class="nump">3,613<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour', window );">2027</a></td>
<td class="nump">2,530<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive', window );">2028</a></td>
<td class="nump">1,926<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive', window );">Thereafter</a></td>
<td class="nump">23,205<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">42,773<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(12,071)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Operating lease obligations</a></td>
<td class="nump">30,702<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments finance and operating lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2024</a></td>
<td class="nump">12,781<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo', window );">2025</a></td>
<td class="nump">10,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree', window );">2026</a></td>
<td class="nump">9,621<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour', window );">2027</a></td>
<td class="nump">8,658<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive', window );">2028</a></td>
<td class="nump">8,177<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive', window );">Thereafter</a></td>
<td class="nump">78,541<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">128,678<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(52,791)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiability', window );">Total lease liabilities</a></td>
<td class="nump">75,887<span></span>
</td>
<td class="nump">$ 58,712<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Right of use asset</a></td>
<td class="nump">30,716<span></span>
</td>
<td class="nump">12,146<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PrepaidRent', window );">Prepaid rent</a></td>
<td class="nump">600<span></span>
</td>
<td class="nump">600<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Operating liabilities noncurrent</a></td>
<td class="nump">$ 25,724<span></span>
</td>
<td class="nump">$ 6,931<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeFinanceLeaseTermOfContract1', window );">Finance lease term</a></td>
<td class="text">22 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1', window );">Operating leases -Weighted-average remaining lease term (in years)</a></td>
<td class="text">11 years 6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1', window );">Finance leases - Weighted-average remaining lease term (in years)</a></td>
<td class="text">13 years 1 month 6 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent', window );">Operating leases - Weighted-average discount rate</a></td>
<td class="nump">5.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent', window );">Finance leases - Weighted-average discount rate</a></td>
<td class="nump">10.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Operating lease term</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Operating lease term</a></td>
<td class="text">16 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>n/a.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee operating and finance lease liability payments due next twelve months.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>n/a.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average discount rate for finance lease calculated at point in time.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeFinanceLeaseTermOfContract1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeFinanceLeaseTermOfContract1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-6<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseTermOfContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseTermOfContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average discount rate for operating lease calculated at point in time.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidRent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (g)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483467/210-10-45-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 340<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483032/340-10-45-1<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 340<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 05<br> -Paragraph 5<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482955/340-10-05-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidRent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>73
<FILENAME>R62.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159387616">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases - Cash Flow by Lease Type (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLeasePayments', window );">Operating cash outflows from operating leases</a></td>
<td class="nump">$ 10,669<span></span>
</td>
<td class="nump">$ 8,340<span></span>
</td>
<td class="nump">$ 6,009<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseInterestPaymentOnLiability', window );">Operating cash outflows from finance leases</a></td>
<td class="nump">4,874<span></span>
</td>
<td class="nump">4,992<span></span>
</td>
<td class="nump">5,086<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeasePrincipalPayments', window );">Financing cash outflows from finance leases</a></td>
<td class="nump">1,240<span></span>
</td>
<td class="nump">987<span></span>
</td>
<td class="nump">763<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability', window );">Operating lease assets obtained in exchange for operating lease liabilities</a></td>
<td class="nump">$ 26,890<span></span>
</td>
<td class="nump">$ 6,173<span></span>
</td>
<td class="nump">$ 8,670<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseInterestPaymentOnLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of interest paid on finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseInterestPaymentOnLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeasePrincipalPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow for principal payment on finance lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-5<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeasePrincipalPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeasePayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-5<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeasePayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in right-of-use asset obtained in exchange for operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 53<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479589/842-20-55-53<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>74
<FILENAME>R63.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159475488">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward', window );"><strong>Changes in standard product warranty liability</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance at January 1 (beginning of year)</a></td>
<td class="nump">$ 10,487<span></span>
</td>
<td class="nump">$ 6,924<span></span>
</td>
<td class="nump">$ 4,612<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued', window );">Warranties issued during the period</a></td>
<td class="nump">12,893<span></span>
</td>
<td class="nump">10,597<span></span>
</td>
<td class="nump">7,808<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPayments', window );">Settlements made during the period</a></td>
<td class="num">(10,230)<span></span>
</td>
<td class="num">(6,798)<span></span>
</td>
<td class="num">(4,282)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Changes in estimate of liability for pre-existing warranties during the period</a></td>
<td class="nump">3,607<span></span>
</td>
<td class="num">(236)<span></span>
</td>
<td class="num">(1,214)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance at September 30 (end of period)</a></td>
<td class="nump">16,757<span></span>
</td>
<td class="nump">10,487<span></span>
</td>
<td class="nump">6,924<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract', window );"><strong>Product warranty classification</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Amount classified as current</a></td>
<td class="nump">14,098<span></span>
</td>
<td class="nump">8,299<span></span>
</td>
<td class="nump">6,424<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualNoncurrent', window );">Amount classified as long-term (within other long-term liabilities)</a></td>
<td class="nump">2,659<span></span>
</td>
<td class="nump">2,188<span></span>
</td>
<td class="nump">500<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Total warranty liability</a></td>
<td class="nump">$ 16,757<span></span>
</td>
<td class="nump">$ 10,487<span></span>
</td>
<td class="nump">$ 6,924<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the period for which the warranty is offered for the products sold.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrual">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrual</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and due after one year (or beyond the operating cycle if longer) for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in the standard and extended product warranty accrual from warranties issued.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 460<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482425/460-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualWarrantiesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>75
<FILENAME>R64.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155948336">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Financing Arrangements (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 28, 2023</div></th>
<th class="th"><div>Apr. 05, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 43,674<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 45,185<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Finance liabilities current</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,511<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,229<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember', window );">Sale leaseback obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">45,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Finance liabilities current</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SecurityDeposit', window );">Security deposit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SecurityDeposit', window );">Security deposit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC | Building</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfPropertyHeldForSale', window );">Proceeds from sale of corporate headquarters</a></td>
<td class="nump">$ 48,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">22 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_SiliconValleyBankMember', window );">Silicon Valley Bank | Revolving credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Maximum borrowing capacity under the credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 40,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LettersOfCreditOutstandingAmount', window );">Letter of credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 835<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482900/835-30-50-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(f))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.12-04(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 69B<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481568/470-20-55-69B<br><br>Reference 6: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 69C<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481568/470-20-55-69C<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 69E<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481568/470-20-55-69E<br><br>Reference 8: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 69F<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481568/470-20-55-69F<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 11: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (e)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1B<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1D<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1D<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1D<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1D<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1E<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1E<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1E<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1E<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1E<br> -Subparagraph (d)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1E<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1F<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1F<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1F<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1F<br> -Subparagraph (b)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1F<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1I<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481139/470-20-50-1I<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479041/842-20-45-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseTermOfContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 842<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147478964/842-20-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseTermOfContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LettersOfCreditOutstandingAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LettersOfCreditOutstandingAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfPropertyHeldForSale">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of formerly productive land held for sale, anything permanently fixed to it, including buildings, structures on it, and so forth.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 230<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482740/230-10-45-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfPropertyHeldForSale</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SecurityDeposit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SecurityDeposit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_SiliconValleyBankMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_SiliconValleyBankMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CreditFacilityAxis=us-gaap_RevolvingCreditFacilityMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CreditFacilityAxis=us-gaap_RevolvingCreditFacilityMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>76
<FILENAME>R65.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847160485808">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Employee Benefit Plans - Defined Contribution Plan (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DefinedContributionPlanLineItems', window );"><strong>Defined Contribution Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch', window );">Employer contributed by eligible participants</a></td>
<td class="nump">50.00%<span></span>
</td>
<td class="nump">50.00%<span></span>
</td>
<td class="nump">50.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent', window );">Pre-tax compensation contributed</a></td>
<td class="nump">6.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanCostRecognized', window );">Defined contribution plan expenses</a></td>
<td class="nump">$ 3.4<span></span>
</td>
<td class="nump">$ 2.7<span></span>
</td>
<td class="nump">$ 2.2<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_TitleOfIndividualAxis=acls_RegularEmployeesMember', window );">Regular employees</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DefinedContributionPlanLineItems', window );"><strong>Defined Contribution Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent', window );">Maximum contribution per employee under the Axcelis Long-Term Investment Plan (as a percent)</a></td>
<td class="nump">35.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_TitleOfIndividualAxis=acls_HighlyCompensatedEmployeesMember', window );">Highly compensated employees</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DefinedContributionPlanLineItems', window );"><strong>Defined Contribution Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent', window );">Maximum contribution per employee under the Axcelis Long-Term Investment Plan (as a percent)</a></td>
<td class="nump">16.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DefinedContributionPlanLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DefinedContributionPlanLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanCostRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cost for defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 70<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480794/715-70-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanCostRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage employer matches of the employee's percentage contribution matched.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Maximum percentage of employee gross pay the employee may contribute to a defined contribution plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_TitleOfIndividualAxis=acls_RegularEmployeesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_TitleOfIndividualAxis=acls_RegularEmployeesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_TitleOfIndividualAxis=acls_HighlyCompensatedEmployeesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_TitleOfIndividualAxis=acls_HighlyCompensatedEmployeesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>77
<FILENAME>R66.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158409424">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Employee Benefit Plans - Other Compensation Plans (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract', window );"><strong>Classification of liabilities in the Consolidated Balance Sheets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent', window );">Other long-term liabilities</a></td>
<td class="nump">$ 3,160<span></span>
</td>
<td class="nump">$ 3,516<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent', window );">Total liabilities</a></td>
<td class="nump">3,160<span></span>
</td>
<td class="nump">3,516<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DefinedBenefitPlanAdministrationExpenses', window );">Plan expenses</a></td>
<td class="nump">$ 1,700<span></span>
</td>
<td class="nump">$ 1,500<span></span>
</td>
<td class="nump">$ 1,500<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DefinedBenefitPlanAdministrationExpenses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of administration expense of defined benefit plan which decreases plan assets. Excludes plan administration expense paid by employer.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DefinedBenefitPlanAdministrationExpenses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liability, recognized in statement of financial position, for defined benefit pension and other postretirement plans.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 944<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479440/944-210-S99-1<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480535/715-20-45-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of liability, recognized in statement of financial position, for defined benefit pension and other postretirement plans, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(24))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 55<br> -Paragraph 17<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480482/715-20-55-17<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480535/715-20-45-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480535/715-20-45-3<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 715<br> -SubTopic 20<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480506/715-20-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>78
<FILENAME>R67.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847150366544">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Award Plans and Stock Based Compensation (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="3">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>May 12, 2012</div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>May 02, 2012</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.001<span></span>
</td>
<td class="nump">$ 0.001<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Stock-Based Compensation Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate', window );">Forfeiture rate (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5.00%<span></span>
</td>
<td class="nump">5.00%<span></span>
</td>
<td class="nump">5.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 18,300<span></span>
</td>
<td class="nump">$ 13,400<span></span>
</td>
<td class="nump">$ 12,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_BenefitOfTaxDeductionsInExcessOfCompensationCost', window );">Benefit of tax deductions in excess of recognized compensation cost</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense', window );">Tax benefit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 2,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Estimated weighted-average assumptions</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate', window );">Weighted-average expected volatility (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">53.07%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Weighted-average expected term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years 8 months 15 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk-free interest rate</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1.22%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Expected dividend yield (as a percent)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Options</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross', window );">Granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember', window );">Common Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_EmployeeStockPurchasePlanAbstract', window );"><strong>Employee Stock Purchase Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares purchased under the plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">16,000<span></span>
</td>
<td class="nump">29,000<span></span>
</td>
<td class="nump">26,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Options</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(3,000)<span></span>
</td>
<td class="num">(103,000)<span></span>
</td>
<td class="num">(396,000)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember', window );">Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares of common stock originally reserved for future grant</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">900,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_EmployeeStockPurchasePlanAbstract', window );"><strong>Employee Stock Purchase Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent', window );">Purchase price as a percentage of the market value of a common stock on the day the stock is purchased</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">85.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized', window );">Offering period over which compensation expense is amortized</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares purchased under the plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9,965<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract', window );"><strong>Stock-Based Compensation Expense</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 400<span></span>
</td>
<td class="nump">$ 300<span></span>
</td>
<td class="nump">$ 200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember', window );">Employee Stock Purchase Plan | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_EmployeeStockPurchasePlanAbstract', window );"><strong>Employee Stock Purchase Plan</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary', window );">Payroll deductions as a percentage of employee's salary</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Number of shares purchased under the plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">100,000<span></span>
</td>
<td class="nump">100,000<span></span>
</td>
<td class="nump">100,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted Stock Units</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Shares/units</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">725,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">220,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Vested (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(397,000)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod', window );">Forfeited (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(10,000)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">538,000<span></span>
</td>
<td class="nump">725,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward', window );"><strong>Weighted-Average Grant Date Fair Value per Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 39.23<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Granted (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">125.11<span></span>
</td>
<td class="nump">$ 55.47<span></span>
</td>
<td class="nump">$ 38.54<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Vested (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">131.71<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue', window );">Forfeited (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51.94<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 77.22<span></span>
</td>
<td class="nump">$ 39.23<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted Stock Units | Employees</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember', window );">Restricted Stock Units | Non-employee members of Board of Director</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember', window );">Stock Option Awards</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Options</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the beginning of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares', window );">Vested (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">750<span></span>
</td>
<td class="nump">750<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,000)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,000<span></span>
</td>
<td class="nump">5,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber', window );">Exercisable (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber', window );">Options Vested at the end of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward', window );"><strong>Weighted Average Exercise Price</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the beginning of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 43.33<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13.75<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at the end of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">61.81<span></span>
</td>
<td class="nump">$ 43.33<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice', window );">Exercisable at the end of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">61.81<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice', window );">Options Vested at the end of the period (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 61.81<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract', window );"><strong>Weighted Average Remaining Contractual Term</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2', window );">Outstanding at the end of the period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years 10 months 24 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1', window );">Exercisable at the end of the period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years 10 months 24 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1', window );">Options Vested at the end of the period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years 10 months 24 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract', window );"><strong>Aggregate Intrinsic Value</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue', window );">Outstanding at the end of the period (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 204<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1', window );">Exercisable at the end of the period (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">102<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue', window );">Options Vested at the end of the period (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">102<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Additional disclosure</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue', window );">Total intrinsic value of options exercised (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">200<span></span>
</td>
<td class="nump">$ 5,400<span></span>
</td>
<td class="nump">$ 12,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember', window );">Stock Option Awards | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Additional disclosure</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions', window );">Total forfeiture adjusted unrecognized compensation cost (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember', window );">Stock Option Awards | Employees</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested', window );">Period after termination to exercise awards that were vested</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">90 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards', window );">Period after termination to retiring employees to exercise vested awards</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember', window );">Stock Option Awards | Non-employee members of Board of Director</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Vesting period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Shares/units</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Vested (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member', window );">Equity incentive plan 2012</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized', window );">Number of shares of common stock originally reserved for future grant</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">9,500,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.001<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant', window );">Number of shares of common stock available for future grants</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">800,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders', window );">Number of shares approved</a></td>
<td class="nump">7,760,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan', window );">Shares from expirations or forfeitures</a></td>
<td class="nump">1,780,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Options</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Shares/units</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Outstanding at the end of the period (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">500,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member', window );">Equity incentive plan 2012 | Restricted Stock Units</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract', window );"><strong>Additional disclosure</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions', window );">Total forfeiture adjusted unrecognized compensation cost (in dollars)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 31,700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1', window );">Weighted-average period over which unrecognized compensation cost is expected to be recognized</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years 8 months 12 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member', window );">Equity incentive plan 2012 | Stock Option Awards</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Options Expiration period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member', window );">Equity incentive plan 2012 | Restricted stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Shares/units</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod', window );">Granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_BenefitOfTaxDeductionsInExcessOfCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The aggregate cash inflow comprised of the amount received from (a) employees to acquire the entity's shares under incentive awards, including stock option exercises and restricted stock arrangements, and (b) the excess tax benefit arising from such transactions.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_BenefitOfTaxDeductionsInExcessOfCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_EmployeeStockPurchasePlanAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_EmployeeStockPurchasePlanAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement which is approved by shareholders.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement as a result of expiration or forfeiture of awards under prior equity plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the estimated annual forfeiture rate of the unvested portion of share-based compensation awards, based on historical analysis.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the offering period over which compensation expense is amortized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the amount of payroll deductions, expressed as a percentage of employees' salary, subject to certain caps set forth in the employee stock purchase plan, through which purchases are made.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the period after termination to exercise share-based awards that were vested.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the period after termination to retiring employees to exercise vested share-based awards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.F)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479830/718-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of cost to be recognized for option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of tax benefit for recognition of expense of award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(03)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(03)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The estimated measure of the percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 35<br> -Paragraph 1D<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480483/718-10-35-1D<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 35<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480483/718-10-35-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(01)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(03)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(01)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(03)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 26: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 27: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 28: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(v)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares authorized for issuance under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Gross number of share options (or share units) granted during the period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(01)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount by which the current fair value of the underlying stock exceeds the exercise price of options outstanding.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(ii)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount by which current fair value of underlying stock exceeds exercise price of fully vested and expected to vest options outstanding. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of fully vested and expected to vest options outstanding that can be converted into shares under option plan. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted-average exercise price, at which grantee can acquire shares reserved for issuance, for fully vested and expected to vest options outstanding. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of vested portions of options outstanding and currently exercisable.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term for vested portions of options outstanding and currently exercisable or convertible, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term for option awards outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 718<br> -SubTopic 10<br> -Subparagraph (e)(1)<br> -Name Accounting Standards Codification<br> -Paragraph 2<br> -Section 50<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining contractual term for fully vested and expected to vest options outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (e)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of options vested.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Purchase price of common stock expressed as a percentage of its fair value.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period as a result of an employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 718<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(02)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480429/718-10-50-2<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 505<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480008/505-10-S99-1<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockUnitsRSUMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_TitleOfIndividualAxis=acls_EmployeesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_TitleOfIndividualAxis=acls_EmployeesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_TitleOfIndividualAxis=acls_NonEmployeeMemberOfBoardOfDirectorMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_TitleOfIndividualAxis=acls_NonEmployeeMemberOfBoardOfDirectorMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=acls_EquityIncentivePlan2012Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>79
<FILENAME>R68.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158771232">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stockholders' Equity (Details) - shares<br> shares in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Number of common stock authorized</a></td>
<td class="nump">75,000<span></span>
</td>
<td class="nump">75,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Number of common stock outstanding</a></td>
<td class="nump">32,685<span></span>
</td>
<td class="nump">32,775<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(16)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -SubTopic 10<br> -Topic 505<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481112/505-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.6-05(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-2<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(4)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 946<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.6-04(16)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479617/946-210-S99-1<br><br>Reference 5: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 946<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 3<br> -Subparagraph (SX 210.6-09(7))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483575/946-220-S99-3<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>80
<FILENAME>R69.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155818512">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Fair Value Measurements (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestments', window );">Short-term investments (U.S. Government Securities and Agency Investments)</a></td>
<td class="nump">$ 338,851<span></span>
</td>
<td class="nump">$ 246,571<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Estimate of fair value measurement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure', window );">Total</a></td>
<td class="nump">457,518<span></span>
</td>
<td class="nump">382,018<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Money market funds, U.S. Government Securities and Agency Investments | Estimate of fair value measurement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure', window );">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</a></td>
<td class="nump">118,278<span></span>
</td>
<td class="nump">136,771<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | U.S. Government Securities and Agency Investments | Estimate of fair value measurement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestments', window );">Short-term investments (U.S. Government Securities and Agency Investments)</a></td>
<td class="nump">339,240<span></span>
</td>
<td class="nump">245,247<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Level 1</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure', window );">Total</a></td>
<td class="nump">457,518<span></span>
</td>
<td class="nump">357,018<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Level 1 | Money market funds, U.S. Government Securities and Agency Investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure', window );">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</a></td>
<td class="nump">118,278<span></span>
</td>
<td class="nump">111,771<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Level 1 | U.S. Government Securities and Agency Investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ShortTermInvestments', window );">Short-term investments (U.S. Government Securities and Agency Investments)</a></td>
<td class="nump">$ 339,240<span></span>
</td>
<td class="nump">245,247<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Level 2</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure', window );">Total</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">25,000<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Recurring | Level 2 | Money market funds, U.S. Government Securities and Agency Investments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure', window );">Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 25,000<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. All of the above and Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-2<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 820<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482106/820-10-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShortTermInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(8))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(4))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShortTermInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementBasisAxis=us-gaap_EstimateOfFairValueFairValueDisclosureMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementBasisAxis=us-gaap_EstimateOfFairValueFairValueDisclosureMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByAssetClassAxis=acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByAssetClassAxis=acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByAssetClassAxis=acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByAssetClassAxis=acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel2Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel2Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>81
<FILENAME>R70.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155686496">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2024</div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract', window );"><strong>Purchase Commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermPurchaseCommitmentAmount', window );">Contracts and purchase orders for inventory and other expenditures</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 304.1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementScenarioAxis=srt_ScenarioForecastMember', window );">Forecast [Member]</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract', window );"><strong>Purchase Commitments</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_LongTermPurchaseCommitmentAmount', window );">Contracts and purchase orders for inventory and other expenditures</a></td>
<td class="nump">$ 293.8<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermPurchaseCommitmentAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The minimum amount the entity agreed to spend under the long-term purchase commitment.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermPurchaseCommitmentAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementScenarioAxis=srt_ScenarioForecastMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementScenarioAxis=srt_ScenarioForecastMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>82
<FILENAME>R71.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847164808464">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment and Geographic Region Information - Number of Segments (Details)<br></strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2023 </div>
<div>segment</div>
</th></tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Business Segment and Geographic Region Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NumberOfReportableSegments', window );">Number of business segments</a></td>
<td class="nump">1<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfReportableSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 18<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-18<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfReportableSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>83
<FILENAME>R72.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158508672">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems', window );"><strong>Revenue by product lines</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 1,130,604<span></span>
</td>
<td class="nump">$ 919,998<span></span>
</td>
<td class="nump">$ 662,428<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_IonImplantationSystemsServicesAndRoyaltiesMember', window );">Ion implantation systems and services</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems', window );"><strong>Revenue by product lines</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">1,111,278<span></span>
</td>
<td class="nump">898,132<span></span>
</td>
<td class="nump">645,504<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_OtherProductsSystemsServicesAndRoyaltiesMember', window );">Other systems and services</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems', window );"><strong>Revenue by product lines</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 19,326<span></span>
</td>
<td class="nump">$ 21,866<span></span>
</td>
<td class="nump">$ 16,924<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Revenues">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Revenues</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_IonImplantationSystemsServicesAndRoyaltiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_IonImplantationSystemsServicesAndRoyaltiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_OtherProductsSystemsServicesAndRoyaltiesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_OtherProductsSystemsServicesAndRoyaltiesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>84
<FILENAME>R73.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155034144">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 1,130,604<span></span>
</td>
<td class="nump">$ 919,998<span></span>
</td>
<td class="nump">$ 662,428<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NoncurrentAssets', window );">Long-Lived Assets</a></td>
<td class="nump">90,904<span></span>
</td>
<td class="nump">69,903<span></span>
</td>
<td class="nump">66,975<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=country_US', window );">United States</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">749,288<span></span>
</td>
<td class="nump">634,081<span></span>
</td>
<td class="nump">519,408<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NoncurrentAssets', window );">Long-Lived Assets</a></td>
<td class="nump">86,482<span></span>
</td>
<td class="nump">66,227<span></span>
</td>
<td class="nump">63,590<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_EuropeMember', window );">Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">45,583<span></span>
</td>
<td class="nump">38,963<span></span>
</td>
<td class="nump">36,622<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NoncurrentAssets', window );">Long-Lived Assets</a></td>
<td class="nump">382<span></span>
</td>
<td class="nump">212<span></span>
</td>
<td class="nump">191<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_AsiaPacificMember', window );">Asia Pacific</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">335,733<span></span>
</td>
<td class="nump">246,954<span></span>
</td>
<td class="nump">106,398<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_NoncurrentAssets', window );">Long-Lived Assets</a></td>
<td class="nump">4,040<span></span>
</td>
<td class="nump">3,464<span></span>
</td>
<td class="nump">3,194<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_srt_StatementGeographicalAxis=us-gaap_NonUsMember', window );">International | Total revenue | Geographic concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems', window );"><strong>Revenue and long-lived assets by geographic region</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_Revenues', window );">Total revenue</a></td>
<td class="nump">$ 950,400<span></span>
</td>
<td class="nump">$ 776,300<span></span>
</td>
<td class="nump">$ 613,500<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of revenue</a></td>
<td class="nump">84.10%<span></span>
</td>
<td class="nump">84.40%<span></span>
</td>
<td class="nump">92.60%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-21<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-20<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-18<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482861/275-10-50-20<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NoncurrentAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Long-lived assets other than financial instruments, long-term customer relationships of a financial institution, mortgage and other servicing rights, deferred policy acquisition costs, and deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NoncurrentAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Revenues">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 323<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481687/323-10-50-3<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 825<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482907/825-10-50-28<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(ii))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1A<br> -Subparagraph (SX 210.13-01(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1A<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(i))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(A))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iii)(B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(4)(iv))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 470<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1B<br> -Subparagraph (SX 210.13-02(a)(5))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480097/470-10-S99-1B<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 42<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-42<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 40<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-40<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-41<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Revenues</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=country_US">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=country_US</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_EuropeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_EuropeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_AsiaPacificMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_AsiaPacificMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=us-gaap_NonUsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=us-gaap_NonUsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_GeographicConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_GeographicConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>85
<FILENAME>R74.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159033360">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Income before Income Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract', window );"><strong>Income (loss) before income taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic', window );">United States</a></td>
<td class="nump">$ 270,842<span></span>
</td>
<td class="nump">$ 198,028<span></span>
</td>
<td class="nump">$ 116,380<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign', window );">Foreign</a></td>
<td class="nump">7,757<span></span>
</td>
<td class="nump">6,857<span></span>
</td>
<td class="nump">4,048<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income before income taxes</a></td>
<td class="nump">$ 278,599<span></span>
</td>
<td class="nump">$ 204,885<span></span>
</td>
<td class="nump">$ 120,428<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(11))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-30<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 5: http://www.xbrl.org/2003/role/exampleRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 31<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-31<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-32<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 942<br> -SubTopic 235<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479557/942-235-S99-1<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 25<br> -Paragraph 1<br> -SubTopic 20<br> -Topic 940<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481913/940-20-25-1<br><br>Reference 9: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 220<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483621/220-10-S99-2<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483589/942-220-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>86
<FILENAME>R75.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159436592">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Provision for Income Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Current:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentFederalTaxExpenseBenefit', window );">Federal</a></td>
<td class="nump">$ 46,871<span></span>
</td>
<td class="nump">$ 8,430<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit', window );">State</a></td>
<td class="nump">1,985<span></span>
</td>
<td class="nump">1,716<span></span>
</td>
<td class="nump">$ 82<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentForeignTaxExpenseBenefit', window );">Foreign</a></td>
<td class="nump">3,498<span></span>
</td>
<td class="nump">3,124<span></span>
</td>
<td class="nump">1,439<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_CurrentIncomeTaxExpenseBenefit', window );">Total current</a></td>
<td class="nump">52,354<span></span>
</td>
<td class="nump">13,270<span></span>
</td>
<td class="nump">1,521<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract', window );"><strong>Deferred:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit', window );">Federal</a></td>
<td class="num">(18,526)<span></span>
</td>
<td class="nump">9,097<span></span>
</td>
<td class="nump">20,521<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit', window );">State</a></td>
<td class="num">(440)<span></span>
</td>
<td class="num">(102)<span></span>
</td>
<td class="nump">406<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit', window );">Foreign</a></td>
<td class="num">(1,052)<span></span>
</td>
<td class="num">(459)<span></span>
</td>
<td class="num">(670)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation', window );">Total deferred</a></td>
<td class="num">(20,018)<span></span>
</td>
<td class="nump">8,536<span></span>
</td>
<td class="nump">20,257<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">$ 32,336<span></span>
</td>
<td class="nump">$ 21,806<span></span>
</td>
<td class="nump">$ 21,778<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations after allocation of valuation allowance.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentFederalTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current national tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentFederalTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentForeignTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentForeignTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CurrentStateAndLocalTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a)<br> -SubTopic 10<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CurrentStateAndLocalTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredFederalIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred national tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredFederalIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredForeignIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredForeignIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h)(1)(Note 1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br><br>Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-9<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-8<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-9<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-10<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -SubTopic 20<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482659/740-20-45-2<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -SubTopic 10<br> -Topic 235<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>87
<FILENAME>R76.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159375264">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Reconciliation of Income Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract', window );"><strong>Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EffectiveIncomeTaxRateContinuingOperations', window );">Effective Federal income tax rate</a></td>
<td class="nump">11.60%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate', window );">Income taxes at the United States statutory rate</a></td>
<td class="nump">$ 58,506<span></span>
</td>
<td class="nump">$ 43,026<span></span>
</td>
<td class="nump">$ 25,290<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes', window );">State income taxes</a></td>
<td class="nump">1,033<span></span>
</td>
<td class="nump">1,075<span></span>
</td>
<td class="nump">387<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance', window );">Effect of change in valuation allowance</a></td>
<td class="nump">1,978<span></span>
</td>
<td class="nump">680<span></span>
</td>
<td class="num">(1,443)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential', window );">Foreign income tax rate differentials</a></td>
<td class="nump">329<span></span>
</td>
<td class="nump">289<span></span>
</td>
<td class="nump">152<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost', window );">Stock based compensation</a></td>
<td class="num">(6,718)<span></span>
</td>
<td class="num">(3,818)<span></span>
</td>
<td class="num">(3,658)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation', window );">Internal revenue code section 162(m) limitation</a></td>
<td class="nump">4,488<span></span>
</td>
<td class="nump">2,692<span></span>
</td>
<td class="nump">1,481<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount', window );">Credit expirations</a></td>
<td class="nump">784<span></span>
</td>
<td class="nump">1,181<span></span>
</td>
<td class="nump">2,342<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate', window );">Rate change</a></td>
<td class="nump">44<span></span>
</td>
<td class="nump">94<span></span>
</td>
<td class="nump">159<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationTaxCredits', window );">Credit generation</a></td>
<td class="num">(6,900)<span></span>
</td>
<td class="num">(4,764)<span></span>
</td>
<td class="num">(3,096)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationOtherReconcilingItems', window );">Discrete items, net</a></td>
<td class="nump">2,161<span></span>
</td>
<td class="nump">206<span></span>
</td>
<td class="nump">72<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount', window );">GILTI inclusion</a></td>
<td class="nump">45<span></span>
</td>
<td class="nump">69<span></span>
</td>
<td class="nump">301<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount', window );">Foreign-derived intangible income</a></td>
<td class="num">(24,052)<span></span>
</td>
<td class="num">(20,526)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxReconciliationOtherAdjustments', window );">Other, net</a></td>
<td class="nump">638<span></span>
</td>
<td class="nump">1,602<span></span>
</td>
<td class="num">(209)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">$ 32,336<span></span>
</td>
<td class="nump">$ 21,806<span></span>
</td>
<td class="nump">$ 21,778<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets attributable to internal Revenue Code 162(m) limitation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to credit expirations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectiveIncomeTaxRateContinuingOperations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Percentage of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectiveIncomeTaxRateContinuingOperations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dtr-types:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of reported income tax benefit from difference to expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operations, attributable to foreign-derived intangible income (FDII).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of reported income tax expense from difference to expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operations, attributable to global intangible low-taxed income (GILTI).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-8<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 250<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 9<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483443/250-10-50-9<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 10<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-10<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479360/740-10-S99-1<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 280<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482810/280-10-50-22<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 944<br> -SubTopic 220<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147483586/944-220-S99-1<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -SubTopic 20<br> -Topic 740<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482659/740-20-45-2<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -SubTopic 10<br> -Topic 235<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations, attributable to increase (decrease) in the income tax rates.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 15<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-15<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationOtherAdjustments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationOtherAdjustments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationOtherReconcilingItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to tax exempt income, equity in earnings (loss) of an unconsolidated subsidiary, minority noncontrolling interest income (loss), tax holiday, disposition of a business, disposition of an asset, repatriation of foreign earnings, repatriation of foreign earnings jobs creation act of 2004, increase (decrease) in enacted tax rate, prior year income taxes, increase (decrease) in deferred tax asset valuation allowance, and other adjustments.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationOtherReconcilingItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit).</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxReconciliationTaxCredits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to tax credits. Including, but not limited to, research credit, foreign tax credit, investment tax credit, and other tax credits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 12<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxReconciliationTaxCredits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>88
<FILENAME>R77.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159061296">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Income Taxes - components of Long Term Deferred Income Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract', window );"><strong>Deferred tax assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal', window );">State net operating loss carryforwards</a></td>
<td class="nump">$ 96<span></span>
</td>
<td class="nump">$ 291<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign', window );">Foreign net operating loss carryforwards</a></td>
<td class="nump">182<span></span>
</td>
<td class="nump">276<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness', window );">Federal tax credit carryforwards</a></td>
<td class="nump">1,999<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal', window );">State tax credit carryforwards</a></td>
<td class="nump">9,560<span></span>
</td>
<td class="nump">8,683<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment', window );">Property, plant and equipment</a></td>
<td class="nump">6,979<span></span>
</td>
<td class="nump">8,755<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxAssetOperatingLeaseLiabilities', window );">Operating lease liability</a></td>
<td class="nump">5,564<span></span>
</td>
<td class="nump">1,564<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent', window );">Accrued compensation</a></td>
<td class="nump">242<span></span>
</td>
<td class="nump">276<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsInventory', window );">Inventories</a></td>
<td class="nump">804<span></span>
</td>
<td class="nump">1,613<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost', window );">Stock compensation</a></td>
<td class="nump">1,790<span></span>
</td>
<td class="nump">1,620<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves', window );">Warranty</a></td>
<td class="nump">3,108<span></span>
</td>
<td class="nump">1,993<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsDeferredIncome', window );">Deferred revenue</a></td>
<td class="nump">6,389<span></span>
</td>
<td class="nump">4,501<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts', window );">Capitalized research and development costs</a></td>
<td class="nump">38,036<span></span>
</td>
<td class="nump">18,067<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent', window );">Gross deferred tax assets</a></td>
<td class="nump">74,749<span></span>
</td>
<td class="nump">47,639<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowance', window );">Valuation allowance</a></td>
<td class="num">(10,963)<span></span>
</td>
<td class="num">(8,370)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsGross', window );">Net deferred tax assets</a></td>
<td class="nump">63,786<span></span>
</td>
<td class="nump">39,269<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract', window );"><strong>Deferred tax liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets', window );">Intangible assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(176)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements', window );">Right-of-use asset</a></td>
<td class="num">(9,155)<span></span>
</td>
<td class="num">(5,400)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxLiabilitiesOther', window );">Other</a></td>
<td class="num">(1,203)<span></span>
</td>
<td class="num">(1,992)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxLiabilities', window );">Gross deferred tax liabilities</a></td>
<td class="num">(10,358)<span></span>
</td>
<td class="num">(7,568)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNet', window );">Deferred taxes, net</a></td>
<td class="nump">$ 53,428<span></span>
</td>
<td class="nump">$ 31,701<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetOperatingLeaseLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from operating lease liabilities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxAssetOperatingLeaseLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from capitalized research and development costs expensed in connection with a business combination.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local tax credit carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxAssetsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxAssetsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(a))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 210<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(26)(b))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480566/210-10-S99-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Topic 942<br> -SubTopic 210<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(2))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147479853/942-210-S99-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsDeferredIncome">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from deferred income.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsDeferredIncome</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsLiabilitiesNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsLiabilitiesNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible foreign operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local operating loss carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from property, plant, and equipment.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible general business tax credit carryforwards.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesLeasingArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences from leasing arrangements.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesLeasingArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxLiabilitiesOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax liability attributable to taxable temporary differences classified as other.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 6<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-6<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-8<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxLiabilitiesOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>89
<FILENAME>R78.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847158546160">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Unrecognized Tax Benefits (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward', window );"><strong>Reconciliation of the beginning and ending balance of unrecognized tax benefits</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at beginning of year</a></td>
<td class="nump">$ 10,443<span></span>
</td>
<td class="nump">$ 9,961<span></span>
</td>
<td class="nump">$ 10,044<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions', window );">Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period</a></td>
<td class="num">(271)<span></span>
</td>
<td class="num">(122)<span></span>
</td>
<td class="num">(546)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities', window );">Decreases in unrecognized tax benefits related to settlements with tax authorities</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(708)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations', window );">Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(472)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions', window );">Increases in unrecognized tax benefits as a result of tax positions taken during the current period</a></td>
<td class="nump">1,754<span></span>
</td>
<td class="nump">1,312<span></span>
</td>
<td class="nump">935<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Balance at end of year</a></td>
<td class="nump">11,926<span></span>
</td>
<td class="nump">10,443<span></span>
</td>
<td class="nump">9,961<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability', window );">Recorded as other long-term liability</a></td>
<td class="nump">8,344<span></span>
</td>
<td class="nump">7,190<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance', window );">Recorded as a decrease in deferred tax assets</a></td>
<td class="nump">$ 3,582<span></span>
</td>
<td class="nump">$ 3,253<span></span>
</td>
<td class="nump">$ 9,961<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10B<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-10B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(3)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(2)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in unrecognized tax benefits resulting from lapses of applicable statutes of limitations.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)(4)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>90
<FILENAME>R79.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847150297088">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Additional Information (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsLiabilitiesNet', window );">Deferred tax assets</a></td>
<td class="nump">$ 53,428<span></span>
</td>
<td class="nump">$ 31,701<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost', window );">Increase in deferred tax asset</a></td>
<td class="nump">20,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowance', window );">Deferred tax assets valuation allowance</a></td>
<td class="nump">10,963<span></span>
</td>
<td class="nump">8,370<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount', window );">Increase in valuation allowance</a></td>
<td class="nump">2,600<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UndistributedEarningsOfForeignSubsidiaries', window );">Cash associated with indefinitely reinvested foreign earnings</a></td>
<td class="nump">11,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefits', window );">Unrecognized tax benefits related to uncertain tax positions</a></td>
<td class="nump">11,926<span></span>
</td>
<td class="nump">10,443<span></span>
</td>
<td class="nump">$ 9,961<span></span>
</td>
<td class="nump">$ 10,044<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability', window );">Recorded as other long-term liability</a></td>
<td class="nump">8,344<span></span>
</td>
<td class="nump">$ 7,190<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense', window );">Interest and penalty expense recognized related to unrecognized tax benefits</a></td>
<td class="nump">$ 500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The amount of increase in deferred tax asset due to capitalized research and development cost.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsLiabilitiesNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsLiabilitiesNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UndistributedEarningsOfForeignSubsidiaries">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 30<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482603/740-30-50-2<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 25<br> -Paragraph 3<br> -Subparagraph (a)(1)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482620/740-10-25-3<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -SubTopic 740<br> -Topic 942<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147481141/942-740-50-1<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -SubTopic 740<br> -Topic 944<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480135/944-740-50-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UndistributedEarningsOfForeignSubsidiaries</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of unrecognized tax benefits.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15A<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 45<br> -Paragraph 10B<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482525/740-10-45-10B<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of expense for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (c)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-15<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 740<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section 50<br> -Paragraph 2<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>91
<FILENAME>R80.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847155438816">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes - Operating Loss Carryforwards (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2023 </div>
<div>USD ($)</div>
</th></tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=acls_FederalMember', window );">Federal</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">$ 0.1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember', window );">Foreign</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">0.2<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_TaxCreditCarryforwardAxis=acls_ResearchDevelopmentAndOtherTaxCreditMember', window );">Research and development and other tax credit carryforwards</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwardsLineItems', window );"><strong>Operating loss carryforwards</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_OperatingLossCarryforwards', window );">Net operating loss carryforwards</a></td>
<td class="nump">15.2<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve', window );">Uncertain tax position</a></td>
<td class="nump">$ 3.0<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of operating loss carryforwards are subject to an uncertain tax position reserve.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwards">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147482685/740-10-50-3<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwards</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLossCarryforwardsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLossCarryforwardsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=acls_FederalMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=acls_FederalMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TaxCreditCarryforwardAxis=acls_ResearchDevelopmentAndOtherTaxCreditMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TaxCreditCarryforwardAxis=acls_ResearchDevelopmentAndOtherTaxCreditMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>92
<FILENAME>R81.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.24.0.1</span><table class="report" border="0" cellspacing="2" id="idm139847159434288">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Schedule II Valuation and Qualifying Accounts (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2023</div></th>
<th class="th"><div>Dec. 31, 2022</div></th>
<th class="th"><div>Dec. 31, 2021</div></th>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=acls_AllowanceForDoubtfulAccountsAndReturnsMember', window );">Allowance for doubtful accounts and returns</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_MovementInValuationAllowancesAndReservesRollForward', window );"><strong>Changes in Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged to Costs and Expenses</a></td>
<td class="nump">$ 1,117<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="nump">657<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">460<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember', window );">Deferred tax valuation allowance</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_MovementInValuationAllowancesAndReservesRollForward', window );"><strong>Changes in Valuation and Qualifying Accounts</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at Beginning of Period</a></td>
<td class="nump">8,370<span></span>
</td>
<td class="nump">$ 7,689<span></span>
</td>
<td class="nump">$ 9,133<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense', window );">Charged to Costs and Expenses</a></td>
<td class="nump">3,196<span></span>
</td>
<td class="nump">1,529<span></span>
</td>
<td class="nump">780<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesDeductions', window );">Deductions</a></td>
<td class="nump">603<span></span>
</td>
<td class="nump">848<span></span>
</td>
<td class="nump">2,224<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_us-gaap_ValuationAllowancesAndReservesBalance', window );">Balance at End of Period</a></td>
<td class="nump">$ 10,963<span></span>
</td>
<td class="nump">$ 8,370<span></span>
</td>
<td class="nump">$ 7,689<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInValuationAllowancesAndReservesRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInValuationAllowancesAndReservesRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesBalance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column B))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-4<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column E))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesBalance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column C)(1))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesDeductions">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in valuation and qualifying accounts and reserves.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Topic 235<br> -SubTopic 10<br> -Name Accounting Standards Codification<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SX 210.12-09(Column D))<br> -Publisher FASB<br> -URI https://asc.fasb.org//1943274/2147480678/235-10-S99-4<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesDeductions</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=acls_AllowanceForDoubtfulAccountsAndReturnsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesTypeAxis=acls_AllowanceForDoubtfulAccountsAndReturnsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>94
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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MR0  !=2>"0"&<3A4/SNM@YQJX%@_P=4)<HJ  A%9SR( [$)W!6M> %@0Q>$
MJTZ$(+<*:0KH(U^)DA]YJ?1EH"_8X@&'D=67;R&<3Z.(F:QLG&X*@X]8N%,C
MV*U&/K9$*HF]SZH=+8@0M@4$P828?0Z 8129[3 !86$XQ*:3(]@M1W[GKCK6
M&)\^IV(:X,!\W %P*")^:#9K !=' 1OHU;@3(!@[&UO'PM.=^K#I!+8U[!0R
MKVUKHWI+QO+6CV&G=[!;[]RD,EN ,3O8A:?B?\JPF0(VBDV9J4 !%)Z>R-G^
MV#MA@]W;-TF6[Y2Y$=B,G@*CIU8"VR@VI=8BM%%X&@VMP4Y08/>VS<-ACW0G
M^;+:&-5IO-W5.KHX.ZU'W=49U5LREK=^<#N=@]TZITYK[[G>S]?Q3?=:R3_Q
MX[ZT6%7AWHC"DTHLOH*Q!39I<,A,"0'!B&\F6@+"&!L00;@30=@M@IH5\%U$
M;75#" K,IQ@0QB@VB0(PBH.AQ=)I)>S62G>E6.X6H-1S6[YZ%8RZ'326MW[4
M.BV&X_]\(H"=,N[581O36S*6M_XQ2J?UB%OK??-8H+'O"1\_9J>2ICDIL8%1
M[+/(7#8 +B!T<#N5=$*/H.\^&R!.K?CJPZ$QO25C>>N'KU.8Y)PMKC,."(B]
M'Q7X$4*F7@)P-,;(?(A+ !RA,6,#A92<G!&Z]=Z#CE&V@!_&W*:O3H1QCPG_
MCW-"TDE-XMY#<YZMCKII-JJW9"QO_;!U&I>X-\V^74GM7:XJS\T]#0"&8XI,
MI0[!PL&#-=*I21)\?Q5U"M)79\&8WI*QO/7#UZE4XE:IYU?1T&J#!*'8/*($
M8#@ :B@$H]9^^NSDM9@-+Y_JUXND'NZN4(=72=J[[2M,'^H7=XS[-^@R.;R(
MU+DYO!?U*2V?LD)Z.5]IE_XTU&,J#Z\:'2Z4V-8OWSP*I<2F_KKFZ9*7%4#_
M?R6$.EY4/]"^\#7_%U!+ P04    "  ;>%Q8\B[?5&(#  !S"P  &    'AL
M+W=O<FMS:&5E=',O<VAE970S+GAM;*U6VW*;,!#]%0W-=)*9)%R-(;6924P[
MS4/:3"[MLP*RH0&)2K*=].N[$H3:@-T\^,4@><^1SM&RVLF:\6>1$2+12UE0
M,34R*:L+TQ1)1DHLSEE%*/PS9[S$$H9\88J*$YQJ4%F8CF7Y9HES:D03/7?+
MHPE;RB*GY)8CL2Q+S%^O2,'64\,VWB;N\D4FU80932J\(/=$/E:W'$9FRY+F
M):$B9Q1Q,I\:E_9%'*IX'? C)VNQ\8Z4DB?&GM7@.IT:EMH0*4@B%0.&QXK,
M2%$H(MC&[X;3:)=4P,WW-_8O6CMH><*"S%CQ,T]E-C4" Z5DCI>%O&/KKZ31
M,U)\"2N$_D7K)M8R4+(4DI4-&'90YK1^XI?&APV [>\ . W Z0*\'0"W ;CO
M!7@-P-/.U%*T#S&6.)IPMD9<10.;>M%F:C3(SZDZ]GO)X=\<<#*:,2I8D:=8
MDA3=2WC F4J!V!S-6 F9E*DC7A%T31-6$G2&'N]C='QT@HY03M%#QI8"TU1,
M3 F[49QFTJQ\5:_L[%C9=M -HS(3Z#--2;I-8(*,5HOSIN7*V<L8D^0<N?8I
M<BS''=C0[/UP9P >OQ]N[U'CMB?C:C[W,"<S= #U M[P JJ@7(@*)V1J )L@
M?$6,Z.,'V[<^#9EW2++X0&1;QGJML=X^]N@;%--\IV<U=J2QJF:N(L?S'1_R
M:;7I1C_,#EQK'&Z'Q?VP,/!'5ANU)6#4"ACMS8SO,B,<)5M)4 M"QP43XN1B
M2-CHD,EP2++X0&1;7OJME_[>9(#+ ZX&"J66<T*35R0YIJ+ ]:64_H(*K#^[
M(4=K9G_C<-V@DR;]D#//&G6BXH$H.PCLX2P9M\K&>Y5=EHS+_$^M!(H&W+!+
MS'-<( H?P (Z @2%&S&=3!M*T9RS$E7-S5X5F)YJ!%!(_#+DP[BW_<#K^- /
M<9U1QX5^C&/O\"!H/0CV>O# ).AE__M>AD0%O=W8ZE;84M6/.7/';J=4Q -1
MMC_>40/"5EFX5]EL0,V0C'"HG+E!Q_M9/\P>AZ[G=Z3TPT(_#+I2S(UVI"1\
MH=LZ 0>PI+*^S=O9MG.\U U39_X*.LJZ ?Q'4[>C-Y@O<BI00>9 :9V/84^\
M;O'J@625;GJ>F(062K]FT!43K@+@_SEC\FV@%FC[[.@O4$L#!!0    ( !MX
M7%B0FT!EL 8  '(<   8    >&PO=V]R:W-H965T<R]S:&5E=#0N>&ULK9EA
M;]LV$(;_"N$56PLDL4A*E-0F!MH$Q0IL:]"TZV=&IF.ADNB2M)/LU^\H.Y(M
M4HR[]4LBV\?3>Q1YSQUU?B_5-[T4PJ"'NFKTQ61IS.KU=*J+I:BY/I,KT< O
M"ZEJ;N"CNIOJE1)\W@ZJJRF)(C:M>=E,9N?M=]=J=B[7IBH;<:V07M<U5X_O
M1"7O+R9X\O3%I_)N:>P7T]GYBM^)&V&^K*X5?)IV7N9E+1I=R@8IL;B8O,6O
M+RFS UJ+OTMQK_>ND0WE5LIO]L.'^<4DLHI$)0IC77#XMQ&7HJJL)]#Q?>=T
MTMW3#MR_?O+^O@T>@KGE6ES*ZFLY-\N+239!<['@Z\I\DO>_BUU B?57R$JW
M?]']SC::H&*MC:QW@T%!73;;__QA-Q%[ W \,H#L!I!C!]#= -H&NE76AG7%
M#9^=*WF/E+4&;_:BG9MV-$13-O8QWA@%OY8PSLPN9:-E5<ZY$7/TCE>\*02Z
ML>XT.D5?;J[0RQ>OT M4-NCS4JXU;^;Z?&K@SG;\M-C=Y=WV+F3D+E>B.$,4
MGR 2$>H9?GG\<'(X? KQ=D&3+FC2^J-C0:^5$HU!7&N(\[4OGJV#V._ [JW7
M>L4+<3&!S:.%VHC)[-=?,(O>^*+[2<X.8J5=K#3D?7;)]1+!4T.%O1#?U^6&
M5Q"\]REN726M*YL -C/,4I*GY]/-?CP>LRQ)\J0S.U :=TKCH-*;I53FU A5
MPVK;"&WJ,9E;/VSO_I1F68(',ETS$K,DQ7Z922<S"<I\6Q1R#<(@B14")O.V
M$B>H$<8G-'$5X#1G\4"H:X99GJ;4+Y1U0EE0Z >8Q,9(50H]*I"Y,QFQ.",#
M@:X9B4D<,;_ M!.8!@5>*['BY1R)!X"2%KI=IM(LA8+,M[]#?<I31U*<4V>E
MNE:4TBCRZ\XZW5E0]V=I>'6$Q,Q]K%&:Y_EPG;IV69JR>&0[Y9W*_)G9!=8K
M\WB"5I#533NY=ONO[+8:71"YHR6!61TJ=JUHSO:6]8%@'/4LBH*2/X)@;LKF
M#E4"T!R8VIVCPX6;8C;0Z3'#!,<CZQ;O01,'A;XOFQ:4^S)'IW3GZW![,SK<
M8SZS-(_)B-:>=3B(E]D?LKG;9E6 BU%E84EO8>#52AP1C"7#?.6Q2I,QH3VH
M<)A45V(A8$O-(?L7LA;(\ ?A?_C4LTACD@U5NF84I]%(^L<]IG"84Q_;#!58
MFRYWXBA)DZ$\'\72?$Q>CR<<YM,V.P7D>6A#,IRS8>[T&4:8LGA,8@\FS(ZJ
MOZJ2WY95:8!0WB(,!P'WHU78S_)V&'0/.QRF75<WK/BC+1J\ ;N\2N)XCU>[
M2%PS1NAH6NNYAL-@ XEJ;;.#K"V1N6VTO#)=8E$<Q\X*]Y@E23Q"7]R##8?)
M]I4K!41[]$IST83C*'=R@VN6D3SW*R,]P$@88!^>R5S$Y1'#3CGHL8II-$)7
MTD.+A*'5Y5<EH#!<>Q<@\;$J9NDP-_CL8 6.U=9DKS,+T^HI-:R@%[!MOER@
MQ0%LY6U5WHVN3.*2"2=X6+[XK @9>_H]P$@88!\/2M>]Y.95ZM()TC!UUH+/
M+(]'6@/20XR$(798PSZGU=-)0;NU-V,[L;Z.*\-TI#0@/=-(F&E]#?-#B\$%
M6$Q9ZDRQQRR!AG9$=$\Y$NZ_>M'S8W:>VV/%C$3#Q.4QHYB.=6*DIQ,)TVF[
M=JM.\G,KPM-^D<B=6M<,&F VMAYZ4)%C.K#G-+KXB:'^RX:8\M@!2^GH N@Y
M1<*<NI1U76Y/,;8G,+*QS8UH"E",7OXEC4"8O?)J#WKVURK(>_3T_QT='COU
M+*11L,B[,;+XMI357"C]6]MYFD=OE4>#3/W1*N]G>3N,NH<L#4/6/G/ EK;!
MGZ 7T5D48:CX%-KP:BU.4)J<1%&$])(K>^"Q-DNIRG_$_ VBY(1ER=,OI=:V
M$FM/1-9&&[BP?3$WZ$H4HKZ%S?ITGMH.3=/_,)1X'X>+=DH'6R9L<SAU/?II
M&/UOY_/2IG+8V?98Z+1LH$U=E;#3O3)=AB=0?V1#)OGLDFBTUJ-[YZIAVG\2
MAL-7<R2X:F""_0>JOAXT3Z+A087'#N,LRT<R)>TY3\.<AY)^7:^K]GA_=[0&
MQ;T22_LF9@,<E=HOW$7Y*<YB1[?/+&?9B.P>^/28)E9[4HA7K$OPC,69<XSI
ML6,L)<D(/6F/>AI&O<.C=O<=+9^YY^G>CMQGZ.W(IWLOA.S;N#^YNBL;#573
M D9&9RFX4-L77-L/1J[:=T2WTAA9MY=+P4&X-8#?%Q)@M?M@7SMUKQEG_P)0
M2P,$%     @ &WA<6)#$$65_ @  -0<  !@   !X;"]W;W)K<VAE971S+W-H
M965T-2YX;6RM55UOFS 4_2L6FZ96ZF("@40=05I33=O#I*C9Q[,+-\&JL9EM
MDFZ_?M= 4-+2-9'V@K_N.3[G&E\G.Z4?3 %@R6,II)E[A;75-:4F*Z!D9J0J
MD+BR5KID%H=Z0TVE@>4-J!0T\/V8EHQ++TV:N:5.$U5;P24L-3%U63+]^P:$
MVLV]L;>?N..;PKH)FB85V\ *[/=JJ7%$>Y:<ER -5Y)H6,^]C^/K1>SBFX ?
M'';FH$^<DWNE'MS@2S[W?"<(!&36,3!LMK  (1P1ROC5<7K]E@YXV-^S?VJ\
MHY=[9F"AQ$^>VV+NS3R2PYK5PMZIW6?H_$2.+U/"-%^R:V.G4X]DM;&J[,"H
MH.2R;=ECEX<#P'CR B#H ,&I@+ #A(W15EECZY99EB9:[8AVT<CF.DUN&C2Z
MX=*=XLIJ7.6(L^E"2:,$SYF%G-PPP60&9.7H#+E8,@W2%F!YQL0E>4_>$DI,
M@;-FWW!)OA6J-DSF)J$6%3E>FG6[W[2[!R_L?@O9B(3C*Q+X03@ 7YP.#X[A
M%//0)R/HDQ$T?.'YR1CRUI)-ALG<];LV%<M@[N'],J"WX*7OWHQC_\.0T_]$
M=N0[['V'_V)'WV6)5PI_MNSABE1,DRT3-9 +/-U<"<&T(17H]LPOAU+1\L\:
M?E<XMJD_\OUQ0K>''E^+.A(_Z<5/SA#?_9:LMH72_ _D0VI;POA QS3R??^)
MVM>BCM1&O=KH?+7<F'I8:?1,0QC$L^B)TJ&HZ30:5AKW2N/SE>([8"S>=2XW
M0W+CD^0.13V72P^*FGM0OC*]X=(0 6O$^:,INM9MD6X'5E5-G;M7%JMFTRWP
M70/M G!]K93=#USI[%_*]"]02P,$%     @ &WA<6$M-A9@W"0  )U(  !@
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M RA: HK&0-$X%)K*>J]<D+>D7K@+CR855*T@%GV$ACC4=])!O?)AKRH1O<)
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MM?ZXY5G!6P6 WS="R-<+=8/#0<W%?P%02P,$%     @ &WA<6,(B1EKT @
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MON+0S[['XUK:\(2NCTV/(N"M=;H>DHE!+53_9IMA#CL)A\D;"=F0D 7>?:'
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ML'LC>)]&4!9KP;4B:$?$>24:NXV\4\(3O*4:ON>+UI"RA5*G5K I#0%8GHN
MY/1+N0ET@>Z3IXT;YP7IB1(+AZ0*YH&$4XH"^3.7V[:<#;C^C CNB]&(9)O[
M+N@$T63HX6A[IZ6F-"SWH5Y(J093'$> @-:+ <W$&0HAK.GVJ[YV_.(=2:"D
M,@B?!:Y;Y7IU&'=';3WM)>4EO!?F*V9*H2Q(+"@UF7[>C\#T8M<;3C=!8.ZU
M(X9A6='_ 8T/('^AZ6 .AB\P_G%6OP!02P,$%     @ &WA<6/J#!@@9)
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ML3MQBG6&Q?>H%<UF@CX9^!E-C*I_M.XS+>3]:G7Z2KS<._)RZ:L0Q0DV6<=
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M-BXF>'2JRKS].A8QA#N_T>5^V_5QZ \NEO<H>0R($.^"0JA'<$-:A"!X)26
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MY47:@963K,N?U^O$%3"QHM(A(1OM!:*2.]@($"G3)WUZ@E#M))(8S=G=V-V
MGB&ZWBI,!*#/(=X(0=%09YN0*PDX]T>?*^SL"CD6 SS ,V)*^,4'ICBJ*&6@
M+NK\R,&*QY:9RKX_ @I4CJ02(?$$'Z'4IALP[Y DRN812$9(C.= 59CF"UX;
M:YL>77QM&)VG-/D1U:(;8Q*Z\W9^SC*I+[CA>Z\M74$=+VH<N^91:8OMQ-^'
M]7/ZQ0Q>Q,!?-_1U/RROKQL\A&ND7GN'-+8=O9^P2SMOA:3(#!LBP].EKI0
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M:*Y[*0^Y%^6] @W)MD.+(?R1WG^^! I#0X;(G[L96;:<4#IE!?,?EXQ3,5<
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M&0(YB]Z='@+2?NY[L9L,WM,Q[!;AUP@^V@-A\\K>W^U_\+AMWO,WRYM?2SY
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MX6W<HQ2J(N.5-<+1\F0PG[X[VV?[:/!3T=IO/0N.9&'M-;]\+$X&$R9$FO+
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MP2"-B^XEV#K>F7&&X@8>'[D^R+$!OB\M[E?M"SOH?T2=_@M02P,$%     @
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M/#T#P^>2WMUH68#.YX8N^6K!!IJ7_/@O4$L#!!0    ( !MX7%C C,R8[PX
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M2K$VT6>&.YDI]1V_?,Q?[XV1(5&(S"(%#G]NQ%M1%$@(V/C;T]QKEL2)\>=
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MSB,P_13H#:>;H+RU=J3CL*UI<*+Q 72^T717@^$+C*.X^ U02P,$%     @
M&WA<6 #HMSNY!0  /Q,  !D   !X;"]W;W)K<VAE971S+W-H965T,C(N>&UL
M[5AK;]LV%/TKA%L4">#:DFS':1X&DG1] .U:-&WWF9*N+:X2J9*4'??7[UY2
MDF4G3EH4VXIA'Q*+%'GNN8]#D3Q;*?W%9 "6W12Y-.>]S-KR9#@T208%-P-5
M@L0W<Z4+;K&I%T-3:N"IFU3DPR@(CH8%%[(W.W-][_7L3%4V%Q+>:V:JHN!Z
M?0FY6IWWPE[3\4$L,DL=P]E9R1=P#?93^5YC:]BBI*( :8223,/\O'<1GER.
M:;P;\%G RG2>&7D2*_6%&J_3\UY A""'Q!("QY\E7$&>$Q#2^%IC]EJ3-+'[
MW*"_<+ZC+S$W<*7R/T1JL_/><8^E,.=5;C^HU2NH_9D07J)RX_ZSE1\;C7LL
MJ8Q513T9&11"^E]^4\>A,^$XV#,AJB=$CK<WY%@^YY;/SK1:,4VC$8T>G*MN
M-I(3DI)R;36^%3C/SEYPH=EGGE? W@(WE0:,N#5G0XO@-&28U$"7'BC: Q1&
M[*V2-C/L-YE"N@TP1%8MM:BA=AG=B_@<D@$;A7T6!='H'KQ1Z^K(X8U^WE4/
M-+X;B'1R8DJ>P'D/A6! +Z$W>_(H/ I.[Z$Y;FF.[T/_$9KW _VN++!P,F![
M$-F31\=1,#KU[Y?NO3!4T@B4,FZ8S8#!39)QN0!6:I$ =G&+0JORE,6 JDP
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MN(BC2<L*GTCLQ0#O2X=VV#](@.&C:_T/4$L#!!0    ( !MX7%BO\CA#X 4
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M7@1^.)V-_?2HYB\"ST^<-1=QDCNC=.GL8G1?6OT-#P'#?I -SX&T4>J*$SI
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M!QZ=U2MQ<(2 %5'O#3-=-F++$"V?<)\&%2-L)BK!)4V2 ,^EH@&&Y"'F 5;
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M=[)D[%X;5^G8<C4A()!(C8#5\ !S($0#*1K?=IA6LZ1.;,_WZ!_,WM5>EEC
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M]##,?X9\(DHL AFE90#K(09Q MK%IT2GM0!UX[X),'WIO\1PR9U84!F#_BY
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MXE<-YD@_!AI+591[3O[/[ G^(]  2YT;6=9U.9$?K<U*(I,^TP;D \*TI5L
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M.U5I#LI62,0]E+-WJ_B\+81Q4(#!!R7]I %$3R_']8@_<G^K?(S-*"H<Z?6
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M6LSH-RWX&^"J$0T2G+_,1>%!T%6>-_!';JWJS>FCVR'OVH%9P3=LN1]E2UT
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M?L2A0P0V^UTB@\Y-OXW(>FS*O+_3>G+ &K8-5A/'L.I"M;3NX?=5Z]H>KWX
M'O$*,*$)AQ15@ZL!9EQ53;5:&%FX1C:7!MNBFV;X'P+*'L#]5$JS65@#]9_-
MY"]02P,$%     @ &WA<6!?BL0.6 @  308  !D   !X;"]W;W)K<VAE971S
M+W-H965T,S(N>&ULK5513]LP$/XK5I@02!%)G+2TT$:B, 0/2 BV\>PFU\;"
ML3/;(?#O=T[:-!.EVL->;-_GN\_?Q;[+K%'ZU10 EKR70IJY5UA;702!R0HH
MF3E3%4C<62E=,HNF7@>FTL#R-J@4 0W#<5 R+KUTUF*/.IVIV@HNX5$34Y<E
MTQ\+$*J9>Y&W!9[XNK ."-)9Q=;P#/9G]:C1"GJ6G)<@#5>2:%C-O:OH8I$X
M_];A%X?&#-;$9;)4ZM49]_G<"YT@$)!9Q\!P>H-K$,(1H8S?&TZO/](%#M=;
M]MLV=\QER0Q<*_'"<UO,O8E'<EBQ6M@GU=S!)I^1X\N4,.U(FLXW1N>L-E:5
MFV!44'+9S>Q]\QT& 9/PBP"Z":"M[NZ@5N4-LRR=:=40[;R1S2W:5-MH%,>E
MNY1GJW&78YQ-[^4;2*LT!^,3B8_@Y =;"C"GL\ BO7,*L@W5HJ.B7U!%E#PH
M:0M#OLL<\K\) M35BZ-;<0MZD/$&LC,21SZA(8T/\,5]LG'+%_]CLOMR[!B2
M_0RN1"Y,Q3*8>U@#!O0;>.GQ430.+P_H2WI]R2'V]!E++J\%$+4BF2HK)5&N
M<1;?*=\G^C#M\=&$AO$E^=\S7@^42]#M%1T$M[.[1S?03SLG7!);J-HPF9O3
M'GYB#;YV"YHS87KT&Z'(CGUG@$23<S^.XAYYP6: GXU46F5@=K')R(_/=V[Q
MR _'T]Z\Y9)C,>5DK51NR(F[!0$6 ?-A+)0#:73J3\/I(#4_I$EO?JJKG=(X
M'/O)A ZS2:B?A.,MLN\E!8,2+T&OVT9F\)74TG;5WJ-]K[SJ6L3.O6NT#TRO
MN31$P I#P[/SD4=TU[PZPZJJ;1A+9;']M,L"^SUHYX#[*Z7LUG ']'^0] ]0
M2P,$%     @ &WA<6)DU]MW7 @  XP8  !D   !X;"]W;W)K<VAE971S+W-H
M965T,S,N>&ULK55M;YLP$/XK%IVJ5D(!#$E(FR#U;=JD58K:;OOLP"6@&IO:
MIFG__<Z0.*F6YL.T#X#O?/?<\_CEF*ZE>M8E@"%O-1=ZYI7&-!=!H/,2:J8'
ML@&!,TNI:F;05*M -PI8T275/*!A. IJ5@DOFW:^N<JFLC6\$C!71+=US=3[
M-7"YGGF1MW4\5*O26$>031NV@D<P/YNY0BMP*$55@]"5%$3!<N9=11?7B8WO
M GY5L-9[8V*5+*1\ML;W8N:%EA!PR(U%8/AYA1O@W (AC9<-IN=*VL3]\1;]
M:Z<=M2R8AAO)?U>%*6=>ZI$"EJSEYD&NO\%&S]#BY9+K[DW6?>QPY)&\U4;6
MFV1D4%>B_[*WS3KL):3A)PETDT [WGVACN4M,RR;*KDFRD8CFAUT4KML)%<)
MNRF/1N%LA7DFFRO<7V7>?3+G3!C"1$'N7MJJP84W/A%X+,Z>V(*#/I\&!@O:
MM"#?@%_WX/03\(B2>RE,J<F=**#X"! @4T>7;NE>TZ.(MY /2!SYA(8T/H(7
M._EQAQ?_L_S!(=D]:'(8U-ZC"]VP'&8>7A0-ZA6\[/0D&H671R@GCG)R##U[
MQ'M9M!R(7))<UHT42%5;JW%B&B<&MF(.R3A>Z/0DI6%\2?[W%_<0Z@6H;A^W
M3KN?]D7_"C^K!#&E;#7*T>?DAU5EGT5;\:(2*^TBOQ :^6E(]QQ1ZH=AY!SW
M+"]1I7K_N#9N/HG\83)V9ISX8YHZ\T8*;53;MQ-DA>N=@][5C\9^.!SNS-"/
MTHDSGZ1A''=,[\JEH9^$B3-'U)]$NW)7>=[6+6<&"NPS>)+RBG6EW<K0D9_$
M\?F>(_;I,-DYYL=.1'^[=VLUC/W).-ISQ!-_-'+T#AW=8*_QU*!677O5*+(5
MIN]!SNLZ^%7?N';A??N_9VI5"4TX+#$U'(R''E%]2^T-(YNNC2VDP:;8#4O\
M"X&R 3B_E-)L#5O _=>R/U!+ P04    "  ;>%Q8]/# [+L"  "]!@  &0
M 'AL+W=O<FMS:&5E=',O<VAE970S-"YX;6RM56UOFS 0_BL6FZI60H68A"9M
M@I2TF]8/E:J^;)\=. (JMIEMFN[?[VP"9%L:3=J^8-_#W7/W^/ QWTKUH@L
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ML;=VPQ(?,Z"= J[OE;(GP6TP/(\V?P%02P,$%     @ &WA<6,PV"MN  @
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M970S."YX;6S%5]MRVS80_14,DZ;V3,T+J(OM2)KQ)6GSD(G&2IUGF%Q1&),
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M4#D'^WPJI5DOW ;-I\7H*U!+ P04    "  ;>%Q8)HV>EYP#   8"P  &0
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M^K('$BHI17U_"5%:64)^J0 _K<+_BT5&;((&R'EC(CD4<*W_F%)<JVDMUS&
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M6XY\M[4? *#<!KM>2VGV Q<@?%*4?P%02P,$%     @ &WA<6%>UC[P*!
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M@NU00 &C/RNV)YR"N$VBTY><5Y"3:"U%@7+"\XH34^Q<2M=?3.T73:W>+](
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M,CPJ\;51:6/Y6:MHWBB*SB@*(W@07)<*OO <\[<$ODFORS$ZYCB/+C(N,1O
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M*48)IM) O-\2P@\#N4#?F O_!U!+ P04    "  ;>%Q86-[U1L,#  #6$0
M&0   'AL+W=O<FMS:&5E=',O<VAE970U-RYX;6RU6-%RFS@4_14-V^FT,VT
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MH036I,CD5[;_&VI!$\T7LTR4OVA?QSH6B@LA65Z#509Y2JM_\EP;T0*XP0L
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MM()Y8C]X _H1DO+MFWR<?8Q G0:HTYA[^;WU7R4J AL$61_BBSN@[B "<A9
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MZ4JH%$3^>Z!7-,]5)HGCWS;IK.M3!?:/7[*_K\E+,G>$TZLJ_YZMQ?9REL[
MFF[(/A>WU>,'VA**5+Y5E?/Z+WALVP8SL-IS415ML$109&7SGSRUA>@%H/!(
M &H#T"  '@O ;0"NB3;(:EK71)#E!:L> 5.M939U4->FCI9LLE(-XQ?!Y*^9
MC!/+CU36@(,S\'XO]HR"3UF9%?L"7!&^!9_W8B/'&9!R#;[7!:'K,_) F1Q@
M<$O5+,G*>U#G %\I*^J6UQE?5?M2@%LB*'A]307)<OY&]O'MRS5X_>H-> 6R
M$GS=5GLNV_.+N9!$%)SYJ@7]K@&-CH"^IJMS@.$?  4(6\*O?CX<'8;/9?FZ
M&J*NAJC.AX_D:TM7M*7+ZW+LR+.<[8*#35:2<D6;RS:N3?+0GES=QF_YCJSH
MY4S>IYRR!SI;_OX;C(,_;<Q'2G90!]S5 ;NR+V4Y0QO!)BJJH]1CY6$9HT@6
M_J$/W)G:$WC8 0]/ 8]LP)NHN <\6N!@ -R9VA-XU &/3@&/;< C W@<!.D
MN#.U)_"X QZ? I[8@,<F<(B&P)VI/8$G'?#D%/#4!CPQ@:,(#H [4WL"3SO@
MJ1/XURV5,K\1E-G@I^9,CS".!_B=/7CB7W3X%V[\E2#YX-EJ8[(PF*31(H@&
M3)Q]>3*!@=;<P,GE(^5<2J <"\H%V%5,.1JK# 8&F[,P2-#P&>3NSY=/ST-
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M?@H'@+0#0'X. )D. *(D-2;K%!8 :0N _"P ,BT #!;!4(G<V7W1:P^ _#P
M,CW (D9&Z:?P $A[ .3G 9#I =(X&K[JNY/[@M<> /EY &1Z@!0FR1#\%!X
M:0^ ?L4#(-,#)&D4&K-G"@^ M = XW@ 9'H B-(X,>;3%"8 :Q. 1S(!V&("
M(I0LAL/C[L^7CS8!V&T"^L.39^0NRS.14>L(8=, )%&:#N^9MEE_L3A*$ZA]
MPB%2K>S8K>S--PKQ\HUB_?*-0HJX5;SQJ.(]5K9#\KUU>;=XUQ_G0+4!>UD#
MPCD55LJFE$N+!H=O-I9F$,$P/C)"6J.Q6Z-O&-V1; V8O,>M\$RMC@VE/M'H
M$)H68.P6X)[7U9,<E%6YVK.C<"-C(J,H42;J$+#9+%Y@> 2Q5EWL5MW#%3DU
M[:T83T@W L^4,-OM?.4.]9W16IBQ6Y@';Q\<G!G?)UGW?5(7 ;S.RH;3&VL]
MW)U"V,2"&!15*;;VPDPA^EB+/G:+_L' J^^ZH]3%W2?$;5U@4Q=9GS5YME=G
M"CN!M9W ;CMA3ANS/J>EH>E#K;EW]VQP'D3#Y1,W%M]/FMIKA&ZO<7HFG&3:
M]C!@"HV%(C<27Z;:A81N%]+N6; R&&D]H>4YQ>I$J#U,.*Z'"4?U,&-E.R2O
M/4SH]C##]:9CFG8B3?,(M_*;9 =";PN"V_Y\(D]')_%(RP\MSRD6,T+MI<)H
MW$D\TO)%2WZ*Q9!0V[+0[:A^>A*[T\#XN#%SA_Y?AO/>SC*UK>\38?=9R27\
MC4P?G">RGJS9*=><B&I7;S:[JX2HBOIP2\F:,M5 _KZI*O%RHO:O=?L5E_\!
M4$L#!!0    ( !MX7%C.@B0O_ (  $L)   9    >&PO=V]R:W-H965T<R]S
M:&5E=#8R+GAM;*U6:V_:,!3]*U963:VT-4\2Z"!2@56;M&I5']MGDUR(U<3.
M; /MOY_M0 I)0*CJE\2/<X[ON;9\/5PS_BPR (E>BIR*D95)65[9MD@R*+"X
M9"50-3-GO,!2=?G"%B4'G!I2D=N>XX1V@0FUXJ$9N^/QD"UE3BC<<22618'Y
MZQARMAY9KK4=N">+3.H!.QZ6> $/()_*.ZYZ=JV2D@*H((PB#O.1=>U>32.-
M-X _!-9BIXVTDQECS[KS,QU9C@X(<DBD5L#JMX()Y+D64F'\VVA:]9*:N-O>
MJM\8[\K+# N8L/PO264VLOH62F&.E[F\9^L?L/'3TWH)RX7YHG6%C4(+)4LA
M6;$AJP@*0JL_?MGD88?@'B)X&X+7) 0'"/Z&X)]*"#:$P&2FLF+R,,42QT/.
MUHAKM%+3#9-,PU;V"=7;_B"YFB6*)^-?H)(FT%<TP2)#-^H4H-DK,J/H\;4$
M=#X%B4DN+A3FZ6&*SL\NT!DB%#UF;"DP3<70EBH0+6<GFT7'U:+>@45=#]TR
M*C.!OM,4TGT!6SFH;7A;&V/OJ.(4DDODNU^0YWA^1T"3T^E>!WUZ.MT]XL:O
M-\4W>O[13>G*:\4+NGGZBK@2)4Y@9*D[0 !?@15__N2&SK>NG'RDV/2#Q/;R
M%=3Y"HZIQ[]+X%@2ND")/L7J=INK@RS0G+,"L7HR/YC62KYGY/5%N8I=)PP'
M0WNUFZ\VJN\'SCYHV@:%CO.FM.>O5_OKO=_?G%!,$SCBKA(/=T(*^E'0,-<!
M&@R\AKDVJ.?TPVYS86TN/&KNQL3_;G-A*R37:V[*I T:]*.&MS8F"OUN:U%M
M+3IQWTS\" L!4B V4S<JA53?HO"29)@N *D*WCRJ*"=X1G(B2;?UJ'74O+ _
M:'IOHT(W\AOFVZ!^&#D-]_9.F2F +TRY%BAA2RJKJ[H>K5\$UZ80-L;'ZJ50
M%?8WF>J9<8OY@E"A_,^5I',9J9!X5;JKCF2E*68S)E5I-,U,O7: :X":GS,F
MMQV]0/U^BO\#4$L#!!0    ( !MX7%B&+49\+@0  (L0   9    >&PO=V]R
M:W-H965T<R]S:&5E=#8S+GAM;*U886^C.!#]*Q:W.K72M8 A!'I)I+;<Z>ZD
ME:KM[NUG!R;!6K!SMM.T__YL("0!A\M)^=* F7GV>YZQ9SK;<?%#%@ *O5<E
MDW.G4&KSX+HR*Z B\IYO@.DO*RXJHO2K6+MR(X#DM5-5NMCS(K<BE#F+63WV
M(A8SOE4E9? BD-Q6%1$?3U#RW=SQG?W %[HNE!EP%[,-6<,KJ&^;%Z'?W XE
MIQ4P23E# E9SY]%_2/W0.-06?U/8R:-G9*@L.?]A7O[,YXYG5@0E9,I $/WS
M!L]0E@9)K^.?%M3IYC2.Q\][]-]K\IK,DDAXYN5WFJMB[L0.RF%%MJ7ZPG=_
M0$MH8O R7LKZ+]HUMM/$0=E6*EZUSGH%%67-+WEOA3AR\*,S#KAUP'V'\(Q#
MT#H$ESJ$K4,MM=M0J75(B2*+F> [)(RU1C,/M9BUMZ9/F=GW5R7T5ZK]U.)%
M\'R;*?2="$&8^D W*2A"2WF+[M"WUQ3=?+I%GQ!EZ&O!MY*P7,Y<I2<V[F[6
M3O+43(+/3.)C])DS54CT&\LA/P5P]8J[9>/]LI_P*&(*V3T*_%\0]G!@6=#S
MY>[8XIY>[NZ/L FZ30AJO.#"3; IW""$=@1S.CS(#<E@[NCTER#>P%G\_),?
M>;_:U+DF6'HEL!/EPDZY< R]4VZW#]\-",ISFX#C0#[Z ")L6HWZ_5^MK@1V
MHM6DTVHR&F7/!6%KD":7I=*)3$2.-GW]2DJ6M*3V&)Q<,P:O"99>">Q$UZC3
M-1H-G2=2$I8!(@K]1=A6WY[(1S=+6%/&*%LCOJICZ]:F:(,\J9'-%?VV\+TP
MGL[<MV.IAE91@L-3HW1H%$8^[HQ.J$T[:M-1:NV!1$W42+F%'.5;83BI D92
MK0&-CEGA. EZK"Q6WB3I<4^'5M/8B^VTXHY6/$I+5S.J!%V]**GOTAPN8Q4/
M5G+GZ]O'Z]&RF$73).[1LEB%.#ZS74G'*QGE=93A(!7551&8Z.MR&NDZ4:<\
MW,$[U=\UX]UA@R_2(!DL.XB\?K@.C>YP$/4$L!CYV _M OC>H9SQ+DW&5]@H
MJ)8@4."A&V"YT:*A9LW%%ODD(*/II,_.9C;,V=1B=I*TI_R.RC7_HE*A.["S
MDDA)5S0CIHZV\O*O>6Q?%2V]%MJIFOB@)AZ-EL>*;YGJ--3G&Y&ZZA9"'PU6
M*?%P[T.OG]S/%K,8)TD_0H9647@V0@ZUI#]:<-DYE9RM[Q2("MWLJ"KT <%U
MHHNC\?TAH8\">W8$@]7B:)+TF5NL_+A_^%FL)IYWAOBA%/3'2[BO7)'RPDJF
MA9K\5ZY;S&RY/C2SY+I[U*55(-9UMZO#S6Q7T_ETHUU'_5CWD;WQ)]-IU]W?
M :9ITS\3H:L.O=VPTI#>_50O232=;_.B^*;N!9=<Z<ZR?BQ WX#"&.CO*\[5
M_L5,T/W_8?$O4$L#!!0    ( !MX7%BYB]'.] 0  -,F   9    >&PO=V]R
M:W-H965T<R]S:&5E=#8T+GAM;+6:_V_B-AB'_Q6+G:8[:==\@5#: =*5Q-JF
MGE:UN]O/)GD!JTG,.0:*M#]^=D@#*:E'I'>_E 3R/D[R-';\D<<[(9^+%8 B
M+UF:%Y/>2JGUK>,4\0HR5ER)->3ZEX60&5-Z5RZ=8BV!)651ECJ^ZPZ=C/&\
M-QV7WSW(Z5AL5,IS>)"DV&09D_L[2,5NTO-ZKU\\\N5*F2^<Z7C-EO $ZMOZ
M0>H]IZ8D/(.\X"(G$A:3WA?OEOJN*2B/^,YA5YQL$W,I<R&>S<[OR:3GFC."
M%&)E$$Q_;&$&:6I(^CQ^5-!>W:8I/-U^I=/RXO7%S%D!,Y'^S1.UFO1&/9+
M@FU2]2AVOT%U08'AQ2(MRK]D=S@VT ?'FT*)K"K69Y#Q_/#)7JH;<5+@#=XI
M\*L"_]*"?E70O[1@4!4,+BT(JH+@TH)A53 L[_WA9I5W.F2*3<=2[(@T1VN:
MV2AUE=7Z!O/<_&<]*:E_Y;I.32G/61[S?$F^2,GR)>C_&E60CR$HQM/B$_E,
MOCV%Y..'3^0#X3GY:R4V!<N38NPHW;R!.''5U-VA*?^=IOY@^17IN[\0W_6"
MEO*9O3R$6)=[IMSOMY2'%Y3[HW?+(WOYE[6\(F[P;CF]_.3]9KFCC=7:_%J;
M7_+ZG;2U.3EP!NT<TV_=%FL6PZ2G.Z8"Y!9ZTY]_\H;NKVV&,&$A)BS"A%$D
M6,-LOS;;M]&G]R)??E8@,[(H'0-)0?><1,Q3OF2F-VZS;&5VM7R !27,C$S;
MZ: _O!Z,G>VI/LPF(TP8;3G_P!L%]?DWO QJ+P.K%_IJ@[,Y3[GB4.C^64K]
MW+4)L<*Z"CG AB<7Y 6>]\8'9HL1)HP.SGQXOG_3KB.H=016'4\LK9Z,.8N?
M_^/IL**ZRL"$A9BP"!-&D6 -N<-:[A!I=!MBFL6$A9BP"!-&D6 -L]>UV>O_
M872S,KM:OC[K3 >!GH>]Z4TQFXPP810)UM WJO6-, =!*ZRKMU'+('BF#;/%
M"!-&D6 -;3>UMAO[8 E:$E=[/>5>BX*WNK(2NKJZ.7,5W)RYPFPQPH11)%C#
ME><>9^2NU=8=;$&F>_(@Q1JDMO;G+@=)[N]GK7-N*ZRK.%1:B$J+4&D4B]:4
M?!*[>$BO.!4(2S F+42E1:@TBD5K"CX&-)XU);BHS[4C.JOUS^99+;TN:IL1
M*HUBT9K*CLF+9X]>WN]XR3_D;L/31#^OK1Y1XQ=46HA*BU!I%(O6]'U,=+P!
M5A^,&N>@TD)46H1*HUBTIN!C1N390R+](,< 24$64F2D,)&16)!8R+603 %9
M 4M^;)C4$])V[<%YDC@ZZU)G]K/H[!,U$T*E42Q:T^<Q%O*LV<3TOLP*3'S0
M:LM>[/MD#ZQ5],Q>VMD@:O:#2J-8M*;!8_SCV?.?)Y[R6.3D.TM3V),[EC_K
ML?41MB+=FHXXEI!P118L-O'"OE4S:AJ$2@M1:1$JC6+1FN:/R9$WPAIL46,C
M5%J(2HM0:12+UA1\S)@\>\CTE;WP;).1N9"ZMGR8F6[.3($V>:+?H]4*+GJ^
M49,H5%J(2HLJ6N/UPG7?OEY0K$:;"PV.<91OCZ/N0>D1MWQQ*N6U+C) #:%0
M:6%%LT^+(]0V*1;MH,PY6=YCEGM]97+)\X*DL-!X]^I:7YL\K* Z["BQ+E?\
MS(52(BLWS:LN2'. _GTAA'K=,8N(ZG5LTW\!4$L#!!0    ( !MX7%CR0()\
MFP,  ($0   9    >&PO=V]R:W-H965T<R]S:&5E=#8U+GAM;,U878_:.A#]
M*U9:776E+OD"]N,"TK+I52MU);3;]CZ;,(!5QTYM!]A_?VTGA"0-Z2+EX;Z0
MV)DYF7/&GGB8[+GX*;< "AT2RN34V2J5WKNNC+>08#G@*3#]9,U%@I4>BHTK
M4P%X99T2Z@:>-W833)@SF]BYA9A->*8H8; 02&9)@L7K'"C?3QW?.4X\D\U6
MF0EW-DGQ!EY ?4\70H_<$F5%$F"2<(8$K*?.@W\?^8%QL!8_".QEY1X9*DO.
M?YK!E]74\4Q$0"%6!@+KRPX>@5*#I./X58 ZY3N-8_7^B/Z/):_)++&$1T[_
M)2NUG3JW#EK!&F=4/?/]9R@(C0Q>S*FTOVA?V'H.BC.I>%(XZP@2PO(K/A1"
M5!S\\1F'H' (F@[#,PYAX1"^U6%8. RM,CD5JT.$%9Y-!-\C8:PUFKFQ8EIO
M39\PD_<7)?13HOW4[%.24OX*@.; 8$T46E#,)+I&D1XQ6*%'SI0@R\QFR3Q$
M'R)0F%!YI:V^OT3HP_LK]!X1AIX(I=I*3ERE(S/X;EQ$,<^C",Y$X0?H2;]G
M*]$GMH)5'<#5E$I>P9'7/.A$C" >H-#_B (O"%L">GR[>]#B'KW=W>]@$Y99
M"BU>>!;O3#+:I,ZAANU0IH[<RQ3','5TH9 @=N#,_GKGC[V_VV3J$RSJ":PF
MX;"4<-B%?ESH L5'#;6>RU<$E&S(D@)*L5 D)BEFJG4%Y_!^OI%,.=W-O,%H
MXNZJ<KW%*/J#48W>J*0WZJ2W$'"M\$&S2_0G06*[0BI4VQB-VN+PQ@U*G>^]
M= 7T!%:3:%Q*-.Z4Z+B)XNHF2DU%@X/1#%K3GF/>530*!\.&1+_;!(.;1M+;
M;(+VG-^4A&XZ"3W#)J-8("AJ>&O\G1"75H,^P:*>P&K2W9;2W?974&_[E+!/
ML*@GL)J$=Z6$=YVK[PD?2)(EC>T$I^6(,OTM%TAM 3T<8EUG)?K*V>;Z&X@$
M?6$[D$H?(%5QJ, 28>,>ZZFKMBS<M56KL%F .V.^5-Z>P&KR^M[I9.9U"OQ9
M'UGIZZFBZ^7:N=.[X2Y=I[VB17VAU:6L''+]_K9[@=67CGVB17VAU74,3CH&
M_ZL]7X33V/1^\XC2'?7%&O>$EFOL5GJS!,3&]KA2*Y@QE;<SY6S91S_8[K$Q
M/S?]M>WY3C!Y<_Z$Q8;HIHW"6D-Z@QM]RA)YOYL/%$]M![CD2O>3]G8+6"?*
M&.CG:\[5<6!>4/[K,/L/4$L#!!0    ( !MX7%@G:R,?S@(  )\(   9
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M:  #FYG:BLU#@A6.1X)OD##1FLT\V&1:M+9/F"G[7 E]2C1.Q3=E1?D3 )H
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M'C?VL=!?$"!,@#[/.5>[A;F@_2:)_P%02P,$%     @ &WA<6#?7:#=%$@
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M#J4)%,T47!M6G@M]^/&@AA64%D!I'$H3*)HI<V/>%1WS\R%\29/]OADQ;7D
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MB-K9\6EGY^I%^5])_.K\II\=I'I]7,YN>)^HI7R+#T&4RE6>I%;AH5X/E!9
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MKWW/N>>8W!NW0NY5":#1'6>52G"I=;WT/)65P(F:B!HJ<U,(R8DVH=QYJI9
M<@?BS M\?^YQ0BN<QNYL+=-8-)K1"M82J89S(N\O@8DVP5-\/+BANU+; R^-
M:[*##>BO]5J:R!M8<LJA4E142$*1X'?3Y2JR^2[A&X56G>R1=;(58F^#CWF"
M?2L(&&3:,A"S'& %C%DB(^.VY\1#20L\W1_9/SCOQLN6*%@)]IWFNDSP!48Y
M%*1A^D:TU]#[F5F^3##E?E';Y<Y]C+)&:<%[L%' :=6MY*Y_AQ/ -'H$$/2
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M(E9!\;8QM1/)&E.J%TRJPF^&I>KEP#5 [2\9D[N)/J#_=Y#^!5!+ P04
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M!5P#U/T58_(XT L,I[C%_U!+ P04    "  ;>%Q8?173C]($  "_$@  &0
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M!+K!?D"_.)NMX,2>:9ST0^20FH2SH.?:L(W_LY2$!UUI>#$'%/OXM^,+>WK
M5&V2G2JLR^[&,SPY1^/1-.ISX9"*1OTP.Z0<<?8/FO 2Y,Y>9A1)1<UUT\!V
ML]V%Z;.])O3F5^8B99O[-YCF%O:52FQ&%"E@BY#!]01-DLW%IAEH4=E6?R,T
M7ASL:XZ709!& +]OA="O [- =[U<_@M02P,$%     @ &WA<6#A2A;K] P
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MF3-V2 )KNN/F61[^A')"0\L72Z[S7W(H8D<CA\0[;616@C&#C(GBGQY+(4X
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M4Z )*!N ]]=2FO<3.T#U667^'U!+ P04    "  ;>%Q8RK1-N]8"  "O"0
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M^E75[:":&%FXCOPH#?9W-\SP1@7*;L#G,RG->F(=-'>T^ ]02P,$%     @
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M':5_'<?VD-/IKV,BM'I;Z/EQ:%0*CMQC)8QQ8K3^-8+)#^Q^ %!+ P04
M"  ;>%Q8E]JRVC<&  !C-0  #P   'AL+W=O<FMB;V]K+GAM;,6;6V_;-A2
M_PKAEW5 ,L>ZND53()=F,Y V69UUCP,CT3%1B?1(*JG[ZW<DQ>Z1ZQ[LY<0O
MB27+\F?>OG-(ZNV3=5_NK?TBOM:5\:>C90BK-^.Q+Y:JEOXWNU(&WEE85\L
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MY$<9&J=:IO/&:Z,\;H93@FO*RS5OZEJZ=5>C^L%H^)B$0?*L*&P#@R2"?$U
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M<R]W;W)K8F]O:RYX;6PN<F5L<\W:2VZC0!2%X:U8+""X;MT':<49]2335C:
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M[S\Y?G[6@^O&EWPV_Q_]^C=02P$"% ,4    "  ;>%Q8!T%-8H$   "Q
M$               @ $     9&]C4')O<',O87!P+GAM;%!+ 0(4 Q0    (
M !MX7%AI(N+T[@   "L"   1              "  :\   !D;V-0<F]P<R]C
M;W)E+GAM;%!+ 0(4 Q0    ( !MX7%B97)PC$ 8  )PG   3
M  "  <P!  !X;"]T:&5M92]T:&5M93$N>&UL4$L! A0#%     @ &WA<6(&G
ME."E!P  *3(  !@              ("!#0@  'AL+W=O<FMS:&5E=',O<VAE
M970Q+GAM;%!+ 0(4 Q0    ( !MX7%B=M@"7]@8  /PE   8
M  " @>@/  !X;"]W;W)K<VAE971S+W-H965T,BYX;6Q02P$"% ,4    "  ;
M>%Q8\B[?5&(#  !S"P  &               @($4%P  >&PO=V]R:W-H965T
M<R]S:&5E=#,N>&UL4$L! A0#%     @ &WA<6)";0&6P!@  <AP  !@
M         ("!K!H  'AL+W=O<FMS:&5E=',O<VAE970T+GAM;%!+ 0(4 Q0
M   ( !MX7%B0Q!%E?P(  #4'   8              " @9(A  !X;"]W;W)K
M<VAE971S+W-H965T-2YX;6Q02P$"% ,4    "  ;>%Q82TV%F#<)   G4@
M&               @(%')   >&PO=V]R:W-H965T<R]S:&5E=#8N>&UL4$L!
M A0#%     @ &WA<6-QF_*78"   M"D  !@              ("!M"T  'AL
M+W=O<FMS:&5E=',O<VAE970W+GAM;%!+ 0(4 Q0    ( !MX7%C"(D9:] (
M 'T&   8              " @<(V  !X;"]W;W)K<VAE971S+W-H965T."YX
M;6Q02P$"% ,4    "  ;>%Q8^H,&"!DD  !,=0  &               @('L
M.0  >&PO=V]R:W-H965T<R]S:&5E=#DN>&UL4$L! A0#%     @ &WA<6(BB
M4]\H"   U!4  !D              ("!.UX  'AL+W=O<FMS:&5E=',O<VAE
M970Q,"YX;6Q02P$"% ,4    "  ;>%Q8.G#.]0<#  #P!P  &0
M    @(&:9@  >&PO=V]R:W-H965T<R]S:&5E=#$Q+GAM;%!+ 0(4 Q0    (
M !MX7%A?,J%?H08  !(2   9              " @=AI  !X;"]W;W)K<VAE
M971S+W-H965T,3(N>&UL4$L! A0#%     @ &WA<6##ZQ.<O!   ' H  !D
M             ("!L'   'AL+W=O<FMS:&5E=',O<VAE970Q,RYX;6Q02P$"
M% ,4    "  ;>%Q8%D%//"4#  #?!P  &0              @($6=0  >&PO
M=V]R:W-H965T<R]S:&5E=#$T+GAM;%!+ 0(4 Q0    ( !MX7%CU(NBD=0,
M )$(   9              " @7)X  !X;"]W;W)K<VAE971S+W-H965T,34N
M>&UL4$L! A0#%     @ &WA<6'=(UL"V#   BRT  !D              ("!
M'GP  'AL+W=O<FMS:&5E=',O<VAE970Q-BYX;6Q02P$"% ,4    "  ;>%Q8
M8@?U_J8$   ;#   &0              @($+B0  >&PO=V]R:W-H965T<R]S
M:&5E=#$W+GAM;%!+ 0(4 Q0    ( !MX7%CHJD:HK 4  % -   9
M      " @>B-  !X;"]W;W)K<VAE971S+W-H965T,3@N>&UL4$L! A0#%
M  @ &WA<6)T,[=2J!   U0L  !D              ("!RY,  'AL+W=O<FMS
M:&5E=',O<VAE970Q.2YX;6Q02P$"% ,4    "  ;>%Q8P(S,F.\.   7,P
M&0              @(&LF   >&PO=V]R:W-H965T<R]S:&5E=#(P+GAM;%!+
M 0(4 Q0    ( !MX7%C5@[;I;P(  )8%   9              " @=*G  !X
M;"]W;W)K<VAE971S+W-H965T,C$N>&UL4$L! A0#%     @ &WA<6 #HMSNY
M!0  /Q,  !D              ("!>*H  'AL+W=O<FMS:&5E=',O<VAE970R
M,BYX;6Q02P$"% ,4    "  ;>%Q8;S53^2T$  " "0  &0
M@(%HL   >&PO=V]R:W-H965T<R]S:&5E=#(S+GAM;%!+ 0(4 Q0    ( !MX
M7%BO\CA#X 4  ,00   9              " @<RT  !X;"]W;W)K<VAE971S
M+W-H965T,C0N>&UL4$L! A0#%     @ &WA<6$4"76^8#0  %2X  !D
M         ("!X[H  'AL+W=O<FMS:&5E=',O<VAE970R-2YX;6Q02P$"% ,4
M    "  ;>%Q84J1. >L"  "E"@  &0              @(&RR   >&PO=V]R
M:W-H965T<R]S:&5E=#(V+GAM;%!+ 0(4 Q0    ( !MX7%@GV&X\%"4  -1\
M   9              " @=3+  !X;"]W;W)K<VAE971S+W-H965T,C<N>&UL
M4$L! A0#%     @ &WA<6'\5 ZAE!   $ T  !D              ("!'_$
M 'AL+W=O<FMS:&5E=',O<VAE970R."YX;6Q02P$"% ,4    "  ;>%Q8/>]#
M[Z$#  #?"P  &0              @(&[]0  >&PO=V]R:W-H965T<R]S:&5E
M=#(Y+GAM;%!+ 0(4 Q0    ( !MX7%C^B4WC@P(  (4&   9
M  " @9/Y  !X;"]W;W)K<VAE971S+W-H965T,S N>&UL4$L! A0#%     @
M&WA<6%PMA6D4 P  Y0@  !D              ("!3?P  'AL+W=O<FMS:&5E
M=',O<VAE970S,2YX;6Q02P$"% ,4    "  ;>%Q8%^*Q Y8"  !-!@  &0
M            @(&8_P  >&PO=V]R:W-H965T<R]S:&5E=#,R+GAM;%!+ 0(4
M Q0    ( !MX7%B9-?;=UP(  .,&   9              " @64" 0!X;"]W
M;W)K<VAE971S+W-H965T,S,N>&UL4$L! A0#%     @ &WA<6/3PP.R[ @
MO08  !D              ("!<P4! 'AL+W=O<FMS:&5E=',O<VAE970S-"YX
M;6Q02P$"% ,4    "  ;>%Q8\<ZT\8X'   '(   &0              @(%E
M" $ >&PO=V]R:W-H965T<R]S:&5E=#,U+GAM;%!+ 0(4 Q0    ( !MX7%@Q
MVYZ>5@,  "H)   9              " @2H0 0!X;"]W;W)K<VAE971S+W-H
M965T,S8N>&UL4$L! A0#%     @ &WA<6,PV"MN  @  208  !D
M     ("!MQ,! 'AL+W=O<FMS:&5E=',O<VAE970S-RYX;6Q02P$"% ,4
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M+GAM;%!+ 0(4 Q0    ( !MX7%B3^;0+@P(  ,\&   9              "
M@58J 0!X;"]W;W)K<VAE971S+W-H965T-#(N>&UL4$L! A0#%     @ &WA<
M6 #\ZC;>!   +R4  !D              ("!$"T! 'AL+W=O<FMS:&5E=',O
M<VAE970T,RYX;6Q02P$"% ,4    "  ;>%Q8-_P-36,$  "+'@  &0
M        @($E,@$ >&PO=V]R:W-H965T<R]S:&5E=#0T+GAM;%!+ 0(4 Q0
M   ( !MX7%AZ8L:GC (  %X(   9              " @;\V 0!X;"]W;W)K
M<VAE971S+W-H965T-#4N>&UL4$L! A0#%     @ &WA<6%>UC[P*!   W X
M !D              ("!@CD! 'AL+W=O<FMS:&5E=',O<VAE970T-BYX;6Q0
M2P$"% ,4    "  ;>%Q8H&14J54#  "-#   &0              @('#/0$
M>&PO=V]R:W-H965T<R]S:&5E=#0W+GAM;%!+ 0(4 Q0    ( !MX7%AVO [M
MBP0   ,>   9              " @4]! 0!X;"]W;W)K<VAE971S+W-H965T
M-#@N>&UL4$L! A0#%     @ &WA<6&:HGI\9!    A<  !D
M ("!$48! 'AL+W=O<FMS:&5E=',O<VAE970T.2YX;6Q02P$"% ,4    "  ;
M>%Q8V\/[PNL"  #Y"   &0              @(%A2@$ >&PO=V]R:W-H965T
M<R]S:&5E=#4P+GAM;%!+ 0(4 Q0    ( !MX7%A<"$WVN ,   41   9
M          " @8-- 0!X;"]W;W)K<VAE971S+W-H965T-3$N>&UL4$L! A0#
M%     @ &WA<6'-?WR!X @  X04  !D              ("!<E$! 'AL+W=O
M<FMS:&5E=',O<VAE970U,BYX;6Q02P$"% ,4    "  ;>%Q825-AJWH"  #,
M!@  &0              @($A5 $ >&PO=V]R:W-H965T<R]S:&5E=#4S+GAM
M;%!+ 0(4 Q0    ( !MX7%A>JRS/@0(  -L&   9              " @=)6
M 0!X;"]W;W)K<VAE971S+W-H965T-30N>&UL4$L! A0#%     @ &WA<6/"1
MF%8V P  <@P  !D              ("!BED! 'AL+W=O<FMS:&5E=',O<VAE
M970U-2YX;6Q02P$"% ,4    "  ;>%Q8G/ @&=T#  "D$P  &0
M    @('W7 $ >&PO=V]R:W-H965T<R]S:&5E=#4V+GAM;%!+ 0(4 Q0    (
M !MX7%A8WO5&PP,  -81   9              " @0MA 0!X;"]W;W)K<VAE
M971S+W-H965T-3<N>&UL4$L! A0#%     @ &WA<6*E_E#Y7 @  XP<  !D
M             ("!!64! 'AL+W=O<FMS:&5E=',O<VAE970U."YX;6Q02P$"
M% ,4    "  ;>%Q8'%B.M+X#  ">#0  &0              @(&39P$ >&PO
M=V]R:W-H965T<R]S:&5E=#4Y+GAM;%!+ 0(4 Q0    ( !MX7%@-32X!B00
M +P7   9              " @8AK 0!X;"]W;W)K<VAE971S+W-H965T-C N
M>&UL4$L! A0#%     @ &WA<6.IQ6Q]%!@  NR@  !D              ("!
M2' ! 'AL+W=O<FMS:&5E=',O<VAE970V,2YX;6Q02P$"% ,4    "  ;>%Q8
MSH(D+_P"  !+"0  &0              @('$=@$ >&PO=V]R:W-H965T<R]S
M:&5E=#8R+GAM;%!+ 0(4 Q0    ( !MX7%B&+49\+@0  (L0   9
M      " @?=Y 0!X;"]W;W)K<VAE971S+W-H965T-C,N>&UL4$L! A0#%
M  @ &WA<6+F+T<[T!   TR8  !D              ("!7'X! 'AL+W=O<FMS
M:&5E=',O<VAE970V-"YX;6Q02P$"% ,4    "  ;>%Q8\D""?)L#  "!$
M&0              @(&'@P$ >&PO=V]R:W-H965T<R]S:&5E=#8U+GAM;%!+
M 0(4 Q0    ( !MX7%@G:R,?S@(  )\(   9              " @5F' 0!X
M;"]W;W)K<VAE971S+W-H965T-C8N>&UL4$L! A0#%     @ &WA<6#?7:#=%
M$@  U\X  !D              ("!7HH! 'AL+W=O<FMS:&5E=',O<VAE970V
M-RYX;6Q02P$"% ,4    "  ;>%Q8N,QW\CH"  "Z!0  &0
M@(':G $ >&PO=V]R:W-H965T<R]S:&5E=#8X+GAM;%!+ 0(4 Q0    ( !MX
M7%@9F/&*6 0  *T<   9              " @4N? 0!X;"]W;W)K<VAE971S
M+W-H965T-CDN>&UL4$L! A0#%     @ &WA<6+P068*X @  T0@  !D
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M=#<T+GAM;%!+ 0(4 Q0    ( !MX7%B26O,8D@,  -$-   9
M  " @6^T 0!X;"]W;W)K<VAE971S+W-H965T-S4N>&UL4$L! A0#%     @
M&WA<6'T5TX_2!   OQ(  !D              ("!.+@! 'AL+W=O<FMS:&5E
M=',O<VAE970W-BYX;6Q02P$"% ,4    "  ;>%Q8^O.,9+P$  #;$@  &0
M            @(%!O0$ >&PO=V]R:W-H965T<R]S:&5E=#<W+GAM;%!+ 0(4
M Q0    ( !MX7%BBX3WR$00  &H.   9              " @33" 0!X;"]W
M;W)K<VAE971S+W-H965T-S@N>&UL4$L! A0#%     @ &WA<6#A2A;K] P
M8A$  !D              ("!?,8! 'AL+W=O<FMS:&5E=',O<VAE970W.2YX
M;6Q02P$"% ,4    "  ;>%Q8RK1-N]8"  "O"0  &0              @(&P
MR@$ >&PO=V]R:W-H965T<R]S:&5E=#@P+GAM;%!+ 0(4 Q0    ( !MX7%CM
M/&#*M0,  %@0   9              " @;W- 0!X;"]W;W)K<VAE971S+W-H
M965T.#$N>&UL4$L! A0#%     @ &WA<6+.'<^U% P  RA0   T
M     ( !J=$! 'AL+W-T>6QE<RYX;6Q02P$"% ,4    "  ;>%Q8EXJ[',
M   3 @  "P              @ $9U0$ 7W)E;',O+G)E;'-02P$"% ,4
M"  ;>%Q8E]JRVC<&  !C-0  #P              @ $"U@$ >&PO=V]R:V)O
M;VLN>&UL4$L! A0#%     @ &WA<6*N<,4MN @  VB\  !H
M ( !9MP! 'AL+U]R96QS+W=O<FMB;V]K+GAM;"YR96QS4$L! A0#%     @
M&WA<6$3DWU@> @  ERX  !,              ( !#-\! %M#;VYT96YT7U1Y
><&5S72YX;6Q02P4&     %D 60!F&   6^$!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>95
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>96
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>98
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.24.0.1</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>209</ContextCount>
  <ElementCount>421</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>65</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>6</UnitCount>
  <MyReports>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>00090 - Document - Document and Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document and Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R2.htm</HtmlFileName>
      <LongName>00100 - Statement - Consolidated Statements of Operations</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations</Role>
      <ShortName>Consolidated Statements of Operations</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>2</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R3.htm</HtmlFileName>
      <LongName>00200 - Statement - Consolidated Statements of Comprehensive Income</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome</Role>
      <ShortName>Consolidated Statements of Comprehensive Income</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>3</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R4.htm</HtmlFileName>
      <LongName>00300 - Statement - Consolidated Balance Sheets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedBalanceSheets</Role>
      <ShortName>Consolidated Balance Sheets</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>4</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R5.htm</HtmlFileName>
      <LongName>00305 - Statement - Consolidated Balance Sheets (Parenthetical)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical</Role>
      <ShortName>Consolidated Balance Sheets (Parenthetical)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>5</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R6.htm</HtmlFileName>
      <LongName>00400 - Statement - Consolidated Statements of Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity</Role>
      <ShortName>Consolidated Statements of Stockholders' Equity</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>6</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R7.htm</HtmlFileName>
      <LongName>00500 - Statement - Consolidated Statements of Cash Flows</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows</Role>
      <ShortName>Consolidated Statements of Cash Flows</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>7</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R8.htm</HtmlFileName>
      <LongName>10101 - Disclosure - Nature of Business</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureNatureOfBusiness</Role>
      <ShortName>Nature of Business</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>8</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R9.htm</HtmlFileName>
      <LongName>10201 - Disclosure - Summary of Significant Accounting Policies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies</Role>
      <ShortName>Summary of Significant Accounting Policies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>9</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R10.htm</HtmlFileName>
      <LongName>10301 - Disclosure - Revenue</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenue</Role>
      <ShortName>Revenue</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>10</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R11.htm</HtmlFileName>
      <LongName>10401 - Disclosure - Cash, cash equivalents and restricted cash</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash</Role>
      <ShortName>Cash, cash equivalents and restricted cash</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>11</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R12.htm</HtmlFileName>
      <LongName>10501 - Disclosure - Accounts Receivable and Allowance for Credit Losses</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses</Role>
      <ShortName>Accounts Receivable and Allowance for Credit Losses</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>12</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R13.htm</HtmlFileName>
      <LongName>10601 - Disclosure - Inventories, net</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNet</Role>
      <ShortName>Inventories, net</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>13</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R14.htm</HtmlFileName>
      <LongName>10701 - Disclosure - Property, Plant and Equipment, net</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet</Role>
      <ShortName>Property, Plant and Equipment, net</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>14</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R15.htm</HtmlFileName>
      <LongName>10801 - Disclosure - Assets Manufactured for Internal Use, net</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet</Role>
      <ShortName>Assets Manufactured for Internal Use, net</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>15</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R16.htm</HtmlFileName>
      <LongName>10901 - Disclosure - Leases</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeases</Role>
      <ShortName>Leases</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>16</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R17.htm</HtmlFileName>
      <LongName>11001 - Disclosure - Product Warranty</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarranty</Role>
      <ShortName>Product Warranty</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>17</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R18.htm</HtmlFileName>
      <LongName>11101 - Disclosure - Financing Arrangements</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFinancingArrangements</Role>
      <ShortName>Financing Arrangements</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>18</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R19.htm</HtmlFileName>
      <LongName>11201 - Disclosure - Employee Benefit Plans</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans</Role>
      <ShortName>Employee Benefit Plans</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>19</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R20.htm</HtmlFileName>
      <LongName>11301 - Disclosure - Stock Award Plans and Stock Based Compensation</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation</Role>
      <ShortName>Stock Award Plans and Stock Based Compensation</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>20</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R21.htm</HtmlFileName>
      <LongName>11401 - Disclosure - Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockholdersEquity</Role>
      <ShortName>Stockholders' Equity</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>21</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R22.htm</HtmlFileName>
      <LongName>11501 - Disclosure - Fair Value Measurements</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurements</Role>
      <ShortName>Fair Value Measurements</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>22</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R23.htm</HtmlFileName>
      <LongName>11601 - Disclosure - Commitments and Contingencies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies</Role>
      <ShortName>Commitments and Contingencies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>23</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R24.htm</HtmlFileName>
      <LongName>11701 - Disclosure - Business Segment and Geographic Region Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation</Role>
      <ShortName>Business Segment and Geographic Region Information</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>24</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R25.htm</HtmlFileName>
      <LongName>11801 - Disclosure - Income Taxes</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxes</Role>
      <ShortName>Income Taxes</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>25</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R26.htm</HtmlFileName>
      <LongName>11901 - Disclosure - Schedule II Valuation and Qualifying Accounts</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts</Role>
      <ShortName>Schedule II Valuation and Qualifying Accounts</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>26</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R27.htm</HtmlFileName>
      <LongName>20202 - Disclosure - Summary of Significant Accounting Policies (Policies)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies</Role>
      <ShortName>Summary of Significant Accounting Policies (Policies)</ShortName>
      <MenuCategory>Policies</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies</ParentRole>
      <Position>27</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R28.htm</HtmlFileName>
      <LongName>30203 - Disclosure - Summary of Significant Accounting Policies (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables</Role>
      <ShortName>Summary of Significant Accounting Policies (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies</ParentRole>
      <Position>28</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R29.htm</HtmlFileName>
      <LongName>30303 - Disclosure - Revenue (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueTables</Role>
      <ShortName>Revenue (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureRevenue</ParentRole>
      <Position>29</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R30.htm</HtmlFileName>
      <LongName>30403 - Disclosure - Cash, cash equivalents and restricted cash (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables</Role>
      <ShortName>Cash, cash equivalents and restricted cash (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash</ParentRole>
      <Position>30</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R31.htm</HtmlFileName>
      <LongName>30503 - Disclosure - Accounts Receivable and Allowance for Credit Losses (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables</Role>
      <ShortName>Accounts Receivable and Allowance for Credit Losses (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses</ParentRole>
      <Position>31</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R32.htm</HtmlFileName>
      <LongName>30603 - Disclosure - Inventories, net (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNetTables</Role>
      <ShortName>Inventories, net (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureInventoriesNet</ParentRole>
      <Position>32</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R33.htm</HtmlFileName>
      <LongName>30703 - Disclosure - Property, Plant and Equipment, net (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables</Role>
      <ShortName>Property, Plant and Equipment, net (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet</ParentRole>
      <Position>33</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R34.htm</HtmlFileName>
      <LongName>30803 - Disclosure - Assets Manufactured for Internal Use, net (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables</Role>
      <ShortName>Assets Manufactured for Internal Use, net (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet</ParentRole>
      <Position>34</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R35.htm</HtmlFileName>
      <LongName>30903 - Disclosure - Leases (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesTables</Role>
      <ShortName>Leases (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureLeases</ParentRole>
      <Position>35</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R36.htm</HtmlFileName>
      <LongName>31003 - Disclosure - Product Warranty (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarrantyTables</Role>
      <ShortName>Product Warranty (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureProductWarranty</ParentRole>
      <Position>36</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R37.htm</HtmlFileName>
      <LongName>31203 - Disclosure - Employee Benefit Plans (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables</Role>
      <ShortName>Employee Benefit Plans (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans</ParentRole>
      <Position>37</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R38.htm</HtmlFileName>
      <LongName>31303 - Disclosure - Stock Award Plans and Stock Based Compensation (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables</Role>
      <ShortName>Stock Award Plans and Stock Based Compensation (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation</ParentRole>
      <Position>38</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R39.htm</HtmlFileName>
      <LongName>31503 - Disclosure - Fair Value Measurements (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables</Role>
      <ShortName>Fair Value Measurements (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFairValueMeasurements</ParentRole>
      <Position>39</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R40.htm</HtmlFileName>
      <LongName>31703 - Disclosure - Business Segment and Geographic Region Information (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables</Role>
      <ShortName>Business Segment and Geographic Region Information (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation</ParentRole>
      <Position>40</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R41.htm</HtmlFileName>
      <LongName>31803 - Disclosure - Income Taxes (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesTables</Role>
      <ShortName>Income Taxes (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureIncomeTaxes</ParentRole>
      <Position>41</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R42.htm</HtmlFileName>
      <LongName>40201 - Disclosure - Summary of Significant Accounting Policies - Foreign Currency (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Foreign Currency (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>42</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R43.htm</HtmlFileName>
      <LongName>40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>43</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R44.htm</HtmlFileName>
      <LongName>40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Concentration of Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>44</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R45.htm</HtmlFileName>
      <LongName>40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Revenue Recognition (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>45</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R46.htm</HtmlFileName>
      <LongName>40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Net Income per Share (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>46</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R47.htm</HtmlFileName>
      <LongName>40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>47</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R48.htm</HtmlFileName>
      <LongName>40301 - Disclosure - Revenue (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueDetails</Role>
      <ShortName>Revenue (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureRevenueTables</ParentRole>
      <Position>48</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R49.htm</HtmlFileName>
      <LongName>40302 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails</Role>
      <ShortName>Revenue - Revenue by discipline &amp; geographical areas (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>49</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R50.htm</HtmlFileName>
      <LongName>40303 - Disclosure - Revenue - Deferred revenue (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails</Role>
      <ShortName>Revenue - Deferred revenue (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>50</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R51.htm</HtmlFileName>
      <LongName>40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails</Role>
      <ShortName>Cash, cash equivalents and restricted cash (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables</ParentRole>
      <Position>51</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R52.htm</HtmlFileName>
      <LongName>40501 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails</Role>
      <ShortName>Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>52</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R53.htm</HtmlFileName>
      <LongName>40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails</Role>
      <ShortName>Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>53</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R54.htm</HtmlFileName>
      <LongName>40601 - Disclosure - Inventories, net (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNetDetails</Role>
      <ShortName>Inventories, net (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureInventoriesNetTables</ParentRole>
      <Position>54</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R55.htm</HtmlFileName>
      <LongName>40602 - Disclosure - Inventories, net - Additional Information (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails</Role>
      <ShortName>Inventories, net - Additional Information (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>55</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R56.htm</HtmlFileName>
      <LongName>40701 - Disclosure - Property, Plant and Equipment, net (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails</Role>
      <ShortName>Property, Plant and Equipment, net (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables</ParentRole>
      <Position>56</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R57.htm</HtmlFileName>
      <LongName>40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails</Role>
      <ShortName>Assets Manufactured for Internal Use, net - Components (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>57</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R58.htm</HtmlFileName>
      <LongName>40901 - Disclosure - Leases (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesDetails</Role>
      <ShortName>Leases (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureLeasesTables</ParentRole>
      <Position>58</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R59.htm</HtmlFileName>
      <LongName>40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails</Role>
      <ShortName>Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>59</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R60.htm</HtmlFileName>
      <LongName>40903 - Disclosure - Leases - Lease Cost (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails</Role>
      <ShortName>Leases - Lease Cost (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>60</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R61.htm</HtmlFileName>
      <LongName>40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails</Role>
      <ShortName>Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>61</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R62.htm</HtmlFileName>
      <LongName>40905 - Disclosure - Leases - Cash Flow by Lease Type (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails</Role>
      <ShortName>Leases - Cash Flow by Lease Type (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>62</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R63.htm</HtmlFileName>
      <LongName>41001 - Disclosure - Product Warranty (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarrantyDetails</Role>
      <ShortName>Product Warranty (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureProductWarrantyTables</ParentRole>
      <Position>63</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R64.htm</HtmlFileName>
      <LongName>41101 - Disclosure - Financing Arrangements (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails</Role>
      <ShortName>Financing Arrangements (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFinancingArrangements</ParentRole>
      <Position>64</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R65.htm</HtmlFileName>
      <LongName>41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails</Role>
      <ShortName>Employee Benefit Plans - Defined Contribution Plan (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>65</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R66.htm</HtmlFileName>
      <LongName>41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails</Role>
      <ShortName>Employee Benefit Plans - Other Compensation Plans (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>66</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R67.htm</HtmlFileName>
      <LongName>41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails</Role>
      <ShortName>Stock Award Plans and Stock Based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables</ParentRole>
      <Position>67</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R68.htm</HtmlFileName>
      <LongName>41401 - Disclosure - Stockholders' Equity (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockholdersEquityDetails</Role>
      <ShortName>Stockholders' Equity (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureStockholdersEquity</ParentRole>
      <Position>68</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R69.htm</HtmlFileName>
      <LongName>41501 - Disclosure - Fair Value Measurements (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails</Role>
      <ShortName>Fair Value Measurements (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables</ParentRole>
      <Position>69</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R70.htm</HtmlFileName>
      <LongName>41601 - Disclosure - Commitments and Contingencies (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails</Role>
      <ShortName>Commitments and Contingencies (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies</ParentRole>
      <Position>70</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R71.htm</HtmlFileName>
      <LongName>41701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails</Role>
      <ShortName>Business Segment and Geographic Region Information - Number of Segments (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>71</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R72.htm</HtmlFileName>
      <LongName>41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails</Role>
      <ShortName>Business Segment and Geographic Region Information - Revenue by Product Line (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>72</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R73.htm</HtmlFileName>
      <LongName>41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails</Role>
      <ShortName>Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>73</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R74.htm</HtmlFileName>
      <LongName>41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails</Role>
      <ShortName>Income Taxes - Income before Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>74</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R75.htm</HtmlFileName>
      <LongName>41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails</Role>
      <ShortName>Income Taxes - Provision for Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>75</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R76.htm</HtmlFileName>
      <LongName>41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails</Role>
      <ShortName>Income Taxes - Reconciliation of Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>76</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R77.htm</HtmlFileName>
      <LongName>41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails</Role>
      <ShortName>Income Taxes - components of Long Term Deferred Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>77</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R78.htm</HtmlFileName>
      <LongName>41805 - Disclosure - Income Taxes - Unrecognized Tax Benefits (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails</Role>
      <ShortName>Income Taxes - Unrecognized Tax Benefits (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>78</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R79.htm</HtmlFileName>
      <LongName>41806 - Disclosure - Income Taxes - Additional Information (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails</Role>
      <ShortName>Income Taxes - Additional Information (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>79</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R80.htm</HtmlFileName>
      <LongName>41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails</Role>
      <ShortName>Income Taxes - Operating Loss Carryforwards (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>80</Position>
    </Report>
    <Report instance="acls-20231231x10ka.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R81.htm</HtmlFileName>
      <LongName>41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails</Role>
      <ShortName>Schedule II Valuation and Qualifying Accounts (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts</ParentRole>
      <Position>81</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File>acls-20231231.xsd</File>
    <File>acls-20231231_cal.xml</File>
    <File>acls-20231231_def.xml</File>
    <File>acls-20231231_lab.xml</File>
    <File>acls-20231231_pre.xml</File>
    <File doctype="10-K/A" isDefinitelyFs="true" isUsgaap="true" original="acls-20231231x10ka.htm">acls-20231231x10ka.htm</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy items="1">http://fasb.org/srt/2023</BaseTaxonomy>
    <BaseTaxonomy items="915">http://fasb.org/us-gaap/2023</BaseTaxonomy>
    <BaseTaxonomy items="37">http://xbrl.sec.gov/dei/2023</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>true</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>101
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "version": "2.2",
 "instance": {
  "acls-20231231x10ka.htm": {
   "nsprefix": "acls",
   "nsuri": "http://www.axcelis.com/20231231",
   "dts": {
    "schema": {
     "local": [
      "acls-20231231.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/reference-2009-12-16.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd",
      "https://xbrl.sec.gov/country/2023/country-2023.xsd",
      "https://xbrl.sec.gov/dei/2023/dei-2023.xsd"
     ]
    },
    "calculationLink": {
     "local": [
      "acls-20231231_cal.xml"
     ]
    },
    "definitionLink": {
     "local": [
      "acls-20231231_def.xml"
     ]
    },
    "labelLink": {
     "local": [
      "acls-20231231_lab.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "acls-20231231_pre.xml"
     ]
    },
    "inline": {
     "local": [
      "acls-20231231x10ka.htm"
     ]
    }
   },
   "keyStandard": 357,
   "keyCustom": 64,
   "axisStandard": 23,
   "axisCustom": 1,
   "memberStandard": 39,
   "memberCustom": 25,
   "hidden": {
    "total": 18,
    "http://fasb.org/us-gaap/2023": 12,
    "http://www.axcelis.com/20231231": 1,
    "http://xbrl.sec.gov/dei/2023": 5
   },
   "contextCount": 209,
   "entityCount": 1,
   "segmentCount": 65,
   "elementCount": 638,
   "unitCount": 6,
   "baseTaxonomies": {
    "http://fasb.org/us-gaap/2023": 915,
    "http://xbrl.sec.gov/dei/2023": 37,
    "http://fasb.org/srt/2023": 1
   },
   "report": {
    "R1": {
     "role": "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation",
     "longName": "00090 - Document - Document and Entity Information",
     "shortName": "Document and Entity Information",
     "isDefault": "true",
     "groupType": "document",
     "subGroupType": "",
     "menuCat": "Cover",
     "order": "1",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "dei:DocumentType",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "dei:DocumentType",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R2": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
     "longName": "00100 - Statement - Consolidated Statements of Operations",
     "shortName": "Consolidated Statements of Operations",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "",
     "menuCat": "Statements",
     "order": "2",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:Revenues",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:CostOfGoodsAndServicesSold",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R3": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
     "longName": "00200 - Statement - Consolidated Statements of Comprehensive Income",
     "shortName": "Consolidated Statements of Comprehensive Income",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "",
     "menuCat": "Statements",
     "order": "3",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OtherComprehensiveIncomeLossNetOfTax",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R4": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets",
     "longName": "00300 - Statement - Consolidated Balance Sheets",
     "shortName": "Consolidated Balance Sheets",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "",
     "menuCat": "Statements",
     "order": "4",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:PrepaidExpenseAndOtherAssetsCurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R5": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical",
     "longName": "00305 - Statement - Consolidated Balance Sheets (Parenthetical)",
     "shortName": "Consolidated Balance Sheets (Parenthetical)",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "parenthetical",
     "menuCat": "Statements",
     "order": "5",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CommonStockParOrStatedValuePerShare",
      "unitRef": "Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "us-gaap:CommonStockParOrStatedValuePerShare",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CommonStockSharesIssued",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R6": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity",
     "longName": "00400 - Statement - Consolidated Statements of Stockholders' Equity",
     "shortName": "Consolidated Statements of Stockholders' Equity",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "",
     "menuCat": "Statements",
     "order": "6",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w",
      "name": "us-gaap:SharesOutstanding",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w",
      "name": "us-gaap:SharesOutstanding",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R7": {
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows",
     "longName": "00500 - Statement - Consolidated Statements of Cash Flows",
     "shortName": "Consolidated Statements of Cash Flows",
     "isDefault": "false",
     "groupType": "statement",
     "subGroupType": "",
     "menuCat": "Statements",
     "order": "7",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ProfitLoss",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ProfitLoss",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R8": {
     "role": "http://www.axcelis.com/role/DisclosureNatureOfBusiness",
     "longName": "10101 - Disclosure - Nature of Business",
     "shortName": "Nature of Business",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "8",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R9": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies",
     "longName": "10201 - Disclosure - Summary of Significant Accounting Policies",
     "shortName": "Summary of Significant Accounting Policies",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "9",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:SignificantAccountingPoliciesTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:SignificantAccountingPoliciesTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R10": {
     "role": "http://www.axcelis.com/role/DisclosureRevenue",
     "longName": "10301 - Disclosure - Revenue",
     "shortName": "Revenue",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "10",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R11": {
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash",
     "longName": "10401 - Disclosure - Cash, cash equivalents and restricted cash",
     "shortName": "Cash, cash equivalents and restricted cash",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "11",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R12": {
     "role": "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses",
     "longName": "10501 - Disclosure - Accounts Receivable and Allowance for Credit Losses",
     "shortName": "Accounts Receivable and Allowance for Credit Losses",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "12",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R13": {
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNet",
     "longName": "10601 - Disclosure - Inventories, net",
     "shortName": "Inventories, net",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "13",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R14": {
     "role": "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet",
     "longName": "10701 - Disclosure - Property, Plant and Equipment, net",
     "shortName": "Property, Plant and Equipment, net",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "14",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R15": {
     "role": "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet",
     "longName": "10801 - Disclosure - Assets Manufactured for Internal Use, net",
     "shortName": "Assets Manufactured for Internal Use, net",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "15",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R16": {
     "role": "http://www.axcelis.com/role/DisclosureLeases",
     "longName": "10901 - Disclosure - Leases",
     "shortName": "Leases",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "16",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:LeaseDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:LeaseDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R17": {
     "role": "http://www.axcelis.com/role/DisclosureProductWarranty",
     "longName": "11001 - Disclosure - Product Warranty",
     "shortName": "Product Warranty",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "17",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ProductWarrantyDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ProductWarrantyDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R18": {
     "role": "http://www.axcelis.com/role/DisclosureFinancingArrangements",
     "longName": "11101 - Disclosure - Financing Arrangements",
     "shortName": "Financing Arrangements",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "18",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R19": {
     "role": "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans",
     "longName": "11201 - Disclosure - Employee Benefit Plans",
     "shortName": "Employee Benefit Plans",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "19",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R20": {
     "role": "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation",
     "longName": "11301 - Disclosure - Stock Award Plans and Stock Based Compensation",
     "shortName": "Stock Award Plans and Stock Based Compensation",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "20",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R21": {
     "role": "http://www.axcelis.com/role/DisclosureStockholdersEquity",
     "longName": "11401 - Disclosure - Stockholders' Equity",
     "shortName": "Stockholders' Equity",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "21",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R22": {
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurements",
     "longName": "11501 - Disclosure - Fair Value Measurements",
     "shortName": "Fair Value Measurements",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "22",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R23": {
     "role": "http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies",
     "longName": "11601 - Disclosure - Commitments and Contingencies",
     "shortName": "Commitments and Contingencies",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "23",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R24": {
     "role": "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation",
     "longName": "11701 - Disclosure - Business Segment and Geographic Region Information",
     "shortName": "Business Segment and Geographic Region Information",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "24",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:SegmentReportingDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R25": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxes",
     "longName": "11801 - Disclosure - Income Taxes",
     "shortName": "Income Taxes",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "25",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R26": {
     "role": "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts",
     "longName": "11901 - Disclosure - Schedule II Valuation and Qualifying Accounts",
     "shortName": "Schedule II Valuation and Qualifying Accounts",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "",
     "menuCat": "Notes",
     "order": "26",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R27": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies",
     "longName": "20202 - Disclosure - Summary of Significant Accounting Policies (Policies)",
     "shortName": "Summary of Significant Accounting Policies (Policies)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "policies",
     "menuCat": "Policies",
     "order": "27",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:SignificantAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:SignificantAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R28": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables",
     "longName": "30203 - Disclosure - Summary of Significant Accounting Policies (Tables)",
     "shortName": "Summary of Significant Accounting Policies (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "28",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:PropertyPlantAndEquipmentUsefulLivesTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:PropertyPlantAndEquipmentUsefulLivesTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R29": {
     "role": "http://www.axcelis.com/role/DisclosureRevenueTables",
     "longName": "30303 - Disclosure - Revenue (Tables)",
     "shortName": "Revenue (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "29",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R30": {
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables",
     "longName": "30403 - Disclosure - Cash, cash equivalents and restricted cash (Tables)",
     "shortName": "Cash, cash equivalents and restricted cash (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "30",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R31": {
     "role": "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables",
     "longName": "30503 - Disclosure - Accounts Receivable and Allowance for Credit Losses (Tables)",
     "shortName": "Accounts Receivable and Allowance for Credit Losses (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "31",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R32": {
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNetTables",
     "longName": "30603 - Disclosure - Inventories, net (Tables)",
     "shortName": "Inventories, net (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "32",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R33": {
     "role": "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables",
     "longName": "30703 - Disclosure - Property, Plant and Equipment, net (Tables)",
     "shortName": "Property, Plant and Equipment, net (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "33",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:PropertyPlantAndEquipmentTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R34": {
     "role": "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables",
     "longName": "30803 - Disclosure - Assets Manufactured for Internal Use, net (Tables)",
     "shortName": "Assets Manufactured for Internal Use, net (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "34",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfOtherAssetsTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfOtherAssetsTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R35": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesTables",
     "longName": "30903 - Disclosure - Leases (Tables)",
     "shortName": "Leases (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "35",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:LeaseBalanceSheetDisclosureTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:LeaseBalanceSheetDisclosureTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R36": {
     "role": "http://www.axcelis.com/role/DisclosureProductWarrantyTables",
     "longName": "31003 - Disclosure - Product Warranty (Tables)",
     "shortName": "Product Warranty (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "36",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R37": {
     "role": "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables",
     "longName": "31203 - Disclosure - Employee Benefit Plans (Tables)",
     "shortName": "Employee Benefit Plans (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "37",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R38": {
     "role": "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables",
     "longName": "31303 - Disclosure - Stock Award Plans and Stock Based Compensation (Tables)",
     "shortName": "Stock Award Plans and Stock Based Compensation (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "38",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R39": {
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables",
     "longName": "31503 - Disclosure - Fair Value Measurements (Tables)",
     "shortName": "Fair Value Measurements (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "39",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R40": {
     "role": "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables",
     "longName": "31703 - Disclosure - Business Segment and Geographic Region Information (Tables)",
     "shortName": "Business Segment and Geographic Region Information (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "40",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R41": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesTables",
     "longName": "31803 - Disclosure - Income Taxes (Tables)",
     "shortName": "Income Taxes (Tables)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "tables",
     "menuCat": "Tables",
     "order": "41",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R42": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails",
     "longName": "40201 - Disclosure - Summary of Significant Accounting Policies - Foreign Currency (Details)",
     "shortName": "Summary of Significant Accounting Policies - Foreign Currency (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "42",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ForeignCurrencyTransactionGainLossRealized",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock",
       "us-gaap:SignificantAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ForeignCurrencyTransactionGainLossRealized",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock",
       "us-gaap:SignificantAccountingPoliciesTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R43": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails",
     "longName": "40202 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)",
     "shortName": "Summary of Significant Accounting Policies - Property, Plant and Equipment and Impairment of Long Lived Assets (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "43",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-6",
      "ancestors": [
       "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
       "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
       "p",
       "us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-6",
      "ancestors": [
       "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
       "us-gaap:ImpairmentOfLongLivedAssetsHeldForUse",
       "p",
       "us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R44": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails",
     "longName": "40203 - Disclosure - Summary of Significant Accounting Policies - Concentration of Risk (Details)",
     "shortName": "Summary of Significant Accounting Policies - Concentration of Risk (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "44",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w",
      "name": "acls:ConcentrationRiskNumberOfCustomers",
      "unitRef": "Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w",
      "name": "acls:ConcentrationRiskNumberOfCustomers",
      "unitRef": "Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R45": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails",
     "longName": "40204 - Disclosure - Summary of Significant Accounting Policies - Revenue Recognition (Details)",
     "shortName": "Summary of Significant Accounting Policies - Revenue Recognition (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "45",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA",
      "name": "acls:ExtendedProductWarrantyPeriod",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA",
      "name": "acls:ExtendedProductWarrantyPeriod",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "ix:continuation",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R46": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
     "longName": "40205 - Disclosure - Summary of Significant Accounting Policies - Net Income per Share (Details)",
     "shortName": "Summary of Significant Accounting Policies - Net Income per Share (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "46",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "us-gaap:EarningsPerSharePolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "us-gaap:EarningsPerSharePolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R47": {
     "role": "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails",
     "longName": "40206 - Disclosure - Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)",
     "shortName": "Summary of Significant Accounting Policies - Accumulated Other Comprehensive Income (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "47",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ",
      "name": "us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
       "acls:AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R48": {
     "role": "http://www.axcelis.com/role/DisclosureRevenueDetails",
     "longName": "40301 - Disclosure - Revenue (Details)",
     "shortName": "Revenue (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "48",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:ContractWithCustomerLiability",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_DwurvAbnrUK_uQzfnlVyRw",
      "name": "acls:PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R49": {
     "role": "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
     "longName": "40302 - Disclosure - Revenue - Revenue by discipline & geographical areas (Details)",
     "shortName": "Revenue - Revenue by discipline & geographical areas (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "49",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R50": {
     "role": "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails",
     "longName": "40303 - Disclosure - Revenue - Deferred revenue (Details)",
     "shortName": "Revenue - Deferred revenue (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "50",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ",
      "name": "us-gaap:ContractWithCustomerLiability",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:ContractWithCustomerLiabilityDeferralOfRevenue",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R51": {
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
     "longName": "40401 - Disclosure - Cash, cash equivalents and restricted cash (Details)",
     "shortName": "Cash, cash equivalents and restricted cash (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "51",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:RestrictedCashAndCashEquivalents",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R52": {
     "role": "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails",
     "longName": "40501 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)",
     "shortName": "Accounts Receivable and Allowance for Credit Losses - Trade Receivables (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "52",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R53": {
     "role": "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails",
     "longName": "40502 - Disclosure - Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)",
     "shortName": "Accounts Receivable and Allowance for Credit Losses - Components of Accounts Receivable (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "53",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:AccountsReceivableGrossCurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:AccountsReceivableGrossCurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R54": {
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNetDetails",
     "longName": "40601 - Disclosure - Inventories, net (Details)",
     "shortName": "Inventories, net (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "54",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R55": {
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails",
     "longName": "40602 - Disclosure - Inventories, net - Additional Information (Details)",
     "shortName": "Inventories, net - Additional Information (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "55",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:IncreaseInInventoryReserves",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:IncreaseInInventoryReserves",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R56": {
     "role": "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
     "longName": "40701 - Disclosure - Property, Plant and Equipment, net (Details)",
     "shortName": "Property, Plant and Equipment, net (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "56",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:PropertyPlantAndEquipmentGross",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:PropertyPlantAndEquipmentGross",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:PropertyPlantAndEquipmentTextBlock",
       "us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R57": {
     "role": "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails",
     "longName": "40801 - Disclosure - Assets Manufactured for Internal Use, net - Components (Details)",
     "shortName": "Assets Manufactured for Internal Use, net - Components (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "57",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q",
      "name": "acls:PropertyPlantAndEquipmentOtherUsefulLife",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q",
      "name": "acls:PropertyPlantAndEquipmentOtherUsefulLife",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "acls:AssetsManufacturedForInternalUseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R58": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesDetails",
     "longName": "40901 - Disclosure - Leases (Details)",
     "shortName": "Leases (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "58",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R59": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
     "longName": "40902 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)",
     "shortName": "Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "59",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:OperatingLeaseRightOfUseAsset",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "acls:OperatingAndFinanceLeaseRightOfUseAsset",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseBalanceSheetDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R60": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails",
     "longName": "40903 - Disclosure - Leases - Lease Cost (Details)",
     "shortName": "Leases - Lease Cost (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "60",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OperatingLeaseCost",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OperatingLeaseCost",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R61": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
     "longName": "40904 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)",
     "shortName": "Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "61",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R62": {
     "role": "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails",
     "longName": "40905 - Disclosure - Leases - Cash Flow by Lease Type (Details)",
     "shortName": "Leases - Cash Flow by Lease Type (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "62",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OperatingLeasePayments",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseCashFlowInformationDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:OperatingLeasePayments",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseCashFlowInformationDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R63": {
     "role": "http://www.axcelis.com/role/DisclosureProductWarrantyDetails",
     "longName": "41001 - Disclosure - Product Warranty (Details)",
     "shortName": "Product Warranty (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "63",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:ProductWarrantyPeriod",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:ProductWarrantyPeriod",
      "unitRef": null,
      "xsiNil": "false",
      "lang": "en-US",
      "decimals": null,
      "ancestors": [
       "p",
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R64": {
     "role": "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
     "longName": "41101 - Disclosure - Financing Arrangements (Details)",
     "shortName": "Financing Arrangements (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "64",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:FinanceLeaseLiabilityNoncurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA",
      "name": "us-gaap:FinanceLeaseLiabilityNoncurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:DebtDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R65": {
     "role": "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails",
     "longName": "41201 - Disclosure - Employee Benefit Plans - Defined Contribution Plan (Details)",
     "shortName": "Employee Benefit Plans - Defined Contribution Plan (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "65",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
      "unitRef": "Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA",
      "xsiNil": "false",
      "lang": null,
      "decimals": "2",
      "ancestors": [
       "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
       "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
       "p",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
      "unitRef": "Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA",
      "xsiNil": "false",
      "lang": null,
      "decimals": "2",
      "ancestors": [
       "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
       "us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
       "p",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R66": {
     "role": "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails",
     "longName": "41202 - Disclosure - Employee Benefit Plans - Other Compensation Plans (Details)",
     "shortName": "Employee Benefit Plans - Other Compensation Plans (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "66",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock",
       "us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R67": {
     "role": "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
     "longName": "41301 - Disclosure - Stock Award Plans and Stock Based Compensation (Details)",
     "shortName": "Stock Award Plans and Stock Based Compensation (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "67",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CommonStockParOrStatedValuePerShare",
      "unitRef": "Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "us-gaap:CommonStockParOrStatedValuePerShare",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate",
      "unitRef": "Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA",
      "xsiNil": "false",
      "lang": null,
      "decimals": "2",
      "ancestors": [
       "acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate",
       "acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate",
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R68": {
     "role": "http://www.axcelis.com/role/DisclosureStockholdersEquityDetails",
     "longName": "41401 - Disclosure - Stockholders' Equity (Details)",
     "shortName": "Stockholders' Equity (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "68",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:CommonStockSharesAuthorized",
      "unitRef": "Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "us-gaap:CommonStockSharesAuthorized",
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": null
    },
    "R69": {
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails",
     "longName": "41501 - Disclosure - Fair Value Measurements (Details)",
     "shortName": "Fair Value Measurements (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "69",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:ShortTermInvestments",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_UWPXctNjAU2YwBO-MipMgA",
      "name": "acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
       "us-gaap:FairValueDisclosuresTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R70": {
     "role": "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails",
     "longName": "41601 - Disclosure - Commitments and Contingencies (Details)",
     "shortName": "Commitments and Contingencies (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "70",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LongTermPurchaseCommitmentAmount",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:LongTermPurchaseCommitmentAmount",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R71": {
     "role": "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails",
     "longName": "41701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details)",
     "shortName": "Business Segment and Geographic Region Information - Number of Segments (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "71",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:NumberOfReportableSegments",
      "unitRef": "Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "p",
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:NumberOfReportableSegments",
      "unitRef": "Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "INF",
      "ancestors": [
       "p",
       "us-gaap:SegmentReportingDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R72": {
     "role": "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails",
     "longName": "41702 - Disclosure - Business Segment and Geographic Region Information - Revenue by Product Line (Details)",
     "shortName": "Business Segment and Geographic Region Information - Revenue by Product Line (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "72",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:Revenues",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_b0GGpw37D0OVb9OFN51NQg",
      "name": "us-gaap:Revenues",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R73": {
     "role": "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
     "longName": "41703 - Disclosure - Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)",
     "shortName": "Business Segment and Geographic Region Information - Revenue and Long-Lived Assets (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "73",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:Revenues",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:NoncurrentAssets",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R74": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails",
     "longName": "41801 - Disclosure - Income Taxes - Income before Income Taxes (Details)",
     "shortName": "Income Taxes - Income before Income Taxes (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "74",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R75": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails",
     "longName": "41802 - Disclosure - Income Taxes - Provision for Income Taxes (Details)",
     "shortName": "Income Taxes - Provision for Income Taxes (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "75",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:CurrentFederalTaxExpenseBenefit",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:CurrentFederalTaxExpenseBenefit",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R76": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails",
     "longName": "41803 - Disclosure - Income Taxes - Reconciliation of Income Taxes (Details)",
     "shortName": "Income Taxes - Reconciliation of Income Taxes (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "76",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:EffectiveIncomeTaxRateContinuingOperations",
      "unitRef": "Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA",
      "xsiNil": "false",
      "lang": null,
      "decimals": "3",
      "ancestors": [
       "p",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:EffectiveIncomeTaxRateContinuingOperations",
      "unitRef": "Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA",
      "xsiNil": "false",
      "lang": null,
      "decimals": "3",
      "ancestors": [
       "p",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R77": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails",
     "longName": "41804 - Disclosure - Income Taxes - components of Long Term Deferred Income Taxes (Details)",
     "shortName": "Income Taxes - components of Long Term Deferred Income Taxes (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "77",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R78": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails",
     "longName": "41805 - Disclosure - Income Taxes - Unrecognized Tax Benefits (Details)",
     "shortName": "Income Taxes - Unrecognized Tax Benefits (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "78",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ",
      "name": "us-gaap:UnrecognizedTaxBenefits",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R79": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails",
     "longName": "41806 - Disclosure - Income Taxes - Additional Information (Details)",
     "shortName": "Income Taxes - Additional Information (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "79",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q",
      "name": "us-gaap:DeferredTaxAssetsLiabilitiesNet",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA",
      "name": "acls:IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "unique": true
     }
    },
    "R80": {
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails",
     "longName": "41807 - Disclosure - Income Taxes - Operating Loss Carryforwards (Details)",
     "shortName": "Income Taxes - Operating Loss Carryforwards (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "80",
     "firstAnchor": {
      "contextRef": "As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ",
      "name": "us-gaap:OperatingLossCarryforwards",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ",
      "name": "us-gaap:OperatingLossCarryforwards",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-5",
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    },
    "R81": {
     "role": "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails",
     "longName": "41901 - Disclosure - Schedule II Valuation and Qualifying Accounts (Details)",
     "shortName": "Schedule II Valuation and Qualifying Accounts (Details)",
     "isDefault": "false",
     "groupType": "disclosure",
     "subGroupType": "details",
     "menuCat": "Details",
     "order": "81",
     "firstAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw",
      "name": "us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     },
     "uniqueAnchor": {
      "contextRef": "Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw",
      "name": "us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense",
      "unitRef": "Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw",
      "xsiNil": "false",
      "lang": null,
      "decimals": "-3",
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "reportCount": 1,
      "baseRef": "acls-20231231x10ka.htm",
      "first": true,
      "unique": true
     }
    }
   },
   "tag": {
    "us-gaap_AOCIAttributableToParentNetOfTaxRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AOCIAttributableToParentNetOfTaxRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]",
        "terseLabel": "Changes in accumulated other comprehensive (loss) income, net of tax",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AccountingPoliciesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountingPoliciesAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Summary of Significant Accounting Policies"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AccountsPayableCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsPayableCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts Payable, Current",
        "terseLabel": "Accounts payable",
        "documentation": "Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)."
       }
      }
     },
     "auth_ref": [
      "r28",
      "r740"
     ]
    },
    "us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsReceivableAllowanceForCreditLossTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts Receivable, Allowance for Credit Loss [Table Text Block]",
        "terseLabel": "Schedule of allowances for credit losses related to trade receivables",
        "documentation": "Tabular disclosure of allowance for credit loss on accounts receivable."
       }
      }
     },
     "auth_ref": [
      "r797"
     ]
    },
    "us-gaap_AccountsReceivableGrossCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsReceivableGrossCurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails": {
       "parentTag": "us-gaap_AccountsReceivableNetCurrent",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts Receivable, Gross, Current",
        "terseLabel": "Trade receivables",
        "documentation": "Amount, before allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current."
       }
      }
     },
     "auth_ref": [
      "r191",
      "r292",
      "r293",
      "r701"
     ]
    },
    "us-gaap_AccountsReceivableMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsReceivableMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts receivable",
        "documentation": "Due from customers or clients for goods or services that have been delivered or sold."
       }
      }
     },
     "auth_ref": [
      "r683"
     ]
    },
    "us-gaap_AccountsReceivableNetAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsReceivableNetAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Receivables and Allowances for Credit Losses"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AccountsReceivableNetCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccountsReceivableNetCurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0,
       "order": 3.0
      },
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts Receivable, Net, Current",
        "terseLabel": "Accounts receivable, net",
        "totalLabel": "Trade receivable, net",
        "documentation": "Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current."
       }
      }
     },
     "auth_ref": [
      "r292",
      "r293"
     ]
    },
    "us-gaap_AccretionAmortizationOfDiscountsAndPremiumsInvestments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccretionAmortizationOfDiscountsAndPremiumsInvestments",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accretion (Amortization) of Discounts and Premiums, Investments",
        "negatedLabel": "Accretion of discounts and premiums on marketable securities",
        "documentation": "The sum of the periodic adjustments of the differences between securities' face values and purchase prices that are charged against earnings. This is called accretion if the security was purchased at a discount and amortization if it was purchased at premium. As a noncash item, this element is an adjustment to net income when calculating cash provided by or used in operations using the indirect method."
       }
      }
     },
     "auth_ref": [
      "r118"
     ]
    },
    "us-gaap_AccruedIncomeTaxesCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccruedIncomeTaxesCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accrued Income Taxes, Current",
        "terseLabel": "Income taxes",
        "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations."
       }
      }
     },
     "auth_ref": [
      "r87",
      "r144"
     ]
    },
    "us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedDefinedBenefitPlansAdjustmentMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined benefit pension plan",
        "documentation": "Accumulated other comprehensive (income) loss related to defined benefit plans attributable to the parent."
       }
      }
     },
     "auth_ref": [
      "r5",
      "r18",
      "r39",
      "r776",
      "r777",
      "r778"
     ]
    },
    "us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails": {
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment",
        "negatedLabel": "Accumulated depreciation",
        "documentation": "Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services."
       }
      }
     },
     "auth_ref": [
      "r61",
      "r188",
      "r580"
     ]
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedOtherComprehensiveIncomeLossLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive Income (Loss) [Line Items]",
        "terseLabel": "Accumulated Other Comprehensive (Loss) Income",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r204",
      "r205",
      "r532",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538"
     ]
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTax",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax",
        "periodEndLabel": "Balance at December 31, 2023",
        "periodStartLabel": "Balance at December 31, 2022",
        "terseLabel": "Accumulated other comprehensive loss",
        "documentation": "Amount, after tax, of accumulated increase (decrease) in equity from transaction and other event and circumstance from nonowner source."
       }
      }
     },
     "auth_ref": [
      "r38",
      "r39",
      "r101",
      "r192",
      "r576",
      "r599",
      "r600"
     ]
    },
    "acls_AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for accumulated other comprehensive income.",
        "label": "Accumulated Other Comprehensive Income (Loss) [Policy Text Block]",
        "terseLabel": "Accumulated Other Comprehensive Loss"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedOtherComprehensiveIncomeLossTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive (Loss) Income [Table]",
        "documentation": "Disclosure of information about components of accumulated other comprehensive income (loss)."
       }
      }
     },
     "auth_ref": [
      "r204",
      "r205",
      "r532",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538"
     ]
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedOtherComprehensiveIncomeMember",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive Income (Loss)",
        "documentation": "Accumulated increase (decrease) in equity from transactions and other events and circumstances from non-owner sources, attributable to the parent. Excludes net income (loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners."
       }
      }
     },
     "auth_ref": [
      "r3",
      "r18",
      "r39",
      "r508",
      "r511",
      "r558",
      "r595",
      "r596",
      "r776",
      "r777",
      "r778",
      "r788",
      "r789",
      "r790"
     ]
    },
    "us-gaap_AccumulatedTranslationAdjustmentMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AccumulatedTranslationAdjustmentMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Foreign currency",
        "documentation": "Accumulated other comprehensive income (loss) resulting from foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to the parent."
       }
      }
     },
     "auth_ref": [
      "r4",
      "r18",
      "r39",
      "r205",
      "r206",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538",
      "r776"
     ]
    },
    "us-gaap_AdditionalPaidInCapital": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AdditionalPaidInCapital",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Additional Paid in Capital",
        "terseLabel": "Additional paid-in capital",
        "documentation": "Amount of excess of issue price over par or stated value of stock and from other transaction involving stock or stockholder. Includes, but is not limited to, additional paid-in capital (APIC) for common and preferred stock."
       }
      }
     },
     "auth_ref": [
      "r93",
      "r740",
      "r866"
     ]
    },
    "us-gaap_AdditionalPaidInCapitalMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AdditionalPaidInCapitalMember",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Additional Paid-in Capital",
        "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders."
       }
      }
     },
     "auth_ref": [
      "r453",
      "r454",
      "r455",
      "r610",
      "r788",
      "r789",
      "r790",
      "r843",
      "r869"
     ]
    },
    "us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition",
        "terseLabel": "Stock-based compensation expense",
        "documentation": "Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r68",
      "r69",
      "r415"
     ]
    },
    "us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Adjustments to reconcile net income to net cash provided by operating activities:"
       }
      }
     },
     "auth_ref": []
    },
    "acls_AfterMarketMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AfterMarketMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to Aftermarket.",
        "label": "Aftermarket"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AllocatedShareBasedCompensationExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AllocatedShareBasedCompensationExpense",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Allocated Share-based Compensation Expense",
        "terseLabel": "Stock-based compensation expense",
        "documentation": "Amount of expense for award under share-based payment arrangement. Excludes amount capitalized."
       }
      }
     },
     "auth_ref": [
      "r448",
      "r460"
     ]
    },
    "acls_AllowanceForDoubtfulAccountsAndReturnsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AllowanceForDoubtfulAccountsAndReturnsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A valuation allowance for trade and other receivables due to the entity that are expected to be uncollectible and valuation allowance for the amount of products sold that the entity expects to be returned by the purchaser.",
        "label": "Allowance for doubtful accounts and returns"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AllowanceForDoubtfulAccountsReceivableCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails": {
       "parentTag": "us-gaap_AccountsReceivableNetCurrent",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesComponentsOfAccountsReceivableDetails",
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Allowance for Doubtful Accounts Receivable, Current",
        "negatedLabel": "Allowance for doubtful accounts",
        "periodEndLabel": "Balance, end of period",
        "periodStartLabel": "Balance, beginning of period",
        "documentation": "Amount of allowance for credit loss on accounts receivable, classified as current."
       }
      }
     },
     "auth_ref": [
      "r193",
      "r294",
      "r298"
     ]
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AllowanceForDoubtfulAccountsReceivableWriteOffs",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accounts Receivable, Allowance for Credit Loss, Writeoff",
        "negatedLabel": "Charge-offs",
        "documentation": "Amount of direct write-downs of accounts receivable charged against the allowance."
       }
      }
     },
     "auth_ref": [
      "r300"
     ]
    },
    "dei_AmendmentFlag": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "AmendmentFlag",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Amendment Flag",
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount",
        "terseLabel": "Anti-dilutive common equivalent shares excluded from calculation",
        "documentation": "Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented."
       }
      }
     },
     "auth_ref": [
      "r261"
     ]
    },
    "srt_AsiaPacificMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "AsiaPacificMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asia Pacific",
        "documentation": "Region of Asia Pacific."
       }
      }
     },
     "auth_ref": [
      "r871",
      "r872",
      "r873",
      "r874"
     ]
    },
    "us-gaap_AssetImpairmentChargesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AssetImpairmentChargesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asset Impairment Charges [Abstract]",
        "terseLabel": "Impairment of Long-Lived Assets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AssetUnderConstructionMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AssetUnderConstructionMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Construction in process",
        "documentation": "Asset in process of being built."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_Assets": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "Assets",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets",
        "totalLabel": "Total assets",
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events."
       }
      }
     },
     "auth_ref": [
      "r143",
      "r190",
      "r223",
      "r268",
      "r278",
      "r283",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r501",
      "r505",
      "r526",
      "r573",
      "r637",
      "r740",
      "r753",
      "r805",
      "r806",
      "r853"
     ]
    },
    "us-gaap_AssetsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AssetsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets [Abstract]",
        "terseLabel": "ASSETS"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_AssetsCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AssetsCurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Current",
        "totalLabel": "Total current assets",
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events."
       }
      }
     },
     "auth_ref": [
      "r183",
      "r196",
      "r223",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r501",
      "r505",
      "r526",
      "r740",
      "r805",
      "r806",
      "r853"
     ]
    },
    "us-gaap_AssetsCurrentAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AssetsCurrentAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Current [Abstract]",
        "terseLabel": "Current assets:"
       }
      }
     },
     "auth_ref": []
    },
    "acls_AssetsManufacturedForInternalUseDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AssetsManufacturedForInternalUseDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets Manufactured for Internal Use, net"
       }
      }
     },
     "auth_ref": []
    },
    "acls_AssetsManufacturedForInternalUseDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AssetsManufacturedForInternalUseDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNet"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of assets manufactured for internal use. This includes details regarding cost, accumulated depreciation and uses of the assets.",
        "label": "Assets Manufactured For Internal Use Disclosure [Text Block]",
        "terseLabel": "Assets Manufactured for Internal Use, net"
       }
      }
     },
     "auth_ref": []
    },
    "acls_AssetsManufacturedForInternalUseMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "AssetsManufacturedForInternalUseMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the details pertaining to assets manufactured for internal use and reported a part as other assets within the balance sheet.",
        "label": "Assets Manufactured for Internal Use"
       }
      }
     },
     "auth_ref": []
    },
    "dei_AuditorFirmId": {
     "xbrltype": "nonemptySequenceNumberItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "AuditorFirmId",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Firm ID",
        "documentation": "PCAOB issued Audit Firm Identifier"
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759"
     ]
    },
    "dei_AuditorLocation": {
     "xbrltype": "internationalNameItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "AuditorLocation",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Location"
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759"
     ]
    },
    "dei_AuditorName": {
     "xbrltype": "internationalNameItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "AuditorName",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Auditor Name"
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759"
     ]
    },
    "us-gaap_AwardTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "AwardTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Award Type [Axis]",
        "documentation": "Information by type of award under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r419",
      "r420",
      "r421",
      "r423",
      "r424",
      "r425",
      "r426",
      "r427",
      "r428",
      "r429",
      "r430",
      "r431",
      "r432",
      "r433",
      "r434",
      "r435",
      "r436",
      "r437",
      "r438",
      "r439",
      "r440",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447"
     ]
    },
    "acls_BenefitOfTaxDeductionsInExcessOfCompensationCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "BenefitOfTaxDeductionsInExcessOfCompensationCost",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate cash inflow comprised of the amount received from (a) employees to acquire the entity's shares under incentive awards, including stock option exercises and restricted stock arrangements, and (b) the excess tax benefit arising from such transactions.",
        "label": "Benefit Of Tax Deductions In Excess of Compensation Cost",
        "terseLabel": "Benefit of tax deductions in excess of recognized compensation cost"
       }
      }
     },
     "auth_ref": []
    },
    "acls_BeverlyPropertyOwnerLlcMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "BeverlyPropertyOwnerLlcMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to Beverly Property Owner LLC",
        "label": "Beverly Property Owner LLC"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_BuildingMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "BuildingMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Building",
        "documentation": "Facility held for productive use including, but not limited to, office, production, storage and distribution facilities."
       }
      }
     },
     "auth_ref": [
      "r123"
     ]
    },
    "acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. All of the above and Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current.",
        "label": "Cash and Cash Equivalents And Short Term Investments, Fair Value Disclosure",
        "totalLabel": "Total"
       }
      }
     },
     "auth_ref": []
    },
    "acls_CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of accounting policy for cash and cash equivalents and short term investments, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.",
        "label": "Cash and Cash Equivalents, And Short Term Investments Policy [Policy Text Block]",
        "terseLabel": "Cash, Cash Equivalents and Short-term Investments"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CashAndCashEquivalentsAtCarryingValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CashAndCashEquivalentsAtCarryingValue",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash and Cash Equivalents, at Carrying Value",
        "terseLabel": "Cash and cash equivalents",
        "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation."
       }
      }
     },
     "auth_ref": [
      "r43",
      "r186",
      "r699"
     ]
    },
    "us-gaap_CashAndCashEquivalentsFairValueDisclosure": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CashAndCashEquivalentsFairValueDisclosure",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails": {
       "parentTag": "acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash and Cash Equivalents, Fair Value Disclosure",
        "terseLabel": "Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)",
        "documentation": "Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": []
    },
    "acls_CashCashEquivalentsAndRestrictedCashAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CashCashEquivalentsAndRestrictedCashAbstract",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "N/A",
        "label": "Cash, cash equivalents and restricted cash"
       }
      }
     },
     "auth_ref": []
    },
    "acls_CashCashEquivalentsAndRestrictedCashTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CashCashEquivalentsAndRestrictedCashTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for cash, cash equivalents and restricted cash.",
        "label": "Cash Cash Equivalents And Restricted Cash [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of cash, cash equivalents and restricted cash"
       }
      }
     },
     "auth_ref": []
    },
    "acls_CashCashEquivalentsAndRestrictedCashTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CashCashEquivalentsAndRestrictedCashTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of cash, cash equivalents and restricted cash.",
        "label": "Cash Cash Equivalents And Restricted Cash [Text Block]",
        "terseLabel": "Cash, cash equivalents and restricted cash"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents",
        "periodEndLabel": "Cash, cash equivalents and restricted cash at end of period",
        "periodStartLabel": "Cash, cash equivalents and restricted cash at beginning of period",
        "totalLabel": "Total cash, cash equivalents and restricted cash",
        "documentation": "Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": [
      "r43",
      "r116",
      "r219"
     ]
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents [Abstract]"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect",
        "totalLabel": "Net (decrease) increase in cash, cash equivalents and restricted cash",
        "documentation": "Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": [
      "r2",
      "r116"
     ]
    },
    "acls_ChargesRelatedToReflectLowerOfCostOrMarketValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ChargesRelatedToReflectLowerOfCostOrMarketValue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the amount charged to cost of sales due to reflect the lower of cost or market value.",
        "label": "Charges Related to Reflect Lower of Cost or Market Value",
        "terseLabel": "Charges to cost of sales due to lower of cost or market value"
       }
      }
     },
     "auth_ref": []
    },
    "dei_CityAreaCode": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "CityAreaCode",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "City Area Code",
        "documentation": "Area code of city"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CommitmentsAndContingencies": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommitmentsAndContingencies",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Commitments and Contingencies.",
        "terseLabel": "Commitments and contingencies (Note 16)",
        "documentation": "Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur."
       }
      }
     },
     "auth_ref": [
      "r35",
      "r82",
      "r574",
      "r624"
     ]
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommitmentsAndContingenciesDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Commitments and Contingencies"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommitmentsAndContingenciesDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingencies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Commitments and Contingencies Disclosure [Text Block]",
        "terseLabel": "Commitments and Contingencies",
        "documentation": "The entire disclosure for commitments and contingencies."
       }
      }
     },
     "auth_ref": [
      "r126",
      "r306",
      "r307",
      "r684",
      "r800"
     ]
    },
    "us-gaap_CommonStockMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock",
        "documentation": "Stock that is subordinate to all other stock of the issuer."
       }
      }
     },
     "auth_ref": [
      "r743",
      "r744",
      "r745",
      "r747",
      "r748",
      "r749",
      "r750",
      "r788",
      "r789",
      "r843",
      "r865",
      "r869"
     ]
    },
    "us-gaap_CommonStockParOrStatedValuePerShare": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockParOrStatedValuePerShare",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock, Par or Stated Value Per Share",
        "terseLabel": "Common stock, par value (in dollars per share)",
        "documentation": "Face amount or stated value per share of common stock."
       }
      }
     },
     "auth_ref": [
      "r92"
     ]
    },
    "us-gaap_CommonStockSharesAuthorized": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockSharesAuthorized",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockholdersEquityDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock, Shares Authorized",
        "terseLabel": "Common stock, shares authorized",
        "verboseLabel": "Number of common stock authorized",
        "documentation": "The maximum number of common shares permitted to be issued by an entity's charter and bylaws."
       }
      }
     },
     "auth_ref": [
      "r92",
      "r625"
     ]
    },
    "us-gaap_CommonStockSharesIssued": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockSharesIssued",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock, Shares, Issued",
        "terseLabel": "Common stock, shares issued",
        "documentation": "Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury."
       }
      }
     },
     "auth_ref": [
      "r92"
     ]
    },
    "us-gaap_CommonStockSharesOutstanding": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockSharesOutstanding",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockholdersEquityDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock, Shares, Outstanding",
        "terseLabel": "Common stock, shares outstanding",
        "verboseLabel": "Number of common stock outstanding",
        "documentation": "Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r92",
      "r625",
      "r643",
      "r869",
      "r870"
     ]
    },
    "us-gaap_CommonStockValueOutstanding": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CommonStockValueOutstanding",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Common Stock, Value, Outstanding",
        "verboseLabel": "Common stock, $0.001 par value, 75,000 shares authorized; 32,685 shares issued and outstanding at December 31, 2023; 32,775 shares issued and outstanding at December 31, 2022",
        "documentation": "Value of all classes of common stock held by shareholders. May be all or portion of the number of common shares authorized. These shares exclude common shares repurchased by the entity and held as treasury shares."
       }
      }
     },
     "auth_ref": [
      "r92",
      "r625"
     ]
    },
    "us-gaap_CompensationAndRetirementDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CompensationAndRetirementDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Benefit Plans"
       }
      }
     },
     "auth_ref": []
    },
    "acls_CompletedInternalUseAssetsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CompletedInternalUseAssetsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to internal used assets that have been completed and placed into use.",
        "label": "Internal use assets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ComponentsOfDeferredTaxAssetsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ComponentsOfDeferredTaxAssetsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred tax assets:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ComponentsOfDeferredTaxLiabilitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred tax liabilities:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ComponentsOfIncomeTaxExpenseBenefitContinuingOperationsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Components of Income Tax Expense (Benefit), Continuing Operations [Abstract]",
        "terseLabel": "Income taxes (Benefits)"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ComprehensiveIncomeNetOfTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ComprehensiveIncomeNetOfTax",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Comprehensive Income (Loss), Net of Tax, Attributable to Parent",
        "totalLabel": "Comprehensive income",
        "documentation": "Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners."
       }
      }
     },
     "auth_ref": [
      "r40",
      "r200",
      "r202",
      "r210",
      "r569",
      "r585"
     ]
    },
    "us-gaap_ConcentrationRiskBenchmarkDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskBenchmarkDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk Benchmark [Domain]",
        "documentation": "The denominator in a calculation of a disclosed concentration risk percentage."
       }
      }
     },
     "auth_ref": [
      "r48",
      "r51",
      "r75",
      "r76",
      "r291",
      "r683"
     ]
    },
    "us-gaap_ConcentrationRiskByBenchmarkAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskByBenchmarkAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk Benchmark [Axis]",
        "documentation": "Information by benchmark of concentration risk."
       }
      }
     },
     "auth_ref": [
      "r48",
      "r51",
      "r75",
      "r76",
      "r291",
      "r601",
      "r683"
     ]
    },
    "us-gaap_ConcentrationRiskByTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskByTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk Type [Axis]",
        "documentation": "Information by type of concentration risk, for example, but not limited to, asset, liability, net assets, geographic, customer, employees, supplier, lender."
       }
      }
     },
     "auth_ref": [
      "r48",
      "r51",
      "r75",
      "r76",
      "r291",
      "r683",
      "r767"
     ]
    },
    "us-gaap_ConcentrationRiskCreditRisk": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskCreditRisk",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk, Credit Risk, Policy [Policy Text Block]",
        "terseLabel": "Concentration of Risk and Off-Balance Sheet Risk",
        "documentation": "Disclosure of accounting policy for credit risk."
       }
      }
     },
     "auth_ref": [
      "r84",
      "r160"
     ]
    },
    "us-gaap_ConcentrationRiskLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk [Line Items]",
        "verboseLabel": "Concentration of Risk",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r683"
     ]
    },
    "acls_ConcentrationRiskNumberOfCustomers": {
     "xbrltype": "integerItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ConcentrationRiskNumberOfCustomers",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.",
        "label": "Concentration Risk Number of Customers",
        "terseLabel": "Number of customers"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ConcentrationRiskPercentage1": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskPercentage1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk, Percentage",
        "terseLabel": "Percentage of concentration risk",
        "verboseLabel": "Percentage of revenue",
        "documentation": "For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the \"benchmark\" (or denominator) in the equation, this concept represents the concentration percentage derived from the division."
       }
      }
     },
     "auth_ref": [
      "r48",
      "r51",
      "r75",
      "r76",
      "r291"
     ]
    },
    "us-gaap_ConcentrationRiskTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk [Table]",
        "documentation": "Describes the nature of a concentration, a benchmark to which it is compared, and the percentage that the risk is to the benchmark."
       }
      }
     },
     "auth_ref": [
      "r47",
      "r48",
      "r51",
      "r52",
      "r75",
      "r141",
      "r683"
     ]
    },
    "us-gaap_ConcentrationRiskTypeDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConcentrationRiskTypeDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration Risk Type [Domain]",
        "documentation": "For an entity that discloses a concentration risk as a percentage of some financial balance or benchmark, identifies the type (for example, asset, liability, net assets, geographic, customer, employees, supplier, lender) of the concentration."
       }
      }
     },
     "auth_ref": [
      "r48",
      "r51",
      "r75",
      "r76",
      "r291",
      "r683"
     ]
    },
    "us-gaap_ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidation, Subsidiaries or Other Investments, Consolidated Entities, Policy [Policy Text Block]",
        "terseLabel": "Basis of Presentation",
        "documentation": "Disclosure of accounting policy for subsidiaries or other investments that are consolidated, including the accounting treatment for intercompany accounts or transactions and any noncontrolling interest."
       }
      }
     },
     "auth_ref": [
      "r157"
     ]
    },
    "us-gaap_ConstructionInProgressMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ConstructionInProgressMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Construction in progress",
        "documentation": "Structure or a modification to a structure under construction. Includes recently completed structures or modifications to structures that have not been placed into service."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ContractWithCustomerAssetAndLiabilityTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Asset and Liability [Table Text Block]",
        "terseLabel": "Schedule of Contract liabilities",
        "documentation": "Tabular disclosure of receivable, contract asset, and contract liability from contract with customer. Includes, but is not limited to, change in contract asset and contract liability."
       }
      }
     },
     "auth_ref": [
      "r808"
     ]
    },
    "us-gaap_ContractWithCustomerLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ContractWithCustomerLiability",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Liability",
        "periodEndLabel": "Balance, end of the period",
        "periodStartLabel": "Balance, beginning of the period",
        "verboseLabel": "Deferred revenue",
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable."
       }
      }
     },
     "auth_ref": [
      "r375",
      "r376",
      "r387"
     ]
    },
    "us-gaap_ContractWithCustomerLiabilityCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ContractWithCustomerLiabilityCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Liability, Current",
        "terseLabel": "Deferred revenue",
        "verboseLabel": "Short-term deferred revenue",
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current."
       }
      }
     },
     "auth_ref": [
      "r375",
      "r376",
      "r387"
     ]
    },
    "acls_ContractWithCustomerLiabilityDeferralOfRevenue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ContractWithCustomerLiabilityDeferralOfRevenue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.",
        "label": "Contract with Customer, Liability, Deferral Of Revenue",
        "terseLabel": "Deferral of revenue"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ContractWithCustomerLiabilityNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ContractWithCustomerLiabilityNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Liability, Noncurrent",
        "terseLabel": "Long-term deferred revenue",
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent."
       }
      }
     },
     "auth_ref": [
      "r375",
      "r376",
      "r387"
     ]
    },
    "us-gaap_ContractWithCustomerLiabilityRevenueRecognized": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ContractWithCustomerLiabilityRevenueRecognized",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contract with Customer, Liability, Revenue Recognized",
        "terseLabel": "Recognition of deferred revenue",
        "documentation": "Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due."
       }
      }
     },
     "auth_ref": [
      "r388"
     ]
    },
    "us-gaap_CostOfGoodsAndServicesSold": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CostOfGoodsAndServicesSold",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_GrossProfit",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cost of Goods and Services Sold",
        "terseLabel": "Total cost of revenue",
        "documentation": "The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities."
       }
      }
     },
     "auth_ref": [
      "r107",
      "r567"
     ]
    },
    "acls_CostOfPropertyRepairsAndMaintenanceCapitalized": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "CostOfPropertyRepairsAndMaintenanceCapitalized",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs of keeping the property in good condition and are capitalized and depreciated over the life of the property.",
        "label": "Cost of Property Repairs and Maintenance, Capitalized",
        "terseLabel": "Capitalized cost of property repairs and maintenance"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CostOfRevenueAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CostOfRevenueAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cost of Revenue [Abstract]",
        "terseLabel": "Cost of revenue:"
       }
      }
     },
     "auth_ref": []
    },
    "srt_CounterpartyNameAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "CounterpartyNameAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Counterparty Name [Axis]",
        "documentation": "Information by name of counterparty. A counterparty is the other party that participates in a financial transaction. Examples include, but not limited to, the name of the financial institution."
       }
      }
     },
     "auth_ref": [
      "r180",
      "r226",
      "r227",
      "r338",
      "r363",
      "r559",
      "r706",
      "r708"
     ]
    },
    "dei_CoverAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "CoverAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Document and Entity Information",
        "documentation": "Cover page."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CreditConcentrationRiskMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CreditConcentrationRiskMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Credit concentration risk",
        "documentation": "Reflects the percentage that a specified receivable or amount at risk from a counterparty under a contractual arrangement is to a specified benchmark, such as total receivables, net revenues, pretax results. Risk is the materially adverse effects of loss attributable to (a) the failure to collect a significant receivable from a major customer or group of homogeneous accounts, or (b) a failure by a counterparty to perform under terms of a contractual arrangement."
       }
      }
     },
     "auth_ref": [
      "r141"
     ]
    },
    "us-gaap_CreditFacilityAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CreditFacilityAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Credit Facility [Axis]",
        "documentation": "Information by type of credit facility. Credit facilities provide capital to borrowers without the need to structure a loan for each borrowing."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CreditFacilityDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CreditFacilityDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Credit Facility [Domain]",
        "documentation": "Type of credit facility. Credit facilities provide capital to borrowers without the need to structure a loan for each borrowing."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CurrentFederalTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CurrentFederalTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Federal Tax Expense (Benefit)",
        "terseLabel": "Federal",
        "documentation": "Amount of current federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current national tax expense (benefit) for non-US (United States of America) jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r769",
      "r782",
      "r842"
     ]
    },
    "dei_CurrentFiscalYearEndDate": {
     "xbrltype": "gMonthDayItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "CurrentFiscalYearEndDate",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Fiscal Year End Date",
        "documentation": "End date of current fiscal year in the format --MM-DD."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CurrentForeignTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CurrentForeignTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Foreign Tax Expense (Benefit)",
        "terseLabel": "Foreign",
        "documentation": "Amount of current foreign income tax expense (benefit) pertaining to income (loss) from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r769",
      "r782"
     ]
    },
    "us-gaap_CurrentIncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CurrentIncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Income Tax Expense (Benefit)",
        "totalLabel": "Total current",
        "documentation": "Amount of current income tax expense (benefit) pertaining to taxable income (loss) from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r138",
      "r488",
      "r494",
      "r782"
     ]
    },
    "us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current Income Tax Expense (Benefit), Continuing Operations [Abstract]",
        "terseLabel": "Current:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_CurrentStateAndLocalTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CurrentStateAndLocalTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "us-gaap_CurrentIncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Current State and Local Tax Expense (Benefit)",
        "terseLabel": "State",
        "documentation": "Amount of current state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, current regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r769",
      "r782",
      "r842"
     ]
    },
    "us-gaap_CustomerConcentrationRiskMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "CustomerConcentrationRiskMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer concentration risk",
        "documentation": "Reflects the percentage that revenues in the period from one or more significant customers is to net revenues, as defined by the entity, such as total net revenues, product line revenues, segment revenues. The risk is the materially adverse effects of loss of a significant customer."
       }
      }
     },
     "auth_ref": [
      "r49",
      "r291"
     ]
    },
    "us-gaap_DebtDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DebtDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Financing Arrangements"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DebtDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DebtDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangements"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Disclosure [Text Block]",
        "terseLabel": "Financing Arrangements",
        "documentation": "The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants."
       }
      }
     },
     "auth_ref": [
      "r127",
      "r221",
      "r334",
      "r340",
      "r341",
      "r342",
      "r343",
      "r344",
      "r345",
      "r350",
      "r357",
      "r358",
      "r360"
     ]
    },
    "us-gaap_DebtInstrumentLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DebtInstrumentLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Debt Instrument [Line Items]",
        "terseLabel": "Financing Arrangements",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r228",
      "r335",
      "r336",
      "r337",
      "r338",
      "r339",
      "r341",
      "r346",
      "r347",
      "r348",
      "r349",
      "r351",
      "r352",
      "r353",
      "r354",
      "r355",
      "r356",
      "r359",
      "r540",
      "r716",
      "r717",
      "r718",
      "r719",
      "r720",
      "r780"
     ]
    },
    "us-gaap_DebtInstrumentTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DebtInstrumentTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Long-term Debt Instruments [Table]",
        "documentation": "A table or schedule providing information pertaining to long-term debt instruments or arrangements, including identification, terms, features, collateral requirements and other information necessary to a fair presentation. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer."
       }
      }
     },
     "auth_ref": [
      "r33",
      "r63",
      "r64",
      "r77",
      "r78",
      "r80",
      "r83",
      "r129",
      "r130",
      "r228",
      "r335",
      "r336",
      "r337",
      "r338",
      "r339",
      "r341",
      "r346",
      "r347",
      "r348",
      "r349",
      "r351",
      "r352",
      "r353",
      "r354",
      "r355",
      "r356",
      "r359",
      "r540",
      "r716",
      "r717",
      "r718",
      "r719",
      "r720",
      "r780"
     ]
    },
    "us-gaap_DeferredFederalIncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredFederalIncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Federal Income Tax Expense (Benefit)",
        "terseLabel": "Federal",
        "documentation": "Amount of deferred federal tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred national tax expense (benefit) for non-US (United States of America) jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r782",
      "r841",
      "r842"
     ]
    },
    "us-gaap_DeferredForeignIncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredForeignIncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Foreign Income Tax Expense (Benefit)",
        "terseLabel": "Foreign",
        "documentation": "Amount of deferred foreign income tax expense (benefit) pertaining to income (loss) from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r138",
      "r782",
      "r841"
     ]
    },
    "us-gaap_DeferredIncomeTaxAssetsNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredIncomeTaxAssetsNet",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Net.",
        "terseLabel": "Deferred income taxes",
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting."
       }
      }
     },
     "auth_ref": [
      "r468",
      "r469"
     ]
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredIncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Income Tax Expense (Benefit)",
        "terseLabel": "Deferred income taxes",
        "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r11",
      "r138",
      "r166",
      "r493",
      "r494",
      "r782"
     ]
    },
    "acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations after allocation of valuation allowance.",
        "label": "Deferred Income Tax Expense Benefit After Valuation Allowance Allocation",
        "totalLabel": "Total deferred"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Income Tax Expense (Benefit), Continuing Operations [Abstract]",
        "terseLabel": "Deferred:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredIncomeTaxLiabilities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredIncomeTaxLiabilities",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredTaxAssetsLiabilitiesNet",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Liabilities, Gross",
        "negatedTotalLabel": "Gross deferred tax liabilities",
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences."
       }
      }
     },
     "auth_ref": [
      "r89",
      "r90",
      "r145",
      "r482"
     ]
    },
    "us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredStateAndLocalIncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": "acls_DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred State and Local Income Tax Expense (Benefit)",
        "terseLabel": "State",
        "documentation": "Amount of deferred state and local tax expense (benefit) attributable to income (loss) from continuing operations. Includes, but is not limited to, deferred regional, territorial, and provincial tax expense (benefit) for non-US (United States of America) jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r782",
      "r841",
      "r842"
     ]
    },
    "acls_DeferredTaxAssetOperatingLeaseLiabilities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxAssetOperatingLeaseLiabilities",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 7.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from operating lease liabilities.",
        "label": "Deferred Tax Asset, Operating Lease Liabilities",
        "terseLabel": "Operating lease liability"
       }
      }
     },
     "auth_ref": []
    },
    "acls_DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from capitalized research and development costs expensed in connection with a business combination.",
        "label": "Deferred Tax Assets, Capitalized Research and Development Costs",
        "terseLabel": "Capitalized research and development costs"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxAssetsDeferredIncome": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsDeferredIncome",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Deferred Income",
        "terseLabel": "Deferred revenue",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from deferred income."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxAssetsGross": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsGross",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredTaxAssetsLiabilitiesNet",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Gross",
        "totalLabel": "Net deferred tax assets",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards."
       }
      }
     },
     "auth_ref": [
      "r483"
     ]
    },
    "us-gaap_DeferredTaxAssetsInventory": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsInventory",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Inventory",
        "terseLabel": "Inventories",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from inventory."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxAssetsLiabilitiesGrossNoncurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards, net of deferred tax liability attributable to taxable temporary differences.",
        "label": "Deferred Tax Assets (Liabilities) Gross Noncurrent",
        "totalLabel": "Gross deferred tax assets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxAssetsLiabilitiesNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsLiabilitiesNet",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Net",
        "terseLabel": "Deferred tax assets",
        "totalLabel": "Deferred taxes, net",
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, without jurisdictional netting."
       }
      }
     },
     "auth_ref": [
      "r839"
     ]
    },
    "us-gaap_DeferredTaxAssetsNetOfValuationAllowanceAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsNetOfValuationAllowanceAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Net of Valuation Allowance, Noncurrent Classification [Abstract]",
        "terseLabel": "Significant components of long-term deferred income taxes"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsForeign": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsOperatingLossCarryforwardsForeign",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 11.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Operating Loss Carryforwards, Foreign",
        "terseLabel": "Foreign net operating loss carryforwards",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible foreign operating loss carryforwards."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 12.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Operating Loss Carryforwards, State and Local",
        "terseLabel": "State net operating loss carryforwards",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local operating loss carryforwards."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxAssetsPropertyPlantAndEquipment": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsPropertyPlantAndEquipment",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 8.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Property, Plant and Equipment",
        "terseLabel": "Property, plant and equipment",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from property, plant, and equipment."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 10.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Tax Credit Carryforwards, General Business",
        "terseLabel": "Federal tax credit carryforwards",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible general business tax credit carryforwards."
       }
      }
     },
     "auth_ref": [
      "r71",
      "r72",
      "r840"
     ]
    },
    "acls_DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 9.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible state and local tax credit carryforwards.",
        "label": "Deferred Tax Assets, Tax Credit Carryforwards, State and Local",
        "terseLabel": "State tax credit carryforwards"
       }
      }
     },
     "auth_ref": []
    },
    "acls_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the noncurrent portion of amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from employee compensation.",
        "label": "Deferred Tax Assets Tax Deferred Expense Compensation and Benefits Employee Compensation Noncurrent",
        "terseLabel": "Accrued compensation"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Tax Deferred Expense, Compensation and Benefits, Share-based Compensation Cost",
        "terseLabel": "Stock compensation",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from share-based compensation."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "acls_DeferredTaxAssetsLiabilitiesGrossNoncurrent",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Tax Deferred Expense, Reserves and Accruals, Warranty Reserves",
        "terseLabel": "Warranty",
        "documentation": "Amount before allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences from warranty reserves."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxAssetsValuationAllowance": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxAssetsValuationAllowance",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredTaxAssetsGross",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Assets, Valuation Allowance",
        "negatedLabel": "Valuation allowance",
        "terseLabel": "Deferred tax assets valuation allowance",
        "documentation": "Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized."
       }
      }
     },
     "auth_ref": [
      "r484"
     ]
    },
    "us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Liabilities, Intangible Assets",
        "negatedLabel": "Intangible assets",
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from intangible assets other than goodwill."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "acls_DeferredTaxLiabilitiesInternalRevenueCodeLimitation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DeferredTaxLiabilitiesInternalRevenueCodeLimitation",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 8.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets attributable to internal Revenue Code 162(m) limitation.",
        "label": "Deferred Tax Liabilities, Internal Revenue Code Limitation",
        "terseLabel": "Internal revenue code section 162(m) limitation"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DeferredTaxLiabilitiesLeasingArrangements": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxLiabilitiesLeasingArrangements",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Liabilities, Leasing Arrangements",
        "negatedLabel": "Right-of-use asset",
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences from leasing arrangements."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DeferredTaxLiabilitiesOther": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DeferredTaxLiabilitiesOther",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails": {
       "parentTag": "us-gaap_DeferredIncomeTaxLiabilities",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesComponentsOfLongTermDeferredIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred Tax Liabilities, Other",
        "negatedLabel": "Other",
        "documentation": "Amount of deferred tax liability attributable to taxable temporary differences classified as other."
       }
      }
     },
     "auth_ref": [
      "r72",
      "r840"
     ]
    },
    "us-gaap_DefinedBenefitPlanAdministrationExpenses": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedBenefitPlanAdministrationExpenses",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Benefit Plan, Administration Expenses",
        "terseLabel": "Plan expenses",
        "documentation": "Amount of administration expense of defined benefit plan which decreases plan assets. Excludes plan administration expense paid by employer."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DefinedContributionPlanCostRecognized": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedContributionPlanCostRecognized",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Contribution Plan, Cost Recognized",
        "terseLabel": "Defined contribution plan expenses",
        "documentation": "Amount of cost for defined contribution plan."
       }
      }
     },
     "auth_ref": [
      "r410"
     ]
    },
    "us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedContributionPlanEmployerMatchingContributionPercent",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Contribution Plan, Employer Matching Contribution, Percent of Employees' Gross Pay",
        "terseLabel": "Pre-tax compensation contributed",
        "documentation": "Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedContributionPlanEmployerMatchingContributionPercentOfMatch",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Contribution Plan, Employer Matching Contribution, Percent of Match",
        "terseLabel": "Employer contributed by eligible participants",
        "documentation": "Percentage employer matches of the employee's percentage contribution matched."
       }
      }
     },
     "auth_ref": []
    },
    "acls_DefinedContributionPlanLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DefinedContributionPlanLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information.",
        "label": "Defined Contribution Plan [Line Items]",
        "terseLabel": "Defined Contribution Plan"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Contribution Plan, Maximum Annual Contributions Per Employee, Percent",
        "terseLabel": "Maximum contribution per employee under the Axcelis Long-Term Investment Plan (as a percent)",
        "documentation": "Maximum percentage of employee gross pay the employee may contribute to a defined contribution plan."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_DefinedContributionPlanTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DefinedContributionPlanTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Defined Contribution Plan [Table]",
        "documentation": "Disclosure of information about defined contribution pension plans or defined contribution other postretirement plans, separately for pension plans and other postretirement benefit plans."
       }
      }
     },
     "auth_ref": [
      "r410"
     ]
    },
    "acls_DepositRelatingToCustomsActivity": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "DepositRelatingToCustomsActivity",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of deposits relating customs activity.",
        "label": "Deposit Relating To Customs Activity",
        "terseLabel": "Deposit related to customs activity"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_Depreciation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "Depreciation",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Depreciation",
        "terseLabel": "Depreciation expense",
        "documentation": "The amount of expense recognized in the current period that reflects the allocation of the cost of tangible assets over the assets' useful lives. Includes production and non-production related depreciation."
       }
      }
     },
     "auth_ref": [
      "r11",
      "r60"
     ]
    },
    "us-gaap_DepreciationDepletionAndAmortization": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DepreciationDepletionAndAmortization",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Depreciation, Depletion and Amortization",
        "terseLabel": "Depreciation and amortization",
        "documentation": "The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets."
       }
      }
     },
     "auth_ref": [
      "r11",
      "r273"
     ]
    },
    "us-gaap_DisaggregationOfRevenueLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DisaggregationOfRevenueLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Disaggregation of Revenue [Line Items]",
        "terseLabel": "Disaggregation of Revenue",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r386",
      "r722",
      "r723",
      "r724",
      "r725",
      "r726",
      "r727",
      "r728"
     ]
    },
    "us-gaap_DisaggregationOfRevenueTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DisaggregationOfRevenueTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Disaggregation of Revenue [Table]",
        "documentation": "Disclosure of information about disaggregation of revenue into categories depicting how nature, amount, timing, and uncertainty of revenue and cash flows are affected by economic factor."
       }
      }
     },
     "auth_ref": [
      "r386",
      "r722",
      "r723",
      "r724",
      "r725",
      "r726",
      "r727",
      "r728"
     ]
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Disclosure of Compensation Related Costs, Share-based Payments [Text Block]",
        "terseLabel": "Stock Award Plans and Stock Based Compensation",
        "documentation": "The entire disclosure for share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r413",
      "r418",
      "r449",
      "r450",
      "r452",
      "r733"
     ]
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Award Plans and Stock Based Compensation"
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentAnnualReport": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentAnnualReport",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Annual Report",
        "documentation": "Boolean flag that is true only for a form used as an annual report."
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759"
     ]
    },
    "dei_DocumentFinStmtErrorCorrectionFlag": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentFinStmtErrorCorrectionFlag",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Financial Statement Error Correction [Flag]",
        "documentation": "Indicates whether any of the financial statement period in the filing include a restatement due to error correction."
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759",
      "r761"
     ]
    },
    "dei_DocumentFiscalPeriodFocus": {
     "xbrltype": "fiscalPeriodItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentFiscalPeriodFocus",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Fiscal Period Focus",
        "documentation": "Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY."
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentFiscalYearFocus": {
     "xbrltype": "gYearItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentFiscalYearFocus",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Fiscal Year Focus",
        "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006."
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentPeriodEndDate": {
     "xbrltype": "dateItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentPeriodEndDate",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Period End Date",
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD."
       }
      }
     },
     "auth_ref": []
    },
    "dei_DocumentTransitionReport": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentTransitionReport",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Transition Report",
        "documentation": "Boolean flag that is true only for a form used as a transition report."
       }
      }
     },
     "auth_ref": [
      "r760"
     ]
    },
    "dei_DocumentType": {
     "xbrltype": "submissionTypeItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "DocumentType",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Document Type",
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EarningsPerShareAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EarningsPerShareAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Computation of Net Earnings per Share",
        "terseLabel": "Net income per share:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EarningsPerShareBasic": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EarningsPerShareBasic",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Basic",
        "terseLabel": "Basic",
        "documentation": "The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period."
       }
      }
     },
     "auth_ref": [
      "r211",
      "r241",
      "r242",
      "r243",
      "r244",
      "r245",
      "r250",
      "r253",
      "r258",
      "r259",
      "r260",
      "r262",
      "r515",
      "r516",
      "r570",
      "r586",
      "r711"
     ]
    },
    "acls_EarningsPerShareDetailAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "EarningsPerShareDetailAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "n/a",
        "label": "Earnings Per Share Detail [Abstract]",
        "terseLabel": "Net income per share"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EarningsPerShareDiluted": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EarningsPerShareDiluted",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Diluted",
        "terseLabel": "Diluted",
        "documentation": "The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period."
       }
      }
     },
     "auth_ref": [
      "r211",
      "r241",
      "r242",
      "r243",
      "r244",
      "r245",
      "r253",
      "r258",
      "r259",
      "r260",
      "r262",
      "r515",
      "r516",
      "r570",
      "r586",
      "r711"
     ]
    },
    "us-gaap_EarningsPerSharePolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EarningsPerSharePolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Policy [Policy Text Block]",
        "terseLabel": "Computation of Net Income per Share",
        "documentation": "Disclosure of accounting policy for computing basic and diluted earnings or loss per share for each class of common stock and participating security. Addresses all significant policy factors, including any antidilutive items that have been excluded from the computation and takes into account stock dividends, splits and reverse splits that occur after the balance sheet date of the latest reporting period but before the issuance of the financial statements."
       }
      }
     },
     "auth_ref": [
      "r45",
      "r46"
     ]
    },
    "us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents",
        "terseLabel": "Effect of exchange rate changes on cash and cash equivalents",
        "documentation": "Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies; including, but not limited to, disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": [
      "r847"
     ]
    },
    "us-gaap_EffectiveIncomeTaxRateContinuingOperations": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EffectiveIncomeTaxRateContinuingOperations",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Percent",
        "terseLabel": "Effective Federal income tax rate",
        "documentation": "Percentage of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations."
       }
      }
     },
     "auth_ref": [
      "r471"
     ]
    },
    "us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EffectiveIncomeTaxRateReconciliationFdiiAmount",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, FDII, Amount",
        "negatedLabel": "Foreign-derived intangible income",
        "documentation": "Amount of reported income tax benefit from difference to expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operations, attributable to foreign-derived intangible income (FDII)."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_EffectiveIncomeTaxRateReconciliationGiltiAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EffectiveIncomeTaxRateReconciliationGiltiAmount",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, GILTI, Amount",
        "terseLabel": "GILTI inclusion",
        "documentation": "Amount of reported income tax expense from difference to expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operations, attributable to global intangible low-taxed income (GILTI)."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "acls_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 7.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to credit expirations.",
        "label": "Effective Income Tax Rate Reconciliation, Nondeductible Expense, Credit Expirations, Amount",
        "terseLabel": "Credit expirations"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EmployeeRelatedLiabilitiesCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeRelatedLiabilitiesCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee-related Liabilities, Current",
        "terseLabel": "Accrued compensation",
        "documentation": "Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer)."
       }
      }
     },
     "auth_ref": [
      "r31"
     ]
    },
    "us-gaap_EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeServiceShareBasedCompensationAggregateDisclosuresAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Aggregate Disclosures [Abstract]",
        "terseLabel": "Stock-Based Compensation Expense"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Nonvested Awards, Compensation Cost Not yet Recognized, Period for Recognition",
        "terseLabel": "Weighted-average period over which unrecognized compensation cost is expected to be recognized",
        "documentation": "Weighted-average period over which cost not yet recognized is expected to be recognized for award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r451"
     ]
    },
    "us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Nonvested Awards, Compensation Not yet Recognized, Stock Options",
        "terseLabel": "Total forfeiture adjusted unrecognized compensation cost (in dollars)",
        "documentation": "Amount of cost to be recognized for option under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r836"
     ]
    },
    "us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Service Share-based Compensation, Tax Benefit from Compensation Expense",
        "terseLabel": "Tax benefit",
        "documentation": "Amount of tax benefit for recognition of expense of award under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r448"
     ]
    },
    "us-gaap_EmployeeStockMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EmployeeStockMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Stock Purchase Plan",
        "documentation": "An Employee Stock Purchase Plan is a tax-efficient means by which employees of a corporation can purchase the corporation's stock."
       }
      }
     },
     "auth_ref": []
    },
    "acls_EmployeeStockPurchasePlanAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "EmployeeStockPurchasePlanAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Employee Stock Purchase Plan [Abstract]",
        "terseLabel": "Employee Stock Purchase Plan"
       }
      }
     },
     "auth_ref": []
    },
    "acls_EmployeesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "EmployeesMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the employees of the entity.",
        "label": "Employees"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressAddressLine1": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityAddressAddressLine1",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, Address Line One",
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressCityOrTown": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityAddressCityOrTown",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, City or Town",
        "documentation": "Name of the City or Town"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressPostalZipCode": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityAddressPostalZipCode",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, Postal Zip Code",
        "documentation": "Code for the postal or zip code"
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityAddressStateOrProvince": {
     "xbrltype": "stateOrProvinceItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityAddressStateOrProvince",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Address, State or Province",
        "documentation": "Name of the state or province."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityCentralIndexKey": {
     "xbrltype": "centralIndexKeyItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityCentralIndexKey",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Central Index Key",
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityCommonStockSharesOutstanding": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityCommonStockSharesOutstanding",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Common Stock, Shares Outstanding",
        "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityCurrentReportingStatus": {
     "xbrltype": "yesNoItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityCurrentReportingStatus",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Current Reporting Status",
        "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityEmergingGrowthCompany": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityEmergingGrowthCompany",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Emerging Growth Company",
        "documentation": "Indicate if registrant meets the emerging growth company criteria."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityFileNumber": {
     "xbrltype": "fileNumberItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityFileNumber",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity File Number",
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityFilerCategory": {
     "xbrltype": "filerCategoryItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityFilerCategory",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Filer Category",
        "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityIncorporationStateCountryCode": {
     "xbrltype": "edgarStateCountryItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityIncorporationStateCountryCode",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Incorporation, State or Country Code",
        "documentation": "Two-character EDGAR code representing the state or country of incorporation."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityInteractiveDataCurrent": {
     "xbrltype": "yesNoItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityInteractiveDataCurrent",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Interactive Data Current",
        "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files)."
       }
      }
     },
     "auth_ref": [
      "r762"
     ]
    },
    "dei_EntityPublicFloat": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityPublicFloat",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Public Float",
        "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityRegistrantName": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityRegistrantName",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Registrant Name",
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityShellCompany": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityShellCompany",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Shell Company",
        "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntitySmallBusiness": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntitySmallBusiness",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Small Business",
        "documentation": "Indicates that the company is a Smaller Reporting Company (SRC)."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityTaxIdentificationNumber": {
     "xbrltype": "employerIdItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityTaxIdentificationNumber",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Tax Identification Number",
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS."
       }
      }
     },
     "auth_ref": [
      "r755"
     ]
    },
    "dei_EntityVoluntaryFilers": {
     "xbrltype": "yesNoItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityVoluntaryFilers",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Voluntary Filers",
        "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act."
       }
      }
     },
     "auth_ref": []
    },
    "dei_EntityWellKnownSeasonedIssuer": {
     "xbrltype": "yesNoItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "EntityWellKnownSeasonedIssuer",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Entity Well-known Seasoned Issuer",
        "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A."
       }
      }
     },
     "auth_ref": [
      "r763"
     ]
    },
    "us-gaap_EntityWideInformationRevenueFromExternalCustomerLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EntityWideInformationRevenueFromExternalCustomerLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from External Customer [Line Items]",
        "terseLabel": "Revenue by product lines",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EquityComponentDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EquityComponentDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Equity Component [Domain]",
        "documentation": "Components of equity are the parts of the total Equity balance including that which is allocated to common, preferred, treasury stock, retained earnings, etc."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r181",
      "r204",
      "r205",
      "r206",
      "r236",
      "r237",
      "r238",
      "r240",
      "r246",
      "r248",
      "r263",
      "r296",
      "r297",
      "r374",
      "r453",
      "r454",
      "r455",
      "r489",
      "r490",
      "r507",
      "r508",
      "r509",
      "r510",
      "r511",
      "r512",
      "r514",
      "r532",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538",
      "r558",
      "r595",
      "r596",
      "r597",
      "r610",
      "r666"
     ]
    },
    "acls_EquityIncentivePlan2012Member": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "EquityIncentivePlan2012Member",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to 2012 Equity Incentive Plan of the entity.",
        "label": "Equity incentive plan 2012"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_EstimateOfFairValueFairValueDisclosureMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "EstimateOfFairValueFairValueDisclosureMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Estimate of fair value measurement",
        "documentation": "Measured as an estimate of fair value."
       }
      }
     },
     "auth_ref": [
      "r348",
      "r525",
      "r717",
      "r718"
     ]
    },
    "srt_EuropeMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "EuropeMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Europe",
        "documentation": "Continent of Europe."
       }
      }
     },
     "auth_ref": [
      "r871",
      "r872",
      "r873",
      "r874"
     ]
    },
    "acls_ExtendedProductWarrantyPeriod": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ExtendedProductWarrantyPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the extended period for which the warranty is offered for the products sold.",
        "label": "Extended Product Warranty Period",
        "verboseLabel": "Product warranty period"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]",
        "verboseLabel": "Fair Value Measurements",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r518",
      "r519",
      "r522"
     ]
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Measurements, Recurring and Nonrecurring [Table]",
        "documentation": "Disclosure of information about asset and liability measured at fair value on recurring and nonrecurring basis."
       }
      }
     },
     "auth_ref": [
      "r518",
      "r519",
      "r522"
     ]
    },
    "us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asset Class [Domain]",
        "documentation": "Class of asset."
       }
      }
     },
     "auth_ref": [
      "r20"
     ]
    },
    "us-gaap_FairValueByAssetClassAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueByAssetClassAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asset Class [Axis]",
        "documentation": "Information by class of asset."
       }
      }
     },
     "auth_ref": [
      "r73",
      "r74"
     ]
    },
    "us-gaap_FairValueByFairValueHierarchyLevelAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueByFairValueHierarchyLevelAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value, Hierarchy [Axis]",
        "documentation": "Information by level within fair value hierarchy and fair value measured at net asset value per share as practical expedient."
       }
      }
     },
     "auth_ref": [
      "r348",
      "r396",
      "r397",
      "r398",
      "r399",
      "r400",
      "r401",
      "r519",
      "r560",
      "r561",
      "r562",
      "r717",
      "r718",
      "r729",
      "r730",
      "r731"
     ]
    },
    "us-gaap_FairValueByMeasurementBasisAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueByMeasurementBasisAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Measurement Basis [Axis]",
        "documentation": "Information by measurement basis."
       }
      }
     },
     "auth_ref": [
      "r25",
      "r73",
      "r348",
      "r717",
      "r718"
     ]
    },
    "us-gaap_FairValueByMeasurementFrequencyAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueByMeasurementFrequencyAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Measurement Frequency [Axis]",
        "documentation": "Information by measurement frequency."
       }
      }
     },
     "auth_ref": [
      "r518",
      "r519",
      "r520",
      "r521",
      "r523"
     ]
    },
    "us-gaap_FairValueDisclosuresAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueDisclosuresAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Measurements"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_FairValueDisclosuresTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueDisclosuresTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurements"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Disclosures [Text Block]",
        "terseLabel": "Fair Value Measurements",
        "documentation": "The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information."
       }
      }
     },
     "auth_ref": [
      "r517"
     ]
    },
    "us-gaap_FairValueInputsLevel1Member": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueInputsLevel1Member",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Level 1",
        "documentation": "Quoted prices in active markets for identical assets or liabilities that the reporting entity can access at the measurement date."
       }
      }
     },
     "auth_ref": [
      "r348",
      "r396",
      "r401",
      "r519",
      "r560",
      "r729",
      "r730",
      "r731"
     ]
    },
    "us-gaap_FairValueInputsLevel2Member": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueInputsLevel2Member",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Level 2",
        "documentation": "Inputs other than quoted prices included within level 1 that are observable for an asset or liability, either directly or indirectly, including, but not limited to, quoted prices for similar assets or liabilities in active markets, or quoted prices for identical or similar assets or liabilities in inactive markets."
       }
      }
     },
     "auth_ref": [
      "r348",
      "r396",
      "r401",
      "r519",
      "r561",
      "r717",
      "r718",
      "r729",
      "r730",
      "r731"
     ]
    },
    "us-gaap_FairValueMeasurementFrequencyDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueMeasurementFrequencyDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value, Measurement Frequency [Domain]",
        "documentation": "Measurement frequency."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_FairValueMeasurementsFairValueHierarchyDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueMeasurementsFairValueHierarchyDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Hierarchy [Domain]",
        "documentation": "Categories used to prioritize the inputs to valuation techniques to measure fair value."
       }
      }
     },
     "auth_ref": [
      "r348",
      "r396",
      "r397",
      "r398",
      "r399",
      "r400",
      "r401",
      "r560",
      "r561",
      "r562",
      "r717",
      "r718",
      "r729",
      "r730",
      "r731"
     ]
    },
    "us-gaap_FairValueMeasurementsRecurringMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FairValueMeasurementsRecurringMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Recurring",
        "documentation": "Frequent fair value measurement. Includes, but is not limited to, fair value adjustment for impairment of asset, liability or equity, frequently measured at fair value."
       }
      }
     },
     "auth_ref": [
      "r517",
      "r523"
     ]
    },
    "acls_FederalMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "FederalMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the designated tax department of the government of the United States of America entitled to levy and collect income taxes from the entity.",
        "label": "Federal"
       }
      }
     },
     "auth_ref": []
    },
    "acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "n/a.",
        "label": "Finance And Operating Lease Liabilities Payments Due [Abstract]",
        "terseLabel": "Future minimum lease payments finance and operating lease"
       }
      }
     },
     "auth_ref": []
    },
    "acls_FinanceLeaseAccumulatedDepreciation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "FinanceLeaseAccumulatedDepreciation",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of depreciation of finance leased assets.",
        "label": "Finance Lease, Accumulated Depreciation",
        "terseLabel": "Finance lease, accumulated depreciation"
       }
      }
     },
     "auth_ref": []
    },
    "acls_FinanceLeaseCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "FinanceLeaseCost",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "parentTag": "us-gaap_LeaseCost",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of finance lease cost recognized by lessee for lease contract.",
        "label": "Finance Lease Cost",
        "totalLabel": "Total finance lease cost"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_FinanceLeaseInterestExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseInterestExpense",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "parentTag": "acls_FinanceLeaseCost",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Interest Expense",
        "terseLabel": "Interest on lease liabilities",
        "documentation": "Amount of interest expense on finance lease liability."
       }
      }
     },
     "auth_ref": [
      "r544",
      "r551",
      "r739"
     ]
    },
    "us-gaap_FinanceLeaseInterestPaymentOnLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseInterestPaymentOnLiability",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Interest Payment on Liability",
        "terseLabel": "Operating cash outflows from finance leases",
        "documentation": "Amount of interest paid on finance lease liability."
       }
      }
     },
     "auth_ref": [
      "r546",
      "r553"
     ]
    },
    "us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilitiesPaymentsDueAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease Liabilities, Payments, Due [Abstract]",
        "terseLabel": "Future minimum lease payments finance lease"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_FinanceLeaseLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiability",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability",
        "terseLabel": "Finance lease obligations",
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease."
       }
      }
     },
     "auth_ref": [
      "r542",
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 2.0
      },
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Current",
        "terseLabel": "Finance liabilities current",
        "verboseLabel": "Current portion of finance lease obligation",
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease, classified as current."
       }
      }
     },
     "auth_ref": [
      "r542"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0,
       "order": 2.0
      },
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Noncurrent",
        "terseLabel": "Finance liabilities noncurrent",
        "verboseLabel": "Long-term finance lease obligation",
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent."
       }
      }
     },
     "auth_ref": [
      "r542"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDue",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due",
        "totalLabel": "Total lease payments",
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance lease."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueAfterYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due after Year Five",
        "terseLabel": "Thereafter",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due Next Twelve Months",
        "terseLabel": "2024",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due Year Five",
        "verboseLabel": "2028",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueYearFour",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due Year Four",
        "verboseLabel": "2027",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueYearThree",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due Year Three",
        "verboseLabel": "2026",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityPaymentsDueYearTwo",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Payments, Due Year Two",
        "verboseLabel": "2025",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseLiabilityUndiscountedExcessAmount",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Liability, Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion",
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_FinanceLeasePrincipalPayments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeasePrincipalPayments",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Principal Payments",
        "negatedLabel": "Principal payments on finance lease obligation",
        "terseLabel": "Financing cash outflows from finance leases",
        "documentation": "Amount of cash outflow for principal payment on finance lease."
       }
      }
     },
     "auth_ref": [
      "r545",
      "r553"
     ]
    },
    "us-gaap_FinanceLeaseRightOfUseAsset": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseRightOfUseAsset",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseRightOfUseAsset",
       "weight": 1.0,
       "order": 2.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Right-of-Use Asset",
        "terseLabel": "Finance lease assets, net",
        "verboseLabel": "Finance lease assets",
        "documentation": "Amount, after accumulated amortization, of right-of-use asset from finance lease."
       }
      }
     },
     "auth_ref": [
      "r541"
     ]
    },
    "us-gaap_FinanceLeaseRightOfUseAssetAmortization": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseRightOfUseAssetAmortization",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "parentTag": "acls_FinanceLeaseCost",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Right-of-Use Asset, Amortization",
        "terseLabel": "Depreciation of leased assets",
        "documentation": "Amount of amortization expense attributable to right-of-use asset from finance lease."
       }
      }
     },
     "auth_ref": [
      "r544",
      "r551",
      "r739"
     ]
    },
    "us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseWeightedAverageDiscountRatePercent",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Weighted Average Discount Rate, Percent",
        "terseLabel": "Finance leases - Weighted-average discount rate",
        "documentation": "Weighted average discount rate for finance lease calculated at point in time."
       }
      }
     },
     "auth_ref": [
      "r556",
      "r739"
     ]
    },
    "us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "FinanceLeaseWeightedAverageRemainingLeaseTerm1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Finance leases - Weighted-average remaining lease term (in years)",
        "documentation": "Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r555",
      "r739"
     ]
    },
    "us-gaap_ForeignCountryMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ForeignCountryMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Foreign",
        "documentation": "Designated tax departments of governments entitled to levy and collect income taxes from the entity outside the entity's country of domicile."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ForeignCurrencyTransactionGainLossBeforeTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ForeignCurrencyTransactionGainLossBeforeTax",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Foreign Currency Transaction Gain (Loss), before Tax",
        "negatedLabel": "Currency loss on foreign denominated transactions",
        "documentation": "Amount, before tax, of realized and unrealized gain (loss) from foreign currency transaction."
       }
      }
     },
     "auth_ref": [
      "r528",
      "r529",
      "r530",
      "r531",
      "r663"
     ]
    },
    "us-gaap_ForeignCurrencyTransactionGainLossRealized": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ForeignCurrencyTransactionGainLossRealized",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesForeignCurrencyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Foreign Currency Transaction Gain (Loss), Realized",
        "verboseLabel": "Foreign exchange gains (losses) realized",
        "documentation": "Amount, before tax, of realized gain (loss) from foreign currency transaction."
       }
      }
     },
     "auth_ref": [
      "r645",
      "r751",
      "r845",
      "r846",
      "r868"
     ]
    },
    "us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Foreign Currency Transactions and Translations Policy [Policy Text Block]",
        "terseLabel": "Foreign Currency",
        "documentation": "Disclosure of accounting policy for (1) transactions denominated in a currency other than the reporting enterprise's functional currency, (2) translating foreign currency financial statements that are incorporated into the financial statements of the reporting enterprise by consolidation, combination, or the equity method of accounting, and (3) remeasurement of the financial statements of a foreign reporting enterprise in a hyperinflationary economy."
       }
      }
     },
     "auth_ref": [
      "r527"
     ]
    },
    "us-gaap_GeneralAndAdministrativeExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "GeneralAndAdministrativeExpense",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "General and Administrative Expense",
        "terseLabel": "General and administrative",
        "documentation": "The aggregate total of expenses of managing and administering the affairs of an entity, including affiliates of the reporting entity, which are not directly or indirectly associated with the manufacture, sale or creation of a product or product line."
       }
      }
     },
     "auth_ref": [
      "r109",
      "r648"
     ]
    },
    "us-gaap_GeneralAndAdministrativeExpenseMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "GeneralAndAdministrativeExpenseMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "General and administrative*",
        "documentation": "Primary financial statement caption encompassing general and administrative expense."
       }
      }
     },
     "auth_ref": [
      "r104"
     ]
    },
    "us-gaap_GeographicConcentrationRiskMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "GeographicConcentrationRiskMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographic concentration risk",
        "documentation": "Reflects the percentage that a specified dollar value on the balance sheet or income statement in the period from one or more specified geographic areas is to a corresponding consolidated, segment, or product line amount. Risk is the materially adverse effects of economic decline or antagonistic political actions resulting in loss of assets, sales volume, labor supply, or source of materials and supplies in a US state or a specified country, continent, or region such as EMEA (Europe, Middle East, Africa)."
       }
      }
     },
     "auth_ref": [
      "r50",
      "r683"
     ]
    },
    "us-gaap_GrossProfit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "GrossProfit",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Gross Profit",
        "totalLabel": "Gross profit",
        "documentation": "Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity."
       }
      }
     },
     "auth_ref": [
      "r106",
      "r223",
      "r268",
      "r277",
      "r282",
      "r285",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r526",
      "r713",
      "r805"
     ]
    },
    "acls_HighlyCompensatedEmployeesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "HighlyCompensatedEmployeesMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the highly compensated employees of the entity.",
        "label": "Highly compensated employees"
       }
      }
     },
     "auth_ref": []
    },
    "dei_IcfrAuditorAttestationFlag": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "IcfrAuditorAttestationFlag",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "ICFR Auditor Attestation Flag",
        "terseLabel": "ICFR Auditor Attestation Flag"
       }
      }
     },
     "auth_ref": [
      "r757",
      "r758",
      "r759"
     ]
    },
    "us-gaap_ImpairmentOfLongLivedAssetsHeldForUse": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ImpairmentOfLongLivedAssetsHeldForUse",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Impairment of Long-Lived Assets Held-for-use",
        "terseLabel": "Impairment of long-lived assets",
        "documentation": "The aggregate amount of write-downs for impairments recognized during the period for long lived assets held for use (including those held for disposal by means other than sale)."
       }
      }
     },
     "auth_ref": [
      "r11",
      "r59",
      "r124"
     ]
    },
    "us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]",
        "terseLabel": "Impairment of Long-Lived Assets",
        "documentation": "Disclosure of accounting policy for recognizing and measuring the impairment of long-lived assets. An entity also may disclose its accounting policy for long-lived assets to be sold. This policy excludes goodwill and intangible assets."
       }
      }
     },
     "auth_ref": [
      "r0",
      "r125"
     ]
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Domestic",
        "terseLabel": "United States",
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to domestic operations."
       }
      }
     },
     "auth_ref": [
      "r224",
      "r495"
     ]
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest",
        "totalLabel": "Income before income taxes",
        "documentation": "Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest."
       }
      }
     },
     "auth_ref": [
      "r1",
      "r103",
      "r151",
      "r268",
      "r277",
      "r282",
      "r285",
      "r571",
      "r582",
      "r713"
     ]
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterestAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest [Abstract]",
        "terseLabel": "Income (loss) before income taxes"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesIncomeBeforeIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Foreign",
        "terseLabel": "Foreign",
        "documentation": "The portion of earnings or loss from continuing operations before income taxes that is attributable to foreign operations, which is defined as Income or Loss generated from operations located outside the entity's country of domicile."
       }
      }
     },
     "auth_ref": [
      "r224",
      "r495"
     ]
    },
    "us-gaap_IncomeStatementAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeStatementAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Operations"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncomeStatementLocationAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeStatementLocationAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Statement Location [Axis]",
        "documentation": "Information by location in the income statement."
       }
      }
     },
     "auth_ref": [
      "r304",
      "r305",
      "r649"
     ]
    },
    "us-gaap_IncomeStatementLocationDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeStatementLocationDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Statement Location [Domain]",
        "documentation": "Location in the income statement."
       }
      }
     },
     "auth_ref": [
      "r305",
      "r649"
     ]
    },
    "us-gaap_IncomeTaxAuthorityAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxAuthorityAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax Authority [Axis]",
        "documentation": "Information by tax jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r16"
     ]
    },
    "us-gaap_IncomeTaxAuthorityDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxAuthorityDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax Authority [Domain]",
        "documentation": "Agency, division or body classification that levies income taxes, examines tax returns for compliance, or grants exemptions from or makes other decisions pertaining to income taxes."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncomeTaxDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Taxes"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncomeTaxDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxes"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax Disclosure [Text Block]",
        "terseLabel": "Income Taxes",
        "documentation": "The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information."
       }
      }
     },
     "auth_ref": [
      "r225",
      "r462",
      "r472",
      "r479",
      "r486",
      "r491",
      "r496",
      "r497",
      "r498",
      "r608"
     ]
    },
    "us-gaap_IncomeTaxExpenseBenefit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxExpenseBenefit",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic",
       "weight": -1.0,
       "order": 2.0
      },
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      },
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesProvisionForIncomeTaxesDetails",
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax Expense (Benefit)",
        "totalLabel": "Income tax provision",
        "verboseLabel": "Income tax provision",
        "documentation": "Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations."
       }
      }
     },
     "auth_ref": [
      "r154",
      "r167",
      "r247",
      "r248",
      "r274",
      "r470",
      "r492",
      "r587"
     ]
    },
    "us-gaap_IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxExpenseBenefitContinuingOperationsIncomeTaxReconciliationAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Amount [Abstract]",
        "terseLabel": "Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncomeTaxPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Tax, Policy [Policy Text Block]",
        "terseLabel": "Income Taxes",
        "documentation": "Disclosure of accounting policy for income taxes, which may include its accounting policies for recognizing and measuring deferred tax assets and liabilities and related valuation allowances, recognizing investment tax credits, operating loss carryforwards, tax credit carryforwards, and other carryforwards, methodologies for determining its effective income tax rate and the characterization of interest and penalties in the financial statements."
       }
      }
     },
     "auth_ref": [
      "r203",
      "r466",
      "r467",
      "r479",
      "r480",
      "r485",
      "r487",
      "r605"
     ]
    },
    "us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 11.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount",
        "terseLabel": "Effect of change in valuation allowance",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to increase (decrease) in the valuation allowance for deferred tax assets."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationChangeInEnactedTaxRate",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Change in Enacted Tax Rate, Amount",
        "terseLabel": "Rate change",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations, attributable to increase (decrease) in the income tax rates."
       }
      }
     },
     "auth_ref": [
      "r465",
      "r471"
     ]
    },
    "us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationForeignIncomeTaxRateDifferential",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 10.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount",
        "terseLabel": "Foreign income tax rate differentials",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to foreign income tax expense (benefit)."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 13.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount",
        "terseLabel": "Income taxes at the United States statutory rate",
        "documentation": "The amount of income tax expense or benefit for the period computed by applying the domestic federal statutory tax rates to pretax income from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r471"
     ]
    },
    "us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 9.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-based Compensation Cost, Amount",
        "terseLabel": "Stock based compensation",
        "documentation": "Amount of reported income tax expense (benefit) in excess of (less than) expected income tax expense (benefit) computed by applying domestic federal statutory income tax rate to pretax income (loss) from continuing operation, attributable to nondeductible expense for award under share-based payment arrangement. Includes, but is not limited to, expense determined to be nondeductible upon grant or after for award under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationOtherAdjustments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationOtherAdjustments",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Other Adjustments, Amount",
        "terseLabel": "Other, net",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to other adjustments."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationOtherReconcilingItems": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationOtherReconcilingItems",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Other Reconciling Items, Amount",
        "verboseLabel": "Discrete items, net",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to tax exempt income, equity in earnings (loss) of an unconsolidated subsidiary, minority noncontrolling interest income (loss), tax holiday, disposition of a business, disposition of an asset, repatriation of foreign earnings, repatriation of foreign earnings jobs creation act of 2004, increase (decrease) in enacted tax rate, prior year income taxes, increase (decrease) in deferred tax asset valuation allowance, and other adjustments."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationStateAndLocalIncomeTaxes",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": 1.0,
       "order": 12.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount",
        "terseLabel": "State income taxes",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to state and local income tax expense (benefit)."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxReconciliationTaxCredits": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxReconciliationTaxCredits",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails": {
       "parentTag": "us-gaap_IncomeTaxExpenseBenefit",
       "weight": -1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesReconciliationOfIncomeTaxesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Effective Income Tax Rate Reconciliation, Tax Credit, Amount",
        "negatedLabel": "Credit generation",
        "documentation": "Amount of the difference between reported income tax expense (benefit) and expected income tax expense (benefit) computed by applying the domestic federal statutory income tax rates to pretax income (loss) from continuing operations attributable to tax credits. Including, but not limited to, research credit, foreign tax credit, investment tax credit, and other tax credits."
       }
      }
     },
     "auth_ref": [
      "r837"
     ]
    },
    "us-gaap_IncomeTaxesPaidNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncomeTaxesPaidNet",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Taxes Paid, Net",
        "terseLabel": "Income taxes",
        "documentation": "The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income, net of any cash received during the current period as refunds for the overpayment of taxes."
       }
      }
     },
     "auth_ref": [
      "r44"
     ]
    },
    "us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInAccountsPayableAndAccruedLiabilities",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 12.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Accounts Payable and Accrued Liabilities",
        "terseLabel": "Accounts payable and other current liabilities",
        "documentation": "The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInAccountsReceivable": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInAccountsReceivable",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 9.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Accounts Receivable",
        "negatedLabel": "Accounts receivable",
        "documentation": "The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInAccruedIncomeTaxesPayable",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 14.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Income Taxes Payable",
        "terseLabel": "Income taxes",
        "documentation": "The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInContractWithCustomerLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInContractWithCustomerLiability",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 13.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase Decrease In Contract With Customer Liability",
        "terseLabel": "Deferred revenue",
        "documentation": "Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable."
       }
      }
     },
     "auth_ref": [
      "r565",
      "r779"
     ]
    },
    "us-gaap_IncreaseDecreaseInInventories": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInInventories",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 10.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Inventories",
        "negatedLabel": "Inventories",
        "documentation": "The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInOperatingCapitalAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInOperatingCapitalAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Operating Capital [Abstract]",
        "terseLabel": "Changes in operating assets and liabilities:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInOtherOperatingCapitalNet",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 15.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Other Operating Assets and Liabilities, Net",
        "negatedLabel": "Other assets and liabilities",
        "documentation": "Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0,
       "order": 11.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Prepaid Expense and Other Assets",
        "negatedLabel": "Prepaid expenses and other current assets",
        "documentation": "Amount of increase (decrease) in prepaid expenses, and assets classified as other."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "us-gaap_IncreaseDecreaseInStockholdersEquityRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncreaseDecreaseInStockholdersEquityRollForward",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Stockholders' Equity [Roll Forward]",
        "terseLabel": "Increase (Decrease) in Stockholders' Equity",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "acls_IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of increase in deferred tax asset due to capitalized research and development cost.",
        "label": "Increase in Deferred Asset, Capitalized Research and Development Cost",
        "terseLabel": "Increase in deferred tax asset"
       }
      }
     },
     "auth_ref": []
    },
    "acls_IncreaseInInventoryReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "IncreaseInInventoryReserves",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Increase in inventory reserves which was driven by write-down of excess inventory related to legacy products.",
        "label": "Increase in Inventory Reserves",
        "terseLabel": "Increase in inventory reserves"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "IncrementalCommonSharesAttributableToShareBasedPaymentArrangements",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails": {
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Incremental Common Shares Attributable to Dilutive Effect of Share-based Payment Arrangements",
        "terseLabel": "Incremental options and RSUs",
        "documentation": "Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of share based payment arrangements using the treasury stock method."
       }
      }
     },
     "auth_ref": [
      "r254",
      "r255",
      "r256",
      "r260",
      "r417"
     ]
    },
    "us-gaap_InterestExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InterestExpense",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Interest Expense",
        "negatedLabel": "Interest expense",
        "documentation": "Amount of the cost of borrowed funds accounted for as interest expense."
       }
      }
     },
     "auth_ref": [
      "r79",
      "r153",
      "r207",
      "r272",
      "r539",
      "r650",
      "r751",
      "r867"
     ]
    },
    "us-gaap_InterestPaidNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InterestPaidNet",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Interest Paid",
        "verboseLabel": "Interest",
        "documentation": "Amount of cash paid for interest, excluding capitalized interest, classified as operating activity. Includes, but is not limited to, payment to settle zero-coupon bond for accreted interest of debt discount and debt instrument with insignificant coupon interest rate in relation to effective interest rate of borrowing attributable to accreted interest of debt discount."
       }
      }
     },
     "auth_ref": [
      "r214",
      "r217",
      "r218"
     ]
    },
    "acls_InternalUsedAssetsTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "InternalUsedAssetsTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of assets used for internal purpose and not intended to sale.",
        "label": "Internal Used Assets Type [Axis]"
       }
      }
     },
     "auth_ref": []
    },
    "acls_InternalUsedAssetsTypeDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "InternalUsedAssetsTypeDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Listing of assets used for internal purpose which are not intended to sale.",
        "label": "Internal Used Assets Type [Domain]"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_InventoryCurrentTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryCurrentTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Current [Table]",
        "documentation": "Disclosure of information about inventory expected to be sold or consumed within one year or operating cycle, if longer."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_InventoryDisclosureAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryDisclosureAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventories, net"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_InventoryDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNet"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory Disclosure [Text Block]",
        "terseLabel": "Inventories, net",
        "documentation": "The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory."
       }
      }
     },
     "auth_ref": [
      "r301"
     ]
    },
    "us-gaap_InventoryFinishedGoodsNetOfReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryFinishedGoodsNetOfReserves",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Finished Goods, Net of Reserves",
        "terseLabel": "Finished goods (completed systems)",
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale."
       }
      }
     },
     "auth_ref": [
      "r121",
      "r703"
     ]
    },
    "us-gaap_InventoryLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory [Line Items]",
        "terseLabel": "Inventories, net",
        "verboseLabel": "Inventories, net additional information",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_InventoryNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryNet",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0,
       "order": 4.0
      },
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Net",
        "terseLabel": "Inventories, net",
        "totalLabel": "Inventories, net",
        "documentation": "Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r195",
      "r700",
      "r740"
     ]
    },
    "us-gaap_InventoryPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Policy [Policy Text Block]",
        "terseLabel": "Inventories",
        "documentation": "Disclosure of inventory accounting policy for inventory classes, including, but not limited to, basis for determining inventory amounts, methods by which amounts are added and removed from inventory classes, loss recognition on impairment of inventories, and situations in which inventories are stated above cost."
       }
      }
     },
     "auth_ref": [
      "r156",
      "r185",
      "r194",
      "r301",
      "r302",
      "r303",
      "r566",
      "r709"
     ]
    },
    "us-gaap_InventoryRawMaterialsNetOfReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryRawMaterialsNetOfReserves",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Raw Materials, Net of Reserves",
        "terseLabel": "Raw materials",
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process."
       }
      }
     },
     "auth_ref": [
      "r121",
      "r705"
     ]
    },
    "us-gaap_InventoryValuationReserveMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryValuationReserveMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory valuation reserve",
        "documentation": "Reserve to reduce inventory to lower of cost or net realizable value."
       }
      }
     },
     "auth_ref": [
      "r783",
      "r784",
      "r785",
      "r786",
      "r787"
     ]
    },
    "us-gaap_InventoryValuationReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryValuationReserves",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory Valuation Reserves",
        "terseLabel": "Inventory reserves",
        "documentation": "Amount of valuation reserve for inventory."
       }
      }
     },
     "auth_ref": [
      "r58",
      "r773"
     ]
    },
    "us-gaap_InventoryWorkInProcessNetOfReserves": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InventoryWorkInProcessNetOfReserves",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventory, Work in Process, Net of Reserves",
        "terseLabel": "Work in process",
        "documentation": "Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing."
       }
      }
     },
     "auth_ref": [
      "r121",
      "r704"
     ]
    },
    "us-gaap_InvestmentIncomeInterest": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "InvestmentIncomeInterest",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Investment Income, Interest",
        "terseLabel": "Interest income",
        "documentation": "Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities."
       }
      }
     },
     "auth_ref": [
      "r110",
      "r271"
     ]
    },
    "acls_IonImplantationSystemsServicesAndRoyaltiesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "IonImplantationSystemsServicesAndRoyaltiesMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the ion implantation systems, services, and royalties, a product line of the entity.",
        "label": "Ion implantation systems and services"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LandAndBuildingMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LandAndBuildingMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Land and building",
        "documentation": "Real estate held for productive use and structures used in the conduct of business, including but not limited to, office, production, storage and distribution facilities."
       }
      }
     },
     "auth_ref": []
    },
    "acls_LargestCustomerMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LargestCustomerMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents one customer on whom the entity significantly relies giving rise to the largest single concentration risk.",
        "label": "First customer"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LeaseBalanceSheetDisclosureTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LeaseBalanceSheetDisclosureTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease balance sheet.",
        "label": "Lease Balance Sheet Disclosure [Table Text Block]",
        "terseLabel": "Schedule of operating and finance lease right-of-use assets and related lease obligations"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LeaseCashFlowInformationDisclosureTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LeaseCashFlowInformationDisclosureTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease cash flow information.",
        "label": "Lease Cash Flow Information Disclosure [Table Text Block]",
        "terseLabel": "Schedule of cash outflows by lease type"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LeaseCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LeaseCost",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lease, Cost",
        "totalLabel": "Total lease cost",
        "documentation": "Amount of lease cost recognized by lessee for lease contract."
       }
      }
     },
     "auth_ref": [
      "r550",
      "r739"
     ]
    },
    "us-gaap_LeaseCostAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LeaseCostAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lease, Cost [Abstract]",
        "terseLabel": "Lease cost"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LeaseCostTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LeaseCostTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lease, Cost [Table Text Block]",
        "terseLabel": "Schedule of lease costs",
        "documentation": "Tabular disclosure of lessee's lease cost. Includes, but is not limited to, interest expense for finance lease, amortization of right-of-use asset for finance lease, operating lease cost, short-term lease cost, variable lease cost and sublease income."
       }
      }
     },
     "auth_ref": [
      "r851"
     ]
    },
    "acls_LeaseDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LeaseDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeases"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of information about leases.",
        "label": "Lease Disclosure [Text Block]",
        "terseLabel": "Leases"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LeaseQuantitativeDisclosureTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LeaseQuantitativeDisclosureTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease quantitative information.",
        "label": "Lease Quantitative Disclosure [Table Text Block]",
        "terseLabel": "Schedule of weighted-average remaining lease term and discount rates"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LeasesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LeasesAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Leases"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LesseeFinanceLeaseTermOfContract1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeFinanceLeaseTermOfContract1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Finance Lease, Term of Contract",
        "terseLabel": "Finance lease term",
        "documentation": "Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r850"
     ]
    },
    "us-gaap_LesseeLeaseDescriptionLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeLeaseDescriptionLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Lease, Description [Line Items]",
        "terseLabel": "Lease",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r548"
     ]
    },
    "us-gaap_LesseeLeaseDescriptionTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeLeaseDescriptionTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Lease, Description [Table]",
        "documentation": "Disclosure of information about lessee's leases."
       }
      }
     },
     "auth_ref": [
      "r548"
     ]
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due",
        "totalLabel": "Total lease payments"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due After Year Five",
        "terseLabel": "Thereafter"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee operating and finance lease liability payments due next twelve months.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Next Twelve Months",
        "verboseLabel": "2024"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Five",
        "verboseLabel": "2028"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Four",
        "verboseLabel": "2027"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Three",
        "verboseLabel": "2026"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Two",
        "verboseLabel": "2025"
       }
      }
     },
     "auth_ref": []
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.",
        "label": "Lessee Operating And Finance Lease Liability Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend": {
     "xbrltype": "booleanItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseExistenceOfOptionToExtend",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Existence of Option to Extend [true false]",
        "terseLabel": "Option to extend",
        "documentation": "Indicates (true false) whether lessee has option to extend operating lease."
       }
      }
     },
     "auth_ref": [
      "r549"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDue",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due",
        "totalLabel": "Total lease payments",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 6.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due after Year Five",
        "terseLabel": "Thereafter",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months",
        "terseLabel": "2024",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFive",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Five",
        "verboseLabel": "2028",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFour",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Four",
        "verboseLabel": "2027",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearThree",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Three",
        "verboseLabel": "2026",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearTwo",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Two",
        "verboseLabel": "2025",
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach)."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseLiabilityUndiscountedExcessAmount",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Liability, Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion",
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease."
       }
      }
     },
     "auth_ref": [
      "r557"
     ]
    },
    "us-gaap_LesseeOperatingLeaseRenewalTerm": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseRenewalTerm",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee, Operating Lease, Renewal Term",
        "terseLabel": "Renewal term",
        "documentation": "Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r850"
     ]
    },
    "us-gaap_LesseeOperatingLeaseTermOfContract": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LesseeOperatingLeaseTermOfContract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lessee Operating Lease Term Of Contract",
        "terseLabel": "Lease term",
        "verboseLabel": "Operating lease term",
        "documentation": "Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r850"
     ]
    },
    "us-gaap_LettersOfCreditOutstandingAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LettersOfCreditOutstandingAmount",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Letters of Credit Outstanding, Amount",
        "terseLabel": "Letter of credit",
        "documentation": "The total amount of the contingent obligation under letters of credit outstanding as of the reporting date."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_Liabilities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "Liabilities",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities",
        "totalLabel": "Total liabilities",
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future."
       }
      }
     },
     "auth_ref": [
      "r30",
      "r223",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r502",
      "r505",
      "r506",
      "r526",
      "r623",
      "r712",
      "r753",
      "r805",
      "r853",
      "r854"
     ]
    },
    "us-gaap_LiabilitiesAndStockholdersEquity": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LiabilitiesAndStockholdersEquity",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities and Equity",
        "totalLabel": "Total liabilities and stockholders' equity",
        "documentation": "Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any."
       }
      }
     },
     "auth_ref": [
      "r97",
      "r148",
      "r578",
      "r740",
      "r781",
      "r796",
      "r844"
     ]
    },
    "us-gaap_LiabilitiesAndStockholdersEquityAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LiabilitiesAndStockholdersEquityAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities and Equity [Abstract]",
        "terseLabel": "LIABILITIES AND STOCKHOLDERS' EQUITY"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LiabilitiesCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LiabilitiesCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities, Current",
        "totalLabel": "Total current liabilities",
        "documentation": "Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r32",
      "r184",
      "r223",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r502",
      "r505",
      "r506",
      "r526",
      "r740",
      "r805",
      "r853",
      "r854"
     ]
    },
    "us-gaap_LiabilitiesCurrentAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LiabilitiesCurrentAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities, Current [Abstract]",
        "terseLabel": "Current liabilities:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LineOfCreditFacilityMaximumBorrowingCapacity",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Line of Credit Facility, Maximum Borrowing Capacity",
        "terseLabel": "Maximum borrowing capacity under the credit facility",
        "documentation": "Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility."
       }
      }
     },
     "auth_ref": [
      "r29"
     ]
    },
    "acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.",
        "label": "Line of Credit Facility, Portion of Availability Used to Support Outstanding Letters of Credit",
        "terseLabel": "Restricted cash which relates to support of outstanding letters of credit"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLosses"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Loans, Notes, Trade and Other Receivables Disclosure [Text Block]",
        "verboseLabel": "Receivables and Allowances for Credit Losses",
        "documentation": "The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses."
       }
      }
     },
     "auth_ref": [
      "r794"
     ]
    },
    "dei_LocalPhoneNumber": {
     "xbrltype": "normalizedStringItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "LocalPhoneNumber",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Local Phone Number",
        "documentation": "Local phone number for entity."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LongTermCommitmentExcludingUnconditionalPurchaseObligationAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Purchase Commitments"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LongTermPurchaseCommitmentAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LongTermPurchaseCommitmentAmount",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Long-term Purchase Commitment, Amount",
        "terseLabel": "Contracts and purchase orders for inventory and other expenditures",
        "documentation": "The minimum amount the entity agreed to spend under the long-term purchase commitment."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_LongtermDebtTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LongtermDebtTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Long-term Debt, Type [Axis]",
        "documentation": "Information by type of long-term debt."
       }
      }
     },
     "auth_ref": [
      "r33"
     ]
    },
    "us-gaap_LongtermDebtTypeDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "LongtermDebtTypeDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Long-term Debt, Type [Domain]",
        "documentation": "Type of long-term debt arrangement, such as notes, line of credit, commercial paper, asset-based financing, project financing, letter of credit financing. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer."
       }
      }
     },
     "auth_ref": [
      "r33",
      "r62"
     ]
    },
    "us-gaap_MachineryAndEquipmentMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "MachineryAndEquipmentMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Machinery and equipment",
        "documentation": "Tangible personal property used to produce goods and services, including, but is not limited to, tools, dies and molds, computer and office equipment."
       }
      }
     },
     "auth_ref": []
    },
    "srt_MajorCustomersAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "MajorCustomersAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer [Axis]",
        "documentation": "Information by name or description of a single external customer or a group of external customers."
       }
      }
     },
     "auth_ref": [
      "r291",
      "r724",
      "r809",
      "r863",
      "r864"
     ]
    },
    "srt_MaximumMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "MaximumMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Maximum",
        "documentation": "Upper limit of the provided range."
       }
      }
     },
     "auth_ref": [
      "r308",
      "r309",
      "r310",
      "r311",
      "r411",
      "r564",
      "r594",
      "r615",
      "r616",
      "r671",
      "r673",
      "r675",
      "r676",
      "r678",
      "r694",
      "r695",
      "r714",
      "r721",
      "r732",
      "r742",
      "r807",
      "r855",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ]
    },
    "srt_MinimumMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "MinimumMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Minimum",
        "documentation": "Lower limit of the provided range."
       }
      }
     },
     "auth_ref": [
      "r308",
      "r309",
      "r310",
      "r311",
      "r411",
      "r564",
      "r594",
      "r615",
      "r616",
      "r671",
      "r673",
      "r675",
      "r676",
      "r678",
      "r694",
      "r695",
      "r714",
      "r721",
      "r732",
      "r742",
      "r807",
      "r855",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ]
    },
    "acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Includes fund that invests in short-term money-market instruments, for example, but not limited to, commercial paper, banker's acceptances, repurchase agreements, United States government securities, certificates of deposit, and other highly liquid securities including Agency investments, all of which are considered cash equivalents.",
        "label": "Money market funds, US Government Securities and Agency Investments",
        "terseLabel": "Money market funds, U.S. Government Securities and Agency Investments"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Movement in Standard and Extended Product Warranty, Increase (Decrease) [Roll Forward]",
        "terseLabel": "Changes in standard product warranty liability",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_MovementInValuationAllowancesAndReservesRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "MovementInValuationAllowancesAndReservesRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Movement in Valuation Allowances and Reserves [Roll Forward]",
        "terseLabel": "Changes in Valuation and Qualifying Accounts",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "srt_NameOfMajorCustomerDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "NameOfMajorCustomerDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer [Domain]",
        "documentation": "Single external customer or group of external customers."
       }
      }
     },
     "auth_ref": [
      "r291",
      "r724",
      "r809",
      "r863",
      "r864"
     ]
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInFinancingActivities",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Financing Activities",
        "totalLabel": "Net cash used in financing activities",
        "documentation": "Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit."
       }
      }
     },
     "auth_ref": [
      "r216"
     ]
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInFinancingActivitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Financing Activities [Abstract]",
        "terseLabel": "Cash flows from financing activities"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInInvestingActivities",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Investing Activities",
        "totalLabel": "Net cash used in investing activities",
        "documentation": "Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets."
       }
      }
     },
     "auth_ref": [
      "r216"
     ]
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInInvestingActivitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Investing Activities [Abstract]",
        "terseLabel": "Cash flows from investing activities"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInOperatingActivities",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Operating Activities",
        "totalLabel": "Net cash provided by operating activities",
        "documentation": "Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities."
       }
      }
     },
     "auth_ref": [
      "r116",
      "r117",
      "r118"
     ]
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetCashProvidedByUsedInOperatingActivitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Cash flows from operating activities"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NetIncomeLossAvailableToCommonStockholdersBasic",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Income (Loss) Available to Common Stockholders, Basic",
        "terseLabel": "Net income",
        "totalLabel": "Net income",
        "verboseLabel": "Net income available to common stockholders",
        "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders."
       }
      }
     },
     "auth_ref": [
      "r213",
      "r241",
      "r242",
      "r243",
      "r244",
      "r250",
      "r251",
      "r257",
      "r260",
      "r268",
      "r277",
      "r282",
      "r285",
      "r713"
     ]
    },
    "acls_NetSettlementOnRestrictedStockGrants": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "NetSettlementOnRestrictedStockGrants",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net cash inflow or outflow from cash and cash items that are not available for withdrawal or usage.",
        "label": "Net Settlement On Restricted Stock Grants",
        "terseLabel": "Net settlement on restricted stock grants"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NewAccountingPronouncementsPolicyPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "New Accounting Pronouncements, Policy [Policy Text Block]",
        "terseLabel": "Recent Accounting Guidance",
        "documentation": "Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact."
       }
      }
     },
     "auth_ref": []
    },
    "acls_NewSystemsRevenueMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "NewSystemsRevenueMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to revenue arising from the sale of new systems, a product line of the entity.",
        "label": "Systems"
       }
      }
     },
     "auth_ref": []
    },
    "acls_NonEmployeeMemberOfBoardOfDirectorMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "NonEmployeeMemberOfBoardOfDirectorMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the non-employee members of the entity's Board of Directors.",
        "label": "Non-employee members of Board of Director"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_NonUsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NonUsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "International",
        "documentation": "Countries excluding the United States of America (US)."
       }
      }
     },
     "auth_ref": [
      "r871",
      "r872",
      "r873",
      "r874"
     ]
    },
    "us-gaap_NoncurrentAssets": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NoncurrentAssets",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Long-Lived Assets",
        "terseLabel": "Long-Lived Assets",
        "documentation": "Long-lived assets other than financial instruments, long-term customer relationships of a financial institution, mortgage and other servicing rights, deferred policy acquisition costs, and deferred tax assets."
       }
      }
     },
     "auth_ref": [
      "r290"
     ]
    },
    "us-gaap_NonoperatingIncomeExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NonoperatingIncomeExpense",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Nonoperating Income (Expense)",
        "totalLabel": "Total other income (expense)",
        "documentation": "The aggregate amount of income or expense from ancillary business-related activities (that is to say, excluding major activities considered part of the normal operations of the business)."
       }
      }
     },
     "auth_ref": [
      "r111"
     ]
    },
    "us-gaap_NonoperatingIncomeExpenseAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NonoperatingIncomeExpenseAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Nonoperating Income (Expense) [Abstract]",
        "verboseLabel": "Other income (expense):"
       }
      }
     },
     "auth_ref": []
    },
    "srt_NorthAmericaMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "NorthAmericaMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "North America",
        "documentation": "Continent of North America."
       }
      }
     },
     "auth_ref": [
      "r871",
      "r872",
      "r873",
      "r874"
     ]
    },
    "us-gaap_NumberOfReportableSegments": {
     "xbrltype": "integerItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "NumberOfReportableSegments",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Number of Reportable Segments",
        "terseLabel": "Number of business segments",
        "documentation": "Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements."
       }
      }
     },
     "auth_ref": [
      "r793"
     ]
    },
    "acls_OperatingAndFinanceLeaseLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "OperatingAndFinanceLeaseLiability",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating and finance lease.",
        "label": "Operating and Finance Lease, Liability",
        "totalLabel": "Total lease liabilities",
        "verboseLabel": "Total lease liabilities"
       }
      }
     },
     "auth_ref": []
    },
    "acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.",
        "label": "Operating And Finance Lease Liability Maturity [Table Text Block]",
        "terseLabel": "Schedule of future minimum operating and finance leases"
       }
      }
     },
     "auth_ref": []
    },
    "acls_OperatingAndFinanceLeaseRightOfUseAsset": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "OperatingAndFinanceLeaseRightOfUseAsset",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's right to use underlying asset under operating and finance lease.",
        "label": "Operating And Finance Lease, Right-of-Use Asset",
        "totalLabel": "Total leased assets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingExpenses": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingExpenses",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Expenses",
        "totalLabel": "Total operating expenses",
        "documentation": "Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingExpensesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingExpensesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Expenses [Abstract]",
        "terseLabel": "Operating expenses:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingIncomeLoss": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingIncomeLoss",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Income (Loss)",
        "totalLabel": "Income from operations",
        "documentation": "The net result for the period of deducting operating expenses from operating revenues."
       }
      }
     },
     "auth_ref": [
      "r268",
      "r277",
      "r282",
      "r285",
      "r713"
     ]
    },
    "us-gaap_OperatingLeaseCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseCost",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "parentTag": "us-gaap_LeaseCost",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Cost",
        "terseLabel": "Total operating lease cost",
        "documentation": "Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability."
       }
      }
     },
     "auth_ref": [
      "r552",
      "r739"
     ]
    },
    "us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiabilitiesPaymentsDueAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease Liabilities, Payments Due [Abstract]",
        "terseLabel": "Future minimum lease payments operating lease"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingLeaseLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiability",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Liability",
        "verboseLabel": "Operating lease obligations",
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease."
       }
      }
     },
     "auth_ref": [
      "r542"
     ]
    },
    "us-gaap_OperatingLeaseLiabilityCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiabilityCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Liability, Current",
        "terseLabel": "Operating liabilities current",
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as current."
       }
      }
     },
     "auth_ref": [
      "r542"
     ]
    },
    "us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList": {
     "xbrltype": "enumerationSetItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]",
        "documentation": "Indicates line item in statement of financial position that includes current operating lease liability."
       }
      }
     },
     "auth_ref": [
      "r543"
     ]
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiabilityNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Liability, Noncurrent",
        "terseLabel": "Operating liabilities noncurrent",
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent."
       }
      }
     },
     "auth_ref": [
      "r542"
     ]
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList": {
     "xbrltype": "enumerationSetItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]",
        "documentation": "Indicates line item in statement of financial position that includes noncurrent operating lease liability."
       }
      }
     },
     "auth_ref": [
      "r543"
     ]
    },
    "us-gaap_OperatingLeasePayments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeasePayments",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Payments",
        "terseLabel": "Operating cash outflows from operating leases",
        "documentation": "Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use."
       }
      }
     },
     "auth_ref": [
      "r547",
      "r553"
     ]
    },
    "us-gaap_OperatingLeaseRightOfUseAsset": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseRightOfUseAsset",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "parentTag": "acls_OperatingAndFinanceLeaseRightOfUseAsset",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Right-of-Use Asset",
        "terseLabel": "Right of use asset",
        "verboseLabel": "Operating lease assets",
        "documentation": "Amount of lessee's right to use underlying asset under operating lease."
       }
      }
     },
     "auth_ref": [
      "r541"
     ]
    },
    "us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseWeightedAverageDiscountRatePercent",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Weighted Average Discount Rate, Percent",
        "terseLabel": "Operating leases - Weighted-average discount rate",
        "documentation": "Weighted average discount rate for operating lease calculated at point in time."
       }
      }
     },
     "auth_ref": [
      "r556",
      "r739"
     ]
    },
    "us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLeaseWeightedAverageRemainingLeaseTerm1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Operating leases -Weighted-average remaining lease term (in years)",
        "documentation": "Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r555",
      "r739"
     ]
    },
    "us-gaap_OperatingLossCarryforwards": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLossCarryforwards",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Loss Carryforwards",
        "terseLabel": "Net operating loss carryforwards",
        "documentation": "Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws."
       }
      }
     },
     "auth_ref": [
      "r71"
     ]
    },
    "acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of operating loss carryforwards are subject to an uncertain tax position reserve.",
        "label": "Operating Loss Carryforwards are Subject to Uncertain Tax Position Reserve",
        "terseLabel": "Uncertain tax position"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingLossCarryforwardsLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLossCarryforwardsLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Loss Carryforwards [Line Items]",
        "terseLabel": "Operating loss carryforwards",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OperatingLossCarryforwardsTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OperatingLossCarryforwardsTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Loss Carryforwards [Table]",
        "documentation": "Schedule reflecting pertinent information, such as tax authority, amounts, and expiration dates, of net operating loss carryforwards, including an assessment of the likelihood of utilization."
       }
      }
     },
     "auth_ref": [
      "r70"
     ]
    },
    "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Nature of Business"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureNatureOfBusiness"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]",
        "terseLabel": "Nature of Business",
        "documentation": "The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure."
       }
      }
     },
     "auth_ref": [
      "r86",
      "r139",
      "r602",
      "r603"
     ]
    },
    "us-gaap_OtherAssetsNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherAssetsNoncurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 7.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Assets, Noncurrent",
        "terseLabel": "Other assets",
        "documentation": "Amount of noncurrent assets classified as other."
       }
      }
     },
     "auth_ref": [
      "r189"
     ]
    },
    "us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": -1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive (Income) Loss, Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax, Portion Attributable to Parent",
        "negatedLabel": "Amortization of actuarial net gain and other adjustments from pension plan, net of tax",
        "negatedTerseLabel": "Change in pension obligation, net of tax",
        "documentation": "Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent."
       }
      }
     },
     "auth_ref": [
      "r6",
      "r17",
      "r101",
      "r140"
     ]
    },
    "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent",
        "terseLabel": "Foreign currency translation adjustments",
        "documentation": "Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity."
       }
      }
     },
     "auth_ref": [
      "r9",
      "r17",
      "r140"
     ]
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherComprehensiveIncomeLossNetOfTax",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Net of Tax",
        "totalLabel": "Total other comprehensive income (loss)",
        "documentation": "Amount after tax and reclassification adjustments of other comprehensive income (loss)."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r26",
      "r199",
      "r202",
      "r209",
      "r532",
      "r533",
      "r538",
      "r568",
      "r584",
      "r776",
      "r777"
     ]
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract]",
        "terseLabel": "Other comprehensive income (loss):"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive (Income) Loss, Reclassification Adjustment from AOCI, Pension and Other Postretirement Benefit Plans, Net of Tax",
        "verboseLabel": "Other comprehensive income and pension reclassification",
        "documentation": "Amount, after tax, of reclassification adjustment from accumulated other comprehensive (income) loss for net periodic benefit cost (credit) of defined benefit plan."
       }
      }
     },
     "auth_ref": [
      "r8",
      "r101",
      "r132",
      "r197"
     ]
    },
    "us-gaap_OtherDepreciationAndAmortization": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherDepreciationAndAmortization",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Depreciation and Amortization",
        "terseLabel": "Depreciation expense",
        "documentation": "Amount of expense charged against earnings to allocate the cost of tangible and intangible assets over their remaining economic lives, classified as other."
       }
      }
     },
     "auth_ref": [
      "r11",
      "r60",
      "r108"
     ]
    },
    "us-gaap_OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Inventory, Materials, Supplies and Merchandise under Consignment, Gross",
        "terseLabel": "Inventory on consignment at customer locations",
        "documentation": "Gross amount of inventory owned by the entity but in the hands of a customer, typically a reseller."
       }
      }
     },
     "auth_ref": [
      "r772"
     ]
    },
    "us-gaap_OtherLiabilitiesCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherLiabilitiesCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 7.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Liabilities, Current",
        "terseLabel": "Other current liabilities",
        "documentation": "Amount of liabilities classified as other, due within one year or the normal operating cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r31",
      "r740"
     ]
    },
    "us-gaap_OtherLiabilitiesNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherLiabilitiesNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Liabilities, Noncurrent",
        "terseLabel": "Other long-term liabilities",
        "documentation": "Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r34"
     ]
    },
    "us-gaap_OtherNonoperatingIncomeExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "OtherNonoperatingIncomeExpense",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Nonoperating Income (Expense)",
        "terseLabel": "Other, net",
        "documentation": "Amount of income (expense) related to nonoperating activities, classified as other."
       }
      }
     },
     "auth_ref": [
      "r112"
     ]
    },
    "acls_OtherProductsSystemsServicesAndRoyaltiesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "OtherProductsSystemsServicesAndRoyaltiesMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the other products systems, services, and royalties of the entity.",
        "label": "Other systems and services"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PaymentsForRepurchaseOfCommonStock": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PaymentsForRepurchaseOfCommonStock",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Payments for Repurchase of Common Stock",
        "negatedLabel": "Repurchase of common stock",
        "documentation": "The cash outflow to reacquire common stock during the period."
       }
      }
     },
     "auth_ref": [
      "r42"
     ]
    },
    "us-gaap_PaymentsToAcquirePropertyPlantAndEquipment": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PaymentsToAcquirePropertyPlantAndEquipment",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Payments to Acquire Property, Plant, and Equipment",
        "negatedLabel": "Expenditures for property, plant and equipment and capitalized software",
        "documentation": "The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets."
       }
      }
     },
     "auth_ref": [
      "r115"
     ]
    },
    "us-gaap_PaymentsToAcquireShortTermInvestments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PaymentsToAcquireShortTermInvestments",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Payments to Acquire Short-term Investments",
        "negatedLabel": "Purchase of short-term investments",
        "documentation": "The cash outflow for securities or other assets acquired, which qualify for treatment as an investing activity and are to be liquidated, if necessary, within the current operating cycle. Includes cash flows from securities classified as trading securities that were acquired for reasons other than sale in the short-term."
       }
      }
     },
     "auth_ref": [
      "r114"
     ]
    },
    "us-gaap_PensionAndOtherPostretirementBenefitsDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PensionAndOtherPostretirementBenefitsDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlans"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pension and Other Postretirement Benefits Disclosure [Text Block]",
        "terseLabel": "Employee Benefit Plans",
        "documentation": "The entire disclosure for retirement benefits."
       }
      }
     },
     "auth_ref": [
      "r390",
      "r394",
      "r395",
      "r401",
      "r402",
      "r403",
      "r404",
      "r405",
      "r406",
      "r407",
      "r408",
      "r409",
      "r410",
      "r731"
     ]
    },
    "us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pension and Other Postretirement Defined Benefit Plans, Liabilities",
        "totalLabel": "Total liabilities",
        "documentation": "Amount of liability, recognized in statement of financial position, for defined benefit pension and other postretirement plans."
       }
      }
     },
     "auth_ref": [
      "r147",
      "r392",
      "r393",
      "r862"
     ]
    },
    "us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails": {
       "parentTag": "us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pension and Other Postretirement Defined Benefit Plans, Liabilities, Noncurrent",
        "terseLabel": "Other long-term liabilities",
        "documentation": "Amount of liability, recognized in statement of financial position, for defined benefit pension and other postretirement plans, classified as noncurrent."
       }
      }
     },
     "auth_ref": [
      "r88",
      "r391",
      "r392",
      "r393",
      "r731"
     ]
    },
    "us-gaap_PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PensionAndOtherPostretirementDefinedBenefitPlansNoncurrentLiabilitiesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansOtherCompensationPlansDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Pension and Other Postretirement Defined Benefit Plans, Liabilities [Abstract]",
        "terseLabel": "Classification of liabilities in the Consolidated Balance Sheets"
       }
      }
     },
     "auth_ref": []
    },
    "acls_PercentageOfPaymentUponInstallation": {
     "xbrltype": "percentItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PercentageOfPaymentUponInstallation",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the percentage of payment terms due upon acceptance.",
        "label": "Percentage of Payment Upon Installation",
        "terseLabel": "Payment upon acceptance, as a percent"
       }
      }
     },
     "auth_ref": []
    },
    "acls_PercentageOfPaymentUponShipmentOfTool": {
     "xbrltype": "percentItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PercentageOfPaymentUponShipmentOfTool",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the percentage of payment terms due upon shipment of the system.",
        "label": "Percentage of Payment Upon Shipment of Tool",
        "terseLabel": "Payment upon shipment of the system, as a percent"
       }
      }
     },
     "auth_ref": []
    },
    "acls_PeriodOfPaymentUponDeliveryOfParts": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PeriodOfPaymentUponDeliveryOfParts",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period for payment upon delivery of parts.",
        "label": "Period of Payment Upon Delivery of Parts",
        "terseLabel": "Payment upon delivery of parts, period"
       }
      }
     },
     "auth_ref": []
    },
    "acls_PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period for payment upon delivery of parts.",
        "label": "Period Of Unsatisfied Extended Warranty Performance Obligations",
        "terseLabel": "Unsatisfied extended warranty performance obligations, period"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PlanNameAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PlanNameAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Plan Name [Axis]",
        "documentation": "Information by plan name for share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r810",
      "r811",
      "r812",
      "r813",
      "r814",
      "r815",
      "r816",
      "r817",
      "r818",
      "r819",
      "r820",
      "r821",
      "r822",
      "r823",
      "r824",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r830",
      "r831",
      "r832",
      "r833",
      "r834",
      "r835"
     ]
    },
    "us-gaap_PlanNameDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PlanNameDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Plan Name [Domain]",
        "documentation": "Plan name for share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r810",
      "r811",
      "r812",
      "r813",
      "r814",
      "r815",
      "r816",
      "r817",
      "r818",
      "r819",
      "r820",
      "r821",
      "r822",
      "r823",
      "r824",
      "r825",
      "r826",
      "r827",
      "r828",
      "r829",
      "r830",
      "r831",
      "r832",
      "r833",
      "r834",
      "r835"
     ]
    },
    "us-gaap_PortionAtFairValueFairValueDisclosureMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PortionAtFairValueFairValueDisclosureMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Portion at Fair Value Measurement [Member]",
        "documentation": "Measured at fair value for financial reporting purposes."
       }
      }
     },
     "auth_ref": [
      "r524"
     ]
    },
    "us-gaap_PrepaidExpenseAndOtherAssetsCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PrepaidExpenseAndOtherAssetsCurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Prepaid Expense and Other Assets, Current",
        "terseLabel": "Prepaid expenses and other current assets",
        "documentation": "Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r775"
     ]
    },
    "us-gaap_PrepaidRent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PrepaidRent",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Prepaid Rent",
        "terseLabel": "Prepaid rent",
        "verboseLabel": "Prepaid financing costs",
        "documentation": "Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer."
       }
      }
     },
     "auth_ref": [
      "r702",
      "r715",
      "r798"
     ]
    },
    "us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Proceeds from Maturities, Prepayments and Calls of Short-Term Investments",
        "terseLabel": "Maturities of short-term investments",
        "documentation": "The cash inflow from maturities, prepayments, calls and collections of all investments, including securities and other assets, having ready marketability and intended by management to be liquidated, if necessary, within the current operating cycle. Includes cash flows from securities classified as trading securities that were acquired for reasons other than sale in the short-term."
       }
      }
     },
     "auth_ref": [
      "r41",
      "r114"
     ]
    },
    "us-gaap_ProceedsFromSaleOfPropertyHeldForSale": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProceedsFromSaleOfPropertyHeldForSale",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Proceeds from Sale of Property Held-for-sale",
        "terseLabel": "Proceeds from sale of corporate headquarters",
        "documentation": "The cash inflow from the sale of formerly productive land held for sale, anything permanently fixed to it, including buildings, structures on it, and so forth."
       }
      }
     },
     "auth_ref": [
      "r113"
     ]
    },
    "us-gaap_ProceedsFromStockOptionsExercised": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProceedsFromStockOptionsExercised",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Proceeds from Stock Options Exercised",
        "terseLabel": "Proceeds from exercise of stock options",
        "documentation": "Amount of cash inflow from exercise of option under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r7",
      "r23"
     ]
    },
    "us-gaap_ProceedsFromStockPlans": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProceedsFromStockPlans",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Proceeds from Stock Plans",
        "terseLabel": "Proceeds from Employee Stock Purchase Plan purchases",
        "documentation": "The cash inflow associated with the amount received from the stock plan during the period."
       }
      }
     },
     "auth_ref": [
      "r7"
     ]
    },
    "us-gaap_ProductMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductMember",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product",
        "documentation": "Article or substance produced by nature, labor or machinery."
       }
      }
     },
     "auth_ref": [
      "r722"
     ]
    },
    "srt_ProductOrServiceAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ProductOrServiceAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Products and Services [Axis]",
        "documentation": "Information by product and service, or group of similar products and similar services."
       }
      }
     },
     "auth_ref": [
      "r287",
      "r567",
      "r588",
      "r589",
      "r590",
      "r591",
      "r592",
      "r593",
      "r697",
      "r722",
      "r741",
      "r768",
      "r801",
      "r802",
      "r809",
      "r863"
     ]
    },
    "acls_ProductOrServiceMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ProductOrServiceMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to product or service member.",
        "label": "Product / services*"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ProductWarrantiesDisclosuresAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantiesDisclosuresAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ProductWarrantyAccrual": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrual",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual",
        "periodEndLabel": "Balance at September 30 (end of period)",
        "periodStartLabel": "Balance at January 1 (beginning of year)",
        "totalLabel": "Total warranty liability",
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers."
       }
      }
     },
     "auth_ref": [
      "r81",
      "r316",
      "r320",
      "r324"
     ]
    },
    "us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualBalanceSheetClassificationAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Balance Sheet Classification [Abstract]",
        "terseLabel": "Product warranty classification"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ProductWarrantyAccrualClassifiedCurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualClassifiedCurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "parentTag": "us-gaap_ProductWarrantyAccrual",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0,
       "order": 4.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Current",
        "terseLabel": "Warranty",
        "verboseLabel": "Amount classified as current",
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer)."
       }
      }
     },
     "auth_ref": [
      "r31",
      "r803",
      "r804"
     ]
    },
    "us-gaap_ProductWarrantyAccrualNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualNoncurrent",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "parentTag": "us-gaap_ProductWarrantyAccrual",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Noncurrent",
        "terseLabel": "Amount classified as long-term (within other long-term liabilities)",
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and due after one year (or beyond the operating cycle if longer) for estimated claims under standard and extended warranty protection rights granted to customers."
       }
      }
     },
     "auth_ref": [
      "r34",
      "r803",
      "r804"
     ]
    },
    "us-gaap_ProductWarrantyAccrualPayments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualPayments",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Payments",
        "negatedLabel": "Settlements made during the period",
        "documentation": "Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty."
       }
      }
     },
     "auth_ref": [
      "r321"
     ]
    },
    "us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualPreexistingIncreaseDecrease",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Preexisting, Increase (Decrease)",
        "terseLabel": "Changes in estimate of liability for pre-existing warranties during the period",
        "documentation": "Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties."
       }
      }
     },
     "auth_ref": [
      "r323"
     ]
    },
    "us-gaap_ProductWarrantyAccrualWarrantiesIssued": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyAccrualWarrantiesIssued",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Warranties Issued",
        "terseLabel": "Warranties issued during the period",
        "documentation": "Amount of increase in the standard and extended product warranty accrual from warranties issued."
       }
      }
     },
     "auth_ref": [
      "r322"
     ]
    },
    "us-gaap_ProductWarrantyDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProductWarrantyDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarranty"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Disclosure [Text Block]",
        "terseLabel": "Product Warranty",
        "documentation": "The entire disclosure for standard and extended product warranties and other product guarantee contracts, including a tabular reconciliation of the changes in the guarantor's aggregate product warranty liability for the reporting period."
       }
      }
     },
     "auth_ref": [
      "r312",
      "r313",
      "r314",
      "r315",
      "r317",
      "r318"
     ]
    },
    "acls_ProductWarrantyPeriod": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ProductWarrantyPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period for which the warranty is offered for the products sold.",
        "label": "Product Warranty Period",
        "terseLabel": "Product warranty period"
       }
      }
     },
     "auth_ref": []
    },
    "srt_ProductsAndServicesDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ProductsAndServicesDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Products and Services [Domain]",
        "documentation": "Product or service, or a group of similar products or similar services."
       }
      }
     },
     "auth_ref": [
      "r287",
      "r567",
      "r588",
      "r589",
      "r590",
      "r591",
      "r592",
      "r593",
      "r697",
      "r722",
      "r741",
      "r768",
      "r801",
      "r802",
      "r809",
      "r863"
     ]
    },
    "us-gaap_ProfitLoss": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProfitLoss",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Income (Loss), Including Portion Attributable to Noncontrolling Interest",
        "terseLabel": "Net income",
        "documentation": "The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest."
       }
      }
     },
     "auth_ref": [
      "r182",
      "r198",
      "r201",
      "r215",
      "r223",
      "r239",
      "r247",
      "r248",
      "r268",
      "r277",
      "r282",
      "r285",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r500",
      "r503",
      "r504",
      "r516",
      "r526",
      "r571",
      "r583",
      "r609",
      "r646",
      "r664",
      "r665",
      "r713",
      "r737",
      "r738",
      "r752",
      "r778",
      "r805"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, net."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PropertyPlantAndEquipmentByTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentByTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Type [Axis]",
        "documentation": "Information by type of long-lived, physical assets used to produce goods and services and not intended for resale."
       }
      }
     },
     "auth_ref": [
      "r12"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNet"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment Disclosure [Text Block]",
        "terseLabel": "Property, Plant and Equipment, net",
        "documentation": "The entire disclosure for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections."
       }
      }
     },
     "auth_ref": [
      "r122",
      "r161",
      "r164",
      "r165"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentGross": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentGross",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails": {
       "parentTag": "us-gaap_PropertyPlantAndEquipmentNet",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Gross",
        "terseLabel": "Gross",
        "documentation": "Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures."
       }
      }
     },
     "auth_ref": [
      "r123",
      "r187",
      "r581"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails",
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment [Line Items]",
        "terseLabel": "Property, plant and equipment",
        "verboseLabel": "Assets manufactured for internal use",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PropertyPlantAndEquipmentNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentNet",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 2.0
      },
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Net",
        "terseLabel": "Property, plant and equipment, net",
        "totalLabel": "Net",
        "documentation": "Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures."
       }
      }
     },
     "auth_ref": [
      "r12",
      "r572",
      "r581",
      "r740"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentOther": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentOther",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails": {
       "parentTag": "us-gaap_PropertyPlantAndEquipmentOtherNet",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Other, Gross",
        "terseLabel": "Total cost",
        "documentation": "Amount before accumulated depreciation, depletion and amortization of other physical assets used in the normal conduct of business to produce goods and services and not intended for resale."
       }
      }
     },
     "auth_ref": [
      "r12"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentOtherAccumulatedDepreciation",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails": {
       "parentTag": "us-gaap_PropertyPlantAndEquipmentOtherNet",
       "weight": -1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Other, Accumulated Depreciation",
        "negatedLabel": "Accumulated depreciation",
        "documentation": "Amount of accumulated depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PropertyPlantAndEquipmentOtherNet": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentOtherNet",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Other, Net",
        "totalLabel": "Assets manufactured for internal use, net",
        "documentation": "Amount after depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other."
       }
      }
     },
     "auth_ref": []
    },
    "acls_PropertyPlantAndEquipmentOtherUsefulLife": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PropertyPlantAndEquipmentOtherUsefulLife",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Useful life of other long lived assets used in the normal conduct of business and not intended for resale.",
        "label": "Property, Plant and Equipment, Other Useful Life",
        "terseLabel": "Useful life"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_PropertyPlantAndEquipmentPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Policy [Policy Text Block]",
        "verboseLabel": "Property, Plant and Equipment and Leased Assets",
        "documentation": "Disclosure of accounting policy for long-lived, physical asset used in normal conduct of business and not intended for resale. Includes, but is not limited to, work of art, historical treasure, and similar asset classified as collections."
       }
      }
     },
     "auth_ref": [
      "r12",
      "r161",
      "r164",
      "r579"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment [Table Text Block]",
        "terseLabel": "Schedule of components of property, plant and equipment",
        "documentation": "Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation."
       }
      }
     },
     "auth_ref": [
      "r12"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentTypeDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentTypeDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Type [Domain]",
        "documentation": "Listing of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software."
       }
      }
     },
     "auth_ref": [
      "r123"
     ]
    },
    "us-gaap_PropertyPlantAndEquipmentUsefulLife": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "PropertyPlantAndEquipmentUsefulLife",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment, Useful Life",
        "terseLabel": "Useful life",
        "documentation": "Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment."
       }
      }
     },
     "auth_ref": []
    },
    "acls_PropertyPlantAndEquipmentUsefulLivesTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "PropertyPlantAndEquipmentUsefulLivesTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of useful life of physical assets used in the normal conduct of business and not intended for resale.",
        "label": "Property, Plant and Equipment, Useful Lives [Table Text Block]",
        "terseLabel": "Schedule of estimated useful lives of the related assets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ProvisionForDoubtfulAccounts": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProvisionForDoubtfulAccounts",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Provision for Doubtful Accounts",
        "terseLabel": "Provision for doubtful accounts",
        "documentation": "Amount of expense (reversal of expense) for expected credit loss on accounts receivable."
       }
      }
     },
     "auth_ref": [
      "r212",
      "r299"
     ]
    },
    "acls_ProvisionForExcessAndObsoleteInventory": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ProvisionForExcessAndObsoleteInventory",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 8.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of provision related to write-down of excess and obsolete inventory.",
        "label": "Provision for excess and obsolete inventory",
        "terseLabel": "Provision for excess and obsolete inventory"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ProvisionForLoanLeaseAndOtherLosses": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ProvisionForLoanLeaseAndOtherLosses",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTradeReceivablesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Provision for Loan, Lease, and Other Losses",
        "terseLabel": "Provision for credit losses",
        "documentation": "Amount of expense related loan transactions, lease transactions, credit loss from transactions other than loan and lease transactions, and other loss based on assessment of uncollectability from the counterparty to reduce the account to their net realizable value."
       }
      }
     },
     "auth_ref": [
      "r10",
      "r15",
      "r152"
     ]
    },
    "srt_RangeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "RangeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Range [Axis]",
        "documentation": "Information by statistical measurement. Includes, but is not limited to, minimum, maximum, weighted average, arithmetic average, and median."
       }
      }
     },
     "auth_ref": [
      "r308",
      "r309",
      "r310",
      "r311",
      "r394",
      "r411",
      "r444",
      "r445",
      "r446",
      "r563",
      "r564",
      "r594",
      "r615",
      "r616",
      "r671",
      "r673",
      "r675",
      "r676",
      "r678",
      "r694",
      "r695",
      "r714",
      "r721",
      "r732",
      "r742",
      "r745",
      "r799",
      "r807",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ]
    },
    "srt_RangeMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "RangeMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Range [Domain]",
        "documentation": "Statistical measurement. Includes, but is not limited to, minimum, maximum, weighted average, arithmetic average, and median."
       }
      }
     },
     "auth_ref": [
      "r308",
      "r309",
      "r310",
      "r311",
      "r394",
      "r411",
      "r444",
      "r445",
      "r446",
      "r563",
      "r564",
      "r594",
      "r615",
      "r616",
      "r671",
      "r673",
      "r675",
      "r676",
      "r678",
      "r694",
      "r695",
      "r714",
      "r721",
      "r732",
      "r742",
      "r745",
      "r799",
      "r807",
      "r856",
      "r857",
      "r858",
      "r859",
      "r860"
     ]
    },
    "acls_RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of recognizing assets related to recoverable customer contract costs.",
        "label": "Recognizing Assets Related to Recoverable Customer Contract Costs [Policy text block]",
        "terseLabel": "Recognizing Assets related to Recoverable Customer Contract Costs"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ReconciliationOfUnrecognizedTaxBenefitsExcludingAmountsPertainingToExaminedTaxReturnsRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]",
        "terseLabel": "Reconciliation of the beginning and ending balance of unrecognized tax benefits",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "acls_RegularEmployeesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "RegularEmployeesMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the regular employees of the entity.",
        "label": "Regular employees"
       }
      }
     },
     "auth_ref": []
    },
    "srt_RepurchaseAgreementCounterpartyNameDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "RepurchaseAgreementCounterpartyNameDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Counterparty Name [Domain]",
        "documentation": "Named other party that participates in a financial transaction. Examples include, but not limited to, the name of the financial institution."
       }
      }
     },
     "auth_ref": [
      "r226",
      "r227",
      "r338",
      "r363",
      "r559",
      "r707",
      "r708"
     ]
    },
    "us-gaap_ResearchAndDevelopmentExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ResearchAndDevelopmentExpense",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Research and Development Expense",
        "terseLabel": "Research and development",
        "documentation": "The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use."
       }
      }
     },
     "auth_ref": [
      "r85",
      "r461",
      "r861"
     ]
    },
    "us-gaap_ResearchAndDevelopmentExpenseMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ResearchAndDevelopmentExpenseMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Research and development",
        "documentation": "Primary financial statement caption in which the reported facts about research and development expense have been included."
       }
      }
     },
     "auth_ref": []
    },
    "acls_ResearchDevelopmentAndOtherTaxCreditMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ResearchDevelopmentAndOtherTaxCreditMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Research Development and Other Tax Credits.",
        "label": "Research and development and other tax credit carryforwards"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RestrictedCashAndCashEquivalents": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RestrictedCashAndCashEquivalents",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Restricted Cash and Cash Equivalents",
        "verboseLabel": "Long-term restricted cash",
        "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": [
      "r43",
      "r142",
      "r186",
      "r219",
      "r575"
     ]
    },
    "us-gaap_RestrictedCashAndCashEquivalentsNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RestrictedCashAndCashEquivalentsNoncurrent",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_Assets",
       "weight": 1.0,
       "order": 5.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Restricted Cash and Cash Equivalents, Noncurrent",
        "terseLabel": "Long-term restricted cash",
        "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as noncurrent. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates."
       }
      }
     },
     "auth_ref": [
      "r43",
      "r155",
      "r219"
     ]
    },
    "us-gaap_RestrictedStockMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RestrictedStockMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Restricted stock",
        "documentation": "Stock including a provision that prohibits sale or substantive sale of an equity instrument for a specified period of time or until specified performance conditions are met."
       }
      }
     },
     "auth_ref": [
      "r45"
     ]
    },
    "us-gaap_RestrictedStockUnitsRSUMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RestrictedStockUnitsRSUMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Restricted Stock Units",
        "documentation": "Share instrument which is convertible to stock or an equivalent amount of cash, after a specified period of time or when specified performance conditions are met."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RetainedEarningsAccumulatedDeficit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RetainedEarningsAccumulatedDeficit",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0,
       "order": 3.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Retained Earnings (Accumulated Deficit)",
        "terseLabel": "Retained earnings",
        "documentation": "Amount of accumulated undistributed earnings (deficit)."
       }
      }
     },
     "auth_ref": [
      "r94",
      "r131",
      "r577",
      "r598",
      "r600",
      "r607",
      "r626",
      "r740"
     ]
    },
    "us-gaap_RetainedEarningsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RetainedEarningsMember",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Deficit",
        "documentation": "Accumulated undistributed earnings (deficit)."
       }
      }
     },
     "auth_ref": [
      "r181",
      "r236",
      "r237",
      "r238",
      "r240",
      "r246",
      "r248",
      "r296",
      "r297",
      "r453",
      "r454",
      "r455",
      "r489",
      "r490",
      "r507",
      "r509",
      "r510",
      "r512",
      "r514",
      "r595",
      "r597",
      "r610",
      "r869"
     ]
    },
    "us-gaap_RevenueFromContractWithCustomerAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenueFromContractWithCustomerAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenueFromContractWithCustomerExcludingAssessedTax",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from Contract with Customer, Excluding Assessed Tax",
        "verboseLabel": "Total Revenue",
        "documentation": "Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise."
       }
      }
     },
     "auth_ref": [
      "r269",
      "r270",
      "r276",
      "r280",
      "r281",
      "r287",
      "r289",
      "r291",
      "r385",
      "r386",
      "r567"
     ]
    },
    "us-gaap_RevenueFromContractWithCustomerTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenueFromContractWithCustomerTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenue"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from Contract with Customer [Text Block]",
        "terseLabel": "Revenue",
        "documentation": "The entire disclosure of revenue from contract with customer to transfer good or service and to transfer nonfinancial asset. Includes, but is not limited to, disaggregation of revenue, credit loss recognized from contract with customer, judgment and change in judgment related to contract with customer, and asset recognized from cost incurred to obtain or fulfill contract with customer. Excludes insurance and lease contracts."
       }
      }
     },
     "auth_ref": [
      "r168",
      "r377",
      "r378",
      "r379",
      "r380",
      "r381",
      "r382",
      "r383",
      "r384",
      "r389"
     ]
    },
    "acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.",
        "label": "Revenue From External Customers By Discipline Areas Table Text Block",
        "terseLabel": "Schedule of revenue by discipline"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenueFromExternalCustomersByGeographicAreasTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from External Customers by Geographic Areas [Table Text Block]",
        "terseLabel": "Schedule of revenue by geographic markets",
        "documentation": "Tabular disclosure of revenue from external customers by geographic areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue."
       }
      }
     },
     "auth_ref": [
      "r24"
     ]
    },
    "us-gaap_RevenueRecognitionPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenueRecognitionPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue Recognition, Policy [Policy Text Block]",
        "terseLabel": "Revenue Recognition",
        "documentation": "Disclosure of accounting policy for revenue. Includes revenue from contract with customer and from other sources."
       }
      }
     },
     "auth_ref": [
      "r647",
      "r696",
      "r710"
     ]
    },
    "us-gaap_Revenues": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "Revenues",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_GrossProfit",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenues",
        "terseLabel": "Total revenue",
        "documentation": "Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss)."
       }
      }
     },
     "auth_ref": [
      "r208",
      "r223",
      "r269",
      "r270",
      "r276",
      "r280",
      "r281",
      "r287",
      "r289",
      "r291",
      "r295",
      "r325",
      "r326",
      "r327",
      "r328",
      "r329",
      "r330",
      "r331",
      "r332",
      "r333",
      "r526",
      "r571",
      "r805"
     ]
    },
    "us-gaap_RevenuesAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenuesAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenues [Abstract]",
        "terseLabel": "Revenue:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevenuesFromExternalCustomersAndLongLivedAssetsLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenues from External Customers and Long-Lived Assets [Line Items]",
        "terseLabel": "Revenue and long-lived assets by geographic region",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RevolvingCreditFacilityMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RevolvingCreditFacilityMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revolving credit facility",
        "documentation": "Arrangement in which loan proceeds can continuously be obtained following repayments, but the total amount borrowed cannot exceed a specified maximum amount."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Right-of-Use Asset Obtained in Exchange for Operating Lease Liability",
        "terseLabel": "Operating lease assets obtained in exchange for operating lease liabilities",
        "documentation": "Amount of increase in right-of-use asset obtained in exchange for operating lease liability."
       }
      }
     },
     "auth_ref": [
      "r554",
      "r739"
     ]
    },
    "acls_SaleAndLeaseBackMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "SaleAndLeaseBackMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the sale and leaseback transaction.",
        "label": "Sale leaseback obligation"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_SalesRevenueNetMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SalesRevenueNetMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Total revenue",
        "documentation": "Revenue from sale of product and rendering of service and other sources of income, when it serves as benchmark in concentration of risk calculation."
       }
      }
     },
     "auth_ref": [
      "r291",
      "r766"
     ]
    },
    "srt_ScenarioForecastMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ScenarioForecastMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Forecast [Member]",
        "documentation": "Information reported for future period. Excludes information expected to be reported in future period for effect on historical fact."
       }
      }
     },
     "auth_ref": [
      "r412",
      "r770",
      "r791"
     ]
    },
    "srt_ScenarioUnspecifiedDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ScenarioUnspecifiedDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Scenario, Unspecified [Domain]",
        "documentation": "Scenario reported, distinguishing information from actual fact. Includes, but is not limited to, pro forma and forecast. Excludes actual facts."
       }
      }
     },
     "auth_ref": [
      "r249",
      "r412",
      "r764",
      "r791"
     ]
    },
    "us-gaap_ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccountsReceivableAndAllowanceForCreditLossesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Accounts, Notes, Loans and Financing Receivable [Table Text Block]",
        "verboseLabel": "Components of accounts receivable",
        "documentation": "Tabular disclosure of the various types of trade accounts and notes receivable and for each the gross carrying value, allowance, and net carrying value as of the balance sheet date. Presentation is categorized by current, noncurrent and unclassified receivables."
       }
      }
     },
     "auth_ref": [
      "r37"
     ]
    },
    "us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]",
        "terseLabel": "Schedule of changes in accumulated other comprehensive loss, net of tax",
        "documentation": "Tabular disclosure of the components of accumulated other comprehensive income (loss)."
       }
      }
     },
     "auth_ref": [
      "r39",
      "r848",
      "r849"
     ]
    },
    "us-gaap_ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Amounts Recognized in Balance Sheet [Table Text Block]",
        "terseLabel": "Schedule of classification of liabilities in Consolidated Balance Sheets",
        "documentation": "Tabular disclosure of the amounts that are recognized in the balance sheet (or statement of financial position) for pension plans and/or other employee benefit plans, showing separately the assets and current and noncurrent liabilities (if applicable) recognized."
       }
      }
     },
     "auth_ref": [
      "r65"
     ]
    },
    "us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]",
        "terseLabel": "Schedule of provision for income taxes",
        "documentation": "Tabular disclosure of the components of income tax expense attributable to continuing operations for each year presented including, but not limited to: current tax expense (benefit), deferred tax expense (benefit), investment tax credits, government grants, the benefits of operating loss carryforwards, tax expense that results from allocating certain tax benefits either directly to contributed capital or to reduce goodwill or other noncurrent intangible assets of an acquired entity, adjustments of a deferred tax liability or asset for enacted changes in tax laws or rates or a change in the tax status of the entity, and adjustments of the beginning-of-the-year balances of a valuation allowance because of a change in circumstances that causes a change in judgment about the realizability of the related deferred tax asset in future years."
       }
      }
     },
     "auth_ref": [
      "r137"
     ]
    },
    "us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Deferred Tax Assets and Liabilities [Table Text Block]",
        "terseLabel": "Schedule of significant components of current and long-term deferred income taxes",
        "documentation": "Tabular disclosure of the components of net deferred tax asset or liability recognized in an entity's statement of financial position, including the following: the total of all deferred tax liabilities, the total of all deferred tax assets, the total valuation allowance recognized for deferred tax assets."
       }
      }
     },
     "auth_ref": [
      "r136"
     ]
    },
    "us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]",
        "terseLabel": "Schedule of components of net income per share",
        "documentation": "Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r792"
     ]
    },
    "us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate",
        "documentation": "Tabular disclosure of the reconciliation using percentage or dollar amounts of the reported amount of income tax expense attributable to continuing operations for the year to the amount of income tax expense that would result from applying domestic federal statutory tax rates to pretax income from continuing operations."
       }
      }
     },
     "auth_ref": [
      "r135"
     ]
    },
    "us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueByProductLineDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from External Customers by Products and Services [Table]",
        "documentation": "Tabular presentation of the description and amount of revenues from a product or service, or a group of similar products or similar services, reported from external customers during the period, if the information is not provided as part of the reportable operating segment information."
       }
      }
     },
     "auth_ref": [
      "r56"
     ]
    },
    "us-gaap_ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue from External Customers by Products and Services [Table Text Block]",
        "terseLabel": "Schedule of revenue by product lines",
        "documentation": "Tabular disclosure of entity-wide revenues from external customers for each product or service or each group of similar products or services if the information is not provided as part of the reportable operating segment information."
       }
      }
     },
     "auth_ref": [
      "r56"
     ]
    },
    "us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]",
        "terseLabel": "Schedule of Company's assets and liabilities by level within the fair value hierarchy",
        "documentation": "Tabular disclosure of assets and liabilities, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3)."
       }
      }
     },
     "auth_ref": [
      "r518",
      "r519"
     ]
    },
    "us-gaap_ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Income before Income Tax, Domestic and Foreign [Table Text Block]",
        "terseLabel": "Schedule of income before income taxes",
        "documentation": "Tabular disclosure of income before income tax between domestic and foreign jurisdictions."
       }
      }
     },
     "auth_ref": [
      "r782"
     ]
    },
    "us-gaap_ScheduleOfInventoryCurrentTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfInventoryCurrentTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Inventory, Current [Table Text Block]",
        "terseLabel": "Schedule of components of inventories",
        "documentation": "Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process."
       }
      }
     },
     "auth_ref": [
      "r27",
      "r98",
      "r99",
      "r100"
     ]
    },
    "us-gaap_ScheduleOfOtherAssetsTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfOtherAssetsTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Other Assets [Table Text Block]",
        "terseLabel": "Schedule of components of assets manufactured for internal use",
        "documentation": "Tabular disclosure of the carrying amounts of other assets. This disclosure includes other current assets and other noncurrent assets."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfProductWarrantyLiabilityTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Product Warranty Liability [Table Text Block]",
        "terseLabel": "Schedule of product warranty liability",
        "documentation": "Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability."
       }
      }
     },
     "auth_ref": [
      "r319"
     ]
    },
    "us-gaap_ScheduleOfPropertyPlantAndEquipmentTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfPropertyPlantAndEquipmentTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAssetsManufacturedForInternalUseNetComponentsDetails",
      "http://www.axcelis.com/role/DisclosurePropertyPlantAndEquipmentNetDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentAndImpairmentOfLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Property, Plant and Equipment [Table]",
        "documentation": "Disclosure of information about physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation."
       }
      }
     },
     "auth_ref": [
      "r12"
     ]
    },
    "us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]",
        "terseLabel": "Schedule of revenue and long-lived assets by geographic region",
        "documentation": "Tabular disclosure of information concerning material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries."
       }
      }
     },
     "auth_ref": [
      "r57",
      "r105"
     ]
    },
    "us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Revenues from External Customers and Long-Lived Assets [Table]",
        "documentation": "Schedule of material long-lived assets (excluding financial instruments, customer relationships with financial institutions, mortgage and other servicing rights, deferred policy acquisition costs, and deferred taxes assets) located in identified geographic areas and/or the amount of revenue from external customers attributed to that country from which revenue is material. An entity may also provide subtotals of geographic information about groups of countries."
       }
      }
     },
     "auth_ref": [
      "r57",
      "r102"
     ]
    },
    "us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]",
        "documentation": "Disclosure of information about share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r414",
      "r416",
      "r419",
      "r420",
      "r421",
      "r423",
      "r424",
      "r425",
      "r426",
      "r427",
      "r428",
      "r429",
      "r430",
      "r431",
      "r432",
      "r433",
      "r434",
      "r435",
      "r436",
      "r437",
      "r438",
      "r439",
      "r440",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447"
     ]
    },
    "us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]",
        "terseLabel": "Summary of stock option activity",
        "documentation": "Tabular disclosure for stock option plans. Includes, but is not limited to, outstanding awards at beginning and end of year, grants, exercises, forfeitures, and weighted-average grant date fair value."
       }
      }
     },
     "auth_ref": [
      "r21",
      "r22",
      "r67"
     ]
    },
    "us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]",
        "terseLabel": "Schedule of estimated weighted-average assumptions used in calculation of fair value of options granted",
        "documentation": "Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions."
       }
      }
     },
     "auth_ref": [
      "r134"
     ]
    },
    "us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]",
        "terseLabel": "Schedule of changes in the Company's non-vested restricted stock units",
        "documentation": "Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesTables"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of the beginning and ending balance of unrecognized tax benefits",
        "documentation": "Tabular disclosure of the change in unrecognized tax benefits."
       }
      }
     },
     "auth_ref": [
      "r736",
      "r838"
     ]
    },
    "srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccounts"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule of Valuation and Qualifying Accounts Disclosure [Text Block]",
        "terseLabel": "Schedule II-Valuation and Qualifying Accounts",
        "documentation": "The entire disclosure for valuation and qualifying accounts and reserves."
       }
      }
     },
     "auth_ref": [
      "r169",
      "r235"
     ]
    },
    "acls_SecondLargestCustomerMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "SecondLargestCustomerMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents one customer on whom the entity significantly relies giving rise to the second largest single concentration risk.",
        "label": "Second customer"
       }
      }
     },
     "auth_ref": []
    },
    "dei_Security12bTitle": {
     "xbrltype": "securityTitleItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "Security12bTitle",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Title of 12(b) Security",
        "documentation": "Title of a 12(b) registered security."
       }
      }
     },
     "auth_ref": [
      "r754"
     ]
    },
    "us-gaap_SecurityDeposit": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SecurityDeposit",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Security Deposit",
        "terseLabel": "Security deposit",
        "documentation": "The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease."
       }
      }
     },
     "auth_ref": [
      "r771"
     ]
    },
    "dei_SecurityExchangeName": {
     "xbrltype": "edgarExchangeCodeItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "SecurityExchangeName",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Security Exchange Name",
        "documentation": "Name of the Exchange on which a security is registered."
       }
      }
     },
     "auth_ref": [
      "r756"
     ]
    },
    "srt_SegmentGeographicalDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "SegmentGeographicalDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographical [Domain]",
        "documentation": "Geographical area."
       }
      }
     },
     "auth_ref": [
      "r170",
      "r171",
      "r172",
      "r173",
      "r174",
      "r175",
      "r176",
      "r177",
      "r178",
      "r289",
      "r290",
      "r612",
      "r613",
      "r614",
      "r672",
      "r674",
      "r677",
      "r679",
      "r685",
      "r686",
      "r687",
      "r688",
      "r689",
      "r690",
      "r691",
      "r692",
      "r693",
      "r698",
      "r723",
      "r745",
      "r809",
      "r863"
     ]
    },
    "us-gaap_SegmentReportingAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SegmentReportingAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Business Segment and Geographic Region Information"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_SegmentReportingDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SegmentReportingDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Segment Reporting Disclosure [Text Block]",
        "terseLabel": "Business Segment and Geographic Region Information",
        "documentation": "The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments."
       }
      }
     },
     "auth_ref": [
      "r264",
      "r265",
      "r266",
      "r267",
      "r268",
      "r275",
      "r279",
      "r283",
      "r284",
      "r285",
      "r286",
      "r287",
      "r288",
      "r291"
     ]
    },
    "us-gaap_SellingAndMarketingExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SellingAndMarketingExpense",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Selling and Marketing Expense",
        "terseLabel": "Sales and marketing",
        "documentation": "The aggregate total amount of expenses directly related to the marketing or selling of products or services."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_SellingAndMarketingExpenseMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SellingAndMarketingExpenseMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Sales and marketing*",
        "documentation": "Primary financial statement caption encompassing selling and marketing expense."
       }
      }
     },
     "auth_ref": [
      "r104"
     ]
    },
    "acls_ServicesMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ServicesMember",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Service or group of services that are sold by the entity.",
        "label": "Services"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensation": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensation",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0,
       "order": 7.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation",
        "terseLabel": "Stock-based compensation expense",
        "documentation": "Amount of noncash expense for share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r10"
     ]
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares authorized for issuance under share-based payment arrangement which is approved by shareholders.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Authorized, Number of Shares Approved by Shareholders",
        "terseLabel": "Number of shares approved"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares authorized for issuance under share-based payment arrangement as a result of expiration or forfeiture of awards under prior equity plan.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Authorized, Number of Shares from Expirations or Forfeitures of Prior Equity Plan",
        "verboseLabel": "Shares from expirations or forfeitures"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period",
        "terseLabel": "Vesting period",
        "documentation": "Period over which grantee's right to exercise award under share-based payment arrangement is no longer contingent on satisfaction of service or performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, combination of market, performance or service condition."
       }
      }
     },
     "auth_ref": [
      "r733"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeited in Period",
        "negatedLabel": "Forfeited (in shares)",
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that were forfeited during the reporting period."
       }
      }
     },
     "auth_ref": [
      "r436"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Forfeitures, Weighted Average Grant Date Fair Value",
        "terseLabel": "Forfeited (in dollars per share)",
        "documentation": "Weighted average fair value as of the grant date of equity-based award plans other than stock (unit) option plans that were not exercised or put into effect as a result of the occurrence of a terminating event."
       }
      }
     },
     "auth_ref": [
      "r436"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period",
        "terseLabel": "Granted (in shares)",
        "documentation": "The number of grants made during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan)."
       }
      }
     },
     "auth_ref": [
      "r434"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Granted (in dollars per share)",
        "documentation": "The weighted average fair value at grant date for nonvested equity-based awards issued during the period on other than stock (or unit) option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, performance target plan)."
       }
      }
     },
     "auth_ref": [
      "r434"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number",
        "periodEndLabel": "Outstanding at the end of the period (in shares)",
        "periodStartLabel": "Outstanding at the beginning of the period (in shares)",
        "documentation": "The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date."
       }
      }
     },
     "auth_ref": [
      "r431",
      "r432"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]",
        "terseLabel": "Shares/units",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value",
        "periodEndLabel": "Outstanding at the end of the period (in dollars per share)",
        "periodStartLabel": "Outstanding at the beginning of the period (in dollars per share)",
        "documentation": "Per share or unit weighted-average fair value of nonvested award under share-based payment arrangement. Excludes share and unit options."
       }
      }
     },
     "auth_ref": [
      "r431",
      "r432"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]",
        "terseLabel": "Weighted-Average Grant Date Fair Value per Share"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period",
        "negatedLabel": "Vested (in shares)",
        "documentation": "The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period."
       }
      }
     },
     "auth_ref": [
      "r435"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value",
        "terseLabel": "Vested (in dollars per share)",
        "documentation": "The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement."
       }
      }
     },
     "auth_ref": [
      "r435"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]",
        "terseLabel": "Estimated weighted-average assumptions"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate",
        "terseLabel": "Expected dividend yield (as a percent)",
        "documentation": "The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term."
       }
      }
     },
     "auth_ref": [
      "r445"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate",
        "terseLabel": "Weighted-average expected volatility (as a percent)",
        "documentation": "The estimated measure of the percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period."
       }
      }
     },
     "auth_ref": [
      "r444"
     ]
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate": {
     "xbrltype": "percentItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the estimated annual forfeiture rate of the unvested portion of share-based compensation awards, based on historical analysis.",
        "label": "Share Based Compensation, Arrangement by Share Based Payment, Award Fair Value Assumptions Forfeiture Rate",
        "terseLabel": "Forfeiture rate (as a percent)"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate",
        "terseLabel": "Risk-free interest rate",
        "documentation": "The risk-free interest rate assumption that is used in valuing an option on its own shares."
       }
      }
     },
     "auth_ref": [
      "r446"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award [Line Items]",
        "terseLabel": "Stock-Based Compensation",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r414",
      "r416",
      "r419",
      "r420",
      "r421",
      "r423",
      "r424",
      "r425",
      "r426",
      "r427",
      "r428",
      "r429",
      "r430",
      "r431",
      "r432",
      "r433",
      "r434",
      "r435",
      "r436",
      "r437",
      "r438",
      "r439",
      "r440",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized",
        "terseLabel": "Number of shares of common stock originally reserved for future grant",
        "documentation": "Number of shares authorized for issuance under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r735"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant",
        "terseLabel": "Number of shares of common stock available for future grants",
        "documentation": "The difference between the maximum number of shares (or other type of equity) authorized for issuance under the plan (including the effects of amendments and adjustments), and the sum of: 1) the number of shares (or other type of equity) already issued upon exercise of options or other equity-based awards under the plan; and 2) shares (or other type of equity) reserved for issuance on granting of outstanding awards, net of cancellations and forfeitures, if applicable."
       }
      }
     },
     "auth_ref": [
      "r66"
     ]
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the offering period over which compensation expense is amortized.",
        "label": "Share Based Compensation, Arrangement by Share Based Payment Award Offering Period Over which Compensation Expense is Amortized",
        "terseLabel": "Offering period over which compensation expense is amortized"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAdditionalDisclosuresAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Additional Disclosures [Abstract]",
        "terseLabel": "Additional disclosure"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsAggregateIntrinsicValueAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share Based Compensation, Arrangement by Share Based Payment, Award, Options Aggregate Intrinsic Value [Abstract]",
        "terseLabel": "Aggregate Intrinsic Value"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number",
        "terseLabel": "Exercisable (in shares)",
        "documentation": "The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan."
       }
      }
     },
     "auth_ref": [
      "r425"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price",
        "terseLabel": "Exercisable at the end of the period (in dollars per share)",
        "documentation": "The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan."
       }
      }
     },
     "auth_ref": [
      "r425"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Intrinsic Value",
        "terseLabel": "Total intrinsic value of options exercised (in dollars)",
        "documentation": "Amount of accumulated difference between fair value of underlying shares on dates of exercise and exercise price on options exercised (or share units converted) into shares."
       }
      }
     },
     "auth_ref": [
      "r438"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Gross",
        "terseLabel": "Granted (in shares)",
        "documentation": "Gross number of share options (or share units) granted during the period."
       }
      }
     },
     "auth_ref": [
      "r427"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value",
        "terseLabel": "Outstanding at the end of the period (in dollars)",
        "documentation": "Amount by which the current fair value of the underlying stock exceeds the exercise price of options outstanding."
       }
      }
     },
     "auth_ref": [
      "r66"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number",
        "periodEndLabel": "Outstanding at the end of the period (in shares)",
        "periodStartLabel": "Outstanding at the beginning of the period (in shares)",
        "documentation": "Number of options outstanding, including both vested and non-vested options."
       }
      }
     },
     "auth_ref": [
      "r423",
      "r424"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]",
        "terseLabel": "Options",
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price",
        "periodEndLabel": "Outstanding at the end of the period (in dollars per share)",
        "periodStartLabel": "Outstanding at the beginning of the period (in dollars per share)",
        "documentation": "Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan."
       }
      }
     },
     "auth_ref": [
      "r423",
      "r424"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract]",
        "terseLabel": "Weighted Average Exercise Price"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Aggregate Intrinsic Value",
        "terseLabel": "Options Vested at the end of the period (in dollars)",
        "documentation": "Amount by which current fair value of underlying stock exceeds exercise price of fully vested and expected to vest options outstanding. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur."
       }
      }
     },
     "auth_ref": [
      "r439"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Number",
        "terseLabel": "Options Vested at the end of the period (in shares)",
        "documentation": "Number of fully vested and expected to vest options outstanding that can be converted into shares under option plan. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur."
       }
      }
     },
     "auth_ref": [
      "r439"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Exercise Price",
        "terseLabel": "Options Vested at the end of the period (in dollars per share)",
        "documentation": "Weighted-average exercise price, at which grantee can acquire shares reserved for issuance, for fully vested and expected to vest options outstanding. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur."
       }
      }
     },
     "auth_ref": [
      "r439"
     ]
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsWeightedAverageRemainingContractualTermAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share Based Compensation, Arrangement by Share Based Payment Award Options, Weighted Average Remaining Contractual Term [Abstract]",
        "terseLabel": "Weighted Average Remaining Contractual Term"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary": {
     "xbrltype": "percentItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the amount of payroll deductions, expressed as a percentage of employees' salary, subject to certain caps set forth in the employee stock purchase plan, through which purchases are made.",
        "label": "Share Based Compensation, Arrangement by Share Based Payment, Award Payroll Deductions as Percentage of Employees Salary",
        "terseLabel": "Payroll deductions as a percentage of employee's salary"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period after termination to exercise share-based awards that were vested.",
        "label": "Share Based Compensation Arrangement by Share Based Payment Award, Period after Termination to Exercise Awards that were Vested",
        "terseLabel": "Period after termination to exercise awards that were vested"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards": {
     "xbrltype": "durationItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period after termination to retiring employees to exercise vested share-based awards.",
        "label": "Share Based Compensation Arrangement by Share Based Payment Award Period after Termination to Retiring Employees to Exercise Vested Awards",
        "terseLabel": "Period after termination to retiring employees to exercise vested awards"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Equity Award [Domain]",
        "documentation": "Award under share-based payment arrangement."
       }
      }
     },
     "auth_ref": [
      "r419",
      "r420",
      "r421",
      "r423",
      "r424",
      "r425",
      "r426",
      "r427",
      "r428",
      "r429",
      "r430",
      "r431",
      "r432",
      "r433",
      "r434",
      "r435",
      "r436",
      "r437",
      "r438",
      "r439",
      "r440",
      "r443",
      "r444",
      "r445",
      "r446",
      "r447"
     ]
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice": {
     "xbrltype": "perShareItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price",
        "terseLabel": "Exercised (in dollars per share)",
        "documentation": "Weighted average price at which option holders acquired shares when converting their stock options into shares."
       }
      }
     },
     "auth_ref": [
      "r428"
     ]
    },
    "us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShareBasedCompensationOptionAndIncentivePlansPolicy",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]",
        "terseLabel": "Stock-Based Compensation",
        "documentation": "Disclosure of accounting policy for award under share-based payment arrangement. Includes, but is not limited to, methodology and assumption used in measuring cost."
       }
      }
     },
     "auth_ref": [
      "r413",
      "r422",
      "r441",
      "r442",
      "r443",
      "r444",
      "r447",
      "r456",
      "r457",
      "r458",
      "r459"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period",
        "terseLabel": "Options Expiration period",
        "documentation": "Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r734"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term",
        "terseLabel": "Weighted-average expected term",
        "documentation": "Expected term of award under share-based payment arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r443"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value",
        "terseLabel": "Exercisable at the end of the period (in dollars)",
        "documentation": "Amount of difference between fair value of the underlying shares reserved for issuance and exercise price of vested portions of options outstanding and currently exercisable."
       }
      }
     },
     "auth_ref": [
      "r66"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term",
        "terseLabel": "Exercisable at the end of the period",
        "documentation": "Weighted average remaining contractual term for vested portions of options outstanding and currently exercisable or convertible, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r66"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term",
        "terseLabel": "Outstanding at the end of the period",
        "documentation": "Weighted average remaining contractual term for option awards outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days."
       }
      }
     },
     "auth_ref": [
      "r133"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1": {
     "xbrltype": "durationItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested and Expected to Vest, Outstanding, Weighted Average Remaining Contractual Term",
        "terseLabel": "Options Vested at the end of the period",
        "documentation": "Weighted average remaining contractual term for fully vested and expected to vest options outstanding, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days. Includes, but is not limited to, unvested options for which requisite service period has not been rendered but that are expected to vest based on achievement of performance condition, if forfeitures are recognized when they occur."
       }
      }
     },
     "auth_ref": [
      "r439"
     ]
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested, Number of Shares",
        "terseLabel": "Vested (in shares)",
        "documentation": "Number of options vested."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent": {
     "xbrltype": "percentItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Purchase Price of Common Stock, Percent",
        "terseLabel": "Purchase price as a percentage of the market value of a common stock on the day the stock is purchased",
        "documentation": "Purchase price of common stock expressed as a percentage of its fair value."
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_SharesOutstanding": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SharesOutstanding",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Shares, Outstanding",
        "periodEndLabel": "Balance (in shares)",
        "periodStartLabel": "Balance (in shares)",
        "documentation": "Number of shares issued which are neither cancelled nor held in the treasury."
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShippingAndHandlingCostsPolicyTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShippingAndHandlingCostsPolicyTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Shipping and Handling Costs.",
        "label": "Shipping and Handling Costs [Policy Text Block]",
        "terseLabel": "Shipping and Handling Costs"
       }
      }
     },
     "auth_ref": []
    },
    "acls_ShortTermAndVariableLeaseCost": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "ShortTermAndVariableLeaseCost",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of short-term and variable lease cost.",
        "label": "Short-term And Variable Lease, Cost",
        "terseLabel": "Short-term lease and variable lease costs"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_ShortTermInvestments": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ShortTermInvestments",
     "crdr": "debit",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails": {
       "parentTag": "acls_CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure",
       "weight": 1.0,
       "order": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Short-term investments",
        "terseLabel": "Short-term investments (U.S. Government Securities and Agency Investments)",
        "documentation": "Amount of investments including trading securities, available-for-sale securities, held-to-maturity securities, and short-term investments classified as other and current."
       }
      }
     },
     "auth_ref": [
      "r149",
      "r150",
      "r774"
     ]
    },
    "us-gaap_SignificantAccountingPoliciesTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SignificantAccountingPoliciesTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Significant Accounting Policies [Text Block]",
        "terseLabel": "Summary of Significant Accounting Policies",
        "documentation": "The entire disclosure for all significant accounting policies of the reporting entity."
       }
      }
     },
     "auth_ref": [
      "r119",
      "r220"
     ]
    },
    "acls_SiliconValleyBankMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "SiliconValleyBankMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to Silicon Valley Bank.",
        "label": "Silicon Valley Bank"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StatementEquityComponentsAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementEquityComponentsAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Equity Components [Axis]",
        "documentation": "Information by component of equity."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r36",
      "r181",
      "r204",
      "r205",
      "r206",
      "r236",
      "r237",
      "r238",
      "r240",
      "r246",
      "r248",
      "r263",
      "r296",
      "r297",
      "r374",
      "r453",
      "r454",
      "r455",
      "r489",
      "r490",
      "r507",
      "r508",
      "r509",
      "r510",
      "r511",
      "r512",
      "r514",
      "r532",
      "r534",
      "r535",
      "r536",
      "r537",
      "r538",
      "r558",
      "r595",
      "r596",
      "r597",
      "r610",
      "r666"
     ]
    },
    "srt_StatementGeographicalAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "StatementGeographicalAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographical [Axis]",
        "documentation": "Information by geographical components."
       }
      }
     },
     "auth_ref": [
      "r170",
      "r179",
      "r289",
      "r290",
      "r612",
      "r613",
      "r614",
      "r672",
      "r674",
      "r677",
      "r679",
      "r682",
      "r685",
      "r686",
      "r687",
      "r688",
      "r689",
      "r690",
      "r691",
      "r692",
      "r693",
      "r698",
      "r723",
      "r745",
      "r809",
      "r863"
     ]
    },
    "us-gaap_StatementLineItems": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementLineItems",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails",
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement [Line Items]",
        "terseLabel": "Schedule II-Valuation and Qualifying Accounts",
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table."
       }
      }
     },
     "auth_ref": [
      "r236",
      "r237",
      "r238",
      "r263",
      "r567",
      "r604",
      "r611",
      "r617",
      "r618",
      "r619",
      "r620",
      "r621",
      "r622",
      "r625",
      "r628",
      "r629",
      "r630",
      "r631",
      "r632",
      "r633",
      "r634",
      "r635",
      "r636",
      "r638",
      "r639",
      "r640",
      "r641",
      "r642",
      "r644",
      "r647",
      "r648",
      "r651",
      "r652",
      "r653",
      "r654",
      "r655",
      "r656",
      "r657",
      "r658",
      "r659",
      "r660",
      "r661",
      "r662",
      "r666",
      "r746"
     ]
    },
    "us-gaap_StatementOfCashFlowsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementOfCashFlowsAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Cash Flows"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StatementOfFinancialPositionAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementOfFinancialPositionAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Balance Sheets"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementOfIncomeAndComprehensiveIncomeAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Comprehensive Income"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StatementOfStockholdersEquityAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementOfStockholdersEquityAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Stockholders' Equity"
       }
      }
     },
     "auth_ref": []
    },
    "srt_StatementScenarioAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "StatementScenarioAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Scenario [Axis]",
        "documentation": "Information by scenario reported, distinguishing information from actual fact. Includes, but is not limited to, pro forma and forecast. Excludes actual facts."
       }
      }
     },
     "auth_ref": [
      "r249",
      "r412",
      "r764",
      "r765",
      "r791"
     ]
    },
    "us-gaap_StatementTable": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StatementTable",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureCommitmentsAndContingenciesDetails",
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails",
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesRevenueRecognitionDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Statement [Table]",
        "documentation": "Schedule reflecting a Statement of Income, Statement of Cash Flows, Statement of Financial Position, Statement of Shareholders' Equity and Other Comprehensive Income, or other statement as needed."
       }
      }
     },
     "auth_ref": [
      "r236",
      "r237",
      "r238",
      "r263",
      "r567",
      "r604",
      "r611",
      "r617",
      "r618",
      "r619",
      "r620",
      "r621",
      "r622",
      "r625",
      "r628",
      "r629",
      "r630",
      "r631",
      "r632",
      "r633",
      "r634",
      "r635",
      "r636",
      "r638",
      "r639",
      "r640",
      "r641",
      "r642",
      "r644",
      "r647",
      "r648",
      "r651",
      "r652",
      "r653",
      "r654",
      "r655",
      "r656",
      "r657",
      "r658",
      "r659",
      "r660",
      "r661",
      "r662",
      "r666",
      "r746"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Issued During Period, Shares, Employee Stock Purchase Plans",
        "terseLabel": "Issuance of stock under Employee Stock Purchase Plan (in shares)",
        "verboseLabel": "Number of shares purchased under the plan",
        "documentation": "Number of shares issued during the period as a result of an employee stock purchase plan."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Issued During Period, Shares, Restricted Stock Award, Net of Forfeitures",
        "verboseLabel": "Issuance of restricted common shares (in shares)",
        "documentation": "Number of shares issued during the period related to Restricted Stock Awards, net of any shares forfeited."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodSharesStockOptionsExercised",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period",
        "negatedLabel": "Exercised (in shares)",
        "terseLabel": "Exercise of stock options (in shares)",
        "documentation": "Number of share options (or share units) exercised during the current period."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131",
      "r428"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodValueEmployeeStockPurchasePlan",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Issued During Period, Value, Employee Stock Purchase Plan",
        "terseLabel": "Issuance of stock under Employee Stock Purchase Plan",
        "documentation": "Aggregate change in value for stock issued during the period as a result of employee stock purchase plan."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures",
        "verboseLabel": "Issuance of restricted common shares",
        "documentation": "Value of stock related to Restricted Stock Awards issued during the period, net of the stock value of such awards forfeited."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r131"
     ]
    },
    "us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockIssuedDuringPeriodValueStockOptionsExercised",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Issued During Period, Value, Stock Options Exercised",
        "terseLabel": "Exercise of stock options",
        "documentation": "Value of stock issued as a result of the exercise of stock options."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r36",
      "r131"
     ]
    },
    "acls_StockOptionAwardsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "StockOptionAwardsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contract that gives the holder the right, but not the obligation, either to purchase or to sell a certain number of shares of stock at a predetermined price for a specified period of time.",
        "label": "Stock Option Awards"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StockRepurchasedDuringPeriodShares": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockRepurchasedDuringPeriodShares",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Treasury shares returned to authorized, Shares",
        "negatedLabel": "Repurchase of common stock (in shares)",
        "documentation": "Number of shares that have been repurchased during the period and have not been retired and are not held in treasury. Some state laws may govern the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131",
      "r606",
      "r666",
      "r680"
     ]
    },
    "us-gaap_StockRepurchasedDuringPeriodValue": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockRepurchasedDuringPeriodValue",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Treasury shares returned to authorized, Value",
        "negatedLabel": "Repurchase of common stock",
        "documentation": "Equity impact of the value of stock that has been repurchased during the period and has not been retired and is not held in treasury. Some state laws may mandate the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock."
       }
      }
     },
     "auth_ref": [
      "r19",
      "r91",
      "r92",
      "r131",
      "r610",
      "r666",
      "r680",
      "r752"
     ]
    },
    "us-gaap_StockholdersEquity": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockholdersEquity",
     "crdr": "credit",
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0,
       "order": 2.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity Attributable to Parent",
        "periodEndLabel": "Balance",
        "periodStartLabel": "Balance",
        "totalLabel": "Total stockholders' equity",
        "documentation": "Amount of equity (deficit) attributable to parent. Excludes temporary equity and equity attributable to noncontrolling interest."
       }
      }
     },
     "auth_ref": [
      "r92",
      "r95",
      "r96",
      "r120",
      "r627",
      "r643",
      "r667",
      "r668",
      "r740",
      "r753",
      "r781",
      "r796",
      "r844",
      "r869"
     ]
    },
    "us-gaap_StockholdersEquityAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockholdersEquityAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity Attributable to Parent [Abstract]",
        "terseLabel": "Stockholders' equity:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StockholdersEquityNoteAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockholdersEquityNoteAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_StockholdersEquityNoteDisclosureTextBlock": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "StockholdersEquityNoteDisclosureTextBlock",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockholdersEquity"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity Note Disclosure [Text Block]",
        "terseLabel": "Stockholders' Equity",
        "documentation": "The entire disclosure for equity."
       }
      }
     },
     "auth_ref": [
      "r128",
      "r222",
      "r361",
      "r362",
      "r364",
      "r365",
      "r366",
      "r367",
      "r368",
      "r369",
      "r370",
      "r371",
      "r372",
      "r373",
      "r374",
      "r513",
      "r669",
      "r670",
      "r681"
     ]
    },
    "us-gaap_SupplementalCashFlowElementsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "SupplementalCashFlowElementsAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Supplemental Cash Flow Elements [Abstract]",
        "terseLabel": "Supplemental disclosure of cash flow information"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_TaxCreditCarryforwardAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "TaxCreditCarryforwardAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Tax Credit Carryforward [Axis]",
        "documentation": "Information by specific tax credit related to an unused tax credit."
       }
      }
     },
     "auth_ref": [
      "r70"
     ]
    },
    "us-gaap_TaxCreditCarryforwardNameDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "TaxCreditCarryforwardNameDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesOperatingLossCarryforwardsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Tax Credit Carryforward, Name [Domain]",
        "documentation": "The name of the tax credit carryforward."
       }
      }
     },
     "auth_ref": [
      "r70"
     ]
    },
    "acls_TenLargestCustomersMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "TenLargestCustomersMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesConcentrationOfRiskDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the ten largest customers on whom the entity significantly relies giving rise to aggregate concentration risk.",
        "label": "Ten largest customers"
       }
      }
     },
     "auth_ref": []
    },
    "srt_TitleOfIndividualAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "TitleOfIndividualAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails",
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Title of Individual [Axis]",
        "documentation": "Information by title of individual or nature of relationship to individual or group of individuals."
       }
      }
     },
     "auth_ref": [
      "r795",
      "r852"
     ]
    },
    "srt_TitleOfIndividualWithRelationshipToEntityDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "TitleOfIndividualWithRelationshipToEntityDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureEmployeeBenefitPlansDefinedContributionPlanDetails",
      "http://www.axcelis.com/role/DisclosureStockAwardPlansAndStockBasedCompensationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Relationship to Entity [Domain]",
        "documentation": "Title of individual, or nature of relationship to individual or group of individuals."
       }
      }
     },
     "auth_ref": []
    },
    "dei_TradingSymbol": {
     "xbrltype": "tradingSymbolItemType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "localname": "TradingSymbol",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Trading Symbol",
        "documentation": "Trading symbol of an instrument as listed on an exchange."
       }
      }
     },
     "auth_ref": []
    },
    "country_US": {
     "xbrltype": "domainItemType",
     "nsuri": "http://xbrl.sec.gov/country/2023",
     "localname": "US",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationRevenueAndLongLivedAssetsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "United States"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_UndistributedEarningsOfForeignSubsidiaries": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UndistributedEarningsOfForeignSubsidiaries",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Undistributed Earnings of Foreign Subsidiaries",
        "terseLabel": "Cash associated with indefinitely reinvested foreign earnings",
        "documentation": "Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile."
       }
      }
     },
     "auth_ref": [
      "r13",
      "r14",
      "r463",
      "r499"
     ]
    },
    "us-gaap_UnrecognizedTaxBenefits": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefits",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits",
        "periodEndLabel": "Balance at end of year",
        "periodStartLabel": "Balance at beginning of year",
        "verboseLabel": "Unrecognized tax benefits related to uncertain tax positions",
        "documentation": "Amount of unrecognized tax benefits."
       }
      }
     },
     "auth_ref": [
      "r464",
      "r474"
     ]
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Prior Period Tax Positions",
        "negatedLabel": "Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period",
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from tax positions taken in prior period tax returns."
       }
      }
     },
     "auth_ref": [
      "r475"
     ]
    },
    "us-gaap_UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits, Decrease Resulting from Settlements with Taxing Authorities",
        "negatedLabel": "Decreases in unrecognized tax benefits related to settlements with tax authorities",
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from settlements with taxing authorities."
       }
      }
     },
     "auth_ref": [
      "r477"
     ]
    },
    "us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits, Income Tax Penalties and Interest Expense",
        "terseLabel": "Interest and penalty expense recognized related to unrecognized tax benefits",
        "documentation": "Amount of expense for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return."
       }
      }
     },
     "auth_ref": [
      "r473"
     ]
    },
    "us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions",
        "terseLabel": "Increases in unrecognized tax benefits as a result of tax positions taken during the current period",
        "documentation": "Amount of increase in unrecognized tax benefits resulting from tax positions that have been or will be taken in current period tax return."
       }
      }
     },
     "auth_ref": [
      "r476"
     ]
    },
    "acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date.",
        "label": "Unrecognized Tax Benefits Recorded as Decrease in Deferred Tax Assets and Offsetting Valuation Allowance",
        "terseLabel": "Recorded as a decrease in deferred tax assets"
       }
      }
     },
     "auth_ref": []
    },
    "acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date.",
        "label": "Unrecognized Tax Benefits Recorded as Other Long Term Liability",
        "terseLabel": "Recorded as other long-term liability"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesUnrecognizedTaxBenefitsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Unrecognized Tax Benefits, Reduction Resulting from Lapse of Applicable Statute of Limitations",
        "negatedLabel": "Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitations",
        "documentation": "Amount of decrease in unrecognized tax benefits resulting from lapses of applicable statutes of limitations."
       }
      }
     },
     "auth_ref": [
      "r478"
     ]
    },
    "acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "UsGovernmentSecuritiesAndAgencyInvestmentsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information related to U.S. Government Securities and Agency Investments.",
        "label": "US Government Securities and Agency Investments [Member]",
        "terseLabel": "U.S. Government Securities and Agency Investments"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_UseOfEstimates": {
     "xbrltype": "textBlockItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "UseOfEstimates",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesPolicies"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Use of Estimates, Policy [Policy Text Block]",
        "terseLabel": "Use of Estimates",
        "documentation": "Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles."
       }
      }
     },
     "auth_ref": [
      "r53",
      "r54",
      "r55",
      "r158",
      "r159",
      "r162",
      "r163"
     ]
    },
    "us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowanceDeferredTaxAssetChangeInAmount",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesAdditionalInformationDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount",
        "terseLabel": "Increase in valuation allowance",
        "documentation": "Amount of increase (decrease) in the valuation allowance for a specified deferred tax asset."
       }
      }
     },
     "auth_ref": [
      "r481"
     ]
    },
    "us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowanceOfDeferredTaxAssetsMember",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Deferred tax valuation allowance",
        "documentation": "Valuation allowance of deferred tax asset attributable to deductible temporary difference and carryforward."
       }
      }
     },
     "auth_ref": [
      "r783",
      "r784",
      "r785",
      "r786",
      "r787"
     ]
    },
    "us-gaap_ValuationAllowancesAndReservesBalance": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowancesAndReservesBalance",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowances and Reserves, Balance",
        "periodEndLabel": "Balance at End of Period",
        "periodStartLabel": "Balance at Beginning of Period",
        "documentation": "Amount of valuation and qualifying accounts and reserves."
       }
      }
     },
     "auth_ref": [
      "r229",
      "r234"
     ]
    },
    "us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowancesAndReservesChargedToCostAndExpense",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowances and Reserves, Charged to Cost and Expense",
        "terseLabel": "Charged to Costs and Expenses",
        "documentation": "Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense."
       }
      }
     },
     "auth_ref": [
      "r232"
     ]
    },
    "us-gaap_ValuationAllowancesAndReservesDeductions": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowancesAndReservesDeductions",
     "crdr": "debit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowances and Reserves, Deductions",
        "negatedLabel": "Deductions",
        "documentation": "Amount of decrease in valuation and qualifying accounts and reserves."
       }
      }
     },
     "auth_ref": [
      "r233"
     ]
    },
    "us-gaap_ValuationAllowancesAndReservesDomain": {
     "xbrltype": "domainItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowancesAndReservesDomain",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowances and Reserves [Domain]",
        "documentation": "Valuation and qualifying accounts and reserves."
       }
      }
     },
     "auth_ref": [
      "r229",
      "r230",
      "r231",
      "r233",
      "r234"
     ]
    },
    "us-gaap_ValuationAllowancesAndReservesTypeAxis": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "ValuationAllowancesAndReservesTypeAxis",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetAdditionalInformationDetails",
      "http://www.axcelis.com/role/DisclosureScheduleIiValuationAndQualifyingAccountsDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Valuation Allowances and Reserves Type [Axis]",
        "documentation": "Information by valuation and qualifying accounts and reserves."
       }
      }
     },
     "auth_ref": [
      "r229",
      "r230",
      "r231",
      "r233",
      "r234"
     ]
    },
    "srt_ValuationAndQualifyingAccountsAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/srt/2023",
     "localname": "ValuationAndQualifyingAccountsAbstract",
     "lang": {
      "en-us": {
       "role": {
        "label": "Schedule II-Valuation and Qualifying Accounts"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "WeightedAverageNumberOfDilutedSharesOutstanding",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails": {
       "parentTag": null,
       "weight": null,
       "order": null,
       "root": true
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Diluted",
        "terseLabel": "Diluted weighted average shares of common stock",
        "totalLabel": "Weighted average shares of common stock used in computing diluted net income per share",
        "documentation": "The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period."
       }
      }
     },
     "auth_ref": [
      "r252",
      "r260"
     ]
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "WeightedAverageNumberOfSharesOutstandingAbstract",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Diluted [Abstract]",
        "terseLabel": "Shares used in computing net income per share:"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingBasic": {
     "xbrltype": "sharesItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "WeightedAverageNumberOfSharesOutstandingBasic",
     "calculation": {
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails": {
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0,
       "order": 1.0
      }
     },
     "presentation": [
      "http://www.axcelis.com/role/DisclosureSummaryOfSignificantAccountingPoliciesNetIncomePerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Basic",
        "terseLabel": "Basic weighted average shares of common stock",
        "verboseLabel": "Weighted average shares of common stock outstanding used in computing basic income per share",
        "documentation": "Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period."
       }
      }
     },
     "auth_ref": [
      "r250",
      "r260"
     ]
    },
    "acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract": {
     "xbrltype": "stringItemType",
     "nsuri": "http://www.axcelis.com/20231231",
     "localname": "WeightedAverageRemainingLeaseTermAndDiscountRateAbstract",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "n/a.",
        "label": "Weighted Average Remaining Lease Term And Discount Rate [Abstract]",
        "terseLabel": "Lease term and discount rate"
       }
      }
     },
     "auth_ref": []
    },
    "us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent": {
     "xbrltype": "monetaryItemType",
     "nsuri": "http://fasb.org/us-gaap/2023",
     "localname": "WorkersCompensationLiabilityCurrentAndNoncurrent",
     "crdr": "credit",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Workers' Compensation Liability",
        "terseLabel": "Letter of credit related to workers' compensation insurance",
        "documentation": "Carrying value as of the balance sheet date of obligations and payables pertaining to claims incurred of a workers compensation nature."
       }
      }
     },
     "auth_ref": [
      "r87",
      "r88",
      "r146"
     ]
    }
   }
  }
 },
 "std_ref": {
  "r0": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "05",
   "Paragraph": "4",
   "SubTopic": "10",
   "Topic": "360",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482338/360-10-05-4"
  },
  "r1": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "25",
   "Paragraph": "1",
   "SubTopic": "20",
   "Topic": "940",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481913/940-20-25-1"
  },
  "r2": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "SubTopic": "230",
   "Topic": "830",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481877/830-230-45-1"
  },
  "r3": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10A",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A"
  },
  "r4": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10A",
   "Subparagraph": "(a),(b),(c)",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A"
  },
  "r5": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10A",
   "Subparagraph": "(i),(j),(k)",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A"
  },
  "r6": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10A",
   "Subparagraph": "(i-k)",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-10A"
  },
  "r7": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "14",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "230",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-14"
  },
  "r8": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "15",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-15"
  },
  "r9": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "SubTopic": "10",
   "Topic": "810",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-20"
  },
  "r10": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "230",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28"
  },
  "r11": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28",
   "Subparagraph": "(b)",
   "SubTopic": "10",
   "Topic": "230",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28"
  },
  "r12": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "SubTopic": "10",
   "Topic": "360",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1"
  },
  "r13": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "SubTopic": "740",
   "Topic": "942",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481141/942-740-50-1"
  },
  "r14": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "SubTopic": "740",
   "Topic": "944",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480135/944-740-50-1"
  },
  "r15": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "11B",
   "Subparagraph": "(c)(2)",
   "SubTopic": "10",
   "Topic": "310",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481962/310-10-50-11B"
  },
  "r16": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15",
   "Subparagraph": "(e)",
   "SubTopic": "10",
   "Topic": "740",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15"
  },
  "r17": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1A",
   "Subparagraph": "(c)(3)",
   "SubTopic": "10",
   "Topic": "810",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A"
  },
  "r18": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1A",
   "Subparagraph": "(c),(3)",
   "SubTopic": "10",
   "Topic": "810",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A"
  },
  "r19": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "SubTopic": "10",
   "Topic": "505",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-2"
  },
  "r20": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)",
   "SubTopic": "10",
   "Topic": "820",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r21": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)",
   "SubTopic": "10",
   "Topic": "718",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r22": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(e)",
   "SubTopic": "10",
   "Topic": "718",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r23": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2A",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "718",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2A"
  },
  "r24": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "41",
   "Subparagraph": "a",
   "SubTopic": "10",
   "Topic": "280",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41"
  },
  "r25": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6A",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "820",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-6A"
  },
  "r26": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "15",
   "SubTopic": "10",
   "Topic": "220",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482739/220-10-55-15"
  },
  "r27": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483489/210-10-50-1"
  },
  "r28": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.19(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r29": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.19(b),22(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r30": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.19-26)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r31": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.20)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r32": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.21)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r33": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.22)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r34": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.24)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r35": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.25)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r36": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.29-31)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r37": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "210",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02.3,4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r38": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "220",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "14",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-14"
  },
  "r39": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "220",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-14A"
  },
  "r40": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "220",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-5"
  },
  "r41": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "230",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "12",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-12"
  },
  "r42": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "230",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "15",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-15"
  },
  "r43": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "230",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-4"
  },
  "r44": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "230",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-2"
  },
  "r45": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "260",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1"
  },
  "r46": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "260",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-2"
  },
  "r47": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "16",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-16"
  },
  "r48": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "18",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-18"
  },
  "r49": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "18",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-18"
  },
  "r50": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "18",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-18"
  },
  "r51": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "20",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-20"
  },
  "r52": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "21",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-21"
  },
  "r53": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-4"
  },
  "r54": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-8"
  },
  "r55": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "275",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "9",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-9"
  },
  "r56": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "280",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "40",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-40"
  },
  "r57": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "280",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "41",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41"
  },
  "r58": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "330",
   "SubTopic": "10",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SAB TOPIC 5.BB)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480581/330-10-S99-2"
  },
  "r59": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "360",
   "SubTopic": "10",
   "Section": "45",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482130/360-10-45-4"
  },
  "r60": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "360",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1"
  },
  "r61": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "360",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1"
  },
  "r62": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "470",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481544/470-10-50-5"
  },
  "r63": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "505",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-3"
  },
  "r64": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "505",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-8"
  },
  "r65": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "715",
   "SubTopic": "20",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r66": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "718",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r67": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "718",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r68": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "718",
   "SubTopic": "20",
   "Section": "55",
   "Paragraph": "12",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481089/718-20-55-12"
  },
  "r69": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "718",
   "SubTopic": "20",
   "Section": "55",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481089/718-20-55-13"
  },
  "r70": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "740",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-3"
  },
  "r71": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "740",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-3"
  },
  "r72": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "740",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-8"
  },
  "r73": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "820",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r74": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "820",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-3"
  },
  "r75": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "825",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "20",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-20"
  },
  "r76": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "825",
   "SubTopic": "10",
   "Section": "50",
   "Paragraph": "21",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-21"
  },
  "r77": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "835",
   "SubTopic": "30",
   "Section": "45",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-1A"
  },
  "r78": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "835",
   "SubTopic": "30",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-2"
  },
  "r79": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "835",
   "SubTopic": "30",
   "Section": "45",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482925/835-30-45-3"
  },
  "r80": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "835",
   "SubTopic": "30",
   "Section": "55",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482949/835-30-55-8"
  },
  "r81": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "942",
   "SubTopic": "210",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03.15(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r82": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "942",
   "SubTopic": "210",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03.17)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r83": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "942",
   "SubTopic": "470",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480848/942-470-50-3"
  },
  "r84": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "942",
   "SubTopic": "825",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480981/942-825-50-1"
  },
  "r85": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Name": "Accounting Standards Codification",
   "Topic": "985",
   "SubTopic": "20",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481283/985-20-50-1"
  },
  "r86": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "205",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//205/tableOfContent"
  },
  "r87": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(20))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r88": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(24))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r89": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(26)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r90": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(26)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r91": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(28))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r92": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(29))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r93": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(30)(a)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r94": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(30)(a)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r95": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(30))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r96": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(31))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r97": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(32))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r98": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r99": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r100": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(c))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r101": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "11",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-11"
  },
  "r102": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r103": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(10))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r104": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r105": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r106": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.1,2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r107": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.2(a),(d))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r108": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r109": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r110": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.7(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r111": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.7)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r112": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03.9)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r113": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "12",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-12"
  },
  "r114": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-13"
  },
  "r115": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "13",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-13"
  },
  "r116": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "24",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-24"
  },
  "r117": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "25",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-25"
  },
  "r118": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28"
  },
  "r119": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "235",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//235/tableOfContent"
  },
  "r120": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SAB Topic 4.E)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480418/310-10-S99-2"
  },
  "r121": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "330",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SAB Topic 5.BB)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480581/330-10-S99-2"
  },
  "r122": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "360",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//360/tableOfContent"
  },
  "r123": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "360",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-1"
  },
  "r124": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "360",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-2"
  },
  "r125": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "360",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SAB Topic 5.CC)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480091/360-10-S99-2"
  },
  "r126": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "440",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//440/tableOfContent"
  },
  "r127": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "470",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//470/tableOfContent"
  },
  "r128": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "505",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//505/tableOfContent"
  },
  "r129": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-6"
  },
  "r130": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-7"
  },
  "r131": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.3-04)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480008/505-10-S99-1"
  },
  "r132": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r133": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "718",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Section": "50",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r134": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "718",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Section": "50",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r135": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Section": "50",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-12"
  },
  "r136": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Section": "50",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r137": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Section": "50",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r138": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r139": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "810",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//810/tableOfContent"
  },
  "r140": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "19",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-19"
  },
  "r141": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "825",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "21",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-21"
  },
  "r142": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(1)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r143": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(11))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r144": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(15)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r145": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(15)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r146": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(15)(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r147": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(15))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r148": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(23))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r149": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r150": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-03(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479853/942-210-S99-1"
  },
  "r151": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04(15))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r152": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04.11)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r153": {
   "role": "http://fasb.org/us-gaap/role/ref/legacyRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04.9)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r154": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "SubTopic": "20",
   "Topic": "740",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482659/740-20-45-2"
  },
  "r155": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "SubTopic": "210",
   "Topic": "954",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480632/954-210-45-5"
  },
  "r156": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "6",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "270",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482989/270-10-45-6"
  },
  "r157": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "SubTopic": "10",
   "Topic": "810",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1"
  },
  "r158": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-1"
  },
  "r159": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-1"
  },
  "r160": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-1"
  },
  "r161": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)",
   "SubTopic": "360",
   "Topic": "958",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480321/958-360-50-1"
  },
  "r162": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "11",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-11"
  },
  "r163": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-12"
  },
  "r164": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "SubTopic": "360",
   "Topic": "958",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480321/958-360-50-6"
  },
  "r165": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "SubTopic": "360",
   "Topic": "958",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480321/958-360-50-7"
  },
  "r166": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(b)",
   "SubTopic": "10",
   "Topic": "740",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r167": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(h))",
   "SubTopic": "10",
   "Topic": "235",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r168": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Accounting Standards Codification",
   "Topic": "606",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//606/tableOfContent"
  },
  "r169": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "09",
   "Publisher": "SEC"
  },
  "r170": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Footnote": "2",
   "Publisher": "SEC"
  },
  "r171": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column B",
   "Publisher": "SEC"
  },
  "r172": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column C",
   "Publisher": "SEC"
  },
  "r173": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column D",
   "Publisher": "SEC"
  },
  "r174": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column E",
   "Publisher": "SEC"
  },
  "r175": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column F",
   "Publisher": "SEC"
  },
  "r176": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column G",
   "Publisher": "SEC"
  },
  "r177": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column H",
   "Publisher": "SEC"
  },
  "r178": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "28",
   "Paragraph": "Column I",
   "Publisher": "SEC"
  },
  "r179": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "12",
   "Subsection": "29",
   "Footnote": "4",
   "Publisher": "SEC"
  },
  "r180": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "4",
   "Subsection": "08",
   "Paragraph": "(m)",
   "Subparagraph": "(1)(iii)",
   "Publisher": "SEC"
  },
  "r181": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "105",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479343/105-10-65-6"
  },
  "r182": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "205",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483499/205-20-50-7"
  },
  "r183": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1"
  },
  "r184": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-5"
  },
  "r185": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483489/210-10-50-1"
  },
  "r186": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r187": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(13))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r188": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(14))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r189": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(17))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r190": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(18))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r191": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(3)(a)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r192": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(30)(a)(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r193": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r194": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r195": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r196": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(9))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r197": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "17A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-17A"
  },
  "r198": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1A",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A"
  },
  "r199": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1A",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A"
  },
  "r200": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1A",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1A"
  },
  "r201": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1B",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1B"
  },
  "r202": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1B",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482790/220-10-45-1B"
  },
  "r203": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-1"
  },
  "r204": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-4"
  },
  "r205": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-5"
  },
  "r206": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-6"
  },
  "r207": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(210.5-03(11))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r208": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r209": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(21))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r210": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(24))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r211": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(25))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r212": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.5-03(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-2"
  },
  "r213": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "5",
   "Subparagraph": "(SAB Topic 6.B)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483621/220-10-S99-5"
  },
  "r214": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "17",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-17"
  },
  "r215": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-2"
  },
  "r216": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "24",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-24"
  },
  "r217": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "25",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-25"
  },
  "r218": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-2"
  },
  "r219": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482913/230-10-50-8"
  },
  "r220": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-1"
  },
  "r221": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(c))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r222": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(e)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r223": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r224": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(h)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r225": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(h)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r226": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(m)(1)(iii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r227": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(m)(2)(ii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r228": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-04(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-3"
  },
  "r229": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column B))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r230": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column C(1)))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r231": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column C(2)))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r232": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column C)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r233": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column D))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r234": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column E))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r235": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r236": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "23",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-23"
  },
  "r237": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "24",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-24"
  },
  "r238": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-5"
  },
  "r239": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-1"
  },
  "r240": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-1"
  },
  "r241": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "11",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-11"
  },
  "r242": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "11",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-11"
  },
  "r243": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-3"
  },
  "r244": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-4"
  },
  "r245": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-7"
  },
  "r246": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-7"
  },
  "r247": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-8"
  },
  "r248": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-9"
  },
  "r249": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "5",
   "Subparagraph": "(SAB Topic 11.M.Q2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480530/250-10-S99-5"
  },
  "r250": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-10"
  },
  "r251": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "11",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-11"
  },
  "r252": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "16",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-16"
  },
  "r253": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-2"
  },
  "r254": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "22",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-22"
  },
  "r255": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "23",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-23"
  },
  "r256": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-28A"
  },
  "r257": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "60B",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-60B"
  },
  "r258": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "60B",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-60B"
  },
  "r259": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "7",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482689/260-10-45-7"
  },
  "r260": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1"
  },
  "r261": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1"
  },
  "r262": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "15",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482635/260-10-55-15"
  },
  "r263": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "272",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483014/272-10-45-1"
  },
  "r264": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//280/tableOfContent"
  },
  "r265": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-15"
  },
  "r266": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "21",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-21"
  },
  "r267": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "21",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-21"
  },
  "r268": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r269": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r270": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r271": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r272": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r273": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r274": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "22",
   "Subparagraph": "(h)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-22"
  },
  "r275": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "26",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-26"
  },
  "r276": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "30",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30"
  },
  "r277": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "30",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30"
  },
  "r278": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "30",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30"
  },
  "r279": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "31",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-31"
  },
  "r280": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r281": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r282": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r283": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r284": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r285": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "32",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-32"
  },
  "r286": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "34",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-34"
  },
  "r287": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "40",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-40"
  },
  "r288": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "41",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41"
  },
  "r289": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "41",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41"
  },
  "r290": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "41",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-41"
  },
  "r291": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "42",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-42"
  },
  "r292": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481990/310-10-45-2"
  },
  "r293": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "9",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481990/310-10-45-9"
  },
  "r294": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481962/310-10-50-4"
  },
  "r295": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "323",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481687/323-10-50-3"
  },
  "r296": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "326",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "4",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479654/326-10-65-4"
  },
  "r297": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "326",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "5",
   "Subparagraph": "(c)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479654/326-10-65-5"
  },
  "r298": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "326",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479344/326-20-45-1"
  },
  "r299": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "326",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-13"
  },
  "r300": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "326",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-13"
  },
  "r301": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "330",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//330/tableOfContent"
  },
  "r302": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "330",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483080/330-10-50-1"
  },
  "r303": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "330",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483080/330-10-50-4"
  },
  "r304": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "360",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482099/360-10-50-3"
  },
  "r305": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "420",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482017/420-10-50-1"
  },
  "r306": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "440",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482648/440-10-50-4"
  },
  "r307": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "440",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482648/440-10-50-4"
  },
  "r308": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-4"
  },
  "r309": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-9"
  },
  "r310": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 5.Y.Q2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1"
  },
  "r311": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 5.Y.Q4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1"
  },
  "r312": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r313": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r314": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)(4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r315": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)(5)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r316": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r317": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r318": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-4"
  },
  "r319": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r320": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r321": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r322": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r323": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r324": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(5)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r325": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(4)(i))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r326": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii)(A))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r327": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(4)(iv))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r328": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r329": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1B",
   "Subparagraph": "(SX 210.13-02(a)(4)(i))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B"
  },
  "r330": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1B",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(A))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B"
  },
  "r331": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1B",
   "Subparagraph": "(SX 210.13-02(a)(4)(iii)(B))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B"
  },
  "r332": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1B",
   "Subparagraph": "(SX 210.13-02(a)(4)(iv))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B"
  },
  "r333": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1B",
   "Subparagraph": "(SX 210.13-02(a)(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1B"
  },
  "r334": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r335": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r336": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r337": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r338": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r339": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r340": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(g)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r341": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(h)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r342": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r343": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1C",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1C"
  },
  "r344": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1C",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1C"
  },
  "r345": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1C",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1C"
  },
  "r346": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1D",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D"
  },
  "r347": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1D",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D"
  },
  "r348": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1D",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1D"
  },
  "r349": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1E",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E"
  },
  "r350": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1E",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E"
  },
  "r351": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1E",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E"
  },
  "r352": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1E",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1E"
  },
  "r353": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1F",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F"
  },
  "r354": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1F",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F"
  },
  "r355": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1F",
   "Subparagraph": "(b)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F"
  },
  "r356": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1F",
   "Subparagraph": "(b)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1F"
  },
  "r357": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1I",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1I"
  },
  "r358": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1I",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1I"
  },
  "r359": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1I",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1I"
  },
  "r360": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1I",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1I"
  },
  "r361": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r362": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r363": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r364": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(g)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r365": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(h)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r366": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r367": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "14",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14"
  },
  "r368": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "14",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14"
  },
  "r369": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "14",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-14"
  },
  "r370": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "16",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-16"
  },
  "r371": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "18",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18"
  },
  "r372": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "18",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18"
  },
  "r373": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "18",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-18"
  },
  "r374": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.3-04)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480008/505-10-S99-1"
  },
  "r375": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479837/606-10-45-1"
  },
  "r376": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479837/606-10-45-2"
  },
  "r377": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-10"
  },
  "r378": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-12"
  },
  "r379": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-12"
  },
  "r380": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-12"
  },
  "r381": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-12"
  },
  "r382": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-12"
  },
  "r383": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(b)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-13"
  },
  "r384": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-15"
  },
  "r385": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-4"
  },
  "r386": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-5"
  },
  "r387": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-8"
  },
  "r388": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-8"
  },
  "r389": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-9"
  },
  "r390": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//715/tableOfContent"
  },
  "r391": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480535/715-20-45-2"
  },
  "r392": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480535/715-20-45-3"
  },
  "r393": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r394": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r395": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r396": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r397": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(02)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r398": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(02)(A)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r399": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(02)(B)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r400": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(02)(C)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r401": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r402": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(l)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r403": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(o)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r404": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(p)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r405": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(q)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r406": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(r)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r407": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(r)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r408": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480126/715-20-S99-2"
  },
  "r409": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "60",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480266/715-60-50-3"
  },
  "r410": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "70",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480794/715-70-50-1"
  },
  "r411": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "80",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480576/715-80-50-5"
  },
  "r412": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "715",
   "SubTopic": "80",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Subparagraph": "(f)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480576/715-80-50-5"
  },
  "r413": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//718/tableOfContent"
  },
  "r414": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "35",
   "Paragraph": "1D",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-1D"
  },
  "r415": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "35",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-2"
  },
  "r416": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "35",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480483/718-10-35-3"
  },
  "r417": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480454/718-10-45-1"
  },
  "r418": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r419": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r420": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r421": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r422": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r423": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r424": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r425": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r426": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r427": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r428": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r429": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r430": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r431": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r432": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r433": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r434": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r435": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r436": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r437": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r438": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r439": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(e)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r440": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(e)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r441": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r442": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r443": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r444": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r445": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r446": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(iv)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r447": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(v)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r448": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(h)(1)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r449": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(h)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r450": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(h)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r451": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r452": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(l)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r453": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "15",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15"
  },
  "r454": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "15",
   "Subparagraph": "(f)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15"
  },
  "r455": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "15",
   "Subparagraph": "(f)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480336/718-10-65-15"
  },
  "r456": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 14.C.Q3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1"
  },
  "r457": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 14.D.1.Q5)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1"
  },
  "r458": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 14.D.2.Q6)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1"
  },
  "r459": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 14.D.3.Q2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1"
  },
  "r460": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 14.F)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479830/718-10-S99-1"
  },
  "r461": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "730",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482916/730-10-50-1"
  },
  "r462": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//740/tableOfContent"
  },
  "r463": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "25",
   "Paragraph": "3",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482620/740-10-25-3"
  },
  "r464": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "10B",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-10B"
  },
  "r465": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "15",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-15"
  },
  "r466": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "25",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-25"
  },
  "r467": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-28"
  },
  "r468": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-4"
  },
  "r469": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482525/740-10-45-6"
  },
  "r470": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-10"
  },
  "r471": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-12"
  },
  "r472": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "14",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-14"
  },
  "r473": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15"
  },
  "r474": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r475": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r476": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r477": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r478": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Subparagraph": "(a)(4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r479": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "17",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-17"
  },
  "r480": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "19",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-19"
  },
  "r481": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r482": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r483": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r484": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r485": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "20",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-20"
  },
  "r486": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "21",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-21"
  },
  "r487": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r488": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r489": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "8",
   "Subparagraph": "(d)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482615/740-10-65-8"
  },
  "r490": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "8",
   "Subparagraph": "(d)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482615/740-10-65-8"
  },
  "r491": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB TOPIC 6.I.5.Q1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r492": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB TOPIC 6.I.7)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r493": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 6.I.Fact.1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r494": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 6.I.Fact.2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r495": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 6.I.Fact.3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r496": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SAB Topic 11.C)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-2"
  },
  "r497": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "270",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482526/740-270-50-1"
  },
  "r498": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482603/740-30-50-2"
  },
  "r499": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "740",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482603/740-30-50-2"
  },
  "r500": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "19",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-19"
  },
  "r501": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "25",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-25"
  },
  "r502": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "25",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481231/810-10-45-25"
  },
  "r503": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1A",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A"
  },
  "r504": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1A",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-1A"
  },
  "r505": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(bb)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-3"
  },
  "r506": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481203/810-10-50-3"
  },
  "r507": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r508": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(h)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r509": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(h)(1)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r510": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(h)(1)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r511": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(h)(1)(iv)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r512": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "6",
   "Subparagraph": "(i)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480528/815-20-65-6"
  },
  "r513": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480237/815-40-50-6"
  },
  "r514": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "1",
   "Subparagraph": "(e)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1"
  },
  "r515": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "1",
   "Subparagraph": "(e)(4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1"
  },
  "r516": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "815",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "1",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1"
  },
  "r517": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r518": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r519": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r520": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(bbb)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r521": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(bbb)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-2"
  },
  "r522": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-3"
  },
  "r523": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "820",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482106/820-10-50-6A"
  },
  "r524": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "825",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482736/825-10-45-2"
  },
  "r525": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "825",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-10"
  },
  "r526": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "825",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "28",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-28"
  },
  "r527": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//830/tableOfContent"
  },
  "r528": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "17",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481839/830-10-45-17"
  },
  "r529": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "35",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482014/830-20-35-1"
  },
  "r530": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481956/830-20-45-1"
  },
  "r531": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481926/830-20-50-1"
  },
  "r532": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "17",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-17"
  },
  "r533": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r534": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r535": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r536": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r537": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r538": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481674/830-30-50-1"
  },
  "r539": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "835",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483013/835-20-50-1"
  },
  "r540": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "835",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482900/835-30-50-1"
  },
  "r541": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-1"
  },
  "r542": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-1"
  },
  "r543": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-2"
  },
  "r544": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-4"
  },
  "r545": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-5"
  },
  "r546": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-5"
  },
  "r547": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479041/842-20-45-5"
  },
  "r548": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-3"
  },
  "r549": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-3"
  },
  "r550": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r551": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r552": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r553": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(g)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r554": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(g)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r555": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(g)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r556": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(g)(4)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r557": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-6"
  },
  "r558": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "848",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(a)(3)(iii)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483550/848-10-65-2"
  },
  "r559": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "850",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483326/850-10-50-3"
  },
  "r560": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(bb)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r561": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(bb)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r562": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(bb)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r563": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r564": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "910",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482546/910-10-50-6"
  },
  "r565": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "912",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "11",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482312/912-310-45-11"
  },
  "r566": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "912",
   "SubTopic": "330",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482105/912-330-50-1"
  },
  "r567": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "924",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 11.L)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479941/924-10-S99-1"
  },
  "r568": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04(23))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r569": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04(26))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r570": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "942",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-04(27))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483589/942-220-S99-1"
  },
  "r571": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "942",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.9-05(b)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479557/942-235-S99-1"
  },
  "r572": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "942",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480842/942-360-50-1"
  },
  "r573": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(12))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r574": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(19))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r575": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r576": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r577": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r578": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(25))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r579": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(8)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r580": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(8)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r581": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(8))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r582": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(11))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r583": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(16))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r584": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(19))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r585": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(22))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r586": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(23))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r587": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-04(9))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483586/944-220-S99-1"
  },
  "r588": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column A))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r589": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column B))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r590": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column C))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r591": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column D))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r592": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column E))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r593": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-17(Column F))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480149/944-235-S99-2"
  },
  "r594": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7A",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480081/944-40-50-7A"
  },
  "r595": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r596": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(f)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r597": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r598": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(g)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r599": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(g)(2)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r600": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "2",
   "Subparagraph": "(h)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480016/944-40-65-2"
  },
  "r601": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "944",
   "SubTopic": "825",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479383/944-825-50-1B"
  },
  "r602": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480424/946-10-50-1"
  },
  "r603": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480424/946-10-50-2"
  },
  "r604": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-03(d))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479886/946-10-S99-3"
  },
  "r605": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-03(h)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479886/946-10-S99-3"
  },
  "r606": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-03(i)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479886/946-10-S99-3"
  },
  "r607": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "11",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480990/946-20-50-11"
  },
  "r608": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480990/946-20-50-13"
  },
  "r609": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "205",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "3",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-3"
  },
  "r610": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "205",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-4"
  },
  "r611": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480555/946-210-45-4"
  },
  "r612": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-1"
  },
  "r613": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-2"
  },
  "r614": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6"
  },
  "r615": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6"
  },
  "r616": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6"
  },
  "r617": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r618": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(12)(b)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r619": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(12)(b)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r620": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(12)(b)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r621": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(13)(a)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r622": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(13)(a)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r623": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(14))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r624": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(15))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r625": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(16)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r626": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(17))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r627": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(19))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r628": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(2)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r629": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(2)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r630": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(3)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r631": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(3)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r632": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(3)(c))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r633": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(6)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r634": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(6)(c))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r635": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(6)(d))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r636": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(6)(e))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r637": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(8))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r638": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(9)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r639": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(9)(c))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r640": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(9)(d))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r641": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(9)(e))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r642": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.6-05(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-2"
  },
  "r643": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.6-05(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-2"
  },
  "r644": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "3",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-3"
  },
  "r645": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "6",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-6"
  },
  "r646": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "7",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-7"
  },
  "r647": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r648": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(2)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r649": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(2)(g)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r650": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r651": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r652": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r653": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r654": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r655": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(6))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r656": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a)(7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r657": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r658": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r659": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r660": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r661": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(6))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r662": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(c)(7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r663": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r664": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(9))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r665": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(1)(d))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r666": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(4)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r667": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(6))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r668": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r669": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481062/946-235-50-2"
  },
  "r670": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "235",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481062/946-235-50-2"
  },
  "r671": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1"
  },
  "r672": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-12(Column C)(Footnote 5))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1"
  },
  "r673": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2"
  },
  "r674": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-12A(Column C)(Footnote 4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2"
  },
  "r675": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 4)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3"
  },
  "r676": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 4)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3"
  },
  "r677": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-12B(Column C)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3"
  },
  "r678": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "6",
   "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6"
  },
  "r679": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "6",
   "Subparagraph": "(SX 210.12-14(Column F)(Footnote 7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6"
  },
  "r680": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "505",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481004/946-505-50-2"
  },
  "r681": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "946",
   "SubTopic": "505",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481004/946-505-50-6"
  },
  "r682": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "948",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-29(Footnote 4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479851/948-310-S99-1"
  },
  "r683": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "954",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481027/954-310-50-2"
  },
  "r684": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "954",
   "SubTopic": "440",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480327/954-440-50-1"
  },
  "r685": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column B))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r686": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column C))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r687": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column D))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r688": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column E))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r689": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column F))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r690": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column G))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r691": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column H))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r692": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Column I))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r693": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "970",
   "SubTopic": "360",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-28(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479438/970-360-S99-1"
  },
  "r694": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "976",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482856/976-310-50-1"
  },
  "r695": {
   "role": "http://www.xbrl.org/2003/role/disclosureRef",
   "Topic": "978",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482707/978-310-50-1"
  },
  "r696": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(e)",
   "SubTopic": "10",
   "Topic": "235",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-4"
  },
  "r697": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "13H",
   "Subparagraph": "(a)",
   "SubTopic": "40",
   "Topic": "944",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-13H"
  },
  "r698": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "13H",
   "Subparagraph": "(b)",
   "SubTopic": "40",
   "Topic": "944",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-13H"
  },
  "r699": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1"
  },
  "r700": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1"
  },
  "r701": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1"
  },
  "r702": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(g)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483467/210-10-45-1"
  },
  "r703": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(a)(1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r704": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(a)(3))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r705": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(a)(4))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r706": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "16",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483444/210-20-55-16"
  },
  "r707": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "21",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483444/210-20-55-21"
  },
  "r708": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "210",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "22",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483444/210-20-55-22"
  },
  "r709": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-4"
  },
  "r710": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483426/235-10-50-4"
  },
  "r711": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "52",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482635/260-10-55-52"
  },
  "r712": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "30",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-30"
  },
  "r713": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "31",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-31"
  },
  "r714": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "12A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481933/310-10-55-12A"
  },
  "r715": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "340",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "05",
   "Paragraph": "5",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482955/340-10-05-5"
  },
  "r716": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r717": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "69B",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69B"
  },
  "r718": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "69C",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69C"
  },
  "r719": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "69E",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69E"
  },
  "r720": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "69F",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481568/470-20-55-69F"
  },
  "r721": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "505",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481112/505-10-50-13"
  },
  "r722": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r723": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r724": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r725": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r726": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(e)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r727": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r728": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "91",
   "Subparagraph": "(g)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479777/606-10-55-91"
  },
  "r729": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r730": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(d)(iv)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480506/715-20-50-1"
  },
  "r731": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "715",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "17",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480482/715-20-55-17"
  },
  "r732": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "715",
   "SubTopic": "80",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "8",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480547/715-80-55-8"
  },
  "r733": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r734": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r735": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r736": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "217",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482663/740-10-55-217"
  },
  "r737": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "4J",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481175/810-10-55-4J"
  },
  "r738": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "810",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "4K",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481175/810-10-55-4K"
  },
  "r739": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "53",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479589/842-20-55-53"
  },
  "r740": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "852",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481372/852-10-55-10"
  },
  "r741": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "944",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479401/944-30-55-2"
  },
  "r742": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "29F",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-29F"
  },
  "r743": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(b)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-1"
  },
  "r744": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480524/946-210-50-6"
  },
  "r745": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480493/946-210-55-1"
  },
  "r746": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "310",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480833/946-310-45-1"
  },
  "r747": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2)(i))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1"
  },
  "r748": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2"
  },
  "r749": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 1)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3"
  },
  "r750": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "6",
   "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6"
  },
  "r751": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "830",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-10"
  },
  "r752": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "830",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "11",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-11"
  },
  "r753": {
   "role": "http://www.xbrl.org/2003/role/exampleRef",
   "Topic": "946",
   "SubTopic": "830",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "12",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480167/946-830-55-12"
  },
  "r754": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "b"
  },
  "r755": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "b-2"
  },
  "r756": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Exchange Act",
   "Number": "240",
   "Section": "12",
   "Subsection": "d1-1"
  },
  "r757": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Form 10-K",
   "Number": "249",
   "Section": "310"
  },
  "r758": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Form 20-F",
   "Number": "249",
   "Section": "220",
   "Subsection": "f"
  },
  "r759": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Form 40-F",
   "Number": "249",
   "Section": "240",
   "Subsection": "f"
  },
  "r760": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Forms 10-K, 10-Q, 20-F",
   "Number": "240",
   "Section": "13",
   "Subsection": "a-1"
  },
  "r761": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Regulation S-K",
   "Number": "229",
   "Section": "402",
   "Subsection": "w"
  },
  "r762": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Regulation S-T",
   "Number": "232",
   "Section": "405"
  },
  "r763": {
   "role": "http://www.xbrl.org/2003/role/presentationRef",
   "Publisher": "SEC",
   "Name": "Securities Act",
   "Number": "230",
   "Section": "405"
  },
  "r764": {
   "role": "http://www.xbrl.org/2003/role/recommendedDisclosureRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-10"
  },
  "r765": {
   "role": "http://www.xbrl.org/2003/role/recommendedDisclosureRef",
   "Topic": "855",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483399/855-10-50-3"
  },
  "r766": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "18",
   "SubTopic": "10",
   "Topic": "275",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482861/275-10-50-18"
  },
  "r767": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "SubTopic": "825",
   "Topic": "944",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479383/944-825-50-1B"
  },
  "r768": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4H",
   "SubTopic": "40",
   "Topic": "944",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480081/944-40-50-4H"
  },
  "r769": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(a)",
   "SubTopic": "10",
   "Topic": "740",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r770": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Name": "Regulation S-X (SX)",
   "Number": "210",
   "Section": "11",
   "Subsection": "03",
   "Publisher": "SEC"
  },
  "r771": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(17))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r772": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r773": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(6))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r774": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(8))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r775": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "210",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.5-02(9))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480566/210-10-S99-1"
  },
  "r776": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-4"
  },
  "r777": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-5"
  },
  "r778": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "220",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482765/220-10-50-6"
  },
  "r779": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "230",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "28",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482740/230-10-45-28"
  },
  "r780": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(f))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r781": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r782": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.4-08(h)(1)(Note 1))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-1"
  },
  "r783": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column B))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r784": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column C(1)))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r785": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column C(2)))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r786": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column D))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r787": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "235",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "4",
   "Subparagraph": "(SX 210.12-09(Column E))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480678/235-10-S99-4"
  },
  "r788": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "23",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-23"
  },
  "r789": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "24",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-24"
  },
  "r790": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "5",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483421/250-10-45-5"
  },
  "r791": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "250",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483443/250-10-50-4"
  },
  "r792": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "260",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482662/260-10-50-1"
  },
  "r793": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "280",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "18",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482810/280-10-50-18"
  },
  "r794": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//310-10/tableOfContent"
  },
  "r795": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "310",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481990/310-10-45-13"
  },
  "r796": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "323",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481687/323-10-50-3"
  },
  "r797": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "326",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "13",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479319/326-20-50-13"
  },
  "r798": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "340",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483032/340-10-45-1"
  },
  "r799": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "410",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481931/410-30-50-10"
  },
  "r800": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "450",
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//450/tableOfContent"
  },
  "r801": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483076/450-20-50-9"
  },
  "r802": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "450",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 5.Y.Q2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480102/450-20-S99-1"
  },
  "r803": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r804": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "460",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "8",
   "Subparagraph": "(c)(5)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482425/460-10-50-8"
  },
  "r805": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(4)(ii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r806": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "470",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1A",
   "Subparagraph": "(SX 210.13-01(a)(4)(iii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480097/470-10-S99-1A"
  },
  "r807": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "470",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1B",
   "Subparagraph": "(d)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481139/470-20-50-1B"
  },
  "r808": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "10",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-10"
  },
  "r809": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "606",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "5",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479806/606-10-50-5"
  },
  "r810": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r811": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r812": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r813": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r814": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r815": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r816": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r817": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r818": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(02)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r819": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r820": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(1)(iv)(04)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r821": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r822": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r823": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r824": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(01)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r825": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(02)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r826": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(c)(2)(iii)(03)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r827": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r828": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(d)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r829": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(e)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r830": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(e)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r831": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r832": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(ii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r833": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(iii)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r834": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(iv)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r835": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(f)(2)(v)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r836": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "718",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480429/718-10-50-2"
  },
  "r837": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "12",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-12"
  },
  "r838": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "15A",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-15A"
  },
  "r839": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-2"
  },
  "r840": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "6",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-6"
  },
  "r841": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "9",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482685/740-10-50-9"
  },
  "r842": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "740",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479360/740-10-S99-1"
  },
  "r843": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "815",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "65",
   "Paragraph": "1",
   "Subparagraph": "(e)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480175/815-40-65-1"
  },
  "r844": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "825",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "28",
   "Subparagraph": "(f)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482907/825-10-50-28"
  },
  "r845": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "830",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481956/830-20-45-1"
  },
  "r846": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "830",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481926/830-20-50-1"
  },
  "r847": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "830",
   "SubTopic": "230",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481877/830-230-45-1"
  },
  "r848": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "20",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481694/830-30-45-20"
  },
  "r849": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "830",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481674/830-30-50-1"
  },
  "r850": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(a)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-3"
  },
  "r851": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "842",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147478964/842-20-50-4"
  },
  "r852": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "850",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483326/850-10-50-2"
  },
  "r853": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "852",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481404/852-10-50-7"
  },
  "r854": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "852",
   "SubTopic": "10",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "7",
   "Subparagraph": "(b)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481404/852-10-50-7"
  },
  "r855": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r856": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r857": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "3",
   "Subparagraph": "(c)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-3"
  },
  "r858": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(b)(1)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4"
  },
  "r859": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(b)(2)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4"
  },
  "r860": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "860",
   "SubTopic": "20",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "4",
   "Subparagraph": "(b)(3)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147481326/860-20-50-4"
  },
  "r861": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "912",
   "SubTopic": "730",
   "Name": "Accounting Standards Codification",
   "Section": "25",
   "Paragraph": "1",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147482517/912-730-25-1"
  },
  "r862": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "944",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.7-03(a)(15)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479440/944-210-S99-1"
  },
  "r863": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "944",
   "SubTopic": "30",
   "Name": "Accounting Standards Codification",
   "Section": "50",
   "Paragraph": "2B",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479432/944-30-50-2B"
  },
  "r864": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "944",
   "SubTopic": "40",
   "Name": "Accounting Standards Codification",
   "Section": "55",
   "Paragraph": "13H",
   "Subparagraph": "(c)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480046/944-40-55-13H"
  },
  "r865": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "205",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "4",
   "Subparagraph": "(a)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480767/946-205-45-4"
  },
  "r866": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "210",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-04(18))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147479617/946-210-S99-1"
  },
  "r867": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "45",
   "Paragraph": "3",
   "Subparagraph": "(i)",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483581/946-220-45-3"
  },
  "r868": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.6-07(7)(a))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-1"
  },
  "r869": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(4)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r870": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "220",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.6-09(7))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147483575/946-220-S99-3"
  },
  "r871": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "1",
   "Subparagraph": "(SX 210.12-12(Column A)(Footnote 2)(ii))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-1"
  },
  "r872": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "2",
   "Subparagraph": "(SX 210.12-12A(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-2"
  },
  "r873": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "3",
   "Subparagraph": "(SX 210.12-12B(Column A)(Footnote 1)(b))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-3"
  },
  "r874": {
   "role": "http://www.xbrl.org/2009/role/commonPracticeRef",
   "Topic": "946",
   "SubTopic": "320",
   "Name": "Accounting Standards Codification",
   "Section": "S99",
   "Paragraph": "6",
   "Subparagraph": "(SX 210.12-14(Column A)(Footnote 2))",
   "Publisher": "FASB",
   "URI": "https://asc.fasb.org//1943274/2147480032/946-320-S99-6"
  }
 }
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>102
<FILENAME>0001558370-24-001969-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001558370-24-001969-xbrl.zip
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MNF >4PV!T?'@P)I8"4/X(^)I 5-+<[60K:7Y6A'CGZ=Y=KF" IC Y]XOZC=
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M2EAZJKE=,FL9Z*KBG?_>\INV_WY%8+F8]P1(14^?;1.26[)5RTGE2J"*.5U
M8_%)9^:IC _^QQ?*;2:H(A(/*R*_4$Y_ SW'B2?I 7]LN6FI1T)I+/==R+EN
M1/CSC 4/U,M55A1:8Z 98(LRUZ;AE6G1CDA<^533FA"GM8W!<+"D_ ]2MKB:
MN;N\=:_9"QM<E9@KNE>GZ0+$W]ARY6[C 8$ZD7=84</J20>H:%<@/Z@F"1?M
M]UL8G-;BGO(G9E/US(R_)2XNB@KM;9]U@.U7-X:%RB?:M+YMQD&U/6Y%=!3V
M0%ZTY7#-R"-S&=8<:B'$)QA;U-FFC'IJNRR&_KOV/2H)W_;HOWH))J.D1_V>
M/+2=/C)I;'A%%"'>0L@=#"Q5^&* )T[I41.WD1"Z9_\V K'5F58_B5Q0&R_R
MHE=>005 X>>+!?S"\_'$%2DZ5FLLM5Y%#$VRS:SYPL#2-,.@!I1P319.>,JW
M\S;@]@JPQ!57R4*E >UWLRXA6^Z[[@7%N0*RB%,!]@V:;&1)YXO83+@'G>+;
MG:Q(6I:8UZ6-)NX@[@5QQ;>6-XP3%+5%&Y'S)\J_K)B]2G/Y^((_Z94X7?M<
MXGBT"[%W++B743LPT6^TNBV77&W17N$%6)Y@MGI#HF08>/62OI=!)&SO%PJK
M#%A;G()R05^^HSCH0Z/456,X7Q 7+8Y7D'3KDK\7R<?OJ<#,'*RU,&!*7E"&
ML_,=Z-XNI-RDE$$.T]4+XF&O?^-JPGHEJJFNZ'QQYJO1_(*!O2K]>.M+-[@%
M?:E)NK/V=T'KCBX#F/.K0:LB&"9VA64"_(B^A5-MIA]Z3K3HB!J83FZPV-T=
M_X&MC,-!$JUQ/>#K7>OB.5$5Q: 4)-Y4+ ]SAV74(G#QYB8= _! 7^29"PW;
MRVQ7MLZ<EX&,DOZDYES5R<8=E0PG]'B42 X[]/&&5HW7/%QI7(7A6=<5U]!>
MPT>L6%IL]:0#L[(:O J!CM4JA&);UNVZ,AAHUXLFB]C7,9PUPFE"Z75Q-PM_
MV*EXSLQ<UYU5KSFF7!KYB:6;32(HX?;J@CY1UX\>PE+H0RNU.WZ)G=(\TZ"F
MID334]$.%W[P*&%6B2(4\ 2!@N'OB:SMV3+/D.S/Y+ARI<YA[ZCJY#B2+UPP
MFZ_]9W5FZ0LYYS>$?Z52K8>BIK?/]KH65M+6UH</.'Q#E96.7A);'0W<XG80
M/LUU^D28&YX7@*D!+;T/-NA'- \DVG0.7HY')71V$?&(1/0*?(>VJ9XL+A<+
M0#^>$Z#/XQH9CQ(\;'AD;SMZ"Q2:$)GKBC7\P31\N!$7) ;_[MD.5@LOZ,87
M3*H.!=@_^-I=0)QB^U-G70WH!JLE9>LW#57FXL=["2"KBV5MXIK6?@WR#FQ=
MEUC@1,78J2BH,V)_S4XLE:F#G$+.8-+G[C9:HLV?/<JO73O;I#JB0;8,(];P
M7UQM/@$FT;R.IKT-\QZF)5NLX<S8+H]!07LN(%ZQS2E+OWFCTYEJT&Z_7'C-
MQN:V%5JT.)]S*,V^@:%OJ\VSR\!SQ&?QJP_=TT.J>VH'7/F/8 PP7NJ_Q8>G
MA+[O/]NI=\!GD/T>1JDG)H *#/N/+S85RN'A4?@NE?$+7_&4W)AZL,9'Y"J5
MFX7R7P>)E5II:QW,K<Y*$@;9@K0S0+C9]GGC>_<KO<,Y7SSX?FP'-26N:6G;
MPRI3TPI;->:VXF%\NNH7U 4+'R\4N24<;U6*&UI/^>T<4NO0NT+3T'7#_$;L
M<J0#12Z\L>.2^^N/+]K_*?9H3K]MJ=ZS+)\S^[$8RN09*>9GM6TN%@P/GR3%
M56C*85J%-L/P.W]TV5(O0O.:W87! !0^JJO1@[R.: #M"-^X_A?>S*96E*G-
M+!O-&*Q@I)^17P7N;!6WNR/UWAW#H2A[\PBF@CBZ91U*PU,5#1^VP<RG+RSN
MQD:*_LLZ1YXX;(TG+;HK[,S<**_WA3)]S&V+:09I1N'9%%K<3JKRH0YF[,(&
M=(-LWR?Z'$8VA/-HSA&F,GF0K5%[6X;1PY ^E"$B?KP&EGOZ85E]>=(=NN;!
M]!ZJ5=2BYN1#W;2L:D$A(*,)X6!WJ=,53IU_7] -IS;+&/3-2/\4+44[I*Q9
MX??!;EV$>^2*_GY%J4R-&:6+D#89AC+2:"3"*]G2=S(U:6N[?$-I\OW*YU*Y
M,'O.;X0SK%1!4>N(AJVU?P^@WS*,UWRBC9!LF&$H$%;YJ.L;!35JV P\FL5S
MW?Q)2H_\@SM5"8=4W!B.W]1+SXB,BG!'2%P$!4ETSCTX.5Q3L'%HK7V0:LW_
M4,(?GOVD(W1G,-B)N&.C5IS2GG()67QGDKGT ]Y/,"&'[TTN,''TE(OF\!W)
M11T3]1=.GLUW)*'N0OD.Y/#9<T(3 W?IU>%NQD6M/YO!2BC:HO["Y"K:MHX;
MI/VQB#M?A-M-R?9:RUR#-=+S+F>5ME>5CYHIPU#W>-IW\D^PGGAXINX3O0'H
M5Z+[<%'":;"=H[9=-T2B_\NV?#W7/?M05G?H<;#1#?@;\1Q7!1]7'XXU)Q]*
M S]1>4^EU)_G7N+:I8+N?L7SS%C7&](.=JB[!YVS?>\WXKIT>T:\O#]J9?(@
MSQ:NO.CBFMC["@-4^!--'=Z92 :+TR5U8-QPL^CD/PX2$Q42LHC<?^_HAC".
M?G(W!"_ 4P/@.=DP25Q]#4=D3+3,-=1IM>"^GJIV%#R%VUE)_)0:'2N]WQMG
M'ZI $MO(%R+CPG^*3TP]_B^UY8/_&;AQ"6!#PV\Q[@$J%O;3PDS:@]'0^GM-
MP+2*JXL"GQ>T29AT(4LOCYLV,7<-?,QZQD6?!G+E<^P*\4LE2"=.-QON/U$G
MS!<^;[J+,.BV)6;V717E=R9J[=(7AUO->7)9BL#QF_E<7_V,BOF:"+2LR-"
M"=WEYCSTO2X$VE81])SDNS5&TU;>FHN!+IY3#)*(3^U2\0!Z&5 =B+X+9OU7
M$J^">:NFQ1<3)>=_7:54RJK7U%<OGMA>*$BGW=3XD7 \"<1[]%2_UZ\'E5UL
M6$/8XT3L-?I,>'O ?*%NMHGN"[SR])8A!E8GHZ0^XTY%X;7-^LI8&[I".[#;
M1Q4EUZBVSCK @31E_*?V$"/OQ7 C]=QWZ#5;,UEU446KW'\6U4B6\5$SU?*H
MT>IHKVS#H N;P0@KM6VI7T32SYC\\G]02P,$%     @ ''A<6# JA.. &@
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MW4]?Q7DX[F#1S%9#83)0\7)2@8)^^E53NCDG]#6Y43H;M9!5,<RK7_ @RZI
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MY5?NE-^L5; %ZR1V7 EJ0Y7)@:B'!L 75P396'4)L*K735F7X"M]Z*J%Z5Z
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MB736F:;$#0:_5/Y.7D-K_DXQU%S*-[4CE#<5KB./7:FA)DD%:"E-/--0VAR
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M3_:]$#$!A_L;'K)VELI"?R2 (S4R7X'I6L^Z /#G];S2,[3@<*PN>@(.-9L
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M%+RU90S?]W'FAKO C!GV/:RRYCD.WBHSAN_[./?#767&#/L>5MGV.<GV/1D
M2\P,N._#WP!W?9EQ2[FX?C_=,I(>+;]EWS6_*M!K,/+Y^?FM^^*A,(C?>GAY
MFC%QFPQ007"+7/8YP^0")6X0;L^MF;"@EP1%_K:2;1(D;)H?WO_X[KUSXFR'
MI!_8J$XVK%,?U_FW8N1_IX,LPRAN0%F)W(=W[SZ>LCE89OF;415+_:T*E,23
MB)[BW2?VIE6 X@(5?QK=(R\EK!HM;4 ED90?J9 $\2/+>!?HAA[''U?C5H"?
M;6H<O2+HGRF*O,WD)1"EH6GU'$97+6A/XJ5/Z(1^2Y<V'59UL.U= .JZ1HL4
M5C=6GCJHX+O(5+^*S;*> VU))7-/_&(>31ZK99G+/1F&X+@75Z)ZBR1)&WI=
M 7B>#"14Q;Q=_&!P[VQ3_?FW@!H,Q%ML;M :A7I:5MIY?$4K<'",I6BEU(#!
M[[I([H)KK'4E8X#3OQJ"KES%8G1AL/<Z6J5)G.'U7D\'\WH 5;U*@>6RCX<@
M.&9],&;6!QO,4NG7/IGU 1:S&O9;MB,8GT-JO<;?&@5>20MGD!H9K++V#I.,
M\$D%9O7'UL$@79=&(X#;#V7R7.>B$99V;P[%2;!T$S2==6:IV1  -LH.4MRX
M@V.$+Q15G"FK\]"--95PN_WXZE?@M!Y+_;8) (.1.=(<-#.\OD3X*49DG1?U
MH'8!N\T5>90XF=N\CI3>N:7WZ<"I=/ZZX,I$[\08H!S:+8[0YM8EWU!RE49^
M_"7^A->(1&S+>F#P9LN$KHG)G'EDKK,P369\<G5\3V,"4/I#KZ"JRMG^U!JZ
M9%X?,@%;!O2<6L/)@#EU(.TNG;;4FW8Z[0"AM=H<PTB3&X9C1*!V:"79;O:Q
M;UI"Q=#VD]^H+"?H);D,LW/,'V]B-&=_;'^G!BSR_WB3D'3T..:Y&R\H0NP?
M%L!?NV'#+[(UKP529M ?GC[J7Y8,R $I>XB>SUCUV)J:%.;R\)H"R%P;G+-\
MS(>V'/CR1+_A@:->M3V-"2"3:C!^]T0B2^E+YWBY#'*P&/QTXZ'(4@N($L4L
MB>FGW22FVMB.&_E.8W3XJ4P/B9MD&[ L'ZG=J =%').D!A[]M 6-?MC.^."A
MR*52P_$62=J!213BDY>M* GT_6][*FH7TW^)XA7R@EF ?*Y?1M'6KE-%*385
MU<486*/\%:9*V(T3[DE7UM"B2T-+<MI$;\-OU\0KQ45U:N0UM';T$T/=L,Q:
MFN?P#F$W.)HSHV*[PUZ^>&'*RN5^B2C@9<VRNY1X"[IQ3I_"8)[G9<NKRO8Q
M,(!CFYX<]($LG$-9B4T)[1:KR1*GD8KCXFX 7,/]R3N/_V+4+1GE9VE,Y3:.
M'W*50PWS3PC/B;M:!-X]FM.!KZ,9)LL,PWNT1A&+D]P1[*=>)O)FIOO/[SZT
M3?<2 J< (;/?MT X.11.#0S:J8#$>=HX!2P. ^8 +'UO@?PT1-/9)3VA))NO
M@8]V*7Q%1?*2TI!0]I^G<8*7B,05V;/#7E[S47J!8:"YAK?'BKFGI)A9<.S@
M-X-SZAB2U:5%QZ?!Z!8T!USAV472UO[9129Z+9KS$!C S79-5?!R%;I1DHG-
MPR9F1D8Y,87A'F_<,'<MB0)TYF-8/M$HY:ERAYFC-@"/LNN$)<R=.&0Z@D7+
MUXP_IHC938 S5-2J$^L>XUD[V.Y-@\;Y=Y@]\/".T06F(D'9_@S@2-NK!&PQ
M.Z 3#@O9T!/;3;!&?A[$,3WF?.SUF,/:,H!.,HB<'*1#.NR44L!=Z;O4UCO5
M=!MTQ+#)EKTN[SZ@HBW @\P^;-P)M^QB/+[C/U^+=4C$(1=Q6_O'%J7(5=07
M8]$;]6/DO9WC]:G'/%MDDS.@^+"E?_'%W[\\M(A=_\%V8$4E'XRL=7A'E^#+
ME. 5_TK&[L^6#PU:U-R%>G2:3N+ O7-9',T3$I;3QF*FD1%U.:!;/71]QM$7
M_LF8V\)B@H\VF;F 6R7R.8X\Q)YCSZS<(/YVMCE#D;=8NN2;Y Z0NAN8(@7]
M62GZR -C:0F<]#J/NAN,:SFZ$BOG6!LWNYD.;HCB0CH_(WZ:B:(M@ BIKMPU
M_$!\;("MG\TCG<Y,&VY[@+F2/HHBW.(-BX<,+C/U5^\!5O.U!5/*G3I&5KFS
M-9)V8)3J/HU^$/7@KNS5V:2!E%5F&2H+5>BC^W#6(A_[4H ?^.BFA(\1CB$C
M''URVB# ,>:1FETF8>&.# 'QN;K5#,!MJ3YYLXL@'![M[ )WU-"C7[AS)'I4
M6=X%P,VG/GDG1]92,/$ZHE^B1_<%Q5-JF+OLDM$-CN-SEY#-+*]<;1@K_.7=
MS^U883Z+DTU#/U8S.6PJIS$7_""@F$ZR*)^RU[B+E;+BG" _2.J@2$Z*DO9@
MPGJ:C*FO20E:5G4I%Z[/[E)^%%3V@G$<5,J>DD-UG ;(?KM',:+(+2Y8V4&\
M*K(L\A+[)3CBS#>3W@!.?9JB5N6_F: 'QSBI]KE)FBPRF"3*3M083&B@@Z83
MX02,*U+])FX.0[')A4S.C0'5V16B0+NA6&.U&@!02BK!J+11"W0X"H?=2 WF
MT7F>2R&OYLMM"L"KH,,%.1)662#6DBI?GU9/:VX] [SJ'%)N&H?GHA.C9,Q8
M$ NN=\X.7S1'//>$H(?TZ1_(2Q[QE\A#A![K(ZI,[G <Y*G)K P=MVI.#X,"
M</P9<K,OS"UYDLH P77 ZO/D%X@C_S]3-PQF&U84R,OR"@V=2;_NEL8I)W*N
MKYUJJBRC?#N94\X&WYUDJU2. 8A;AH8A?G:CXJ93+G"Q(L= MS,8-Y*XN(XI
M2E:M'SF0TG.67E<89RXSV=3GXH#GL6H^:C-?X/0IF:5AJ:\R")*41)*KE6;]
M 9SF3$2QV@G-L(1S\-M%=CJ[0#-$"/+94:HHSBLY#QJ- ,!J-65O)SR/%9V.
M%9T$W+G%ZPRJZT@NB?>[C_&VV-=I)  K4(_3G;"#K%CK0)^Y(?NJDT53]06P
M5^XAS/K&387PH7#W?.&2.=T5\#F.6;CI\H6]EMV-V\*Q "SD4;@O),"A2,,%
M8F44Z*_=SISU[@#<1*/PO(YS!P?1[Z<YF0L/R5__/U!+ P04    "  <>%Q8
M*$*CN<&?  !Y9 H %0   &%C;',M,C R,S$R,S%?;&%B+GAM;.2]>W/D.)(G
M^/^:W7? ]IY999V%ZM73T]-],[.FE)35NE&F-)*R:_?*SMHH$A'!*0890S+T
MZ$]_<  DP0B"!$F0<&K,NCHE!>"O</_AY7#\\_]\W47DF:99F,3_\KL?O_OA
M=X3&?A*$\>9??G?(UV?_]+O_^:__QW_[Y_]^=O:_/M[?D"#Q#SL:Y\1/J9?3
M@+R$^98\)ON]%Y//-$W#*"(?TS#84$)^_.&[/WSWPW?_1,[._I63^.AEK$L2
M$T[KI^]^+#ZXD-22^,_DI^]_^J?O?_KAIW\@?_SS'_[XYQ__D=Q]+MI]9I*M
MPZZ&41C_]F?XOR?&CS -X^S/KUGX+[_;YOG^S]]___+R\MW+[[]+T@WK_L./
MW_^OSS</_I;NO+,PSG(O]NGO"&O_YXS_\2;QO9R;1^G^^I1&!8'??U_RTK:
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MK3S!&XU)3/KACDECS6OO!'=UPANIYJ(/]>>"PUDJ6)"F$=7-*\*3Z\YB.3W
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M#?YO\ON?5O_X3W\H/@FS#+*,^1,1E7CPON8E]>GNB:U9?__CBD" \JY__..
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M-Q:S3E"SSEZR(^S#G9?^1L7I=D;]0^HLS8+!,0TW\<4A36GLOSVF'EO6^:#
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M\::R9Z\3W]X4<8.4!6MI3WK[D<,+5S:4LG3"R[FO".>_(EP"/B4H95"P;28
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M'4]^KW@Y]E_"@"IGY^TU=>6Q&'P%#S1]#GV:F8.K?7Y+ =J)+*UYELHNLR4
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MG*UF]TD4L;4U),SW!*P!!)>"64-MU0Q;?:DM ;D&ZV0C&E7F', *]@3X$RD
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M#&2VF=MX,VT1#8.[FK,IG*RYSC8O:1Y)_N4 F'*[+J?S36ADU MG%/;46KF
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M/&;-9+>T@T E,PA=1IX74'W9AOZ6?_HB>9,0ZCFM:5%B519? O$RDB51,&^
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M>+A^;PAN+QU\.(+/?\/$M<4&7C2QAN!M%TDLD7Q76*Z]5F*#WKM#=;L7*&:
M=G$[Y7VA^Q0W?H9 _+G#FS\H3#?J I UQ+=CF?>&ZQ:@_-VA-V[ Q@Z[[I!V
MUJM4KJQCZ4;5.%@UO#%EB>3R =?D_I0->N\#BB>[*C0.E\.84''+BA%XUV@^
M\;4V0VA'<[\-C>EL7'/3 /\O--QLF<SGSTS!#;VG.R^,BWSX1YKNF,*74K-[
M9JBV:S4C:"&&^K$6*C%^*"'DX#Y:K<5<KW&F:<&82,ZD9"W!$YAS3"W8$^#O
M](Z-,V,)B^1@$1AW"U@F#+\=UH17!PW0_G9]D<1<X1^/K->G'T[8[*WY:1F!
MEDYXKQ&;BSZV/,#1BS \_-GDM&#DL,C0E-K7'XF!"'=_W;\3YG3A/8 ,[F@?
M:A=]Y8!N&GBQ8+ FUFH-&$T:$+P9,ZMM.'1DY*Q@>N9)XZ2E<2IT(1_8TA].
MO+)O73\#-QAF>A/!#3+#;*)[46[) #-0C[%C+WIP<627 EC($I"E%8#51=D=
M95^/MB#: #*XT66H78RG, TT\"+,8$VFF\+4MC=61#+&-XF9UCIZK'&^V=&"
MON:XTIL(;E099A/#.<NB$&6@'E/-61"AB2/+($:2.KX6F11&8*PTQHT,[3KJ
M9Q5%2[R1WB&OM1G"77,FC(LIP 1*^EZV)<DA7T?)2T; =X[3")P455;!ZEJ>
M3$OM;^.N^J?&G7&';C\;Z 9S?4^\H=U3?DN#=\&IB'B2Q--64^TU9$]HAU8T
MJ)4P<X(%]S!ON%U_S>AYEM'\]BGWPI@&U_'5J[]E&M-/2=JO0/(XBKA1PX*U
M5"@900XOOMA0:FBP<=YGR?J,<2></2GX0QI@(0%/[M-5.G6#1BZM=ES]V0,)
M,I(HEJ.JY8[F,&7IQ7 0A&D2V^[2)#CX^2]>FGIQ_L963F$2-"6JZ!KB1))N
MW<I\L\96R)/)VF4>'-9TSZ3E:;GYEI(]I\I=\64;^EO^QQ?)DH20Y[MFP[EH
MP3L(J3*2)5$P;\[9- :15$E!E@BZ\V>)3:M>^9WNF]2;97[T.7FFX/'7\4/N
MQ8&7!N=Q</6:TSB@P9'VU[&? B!>4O'O?1)%#+:9%L? 99\Z3K2;R(KJ',H2
M:;SS*=L*#@W*0@Z8#A22\ S-0A9RC$JPZA-RD ^%1-^27T$H(J6:-[$5FTDO
M^)R*WU#)"HONC[$OTLQ+9X&_(V.<^WYZ\'1FU3;&#4[M.JI8T]P2+W1TR&MM
M]B$)3Q'+8N2_BEL?L)I(SX]>)*Y_Y>2!^1#=/=&4_/X'\H'"?;"UG)4<9X!8
M5)NA4YJ[5?S_\>*#E[Z1'\F')[H)8YX(PW2'Y)=)-.]\ W$BG<7]7,RH*W]E
MJ^SK+#M0W9S2N/,245EG@VZ4/NZY--36RF\;Q5>D8D4$+R>3M)G,H"@;<HHD
M.*0 <M5. QX(Z#A&[^RTQ)!O.U9O[[&T$+=V JT/[4G.V\U?&IU8[P>:YQ$5
M]_=W7D!1AW)*Z6N8P3;Z\1*SG_%:Z2PRX+LM8X !>B*+@P4#529 BHIKXSX.
MHCG!E 92MF@HX["#:]E0AZ2L=@%G#/N4GA42%$L(F% @AA^YQ'O84II?1%Z6
MA>O0Y\<ZF@H1%L@M$8S,[=2-2=VTE@9-/32RCU#%+@7G3NKL795.0&.N<B/#
MK_'! T!?6$0>TE1_B\"@VQ(!Y53O;N"H^BP-(!HDMP\$%1-$L6Y1<UG^K(AD
M&A O(U$2;\[$7<27,-^R^4G"YAFI\G<E+<?)+<5+^I1?QPS7>,K(H_<4Z58V
MS2UQ1W>+=FI -S3#&\-MP@Y>D_M;&APB/FN^*7T3.)&*549^Y=R.!^L1^6,/
MS/79U_A7+XKHVT<O_NTS/[]I2F+1-\7I@B;ZE5EDFG;(\\BZI+:021;&;.FV
M$[-%MCK+Y27O/"&2.1'<";"?-VEL*NT;%+,8<%Y$S^. YZ9^]/RV>-.UQ!QN
MK=I5T=;8#'NPM0L]::S!WDC&^/-,(IY._,0D(&PQ%&=L/<0ZS!QZT]@"R"KJ
M5:5G74S,+E(:A/DGS^<[6.>OH>X\J;$ASB#MUDV=E9VVPCLI:Y%U\*8F)TD*
MFN17H#ID[F79%2\3*+5B9(>RZ9+<L:Z?WB%%NZ6XY)&TUIQ2T'7BEO6%T$T8
MT^N<[G0PJ6^-VSD[M-0O8\NF>%VT2^"A7GJT<"6_ FG":;O9:9Y*47$]EM=Z
MAWVM#1WZ8H6-_6.?TB#[Q)P7YE&W:_87F$6^_85&P:<DA3_J]^:,^N(.U%X6
M.-I.[NZ(-XC[B3]B8YES$5>R^4P]69."$P%69VSY<@;+%%<;S+.;(9-F\)-T
MGT -&;*E7O"?!R\%<9W4X6;0=KNN3ST^>Z_A[K#[F*0I?^WNPMNS3[17TWN2
MP T*0^Q1*]3=HS]>B!BDQ>#RW3#60YWN^E1U121'4K(D!4\WI;SG-$JA^U.I
MNR])PR,]5-S ]87%UE(8-W7\<S!<89?;0\[O7,&;,$UO8/7HAAPG#/6N%_%O
M[X,8#TPE'U["GS-08$#AL9KBH2/S OZSJ,YG!9R#FY7Y&FI2\$<)PJ<#;*'>
M,77:3Y=;N^".7A-]ZPMU?7N\46LD]? E.R=.5.H$R(\X=&[VXRS-%1]FOU7^
MRW[YVV.8P^3]FL7D<Q@<O*AAZ[VM'4Y/[=0,W%/;")]/=HLZ^(HA4 7XK.C:
MWGKOZX&_A/GVGD;\*"K;AOO'Y"K.=3OQPR@LR&O-K*'UY_;N"_%T0R6&'PI7
MI.'\5Q ?L]FO24>XIYM#Y*57NWV4O%&:Z=,1M"UQ>JZ!=F4Z0G,SY.D('4);
M*B*5"BZ$%FP F.$#RCURWJR#R50^TM%>>/TEW&RCMXMDMZ=Q!M?^# +-H _B
MD#/5N R^K@[(P]!8?$L!N>7\B%\QQ!&;D]OA+RV*VPM8S1+K1G.V;=H'<<":
M:EP&;%<'Y %K+/ZH[>\02+'14\:N+&$<LJ6,_#X@V\^/#H$H'.J1'-;8WY''
M+6M?M?%22@X9:\/F@/!6091D,";#^]C07LT8G#?<)[=BRW;$C:-< L>*(]I'
ME(<9YW',ED+JA]D=+:=G[:_?V*&,$U<GL)[!YF4?LOA6V5,H9ST$JR-,(4BM
M10;E94DAB]N'=C!8L3"5KUIQ3ZMUEG+P>?[JTRC,Q-4G_L[S=?Q,LYPGCW'4
M_^"QT1"Z@VR.+NHUVE2:+?WLY?X63HS5SX6XMVO^8;_OJA?=1>)@?\L9H* Y
MT<5AX #5)D# 0@I2B%%K5,(>K$5Y"TSX-Z,%2S.5\,?,^?1&&,QM0IBZ[[TT
M#_UP[SG*%QUN(NLV?\< 9A>YWB-D(<&J<KOJ&_)SFF09U(!;&'19R&VE9[GW
M6NVQ@245_$($4Q=)EM]3/]G$X=^U-5Y-^RX2?)HM8( S]8Z+@Q2-^!.@!W B
M%2M,:#"1$>I+-5AVT5=  C>/KA4U,6[74KZ/-&8_Y&" [%+LAAZ8U=NRVOK2
MP T%@RRB0D(O GBA89@:-FJS%)$B&7*DR(C"TGJV7/^Q4C%&)9CN!*MO7]P!
MTLL"#6-E>T>\ =%/_+'#A.K\BN]/?C+S3-.GQ&B\G-@0M[R&V(4Z3>9 X.3>
M)Q,!2B/& 9?JCLT,4IJ'*;^)V@"/5<6UFZKR65<U4\L\<(/()!:MW3>UR0 O
M*$VCYN#%K9"&5] 1\5L7J'EH7Q%%%N?E4E$9]*B4K%+N.125H.%@ARU<LB0*
M YZO4RM%NPBP5.S678G5$NWW!8ZM%AP#BHV$WP\8MJOG$ 3=%Y)%8<E;?1G9
MA0';A; (ZSHEQ&FXO%NP:[.J)=AK8O$N ;!548=0Z.9A/V1V%"\".H:_4[W/
M@UT8AS#5A=GIE=S&-MXUT';'#5A][="^!=;<%R_$]-; YD;8BM29D:OFHY-9
MSXVF-\4=GE.BAZV7TH],JD#=F5/KLGU\J]K(Y]3.X8EJLQ.D\?1Q@X=U2S:?
M/(TDCA=^[*MHX\2*\SF#OP?U'6M5',A,4QM*D0B7R>61%L#+%V]'6\HO'S7!
M'6--^M26 \KG>#V]4<I1(PA0<UA@N5"HM;3R2:-EN)J^G'*]!7YWLU1<07$X
MZ_44KO[S$.9OUS'DXX7/%%C]],.//^EO>W=UP.ECYKJ6UT9;6R._,VHF^Z0O
M0  _(N0@I2#B!-[AK>]I#2/5#4MU>4H:,' Q1HCY&6/0,A<Y;H,S>ELU4@>(
M6@.\XT.SF$.]3LQY@9S#"<GP%41EC#@PFM9,Q JWZT]IW]JR=P(^> -Q4FU'
MCB)R*>OPN8SBBLE#GFC>_6IOB3NB6K13 Z*A&5Y_;A-VY,5 2CA1<L?DW;(/
MG)5XN*=9GH9^3@,NT-<XS+/[AZ^M_MG5![>G&FFL^FQK![S>:R;V\%5+05UZ
M,J=O\:%$('J[YP,(0'=+Q31]4YR.:*)?]59B<SOD*^8NJ0<G'<(-)<_/V8K7
MR\F&+0IE6;0D*FI)I.%FFZ_(TR$G<9+S/U4/":X(#?EA/UM2[POH3?BO&8TB
MXA%?++M)? "!87&=P8R%%U?+N*,SQAYA2_: 0N8//PC<LTB@A*W=V2?9GOKB
M_6FV@@^3@*_/PQV=^87&B;X $>N"L)A3.3GU.\*V/J,5<G PTK!E=,( #SU&
M)?NC$0]2BSNZW14[%U6@LZL>Y[+*;TY<;1-%:4W;.I;T[ 7)EZ0H4$"%D+?K
MCPD;&V[7EV%*?49&'ST]^B(.J[X6*./-M"/R0.RMAJ4(C9/XK"PHMN,LCH+U
MFXQP2?CU72E+-F\$SV:<+QIKG!@ Y9ZV;G/PIN/NLA7".+'%ONUZ[4YW4L4[
MS[2HV^"UDD'J54?FU8WC=W,Q6!'F\V<?3ZRX* C[<A"PSS_-S@_Y-DE;*A=-
MP>>= ER79:W@G8[).X2_3E6=H>&*?"GWY(1TI!)O6>@XF9&_-.Q:^LENQ\PL
M-B\9GTT8>U'T1F :G3XS*\.^Y?J00PF/#1/=R8N%W!)/W:9\.C;EU>L^%'<:
M[OAV:]M798G^ I#4IB5/$-0&<>3(:55%AXA9R42$4.YP$H5)Q<%%IMIEWV07
MW+-)_G]_I5D>QAMAF!]MCU#-+!: ?);M:67ZV$ ?.?[9UM(A!(J5M)3+.0IB
M,6QAC\'HITO;&*JD4.Q\S<SXR(_5><?'Y.J5IGZ847'6_+CU\E]H2D'\D]6S
M$P%P0J*[[Z)*7)F3._+3$3>VL'3$(M-8/!""Y)44D#1#I1QBN2D!V.-"B12=
M%R86>>9RS9P LRB3<U'(Z29GXS@GVQV-<W?JU_18_YH*V67&CO+5"/GG?T=M
M65_/G4D(:-P>\=AZ#X5CV"R@S BHS"@,)XPYR_=G+LM_I1&WYS<TW>!K*,A_
MM7&XKUEF&))3*9*2O*2BE "EAO%ZX</S7-_$Z)&Z=: NM*C>HZD-WT*3YKS;
M)0[:<WUI;>.W6;QXSE*=;1TR/7MA!'5</B7ISW#*,_&95@,[G /W7':>XB#Z
MF-<[W%4TU1C5L70A)3]:_;GA3!7YCN/41N\\IO9J%E0/IVU>,1N\(5L>V!\9
M:K]/DV<:R'[B4I+=Y5-OUCA!UX7]QR^.^O%]KVNA@5:PAA5>R9^#0YAE!_ZL
M@'A.6EW8["5.>PJ4OVQ#?\LZ$4^*"^">*0(O9!TT\[=@XR"NE+AIR%2^#57P
M!2URG,>%Y(-X@/S$P+]*O<AN4S:C6-,01O?L=GW'%FFI*-<!U1!F^7+Z2O1?
M:3@=]&U--\KV$N>_VN [S#A(QF2/$8!TU$/$WV*F57(63/Y+1> S><@BZ.Y!
M+4)%@1\H#K?PL7O>+W'J(1V@24FTR^#+5!2"EEREHJQA0P4<*]]?R[.![^9K
ME-:F=6M7H6-QU5PKBE24+^(5YIL?$33NA'AH-=;YY!J]M@>^K;J><D]1 ,O5
M"WL(5$<P:V<_,S-%ES0X^!Q#SK,[FD+Q56]#;]?E(<V#%WGIF]T#HKZL$8/%
MS/:W<.;?B^][G5D/M(*E$WUOEQQB/OO="SE(4 JR@G&=->9G]3!5WI=R\>ER
M(=DW)..RK4AV>/H/"E6RDK*>E>_M,Y+1'"8%^;9XG[,L%B"VW<N26'O^HDV^
M39/#9BOWS(H/F01L+K[S@KE+6BWDF]5E"*P,4@2*='4I,JEDAF_^KO:]5RD"
M0O %;97-_(W<G8146QQ]D\DX6M0]R'+" J7H;M<7_#1-3&6$EFUGA%,QQ#E*
MSV=K*U<G.[GA6TK,J+/#W8]J_L[+/S(($7**Z?VJ@.ME7;F<WO*EV435S 8D
MAIG)SDM_8[.59R\ZB(V_HWOL8OX2>&_\7_'',"LG*1A.06[7:YJ6=[9NGVGZ
M"TRD5"KR';[K['S'IF4-%4'<2( 3MQU^&^,768/8O]>UUCAC6%IR)5*(LDXO
M$T,N=7QU0)"O6_*<@4*6A:Q\W-AYS )(KG\*P8MDZ=OJNZD-UE?5=U/*OZ!U
MD)OOYW:$XSM].(.FSVS&H+'V9I/2C9?3R_#_;^]J>^/&D?3W^Q7\=@G@S&'G
MPP%W.!S@./:< 4^<LYU='/)AH9;8W=RHI1Y)[:3WUQ^+I"2J6^^BQ&)[@ 5V
MTA9950_)I_A2+*9^&*=PZ-%P(F&R7IR>TCARM4]XC*T4[WK%G&G3CPBD"HWO
MMW(RS?4@FB*V3E#P(-B4+S#W%0@6!G<>2_X*"YOK-#WL9$J:\HSXB0-CU,OT
M$H>3R);">?K\OEO6I4[F!UAN*BU[FK&=)ZYE1='!"_48H00(4>TA'")U>VL/
MLY<X*@*6%)]69CLRLNB*R#_Q'[8LY4S ?%Z_%WGA,66NQ 8OT"(F#CE 32+T
M))JB6HP0 54=FLXO@/O=24]_IV^?O;?R+FHHZJ5!/6S*ZS9,%WH7QNF>QF%0
M>6*U5TF\,^:!^H]^E#47TS@?;IC>+3/K70@%.;6M\5W4]-3V(XWHFF6/ZQ?O
M9WE*>\\M\6F:BF.!0OI-G-;&_(VH ^<HGX1(,;,<6@'RZ>)H<\9V_A>(DBF6
MO+Z70A#+.HQ_B*&0,#%K6^O!- GU*1,)CB$V]IWWOGK%W_/_.##N1RM/A:AX
M=AE?7KX\GD\.^2_A(8"],W4,M5?C3V8+X+XX"B"2O?(8E1[KSNN 3]ZMWDNY
M BV2>3_)2@+*/V8I"!!*IP=_2_BZF ,I 5YV!KIX(RN!Y'%-N$@]_.4>&%Z
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M1YQWT*X3<68FHK/*EGSMTST[Y%N-8SM3'MO9N>?\Z:!)2.(41:I!TFGUTQ\
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M(: A4:71*B;P/EQ_<8O6$&[T8-ED$<(,(LW,8SJ:#$@JK8B2DG9XPG>+'ZX
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MLL /ZEZ6G[' _PFJ^.*RT\XM"T2YM]>46<,RHB.2X+.J1Q]M\6T0RK&$GG/
M-)$46L.E]8YX\N#Z;K@$SN]!X,CQA)YSP#R1%%J#J:PCGB!9>81 20:,/$TZ
M5=Y N65BJRO#J>.X29,???(6 _X@NUPL&:1*R\4OHUU%HUQ-![:.[*S_ICL=
MUJ7ORK0]ZM',[LN5R9"KI-@Q/]%G9M%( SR0289SNULLL[&0<C$JX]M XEX
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MSM4XL<WR'2B7:))KB #4]:VT?%_9\WF@D(:7;;"<J26XHB?%V).;OA-A\E*
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M$ \W\E??"5-3WN'>*!:/6\G)-2R>U!%6\]M+9M"$[1C&RG( !&%).JP VJ\
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MKR/E3#Q2D*N-885=IBCG-@BC%V '"]_])S6JG5#> V*4@."ZG+?:M57/HB6
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M8>P0[2828]4$?H14"WP;02#G,7Q1]AC.E3VR?&=4*-U\OV&6:K9B<AR)I<I
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M$/L\LM"RF48%38C2J2.E&*TVR7/M>_F;.$0=+ Q?P8((ZCN_@V !K?72M5_
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M*4I!%#TIYHTA*D^*VS3.X!@?^,R8J(INH2DD.S!""(G?>[^1TDSZ#"#^PEJ
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M1.!A^?CEQY.2>B2"8U'SFD8:)1PH4ZN^+AA\ZHP5)0G2V=M?X'B#MQ:$FWD
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M^14WJSX&4AOM$IP?+#>">S7!.9D(^-2(!A3.A"+I!&;N$1'YF=-$W$@:O=U
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M-L]_LINJ//'CO)64P6/^WBCTA4(B>.6ZL2 \N+9U6;I#B[L1S@;]]])PI)!
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MU(*D^=0"3#UDN[H\NY>E%J=U&L9P8"T"J1:>Z7.SM^S7;U$/*2 _P+Z4)/D
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M9O-6:Y(H[I,Z(3KWF>>Q\4M:_$8KT&U#@*;S=02!2"0!FN8_?Z._0J:U5)!
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M>-=4H\)E)VY^H%6<=P#+WRW._>U#&L:M#X!9NT?"7MDV+GXZ">T<,!(E<Z*
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M5^\REH@R]"#"1Z))AD=;NSX/:"K*BW0R(H 88$ *7BE[I-*(/USSUG2M$%V
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M[TSS[<L<X/J<X%NP)*?I(B_ <\,L;KH- 9$1LI 44)9NXHT+-EOS9D, @0Q
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MTY6/I%*Z4V87>C,SUU,[/ "6GII?)^PC2G=#\^BFI8O8*Y2R[U5/Y.1B(5X
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M"PQ/ 2'"1RDFA=@\#OD$ \6$&!D 2J2W&*$M\/Q$K>@KV^I13#@R81[GB^Y
M;&#MN'NG&:752;O$B"R,+L-B/]*[[U4;/'/@3JG99K(UL\]V<L.2G"HO35$9
M\I'].SO9.E]5NFF*ZDRSZ5FD-4[&BW-T9VSW3DY;/(KW(%]@6\MJOE9*1T:
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MZ_"@+[9MO=[6&[VE:S*)A$BJJ$%8D:) ?40@(<#-L!Q9?M>5$%O!7Q)>HV-
MW+07]E8''PD&J81(J[%!10S)L$MMOCCID4-WWVS&V$HLK#TW(<YU0)0.1.E
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M0%P2_X\7+[@$_#.^?/VW\/=D8\/6B8-C(M-ZI:(,-@:F\<ELB1C^:!$"@4$
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ME0JD4 &#&+B[;IU"=48(TY3:5H7%0H!DLCJ9#B!D+ V99"Z)<@6312B;@ .
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M6DV:G$O4CR.C3CC?:R338_=4:=1&RBN!U9AXY.G[V8 NR2%N&-!F3^'#G1+
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M)6#'3)R[@!WOQ+2IAIZ</$>"I=2V@:6A^\W2@2_CERU7#P*-]&0'$@[-;<R
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M>#/Z\:*ZZK&X</I'[HCL%\BK9V3\WG,J:V1#:N9&:DI!:8JWG#(OT6F989H
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M=U4R3V3*O=Q('KUTK7B#_.-,S@B.RF%LC'?3/BU6J"94$Q:6T9'X1' 0B>
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M<1Q\II/1,'7)H;S?47:0QO:WEQU$!UX,N/\P=$QTX)$.5%MYP5B_:FV*?<V
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M3]T$,U&1_6$-7O<E>PS,D(3QF;:'7"*Y'Y+[>4RY>W7WR.,Y?YR.-T4'-8U
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MXWD%QQ&&RG-\:;)Z4U29YC(G [Y.E\0 N ?2E]21MR\A?V.(.O+4T=#1,7E
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MHZ$<PT*!RT2J3-E_3:C&</((PP\M-ZYGP3=#F$B$XT*1/S_L#Y7A .H>2+0
M:6V4:!:G4$3)H9%AR%CA 1VGB/!2+ 0],HT5_N['5N\&[=SD! 9;.M(8VS^R
ML=2QAH06%+1/7/7IY2WPRPR O409<O?NP^TBU]L$TVX5^P:5I^6=&0H+[J7,
MQ ':XJ&#P< R@,2!#$ +0)_13>)AU*6[??AN"!.JD"@;?J^N'U(-B3O">D-*
M8(5(;'=.[M'OKE:L8T[8)3V]R*QU<&;(:D>&JB)J%OP&O#2\,^)VN2MXF7N@
MX>.S"V_)!:T5_^+8BN8!YM%770ZR;!&#9=#MH7&'0L$XKW9T0S\!ADWEH;@P
M3$SMV&AV<XQPR1. 9B6'!NN]%8:W6&%1VZ/FI8G*XUQVF(HHO^;GA&627MO7
MR74$OC;M=1V!OCE=YGTD]'LZ>I'IK3-)>596V91I]X:E\2+3YVZOHX=?TM'^
M-H1#>",P16^W O]6!IA%.)R+(1$*^-C=GLVV>[8#TB/-CE-C6+$C?1-VN7L_
M&P3]?R@!E5VQ@>?9NABX;Z\@:GJH*$*+'PJT*(72+70<)UDLY$8C";NM]X!N
MN2A#G6]"N8X$J(07\ 3)%9<XN- 2J"LL40/X%E#V(S,$^<Y>3E(,_4;8<%:_
M-H1R)DKUT5OT+=/N9Y#Y 4QT_W45"A5NI5A]%!+MI\$"F-K:)Y#:4@=F69,J
M.'_4]T1/_UW1DUZWUS/W=OZU:4?1D(OEW4)DLI6DPNA=(1/M*J!1K=22I>5!
M*#UB >FG[)A+J%\MH+^5>V5(B@!X40!]A+D;Q6IKPPS">$(]M1<P'W7[D MS
MK2C?+=82=+YG\@US].,7PT10-.>M,H%TCJ,Y(Q-@'87-3"_$Y6$2L>J$9^%>
MBOS=@RPG2J'Z.""HT#$"QH,QH6_O$$)[T!X'D@).Z&*S H'7@:NBX;DC,Q;G
MKR$;;G%&,V__][!%FH^)/<VA7I!G]_B!8:AN4$S1M_=[1Q[ WY:*IFV=4F2=
M;N\.#M_H3XL,H=B5ZRV@<W2+ES".:.J6Y*#2I*&CX8(@9$4K&'"F8!2H>SHX
M4@:_=L#[B&@BRBKB,O[/9_R?_@:,N92FZ45*F=GI9VG13#BYT4E1_;=RP/T5
MW0@2$J1A[3_[DM_["!&<FY+="B(W=!7L;,PUWBO[.T5R"%[8>8L6*N""^QN!
MS@KP7,(=9>UL\"TM+78@O2VO>-@,!/[0H/-F_;RHV88S3N\*3@&_:!F]9QO9
MS\?6V\O<Y%NY=M/B(_QXF"BF^E/;N106ZORDA'M%;*.$.**'(H2:.+/ 3_^'
M_== 3_4BA2C*A@]"]U_$#>&)CFWX'[@!//S)09AOOW+*O68714VZ053;]-_+
M>Q[MKO)C3<WBU%/BMUVB]B*'>_='Q(J&0ON;YO\>00U!?KHA4:0 _QB-](+#
M^,'^I2**8C@VN$BT^.LYWEWL^.NMUG[;#(=L_06WGF+)UE]TZ_$JHO&G%*'Q
MV]!XXBD:)5M_DZVGGZ()LO5?V?I/]F;US!C/,O/63\]6(9R+#_EIW.NV)_MM
MXR!DOGLP)0_F(!T6VE[6MKA]FZ#W(J)'&P#-:T0H_^]'[,=?;D:,?6*3]T0=
M?JV?O*T A.Z5^W-9&8+#+?I+5KGQC)<R3O ,O/":]29H\V_X7L!T(R;_G(T=
M;KUFG\#/L!QDOMYZ.9?K,;EO.]YZE>5MH,\-^^UB>.:I4,T0^)?B",U9VHDB
M.^[6VW"+;KC(B+K;=?^=6+[JVBJB-%9TX($PMM+W;LR/2PK7^R"ROU[D'QWS
M2ZSRCVF^730:Y?F:*/>$LW'HMXJB*U-G^H5<WI;<]Z_S[J</. !*V>&*6O>[
M"ZO=9/+/RNG$'DJ$?!C-X$?&AV OK3=/;81&+)9L"#5Q&%\71U63>5W^^!4]
M2NC9Q@>2H[_=-7%UP5WKE]G,)"/T1FHF:B_4_D985#K<9]*AG]NX$?V<4O5-
MV12F2:MEQY.+DMX:H6FF?GKJ+3SY3-KWP:7!G^(505KD0?/N>T%37>.]FF F
M*J:/&=WUD'1S[R@5Z14EXW(*1<=ESO)3B$>?R@I"4EJ'M23G+EO\M)0OO/;Z
MZ<J,*@NEN%%86R_9?KUW6,?(?*".T2V7@]M0&_KRQMLL*'$JNZW*B#/%WA8R
M'LQ3PN)GEAR8@WY)Y:A\?9Z6><WI9_+OU2_:8\.QT%D@3($)=+!$L$?TP0#8
MR('8JS+:/M8O3O+ ";NLL&(>9(,)EO  WS]%AXDVM&9F%6MF6*)6&Y8-?812
MTK(+G7L/5T@ML@LGE=62%%.JB)E"/IJGC0#4/HZ^AOW?;@ER1]%61/!>$!SA
M*1BTLMLMOV6 #G]"67B\:1[88CG&/=ZV5:228DK.%#7WD' #'@3FQX@BMZ+
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M3UOO8"W,XYV6;G;4/*>5:"BO<\52X[C"^?1U%YT2$%3V_:B/LQ^-@@XO1KG
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M\N(-'^*I7=N6UMLN2VY_6;?ZR=KK*H6TT<<U@]_%0'&'(&&=ALSB;>. K69
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M;^=PH3.T, MH4$\?CA]VY^FB.[]S0W?[MWLN6MO#0-OO=ECPNC1L]]DC')?
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MVXS_?__K@IY%#/LUAJUHG^77$^>S( ).</6YYQGY >X/:AR?O;:UB+XQ ]C
MC4_,P.<FNG&$R9@Q%(Y!R3"P;[AK.^QSS[\!QG=A@+=7EF_/$^GXR]8$_:
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M Y0\@0*4YSQ3ST^\8]?@TBV9NC- +J0U8>$/T'KHF4U46PU$L():KP&;M:6
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MAU?'8"+L!):"K 3?IES:@-.M;77']NZAY!<S'NP*NN0ZP0/NC%Q*^(O?,D4
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M3!965-L(_7SO16ZNC'MS @40-@G8MVVA8_K*+Y&CZ6'!>5B?V_11!-&'BC[
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MF"5GH4HB^,Y_W+B3IJOP%@T^;0_D!5W7]6:"-]WMEO.2@B9_>FU[/;TFKY
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M""PW\_YV@7V]][.8*K"0D!"7V?\0[#"PY3'P,PC;#/B5!20!V\W-)$'$](4
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M_0").XHU)'0>H=%P5O 7\ =H [U?Q%P]BGZHL!/8<U3?ZDEPH,QT3'>TW6C
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MM\9,:@X8B>VT1A(3MT2\RC<G"]9H>S"-R60LF:%_:K@[4E21HKI/1?5YK_)
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M_-U#N!!U#^D(G#[5D%:$/20*@B@8AL!OT?I%8$!@O@6!U22W380$)A(U#/F
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MW?/&O71YB,[I^UKR3_#4+MP!PF7Y&^/I/+ *JW%"#)L(X$,-O MF/5DS 5N
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M#E4FW^'JKZ0%X4W?C;?V'#F[WDW9]5?R9DKN7>?C;_-:@.C5?<EK"%93[ B
M%*N37>#%S7-ZVIX/5KC=TIK*B!RT'[MM#ZN!(F(D?I$&.Y$T[^[&OH<TXU??
MSU!)\]G3Z[\DS<-R6UQE>[.LS"Z*PV(OM1D8?-N#;LBD8Q1QD23[;R7-H7/.
M A([T T9DS1L8>B<8)[/N+K'W;I8SM2EU=,V G$^8^JGZ-K+64Y0LBI:RY6K
M]Y2ML)J,*LU%WI8W#X[<PE^J/#/T81A2,>HR!4T_4U3?3"&Z,U%].POG>XGJ
MY<RB3XGJJ+;@XZ3YO"E*$WQLIAF^5F2F0%2!742E8CB=C43U[B-.)4F3S)G
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MBMYSBQ,Z45A0)%/JU56SWJKY/AIZ,-=Z7::C7)8K4D9OQ5B-;G4Q!/"I1Q2
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MP2#,\@NR_&VCF7DW2((7XD(+D7R@6+P06 G=,\NQ$@KY0F E%)*%P'HI#*N
M]5)(%@+KI9 L!$0$C1?B= OQQ3.P'X8J[ND0[,<;X6U1^WR @?GH_,);Z$L]
M,.<]F/3JJH,,4"7T+UR&WL8]OW@'&B_TS2WT<[#[5-?=0TWMIJO#X;\'Q/^
ME0_J'9QHU3^R)DY_0NMU?XZ_K]BWW9*OW*GC\^NWRT*A%%J0GR(J+]OAW0":
M;U*7AZ>3RY<1'TC)5T4#RP&6@RNKB(]HQ<)R*\)R=COA;'< M_;%JY@(]<93
MWCKFOD?N/SAJ\",WGN1W=4GTW#=H_U97_%LU-W:Y.[$\1S(5YS]8<7P+XE<N
ME,=03.P;4 UI08,+WO=FKE_D\!3E6S9IFLL3<LWJ+)\^*GZ"QI3/1TD;TLJ
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MK9.Y,D,KKM";))5Y2Q[6Y503KM'!V[M%>I3P&@S@VPW'Y&8=4,^6Q\?6:.4
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M4)[\-&UXY1ND]?V#'5^Y)/J^"@S5X?$KG&C:J+R?S@7Z.I+PD=9[^VS$IV^
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M1N^ESYN&#;QG=H*^#=ZQ8COLLF0O>)5?3?URI<2+(MIZH5,4CU!)]GQ.41C
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M 3-@(MN0\&;6IM+^;"M/#ES2!R*W??[VP<&G$<('A"3+4/HA5W>YU<U<T!.
MXZJ0*P"]UPG*]3O;$PE_YBVYFRG"-0X&!(\GG(DZ"TK\HTDK "U;,"7+#HXY
M/ ]T"!LL@(G>[[JV.O0"BY%PK6#X2%)M2)[N!8^&;",/WO] 9.#4G$VZ^-@
M0K(A(4O('0?2(04-"3S;!H@EDNQ:M@-?!8F0H&Q!9B'>/W_U#T>V70R"69E>
MT-("SD@UX>MT'3X7G=N BS51'?A$9.$'A,.'J.B@.>+@;C4@33K440044P"_
M@=AKJW"\YTAC$'P+PF2AHHRW-(1$(<X[#P3$P2P0-O1P" 64.G><8#Z2 N:>
M)*]VHF,#&17N5EY,/YB,,O6<S6)M>C,@9IA AH^! O1P$4T3(L72@7S8'#5
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MPJVICNO</^@K!N [HH.7V721=WJI#C4O#9J*F=.;MM,4V<#;82+)U)E:UF#
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M\>1]'^X?5X+2>LE;(_3L\[=&-FM6\PSX-OGP]Y!P,YR\4]3%[_^#_^R>(NM
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M)V90F(-"G_]]OC)(44I$LPQ0\?R+8[MB!IW, /8,SG!5@V#@EJHC2K+NB&D
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MEWARX& J.=34K+':6%[[[E3Z=3[S?D*4Y6!R%*GSMH$@/*FYQ0>DVM#E@"
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MN;J.$4(1D[14S6F,@,YD,, J]X3"P!?MR3ZT;($OMA4 &,JM8-<73ZUV!.!
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MVP1C(<_P9GW2'].NK&GK5;H8(QKOS]J<7S!:4P*?Q;)IGA;TM##5<)M+2R\
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M,-' M"5Q+#<PIXJ+=2=::\D:!),WE_=^3F']WNA /4&,[@D$BWBU(VEW2OX
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M'>-6I\Q=ORM'RT163M$+4N8H0=?C<@F:IB/)'[H9L6[."C793<[6SIQ22!-
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M5LQ@Y*80PZOMD][]&\(U\QE,7D$7WD?(APB(!X)([H,9]L<(W$^8LI+I;2)
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ME<S7K7Q*97-\V34&-*%DI_U6S5QI(@E;@+^AI5S@?S[3RQ/&2KIC1Z"NP"\
M!Q6-]!04MFX#\1FK@+#EQ$9PD%XCML$+_.<V&/*>6.*((3L[X"<YTG69FMG5
MVR3M9/6&TK$EBG%6( 0@7@H!(+5N0T\O2AQ\D[2*^&S$R\D^3\IXRK*5$8F(
M<[RU^10?[1PZ."VK1WWK;[D]]6'VGT7T88@DQG+I29J)Q6($$Y_&>69"@%^G
M,2XYP:<)89I,P B##;[1XQ@F.MDP*:FH8[F"E"<S+9=.)$CH?1R.5#,UC;=K
M_:Z<9 12S0Z8UF2Q8HCCD;ABUIQHE^7IQ=3$L$*<M!8ED8D=CRQ6S0'1+^DB
MO6BP0WK8LE4[!4<>S5,1*H[@;G"73@K#7+O5KH[+$AR9/AQ))<?U?G%N165I
MO(Q5I^9\I2]78"2.'PYUU 75ERHYG>JF8YT>C@E\,M%FXL<3[91R\[C)Y6NR
M"O\WYZAX'2P^P6"'(UU[D2TMBIA!)VLE,C5L-A9Y;,4DCT?2":R'F9*YPB2:
MSXWQ(;&HCMI,ZGAD9<3'&II<:<OJ3")B^2A?Y#/^W9G]D04[GQED5JL1-IBL
M$J7!T"A+'.D=;#]@4@\;EJ-\=2&STKS%UM?THF7 MR</1TIJJV?$V,6,)ABZ
MXLBR4W3X%1AY1/IF3V](S0G)8;GD6L.J:V/9$>';,X<CNZ5)BFIDXY@L+4;#
ME9H15UP&/O.82?J"HIQE7J5HEC#<:5S,VWH='@X[)E.#Z/.<-B'HZG"5L-PE
MQYA=./)H26DY[R@=;=:G7:N?G$=GI)LPX,BCB583T:0UG)A=VDWA:<),Y4NI
M+,EDCM]NR>D49AM&D99Z3DN/);*+L4MZYR[V1[;:1-T8; @)4YL#FDEDV*C5
M%[W=S_V1O4)3F,VGZ3$=C27$6=;L5L@>W"<]6E$BOV0USFZ*6)+N+Y-#(:$V
M\O"91TQB!I8\K40!_Q>;2I>ND6ZU0,-G'JW=%(BJ,G7)O,SBLU9K$E]4:722
M9,ND2T<RV[SQ4_!B'4<OHMIL:/E)/4E+PVBUT*0Q1F=]0P:B01"AVB^,0]D*
M_-YBG<1C!!(G@J@3J0LLI W*T(>!SALM;^%I7UB"_>2GD@8WD"TO>;_F4*_9
MB&'"EL*H*_U*=Q3>3QT)P$_P=HO!8EG+$FS8.=E@)91>LDU6LZ8HJ:1(K+?>
MR-]@I+"6;.^1_P1-;,%O&B<9P#<&#U!AKHKE@2[;K"CHC@5B,5,&#P_VI;>O
M>GHN[%X,7!R87U1<[]6^_S<1[)4@:,$S#!:>EP"O E("]RO@\]0GR8G W?*O
M:2E\7;%X1_E6]I_G^NF\Y=\=#2U)@LF:W.S<>8C[/;+!<ISN:&CC2W0D'E@O
M;Y]NY[C&KG":PL*13-0K.P)SGD#P@:*I[%I2P4N1+#M>GV]] AN!HV;!DF8
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MDP;M>E=K;H$&OBV\,A'NT3!^ZSR*THO62=HFEK3#-9,]=T27NX6/FS^$;3T
M;3M4.6'I\IUB)=9KB!:5Y.4!:51+)&S EH8IDU@L\T#$L<NE3+ZYHH=@MTVM
MW!/8G3O/\LTY'$KY-A_S,Z4\Q/(?(N6AXWI-Q_4.,CA1)J_UELQH2;%YN5T5
M4C6UT5Y=VH4UM7%VGAOG>&R!Q;AI*5-GXT78%1DF:R[JPX:G6[XP6>-7M0CW
M$LZ\E["/YS& Y[SNP$8>5[%J%]ULN/I2;]UVW6QR9,VSKIV9-5.TH*_[K%2U
MG-CZ_8=,H#%^9F, ?'+*WKQMOX"MMEJJTANG::$8'S""4BE9'=C&/O;K3SR1
M>DC@X<&3$,K.>3+EZDL-CZZ$(G\1D7_V;,O5EQH>?@E%/G18;\IAO8.D"#UH
M#3F[,2=I8K3*-J-UR:B+[]_7NY3KNN3R1J=*]8>8VA:Z-4K3JFR2!*XKS)Y<
MU'>]_Z,N_Z*.ES<SL=OL%[/7M?7$[[RT_/-_X)_@+9PBL"84GYD_E2W\P2D%
M-9ZQORX"<OL% HGX3AK*(T@,\U:%9HW^_9_=R3_),^Q\JIN_ Z#>695?CI1
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MX.)$5C.)FT'U0E]#FL#*P"T23)L%LNX9#>O!^R+_] >8H>2#RVF\,!6@;^3
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M/QB62>(D$=$U"$@-(#5P[VH ?Z4&\$NK ::\YDVUQ]E&7[.7@DS6-ZMN)&K
MUYTUF$DW8^@9:C H-$O=U0B>F6*__:"I=#*-45&H 2P63M"UKNBZ1>@G/* =
MJ5=W'[SZ6Y4=WRL4CP(2E_+RXDOLU57\[_E\ =P.YZ1^K> SN_6Z-:Q8BI'"
M_4*/6]9&0^_/;U_\0,'7F$Z'S)?5J3'GB2;!89-"FX0'6*''QR9)@H[.S$,*
MXG$4Q-[LBR^Q,7<%?U-!=%;&M.K72T5A/A-&2S(EYSM$) I"J-,5H^QO"GQN
MNZKQE)MK%88:4!#P$BD\R=!(02 %@11$Y$[B;RH(49JG&9=8D,;V>>XHY=1Z
M/N(C41!&BWC.,CNI@*GNL%)9SRMMIP<5!' 1<3K)$A%ZB/>A(.XS!?B*W&,^
M+!PUJ$B'$ G^"ZYS3CBAB%RZ&"!6RW#;6.#-[QJ[7O+PYJ3&::/X@VL*+J3;
MAYS<H[!F'4Q]JSM%8S/V:B1L017F TDL24<3 $1Y@+@!XGJ)@IN3&B?LO_4B
MC4Y1L+<CLXO1HYRZ6RLKAIE$8M<]MZHEO2-MF_R67LS4AIG*YA8:P#YP_%B<
M3;)L5!>A(^3'"@X(^;%P#_.[XG22KPE-S!\)E9:\'!JF$PGRTT9Q5R-+K9Z1
MPG27M3;+7%F"R(=)/YI(4D0DR'^$I-_Q?:.7OR#@KR=ZS;9V,*=HVK"CF;Z"
M-S,$=U'"9G?:SP;Y3M @/YD82[##LAWV\UY,MRX4F[#/-T26/0G^\'+_"[P7
M$Z@*V+LYZ&P.Y#>Q[W(>O"89]!*_70^] [;.]LOC+ 7>1U6%J\(%BY+=_KPS
M0#(Y1Y7<+A2CTR9ZLKL4RJOL<X5OM(>SW2Y5$ALN]Z6;Z$F^9Q\^"%OE!9_\
M3CN]"_32RZ2?6'3B_\V)B9NT7B""/MV($3=G!/Y$H*XP<6 $^T2@/DEQ8 12
M33%A!/Y$D8@1,6 $_92A$2-BP CLB45[Q 49\9LIWU^Z#U_A\/>OML>8'._]
M1$^): SF>S_\'HWU^C57Y7&P<HG^*_'N706C?:D@W'>Q/@@?;]8WI_@"?1#0
MCG@-E,>E'<K?-&M+I^^Z^5+[4#9W$=6 ).93N\4=RTN8,D([R1^UZV(NU:T+
M;4]?2=FD_U39$ !@7[=;U_WJEM]4 [>N60D;OEX(S[<FYOJE=V'@Y>O1'896
MOA[=7U?.8=KKZ]$=9IF^'MWA#GRW=-^!20XK?54ET?$D[R*-4ZYC4=]<#5TC
MSQ'!6;4K)R)N7H%^KL5)(.IS8&J_*EF%IY1EH&(\9PO>)@J3?KJF*OV.L?5G
M+6:(K8R&%TG#2K.UGJKVH%?CY]V-ZHXRN]2TW K;EV0H-DDPD92J?Q&<?EPE
M$U.<_JJFY/YQRKEB8_)'P*Q@,V55-&N6H;/9=K/ R8QI__G)T;IMR;[C@)>&
M4<ESW0%F]K+&U-F602\:G"5@ZPQ'M<+V(0R=I)A(VDA&'GNXN9ES:ZN.]QU[
MH2)G[/Z"#E?K&'>CX,+]6E#PKR&N]DU<>H186-;JE39?R>9S!7VEEN=*)$?^
MBOZLUVTNRHQ![Y9%KN-L!:Z^#@_ZPS:?#!F=&?45L7^C0,R5L'^S@,L=664G
M8&\W-7,XT)=5OC-=E+UB5]3PSI^#_1.V63XW'I:X[-3A.Y.!LUK)^$AL<.$)
M?S)*P^QN$7\'(2G.U:5$4Y+UB2XC3_>W;+'X]J:+P#"++[%W8*5!D.TQMM?>
MS5P*D[8[983Y[BS;;PR$BDM&TI.I+]<H*I69I/A<&E,JU5Y_ODJMQ0PTU4@R
MG<R0$=IJ#Z\( L,LOMB(P$J++[%Q--E.D=\K9(OJDG<)(;?=T@R7+O='?]&1
MZ1-VVV+:F-6(6D_"YE.EFO.UD6"TH 8 =AN5Q"@,A=3N,:2&"B%N'GN+<P.J
MBZ8Q[XSVFYN$UVNY62VD=6_T/!.-?B9ECI>DLBM6UR(3><O-KZL,W@G&W1P0
M$:5&XTAJO*S BCZN3P6C@/D"7RB5JL+J;V[9^X1%M\L];R:J8M.&)&&32HW3
M1)KF .AAKTTLR49URQ8*QD5>F$T@WSNV96&W*KE^<"*_B+A>O3KJ5I73#TXD
MBFS<9YGTK:F*4=SB[CP15!WTS@UQGRKC9-,=83JHTD.A4<9;.4O<9A0UDOM_
M*^DBU9Q->B.C**XT<COO2&YC+>(8#$?0))7$&!P%(QZ@,NAZL89'1OB;4,)O
M0+I5%ZOY>I-F,.FY4U(WW9VLE2+-(G5+S[) *Q6>WVX*FEG>I7IK.8 V#=O\
M)PDB@X(.]QATN'!I]GWP)>9AAZO6]CRRAOT[&^JDZ'*)*X:/67(6HW-.WRSE
M)4JO1W)235DN&7_1-FI"+E/O&<1N7=ME6R*.!W4[3)*E4=E.O&,Q5RW+>60,
M_Z:5= +:ZKIJU^;Y:MOHIV6<*A:WDUFT%3<*-_"'G,'+@NYDRA5!3[/$/ !O
M< LV.L-VEV&I2$JE;TU4C*)2,2XMO,I)MQC3?P=VVFFEY6BM48WR=I;'*G@O
M6V"(BC1F(S'6V!'>XNI$C3)2+6[GF(PK9)I:,'^@[RDZR:91#<[U:W!B!:&K
M')B+,?UQ-!//5&<;0K%9:%4GF)X5LF5Y;)FMOVA%\IGJ;#67IN8%&</4%I?C
M.!DWLQ8'Z8#'ZI(4C6IY[C*LANHHKG;V[A%J+<\=L_MBA97QN<N\]3S1IQ*E
M9[#*KC]*KV5]D,L >XZ$]ER$EYE_$02?'II[! 2?.Q_WQ1!\8H(-YVNJK!%2
MG9_/&V2ZMY;K0BO2TFBAU:6Z>&TW-%+42E-LAJ%J2@M"%Z8I 7*Q2.+F*/IV
MA=IH'+G,=UX+AII67]<9^'ITQZ,B"C6MOFXU]MW2?0>!#-2T.K9E0A%%(1[9
M17D;9,!?!1GPSU=@*KQ3H;*V@0GTJKQ;IQO9(EV))!IA9]+/HX:=W_"$6_?2
M"[&_VL"BZJ!K=1IGDQ2&HA'QK@6**-CPR$!]$TOX#63NV,RP74@O7(-(%RH5
M<NYFVIU(@PY-WJ[VNTVS*,R?1:W@SI2L27 0H3#H0";3+.JQ<Y=!!]2V^E[#
M#K<NYGEDU?QW-M1)?>; 9-,F/W9Z0E]83S*S<:8Q52)IEE/)-Q5OU#,(;+LD
M>[N).6V2<V!)!7VK23I)$Y&49GY=\*.^U0\'_M^TRT[0OK#*U4Y)&;>%1K8G
M%<0ZGNEBD=XIXFC9G#@1U+G19S.TF5KMTKDR!U$/K#.<C>1 *@I+W64U]GUP
M!S6N1HVKKV.GG19(IB3NN2/KC2&66Y@3<<6UYMHNDJ+J6=63GDM<OX/IN>IJ
MP,\U8=?71#SH7(UC=))$13BH<S7J7!V1T78*_>*TANL=[KF/2<JF0SC/3K7"
M1UH;O3,R4Y/Q9$&@J^7L+,/N%C4G4 %!;33.1E@;?1\*X#[#:J@<XN;QMYO7
M*5ZO1]3-28VS#9C?%:>3?$UH8OY(J+3DY= PG4C2F O*-+#-DDT+\Y)8M L-
MO9H26B(>M*JF:2))$1':<U\1^JA1]<U)C971IVDR6=]5B(R1ZX_5VKPIK/!,
MI :<.O7)3<M(U_F^;R^70ZN13N\XB/FP:12;2:/HVWFC[A]/ H+ZX[ \=7\.
MWBC'9J(7A(=N@;=XWTGZ[;RJMJ6E3'VE*@DID# HWJ[N>@E[DEC F++C;9.)
MA2E97@* (Z$N?7T!/9IDPE+!#_C9_IM@-OX$2)CO@*<!$4_H "B.)9D)WU6#
MX4^)!GA@L%FZX*^)XP#C\8M_/@F(3S+A I%W@S<!$E>ZK"9L1Y,L?1<^Z>U3
MPUCX\?-^]8"K+7=<Q: 4<@JN!F"7$UH8R01 OSP%2RJ;O@+>IFX6MN/M5W/B
MV/.$\-1Y>LVM!/@7I$D'0SP;BH$*U$E"]EV@3E1GSX7@">/MRY]=?^SJBBXY
M^IY/8T>RY*GJ@CE(;N*_8W7=W%XYBT Y"^[><3]\E@,*&WPG?'Q;=XWL-JL"
M2L!J&Z^^W(%+L#?EZJKWZ\=TMPOUU1-^SNMD]/YI&ITV\XS>Z@MTJ6_FEZY0
M9O.O\T#IOS$\Z7 3JDN.(X[+%M;"N7*;)\2RU*2;C5JGK'W[P::QI],00@((
ML0D9^>]/<G8!E(J8:YM*RY\9)+]<4!IF^"U*@%>^(-:>8>WOF!DG;VFJ#OQ
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M17WNS"O3\=?KEA=.)&R6)_F>??@@;)87?'+MAGKI)Q+U<7MS@.(FC1B()XQ
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M(@"GB7_/_Y,P];GN7=;%NP\&WG5RZ_I4?[TH>D3^W:O[R8%*K^I2P#Q==0^
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M$Y;JH7@Y2H>A>/FM/;*&-U6=EX\LK03Q>48M+Z297,S5F@2FBAF%\#6/+@Z
M6B:A<T8D<3JJLJ8O ?"O&3'_8@"_C;_U68!SDWIOZLU3/8RH;PC7=:A&V@X
M#D^P17:S.TJ(/2R\44+L"K[49^'M=["ATE2*/M9?S\CTHM_:+68<A#=PJS*H
M!>3]I<.*I6JW!/O@F[Z+DF$H&?:@D?!'\\,^4T=>U$U/?[=.G,P(JN]15)=7
MM0(IM11):9 M$:>"PL2HKIC]JIHA=H! FN%!';B_UPPZT4V+'%VJ82G"5*G1
M>BDPQ374#/#*LPC[]"/-$ = H-39@_I^?Z\9"&F>\?-3MR<4A?*Z[NG5U88-
M; :85<.BZEQRMWKA#E)J^WL@4@H8NE(5X D"*=;@R</]Y6@H_HX2;#&.OS]
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M Y-GWC:96)BP]PV0\(2Z]/4%["F/XCW("7P$)_!.;+!WXST'D#8A1($NYP\
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M3QB!$G&<+5C;->"H&P7W3Y3"GD_B2]"8\[VI[0 [D]OHK@C5KEA0@2LGF;6
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M7!2@C2 MX/-C3S,, 1Z[^T=3A@3!>4K!3%,!J7N;(@&,KD^\U 8" *-/>YF
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M&+BECG"D@]V/9&ZM+4MU%GJN^WM4TC1EQ=KBL-+88ON']VV2K;/[1E$O+I3
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MLQGNM 2P)CQ!DV9J)EU<='+7! J1"&.X7I+(C%\*%_]68QJTI5 &4^:TJ"9
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MW?W^*IKZMIXKYOVW1-S73H[^!U!+ P04    "  <>%Q8CV<B-F<)  !#-P
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M+0N5GURD07(K9D"]M_I-)' =Q<IFP_4A-K4LZG9CE=M@S*="+J+G(S$%PS[
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MX2%U&YK$Q"LB[Y[<!O\#H@6Q*I4DI2;TM5C,>I=392RVHZU^[,C@LK,_2F1
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M<IZ@"9'LGBKN*WR#A!+A^5S&W<=;?&EEOE@7\4P:$4E9,O=>CUA*"[BF4_C
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MH,MYXA<\0=?KJC[X$2C;ZSS7>]/*2IS\1M\J^_;J6X:;+*(U;)HMY\4 SVB
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M,#(S,3(S,5]D968N>&UL4$L! A0#%     @ ''A<6"A"H[G!GP  >60* !4
M             ( !"F\  &%C;',M,C R,S$R,S%?;&%B+GAM;%!+ 0(4 Q0
M   ( !QX7%A'?[CHIV8  /1K!P 5              "  ?X. 0!A8VQS+3(P
M,C,Q,C,Q7W!R92YX;6Q02P$"% ,4    "  <>%Q8XH_#E69N @ R&Q\ %@
M            @ '8=0$ 86-L<RTR,#(S,3(S,7@Q,&MA+FAT;5!+ 0(4 Q0
M   ( !QX7%B9S%6/5P4  &49   8              "  7+D P!A8VQS+3(P
M,C,Q,C,Q>&5X,C-D,2YH=&U02P$"% ,4    "  <>%Q802NO'% )  !+,P
M&               @ '_Z0, 86-L<RTR,#(S,3(S,7AE>#,Q9#$N:'1M4$L!
M A0#%     @ ''A<6(]G(C9G"0  0S<  !@              ( !A?,# &%C
M;',M,C R,S$R,S%X97@S,60R+FAT;5!+ 0(4 Q0    ( !QX7%@@%ZODA 4
M . 7   8              "  2+] P!A8VQS+3(P,C,Q,C,Q>&5X,S)D,2YH
M=&U02P$"% ,4    "  <>%Q81ER3=M %   -'0  &               @ '<
M @0 86-L<RTR,#(S,3(S,7AE>#,R9#(N:'1M4$L%!@     +  L [0(  .((
$!     $!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>103
<FILENAME>acls-20231231x10ka_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:acls="http://www.axcelis.com/20231231"
  xmlns:country="http://xbrl.sec.gov/country/2023"
  xmlns:dei="http://xbrl.sec.gov/dei/2023"
  xmlns:iso4217="http://www.xbrl.org/2003/iso4217"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:srt="http://fasb.org/srt/2023"
  xmlns:us-gaap="http://fasb.org/us-gaap/2023"
  xmlns:xbrldi="http://xbrl.org/2006/xbrldi"
  xmlns:xlink="http://www.w3.org/1999/xlink"
  xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
    <link:schemaRef xlink:href="acls-20231231.xsd" xlink:type="simple"/>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">acls:AllowanceForDoubtfulAccountsAndReturnsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_Q9QhiFBD9UypWV-wU4smdg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_34gSCZl-h0errxThK-8WCg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">acls:AllowanceForDoubtfulAccountsAndReturnsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_MdUgjQT3H0-8E9eEhKTIDQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:ValuationAllowanceOfDeferredTaxAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember__5vZm9qvmEyx4PGXJ2sJsQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_T1p77pG58E-62u-Xc6gndQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_aK2DEoB7_Eu88P7tq67wFQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_01MGxzKcEUWC9Vo419xZWg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_hTJUKZ2N_0S-6GH-oOyPOQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_V5F4suYLbkumL7sSh8HPjg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d27L0mnm8E6o0EBrLLjx4Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kkl8hIe8Z0WWHl_h4FC_PA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_lBvELhaCnUmktQXJBN6FVQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_EBneyNXtHUGp6uxp51hi_g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1vzZGp7IfUeAUTS7-QsIMw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_Lgnhf3xLCEGYzqAk3hvIQw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_eBavN9PHeUuERox8GtAOSA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UelRMQl0h0KQ-w3QHBxk5w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lT-MAUt2vUucO6TyYUISFA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_-_DnTv_YvEaDkQKe7LmNQw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Cj73mXbaM02Io4RY6pFEpA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_VEarHxZha0mjyeIA0BFTiw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:UsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_KNDxXdNZpkydy7gB3tHtqw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_uOkEC3DECUKHo7vPylY9jQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Rz3ajLtnREywZskVvE3Fmw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_hpz_xxymo0GvoQRlITpX4A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_ueAU0cUZWkCEoZ57czvWIQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_b4oP4P5xgEGsQW04yyL2vA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_vmAw9b532UyKEU9Sr1y8pA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_qkh1OMbVZUyknnxw8G32NQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:NonEmployeeMemberOfBoardOfDirectorMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Vgn0ucnjykmLprXk3j_aGA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:NonEmployeeMemberOfBoardOfDirectorMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_r2QDj_WbGU2MXA9cI6rdwA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:EmployeesMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_SfoAMMye2UK3lNLxNdJrFg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_country_US_UfW5MedWSkyujQ8Y0vkOtg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_7zwwQYKndk-1uFVAqMZYtw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_b0GGpw37D0OVb9OFN51NQg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_95SUhXL6YUOJ1QCn_y7deQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_SvkhLuNIGUmjUZq3-cDS2w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_IB6EAoZ92EKVMdwKs2Dl9Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_dErK4Bok0U6vJzw5OBG6Kw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember__am58s2p3kyHmrdJ-wmZEw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:OtherProductsSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_8JwEleVAokWgoqUc3NxvTQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:IonImplantationSystemsServicesAndRoyaltiesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_NorthAmericaMember_JoPVnkw3mEm1Z6YC7LnFwg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_NorthAmericaMember_5SbsYIuKTE2oNfT3jl9X4Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_1bP-k2K0dEaaZvALjQivWQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_AfterMarketMember_JgLLb3ZvXkGxmtgfnUlokg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_CWF1GuDdgUmVH9UkggHm3A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_0SZ6e4zPJU2wVRZHZ2ZfQA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_AfterMarketMember_R3xczBeiI0u4XJaxTbqZqw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nbAeeKDfx0y_WvsTR2GHiw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember__L6CjCUYgkC3tvk_zUvMVA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_uSoKKtTL3EeayP_UYwb4aA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">us-gaap:AssetUnderConstructionMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_hukGzR6rT0Sv-Xpf1xySNg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">acls:CompletedInternalUseAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_6BiqVHo39E25KiWhAgwHWQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">us-gaap:AssetUnderConstructionMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_9EIzoIV5jku9H0iOx7c2eQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="acls:InternalUsedAssetsTypeAxis">acls:CompletedInternalUseAssetsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_sUEs6zlqCUiqrDtxx8jTkg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_by3yUhzzMUOHGUmsw6NmdA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_34ulAvTgIkqsxw-o7sAllQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:ConstructionInProgressMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_BJ81Px-3jUOOdA81zS1yUw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_rLpWCJ1ySU6lbxpkZu3LRg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_5qFeDvcA_0q_U037-XKGbA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:ConstructionInProgressMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_Rs_z9QPg402tAph_TIU5fg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2015-01-30</startDate>
            <endDate>2015-01-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_MVnzW5NrJ0qmvFlQgL8X3g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_Iw5yocB58EylycBimPDlAw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Ekmsr9scYE--R8wCcnElug">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_pMa3RwqDJkqzoCPJs87n0g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_9fes20YJ4Ea1NPN1ZK-OqQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">us-gaap:ForeignCountryMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_qjTxbwBIV0alaooQFCEIKg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">acls:ResearchDevelopmentAndOtherTaxCreditMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeTaxAuthorityAxis">acls:FederalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_1QQS8yEFjUib8d8knVG_9A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_w8rDIieJWkWfpWIiv4XSUw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_NQsL3qslNkeZfRsITmZe9Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_QSwl2AmY80adkhffvz0gCg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_bXVg4s95EE6tnCE0idB63g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_DMi5sb8OTUuT5keU6YBerg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_4NfHaW5CA0yJLxDy_YXdhw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_rglxkDWFOESLtoer65iEHw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_0bkVSRvn3EaEnUCrA02baQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_v_arZAXy-EqBQBV34KuibQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_IIxy0K8yAk2AND2S5bQL0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_MwkElhV-1UmpfvM7cwqj0w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">acls:ProductOrServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_RPglYXiqLEShpJtGT_g1Sw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VFBGeqEs2UCyy68A5JWZfw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_StatementGeographicalAxis_country_US_K0jdvGlMnki9BRPFAc8loA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_LwLoMmDLRkW5c14GGyfjfw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VkUGPFQLf0iBUBJcbnlQtg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_QN_LDNP680aHSIexTzcgIw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_pnJLSIdbRUOBVaF_N17T0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_GhM1iSAHW0adxS2rHrLKEg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaPacificMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_z97YRF5psk25FKK3ms7RSQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2024_To_12_31_2024_srt_StatementScenarioAxis_srt_ScenarioForecastMember_MJ_ZopQwbUyFzH4dIn7oYw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementScenarioAxis">srt:ScenarioForecastMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2024-01-01</startDate>
            <endDate>2024-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_4_5_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_kkaSLd1LM0C9esG8HkUCVA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-04-05</instant>
        </period>
    </context>
    <context id="As_Of_12_28_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_ua0-Jcp4OUSOLk7dWfem3A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-28</instant>
        </period>
    </context>
    <context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_i2-EYNNJA0eUS-xr5rtGOg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandAndBuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2015-01-30</instant>
        </period>
    </context>
    <context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2015-01-30</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_c5IOe__eWka7z2RDpzRfUw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:InventoryValuationReserveMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_GLWI7xYFXUmyD_aD5jx5nQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ValuationAllowancesAndReservesTypeAxis">us-gaap:InventoryValuationReserveMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:SaleAndLeaseBackMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_mZ2W82yrpkiUQ17ZsA1AFA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_HDapt1gSVkub8a13ACadnA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_yyaUwrTP-EmOHl3wwJZx1w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockUnitsRSUMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_RegularEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_RegularEmployeesMember_X9LY_jFt8kaVFHrGbcG7ug">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:RegularEmployeesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_TdcImKyWREecvPdfWIEV-g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:HighlyCompensatedEmployeesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_WuYsBe_SrkujPEA1yzkt9A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4_x4EoJBaEiVAs7iwP-0lw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_zQ2Yn7utxkepTZdtD-MnNQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_Htd3q93xik6sWxKXUBlHVw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZvANrIAgnkGmVedWUzRlvQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KE7gAbB4B0-02qOjDlgwyA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">us-gaap:NonUsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_QoC2-fOGDU-wmEBEzv3VFA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_6qqFwdivGkiYvjlyTVTwCA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2012-05-02</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TzKiNwwh-USWhz8io11ABQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember__LfbETs_4Eyj_dMwV2UpJA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_urRrssC6x0WGz17x6E4Hvg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_mavXQ4xISEaAsWrZ0L8ZhA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Kw8meW5Ew0CwJoeC9iNRTg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_NNvZ4Hd_I0aMDgcN7QbpFw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_lsl0Qfi_V0WmHE7FGXZAiw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_m6CBlDItoUGdcd4Vqk0hnw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_TuSaOuIuF0-JMXXG4noSTA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_DEhEBCwN6kWhhs5ipCNeIw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_qoXIVx02EECBqzy5LRssRQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2023_5vHyfFaCY0GB3vehhk8X3w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2023-06-30</instant>
        </period>
    </context>
    <context id="As_Of_2_20_2024_dTjYacuAZ0yp8toLy22bhA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2024-02-20</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2021-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:TitleOfIndividualAxis">acls:EmployeesMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:EquityIncentivePlan2012Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2012-05-12</startDate>
            <endDate>2012-05-12</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:AssetsManufacturedForInternalUseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_DwurvAbnrUK_uQzfnlVyRw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_TivY9CKrdEqLO9QwWaSgbg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:TaxCreditCarryforwardAxis">acls:ResearchDevelopmentAndOtherTaxCreditMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_CTeQSjjQTkinayDXQEOAEQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:AfterMarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_9pxK086imEWWaL_mWlkxGA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_4rCodVjYiE-faP7-OqIxYA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_j9APXSaQMkyZFdzuTWJQkw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:TenLargestCustomersMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_u_36UcX1uEKf7qb2wqp-Dg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2022-01-01</startDate>
            <endDate>2022-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-12-31</endDate>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_xdayt9hO7UeoxVaiKsu3xQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2023_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_UWPXctNjAU2YwBO-MipMgA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2023-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FcTXrGNUaEORf0WBQjUsjA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel2Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_0pN4ZKO8KEG3rNUdHqr_YQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2022_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_dPFQa6Iz_0yI2V8uS_VTkg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2022-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2023-01-01</startDate>
            <endDate>2023-12-31</endDate>
        </period>
    </context>
    <unit id="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">
        <measure>iso4217:USD</measure>
    </unit>
    <unit id="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">
        <measure>acls:customer</measure>
    </unit>
    <unit id="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">
        <measure>pure</measure>
    </unit>
    <unit id="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">
        <measure>shares</measure>
    </unit>
    <unit id="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">
        <divide>
            <unitNumerator>
                <measure>iso4217:USD</measure>
            </unitNumerator>
            <unitDenominator>
                <measure>shares</measure>
            </unitDenominator>
        </divide>
    </unit>
    <unit id="Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw">
        <measure>acls:segment</measure>
    </unit>
    <us-gaap:CommitmentsAndContingencies
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Hidden_RuVtRbialUakhzuY5veBMA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw"
      xsi:nil="true"/>
    <us-gaap:CommitmentsAndContingencies
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      id="Hidden_os9b_gA92E2W-iJwFT90CQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw"
      xsi:nil="true"/>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ"
      decimals="-3"
      id="Hidden_A-jAczExMkm5p9RtnsLWvQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ"
      decimals="-3"
      id="Hidden_KXlZ99tkb0S-UOmjIwfd_A"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A"
      decimals="-3"
      id="Hidden_IQX8aidHR0yp0Ml9ZFjnUw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Hidden_aJBAIjRPr0W6jnAzBiK7-w">http://fasb.org/us-gaap/2023#OtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Hidden_Xj95x6arJ0qR_QLqp0sQGg">http://fasb.org/us-gaap/2023#OtherLiabilitiesNoncurrent</us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList>
    <dei:EntityRegistrantName
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Hidden_cxFq7T_CJ0SSzwsOE91ATQ">AXCELIS TECHNOLOGIES INC</dei:EntityRegistrantName>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Hidden_anCz2TIc-0WfgFdz1LK9Aw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32685000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Hidden_y4iAAkQixEqXhH4rkQdrXQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32775000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_i2-EYNNJA0eUS-xr5rtGOg"
      id="Hidden_zehA9llnJ0iptBHcvR7uFg">P22Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <acls:ExtendedProductWarrantyPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw"
      id="Hidden_tZFax8B4REGrwjj6O781Dw">P1Y</acls:ExtendedProductWarrantyPeriod>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      id="Hidden_4WmvFNfdLESy1k-c9Ty0ow">http://fasb.org/us-gaap/2023#OtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      id="Hidden_wOYBbjMi40W2UbMQy9eAbw">http://fasb.org/us-gaap/2023#OtherLiabilitiesNoncurrent</us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList>
    <dei:EntityCentralIndexKey
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_PdSqK02ItkSs4KzlmTkGzA">0001113232</dei:EntityCentralIndexKey>
    <dei:DocumentFiscalYearFocus
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_3BSSus7SH0WlsCUhOs0EUw">2023</dei:DocumentFiscalYearFocus>
    <dei:DocumentFiscalPeriodFocus
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_dpR-AWEKtkuIiLiNOYGvFg">FY</dei:DocumentFiscalPeriodFocus>
    <dei:AmendmentFlag
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_X_XDwXJyG0qhWhdKkvLCMw">false</dei:AmendmentFlag>
    <dei:DocumentType
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_sqBOdSGGZE2lA-L_fexggw">10-K/A</dei:DocumentType>
    <dei:DocumentAnnualReport
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tc_BeUrz8Xiwk21BES5-AU6VA_1_0">true</dei:DocumentAnnualReport>
    <dei:DocumentPeriodEndDate
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_xRMQ9-TQAE-LVDNjUAUN0g">2023-12-31</dei:DocumentPeriodEndDate>
    <dei:CurrentFiscalYearEndDate
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_PU_Y6ogIskGwlNtdk0QsZA">--12-31</dei:CurrentFiscalYearEndDate>
    <dei:DocumentTransitionReport
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tc_ABSqhZO860qYatnG6RUfOA_3_0">false</dei:DocumentTransitionReport>
    <dei:EntityFileNumber
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_pWWXkrodwUuU05dObACvoQ">000-30941</dei:EntityFileNumber>
    <dei:EntityIncorporationStateCountryCode
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_29ivor0FiEWRKO94cMKxzA">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityTaxIdentificationNumber
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_1Jo2_-FW8Umpma7nsFNXkw">34-1818596</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_fxvYJQJdS06r4dEaPwUrJA">108 Cherry Hill Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_at5btn9kkEW_VzVbF-IRPw">Beverly</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_cney5IFScUOUJaq1I4ldeA">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_-fme9cmKlkG6zTX0FlcAgA">01915</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_5ArevmzLX0WnOvL2Wz_ELQ">978</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_t14URSdqcEKFimtr3iDZIQ">787-4000</dei:LocalPhoneNumber>
    <dei:Security12bTitle
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tc_0RgS-gQ8YEqBCH8zjKc7-w_2_0">Common Stock, $.001 par value</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tc_iXstrBXH70aVZDNReX9kag_2_1">ACLS</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tc_-N7WNu543kOgAYVDCQodcQ_2_2">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityWellKnownSeasonedIssuer
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_8yj45SMY7EexZ5ORT8O8uA">Yes</dei:EntityWellKnownSeasonedIssuer>
    <dei:EntityVoluntaryFilers
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_As0kwwO4s0mf5vtnJx7KnQ">No</dei:EntityVoluntaryFilers>
    <dei:EntityCurrentReportingStatus
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_mF67qq3p90KEJNrzmFtIQg">Yes</dei:EntityCurrentReportingStatus>
    <dei:EntityInteractiveDataCurrent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_gElEfu_oP0mzP3TRhihcxA">Yes</dei:EntityInteractiveDataCurrent>
    <dei:EntityFilerCategory
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_kJq5MQheg0CoBMRsFLGVeA">Large Accelerated Filer</dei:EntityFilerCategory>
    <dei:EntitySmallBusiness
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_GkxTCTF0bkK9Rwa2s-DRLA">false</dei:EntitySmallBusiness>
    <dei:EntityEmergingGrowthCompany
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_fssWjSeeQEWa77qOmt1U4w">false</dei:EntityEmergingGrowthCompany>
    <dei:IcfrAuditorAttestationFlag
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_JP6AZUpKuEaH0uIxOOEiGg">true</dei:IcfrAuditorAttestationFlag>
    <dei:DocumentFinStmtErrorCorrectionFlag
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_MxW27812GEKHI5wEXvQ5Lw">false</dei:DocumentFinStmtErrorCorrectionFlag>
    <dei:EntityShellCompany
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_BtrxR3XUKUmhfPRQp0ErGg">false</dei:EntityShellCompany>
    <dei:EntityPublicFloat
      contextRef="As_Of_6_30_2023_5vHyfFaCY0GB3vehhk8X3w"
      decimals="0"
      id="Narr_1Dns9QrhJkGGfZKnVBoPIw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5962466683</dei:EntityPublicFloat>
    <dei:EntityCommonStockSharesOutstanding
      contextRef="As_Of_2_20_2024_dTjYacuAZ0yp8toLy22bhA"
      decimals="INF"
      id="Narr_DE75xtXyOEyud9fl5usSAA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32625760</dei:EntityCommonStockSharesOutstanding>
    <dei:AuditorFirmId
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_BFqWdJDDFUuwMTnq5bpg1A">42</dei:AuditorFirmId>
    <dei:AuditorName
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_PrwN_w9qWU2-wxTl25ho-Q">Ernst &amp; Young LLP</dei:AuditorName>
    <dei:AuditorLocation
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_sA1WT_IGqE-cHOlUnClMwg">Boston, Massachusetts</dei:AuditorLocation>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g"
      decimals="-3"
      id="Tc_sNgQNkU7FkSTPxzWPDaUbA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1095650000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA"
      decimals="-3"
      id="Tc_PV-EEJKm2kKs0mmZWQQ3OQ_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">890582000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw"
      decimals="-3"
      id="Tc_f9u_gqNLSUGm3jUGXn9CNA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">634445000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw"
      decimals="-3"
      id="Tc_6BuZxf66dE-tI7sxEMkzYQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">34954000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA"
      decimals="-3"
      id="Tc_qSQ-ANVwFU2RyIqkp8H6mQ_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">29416000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ"
      decimals="-3"
      id="Tc_6tVLkhP5Bk2Zzc3rlvgDiQ_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">27983000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_gbjZhkfvbEadpD4MZz-HJg_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1130604000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc__O8XaQr30UmGJDVmpMsxKg_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">919998000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_qSQIZBXlEUKUuNUsEMloGQ_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">662428000</us-gaap:Revenues>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_us-gaap_ProductMember_kyKo7sdHK0uDNr64L9Bt8g"
      decimals="-3"
      id="Tc_Zc5i-8mfRUWXQi5f-vlrSA_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">608112000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_us-gaap_ProductMember_F3jlk0qnO02pkXHnKWaFVA"
      decimals="-3"
      id="Tc_8tC1SisX9EmIwjFe4KaSng_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">492104000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_rk67Lxm-a02dyD1hE8Cwsw"
      decimals="-3"
      id="Tc_0oXuuqORXEiEUZ0SwR_u_g_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">349558000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_ServicesMember_fzt_ohf9NEqacXLo9yXpOw"
      decimals="-3"
      id="Tc_2mrHCcxh2UOJFykATlJBrw_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31191000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_ServicesMember_RjWiuwpcOkKE-N_lcHV5mA"
      decimals="-3"
      id="Tc_TJ9indn3P0-69QAyScLijw_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">26104000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_ServicesMember_kxqoKVq430qNUtVI-vrzzQ"
      decimals="-3"
      id="Tc_NzvR3vAoBE-kzEIk92HgWA_10_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">26425000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_sRtk76wU80KKhlQBTPwM-g_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">639303000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_zhqmQ-xXGk-3YJ8jcrnf_A_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">518208000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_wdzIUm-nl0WFZoSnK9wUpg_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">375983000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_zytitxkYZ0mhZShG_rlKzA_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">491301000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_yuw374jq60eLS1G1ed5xPQ_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">401790000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Z9i8HJQucUuLgVFLdhBgsQ_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">286445000</us-gaap:GrossProfit>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_TJbVLUqH5UGfQAU7GlRbUg_14_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">96907000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_fvx0XUOXpUij_sMnJShFWQ_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">78356000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_LVsigZeKPESvLuvIgVry5A_14_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">65431000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_wYUrKtiVhkejafpWMBp_Pw_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">62805000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_z2CrowIGJk6F09aHVudcjQ_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53599000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ZicuEm4EVES20TQFBCo8cA_15_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">47548000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Ra-jQiLCJEuGJQAn0MXvkw_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">65794000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_2-KqKuWsh0CHPgXWg7X-oA_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">57474000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_xvZqHD6qQUKPkC9f3EnHmg_16_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">46141000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Ehao_kcH8UCjgJbsR29C7Q_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">225506000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_gNWVguCtX0aAEy0wPYhjTA_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">189429000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_butQxQ5UbUWCEs-ttSZv1w_17_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">159120000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_RkdhFqiOH0O1mRH-R-Agzw_18_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">265795000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_Vp3EZaarREyWOFs2szSxvw_18_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">212361000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_DE1lfuYvDk-8Zh4l48dkIw_18_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">127325000</us-gaap:OperatingIncomeLoss>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_JPtzeQETGEyJj_n1JF3Vcg_20_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18199000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_viNjIDr_jkuKT1YrqDj6wQ_20_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4551000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_oBveIht8kE2AzpISx2N90w_20_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">209000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_g2frzK0BFUSJWfq1eP2yxg_21_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5347000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_2eW68htPq0O4hTncL5dhjA_21_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5576000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_0gz7SGLqGkqhd2SSCWHOPA_21_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4835000</us-gaap:InterestExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ETdS2SJmYkyd5iuwqIIPqg_22_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-48000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_tqsU0f7XU0al2bRNszA84Q_22_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6451000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_mLjwMxpANUOI19Dw5KGNiw_22_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-2271000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_JKltJOOpskGdeKjckwZ9Bw_23_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12804000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_Db6ceXw9NEC6w-8i6A8REw_23_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-7476000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_tkSxrHvuUU26mC4Ug2ce0A_23_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6897000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_rBrV2oaaJE-Eesq90p-xlQ_24_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">278599000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_SfYyIG1RPUKmgGKgHNhokA_24_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">204885000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_vSsh6rHLi0OYNuNjzs2tRA_24_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">120428000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Fp5yuJM2VUW51JPoBOsFrg_25_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">32336000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_7ie56CeCfkSbVOUYn7u3Ag_25_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21806000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ShbmKbWkM0GrD_U-QRzN3g_25_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21778000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_XOkoCJEC3kuLo9fQpqaWLA_26_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_HBP1hK75QUu5OArRG55dqw_26_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_PEBZNkUbvkyGwaH142Pp_A_26_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Tc_vN7OwOxyt06hiT7AOtNx1w_28_3"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">7.52</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Tc_SejRcduUMkGvyLihDhJT3Q_28_6"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">5.54</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Tc_u1mipiDwgUGVQvhdWuxiTA_28_9"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">2.94</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Tc_oPd7k3mOJUuzlIjS7c-yow_29_3"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">7.43</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Tc_SVfWb8AI0kCwzn7Wam5Nfg_29_6"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">5.46</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Tc_gkertJlKPk-O8h-Fd9rG6A_29_9"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">2.88</us-gaap:EarningsPerShareDiluted>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_o-olcCAzI0KLpp-lipAOBw_31_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32758000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_raiqEG6znk2YGCCcRqi4eQ_31_6"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33043000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_IBU1geYCekyn70zhQmTuYA_31_9"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33555000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Y3QBezTTgUuDCZUDlp3owQ_32_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33165000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_MqnUZ3Og1k6o8UofhOvC2g_32_6"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33542000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_BCfosUtvBUKseumf5y7hEA_32_9"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">34268000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_wbNJ_2f_RU295jLAcCzxBw_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_K3YQt8kpZEaAqhz0sgpFFg_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Ur9yvbgTk0e2Ze4EyJXiPA_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ISRQpfknUU-2us6RYl2smg_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_J6b-ZqOW4UWMMbegZ3QTaA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-4058000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_BWgeNdtjNUetnK1iGd7ALQ_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1881000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ZNwbozzAvUmCXGpVbuxaaA_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-84000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_IABzTeR8rUmQO6DahSMvew_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-325000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ik2cSj3SaEeNcJJq1wbo-Q_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-211000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_22DsxBzjkUyXznhpC4LYiQ_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">122000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_wrxS3R9AHkSUjJt8HJiqUQ_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-3733000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_UiBTPg-R_k-dKHYUwNQVeQ_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1670000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_b5pWfqU_k06UH41oswIZ9Q_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246385000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_bv06VuYZZEWB4wSH2D5x_A_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">179346000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_-qxkfbqRYk2IBJ0j9NsAzA_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">96980000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_WsMBfRzMikmISykIvIfd6Q_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">167297000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Y0c2tWhe10uIqPkVqhKHyg_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">185595000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_iAxmlgeqL0Cc5bw15rRJDA_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">338851000</us-gaap:ShortTermInvestments>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_zDL2sEysJUGuEjeecUmcbQ_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246571000</us-gaap:ShortTermInvestments>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_enYgMB6rQ0uuY74_5Kf58w_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">217964000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_FiDUT_1IzEW021vcrVz7EA_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">169773000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_AdYARwLYDk6vvW1f1dZPvg_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">306482000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Kad8ZaM81UefeZWiSCOHnw_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">242406000</us-gaap:InventoryNet>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_BvqhvULvcEuFxkjABd1vlw_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">49397000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_WRe_XkTZOUywJ546RX6dIg_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33300000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Z_oyRgymOkOZ_o9pKvz3zA_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1079991000</us-gaap:AssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_1dNqWJLUOUO4zjqZfmz2yQ_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">877645000</us-gaap:AssetsCurrent>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_oTE1tYb0OUSB62alyjMUpg_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53971000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Ckqx4m196kak8w0MHXHc6A_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">39664000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_EZrp9L9dkkmkN4lP1XBoMw_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">30716000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_H3zUR7yG-E-G1AIqUuAvkg_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12146000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_4dLmUvMQo0-O6WiNrom-qQ_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16632000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_joxUOt4Urk-gS-dCiE0nxg_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">17942000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:RestrictedCashAndCashEquivalentsNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_z6jiNFH1SkGICiyrOw0L3w_14_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6654000</us-gaap:RestrictedCashAndCashEquivalentsNoncurrent>
    <us-gaap:RestrictedCashAndCashEquivalentsNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_rPn-cJgw0kqfKTmESX3VQg_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">752000</us-gaap:RestrictedCashAndCashEquivalentsNoncurrent>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_TsEmyu6AX0am_CvKEacOrw_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53428000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_CIc_tIzqOECZvE5EBkXf1w_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31701000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_mBsbHw3frEmnc6VgDOxIrA_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">40575000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_KVGHkGY71EKvcwjsc4rklQ_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33791000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:Assets
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_kEkhQb_D5kOAQ-JqVYWzoA_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1281967000</us-gaap:Assets>
    <us-gaap:Assets
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Q0G1ZAG4zE2raK-s6owmBQ_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1013641000</us-gaap:Assets>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_2kxRnuChkU-fbukU-V1Ewg_20_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">54400000</us-gaap:AccountsPayableCurrent>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_FLoqek3cnkyMCfKnWbF5Lw_20_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">62346000</us-gaap:AccountsPayableCurrent>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_lcijb25XFE6djFzsmqReCw_21_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31445000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_h-1V57PrHEu7t0zwtDT_CA_21_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">35540000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_kg3YixMFx0KNM22gyC-i3Q_22_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">14098000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_ZE3PgA-bEk2GtLRlKZkVLQ_22_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8299000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_UOAML0jSYkS1uTNDWUj5SQ_23_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6164000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_01rZqmvJuUSaK-NzjjUw_g_23_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4304000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:ContractWithCustomerLiabilityCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_yDlyhDaEtk2EroQPHU3fIw_24_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">164677000</us-gaap:ContractWithCustomerLiabilityCurrent>
    <us-gaap:ContractWithCustomerLiabilityCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Q3HA_oUHZUCxUe9FhkFeUA_24_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">123471000</us-gaap:ContractWithCustomerLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_SVsSx3p1806HgPL_ubcdCg_25_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1511000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_LQTXXL-dV0KwJr9akcm0Og_25_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1229000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:OtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_-s6RLUWICkOmlmr08tgFqA_26_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12834000</us-gaap:OtherLiabilitiesCurrent>
    <us-gaap:OtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_-R9CX9CnYUad1ATut_rlTw_26_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12943000</us-gaap:OtherLiabilitiesCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_bQ9eSy4cYEWvCVKyWwLHHQ_27_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">285129000</us-gaap:LiabilitiesCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_emdFRuH6XkOKBmmOgOCwTA_27_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">248132000</us-gaap:LiabilitiesCurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_C_zgG9r34Eu53rEAqIJaHA_28_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">43674000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_pHyWmbZT7UCNL4kWm2_p5Q_28_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45185000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:ContractWithCustomerLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_aAx6r9HEx0mjtlnPAwW7RA_29_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">46208000</us-gaap:ContractWithCustomerLiabilityNoncurrent>
    <us-gaap:ContractWithCustomerLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_q-o6YfnfskimLwXF4soidQ_29_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31306000</us-gaap:ContractWithCustomerLiabilityNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_d0--RP018Eu2Dw_GM2cqPg_30_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">42074000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_WeJTRit_-Ei_dWBzxnNJLA_30_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21762000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:Liabilities
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_98dKdSffS0a7DXYR02W_TA_31_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">417085000</us-gaap:Liabilities>
    <us-gaap:Liabilities
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_0iH0xpMd-E2Pzh1qRzV2rg_31_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">346385000</us-gaap:Liabilities>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="INF"
      id="Narr_ukBsf_qYsk-QVejcYJaOqw"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">0.001</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="INF"
      id="Narr_mC9L8Nk8akasSsSKtu50pw"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">0.001</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Narr_3qVvkoTRgEKu8E-v5bGjQQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Narr_AXTi9faETk2I83ObM5QOzA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Narr_9J4H5adl2EGP6uPg1T_Clw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32685000</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Narr_aEGH9IbMs02YVDCdVKcs1A"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32775000</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockValueOutstanding
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_LPQSmqdGEU2khSg3bp77zw_34_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33000</us-gaap:CommonStockValueOutstanding>
    <us-gaap:CommonStockValueOutstanding
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_h5WBUXO2fUKiAP2J_jtZzg_34_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33000</us-gaap:CommonStockValueOutstanding>
    <us-gaap:AdditionalPaidInCapital
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_fkqGbh81MEuo96Na-zn0-g_35_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">547189000</us-gaap:AdditionalPaidInCapital>
    <us-gaap:AdditionalPaidInCapital
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_hWpNqioGd0KrA0wngOPRhQ_35_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">550299000</us-gaap:AdditionalPaidInCapital>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_rFC8B93PZkWdzRk120k3PA_36_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">319506000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_QSEFY9oF2ketR46EPlWPgw_36_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">118892000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_br5CjPRBSEiUQSg8EU7Dew_37_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1846000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_h3DnytopU0iBLyVCU8JrSA_37_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1968000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_mxdrLs8IQkO-GpGcQ0hOjA_38_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">864882000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_t9KsqLMXsUiRv8CFh3LanA_38_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">667256000</us-gaap:StockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_MdsH9bP0rE2h7BnOk-V-Ng_39_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1281967000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_GWii2b_QkUqzXdZH7yuGfQ_39_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1013641000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w"
      decimals="-3"
      id="Tc_eun1OmHuJ0GAaXO_xykh2A_5_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33633000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b90FmdrSyE6qfQhFdmvQ9w"
      decimals="-3"
      id="Tc_3MIAx9JVRk-2l2Ob0zXs9g_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">34000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_eBavN9PHeUuERox8GtAOSA"
      decimals="-3"
      id="Tc_9bPrKrbLskiVZidb4ocbaA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">570102000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_Lgnhf3xLCEGYzqAk3hvIQw"
      decimals="-3"
      id="Tc_Ma5MMxsKy0mWlCt5e6_fMw_5_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-91969000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UelRMQl0h0KQ-w3QHBxk5w"
      decimals="-3"
      id="Tc_8yvI_bRgek21UDWrWseuaQ_5_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3435000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"
      decimals="-3"
      id="Tc_HSvz-3t5jE-9D0H-eq6LrQ_5_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">481602000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q"
      decimals="-3"
      id="Tc_pGtjlTQjXUOKpNmoiDAVzg_6_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_KVSpWN3TGEiuWNGG43HkRg_6_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg"
      decimals="-3"
      id="Tc_BgWcQBNehUGHA0bi_TrWMw_7_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1881000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_HeVVVGU0OEuDm_JM_HJYKQ_7_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1881000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_UNhn3mm8OUqfkLub-jz4cg"
      decimals="-3"
      id="Tc_RJ2FlM5EV0ylJN8k_sFjPw_8_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-211000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_7QTNEuXQak6Tqoi2wK5TBA_8_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-211000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"
      decimals="-3"
      id="Tc_yrnCp2q7ekq_I_t-Y5JnBQ_9_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">396000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"
      decimals="-3"
      id="Tc_j7vNVlX9OEebshozp_mQjw_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3687000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_45o0PEmUR0aSUpVWgUnLkg_9_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3687000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"
      decimals="-3"
      id="Tc_1y_vaZxRcEaUDZDOOescIA_10_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">26000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"
      decimals="-3"
      id="Tc_93gPs7WXF0Oq5yP2CgTsRA_10_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1179000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_IQnZSCFrCkSk-co3XYBG2g_10_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1179000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"
      decimals="-3"
      id="Tc_sU7POqPOVEa1GKhPX_C7ig_11_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">326000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"
      decimals="-3"
      id="Tc_oQT-SYCUpkuadbmS0T7OMA_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6564000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_xSmYMmFtykqNmWPPCAtC7w_11_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6564000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"
      decimals="-3"
      id="Tc_Z-kIQ-4xSky129D1cCVqJQ_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12067000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_HLa4tKEmFUOuBDAt9vgUtQ_12_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12067000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"
      decimals="-3"
      id="Tc_QQpxbZQsN0qlcaCgTHrqug_13_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">1141000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_a7WMaXp4AE2cckWy_csQRw"
      decimals="-3"
      id="Tc_xBJpsail5kiAdhuS3B1h0Q_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_JsQZiVJSX0ilBAApd2xLyw"
      decimals="-3"
      id="Tc_xoqEwD2_K0mZLC9YqjowsA_13_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20588000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BDzS92Nan0SzIvlit5ri3Q"
      decimals="-3"
      id="Tc_6F-1R1cRmUWEcgVVd7HGMQ_13_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">29403000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_g4nZdlUjKku__QvL0dvKPw_13_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">49992000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw"
      decimals="-3"
      id="Tc_OqWxzWXX8kih9qm9o2NJew_14_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33240000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_AbGjNGrX2kSrwzvCAYf3lw"
      decimals="-3"
      id="Tc_CzWiWxYP9UC8I0FSfliL_Q_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_EBneyNXtHUGp6uxp51hi_g"
      decimals="-3"
      id="Tc_0qD3IxidpkeWR1uqZ_ek3w_14_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">559883000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_lBvELhaCnUmktQXJBN6FVQ"
      decimals="-3"
      id="Tc_0PCRL72BQUukanIMy67q6A_14_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-22722000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1vzZGp7IfUeAUTS7-QsIMw"
      decimals="-3"
      id="Tc_tGzYj_22t0K2bVEKNkaMWQ_14_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1765000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_3oub_Z6z-E2JmcgSUrGiFA_14_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">538959000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw"
      decimals="-3"
      id="Tc_9f-tHtmzGEasYggM_qQgRQ_15_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_Ph-zyRdsGEC8JUJGBh1F8g_15_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw"
      decimals="-3"
      id="Tc_thpP2E6ZE0-1JZ7HNA3wTg_16_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-4058000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_S8GkJI7EEEWOiiUD6AmqXw_16_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-4058000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_BZ-3rCt6oUKkD6Lq7k9CGw"
      decimals="-3"
      id="Tc_tPRpyvdMSkKxIPl26LxlOA_17_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-325000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_4OYofH9V60e9G7VFC1j2WQ_17_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-325000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ"
      decimals="-3"
      id="Tc__ktYnFlgSUG07sbUxjRjlg_18_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">103000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"
      decimals="-3"
      id="Tc_U92RrQMAT0Kj1KbOV0Sxrg_18_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1247000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_TxxCSjI3PkKiCBdV7im-TA_18_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1247000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ"
      decimals="-3"
      id="Tc_baDzkYudykuebYfnnB8_-A_19_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">29000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"
      decimals="-3"
      id="Tc_NzRU7TDoJU-cM8hkKAo-NQ_19_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1662000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_mTRjp1qk2E2G6KtWgOrbnw_19_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1662000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ"
      decimals="-3"
      id="Tc_qTH6sf_S1U-UKVlYZ1C2aQ_20_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">291000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"
      decimals="-3"
      id="Tc_34LMz_ESd0a2BzFUtFggSw_20_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-9907000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_mb9JqkrxiUOxCEU8JUhfSQ_20_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-9907000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"
      decimals="-3"
      id="Tc_VNqRsixw2ka5Az44Ah9-Qw_21_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13444000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_oS8VJOjULUuzojtyHZGUZA_21_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13444000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_clgJbuvy602Guj59RN3ZfQ"
      decimals="-3"
      id="Tc_bHV14FvSp02IJ5AiMMkhkw_22_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">888000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_k_zoVmRafU2Cv4y3BgwXjQ"
      decimals="-3"
      id="Tc_OF8AMNR5SUSJSzmIodDBbw_22_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16030000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_7GxkvWulOkKw2TmptQ2Fcw"
      decimals="-3"
      id="Tc_dtoGvmlJVUyIt2dV_Rw2og_22_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">41465000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_S7m46ntTEUK6maQ8FgQtDQ_22_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">57495000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw"
      decimals="-3"
      id="Tc_B-SK1AnYN0uZUcFVu2QFcg_23_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32775000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_LNHF7j8_UEGYXkA5A1tATw"
      decimals="-3"
      id="Tc_MZJI6i-ZkUuFCtN3W3na9w_23_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d27L0mnm8E6o0EBrLLjx4Q"
      decimals="-3"
      id="Tc_IXA1nVqU802eGiu74t0qQA_23_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">550299000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_V5F4suYLbkumL7sSh8HPjg"
      decimals="-3"
      id="Tc_kWN9T6J6Lk-UHZ-JOC8uKg_23_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">118892000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_kkl8hIe8Z0WWHl_h4FC_PA"
      decimals="-3"
      id="Tc_hwOmbAgtWEylXOqsBvjVjw_23_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1968000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc__XCrDtJwDESZ0zmVideM-A_23_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">667256000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w"
      decimals="-3"
      id="Tc__aJQBJQ_K0SLFyWpvXNAPg_24_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_GxMBTS939UGxi-b4NntmKA_24_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ"
      decimals="-3"
      id="Tc_kz489mg3zka6HEKYb6XWMw_25_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_sOLzZjFip0aFigFHyei08w_25_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_HeokuMJa90mOaYLDEtE-kQ"
      decimals="-3"
      id="Tc_Lw1EnttI20uzBblvgZw8qw_26_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-84000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_rjFIeIScRUW2du4F5HsD-g_26_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-84000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg"
      decimals="-3"
      id="Tc_ywQfp30MfEi1JfcUKYmv7g_27_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">3000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"
      decimals="-3"
      id="Tc_t66vmxlcOku9-j9YaLJe3g_27_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_JjCnXtyL80CAAiQyKjVrOg_27_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg"
      decimals="-3"
      id="Tc_5Lw5GUWHKEK097qqqB1Sug_28_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">16000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"
      decimals="-3"
      id="Tc_tCTzQhwwzkunoQB4x5hzgw_28_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2057000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_QK_Jqr49Xke3gHHML1K6Lw_28_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2057000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg"
      decimals="-3"
      id="Tc_Ot5knHhUYUqHkd1YKdXioA_29_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">271000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"
      decimals="-3"
      id="Tc_nI83hwT4t0iBda6s3M1eaA_29_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-16611000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Qmxyeigw9UqVewtGAgPSbw_29_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-16611000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"
      decimals="-3"
      id="Tc_zG7_3W4rn02z0S9qgBkR4A_30_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18269000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_oiZSSB5st0Ghwq_bo6QKqA_30_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18269000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_RY9KcJmzsUCO_SOo1rhZtg"
      decimals="-3"
      id="Tc_x1R8yrtT3UO2nCVH0E9mDA_31_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">380000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_VAzniL48RkyglqE3ufj4Ww"
      decimals="-3"
      id="Tc_ILeV3IyLAUKtDW1pY9W_8g_31_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6850000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_rsC2Q1qZ2kOPx7hIe_Sg7w"
      decimals="-3"
      id="Tc_AZjQvYrx6USCybmJ1tIv2g_31_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45649000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_mu8DwFKEkkaKt-CD8rRtbw_31_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">52499000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q"
      decimals="-3"
      id="Tc_EcNbW3lPMkSbf8sCqsuQZA_32_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32685000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_NFRnZdX4kUuXkXNxoGpP3Q"
      decimals="-3"
      id="Tc_GH9jzTcd8kW-uNYnBpQswg_32_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_01MGxzKcEUWC9Vo419xZWg"
      decimals="-3"
      id="Tc_0ygAAz-LhkOJCyBQ9LJpFQ_32_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">547189000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_aK2DEoB7_Eu88P7tq67wFQ"
      decimals="-3"
      id="Tc_rNSzz4FUr0mJfRxZdLHjIw_32_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">319506000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_hTJUKZ2N_0S-6GH-oOyPOQ"
      decimals="-3"
      id="Tc_D7QD3lWudEWwikOnG745Lw_32_15"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1846000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_VULx9_54DUOV55d4BT2QMA_32_18"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">864882000</us-gaap:StockholdersEquity>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_-Ff2eF7Md0-GpS_mBiHRiw_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:ProfitLoss>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_sccXheOiO0OGwAPEs69IJA_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:ProfitLoss>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_h8TpnsTQ7UCVnySc8AWWTA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:ProfitLoss>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_chjJPzwlhEG8reGZA7NOAg_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13069000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_OC-wwhuUo0iPYTgJnm5BaQ_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11607000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_aqkbREjF_ki1DyGIEl5QsA_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10818000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Jx7yFKnq9ki2jyuH3oRYuQ_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-20018000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_6NwBeMajw0CLU5iVbp5--Q_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8536000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_AsquGJpgwkGK4xz_K7MMzQ_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20257000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_DKtmlPnbvkqrVrcDVbW-ow_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18269000</us-gaap:ShareBasedCompensation>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_0du8QlF9W0yZSKKGJh7cgQ_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13444000</us-gaap:ShareBasedCompensation>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_GjMVwiIgw0-9GG4lEOu5NA_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12067000</us-gaap:ShareBasedCompensation>
    <us-gaap:ProvisionForDoubtfulAccounts
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_7GAbx6t_4kylyP9dE7K7kQ_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1129000</us-gaap:ProvisionForDoubtfulAccounts>
    <acls:ProvisionForExcessAndObsoleteInventory
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_nITz1hg9xkqjGnudyPZV-A_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5211000</acls:ProvisionForExcessAndObsoleteInventory>
    <acls:ProvisionForExcessAndObsoleteInventory
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_R616yrlvrkeVzE5CofkoIA_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4565000</acls:ProvisionForExcessAndObsoleteInventory>
    <acls:ProvisionForExcessAndObsoleteInventory
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_TXrqQELMTUirnAXsEYz-ow_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3755000</acls:ProvisionForExcessAndObsoleteInventory>
    <us-gaap:AccretionAmortizationOfDiscountsAndPremiumsInvestments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_GUlMi4XDU0qmsKYODU2EGQ_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12077000</us-gaap:AccretionAmortizationOfDiscountsAndPremiumsInvestments>
    <us-gaap:ForeignCurrencyTransactionGainLossBeforeTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_EEQGHMTa4UiBYx_cwe93rg_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-2252000</us-gaap:ForeignCurrencyTransactionGainLossBeforeTax>
    <us-gaap:ForeignCurrencyTransactionGainLossBeforeTax
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_29RT8c7GkEmenyd7BoWOuA_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-5986000</us-gaap:ForeignCurrencyTransactionGainLossBeforeTax>
    <us-gaap:IncreaseDecreaseInAccountsReceivable
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_RdGclzrj9k2I0HqRbpnuEQ_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">50755000</us-gaap:IncreaseDecreaseInAccountsReceivable>
    <us-gaap:IncreaseDecreaseInAccountsReceivable
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_hADtj1vvNkWmH4wQhH7HiQ_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">67270000</us-gaap:IncreaseDecreaseInAccountsReceivable>
    <us-gaap:IncreaseDecreaseInAccountsReceivable
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_MOJ024laD0KNpusWBfznQw_15_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18146000</us-gaap:IncreaseDecreaseInAccountsReceivable>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc__PX2Llf9IUunxqh6BlfAFg_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">69957000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_UcQSKOfOzU2hqu05xXWpfQ_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">58433000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_DRMiyQjL3kieGx3vtpFmng_16_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">39023000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_MbuXgKOjmEaQOzO64lnY6w_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16046000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_YoqHM3lnEUaMa6CLlf-mfg_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6533000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_5AvOJMxt_UC35rqVrXLiVQ_17_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3955000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_25FtXU3uS0iaF5J2aPaujA_18_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-8103000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_6UX1e2ghzUyUszcdZwG29g_18_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31392000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_FNK7kDAMRkarAUgsFjfUBg_18_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">22046000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_AivsPEtvsUeVYg-7RHgv1w_19_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">56183000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_iLXyDlbl-k6jzfwa0T8NbA_19_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">86366000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ibPwUO2EYEa6j9vywHPCtA_19_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45385000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_4gmXpQLw30SPc9ENMohk9Q_20_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3786000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
    <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_7w1PHaGHi0aP43BtjhvdIQ_20_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3493000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
    <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_eApEbKexJ0ezt5AK2DkBGA_20_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">253000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_yXQCFWsGMEKcVxy_Tf1_8g_21_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12337000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_b2to52XGRkixSWNZTxr4yA_21_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">625000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_E81goEHJv0u7LvGYnzD9bw_21_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1917000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_wbQrcpEpp0-w7DP2xsdtag_22_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">156869000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_-9aJUXy5-EKIxKblq-DVjg_22_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">215607000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_as4oeN11F0SpzG_xHlqNHg_22_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">150190000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_PgB8vJ2Gokq7-nmWuBU1xA_25_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20656000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_VkZWilTiN0mh_7c3O5j34Q_25_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10683000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_FVo1rcJKLk6paNl_iXey_Q_25_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8718000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquireShortTermInvestments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_3erQsb2eAU-GORtQOR3kww_26_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">388809000</us-gaap:PaymentsToAcquireShortTermInvestments>
    <us-gaap:PaymentsToAcquireShortTermInvestments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_0CThpMbZukS0NL_S6RIXLg_26_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246571000</us-gaap:PaymentsToAcquireShortTermInvestments>
    <us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_56RPgmp1r02GzgvWuQ28ZA_27_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">308607000</us-gaap:ProceedsFromMaturitiesPrepaymentsAndCallsOfShorttermInvestments>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_THiIR5DWLESjLQ6Q_ru1qg_28_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-100858000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_olGTS6c-XkavlQ5WDAZi5A_28_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-257254000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_WTcuJ-KBB0aAbP49wUBDJQ_28_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-8718000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <acls:NetSettlementOnRestrictedStockGrants
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_RKT1T7W7oUmcpxNKX3qyLQ_31_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-16611000</acls:NetSettlementOnRestrictedStockGrants>
    <acls:NetSettlementOnRestrictedStockGrants
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_X9uk9Q1-lECBZUYXId2RkA_31_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-9907000</acls:NetSettlementOnRestrictedStockGrants>
    <acls:NetSettlementOnRestrictedStockGrants
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_RPfi82-RR0-noryiASh8-g_31_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6564000</acls:NetSettlementOnRestrictedStockGrants>
    <us-gaap:PaymentsForRepurchaseOfCommonStock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_kqMwKzUkekaFv3KqkIxXXw_32_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">52499000</us-gaap:PaymentsForRepurchaseOfCommonStock>
    <us-gaap:PaymentsForRepurchaseOfCommonStock
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_tJMBKZPSm0qBjrykJ8a0BQ_32_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">57495000</us-gaap:PaymentsForRepurchaseOfCommonStock>
    <us-gaap:PaymentsForRepurchaseOfCommonStock
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Ks4tHdosNEqqSzSFvj-3QQ_32_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">49992000</us-gaap:PaymentsForRepurchaseOfCommonStock>
    <us-gaap:ProceedsFromStockPlans
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Qs2XwHSGsUOAcu1Ggtpa9Q_33_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2057000</us-gaap:ProceedsFromStockPlans>
    <us-gaap:ProceedsFromStockPlans
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_aV8FDOWkfESVGt2gq6xfLg_33_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1662000</us-gaap:ProceedsFromStockPlans>
    <us-gaap:ProceedsFromStockPlans
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_-s5TBwqiH0SCLUOmcxebXA_33_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1179000</us-gaap:ProceedsFromStockPlans>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_AgeRuHw2HEehlGsJETQf3Q_34_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1240000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_MTMhQMdt_Eaz8_b_1BFIAQ_34_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">987000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_4Q2YRK_ZbE-W8sUWGNXuQA_34_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">763000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_wu_jbAmwYky5fBib_NTpIQ_35_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_JH-Nx6tvx0WYDIOarYy5sA_35_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1247000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_QDixxhhXZkWj9HYPoNbBRw_35_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3687000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_F2CXfWmR-0OfI8SMbZSgVg_36_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-68268000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_KnJc5-m_y0SDYECMFDaqnA_36_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-65480000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_k_f6xJHlOUK-qJSk1LIV_w_36_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-52453000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_8QvAFHx60kqv2kyKWZsqhw_38_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-139000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_ozhyJOknPUuQIU6JsWhcWQ_38_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-2206000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_7Qzmul4eTEadANYw9ym2hQ_38_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2429000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_e_pb9mARDEyQAv7OWsOTrA_39_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-12396000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_N5g7rtKmH0GOh2ILTOlT1A_39_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-109333000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_hlMvYEYRfk2hBcH1uiI-pg_39_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">91448000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_mXhR6gz3I0OMeeMcHTuutw_41_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">186347000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_pVqqQJ8zDU2m5E-fqYT0pw_41_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">295680000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"
      decimals="-3"
      id="Tc_pYSs1gZDSkKpaV6TemEquA_41_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">204232000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_qLPtIOwgOUGmLuEw188R6w_42_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">173951000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_RLQqvV9fJEK_TasNXhEACw_42_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">186347000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_1kj2T07jWkSnd8ojtAS1XQ_42_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">295680000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_MiJ714ox7UO2c9zNdbd9WQ_46_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">54217000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_4nRfH0BmLkm66DUUph3qeA_46_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10763000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:IncomeTaxesPaidNet
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_xF0EX4k4xEOmU9qnzJUelw_46_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1500000</us-gaap:IncomeTaxesPaidNet>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_b0gisqBYKUCZzjCloVVgcg_47_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4874000</us-gaap:InterestPaidNet>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_ICLRrLbkc02pkrKboK83Fg_47_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4992000</us-gaap:InterestPaidNet>
    <us-gaap:InterestPaidNet
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_cYfcPRPiv0KKhUZv3UreMw_47_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5086000</us-gaap:InterestPaidNet>
    <us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_6nfTmv8qv0qGDsEan6I4qg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;1. Nature of Business&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Axcelis Technologies,&#160;Inc. (&#x201c;Axcelis&#x201d; or the &#x201c;Company&#x201d;) was incorporated in Delaware in 1995, and is a worldwide producer of ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition to equipment, we provide extensive aftermarket lifecycle products and services, including spare parts, equipment upgrades, maintenance services and customer training.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock>
    <us-gaap:SignificantAccountingPoliciesTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_0FCu4g3290qWL7Jmrjwpww">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;2. Summary of Significant Accounting Policies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accompanying consolidated financial statements reflect the application of certain significant accounting policies as described in this note and elsewhere in the footnotes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basis of Presentation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accompanying consolidated financial statements include the consolidated accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Events occurring subsequent to December 31, 2023 have been evaluated for potential recognition or disclosure in the consolidated financial statements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Use of Estimates&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, the realizable value of accounts receivable and inventories, warranty reserves, valuing stock-based compensation instruments and reserves relating to tax assets and liabilities. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Foreign Currency&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders&#x2019; equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the years ended December 31, 2023, 2022, and 2021, we had foreign exchange losses of $0.5 million, $6.6 million, and $2.5 million, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash, Cash Equivalents and Short-term Investments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market funds, U.S. Government and Agency Securities and deposit accounts. Cash equivalents are carried on the balance sheet at fair market value. Short-term investments are h&lt;span style="background:#ffffff;"&gt;ighly liquid investments with original maturities of greater than 90 days but less than one year from date of purchase and are carried on the balance sheet at amortized cost. Our short-term investments consist primarily of U.S. Government and Agency securities and are classified as held-to-maturity based on our positive intent and ability to hold the securities to maturity. Income related to these securities is recorded in interest income in the Consolidated Statements of&#160;Operations&lt;/span&gt;.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Inventories are carried at the lower of cost or net realizable value, determined using the first-in, first-out (&#x201c;FIFO&#x201d;) method. We periodically review our inventories and make provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or net realizable value. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record a provision for estimated excess inventory. The provision is determined using management&#x2019;s assumptions of materials usage, based on estimates of demand, market conditions, and the size and utilization of our installed base. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property, Plant and Equipment and Leased Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Property, plant and equipment are stated at cost, less accumulated depreciation and amortization.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On January 30, 2015, we sold our corporate headquarters facility. As part of this sale, we also entered into a 22-year lease agreement. We accounted for the sale leaseback transaction as a financing arrangement for financial reporting purposes. We retained the historical costs of the property and the related accumulated depreciation on our financial books within property, plant and equipment and will continue to depreciate the property for financial reporting purposes over the lesser of its remaining useful life or its initial lease term of &lt;span style="-sec-ix-hidden:Hidden_zehA9llnJ0iptBHcvR7uFg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;22 years&lt;/span&gt;&lt;/span&gt;. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Asset&#160;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land, buildings and equipment (under lease)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Lesser of the lease term or estimated useful life of the asset&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;3 to 10 years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Repairs and maintenance costs are expensed as incurred. Expenditures greater than $2.5 thousand for renewals and betterments are capitalized and depreciated over their useful lives.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(g)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is assessed by a comparison of the assets&#x2019; carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We did not have any indicators of impairment during the period ending December 31, 2023. We did not record an impairment charge in the years ended December 31, 2023, 2022, or 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Actual performance could be materially different from our current forecasts, which could impact estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in our relationships with significant customers. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt; (h)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Financial instruments that potentially subject us to concentrations of credit risk are principally cash equivalents, short-term investments and accounts receivable. Our cash equivalents and short-term investments are principally maintained in investment grade money-market funds, U.S. Government and Agency Securities and deposit accounts.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have no significant off-balance-sheet risk such as currency exchange contracts, option contracts or other hedging arrangements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our exposure to market risk for changes in interest rates relates primarily to cash equivalents and short-term investments. The primary objective of our investment activities is to preserve principal without significantly increasing risk. This is accomplished by investing in marketable investment grade securities. We do not use derivative financial instruments to manage our investment portfolio and do not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We perform ongoing credit evaluations of our customers&#x2019; financial condition and generally require no collateral to secure accounts receivable. For selected overseas sales, we require customers to obtain letters of credit before product is shipped. We maintain an allowance for doubtful accounts based on our assessment of the collectability of accounts receivable. We review the allowance for doubtful accounts quarterly. We do not have any off-balance sheet credit exposure related to our customers.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our customers consist of semiconductor chip manufacturers located throughout the world and net sales to our ten largest customers accounted for 51.7%, 59.4% and 69.5% of revenue in 2023, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the year ended December 31, 2023, we had no customers representing 10% or greater of total revenue. For the year ended December 31, 2022, we had two customers representing 13.1% and 11.5% of total revenue, respectively. For the year ended December 31, 2021, we had two customers representing 17.8% and 15.4% of total revenue, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, we had one customer account for 12.2% of consolidated accounts receivable. As of December 31, 2022, we had two customers account for 19.4% and 11.5% of consolidated accounts receivable, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Some of the components and sub-assemblies included in our products are obtained either from a sole source or a limited group of suppliers. Disruption to our supply source, resulting either from economic conditions or other factors, could affect our ability to deliver products to our customers.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(i)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue Recognition&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We recognize revenue in accordance with Accounting Standards Codification (&#x201c;ASC&#x201d;) Topic 606, &lt;i style="font-style:italic;"&gt;Revenue from Contracts with Customers &lt;/i&gt;or (&#x201c;ASC 606&#x201d;). Under ASC 606, revenue is recognized when a customer obtains control of promised goods or services in an amount that reflects the consideration we expect to receive in exchange for those goods or services. We measure revenue based on the consideration specified in the customer arrangement, and revenue is recognized when the performance obligations in the customer arrangement are satisfied. A performance obligation is a promise in a contract to transfer a distinct product or service to the customer. The transaction price of a contract is allocated to each distinct performance obligation based upon the relative standalone selling price for each performance obligation and recognized as revenue when, or as, the customer receives the benefit of the performance obligation. To account for and measure revenue, we apply the following five steps:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Identify the contract with the customer&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;A contract with a customer exists when (i) we enter into an enforceable contract with a customer that defines each party&#x2019;s rights regarding the goods or services to be transferred and identifies the related payment terms, (ii) the contract has commercial substance, and (iii) we determine that collection of substantially all consideration for goods and services that are transferred is probable based on the customer&#x2019;s intent and ability to pay the promised consideration. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Identify the performance obligations in the contract&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Performance obligations promised in a contract are identified based on the goods and services that will be transferred to the customer that are both capable of being distinct, whereby the customer can benefit from the good or service either on its own or together with other available resources, and are distinct in the context of the contract, whereby the transfer of the good or service is separately identifiable from other promises in the contract. To the extent a contract includes multiple promised goods and services, we must apply judgment to determine whether promised goods and services &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;are capable of being distinct and distinct in the context of the contract. If these criteria are not met, the promised goods and services are accounted for as a combined performance obligation.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Systems sales consist of multiple performance obligations, including the system itself and obligations that are not delivered simultaneously with the system. These undelivered obligations might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The Aftermarket business includes both products and services type arrangements. Performance obligations in these contracts consist of used tools, spare parts, equipment upgrades, maintenance services and customer training. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Customers who purchase new systems are provided an assurance-type warranty for one year after acceptance of the tool. For aftermarket transactions, we provide customers an assurance-type warranty for 90 days. Customers can choose to purchase extended warranty terms with enhanced support similar to a service-type warranty ranging from &lt;span style="-sec-ix-hidden:Hidden_tZFax8B4REGrwjj6O781Dw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt; to three years&lt;span style="white-space:pre-wrap;"&gt;. In accordance with ASC 606, assurance-type warranties are not considered a performance obligation, whereas service-type warranties are.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Determine the transaction price &lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The transaction price is determined based on the consideration to which we will be entitled in exchange for transferring goods and services to the customer. To the extent the transaction price includes variable consideration, we estimate the amount of variable consideration that should be included in the transaction price utilizing either the expected value method or the most likely amount method depending on the nature of the variable consideration. Variable consideration is included in the transaction price if, in our judgment, it is probable that a significant future reversal of cumulative revenue under the contract will not occur. Any estimates, including the effect of the constraint on variable consideration, are evaluated at each reporting period for any changes. In applying this guidance, Companies must also consider whether any significant financing components exist. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The transaction price for all transactions is based on the price reflected in the individual customer&#x2019;s purchase order. Variable consideration has not been identified as a significant component of the transaction price for any of our transactions. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For those transactions where all performance obligations will be satisfied within one year or less, we apply the practical expedient outlined in ASC 606-10-32-18. This practical expedient allows us not to adjust promised consideration for the effects of a significant financing component if we expect at contract inception that the period between when we transfer the promised good or service to a customer and when the customer pays for that good or service will be one year or less. For those transactions that are expected to be completed after one year, we have assessed that there are no significant financing components because any difference between the promised consideration and the cash selling price of the good or service is for reasons other than the provision of financing. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;4)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Allocate the transaction price to performance obligations in the contract&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;If the contract contains a single performance obligation, the entire transaction price is allocated to the single performance obligation. Contracts that contain multiple performance obligations require an allocation of the transaction price to each performance obligation on a relative standalone selling price basis unless the transaction price is variable and meets the criteria to be allocated entirely to a performance obligation or to a distinct service that forms part of a single performance obligation. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Where required, we determine standalone selling price (&#x201c;SSP&#x201d;) for each obligation based on consideration of both market and Company specific factors, including the selling price and profit margin for similar products, the cost to produce, and the anticipated margin.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For those contracts that contain multiple performance obligations (primarily systems sales, as well as some aftermarket contracts requiring both time and material inputs), we must determine the SSP. We use a cost plus margin approach in determining the SSP for any materials related performance obligations (such as upgrades, spare parts, systems). To determine the SSP for labor related performance obligations (such as the labor component of installation), we use &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;directly observable inputs based on the standalone sale prices for these services. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;5)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Recognize revenue when or as we have satisfied a performance obligation &lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We satisfy performance obligations either over time or at a point in time. Revenue is recognized over time if either 1) the customer simultaneously receives and consumes the benefits provided by the entity&#x2019;s performance, 2) the entity&#x2019;s performance creates or enhances an asset that the customer controls as the asset is created or enhanced, or 3) the entity&#x2019;s performance does not create an asset with an alternative use to the entity and the entity has an enforceable right to payment for performance completed to date. If the entity does not satisfy a performance obligation over time, the related performance obligation is satisfied at a point in time by transferring the control of a promised good or service to a customer. Examples of control are using the asset to produce goods or services, enhance the value of other assets or settle liabilities, and holding or selling the asset. For over time recognition, ASC 606 requires us to select a single revenue recognition method for the performance obligation that faithfully depicts our performance in transferring control of the goods and services. The guidance allows entities to choose between two methods to measure progress toward complete satisfaction of a performance obligation: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"&gt;Output methods - recognize revenue on the basis of direct measurements of the value to the customer of the goods or services transferred to date relative to the remaining goods or services promised under the contract (e.g., surveys of performance completed to date, appraisals of results achieved, milestones reached, time elapsed, and units produced or units delivered); and &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"&gt;Input methods - recognize revenue on the basis of the entity&#x2019;s efforts or inputs to the satisfaction of a performance obligation (e.g., resources consumed, labor hours expended, costs incurred, or time elapsed) relative to the total expected inputs to the satisfaction of that performance obligation.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have the right to consideration from a customer in an amount that corresponds directly with the value to the customer of the entity&#x2019;s performance completed to date (i.e., certain aftermarket contracts), as such we have elected a practical expedient to recognize revenue in the amount to which the entity has a right to invoice for such services.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;Product related revenues (whether for systems or aftermarket business) are recognized at a point in time, when they are shipped or delivered, depending on shipping terms.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;For installation services, revenue is recognized at a point in time, once the installation of the tool is complete. The nature of the installation services is such that the customer does not simultaneously receive and consume the benefits provided by the entity&#x2019;s performance, nor does performance of installation services create or enhance an asset that the customer controls. Installation services do not create an asset with an alternative use to the entity, and the entity does not have an enforceable right to payment for performance completed to date.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Service-type warranties for any product are recognized over time, as these represent a stand ready obligation to service the product during the warranty period. Progress in the satisfaction of these performance obligations is measured using an input method of time elapsed. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;Maintenance and service contracts are recognized over time.  Progress in the satisfaction of these performance obligations is measured using an input method of either time elapsed in the case of fixed period contracts, or labor hours expended, in the case of project-based contracts.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(j)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recognizing Assets related to Recoverable Customer Contract Costs&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"&gt;We recognize an asset related to incremental costs incurred by us to obtain a contract with a customer if we expect to recover those costs. We will recognize an asset from costs incurred to fulfill a contract only if such costs relate directly to a contract with an entity that we can specifically identify, the costs incurred will generate or enhance resources that will be &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;used in satisfying performance obligations in the future, and the costs are expected to be recovered. Any assets recognized related to costs to obtain or fulfill a contract are amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;In substantially all of our business transactions, we incur incremental costs to obtain contracts with customers, in the form of sales commissions. We maintain a commission program which awards our employees for System sales, aftermarket activity and other individual goals. Under ASC 606, an asset is amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates. However, ASC 606 provides a practical expedient to allow for the recognition of commission expense when incurred if the amortization period of the asset that the entity otherwise would have recognized is one year or less. Based on the nature of our commission agreements, all commissions are expensed as incurred based upon the expectation that the amortization period would be one year or less.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(k)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and Handling Costs&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Shipping and handling costs are included in cost of revenue.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(l)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; Stock-Based Compensation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We generally recognize compensation expense for all stock-based payments to employees and directors, including grants of stock options and restricted stock units, based on the grant-date fair value of those stock-based payments. For stock option awards, we use the Black-Scholes option pricing model, adjusted for expected forfeitures. Other valuation models may be utilized in the limited circumstances where awards with market-based vesting considerations, such as the price of our common stock, or performance-based awards, are granted. Stock-based compensation expense is recognized ratably over the requisite service period. For each stock option or restricted stock unit grant with vesting based on a combination of time, market or performance conditions, where vesting will occur if either condition is met, the related compensation costs are recognized over the shorter of the explicit service period or the derived service period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;See Note&#160;13 for additional information relating to stock-based compensation.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(m)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income Taxes&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax basis, and operating loss and tax credit carryforwards.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax basis accounting. We establish a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining our provision for income taxes, our deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. We evaluate the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. We recognize accrued interest related to unrecognized tax benefits as interest expense and penalties within operating expense in the consolidated statements of operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;See Note 18 for additional information relating to income taxes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(n)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Computation of Net Income per Share&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of net income per share are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income available to common stockholders&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 246,263&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 183,079&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 98,650&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock outstanding used in computing basic income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,758&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,043&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,555&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Incremental options and RSUs&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 407&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 499&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 713&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock used in computing diluted net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,165&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,542&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,268&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.43&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.46&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.88&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Diluted weighted average common shares outstanding does not include restricted stock units outstanding to purchase 6,025, 4,929 and 2,554 common equivalent shares for the periods ended December 31, 2023, 2022 and 2021, respectively, as their effect would have been anti-dilutive.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(o)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Accumulated Other Comprehensive Loss&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table presents the changes in accumulated other comprehensive loss, net of tax, by component, for the year ended December 31, 2023:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Defined&#160;benefit&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;pension&#160;plan&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,994)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,968)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income and pension reclassification&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 38&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 122&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,956)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,846)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(p)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recent Accounting Guidance&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:14pt 0pt 0pt 0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;In November 2023 the Financial Accounting Standards Board (&#x201c;FASB&#x201d;) issued Accounting Standards Update 2023-07, &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; ("ASU 2023-07"). ASU 2023-07 is intended to enhance disclosures for significant segment expenses for all public entities required to report segment information in accordance with ASC Topic 280, &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Segment Reporting&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; ("ASC 280"). ASC 280 requires a public entity to report for each reportable segment a measure of segment profit or loss that its chief operating decision maker (&#x201c;CODM&#x201d;) uses to assess segment performance and to make decisions about resource allocations. ASU 2023-07 is intended to improve financial reporting by requiring disclosure of incremental segment information on an annual and interim basis for all public entities to enable investors to develop more useful financial analyses. ASU 2023-07 is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024. Early adoption is permitted. A public entity should apply ASU 2023-07 retrospectively to all prior periods presented in the consolidated financial statements. The Company is currently evaluating the impact of &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;ASU 2023-07&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; on its future consolidated financial statements and related disclosures.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:14pt 0pt 0pt 0pt;"&gt;In December 2023 the FASB issued Accounting Standards Update 2023-09, &lt;i style="font-style:italic;"&gt;Income Taxes (Topic 740): Improvements to Income Tax Disclosures &lt;/i&gt;("ASU 2023-09")&lt;i style="font-style:italic;"&gt;. &lt;/i&gt;&lt;span style="color:#1d1c1d;"&gt;ASU 2023-09 is intended to enhance the transparency and decision usefulness of income tax disclosures. ASU 2023-09 addresses investor requests for enhanced income tax information primarily through changes to the rate reconciliation and income taxes paid information. Early adoption is permitted. A public entity should apply ASU 2023-09 prospectively to all annual periods beginning after December 15, 2024. The Company is currently evaluating the impact of ASU 2023-09 on its future consolidated financial statements and related disclosures&lt;/span&gt;&lt;span style="color:#1d1c1d;"&gt;.&lt;/span&gt;&lt;/p&gt;</us-gaap:SignificantAccountingPoliciesTextBlock>
    <us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_txqWR8_qzEaOg-YAKRiTBw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Basis of Presentation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accompanying consolidated financial statements include the consolidated accounts of the Company and its wholly-owned, controlled subsidiaries. All intercompany balances and transactions have been eliminated in consolidation. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Events occurring subsequent to December 31, 2023 have been evaluated for potential recognition or disclosure in the consolidated financial statements.&lt;/p&gt;</us-gaap:ConsolidationSubsidiariesOrOtherInvestmentsConsolidatedEntitiesPolicy>
    <us-gaap:UseOfEstimates
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_L2ULEv87lkqTfaq9xl2OtQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Use of Estimates&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The preparation of these consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent assets and liabilities at the dates of the financial statements and the reported amounts of revenue and expenses during the reporting periods. On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, the realizable value of accounts receivable and inventories, warranty reserves, valuing stock-based compensation instruments and reserves relating to tax assets and liabilities. Actual amounts could differ from these estimates. Changes in estimates are recorded in the period in which they become known.&lt;/p&gt;</us-gaap:UseOfEstimates>
    <us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_MH5wr6nRak2RwFdeEP1Kaw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Foreign Currency&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The functional currency for substantially all operations outside the United States is the local currency. Financial statements for these operations are translated into United States dollars at year-end rates as to assets and liabilities and average exchange rates during the year as to revenue and expenses. The resulting translation adjustments are recorded in stockholders&#x2019; equity as an element of accumulated other comprehensive income (loss). Foreign currency transaction gains and losses are included in other income (expense) in the Consolidated Statements of Operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the years ended December 31, 2023, 2022, and 2021, we had foreign exchange losses of $0.5 million, $6.6 million, and $2.5 million, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock>
    <us-gaap:ForeignCurrencyTransactionGainLossRealized
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_dpjRE3-RsEuFzEFZ8DG2bg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-500000</us-gaap:ForeignCurrencyTransactionGainLossRealized>
    <us-gaap:ForeignCurrencyTransactionGainLossRealized
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_sAyQABxHukK381FipPmDUA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6600000</us-gaap:ForeignCurrencyTransactionGainLossRealized>
    <us-gaap:ForeignCurrencyTransactionGainLossRealized
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr__ubvQ2TgPESjdO9lRdNj3A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-2500000</us-gaap:ForeignCurrencyTransactionGainLossRealized>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_5W7dy25xPUCe3gdxLHWR-Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Cash, Cash Equivalents and Short-term Investments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Cash and cash equivalents consist of cash on hand and highly liquid investments with original maturities of ninety days or less. Cash equivalents consist primarily of money market funds, U.S. Government and Agency Securities and deposit accounts. Cash equivalents are carried on the balance sheet at fair market value. Short-term investments are h&lt;span style="background:#ffffff;"&gt;ighly liquid investments with original maturities of greater than 90 days but less than one year from date of purchase and are carried on the balance sheet at amortized cost. Our short-term investments consist primarily of U.S. Government and Agency securities and are classified as held-to-maturity based on our positive intent and ability to hold the securities to maturity. Income related to these securities is recorded in interest income in the Consolidated Statements of&#160;Operations&lt;/span&gt;.&lt;/p&gt;</acls:CashAndCashEquivalentsAndShortTermInvestmentsPolicyPolicyTextBlock>
    <us-gaap:InventoryPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_Mw3gvPK6DEuPVghsujKdIg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Inventories&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Inventories are carried at the lower of cost or net realizable value, determined using the first-in, first-out (&#x201c;FIFO&#x201d;) method. We periodically review our inventories and make provisions as necessary for estimated obsolescence or damaged goods to ensure values approximate lower of cost or net realizable value. The amount of such markdowns is equal to the difference between cost of inventory and the estimated market value based upon assumptions about future demands, selling prices, and market conditions.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record a provision for estimated excess inventory. The provision is determined using management&#x2019;s assumptions of materials usage, based on estimates of demand, market conditions, and the size and utilization of our installed base. If actual market conditions become less favorable than those projected by management, additional inventory write-downs may be required.&lt;/p&gt;</us-gaap:InventoryPolicyTextBlock>
    <us-gaap:PropertyPlantAndEquipmentPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_vCYyC8dpLk69rtYfKhvC_A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Property, Plant and Equipment and Leased Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Property, plant and equipment are stated at cost, less accumulated depreciation and amortization.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On January 30, 2015, we sold our corporate headquarters facility. As part of this sale, we also entered into a 22-year lease agreement. We accounted for the sale leaseback transaction as a financing arrangement for financial reporting purposes. We retained the historical costs of the property and the related accumulated depreciation on our financial books within property, plant and equipment and will continue to depreciate the property for financial reporting purposes over the lesser of its remaining useful life or its initial lease term of &lt;span style="-sec-ix-hidden:Hidden_zehA9llnJ0iptBHcvR7uFg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;22 years&lt;/span&gt;&lt;/span&gt;. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Depreciation and amortization are recorded using the straight-line method over the estimated useful lives of the related assets as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Asset&#160;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land, buildings and equipment (under lease)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Lesser of the lease term or estimated useful life of the asset&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;3 to 10 years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Repairs and maintenance costs are expensed as incurred. Expenditures greater than $2.5 thousand for renewals and betterments are capitalized and depreciated over their useful lives.&lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentPolicyTextBlock>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw"
      id="Narr_gW_t-wFS3EWJO71GYrEQrg">P22Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <acls:PropertyPlantAndEquipmentUsefulLivesTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_XqrESFTRsE-Ehf7J9_mtuw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Asset&#160;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:46.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Estimated&#160;Useful&#160;Life&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land, buildings and equipment (under lease)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:35.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Lesser of the lease term or estimated useful life of the asset&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:50.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:35.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;3 to 10 years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:PropertyPlantAndEquipmentUsefulLivesTableTextBlock>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_nbAeeKDfx0y_WvsTR2GHiw"
      id="Narr_q9zUQ448QUOaf5yJgNr2Zw">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <us-gaap:PropertyPlantAndEquipmentUsefulLife
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember__L6CjCUYgkC3tvk_zUvMVA"
      id="Narr_g1H9knzLrUm8sSt58vKnSg">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
    <acls:CostOfPropertyRepairsAndMaintenanceCapitalized
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw"
      decimals="-2"
      id="Narr_p8brb_KkA0GPqBdElu_CGA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2500</acls:CostOfPropertyRepairsAndMaintenanceCapitalized>
    <us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_0vDvu9Dl802KMaCIG3G1oQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(g)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Impairment of Long-Lived Assets&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record impairment losses on long-lived assets when events and circumstances indicate that these assets might not be recoverable. Recoverability is assessed by a comparison of the assets&#x2019; carrying amount to their expected future undiscounted net cash flows. If such assets are considered to be impaired, the impairment is measured based on the amount by which the carrying value exceeds its fair value.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We did not have any indicators of impairment during the period ending December 31, 2023. We did not record an impairment charge in the years ended December 31, 2023, 2022, or 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Actual performance could be materially different from our current forecasts, which could impact estimates of undiscounted cash flows and may result in the impairment of the carrying amount of the long-lived assets in the future. This could be caused by strategic decisions made in response to economic and competitive conditions, the impact of the economic environment on our customer base, or a material adverse change in our relationships with significant customers. &lt;/p&gt;</us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock>
    <us-gaap:ImpairmentOfLongLivedAssetsHeldForUse
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-6"
      id="Narr_7kIWVqF460eJLfJZypgLzg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">0</us-gaap:ImpairmentOfLongLivedAssetsHeldForUse>
    <us-gaap:ImpairmentOfLongLivedAssetsHeldForUse
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-6"
      id="Narr_CJeZvg-nPE2yI_CTIdGw0g"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">0</us-gaap:ImpairmentOfLongLivedAssetsHeldForUse>
    <us-gaap:ImpairmentOfLongLivedAssetsHeldForUse
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-6"
      id="Narr_FkvBxJkK6U6SRk-9XWybfg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">0</us-gaap:ImpairmentOfLongLivedAssetsHeldForUse>
    <us-gaap:ConcentrationRiskCreditRisk
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_yUq5VSnrVkGAlK1T06FJKQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt; (h)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Concentration of Risk and Off-Balance Sheet Risk&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Financial instruments that potentially subject us to concentrations of credit risk are principally cash equivalents, short-term investments and accounts receivable. Our cash equivalents and short-term investments are principally maintained in investment grade money-market funds, U.S. Government and Agency Securities and deposit accounts.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have no significant off-balance-sheet risk such as currency exchange contracts, option contracts or other hedging arrangements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our exposure to market risk for changes in interest rates relates primarily to cash equivalents and short-term investments. The primary objective of our investment activities is to preserve principal without significantly increasing risk. This is accomplished by investing in marketable investment grade securities. We do not use derivative financial instruments to manage our investment portfolio and do not expect operating results or cash flows to be affected to any significant degree by any change in market interest rates.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We perform ongoing credit evaluations of our customers&#x2019; financial condition and generally require no collateral to secure accounts receivable. For selected overseas sales, we require customers to obtain letters of credit before product is shipped. We maintain an allowance for doubtful accounts based on our assessment of the collectability of accounts receivable. We review the allowance for doubtful accounts quarterly. We do not have any off-balance sheet credit exposure related to our customers.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our customers consist of semiconductor chip manufacturers located throughout the world and net sales to our ten largest customers accounted for 51.7%, 59.4% and 69.5% of revenue in 2023, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the year ended December 31, 2023, we had no customers representing 10% or greater of total revenue. For the year ended December 31, 2022, we had two customers representing 13.1% and 11.5% of total revenue, respectively. For the year ended December 31, 2021, we had two customers representing 17.8% and 15.4% of total revenue, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, we had one customer account for 12.2% of consolidated accounts receivable. As of December 31, 2022, we had two customers account for 19.4% and 11.5% of consolidated accounts receivable, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Some of the components and sub-assemblies included in our products are obtained either from a sole source or a limited group of suppliers. Disruption to our supply source, resulting either from economic conditions or other factors, could affect our ability to deliver products to our customers.&lt;/p&gt;</us-gaap:ConcentrationRiskCreditRisk>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ"
      decimals="INF"
      id="Narr_V1eAAmXnz0CdXWrJIaUhmA"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">10</acls:ConcentrationRiskNumberOfCustomers>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA"
      decimals="INF"
      id="Narr_P8orMyy5FECRpgSQH5f6qg"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">10</acls:ConcentrationRiskNumberOfCustomers>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA"
      decimals="INF"
      id="Narr_VIAwVbIYZ0O6g7ashx89IQ"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">10</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_2kBj6UxfKU-4v2flCUsivA"
      decimals="3"
      id="Narr_K1y6H6UtBEKVH_VDQVCbow"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.517</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_DNByRJsS9UKZGPnqOx9euA"
      decimals="3"
      id="Narr_IQw_FcANyUmnMUhfAFPmig"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.594</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_TenLargestCustomersMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_AyUFgFsnFESNusWMaQJNlQ"
      decimals="3"
      id="Narr_4FwQJIK1lUGEouob4e3Acw"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.695</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_sJGzwRVzMUi5O02uu2hw2w"
      decimals="INF"
      id="Narr_jHMAvpHzOEitHlodQvcF7Q"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">0</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_WuYsBe_SrkujPEA1yzkt9A"
      decimals="3"
      id="Narr_HPYkFNTEcEGhh96fzg4VOQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.10</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_4rCodVjYiE-faP7-OqIxYA"
      decimals="INF"
      id="Narr_KFo2u3PSTku7ZKE-iWw6HQ"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZvANrIAgnkGmVedWUzRlvQ"
      decimals="3"
      id="Narr_qEqfJg_Eh0abBOTb0JATSA"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.131</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_zQ2Yn7utxkepTZdtD-MnNQ"
      decimals="3"
      id="Narr__hK0nSs_T0-O4gYoJyVHwg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.115</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_u_36UcX1uEKf7qb2wqp-Dg"
      decimals="INF"
      id="Narr_99Fn2f_jH0eK6i9u6JcQOw"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_6qqFwdivGkiYvjlyTVTwCA"
      decimals="3"
      id="Narr_jkkyrqxyI0aYpYxtKt7GdQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.178</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_QoC2-fOGDU-wmEBEzv3VFA"
      decimals="3"
      id="Narr_3mw4puCuC0SLLVaLaHtrog"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.154</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_9pxK086imEWWaL_mWlkxGA"
      decimals="INF"
      id="Narr_SAPjRQvgKUyAnszs1J4jvw"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">1</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_4_x4EoJBaEiVAs7iwP-0lw"
      decimals="3"
      id="Narr_Jv7spfxfC02cAh0hnTLgKg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.122</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_j9APXSaQMkyZFdzuTWJQkw"
      decimals="INF"
      id="Narr_ZIyCHOE_nky-85jHfL0pmQ"
      unitRef="Unit_Standard_customer_rSxiTzPnP0SmMhO1o6qm5A">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_KE7gAbB4B0-02qOjDlgwyA"
      decimals="3"
      id="Narr_YTNp-b6Fw0yA6vHzrEChnQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.194</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_Htd3q93xik6sWxKXUBlHVw"
      decimals="3"
      id="Narr_V_bYa9V3LkaE-VciRQYbRA"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.115</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:RevenueRecognitionPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_u3aDNj-KaEeiAu_4GhByKA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(i)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Revenue Recognition&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We recognize revenue in accordance with Accounting Standards Codification (&#x201c;ASC&#x201d;) Topic 606, &lt;i style="font-style:italic;"&gt;Revenue from Contracts with Customers &lt;/i&gt;or (&#x201c;ASC 606&#x201d;). Under ASC 606, revenue is recognized when a customer obtains control of promised goods or services in an amount that reflects the consideration we expect to receive in exchange for those goods or services. We measure revenue based on the consideration specified in the customer arrangement, and revenue is recognized when the performance obligations in the customer arrangement are satisfied. A performance obligation is a promise in a contract to transfer a distinct product or service to the customer. The transaction price of a contract is allocated to each distinct performance obligation based upon the relative standalone selling price for each performance obligation and recognized as revenue when, or as, the customer receives the benefit of the performance obligation. To account for and measure revenue, we apply the following five steps:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;1)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Identify the contract with the customer&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;A contract with a customer exists when (i) we enter into an enforceable contract with a customer that defines each party&#x2019;s rights regarding the goods or services to be transferred and identifies the related payment terms, (ii) the contract has commercial substance, and (iii) we determine that collection of substantially all consideration for goods and services that are transferred is probable based on the customer&#x2019;s intent and ability to pay the promised consideration. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;2)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Identify the performance obligations in the contract&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Performance obligations promised in a contract are identified based on the goods and services that will be transferred to the customer that are both capable of being distinct, whereby the customer can benefit from the good or service either on its own or together with other available resources, and are distinct in the context of the contract, whereby the transfer of the good or service is separately identifiable from other promises in the contract. To the extent a contract includes multiple promised goods and services, we must apply judgment to determine whether promised goods and services &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;are capable of being distinct and distinct in the context of the contract. If these criteria are not met, the promised goods and services are accounted for as a combined performance obligation.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Systems sales consist of multiple performance obligations, including the system itself and obligations that are not delivered simultaneously with the system. These undelivered obligations might include a combination of installation services, extended warranty and support and spare parts, all of which are generally covered by a single sales price.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The Aftermarket business includes both products and services type arrangements. Performance obligations in these contracts consist of used tools, spare parts, equipment upgrades, maintenance services and customer training. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Customers who purchase new systems are provided an assurance-type warranty for one year after acceptance of the tool. For aftermarket transactions, we provide customers an assurance-type warranty for 90 days. Customers can choose to purchase extended warranty terms with enhanced support similar to a service-type warranty ranging from &lt;span style="-sec-ix-hidden:Hidden_tZFax8B4REGrwjj6O781Dw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;"&gt;one&lt;/span&gt;&lt;/span&gt; to three years&lt;span style="white-space:pre-wrap;"&gt;. In accordance with ASC 606, assurance-type warranties are not considered a performance obligation, whereas service-type warranties are.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;3)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Determine the transaction price &lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The transaction price is determined based on the consideration to which we will be entitled in exchange for transferring goods and services to the customer. To the extent the transaction price includes variable consideration, we estimate the amount of variable consideration that should be included in the transaction price utilizing either the expected value method or the most likely amount method depending on the nature of the variable consideration. Variable consideration is included in the transaction price if, in our judgment, it is probable that a significant future reversal of cumulative revenue under the contract will not occur. Any estimates, including the effect of the constraint on variable consideration, are evaluated at each reporting period for any changes. In applying this guidance, Companies must also consider whether any significant financing components exist. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The transaction price for all transactions is based on the price reflected in the individual customer&#x2019;s purchase order. Variable consideration has not been identified as a significant component of the transaction price for any of our transactions. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For those transactions where all performance obligations will be satisfied within one year or less, we apply the practical expedient outlined in ASC 606-10-32-18. This practical expedient allows us not to adjust promised consideration for the effects of a significant financing component if we expect at contract inception that the period between when we transfer the promised good or service to a customer and when the customer pays for that good or service will be one year or less. For those transactions that are expected to be completed after one year, we have assessed that there are no significant financing components because any difference between the promised consideration and the cash selling price of the good or service is for reasons other than the provision of financing. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;4)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Allocate the transaction price to performance obligations in the contract&lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;If the contract contains a single performance obligation, the entire transaction price is allocated to the single performance obligation. Contracts that contain multiple performance obligations require an allocation of the transaction price to each performance obligation on a relative standalone selling price basis unless the transaction price is variable and meets the criteria to be allocated entirely to a performance obligation or to a distinct service that forms part of a single performance obligation. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Where required, we determine standalone selling price (&#x201c;SSP&#x201d;) for each obligation based on consideration of both market and Company specific factors, including the selling price and profit margin for similar products, the cost to produce, and the anticipated margin.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For those contracts that contain multiple performance obligations (primarily systems sales, as well as some aftermarket contracts requiring both time and material inputs), we must determine the SSP. We use a cost plus margin approach in determining the SSP for any materials related performance obligations (such as upgrades, spare parts, systems). To determine the SSP for labor related performance obligations (such as the labor component of installation), we use &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;directly observable inputs based on the standalone sale prices for these services. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;5)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;"&gt;Recognize revenue when or as we have satisfied a performance obligation &lt;/i&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We satisfy performance obligations either over time or at a point in time. Revenue is recognized over time if either 1) the customer simultaneously receives and consumes the benefits provided by the entity&#x2019;s performance, 2) the entity&#x2019;s performance creates or enhances an asset that the customer controls as the asset is created or enhanced, or 3) the entity&#x2019;s performance does not create an asset with an alternative use to the entity and the entity has an enforceable right to payment for performance completed to date. If the entity does not satisfy a performance obligation over time, the related performance obligation is satisfied at a point in time by transferring the control of a promised good or service to a customer. Examples of control are using the asset to produce goods or services, enhance the value of other assets or settle liabilities, and holding or selling the asset. For over time recognition, ASC 606 requires us to select a single revenue recognition method for the performance obligation that faithfully depicts our performance in transferring control of the goods and services. The guidance allows entities to choose between two methods to measure progress toward complete satisfaction of a performance obligation: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"&gt;Output methods - recognize revenue on the basis of direct measurements of the value to the customer of the goods or services transferred to date relative to the remaining goods or services promised under the contract (e.g., surveys of performance completed to date, appraisals of results achieved, milestones reached, time elapsed, and units produced or units delivered); and &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-left:0pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"&gt;Input methods - recognize revenue on the basis of the entity&#x2019;s efforts or inputs to the satisfaction of a performance obligation (e.g., resources consumed, labor hours expended, costs incurred, or time elapsed) relative to the total expected inputs to the satisfaction of that performance obligation.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:10pt;margin-bottom:5pt;margin-top:5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have the right to consideration from a customer in an amount that corresponds directly with the value to the customer of the entity&#x2019;s performance completed to date (i.e., certain aftermarket contracts), as such we have elected a practical expedient to recognize revenue in the amount to which the entity has a right to invoice for such services.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;Product related revenues (whether for systems or aftermarket business) are recognized at a point in time, when they are shipped or delivered, depending on shipping terms.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;For installation services, revenue is recognized at a point in time, once the installation of the tool is complete. The nature of the installation services is such that the customer does not simultaneously receive and consume the benefits provided by the entity&#x2019;s performance, nor does performance of installation services create or enhance an asset that the customer controls. Installation services do not create an asset with an alternative use to the entity, and the entity does not have an enforceable right to payment for performance completed to date.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Service-type warranties for any product are recognized over time, as these represent a stand ready obligation to service the product during the warranty period. Progress in the satisfaction of these performance obligations is measured using an input method of time elapsed. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;Maintenance and service contracts are recognized over time.  Progress in the satisfaction of these performance obligations is measured using an input method of either time elapsed in the case of fixed period contracts, or labor hours expended, in the case of project-based contracts.&lt;/span&gt;&lt;/p&gt;</us-gaap:RevenueRecognitionPolicyTextBlock>
    <acls:ExtendedProductWarrantyPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw"
      id="Narr_sQORL_8pM0OLnOlIHqFUVQ">P1Y</acls:ExtendedProductWarrantyPeriod>
    <acls:ExtendedProductWarrantyPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA"
      id="Narr_y0llugRqCUqP1-lfRUcCkA">P90D</acls:ExtendedProductWarrantyPeriod>
    <acls:ExtendedProductWarrantyPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g"
      id="Narr_E8CPiLeRMUq1pYfpj4OFwg">P3Y</acls:ExtendedProductWarrantyPeriod>
    <acls:RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_Tb9lQepmN0W7IKG7ydn9pQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(j)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recognizing Assets related to Recoverable Customer Contract Costs&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"&gt;We recognize an asset related to incremental costs incurred by us to obtain a contract with a customer if we expect to recover those costs. We will recognize an asset from costs incurred to fulfill a contract only if such costs relate directly to a contract with an entity that we can specifically identify, the costs incurred will generate or enhance resources that will be &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;used in satisfying performance obligations in the future, and the costs are expected to be recovered. Any assets recognized related to costs to obtain or fulfill a contract are amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:14pt 0pt 0pt 0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;In substantially all of our business transactions, we incur incremental costs to obtain contracts with customers, in the form of sales commissions. We maintain a commission program which awards our employees for System sales, aftermarket activity and other individual goals. Under ASC 606, an asset is amortized on a systematic basis that is consistent with the transfer to the customer of the goods or services to which the asset relates. However, ASC 606 provides a practical expedient to allow for the recognition of commission expense when incurred if the amortization period of the asset that the entity otherwise would have recognized is one year or less. Based on the nature of our commission agreements, all commissions are expensed as incurred based upon the expectation that the amortization period would be one year or less.  &lt;/span&gt;&lt;/p&gt;</acls:RecognizingAssetsRelatedToRecoverableCustomerContractCostsPolicyTextBlock>
    <acls:ShippingAndHandlingCostsPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_Qg-4IjGs00OVXeid4F33bw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(k)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Shipping and Handling Costs&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Shipping and handling costs are included in cost of revenue.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</acls:ShippingAndHandlingCostsPolicyTextBlock>
    <us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_-w5ZX2ygrk6FoE3yU2d3iQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(l)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160; Stock-Based Compensation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We generally recognize compensation expense for all stock-based payments to employees and directors, including grants of stock options and restricted stock units, based on the grant-date fair value of those stock-based payments. For stock option awards, we use the Black-Scholes option pricing model, adjusted for expected forfeitures. Other valuation models may be utilized in the limited circumstances where awards with market-based vesting considerations, such as the price of our common stock, or performance-based awards, are granted. Stock-based compensation expense is recognized ratably over the requisite service period. For each stock option or restricted stock unit grant with vesting based on a combination of time, market or performance conditions, where vesting will occur if either condition is met, the related compensation costs are recognized over the shorter of the explicit service period or the derived service period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;See Note&#160;13 for additional information relating to stock-based compensation.&lt;/p&gt;</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
    <us-gaap:IncomeTaxPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_4tutbzzCcU-c6iMIqcq-vA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(m)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Income Taxes&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We record income taxes using the asset and liability method. Deferred income tax assets and liabilities are recognized for the future tax consequences attributable to differences between the financial statement carrying amounts of existing assets and liabilities and their respective income tax basis, and operating loss and tax credit carryforwards.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our consolidated financial statements contain certain deferred tax assets which have arisen primarily as a result of operating losses, as well as other temporary differences between financial and tax basis accounting. We establish a valuation allowance if the likelihood of realization of the deferred tax assets is reduced based on an evaluation of objective verifiable evidence. Significant management judgment is required in determining our provision for income taxes, our deferred tax assets and liabilities and any valuation allowance recorded against those net deferred tax assets. We evaluate the weight of all available evidence to determine whether it is more likely than not that some portion or all of the net deferred income tax assets will not be realized.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Income taxes include the largest amount of tax benefit for an uncertain tax position that is more likely than not to be sustained upon audit based on the technical merits of the tax position. Settlements with tax authorities, the expiration of statutes of limitations for particular tax positions, or obtaining new information on particular tax positions may cause a change to the effective tax rate. We recognize accrued interest related to unrecognized tax benefits as interest expense and penalties within operating expense in the consolidated statements of operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;See Note 18 for additional information relating to income taxes.&lt;/p&gt;</us-gaap:IncomeTaxPolicyTextBlock>
    <us-gaap:EarningsPerSharePolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_m0M5tEDE1EetfdN0gv_69Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(n)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Computation of Net Income per Share&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased to include the number of additional common shares that would have been outstanding if the potentially dilutive common shares had been issued, calculated using the treasury stock method.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of net income per share are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income available to common stockholders&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 246,263&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 183,079&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 98,650&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock outstanding used in computing basic income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,758&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,043&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,555&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Incremental options and RSUs&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 407&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 499&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 713&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock used in computing diluted net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,165&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,542&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,268&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.43&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.46&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.88&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Diluted weighted average common shares outstanding does not include restricted stock units outstanding to purchase 6,025, 4,929 and 2,554 common equivalent shares for the periods ended December 31, 2023, 2022 and 2021, respectively, as their effect would have been anti-dilutive.&lt;/p&gt;</us-gaap:EarningsPerSharePolicyTextBlock>
    <us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_x66FxO7v_kecMRBxdqLkaw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.47805786%;padding-left:0pt;padding-right:0pt;width:100.95%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands,&#160;except&#160;per&#160;share&#160;data)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income available to common stockholders&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 246,263&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 183,079&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 98,650&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock outstanding used in computing basic income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,758&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,043&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,555&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Incremental options and RSUs&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 407&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 499&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 713&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted average shares of common stock used in computing diluted net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,165&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 33,542&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,268&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.52&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.59%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.51%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.28%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7.43&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.27%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5.46&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2.88&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_GguCRNg-Jkajvtcit0dsWg_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246263000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_tcf_6eKUIUeM_yEUfn6_0w_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">183079000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc__RAX8b9JkUmntNh6kILZhw_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">98650000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_i_bXSc2QKUujRRVjIYlKWA_6_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32758000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_ywRUONLXdUyULy4Xo6ttVw_6_6"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33043000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_e0YCc4--jEmRuFrr4hY5Sg_6_9"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33555000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ytZMQjvxOk2HUAwytCQ_aw_7_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">407000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_tO0Z6Qzu7keTIL5CZGpNAA_7_6"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">499000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_IqqXQxBNj0KUHTPPQ46C5g_7_9"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">713000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_nmXDgcspIEuSJziFRT-lFg_8_3"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33165000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_x5-ibSWp6EyU3Ky3_aVbLQ_8_6"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">33542000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_NifakW4Eb0m1gJu4Gq3LRw_8_9"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">34268000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Tc_nPntI8V9bEaME9_iFA3C2w_10_3"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">7.52</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Tc_hmKcSvrcSEuHJ7pp033CwA_10_6"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">5.54</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Tc_JRSC8kgC0Uu1WU2Cm4hZiw_10_9"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">2.94</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Tc_Uk8IZdsJtkaDGu9ZHrxT0A_11_3"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">7.43</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Tc_ox5BTZYkjEicwgSWp3Ihdw_11_6"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">5.46</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Tc_ADcwFdNXLEqXmoCqyZqKTQ_11_9"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">2.88</us-gaap:EarningsPerShareDiluted>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Narr_Ds6n_U5ngE2JygDWbMlMoA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">6025000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Narr_6AunEeAcxUupoxZMpTubVw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">4929000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Narr_xb8F04s7kk22pt5M6yAiEw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">2554000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <acls:AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_wO7eo7Qf8k6vfUqsflAP9w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(o)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Accumulated Other Comprehensive Loss&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table presents the changes in accumulated other comprehensive loss, net of tax, by component, for the year ended December 31, 2023:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Defined&#160;benefit&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;pension&#160;plan&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,994)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,968)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income and pension reclassification&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 38&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 122&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,956)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,846)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:AccumulatedOtherComprehensiveIncomeLossPolicyTextBlock>
    <us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_tDIILIVY10q2MzdfFMAzlg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Defined&#160;benefit&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;pension&#160;plan&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:33.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,994)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,968)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive income and pension reclassification&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 38&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 84&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 122&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.4%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,956)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.11%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 110&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,846)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_DEhEBCwN6kWhhs5ipCNeIw"
      decimals="-3"
      id="Tc_ejNN-Tl1YkOTstjItUZFzA_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1994000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2022_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_qoXIVx02EECBqzy5LRssRQ"
      decimals="-3"
      id="Tc_EFP7l936FkG4_ZwqIQc-Bw_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">26000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_qRbYPnv5UEqrF42E94JTlg_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1968000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_Ekmsr9scYE--R8wCcnElug"
      decimals="-3"
      id="Tc_Vk2REVoxa0mH78iD_NlJLw_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38000</us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_pMa3RwqDJkqzoCPJs87n0g"
      decimals="-3"
      id="Tc_Pd9xVhN-Fku5OkzmQVG2Vw_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">84000</us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_-vMzgRWAIke3JdCs_Ft2BA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">122000</us-gaap:OtherComprehensiveIncomeLossReclassificationAdjustmentFromAOCIPensionAndOtherPostretirementBenefitPlansNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_m6CBlDItoUGdcd4Vqk0hnw"
      decimals="-3"
      id="Tc_41Fiau8N-0mI8zBS7DNXIQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1956000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2023_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_TuSaOuIuF0-JMXXG4noSTA"
      decimals="-3"
      id="Tc_bdKqukwfeEyHe5WT11P9xw_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">110000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_r8RhO2ES6UqY2FohM-X_dA_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1846000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_wQi1UxNbvkqxVandK-_38Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(p)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Recent Accounting Guidance&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin:14pt 0pt 0pt 0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"&gt;&lt;/span&gt;&lt;span style="font-size:10pt;"&gt;In November 2023 the Financial Accounting Standards Board (&#x201c;FASB&#x201d;) issued Accounting Standards Update 2023-07, &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Segment Reporting (Topic 280): Improvements to Reportable Segment Disclosures&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; ("ASU 2023-07"). ASU 2023-07 is intended to enhance disclosures for significant segment expenses for all public entities required to report segment information in accordance with ASC Topic 280, &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;Segment Reporting&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; ("ASC 280"). ASC 280 requires a public entity to report for each reportable segment a measure of segment profit or loss that its chief operating decision maker (&#x201c;CODM&#x201d;) uses to assess segment performance and to make decisions about resource allocations. ASU 2023-07 is intended to improve financial reporting by requiring disclosure of incremental segment information on an annual and interim basis for all public entities to enable investors to develop more useful financial analyses. ASU 2023-07 is effective for fiscal years beginning after December 15, 2023, and interim periods within fiscal years beginning after December 15, 2024. Early adoption is permitted. A public entity should apply ASU 2023-07 retrospectively to all prior periods presented in the consolidated financial statements. The Company is currently evaluating the impact of &lt;/span&gt;&lt;i style="font-size:10pt;font-style:italic;"&gt;ASU 2023-07&lt;/i&gt;&lt;span style="font-size:10pt;"&gt; on its future consolidated financial statements and related disclosures.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:18pt;margin:14pt 0pt 0pt 0pt;"&gt;In December 2023 the FASB issued Accounting Standards Update 2023-09, &lt;i style="font-style:italic;"&gt;Income Taxes (Topic 740): Improvements to Income Tax Disclosures &lt;/i&gt;("ASU 2023-09")&lt;i style="font-style:italic;"&gt;. &lt;/i&gt;&lt;span style="color:#1d1c1d;"&gt;ASU 2023-09 is intended to enhance the transparency and decision usefulness of income tax disclosures. ASU 2023-09 addresses investor requests for enhanced income tax information primarily through changes to the rate reconciliation and income taxes paid information. Early adoption is permitted. A public entity should apply ASU 2023-09 prospectively to all annual periods beginning after December 15, 2024. The Company is currently evaluating the impact of ASU 2023-09 on its future consolidated financial statements and related disclosures&lt;/span&gt;&lt;span style="color:#1d1c1d;"&gt;.&lt;/span&gt;&lt;/p&gt;</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
    <us-gaap:RevenueFromContractWithCustomerTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_xs39fQDUn06AEuJnPNW32A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 3. Revenue&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We design, manufacture and service ion implantation and other processing equipment used in the fabrication of semiconductor chips and sell our products to leading semiconductor chip manufacturers worldwide. We offer a complete line of high energy, high current and medium current implanters for all application requirements. In addition, we provide extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance service and customer training. Our revenue recognition policies are set forth in Section (i) of Note 2, Summary of Significant Accounting Policies. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:27pt;"&gt;&lt;/td&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(a)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;"&gt;Alternative Operational Revenue Categories used by Management&lt;/b&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;To reflect the organization of our business operations, management reviews revenue in two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#x201c;CS&amp;amp;I&#x201d; or &#x201c;aftermarket.&#x201d; &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Below are the revenues by categories used by management for the periods covered in this report:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:46.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:46.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:46.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Systems&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;883,604 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;692,061 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;454,598 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Aftermarket&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 247,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 227,937&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 207,830&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;1,130,604 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;919,998 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;662,428 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:27.35pt;"&gt;&lt;/td&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(b)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;"&gt;Economic Factors Affecting our Revenue: Geographic Breakdown of Revenue&lt;/b&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Global economic conditions have a direct impact on our revenue. We are substantially dependent on sales of our products and services to customers outside of the United States. Adverse economic conditions, political instability, potential adverse tax consequences, regulatory changes and volatility in exchange rates pose a risk that our clients may reduce, postpone or cancel spending for our products and services, which would impact our revenue. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Revenue by geographic markets is determined based upon the location to which our products are shipped and where our services are performed. Revenue in our principal geographic markets is as follows: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:38.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:38.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:38.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;North America &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;174,810&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;143,701&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;48,715&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;811,308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;673,752&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;516,105&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;144,486&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;102,545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;97,608&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;662,428&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="width:27pt;"&gt;&lt;/td&gt;&lt;td style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-weight:bold;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;(c)&lt;/td&gt;&lt;td style="padding:0pt;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;"&gt;Recognition of Deferred Revenue from Contract Liabilities &lt;/b&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-style:italic;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Contract liabilities are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 154,777&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,436&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferral of revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 185,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 66,349&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recognition of deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (129,580)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (60,333)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (20,971)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 210,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 154,777&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,436&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Contract liabilities are reflected as deferred revenue on the consolidated balance sheet. Contract liabilities relate to payments received or amounts invoiced in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, we had deferred revenue of $210.9&#160;&lt;span style="white-space:pre-wrap;"&gt;million. This represents the portion of the transaction price for contracts with customers allocated to the performance obligations that remain unsatisfied or partially unsatisfied.  Short-term deferred revenue of &lt;/span&gt;$164.7&#160;million as of December 31, 2023 represents performance obligations that are expected to be satisfied within the next 12 months. This amount relates primarily to prepayments made prior to system delivery as well as to installation and non-standard warranty performance obligations for system sales. Long-term deferred revenue of $46.2&#160;million as of December 31, 2023 relates to prepayments made prior to system delivery as well as to extended warranty performance obligations that we expect to be completed in excess of the next 12 months but within the next 24 months. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The majority of our system transactions have payment terms that are 90% due upon shipment of the tool and 10% due upon installation. Aftermarket transaction payment terms are such that payment is due either within 30 or 60 days of service provided or delivery of parts. &lt;/p&gt;</us-gaap:RevenueFromContractWithCustomerTextBlock>
    <acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_ETSzRuIpLUelY2mE1NQFVw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:46.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:46.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:15.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:46.82%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Systems&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;883,604 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;692,061 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;454,598 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Aftermarket&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 247,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 227,937&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 207,830&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.54%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;1,130,604 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.6%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;919,998 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.7%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.21%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;662,428 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw"
      decimals="-3"
      id="Tc_fAcTxuHBe0K1reJOAheMQg_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">883604000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_1bP-k2K0dEaaZvALjQivWQ"
      decimals="-3"
      id="Tc__Gp7nfa8Y0OoCJUbKfwlFg_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">692061000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_0SZ6e4zPJU2wVRZHZ2ZfQA"
      decimals="-3"
      id="Tc_Mzr0YGUzv0St1ZpeaSj6RA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">454598000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_9pYLGU6VSk2hYP9bMZvZuA"
      decimals="-3"
      id="Tc_DijqUQxn_E6nSflnJEOVvA_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">247000000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_AfterMarketMember_JgLLb3ZvXkGxmtgfnUlokg"
      decimals="-3"
      id="Tc_qk0mDzBf_0Gsv1n5xwPCkQ_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">227937000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_AfterMarketMember_R3xczBeiI0u4XJaxTbqZqw"
      decimals="-3"
      id="Tc_La1BA1m07k2_cVQ1dwwzIw_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">207830000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_hmmjTfD2a0S25xbtFE--ww_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1130604000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_nBGM3-_DtU6KpE1ipHBimg_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">919998000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_267Fa-yET0CDc9bIeAtu7Q_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">662428000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_k5iEOzeYr0C90xLNsy_RPg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:38.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:38.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:38.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;North America &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;174,810&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;143,701&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;48,715&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;811,308&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;673,752&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;516,105&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;144,486&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;102,545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;97,608&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;662,428&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_NorthAmericaMember_JoPVnkw3mEm1Z6YC7LnFwg"
      decimals="-3"
      id="Tc_oFMj4vVVYEOGOhhSbc8p2w_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">174810000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_NorthAmericaMember_5SbsYIuKTE2oNfT3jl9X4Q"
      decimals="-3"
      id="Tc_HdnRfuDL_0uIeOuUwwZK1A_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">143701000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_CWF1GuDdgUmVH9UkggHm3A"
      decimals="-3"
      id="Tc_Hi7mPMS8U0KlEGQ5c21QOQ_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">48715000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A"
      decimals="-3"
      id="Tc_Ho12bK-5mEGO1mqDRvysvQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">811308000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g"
      decimals="-3"
      id="Tc_JAbcQRglM0mfp3K1ck900g_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">673752000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg"
      decimals="-3"
      id="Tc_TFyct3y9f0eoDpwim6htTg_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">516105000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw"
      decimals="-3"
      id="Tc_OWUiaRPZiU-tf0KdObparQ_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">144486000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg"
      decimals="-3"
      id="Tc_ieAXo8M6s0WYF5PP9J8hCQ_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">102545000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA"
      decimals="-3"
      id="Tc_PUTMx_L13EKbJ38NVwp3bA_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">97608000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ycwbv0MEx0657_TlgegGBA_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1130604000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_RKVZjsvkPkekd9XhimuUdQ_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">919998000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Mim_CLd1zU6SR8r5VJyo3A_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">662428000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_DH3X3e9u2Uez-_f3Ex8NjA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.86%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="10" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 154,777&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,436&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferral of revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 185,688&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 146,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 66,349&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recognition of deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (129,580)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (60,333)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (20,971)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:69.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.54%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 210,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 154,777&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 68,436&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_cmr3rxu_0EOLrEu25fvzjA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">154777000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_FpvWQ33JcE6nNxHYvPHEjw_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">68436000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"
      decimals="-3"
      id="Tc_qWCBFiZvn0y_-tCnsjObxw_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">23058000</us-gaap:ContractWithCustomerLiability>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_RTDEKp3sR0aYmwaVfTp20w_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">185688000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_Nq_pY_7wyUmt6J4AlxxOUg_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">146674000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_JVrD6O2f5kmmSPNm0_clow_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">66349000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_iGCt09YMf0qFTvdobBQ6iA_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-129580000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_T6uYQbSDnk2z5TNanIZzrw_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-60333000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Op-53fm39U-e9gqRmyiRSQ_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-20971000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_8WeILkfVx0GEE-ZkHTidLw_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">210885000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_YXJcmCrEykCqhsFb4oajgA_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">154777000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_g6jUU56JjUSu3EkJto6jDw_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">68436000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_bJ3XT2sQe0exj6AMyWkpRw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">210900000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiabilityCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_45liduKdEEiLQy863sTzdw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">164700000</us-gaap:ContractWithCustomerLiabilityCurrent>
    <us-gaap:ContractWithCustomerLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_Qd2rTNuRzE2r7jPMmGwREA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">46200000</us-gaap:ContractWithCustomerLiabilityNoncurrent>
    <acls:PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_DwurvAbnrUK_uQzfnlVyRw"
      id="Narr_mk5ZZlhVhEua36z9F8XRCQ">P24M</acls:PeriodOfUnsatisfiedExtendedWarrantyPerformanceObligations>
    <acls:PercentageOfPaymentUponShipmentOfTool
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw"
      decimals="2"
      id="Narr_b9DcHj6gR0u2J8LOxtzhVg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.90</acls:PercentageOfPaymentUponShipmentOfTool>
    <acls:PercentageOfPaymentUponInstallation
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_IInk6gkSHEGIhbA2w6S1sw"
      decimals="2"
      id="Narr_HaAQTuj9uUuQLzFISCE1zg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.10</acls:PercentageOfPaymentUponInstallation>
    <acls:PeriodOfPaymentUponDeliveryOfParts
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MinimumMember_e9PCXokvHkiSUnWQrgftxw"
      id="Narr_gvSYm3LMQU-gvYzhn6pXwA">P30D</acls:PeriodOfPaymentUponDeliveryOfParts>
    <acls:PeriodOfPaymentUponDeliveryOfParts
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_AfterMarketMember_srt_RangeAxis_srt_MaximumMember_88ADoAU_uEqMbZYfXxhj5g"
      id="Narr_hcwif6YxFU6iK0XlAYvNBw">P60D</acls:PeriodOfPaymentUponDeliveryOfParts>
    <acls:CashCashEquivalentsAndRestrictedCashTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_qRvtFF4z4EeLNoKrVHxr_A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;4. Cash, cash equivalents and restricted cash &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Cash and cash equivalents&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;167,297 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;185,595 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Long-term restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;6,654 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;752 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total cash, cash equivalents and restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;173,951 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;186,347 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, we had $6.7&#160;million in restricted cash which relates to a $5.9 million cash collateral relating to our lease for our headquarters in Beverly, Massachusetts, a $0.7&#160;million letter of credit relating to workers&#x2019; compensation insurance and a $0.1 million deposit relating to customs activity. &lt;/p&gt;</acls:CashCashEquivalentsAndRestrictedCashTextBlock>
    <acls:CashCashEquivalentsAndRestrictedCashTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_ygMqAoqfI0mLPfmjpQc_sA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Cash and cash equivalents&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;167,297 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;185,595 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Long-term restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;6,654 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;752 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total cash, cash equivalents and restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;173,951 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;186,347 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:CashCashEquivalentsAndRestrictedCashTableTextBlock>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_ihANMfWMVk6Avy036Zlj1w_4_2"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">167297000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_jd-vXY9FoEePVHLAfGaXOQ_4_5"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">185595000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:RestrictedCashAndCashEquivalents
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_2URK7RAPy0qEwGdhcpbm1g_5_2"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6654000</us-gaap:RestrictedCashAndCashEquivalents>
    <us-gaap:RestrictedCashAndCashEquivalents
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_8dlEhQRpoECp-Ywr2t9Q_g_5_5"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">752000</us-gaap:RestrictedCashAndCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Xs7f2tRUMUq4sr8N-MA0Zw_6_2"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">173951000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_L_0PvFbZ-UK5EL0g1edbhQ_6_5"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">186347000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit
      contextRef="As_Of_12_31_2023_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_CTeQSjjQTkinayDXQEOAEQ"
      decimals="-5"
      id="Narr_Tjek51ilKkOxG1slLTsI0w"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6700000</acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit>
    <us-gaap:SecurityDeposit
      contextRef="As_Of_12_31_2023_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_SfoAMMye2UK3lNLxNdJrFg"
      decimals="-5"
      id="Narr_4FisTIlpM06ubI5f_bgdeQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5900000</us-gaap:SecurityDeposit>
    <us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_C9vaiVz-gEmTnQQsVhoyAA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">700000</us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent>
    <acls:DepositRelatingToCustomsActivity
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_dhC4TWFTXUCUAYpvwg-ZEA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">100000</acls:DepositRelatingToCustomsActivity>
    <us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_41wiQvBPkkCTg8YSn2k0CA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;5. Accounts Receivable and Allowance for Credit Losses&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;Axcelis maintains an allowance for credit losses, which represents an estimate of expected losses over the remaining contractual life of its receivables considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#x2019;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in its receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"&gt;The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect its customers&#x2019; ability to pay. These factors may include the customer&#x2019;s financial condition, past payment experience, and credit ratings from credit bureaus, as well as the value of the underlying collateral.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;Management performs detailed reviews of its receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowance, while amounts recovered on previously written-off accounts increase the allowance. Changes to the allowance for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;The following table shows changes of the allowances for credit losses related to trade receivables for the twelve months ended December 31, 2023 and 2022, respectively:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:25.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:25.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:11.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:11.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Provision for credit losses&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,117&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Charge-offs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (657)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recoveries&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 460&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of accounts receivable are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80.04%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trade receivables&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 218,424&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 169,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (460)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Trade receivables, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,964&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 169,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock>
    <us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_oUp2lpYKmUihGTq1wLp0Ew">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:25.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:25.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:11.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:11.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Provision for credit losses&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,117&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Charge-offs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (657)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:72.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recoveries&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 460&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.14%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock>
    <us-gaap:ProvisionForLoanLeaseAndOtherLosses
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc__4gKlwvuCUiSR-Nqo0S95Q_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1117000</us-gaap:ProvisionForLoanLeaseAndOtherLosses>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_yN7l036QWk2hS25vIc8dVw_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">657000</us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_af31dLcT60K6dO-H-cF1aQ_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">460000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
    <us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_Gsxh6BgfG0KSe200NhRH0g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80.04%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Trade receivables&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 218,424&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 169,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Allowance for doubtful accounts&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (460)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:73.58%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Trade receivables, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.01%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 217,964&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 169,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfAccountsNotesLoansAndFinancingReceivableTextBlock>
    <us-gaap:AccountsReceivableGrossCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_ljUy14E1h0m94hkL_a-27A_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">218424000</us-gaap:AccountsReceivableGrossCurrent>
    <us-gaap:AccountsReceivableGrossCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Ydx9K1RUPUGSucVxuf4X-A_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">169773000</us-gaap:AccountsReceivableGrossCurrent>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_QCdviq-O9UW_T0thKGpjqw_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">460000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_5JAU1LoEkUOmxDtwJmfdRQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">217964000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_1gswB_VVs0yAV9RwuE9eiw_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">169773000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:InventoryDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_es-bp_6FzEa2GUuYRr6HTA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;6. Inventories, net&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of inventories are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:81.19%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Raw materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 231,200&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 187,313&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Work in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 45,373&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,069&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Finished goods (completed systems)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,909&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20,024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Inventories, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 306,482&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 242,406&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;When recorded, inventory reserves are intended to reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for our products or market conditions. We regularly evaluate our ability to realize the value of inventories based on a combination of factors including the following: forecasted sales and the size and utilization of our installed base,&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure. In 2023, we recorded a decrease of $1.5 million in inventory reserves. At December 31, 2023 and 2022, inventories are stated net of inventory reserves of $5.2&#160;million and $6.7&#160;million, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;During the years ended December 31, 2023, 2022 and 2021, we recorded charges to cost of sales of $5.2 million, $4.6 million and $3.8 million, respectively, to adjust inventories to their lower of cost or net realizable value.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have inventory on consignment at customer locations at December 31, 2023 and 2022, of $6.5 million and $6.4 million, respectively.&lt;/p&gt;</us-gaap:InventoryDisclosureTextBlock>
    <us-gaap:ScheduleOfInventoryCurrentTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_iitWJ3HDpUGy9LS31rVoTA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:81.19%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:25.11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Raw materials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 231,200&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 187,313&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Work in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 45,373&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,069&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Finished goods (completed systems)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,909&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 20,024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:70.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Inventories, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 306,482&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 242,406&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_fyX7gQjWv0uPnOlZ2WQHSQ_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">231200000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_YGQfv9Th9kapEYET5yWrdQ_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">187313000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_evbZIOpCukyBwkP0zKdUYw_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45373000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_ZLpd-2sXyEib0_s7UdLEUg_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">35069000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_fosN0Lm8CUuhn2f0hiRYaw_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">29909000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Q5_R4v2WQ0KLJsf4hx5_EA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20024000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_7u5RjCMq10qJrj_qoVdPXg_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">306482000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_NxtvX5jH00C05fvPJtUZPA_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">242406000</us-gaap:InventoryNet>
    <acls:IncreaseInInventoryReserves
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_sW8kVrEeNUqWURUNmiDSmw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1500000</acls:IncreaseInInventoryReserves>
    <us-gaap:InventoryValuationReserves
      contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_c5IOe__eWka7z2RDpzRfUw"
      decimals="-5"
      id="Narr_0uNzr1mre0yVTjV5FB_ftA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5200000</us-gaap:InventoryValuationReserves>
    <us-gaap:InventoryValuationReserves
      contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_InventoryValuationReserveMember_GLWI7xYFXUmyD_aD5jx5nQ"
      decimals="-5"
      id="Narr_7WwqNzn4J0GfpASWT1Y1Mg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6700000</us-gaap:InventoryValuationReserves>
    <acls:ChargesRelatedToReflectLowerOfCostOrMarketValue
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_HFzdAxnT8Uq0ftavSXb-rw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5200000</acls:ChargesRelatedToReflectLowerOfCostOrMarketValue>
    <acls:ChargesRelatedToReflectLowerOfCostOrMarketValue
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_DxySxSK450C1Y-iO_KE-Pg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4600000</acls:ChargesRelatedToReflectLowerOfCostOrMarketValue>
    <acls:ChargesRelatedToReflectLowerOfCostOrMarketValue
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_NOdraym4B0SFP2Gagb3DkA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3800000</acls:ChargesRelatedToReflectLowerOfCostOrMarketValue>
    <us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_rwJn-Ni2zk-wp4p3FRKR2Q"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6500000</us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment>
    <us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-5"
      id="Narr_fPPCHUpNdEGZ5h_ZysNGFA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6400000</us-gaap:OtherInventoryMaterialsSuppliesAndMerchandiseUnderConsignment>
    <us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_TRnsQkWr4EGEJvccpYHkgg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;7. Property, Plant and Equipment, net&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of property, plant and equipment are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82.84%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land and buildings&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,802&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18,001&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,547&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,728&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Construction in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,055&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,189&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 80,404&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 62,918&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (26,433)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23,254)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Property, plant and equipment, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,971&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,664&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Depreciation expense was $6.2&#160;million, $5.1&#160;million and $4.2&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively. &lt;/p&gt;</us-gaap:PropertyPlantAndEquipmentDisclosureTextBlock>
    <us-gaap:PropertyPlantAndEquipmentTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_maJqWMF0A0GXWrQTWy9aOQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:82.84%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Land and buildings&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,802&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18,001&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Machinery and equipment&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 41,547&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 34,728&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Construction in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 17,055&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,189&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 80,404&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 62,918&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (26,433)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (23,254)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Property, plant and equipment, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,971&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,664&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:PropertyPlantAndEquipmentTextBlock>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_by3yUhzzMUOHGUmsw6NmdA"
      decimals="-3"
      id="Tc_FmSA6_sWRESSe1NWKFUU1Q_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21802000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandAndBuildingMember_rLpWCJ1ySU6lbxpkZu3LRg"
      decimals="-3"
      id="Tc_Bpfb8kpk0kK5sB7FwlvuEw_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18001000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_sUEs6zlqCUiqrDtxx8jTkg"
      decimals="-3"
      id="Tc_ABLYbr3kSkirnGhh17fPKA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">41547000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_BJ81Px-3jUOOdA81zS1yUw"
      decimals="-3"
      id="Tc_QfDDxdM8kUayN_WdKMk7IA_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">34728000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_34ulAvTgIkqsxw-o7sAllQ"
      decimals="-3"
      id="Tc_pi4EmBZ170elmwrcnq-frg_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">17055000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_ConstructionInProgressMember_5qFeDvcA_0q_U037-XKGbA"
      decimals="-3"
      id="Tc_U7DbqE8nXE-KasEb0lagaA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10189000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_spNHqSQOjEOCmPMh3P2kjQ_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">80404000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:PropertyPlantAndEquipmentGross
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_j_fM7pduu0qeDDr6yHxyNQ_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">62918000</us-gaap:PropertyPlantAndEquipmentGross>
    <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_InpDNnnp3EKPl_CjMZWNeg_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">26433000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
    <us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Mh9dfsLnM0Ccb7bPUpH2yg_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">23254000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_h2QR-Bcq8EKONJ-Nhc9Ihg_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53971000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_vYq4a6WCfE6aH5jQ3J76bQ_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">39664000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_GyzGzdnrOUCRq6-OJTPODQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6200000</us-gaap:Depreciation>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_aqWs4FeM7k6CaQOap0eBWQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5100000</us-gaap:Depreciation>
    <us-gaap:Depreciation
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_UuxGhzWbLkOv5bkBCcaUhg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4200000</us-gaap:Depreciation>
    <acls:AssetsManufacturedForInternalUseDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_BfiiSrKrLkSrVVgTiF04HQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;8. Assets Manufactured for Internal Use, net&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Assets manufactured for internal use, included in other assets, are depreciated using the straight-line method over their 10 year estimated useful life. Their components are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Internal use assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 76,273&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 61,603&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Construction in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 236&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,629&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 76,509&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,232&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (39,588)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (33,992)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Assets manufactured for internal use, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;These products are used for research and development, training, and customer demonstration purposes.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Depreciation expense was $5.6&#160;million, $5.2&#160;million and $5.3&#160;million for the years ended December 31, 2023, 2022 and 2021, respectively.&lt;/p&gt;</acls:AssetsManufacturedForInternalUseDisclosureTextBlock>
    <acls:PropertyPlantAndEquipmentOtherUsefulLife
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q"
      id="Narr_njF6yajQAky4bajlmrMyPQ">P10Y</acls:PropertyPlantAndEquipmentOtherUsefulLife>
    <us-gaap:ScheduleOfOtherAssetsTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_DEN-D_ymZkGeSfT96NTbNA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Internal use assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 76,273&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 61,603&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Construction in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 236&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,629&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 76,509&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 64,232&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Accumulated depreciation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (39,588)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (33,992)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:74.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Assets manufactured for internal use, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 30,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.5%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfOtherAssetsTableTextBlock>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_hukGzR6rT0Sv-Xpf1xySNg"
      decimals="-3"
      id="Tc_sSksI09cuE-tH4r_3ig0vw_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">76273000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_acls_CompletedInternalUseAssetsMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_9EIzoIV5jku9H0iOx7c2eQ"
      decimals="-3"
      id="Tc_iNsuQWPwvE-RgelEcEGI6g_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">61603000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2023_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_uSoKKtTL3EeayP_UYwb4aA"
      decimals="-3"
      id="Tc_z13PMQBxX0mBQZfqvtxcPg_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">236000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2022_acls_InternalUsedAssetsTypeAxis_us-gaap_AssetUnderConstructionMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_6BiqVHo39E25KiWhAgwHWQ"
      decimals="-3"
      id="Tc_1fRcPpvCp0O-jWuLBJmxpw_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2629000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ"
      decimals="-3"
      id="Tc_n9zHum_MC0CqNJ3NCgZbBA_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">76509000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOther
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ"
      decimals="-3"
      id="Tc_6Jb2kvRms021I2pw_xp1XA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">64232000</us-gaap:PropertyPlantAndEquipmentOther>
    <us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ"
      decimals="-3"
      id="Tc_BQyH6FD50E-nzvfzP6RmcQ_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">39588000</us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation>
    <us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ"
      decimals="-3"
      id="Tc_On8dBrSFEkKVE1VhhNCEoA_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">33992000</us-gaap:PropertyPlantAndEquipmentOtherAccumulatedDepreciation>
    <us-gaap:PropertyPlantAndEquipmentOtherNet
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LgubM9peWE-BfC78rqIcuQ"
      decimals="-3"
      id="Tc_HpfPC_1kKUKl7QobXKT1Nw_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">36921000</us-gaap:PropertyPlantAndEquipmentOtherNet>
    <us-gaap:PropertyPlantAndEquipmentOtherNet
      contextRef="As_Of_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_LLsRZERdHEqfjIEkadSawQ"
      decimals="-3"
      id="Tc_RY3s3d1Tm0qQ4I3O0OriGA_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">30240000</us-gaap:PropertyPlantAndEquipmentOtherNet>
    <us-gaap:OtherDepreciationAndAmortization
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_-8u3sYeFAEadyLe89ZZg4Q"
      decimals="-5"
      id="Narr_6fhvYtqzH0-zmF1GyZmORw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5600000</us-gaap:OtherDepreciationAndAmortization>
    <us-gaap:OtherDepreciationAndAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_MVnzW5NrJ0qmvFlQgL8X3g"
      decimals="-5"
      id="Narr_cjJP827okkyy_yVjW9mQ8w"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5200000</us-gaap:OtherDepreciationAndAmortization>
    <us-gaap:OtherDepreciationAndAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_AssetsManufacturedForInternalUseMember_Iw5yocB58EylycBimPDlAw"
      decimals="-5"
      id="Narr_reFU43pWaE2UHXs74B0QJA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5300000</us-gaap:OtherDepreciationAndAmortization>
    <acls:LeaseDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_V8cEXaNm6UC0RVAzT43h1g">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;9. Leases&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have operating leases for manufacturing, office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease in relation to the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. We review all agreements to determine if the agreement contains a lease component. An agreement contains a lease component if it provides the use of a specific physical space or a specific physical item. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We recognize operating lease obligations under Accounting Standards Codification - Leases (Topic 842). The guidance in Topic 842 requires recognition of lease assets and related liabilities on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. The value of the right-of-use asset is initially determined based on the net present value of the associated &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;liability, and is adjusted for deferred costs and possible impairments, if any. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more options to renew, with renewal terms that can extend the respective lease term 1 to 3 years. The exercise of lease renewal options is at our sole discretion. For lease extensions that are reasonably certain to occur, we have included the renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements are limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,716&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,146&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 16,632&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 17,942&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,348&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,088&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_4WmvFNfdLESy1k-c9Ty0ow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;Other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,367&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Current portion of finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,511&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,229&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Non-current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_wOYBbjMi40W2UbMQy9eAbw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;Other long-term liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 25,724&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,931&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 43,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 45,185&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 75,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 58,712&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="8" style="vertical-align:top;width:95.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;*Finance lease assets are recorded net of accumulated depreciation of $46.4 million and include $0.6 million of prepaid financing costs as of December 31, 2023. Finance lease assets are recorded net of accumulated depreciation of $45.9 million and include $0.6&lt;span style="white-space:pre-wrap;"&gt; million of prepaid financing costs as of December 31, 2022.  &lt;/span&gt;&lt;br/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;All of our office locations support selling and servicing functions. We also have a manufacturing facility in South Korea. Lease expense, depreciation expense relating to finance leased assets and interest expense relating to our finance lease obligation recognized within our consolidated statement of operations for the twelve-month periods ended December &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;31, 2023, 2022 and 2021 are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:25.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Product / services*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,297&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,427&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 587&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 322&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 430&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Sales and marketing*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,526&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,605&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;General and administrative*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,111&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,065&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 996&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total operating lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,669&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,340&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,009&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Depreciation of leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue, Research and development, Sales and marketing and General and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,310&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,296&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,306&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest on lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,874&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,992&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total finance lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,184&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,392&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 16,853&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 14,628&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,401&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="11" style="vertical-align:bottom;width:96.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Product / services, sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $2.1 million, $1.8 million and $1.9 million for the years ended December 31, 2023, 2022 2021, respectively.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our corporate headquarters, shown below under finance leases, has an original lease term of 22 years. All other locations are treated as operating leases, with lease terms ranging from 1 to 16 years. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Maturity of Lease Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,529&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,781&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,930&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,900&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,008&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,613&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 9,621&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,530&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,658&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2028&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,251&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 23,205&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 78,541&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 85,905&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 42,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 128,678&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Less interest portion*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (40,720)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (12,071)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (52,791)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease and operating lease obligations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 45,185&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,702&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 75,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The table above does not include options to renew lease terms that are not reasonably certain of being exercised, nor leases signed but not yet commenced as of December 31, 2023.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease term and discount rate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average remaining lease term (years):&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;11.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;13.1&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average discount rate:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;5.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;10.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating section of our statement of cash flows. Our cash flows from our finance lease include an interest and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash paid for amounts included in the measurement of lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,669&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,340&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,009&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,874&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,992&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Financing cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 987&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 763&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets obtained in exchange for operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 26,890&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,670&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets obtained in exchange for new finance lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</acls:LeaseDisclosureTextBlock>
    <us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_DruIhn-So0CJWsBkwlrCOQ">true</us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend>
    <us-gaap:LesseeOperatingLeaseRenewalTerm
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw"
      id="Narr_ar34bx-QtE2Crl-WPL6vIA">P1Y</us-gaap:LesseeOperatingLeaseRenewalTerm>
    <us-gaap:LesseeOperatingLeaseRenewalTerm
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag"
      id="Narr_eacfeWlG7kC6xwrIe8oTZw">P3Y</us-gaap:LesseeOperatingLeaseRenewalTerm>
    <acls:LeaseBalanceSheetDisclosureTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_RQlPp8HARkGdhPDYaooAdw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,716&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,146&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 16,632&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 17,942&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,348&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,088&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_4WmvFNfdLESy1k-c9Ty0ow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;Other current liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,367&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Current portion of finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,511&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,229&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Non-current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_wOYBbjMi40W2UbMQy9eAbw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;"&gt;Other long-term liabilities&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 25,724&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,931&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 43,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 45,185&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 75,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 58,712&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:51.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:19.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="8" style="vertical-align:top;width:95.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;*Finance lease assets are recorded net of accumulated depreciation of $46.4 million and include $0.6 million of prepaid financing costs as of December 31, 2023. Finance lease assets are recorded net of accumulated depreciation of $45.9 million and include $0.6&lt;span style="white-space:pre-wrap;"&gt; million of prepaid financing costs as of December 31, 2022.  &lt;/span&gt;&lt;br/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:LeaseBalanceSheetDisclosureTableTextBlock>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_1ZKGM_BymUOYHKJAmIpiLg_4_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">30716000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_orz_ls0r5UepsNtmlRQCdw_4_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12146000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc__pkVnOhwukqJewt3BPaRaw_5_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16632000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_B3rFCyiKfUWAElR8UTV0NA_5_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">17942000</us-gaap:FinanceLeaseRightOfUseAsset>
    <acls:OperatingAndFinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc__4QNvmJjcUaKt1Evs53I6g_6_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">47348000</acls:OperatingAndFinanceLeaseRightOfUseAsset>
    <acls:OperatingAndFinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_lm1pCyGggEu_4BsER6KoPg_6_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">30088000</acls:OperatingAndFinanceLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_79LJwop7d0ConM_QFDxBtQ_9_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4978000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_xfA1T4QAtU2TuD9JltH2yA_9_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5367000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_s9pB4S5AiUu58PZQii68rg_10_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1511000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Xy6LFqSRmU-uZ0X5u2tquA_10_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1229000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_IBrMTRlAmU6qRC3SgFpljQ_12_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25724000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_hSU5NsQwiU-v8qhtvde4Dw_12_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6931000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_j_S77cJ9x0GarrL6En9TSQ_13_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">43674000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_qhTbEdKYFESYKHgoOSgwkA_13_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45185000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_LKaypFv8fU6FRir4BgV0ag_14_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">75887000</acls:OperatingAndFinanceLeaseLiability>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_T__fYMxEjE2Wn2fOzm4jyA_14_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">58712000</acls:OperatingAndFinanceLeaseLiability>
    <acls:FinanceLeaseAccumulatedDepreciation
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_3RfZbORDx0StE-cD98_N5Q"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">46400000</acls:FinanceLeaseAccumulatedDepreciation>
    <us-gaap:PrepaidRent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_HwnZahMFIUe8VyCEuSeE5A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">600000</us-gaap:PrepaidRent>
    <acls:FinanceLeaseAccumulatedDepreciation
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-5"
      id="Narr_AgRz840x3UOWAUuubvDy9g"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45900000</acls:FinanceLeaseAccumulatedDepreciation>
    <us-gaap:PrepaidRent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-5"
      id="Narr_JAit6Dwyn0mqQisaf3HQoA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">600000</us-gaap:PrepaidRent>
    <us-gaap:LeaseCostTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_6tbDxFSsCkmFq_LB_V5q6w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:7pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;width:25.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:25.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Product / services*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,297&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,427&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 587&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 322&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 430&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Sales and marketing*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,674&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,526&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,605&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;General and administrative*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,111&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,065&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 996&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total operating lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,669&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,340&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,009&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Depreciation of leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue, Research and development, Sales and marketing and General and administrative&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,310&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,296&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,306&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest on lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,874&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,992&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total finance lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,184&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,392&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 16,853&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 14,628&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,401&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:44.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:24.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="11" style="vertical-align:bottom;width:96.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Product / services, sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $2.1 million, $1.8 million and $1.9 million for the years ended December 31, 2023, 2022 2021, respectively.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:LeaseCostTableTextBlock>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_QSwl2AmY80adkhffvz0gCg"
      decimals="-3"
      id="Tc_feBNYCBDOUaGH1m-o6a5lQ_5_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7297000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_rglxkDWFOESLtoer65iEHw"
      decimals="-3"
      id="Tc_-10RpzLBbkyKY7eeHEChCw_5_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5427000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_acls_ProductOrServiceMember_MwkElhV-1UmpfvM7cwqj0w"
      decimals="-3"
      id="Tc_qf0PKI_Wske7HEqCU8ZIaQ_5_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2978000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_w8rDIieJWkWfpWIiv4XSUw"
      decimals="-3"
      id="Tc_ZUP7ecrYaEC5ono0ITKZCQ_6_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">587000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_DMi5sb8OTUuT5keU6YBerg"
      decimals="-3"
      id="Tc_GlwUl8ob8EupQA12QFu7IA_6_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">322000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_v_arZAXy-EqBQBV34KuibQ"
      decimals="-3"
      id="Tc_gzqG1ohmXkCNq6QldKq0fw_6_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">430000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_1QQS8yEFjUib8d8knVG_9A"
      decimals="-3"
      id="Tc_HHoswrqAw0GfzcN_Py9iYQ_7_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1674000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_bXVg4s95EE6tnCE0idB63g"
      decimals="-3"
      id="Tc_zW-FicpTSU-ZPXud0Y1v4A_7_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1526000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_0bkVSRvn3EaEnUCrA02baQ"
      decimals="-3"
      id="Tc_-Gug9BZioESNJ0JytCHOhA_7_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1605000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_NQsL3qslNkeZfRsITmZe9Q"
      decimals="-3"
      id="Tc_-hvGAfdD0kWWuRYOQ0_OzQ_8_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1111000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_4NfHaW5CA0yJLxDy_YXdhw"
      decimals="-3"
      id="Tc_HOgziTkD_U-QsyKg6mx5TQ_8_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1065000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_IIxy0K8yAk2AND2S5bQL0A"
      decimals="-3"
      id="Tc_hAW6NiQ8jU-rVTKgjF5UYw_8_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">996000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_-NY5a4dCX0WxadlHLHXAPw_9_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10669000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_L87t0hHXNkq8fZQzERJgzQ_9_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8340000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_1nkEVv-a10qDpaWQRQoG5Q_9_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6009000</us-gaap:OperatingLeaseCost>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_uv_1LhcD7E-B6TDX4TD_Ag_11_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1310000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_tXReuOqEOUGBOz-Q93LOdw_11_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1296000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_FFC_HZvqbE-6qr8RMl3M7A_11_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1306000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_qpsYdsU2CkS0GqBgHpV4zA_12_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4874000</us-gaap:FinanceLeaseInterestExpense>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_vnsMvmIMu0WxQZBynQIE4A_12_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4992000</us-gaap:FinanceLeaseInterestExpense>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_764UDWowP0ihSwLUaqtrZA_12_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5086000</us-gaap:FinanceLeaseInterestExpense>
    <acls:FinanceLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_T3auLfhOPkKTWhhlM2McLA_13_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6184000</acls:FinanceLeaseCost>
    <acls:FinanceLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_TyM7Flvzqku_pqW99VJHAw_13_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6288000</acls:FinanceLeaseCost>
    <acls:FinanceLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_w94AnD980EOKFOcaY0a6_Q_13_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6392000</acls:FinanceLeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_I02iTID6AkW1nKOW3zfrnw_15_4"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16853000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_r0BAAev3BUGI0lE2r77a_A_15_7"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">14628000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_N5j4XEDkZUi1qR-X1NbQhQ_15_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12401000</us-gaap:LeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_jH5MMxykMk2ABHmN4NaNyw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2100000</acls:ShortTermAndVariableLeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_eBp-gx_5zkOrGlwcGFbbOw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1800000</acls:ShortTermAndVariableLeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_ybptBt_X_EuMCImI7HFofg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1900000</acls:ShortTermAndVariableLeaseCost>
    <us-gaap:LesseeFinanceLeaseTermOfContract1
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Narr_6f-7dHg1jEOchIFYrI_j1w">P22Y</us-gaap:LesseeFinanceLeaseTermOfContract1>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MinimumMember_IZY_BMp0LUK5oIysXD_PYw"
      id="Narr_CYlBRMA1506GtxCN0t6CJQ">P1Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_XIDehtxGGEKhlW--Z_rSag"
      id="Narr_xCHRm1x_r0KH9DEhHPbxlA">P16Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Group_FVy6p9S7uUOHzNhhmLurJw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Maturity of Lease Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,529&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 12,781&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,930&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,970&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,900&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,008&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,613&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 9,621&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2027&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,530&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,658&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2028&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,251&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 23,205&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 78,541&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 85,905&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 42,773&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 128,678&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Less interest portion*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (40,720)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (12,071)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (52,791)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease and operating lease obligations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 45,185&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 30,702&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 75,887&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_-qFcj7TfXU-yRAF7HJsdSw_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6252000</us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_QMjVxE1sf0WSbNbxCqiDDQ_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6529000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_RHbrLcOJDUOFssdVWDUQMg_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12781000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_VCO2F6nh-k-mqdD0Svc27A_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5930000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_-_HI3WD5_0WV20dHzX--1A_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4970000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_JijN7tb-bEO3fgeSJZYPIA_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10900000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Ai2boDzK-kKJ-vXWIor8zQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6008000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc__wnFpQIem0OXziPCIaXVFg_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3613000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Gi5T1NWCHEabda67mo5asQ_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9621000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_sLRdd3sGT0292DjfvmrrFw_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6128000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_IgZ3YEDqWU6W8dB1-SOvZA_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2530000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_xVQRBtI1jk2MoEiF2EU9Ig_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8658000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_J9KiczuEFUaA-5IqnxztwA_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6251000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearFive>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_D0JShm0J9ky9z6AYYjUWbA_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1926000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFive>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Ncj5NbGUj0OQjjg0pxX9Rg_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8177000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueAfterYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_AiId4pwm1UujJTyQscuNLA_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">55336000</us-gaap:FinanceLeaseLiabilityPaymentsDueAfterYearFive>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_tNTn4BiYwka_b_GpSAk5bA_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">23205000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_x6-c6eW2fEKXKCsFhzlWqg_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">78541000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive>
    <us-gaap:FinanceLeaseLiabilityPaymentsDue
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_CS_2DEpaSEGkOCUnblgmhA_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">85905000</us-gaap:FinanceLeaseLiabilityPaymentsDue>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_XfFsjMWR4kqQ1SGqTc4U8w_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">42773000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_bIJFh_ptdk-1GmtLoK89pw_10_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">128678000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue>
    <us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc__sD7HHQgC0SRP4qgeztX8A_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">40720000</us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount>
    <us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_9hJ0b862YESeb-RoJDjS9w_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12071000</us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_qpkdeT2EsUOYd_bmuLPPfg_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">52791000</acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount>
    <us-gaap:FinanceLeaseLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_1nDtunxSKky33L-IcGAUoQ_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45185000</us-gaap:FinanceLeaseLiability>
    <us-gaap:OperatingLeaseLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Uq2oVhyxuEeFfPJ3oS2yxw_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">30702000</us-gaap:OperatingLeaseLiability>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_9Z5NWpjbP0yEyUcUVmBLSw_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">75887000</acls:OperatingAndFinanceLeaseLiability>
    <acls:LeaseQuantitativeDisclosureTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_kyjGsV8ZGUyLUl0sSmMy9w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease term and discount rate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average remaining lease term (years):&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;11.5&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;13.1&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average discount rate:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;5.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;10.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:LeaseQuantitativeDisclosureTableTextBlock>
    <us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Tc_erhPci7sNkqO8WFSHi6Upg_4_3">P11Y6M</us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1>
    <us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      id="Tc_EgwREAimq0CyA99FlLCFpA_5_3">P13Y1M6D</us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1>
    <us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="3"
      id="Tc_FPzMz3jZ5EulbCqw_pScXQ_7_3"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.055</us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent>
    <us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="3"
      id="Tc_oVR9wImX7kKj62VnjPK_3A_8_3"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.105</us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent>
    <acls:LeaseCashFlowInformationDisclosureTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_WSsyGQQuiEy1IlxJslTdDQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash paid for amounts included in the measurement of lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:35.35%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 10,669&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,340&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,009&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,874&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,992&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,086&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Financing cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 987&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 763&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets obtained in exchange for operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 26,890&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,173&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,670&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets obtained in exchange for new finance lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</acls:LeaseCashFlowInformationDisclosureTableTextBlock>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_a-nHzWRmqUCtwIRROuYZnA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10669000</us-gaap:OperatingLeasePayments>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_1l7zF5hupkSOeo8EBzbtbQ_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8340000</us-gaap:OperatingLeasePayments>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_fC2r_49VTkqsWGzk9hfMaQ_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6009000</us-gaap:OperatingLeasePayments>
    <us-gaap:FinanceLeaseInterestPaymentOnLiability
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_LGAV_r8AS0ei22fjl346mA_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4874000</us-gaap:FinanceLeaseInterestPaymentOnLiability>
    <us-gaap:FinanceLeaseInterestPaymentOnLiability
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_13Axu9yxdECeJym5nAlWWw_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4992000</us-gaap:FinanceLeaseInterestPaymentOnLiability>
    <us-gaap:FinanceLeaseInterestPaymentOnLiability
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_gdrs6xJrvEiEyjwKLJE__A_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5086000</us-gaap:FinanceLeaseInterestPaymentOnLiability>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_goH-ueYG4EWtm8Ge2OPGjQ_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1240000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_nfi9nQZob0O8-M6JzgUYig_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">987000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_YandEreV-0ajZOoQkB_1VQ_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">763000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_tNiYhGbE0UiQfKR8ebbrhA_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">26890000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_dVg61MQ2O0mkG_-W1dEbyw_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6173000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_DxU6swzg2UWFHdRLntoOZg_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8670000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:ProductWarrantyDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_1M4aafY-WE-V5EyXzyB4EA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;10. Product Warranty&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We generally offer a one-year warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The changes in our product warranty liability are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at January&#160;1 (beginning of year)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,612&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Warranties issued during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,893&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,597&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,808&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements made during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,230)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4,282)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,607&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (236)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,214)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at December 31 (end of period)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as current&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14,098&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,299&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,424&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as long-term (within other long-term liabilities)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,659&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,188&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"&gt;Total warranty liability&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ProductWarrantyDisclosureTextBlock>
    <acls:ProductWarrantyPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Narr_ttNTeTSOgEuvgTVE9ZiL-w">P1Y</acls:ProductWarrantyPeriod>
    <us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_0fCjyqKDuECQK538payqUQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at January&#160;1 (beginning of year)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,612&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Warranties issued during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 12,893&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,597&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,808&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements made during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,230)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,798)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4,282)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,607&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (236)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,214)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at December 31 (end of period)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as current&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 14,098&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,299&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,424&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as long-term (within other long-term liabilities)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,659&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,188&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 500&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"&gt;Total warranty liability&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,487&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.89%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc__F0o17G6QEK-UkaqWwtOJA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10487000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_o4e0YBEAG066aNxnx8-EeQ_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6924000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"
      decimals="-3"
      id="Tc_gKU6A_f3J0S33HWNZD1LCQ_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4612000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_xDBIEsW9T0qJZQdnFlQrsQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12893000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_z4zLpqDDi0uEHEk1ttYwlA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10597000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_iUpmG1BybkewG_vXQP950g_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7808000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_gEPnHrBSAkmXsiYaAmWqRw_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10230000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_3ARfz9GZ5EGnnIHAroZo1w_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6798000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_2V4YzDwFakGrT_lBk1M8gQ_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4282000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Bu3jM25j40Wu2tsaQY5Vug_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3607000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_QY_qL_-Vj02QQ1lbWYHCGw_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-236000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_wD-4PTrZMUKAfevT0MQQaA_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1214000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_dWEBzbIEXEqQwo6WmWwQhg_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16757000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_BEdP-obnnUOUESVBHy8LDg_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10487000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_HV01M4AFHUWqO-uKnFE1fg_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6924000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_bmOxUH9N9EG8sCOvMcJkUg_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">14098000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_T8Ku04DFtUimoxl_8R53Lg_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8299000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_JwkYpnMgl0qJrNfnogLyDA_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6424000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_k2GLwvn64kyil50hiv1sPw_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2659000</us-gaap:ProductWarrantyAccrualNoncurrent>
    <us-gaap:ProductWarrantyAccrualNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_yIiaKLUWmESspeq9boUqCw_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2188000</us-gaap:ProductWarrantyAccrualNoncurrent>
    <us-gaap:ProductWarrantyAccrualNoncurrent
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_qMfmenVtUU2wX2p3CHJ50w_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">500000</us-gaap:ProductWarrantyAccrualNoncurrent>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_sts-2U7_FE2_jqtMzwGU2A_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16757000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_7hvkeuzA5EWdsABJunf3vA_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10487000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_T44XYxnQx0eNDUvYDZyC3w_13_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6924000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:DebtDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_wzegq61XwkWBJhJu9Nl0IA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;11. Financing Arrangements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On January 30, 2015, we sold our corporate headquarters facility for the sale price of $48.9 million. As part of the sale, we also entered into a 22-year lease agreement with the buyer. The sale leaseback is accounted for as a financing arrangement for financial reporting purposes and, as such, we recorded a financing obligation of $45.2 million as of December 31, 2023, $1.5 million of which is classified within current liabilities. The associated lease payments include both an interest component and payment of principal, with the underlying liability being extinguished at the end of the original lease term. As of December 31, 2023, we had a security deposit of $5.9 million related to this lease.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On April 5, 2023, we terminated the Senior Secured Credit Facilities Credit Agreement, as amended (the &#x201c;Credit Agreement&#x201d;), with Silicon Valley Bank that we entered into on July 31, 2020. The Credit Agreement provided for a revolving credit facility covering borrowings and letters of credit in an aggregate principal amount not to exceed $40.0 million. Our obligations under the Credit Agreement were secured by a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. Upon termination, these liens and all other obligations under the credit agreement, were released. A letter of credit issued by Silicon Valley Bank, a division of First Citizens Bank &amp;amp; Trust Company (successor by purchase to the Federal Deposit Insurance Corporation as Receiver for Silicon Valley Bridge Bank, N.A.) as successor to Silicon Valley Bank in the amount of $5.9&lt;span style="white-space:pre-wrap;"&gt; million securing our lease on our corporate headquarters was terminated on December 28, 2023.  The underlying cash collateral held at Silicon Valley Bank was released on December 28, 2023, in conjunction with the letter of credit termination.  A replacement, cash collateralized letter of credit was issued on December 14, 2023 with UBS Bank USA and is classified as long-term restricted cash on our balance sheet at December 31, 2023.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DebtDisclosureTextBlock>
    <us-gaap:ProceedsFromSaleOfPropertyHeldForSale
      contextRef="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_Rs_z9QPg402tAph_TIU5fg"
      decimals="-5"
      id="Narr_8c_gGlfCfkCMwZ9PJDhpMg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">48900000</us-gaap:ProceedsFromSaleOfPropertyHeldForSale>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_a2DM8i2nWUC3WieQNMO8Kw"
      id="Narr_sHJvOKOamEWttzyDVvahBg">P22Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA"
      decimals="-5"
      id="Narr_z-oSyrpg4kGOe17m9dfdKg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45200000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA"
      decimals="-5"
      id="Narr_gm-cF8viMUaS5eyQ8OHciA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1500000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:SecurityDeposit
      contextRef="As_Of_12_31_2023_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_1Rqsq7dwckCVoep84boNlA"
      decimals="-5"
      id="Narr_1rbsTVaIik-q7p9aK5U_XQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5900000</us-gaap:SecurityDeposit>
    <us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity
      contextRef="As_Of_4_5_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_kkaSLd1LM0C9esG8HkUCVA"
      decimals="-5"
      id="Narr_fODFGRx7n0CYAFIpjgq5gw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">40000000.0</us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity>
    <us-gaap:LettersOfCreditOutstandingAmount
      contextRef="As_Of_12_28_2023_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_ua0-Jcp4OUSOLk7dWfem3A"
      decimals="-5"
      id="Narr_tQ-FUrOMX0mSKRfAhwWa0g"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5900000</us-gaap:LettersOfCreditOutstandingAmount>
    <us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_3uTsx-v1_EeXmOYuHKDduA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;12. Employee Benefit Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Defined Contribution Plan&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We maintain the Axcelis Long-Term Investment Plan, a defined contribution plan. Eligible employees may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service (&#x201c;IRS&#x201d;) limitations. Highly compensated employees may contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. In 2023, 2022 and 2021, we provided an employer match of 50% of employees&#x2019; pre-tax contributions on the first 6% of eligible compensation. Total related matching contribution expense was $3.4 million, $2.7 million and $2.2 million, for 2023, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Compensation Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We operate in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have recorded an unfunded liability of $3.2 million and $3.5 million at December 31, 2023 and 2022, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other long-term liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,516&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;"&gt;Total liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,516&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The expense recorded in connection with these plans was $1.7&#160;million, $1.5&#160;million and $1.5&#160;million during the years ended December 31, 2023, 2022 and 2021, respectively.&lt;/p&gt;</us-gaap:PensionAndOtherPostretirementBenefitsDisclosureTextBlock>
    <us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_RegularEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_RegularEmployeesMember_X9LY_jFt8kaVFHrGbcG7ug"
      decimals="2"
      id="Narr_1zi9B9EXdk241lkQmi3cXg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.35</us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent>
    <us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_us-gaap_TitleOfIndividualAxis_acls_HighlyCompensatedEmployeesMember_TdcImKyWREecvPdfWIEV-g"
      decimals="2"
      id="Narr_S3PV5xWh-kSo1zpyjWfjMQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.16</us-gaap:DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Narr_zhf_eR3_806UNodkXtpnYQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.50</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Narr_tsSXN2ZcGUmPds0qM9ke6w"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.50</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Narr_l6554A6wdU2Kw6eTSo75sA"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.50</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercentOfMatch>
    <us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Narr_WB1nY8s08U6pjIzFDUhrQg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.06</us-gaap:DefinedContributionPlanEmployerMatchingContributionPercent>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_V14KZN9uh0GfSKvg5Js9aw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3400000</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_ss1YaPvJhkOrBQoEslciJQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2700000</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:DefinedContributionPlanCostRecognized
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_n16Cv3LQa023lvwO6YpGlg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2200000</us-gaap:DefinedContributionPlanCostRecognized>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_v-RZ4WABRkOEGA3l759hkg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3200000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-5"
      id="Narr_5VAalBPZMEicTS2cuCxsgg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3500000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
    <us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_YQz62JPHiUysNoxp9n4mtQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:80%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Long-term:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Other long-term liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,516&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:78.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;"&gt;Total liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,160&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.03%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.18%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,516&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfAmountsRecognizedInBalanceSheetTableTextBlock>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_s7xu4kWRNkesv-SLAS0fEg_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3160000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_EBPj_jZw8UifDWx0zlgwRA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3516000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesNoncurrent>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_wNTFl_ee6EWuLc2_FmgSVA_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3160000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent>
    <us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_AGicPnznE0q0oLJ0hmHQNw_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3516000</us-gaap:PensionAndOtherPostretirementDefinedBenefitPlansLiabilitiesCurrentAndNoncurrent>
    <us-gaap:DefinedBenefitPlanAdministrationExpenses
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_eRIWY6yuPU6hriC_25Zw3g"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1700000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
    <us-gaap:DefinedBenefitPlanAdministrationExpenses
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_Q1UBemUXG0WWeAd60TsyKg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1500000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
    <us-gaap:DefinedBenefitPlanAdministrationExpenses
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_voSmpLFBoE6sOgc2TQ6x2g"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1500000</us-gaap:DefinedBenefitPlanAdministrationExpenses>
    <us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_n5-NHRcAP0e4zWmwbvRxGQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;13. Stock Award Plans and Stock-Based Compensation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Equity Incentive Plans&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan (the &#x201c;2012 Equity Plan&#x201d; or the &#x201c;Plan&#x201d;), which became effective on May&#160;2, 2012.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The 2012 Equity Plan, as amended, reserves 9.5&#160;million shares of common stock, $0.001&lt;span style="white-space:pre-wrap;"&gt; par value, for grant and permits the issuance of options, stock appreciation rights, restricted stock, restricted stock units, stock equivalents and awards of shares of common stock that are not subject to restrictions or forfeiture to selected employees, directors, and consultants of the Company.  The total number of shares reserved for issuance under the Plan is the sum of &lt;/span&gt;7.76 million shares approved by the shareholders, and 1.78 million shares added in accordance with the terms of the Plan as a result of the expiration or forfeiture of awards granted under our prior equity plan. Shares that are not issued under an award (because such award expires, is terminated unexercised or is forfeited) revert back to the Plan.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The term of stock options granted under the Plan is specified in the award agreements. Unless a lesser term is otherwise specified by the Compensation Committee of the Company&#x2019;s Board of Directors, option awards under the 2012 Equity Plan will expire seven years from the date of grant. Under the terms of the Plan, the exercise price of a stock option may not be less than the fair market value of a share of the Company&#x2019;s common stock on the date of grant. Under the 2012 Equity Plan, fair market value is defined as the last reported sale price of a share of the Company&#x2019;s common stock on a national securities exchange as of any applicable date, as long as the Company&#x2019;s shares are traded on such exchange.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Stock options granted to employees generally vest over a period of four years, while stock options granted to non-employee members of the Company&#x2019;s Board of Directors generally vest over a period of six months and, once vested, are not affected by the director&#x2019;s termination of service to the Company. In limited circumstances, the Company may grant stock option awards with market-based vesting conditions, such as the Company&#x2019;s common stock price, or other performance conditions. Termination of service by an employee will cause options to cease vesting as of the date of termination, and in most cases, employees will have 90 days after termination to exercise options that were vested as of the termination of employment. In general, retiring employees will have one year after termination of employment to exercise vested options. The Company settles stock option exercises with newly issued common shares.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Restricted stock units granted to employees during 2023 had both service-based vesting provisions and performance-based vesting provisions. Restricted stock units granted to employees generally vest over a service period of four years, while restricted stock units granted to non-employee members of the Company&#x2019;s Board of Directors in 2023 vest over a service period of one year. We have granted restricted stock units to executive officers and other senior employees with performance vesting conditions, which may be subject to further service-based vesting terms. Unvested restricted stock unit awards expire upon termination of service to the Company. We settle restricted stock units upon vesting with newly issued common shares. No restricted stock was granted during the three year period ended December 31, 2023. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, there were 0.8 million shares available for grant under the 2012 Equity Plan. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, there were three thousand options outstanding and 0.5&#160;million unvested restricted stock units outstanding under the 2012 Stock Plan.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Employee Stock Purchase Plan&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The 2020 Employee Stock Purchase Plan (the &#x201c;2020 ESPP&#x201d;) provides our employees an opportunity to purchase common stock of the Company at less than market prices. Purchases are made through payroll deductions of up to 10% of the employee&#x2019;s salary as elected by the participant, subject to certain caps set forth in the 2020 ESPP. Employees may purchase the Company&#x2019;s common stock at 85% of its market price on the day the stock is purchased.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The 2020 ESPP is considered compensatory and as such, compensation expense has been recognized based on the benefit of the discounted stock price, amortized to compensation expense over each offering period of six months. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Compensation expense relating to the 2020 ESPP was approximately $0.4 million, $0.3 million, and $0.2 million for the years ended December 31, 2023, 2022 and 2021, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of December 31, 2023, there were approximately 0.9 million shares reserved for issuance and available for purchase under the 2020 ESPP, with 9,965 shares purchased on that date to be issued pending settlement. Less than 0.1 million shares were purchased under the 2020 ESPP for each of the years ended December 31, 2023, 2022 and 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Valuation of Stock Options and Restricted Stock Units&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the purpose of valuing stock options with service conditions, we use the Black-Scholes option pricing model to calculate the grant-date fair value of an award. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted-average expected volatility&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;53.07%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted-average expected term&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;4.71 years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;1.22%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;0.00%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;There were no stock option awards granted in 2023 and 2022. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The fair value of the Company&#x2019;s restricted stock units is calculated based upon the fair market value of the Company&#x2019;s stock at the date of grant.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Summary of Stock-based Compensation Expense&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We use the straight-line attribution method to recognize expense for stock-based awards such that the expense associated with awards is evenly recognized throughout the period.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The amount of stock-based compensation recognized is based on the value of the portion of the awards that are ultimately expected to vest. We estimate forfeitures at the time of grant and revise them, if necessary, in subsequent periods, if actual forfeitures differ from those estimates. The term &#x201c;forfeitures&#x201d; is distinct from &#x201c;cancellations&#x201d; or &#x201c;expirations&#x201d; and represents only the unvested portion of the surrendered stock-based award. Based on a historical analysis, a forfeiture rate of 5% per year was applied to stock-based awards, including executive officer awards, for the years ended December 31, 2023, 2022 and 2021.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the years ended December 31, 2023, 2022 and 2021, we recognized stock-based compensation expense of $18.3 million, $13.4 million and $12.1&#160;million, respectively. We present the expenses related to stock-based compensation in the same expense line items as cash compensation paid to our employees. For the years ended December 31, 2023, 2022 and 2021, we used restricted stock units in our annual equity compensation program. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The benefit of tax deductions in excess of recognized compensation cost is reported in the consolidated statements of cash flows as part of cash flows from operating activities. Axcelis had tax deductions in excess of recognized compensation cost of $10.2 million for the year ended December 31, 2023 which resulted in a tax benefit of $2.2 million. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(e)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Stock Option Awards &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table summarizes the stock option activity for the year ended December 31, 2023:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Options&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Term&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(years)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43.33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13.75&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Canceled&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Exercisable at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Options Vested at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The total intrinsic value, which is defined as the difference between the market price at exercise and the price paid by the employee to exercise the options, for options exercised during the years ended December 31, 2023, 2022 and 2021 was $0.2 million, $5.4&#160;million and $12.8&#160;million, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For both the years ended December 31, 2023 and 2022, 750 stock options vested, respectively. No stock options vested for the year ended December 31, 2021. As of December 31, 2023, there was less than $0.1 million of unrecognized compensation cost related to non-vested stock options granted under the 2012 Equity Incentive Plan. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(f)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Restricted Stock Units and Restricted Stock&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Restricted stock units represent the Company&#x2019;s unfunded and unsecured promise to issue shares of the common stock at a future date, subject to the terms of the Award Agreement issued under the 2012 Equity Incentive Plan. Restricted stock unit awards granted in 2023 included time vested share awards and awards with performance vesting conditions. Restricted stock awards are issued shares of common stock that are subject to forfeiture on terms described in the Award Agreement, and may be granted under the 2012 Equity Incentive Plan. No restricted stock awards were granted, or vested, during the years ended December 31, 2023, 2022 and 2021. The fair value of a restricted stock unit and restricted stock award is charged to expense ratably over the applicable service period. The purpose of these awards is to assist in attracting and retaining highly competent employees and directors and to act as an incentive in motivating selected employees and directors to achieve long-term corporate objectives.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Changes in the Company&#x2019;s non-vested restricted stock units for the year ended December 31, 2023 is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted-Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&#160;Fair&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares/units&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&#160;per&#160;Share&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 725&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39.23&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125.11&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (397)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 131.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51.94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:13pt;"&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 538&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 77.22&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The weighted average grant-date fair value of restricted stock units granted for the years ended December 31, 2023, 2022 and 2021 was $125.11, $55.47 and $38.54, respectively. Most restricted stock units provide for net share settlement to cover the employee&#x2019;s personal income tax withholding obligations on vesting of the employee&#x2019;s restricted stock units. Vesting activity above reflects shares vested before net share settlement. As of December 31, 2023, there was $31.7 million of total forfeiture-adjusted unrecognized compensation cost related to non-vested restricted stock units &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;granted under the 2012 Equity Incentive Plan. That cost is expected to be recognized over a weighted-average period of 2.7&#160;years.&lt;/p&gt;</us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized
      contextRef="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw"
      decimals="-5"
      id="Narr_naxewLbTwEKuM5yP6gUdnA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">9500000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_5_2_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_p_QjZCHJb06aexQmhEVGDw"
      decimals="INF"
      id="Narr_M6nYNpSrtUiygA6Q9tzOlA"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">0.001</us-gaap:CommonStockParOrStatedValuePerShare>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders
      contextRef="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw"
      decimals="-4"
      id="Narr_bTnGJStpjUeRbPXQB4HB6A"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">7760000</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesApprovedByShareholders>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan
      contextRef="Duration_5_12_2012_To_5_12_2012_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_YFCvTIBBaki90knHXSNhGw"
      decimals="-4"
      id="Narr_0vQMidAWu0mAXnmBpwzsiA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">1780000</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardAuthorizedNumberOfSharesFromExpirationsOrForfeituresOfPriorEquityPlan>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_uOkEC3DECUKHo7vPylY9jQ"
      id="Narr_ttUeTZhWLEmjci_oNyFDsQ">P7Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA"
      id="Narr_0pbPj2-2P06AKJyFfSEF2w">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Vgn0ucnjykmLprXk3j_aGA"
      id="Narr_4XKbRiZfO0una_5Sg8X0Kw">P6M</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA"
      id="Narr_R7NApvCMo02eG0in7LuNYw">P90D</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToExerciseAwardsThatWereVested>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_rirnWyE9AkqaDgxz7IcEXA"
      id="Narr_jkqUuidln0airETOEtZwTg">P1Y</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPeriodAfterTerminationToRetiringEmployeesToExerciseVestedAwards>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_EmployeesMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_r2QDj_WbGU2MXA9cI6rdwA"
      id="Narr_D1OXeWxowkG1v8wjKK2QuQ">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_TitleOfIndividualAxis_acls_NonEmployeeMemberOfBoardOfDirectorMember_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_qkh1OMbVZUyknnxw8G32NQ"
      id="Narr_Pf21h3B8dUeo8efn1tc8ig">P1Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_vmAw9b532UyKEU9Sr1y8pA"
      decimals="-3"
      id="Narr_wIUjz2la50O7SrfynmbPNg"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_b4oP4P5xgEGsQW04yyL2vA"
      decimals="-3"
      id="Narr_G7B3L1ZSmkCxuzXRQutOVA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_ueAU0cUZWkCEoZ57czvWIQ"
      decimals="-3"
      id="Narr_vpTmfv3-CU6mdOJ-6PnVZA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
      contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg"
      decimals="-5"
      id="Narr_qIjB5Hia2k-D-x_-XLDVfA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg"
      decimals="-3"
      id="Narr_AKJfs8Dmo06BBKQYK7z0zw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">3000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2023_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_zafQ6pdIdUatexny54ZQVg"
      decimals="-5"
      id="Narr_odCQSvD4sUyb-D0-JlLJnw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">500000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A"
      decimals="2"
      id="Narr_iGmpUmh-V0Sn7o3-2b7VAQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.10</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardPayrollDeductionsAsPercentageOfEmployeesSalary>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ"
      decimals="2"
      id="Narr_nxj_avZWYEi6m9CEmnx7hw"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.85</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardPurchasePriceOfCommonStockPercent>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ"
      id="Narr_p4GmR2xhQ0SrM9SvE7NREQ">P6M</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardOfferingPeriodOverWhichCompensationExpenseIsAmortized>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ"
      decimals="-5"
      id="Narr_uU5O_W7pf0iDAbKecM6jwA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">400000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_NNvZ4Hd_I0aMDgcN7QbpFw"
      decimals="-5"
      id="Narr_y4-Jjr1KW0Sf9BYo8TMuCw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">300000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_lsl0Qfi_V0WmHE7FGXZAiw"
      decimals="-5"
      id="Narr_uPzWYrUH-UOPGQQw-L-UHA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">200000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_KNDxXdNZpkydy7gB3tHtqw"
      decimals="-5"
      id="Narr_s6GBKKDlTkSX7G9zHeODUQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">900000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAuthorized>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_uJfowCYivkClPkIdOLeKpQ"
      decimals="INF"
      id="Narr_NKYFWwWNmkq2rhtT4r13vA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">9965</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_T1p77pG58E-62u-Xc6gndQ"
      decimals="-5"
      id="Narr_lbRdsC9OwUis7yXTus8ilw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">100000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember__5vZm9qvmEyx4PGXJ2sJsQ"
      decimals="-5"
      id="Narr_EFMsCyqYhE6w4FGHaU2SWQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">100000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_2UULBIRhqkOmAyFXhDyr8A"
      decimals="-5"
      id="Narr_NdksTXVpU0Wz_YxMzmHIjQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">100000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_djBUPNQF3kmJmrYu1d0u5A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted-average expected volatility&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;53.07%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Weighted-average expected term&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;4.71 years&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Risk-free interest rate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;1.22%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.79%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expected dividend yield&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:14.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;0.00%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="4"
      id="Tc_i1nIxXeru0-fgBhhohl7dQ_3_3"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.5307</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      id="Narr_i6Sj6eBQPU-6mMfpIGAW-Q">P4Y8M15D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="4"
      id="Tc_M4Rncxh7sk-vUdm-5Phidg_5_3"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.0122</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="4"
      id="Tc_3OjlOYVgU0e318vvyV5NoQ_6_3"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.0000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Narr_SVKlh-zqz0iB-l99nKmakA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Narr_fTIofcFX1ky_TOo7f339LA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="2"
      id="Narr_q3jdqefgYESPAHbykghuDg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.05</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="2"
      id="Narr_TWO7uU-Cc0GJ77RMzMKRHg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.05</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="2"
      id="Narr_cVSQEKNuQE-hMs-uyc3pVQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.05</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsForfeitureRate>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_tgMqxMOBDECEnOyevleaWA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18300000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-5"
      id="Narr_pRYpx3onDEm37CiO6urWwA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13400000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-5"
      id="Narr_8UGp7TcSDkq8QUk4pg8X4A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12100000</us-gaap:AllocatedShareBasedCompensationExpense>
    <acls:BenefitOfTaxDeductionsInExcessOfCompensationCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_nRefigZkN0uK1gMu-LPknA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10200000</acls:BenefitOfTaxDeductionsInExcessOfCompensationCost>
    <us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_Y-WzF-z8a0KqaYaEAvy2Zw"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2200000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
    <us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_BsamaH0WYkWOmfpj411trA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Remaining&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Aggregate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Exercise&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Contractual&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Intrinsic&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Options&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Price&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Term&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(years)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43.33&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Exercised&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (2)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13.75&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Canceled&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Expired&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Exercisable at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:58.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Options Vested at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.8%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;61.81&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.32%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;4.9&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 102&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw"
      decimals="-3"
      id="Tc_DVShAAFN6UeQnXBBqeGy6A_7_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">5000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_Tv0QtoofG0Wb7NJeSAPsOw"
      decimals="2"
      id="Tc_rUtxA3_vHUCvCQIIbSw_XQ_7_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">43.33</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      decimals="-3"
      id="Tc_NM5Fv5mFiEOQI1EI940saA_9_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">2000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      decimals="2"
      id="Tc_Wjvv2K9D_0aqSoD54yRd6Q_9_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">13.75</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_WjXZnBrjUU22KDWdHu9-PQ_12_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">3000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="2"
      id="Tc_utmbgYebFEStAc2xKqEsVQ_12_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">61.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      id="Tc_n3UVJsQQI0Sa_UVKrxCwjg_12_7">P4Y10M24D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsOutstandingWeightedAverageRemainingContractualTerm2>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_FnyNjBCdMEKecp9vPAdqSw_12_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">204000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingIntrinsicValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_0rdHtVBMw0yf7ZxNW52e-A_13_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">2000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="2"
      id="Tc_ati5gzXzskW5grjb3RHjLA_13_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">61.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      id="Tc_YCyxE30v-0GCVs9UdpgB_Q_13_7">P4Y10M24D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableWeightedAverageRemainingContractualTerm1>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_gVC91bIZYE2yFsw3EbJ3Jw_13_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">102000</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsExercisableIntrinsicValue1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_UCLnJ3FMBEe6sbs8Z5xCLg_14_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">2000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="2"
      id="Tc_U0YM0cVQQ0y6hvNkH5fczA_14_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">61.81</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageExercisePrice>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      id="Tc_R4N7GhqaU02XPvBRf7yWbQ_14_7">P4Y10M24D</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingWeightedAverageRemainingContractualTerm1>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_7snjrg5CrkSlKhFf8Ft6_g"
      decimals="-3"
      id="Tc_BHRhlidtu0-sNMLK6wmN_Q_14_10"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">102000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsVestedAndExpectedToVestOutstandingAggregateIntrinsicValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      decimals="-5"
      id="Narr__oANReorrEyg5MZPEY4NNA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">200000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw"
      decimals="-5"
      id="Narr_Vws3Go_ja0eh70LLZdK8aQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5400000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg"
      decimals="-5"
      id="Narr_rX34pIOygEeeA1MKBX9x-A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">12800000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisesInPeriodTotalIntrinsicValue>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_yu1knEv2RECJALnucxSuKw"
      decimals="INF"
      id="Narr_tXqdgCcumkm80fuIH8NU6w"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">750</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_C0mjyERusEOxfhKCewBZLQ"
      decimals="INF"
      id="Narr_ohtzn4zuo0KRBuzrndirlw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">750</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_YyR1t9m4ik6Jup3DqJMTeg"
      decimals="INF"
      id="Narr_DCjnvqVctUaXwrksgpuJBw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedNumberOfShares>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions
      contextRef="As_Of_12_31_2023_srt_RangeAxis_srt_MaximumMember_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_HDapt1gSVkub8a13ACadnA"
      decimals="-5"
      id="Narr_V5nKeuhQfEOw6ga0MNHYmg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">100000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_RcgKtzt0OUKgS4pWcur4aQ"
      decimals="-3"
      id="Narr_ld-AGck6VEGgfQiDyR3rHw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_KuAEiubIqEq26DDxZuCGkQ"
      decimals="-3"
      id="Narr_1WnuVH7ogE69Fa_O3suOug"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_F15TIPRT_k6nh8GGn3pU_A"
      decimals="-3"
      id="Narr_iRdbZSy12kmag90AzF31KQ"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_mgxTWqzbVE2k23XTMYn9Zg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Weighted-Average&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Grant&#160;Date&#160;Fair&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Shares/units&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:12.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Value&#160;per&#160;Share&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 725&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39.23&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Granted&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 125.11&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Vested&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (397)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 131.71&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:71.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Forfeited&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 51.94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:13pt;"&gt;&lt;td style="vertical-align:bottom;width:71.66%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Outstanding at December 31, 2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 538&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.42%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.46%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 77.22&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ"
      decimals="-3"
      id="Tc_iynMtLQPnUOj5Btf6raalA_5_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">725000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Gb4SF1y_10KB9zZyDSbfRQ"
      decimals="2"
      id="Tc_sRfMBrlS9EKs5E_M12TbLQ_5_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">39.23</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="-3"
      id="Tc_v8ePdSXIRUqxbxyuFlq3QQ_6_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">220000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="2"
      id="Tc_cSDdLphL0EyniQpSB4OrYg_6_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">125.11</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="-3"
      id="Tc_2Gv1EABSLUS__EWeDzWXGA_7_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">397000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="2"
      id="Tc_1uT9ZYbzP0WSiStN2st_mg_7_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">131.71</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="-3"
      id="Tc_wgIAN3xhbUKYKGQ7d0yqFw_8_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">10000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeitedInPeriod>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="2"
      id="Tc_vqw7_GWV1kWhRxAi-yyYuQ_8_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">51.94</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsForfeituresWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q"
      decimals="-3"
      id="Tc_0e8kEfnEc0qpGZmgpe6gNw_9_2"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">538000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_FLJkcMO3QkuG9a3PNds2-Q"
      decimals="2"
      id="Tc_VRdWVwi2jEG5LRkeSapwAQ_9_5"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">77.22</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_W0aC88V75kGCJko4g-31ZA"
      decimals="2"
      id="Narr_oZFlOoJUF0eZebiGiWU3ag"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">125.11</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_Rz3ajLtnREywZskVvE3Fmw"
      decimals="2"
      id="Narr_MwNu8iPZPUKd07msRMsxRQ"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">55.47</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_hpz_xxymo0GvoQRlITpX4A"
      decimals="2"
      id="Narr__wO6VbGTtUKK0u8KsnkJ7Q"
      unitRef="Unit_Divide_USD_shares_HcOpAT4vP0q_GMQqv70PEw">38.54</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions
      contextRef="As_Of_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_mZ2W82yrpkiUQ17ZsA1AFA"
      decimals="-5"
      id="Narr__L-YR0BgJEGNvvd7tljAxA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31700000</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedStockOptions>
    <us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockUnitsRSUMember_us-gaap_PlanNameAxis_acls_EquityIncentivePlan2012Member_yyaUwrTP-EmOHl3wwJZx1w"
      id="Narr_Tig-lFobUE-l47PMd5XV7A">P2Y8M12D</us-gaap:EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1>
    <us-gaap:StockholdersEquityNoteDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_ZyEcqHu0uUOLd0WopctycQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;14. Stockholders&#x2019; Equity&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We may issue up to 75 million shares of common stock without additional shareholder approval. At December 31, 2023 and 2022, there were 32.7 million and 32.8 million outstanding shares of common stock, respectively. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-6"
      id="Narr_oJbBeC2U_06dXBbh3pdM6A"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-6"
      id="Narr_fEBCdIypWU2lBfVPLrwngA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_Sy_LrSoQAUuBoNlRtiE_uw"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32700000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-5"
      id="Narr_1z6sG1hYdk6VdAk17stlYA"
      unitRef="Unit_Standard_shares_oy8zrLwHZEKu0JlJVtRY8g">32800000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:FairValueDisclosuresTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_gmONnDbM6UiX-KFOU0_oag">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;15. Fair Value Measurements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Fair value is defined as the exchange price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Fair Value Hierarchy&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#x2019;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-style:italic;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;i style="font-style:italic;"&gt;Level&#160;1&lt;/i&gt;&#x2014;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-style:italic;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;i style="font-style:italic;"&gt;Level&#160;2&lt;/i&gt;&#x2014;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 0pt 36pt;"&gt;&lt;i style="font-style:italic;"&gt;Level&#160;3&lt;/i&gt;&#x2014;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Assets and Liabilities Measured at Fair Value&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our money market funds and short-term investments with maturities of 90 days or less at time of purchase are included in cash and cash equivalents in the consolidated balance sheets. Short-term investments with maturities greater than 90 days but not greater than 365 days are included in short-term investments in the consolidated balance sheets. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table sets forth Company&#x2019;s assets which are measured at fair value by level within the fair value hierarchy.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents and other short-term investments:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 118,278&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 118,278&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Short-term investments (U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 339,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 339,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents and other short-term investments:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 111,771&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 136,771&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Short-term investments (U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 245,247&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 245,247&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 357,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 382,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Other Financial Instruments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.&lt;/p&gt;</us-gaap:FairValueDisclosuresTextBlock>
    <us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_qc6CzfXfgE-mWkpE37qu2w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents and other short-term investments:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 118,278&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 118,278&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Short-term investments (U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 339,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 339,240&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 457,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:94.99%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.62%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents and other short-term investments:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Cash equivalents (money market funds, U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 111,771&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 136,771&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Short-term investments (U.S. Government Securities and Agency Investments)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 245,247&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 245,247&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.78%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Total&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 357,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.32%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,000&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.69%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.3%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.15%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 382,018&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_TzKiNwwh-USWhz8io11ABQ"
      decimals="-3"
      id="Tc_JRP1fPtGQ0CngqkrqNnqDQ_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">118278000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember__LfbETs_4Eyj_dMwV2UpJA"
      decimals="-3"
      id="Tc_SNILLz8gOEuwEL6mG14Uig_7_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">118278000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lT-MAUt2vUucO6TyYUISFA"
      decimals="-3"
      id="Tc_DRGJ3TNgsE6dkWApKHANDg_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">339240000</us-gaap:ShortTermInvestments>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_-_DnTv_YvEaDkQKe7LmNQw"
      decimals="-3"
      id="Tc_rnZBjCZCd0q03cfH9Ma4GQ_8_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">339240000</us-gaap:ShortTermInvestments>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_xdayt9hO7UeoxVaiKsu3xQ"
      decimals="-3"
      id="Tc_aKPPmlTZ8UeG4W_elJHsRg_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">457518000</acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2023_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_UWPXctNjAU2YwBO-MipMgA"
      decimals="-3"
      id="Tc_vcDpRKEVX0mQeSLEnnKa6A_9_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">457518000</acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_mavXQ4xISEaAsWrZ0L8ZhA"
      decimals="-3"
      id="Tc_rLzvxC4WIUOr1JcuBB8lNg_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">111771000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_urRrssC6x0WGz17x6E4Hvg"
      decimals="-3"
      id="Tc_XWqiNfWj4E-z-9hfPQnH2w_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25000000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Kw8meW5Ew0CwJoeC9iNRTg"
      decimals="-3"
      id="Tc_3-hRL256CE-NTlt_zkaBVQ_7_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">136771000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_Cj73mXbaM02Io4RY6pFEpA"
      decimals="-3"
      id="Tc_UZHE8tsOSkWk8fTVTmvPWg_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">245247000</us-gaap:ShortTermInvestments>
    <us-gaap:ShortTermInvestments
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByAssetClassAxis_acls_UsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_VEarHxZha0mjyeIA0BFTiw"
      decimals="-3"
      id="Tc_My3DViJFAEW6sWXbnPZGkg_8_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">245247000</us-gaap:ShortTermInvestments>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_0pN4ZKO8KEG3rNUdHqr_YQ"
      decimals="-3"
      id="Tc_fpDSPy3Sd0qc1LMmFHfzKQ_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">357018000</acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel2Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FcTXrGNUaEORf0WBQjUsjA"
      decimals="-3"
      id="Tc_L7WWSIsfBEupLcxktdfN_w_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25000000</acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure>
    <acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure
      contextRef="As_Of_12_31_2022_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_dPFQa6Iz_0yI2V8uS_VTkg"
      decimals="-3"
      id="Tc_JeIvyMlZ5k-2d4P6ERH9SQ_9_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">382018000</acls:CashAndCashEquivalentsAndShortTermInvestmentsFairValueDisclosure>
    <us-gaap:CommitmentsAndContingenciesDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_XSHvDGFInkWdh6imodRuVQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;16. Commitments and Contingencies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;In addition to the finance and operating leases discussed in Note 9, we have purchase commitments and other contingency considerations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Purchase Commitments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have contracts and purchase orders for inventory and other expenditures of $304.1&#160;million at December 31, 2023, approximately $293.8 million are expected to occur in 2024.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Litigation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations. We are, from time to time, a party to litigation that arises in the normal course of our business operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Indemnifications&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and to indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.&lt;/p&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
    <us-gaap:LongTermPurchaseCommitmentAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_OQbU2soHkUOeR5L9mAKlrA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">304100000</us-gaap:LongTermPurchaseCommitmentAmount>
    <us-gaap:LongTermPurchaseCommitmentAmount
      contextRef="Duration_1_1_2024_To_12_31_2024_srt_StatementScenarioAxis_srt_ScenarioForecastMember_MJ_ZopQwbUyFzH4dIn7oYw"
      decimals="-5"
      id="Narr_B3YLYgh4KUe1I9k96mAm6A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">293800000</us-gaap:LongTermPurchaseCommitmentAmount>
    <us-gaap:SegmentReportingDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_QybFNUfxJUOJilVgxAuncg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;17. Business Segment and Geographic Region Information&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We operate in one business segment, which is the manufacture of capital equipment for the semiconductor chip manufacturing industry. The principal market for semiconductor capital equipment is semiconductor chip manufacturers. Substantially all sales are made directly by us to our customers located in the United States, Europe and Asia Pacific.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our ion implantation systems product line includes high current, medium current and high energy implanters. Other legacy processing products include curing and thermal processing systems. In addition to new equipment, we provide post-sales equipment service and support, including spare parts, equipment upgrades, used equipment, maintenance services and customer training.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Revenue by product lines is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.44786835%;padding-left:0pt;padding-right:0pt;width:100.89%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Ion implantation systems and services&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;1,111,278 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 898,132&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 645,504&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other systems and services&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,326&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Total revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 662,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Revenue and long-lived assets by geographic region, based on the physical location of the operation recording the sale or the asset, are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-Lived&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Revenue&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 749,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 86,482&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45,583&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 382&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 335,733&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 90,904&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 634,081&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 66,227&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 38,963&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 212&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 246,954&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 69,903&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2021&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 519,408&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,590&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,622&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 191&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,194&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 662,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 66,975&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Long-lived assets consist of property, plant and equipment, net, and assets manufactured for internal use, net. Operations in Asia Pacific consist of manufacturing, sales and service organizations. Operations in Europe consist of sales and service organizations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;International revenue, which includes export sales from U.S. manufacturing facilities to foreign customers and sales by foreign subsidiaries and branches, was $950.4 million (84.1% of total revenue), $776.3&#160;million (84.4% of total revenue) and $613.5&#160;million (92.6% of total revenue) in 2023, 2022 and 2021, respectively. &lt;/p&gt;</us-gaap:SegmentReportingDisclosureTextBlock>
    <us-gaap:NumberOfReportableSegments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="INF"
      id="Narr_j8AovvjTOECI6c8xtVEltQ"
      unitRef="Unit_Standard_segment_WsrHPFnBKka2BeCFtSp7Iw">1</us-gaap:NumberOfReportableSegments>
    <us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_gWydj2y2XkW4f4ESU_G_5w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:-0.44786835%;padding-left:0pt;padding-right:0pt;width:100.89%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:30.84%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Ion implantation systems and services&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt;1,111,278 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 898,132&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 645,504&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other systems and services&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 19,326&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,866&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 16,924&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:66.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Total revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.17%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.65%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.99%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.68%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 662,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.71%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEntityWideInformationRevenueFromExternalCustomersByProductsAndServicesTextBlock>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_b0GGpw37D0OVb9OFN51NQg"
      decimals="-3"
      id="Tc_vLV9MRr-aES4Szg2zkPLwQ_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1111278000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_IB6EAoZ92EKVMdwKs2Dl9Q"
      decimals="-3"
      id="Tc_vxZwPzMJ-0WduX_Sbke30g_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">898132000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_IonImplantationSystemsServicesAndRoyaltiesMember_8JwEleVAokWgoqUc3NxvTQ"
      decimals="-3"
      id="Tc_uirwsSeT7ki74XXFPITvZw_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">645504000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_7zwwQYKndk-1uFVAqMZYtw"
      decimals="-3"
      id="Tc_M8SS3DJehkmE2P2A0fFR3w_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">19326000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember_SvkhLuNIGUmjUZq3-cDS2w"
      decimals="-3"
      id="Tc_UN6KkJuxFECyvME4sCQFYg_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21866000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_ProductOrServiceAxis_acls_OtherProductsSystemsServicesAndRoyaltiesMember__am58s2p3kyHmrdJ-wmZEw"
      decimals="-3"
      id="Tc_kQ2HB8zaF0esYKKwmKRrVg_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">16924000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_YAcV40PN_USyirGkxbtM3Q_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1130604000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_HQLIiSayPEy6pjeOl-BCpg_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">919998000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_5kGzM3IQVk-0is9nxqCJag_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">662428000</us-gaap:Revenues>
    <us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_csqUJvBHKEORYjzz-I_OsA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Long-Lived&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Revenue&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 749,288&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 86,482&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45,583&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 382&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 335,733&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,040&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,130,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 90,904&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 634,081&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 66,227&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 38,963&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 212&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 246,954&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,464&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 919,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 69,903&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;2021&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 519,408&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,590&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 36,622&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 191&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 106,398&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,194&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:75.91%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.25%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 662,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 66,975&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_country_US_UfW5MedWSkyujQ8Y0vkOtg"
      decimals="-3"
      id="Tc_lQwheoXVMEmTxesZ7z-hJQ_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">749288000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_country_US_K0jdvGlMnki9BRPFAc8loA"
      decimals="-3"
      id="Tc_kjoqM8N9Qk6pOAnU0w7A4Q_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">86482000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_V2_FqMNKREKBDCFiveJmdw"
      decimals="-3"
      id="Tc_GujVTPpJ8k6zqGASryUANw_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45583000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_EuropeMember_RPglYXiqLEShpJtGT_g1Sw"
      decimals="-3"
      id="Tc_DCbYIABhrESfXrvvc1Z_OA_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">382000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_PC-0ayzdZ0usjBWOXUKs3A"
      decimals="-3"
      id="Tc_WcM44-7f-EC50dKLVWmv-w_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">335733000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2023_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VFBGeqEs2UCyy68A5JWZfw"
      decimals="-3"
      id="Tc_phOjM2MVa0mhdLCugZUkQw_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4040000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_LF5itZHj_kW7-lbq3dzGLw_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1130604000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_zCHxfedo6kaa0fKMAg_66A_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">90904000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_country_US_95SUhXL6YUOJ1QCn_y7deQ"
      decimals="-3"
      id="Tc_K5G4PjfVZkG_vg3ymSasOw_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">634081000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_country_US_QN_LDNP680aHSIexTzcgIw"
      decimals="-3"
      id="Tc_TIHcU6dKEEyxFglJz-Vwcw_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">66227000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_q1dku0ncB06CrWlIDa4iNg"
      decimals="-3"
      id="Tc_dqq8upRkMUC7NVk2zwMzBQ_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38963000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_EuropeMember_LwLoMmDLRkW5c14GGyfjfw"
      decimals="-3"
      id="Tc_dAXuYAkEcUir7JKUi592mQ_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">212000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_Zwg4OJyjD0K1VBF82Kab9g"
      decimals="-3"
      id="Tc_9Z1QAN2M4k-QAzrl8sU7Pg_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">246954000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2022_srt_StatementGeographicalAxis_srt_AsiaPacificMember_VkUGPFQLf0iBUBJcbnlQtg"
      decimals="-3"
      id="Tc_peC54mFc00eQACAAc1lBnA_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3464000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_QHfiha4i70KzWZ5wciXC7g_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">919998000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_UQT4T1MzYk-4vgdo884MdQ_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">69903000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_country_US_dErK4Bok0U6vJzw5OBG6Kw"
      decimals="-3"
      id="Tc_o75HZOoDxE2sNt5p_WvxOw_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">519408000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_country_US_z97YRF5psk25FKK3ms7RSQ"
      decimals="-3"
      id="Tc_PEoLWTPlGUmH_gFsjdBl2A_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">63590000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_Xl95lEbrVUWUwf7jb7OhdA"
      decimals="-3"
      id="Tc_KDPdtZVk20yq3VzflhP3mw_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">36622000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_EuropeMember_pnJLSIdbRUOBVaF_N17T0A"
      decimals="-3"
      id="Tc_rgBC_fUemkW976l-vz5CJA_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">191000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_-aAHSciOY0Cplf_vAQmgzg"
      decimals="-3"
      id="Tc_jLtaHIAWS0iCLvXEmgUzWg_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">106398000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2021_srt_StatementGeographicalAxis_srt_AsiaPacificMember_GhM1iSAHW0adxS2rHrLKEg"
      decimals="-3"
      id="Tc_zk7hl8tcUU6LJBj79zpMrg_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3194000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_p4lk0xq95UmI_GoFOiL-UQ_18_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">662428000</us-gaap:Revenues>
    <us-gaap:NoncurrentAssets
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_ehu3xQk5NEWuoqqYnO55zA_18_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">66975000</us-gaap:NoncurrentAssets>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA"
      decimals="-5"
      id="Narr_bJn0Q1AJRE2_JaP6POMSJg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">950400000</us-gaap:Revenues>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2023_To_12_31_2023_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_g65lD8iQWU6IWlDqsUJ9DA"
      decimals="3"
      id="Narr_4d_AjG3Z4UW5KxpGMWqSNg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.841</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ"
      decimals="-5"
      id="Narr_Y6MFgZDgmU621MPU91Wy_A"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">776300000</us-gaap:Revenues>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2022_To_12_31_2022_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_0VIvDjtTYk2cU4ENAmmfVQ"
      decimals="3"
      id="Narr_6GL62RXDH0eq3spMvE2YLQ"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.844</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw"
      decimals="-5"
      id="Narr_g895_Yw6c0SbTZokZDvMTA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">613500000</us-gaap:Revenues>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_12_31_2021_srt_StatementGeographicalAxis_us-gaap_NonUsMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_qg_dst6MlEaZ6XW6yQh5Lw"
      decimals="3"
      id="Narr_EpLSOtLtMkCM0o-MaEWlsg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.926</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:IncomeTaxDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_vWlRn7INaUGx72kRp9aI2Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;18. Income Taxes&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Income before income taxes is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 270,842&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 198,028&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 116,380&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,048&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Income before income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 278,599&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Provision for income taxes is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 46,871&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,430&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;State&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,985&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,716&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,498&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,439&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total current&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52,354&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13,270&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,521&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (18,526)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,097&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,521&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (440)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (102)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 406&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,052)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (459)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (670)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,018)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,536&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income tax provision&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,806&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,778&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Reconciliation of income taxes at the United States Federal statutory rate to the effective income tax rate of 11.6% is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes at the United States statutory rate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 58,506&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,290&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;State income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 387&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,443)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign income tax rate differentials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 329&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 289&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 152&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Stock-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,718)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,818)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,658)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Internal revenue code section 162(m) limitation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,488&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,692&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,481&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Credit expirations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 784&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,181&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,342&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rate change&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 44&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Credit generation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,900)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4,764)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,096)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Discrete items, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,161&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 72&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;GILTI inclusion&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 69&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 301&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign-derived intangible income&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (24,052)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,526)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 638&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (209)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Income tax provision&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,806&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,778&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Significant components of long-term deferred income taxes are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31,&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    State net operating loss carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 96&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 291&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Foreign net operating loss carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 276&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Federal tax credit carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    State tax credit carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,560&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,683&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Property, plant and equipment&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,755&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Operating lease liability&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,564&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,564&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Accrued compensation&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 242&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 276&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Inventories&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 804&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,613&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Stock compensation&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,790&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,620&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Warranty&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,108&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,993&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,389&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,501&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Capitalized research and development costs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 38,036&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18,067&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Gross deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 74,749&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,639&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Valuation allowance&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,963)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,370)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,786&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Intangible assets&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (176)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Right-of-use asset&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (9,155)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,400)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Other&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,203)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,992)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Gross deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,568)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Deferred taxes, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 31,701&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:3pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;"&gt;Changes in tax rates and tax laws are accounted for in the period of enactment. Our deferred tax assets and liabilities are measured at the enacted tax rate expected to apply when these temporary differences are expected to be realized or settled. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;"&gt;At December 31, 2023, we had $53.4 million of net deferred tax assets worldwide relating to capitalized R&amp;amp;D costs and other temporary differences, which are available to reduce income taxes in future years. The increase in our deferred tax assets from the prior year was primarily due to a $20.0 million increase relating to capitalized R&amp;amp;D costs. At December 31, 2023, we maintained a $11.0 million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these attributes. This represents an increase of $2.6 million from the prior year. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;At December 31, 2023, we had state net operating loss carryforwards of $0.1 million. State net operating losses will expire between 2024 and 2034. At December 31, 2023, we have foreign net operating loss carryforwards of $0.2 million. The majority of our foreign net operating losses have an unlimited carryforward period.&lt;span style="font-size:12pt;"&gt; &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;At December 31, 2023, we had research and development and other tax credit carryforwards of $15.2 million. These carry forwards are subject to an uncertain tax position reserve of $3.0 million. These credits can be used to reduce future federal and state income tax liabilities and expire principally between 2024 and 2035.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;background:#ffffff;margin:0pt;"&gt;A provision of the Tax Cuts and Jobs Act (&#x201c;TCJA&#x201d;) took effect in 2022, creating a significant change to our treatment of research and experimental expenditures. Historically, businesses had the option of deducting R&amp;amp;D expenses in the year incurred or capitalizing and amortizing the costs over five years. The TCJA provision eliminates this option and requires R&amp;amp;D expenses associated with research conducted in the U.S. to be capitalized and amortized over a five-year period. For expenses associated with research outside of the United States, R&amp;amp;D expenses are capitalized and amortized over a 15-year period. The Company has included the tax impact of capitalizing and amortizing these costs over the required periods in their tax provision for the year ended December 31, 2023.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt; &lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;"&gt;We consider the undistributed earnings of our foreign subsidiaries as of December 31, 2023 to be indefinitely reinvested and, accordingly, no U.S. income taxes have been provided thereon. As of December 31, 2023, the amount of cash associated with indefinitely reinvested foreign earnings was approximately $11.8 million. We have not, nor do we anticipate the need to, repatriate funds to the United States to satisfy domestic liquidity needs arising in the ordinary course of business, including liquidity needs associated with our domestic debt service requirements.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;"&gt;We and our subsidiaries file income tax returns in the U.S. federal jurisdiction and various states and foreign jurisdictions. We and most foreign subsidiaries are subject to income tax examinations by tax authorities for all years dating back to 2009. Our policy is to recognize interest related to unrecognized tax benefits as interest expense and penalties as operating expenses. We believe that we have appropriate support for the income tax positions taken and to be taken on our tax returns and that our accruals for tax liabilities are adequate for all open years based on an assessment of many factors including past experience and interpretations of tax law applied to the facts of each matter.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt 0pt 8pt 0pt;"&gt;At December 31, 2023, we had unrecognized tax benefits related to uncertain tax positions of $11.9 million, $8.3 million of which is recorded as a long-term liability, and the remainder of which reduced the Company&#x2019;s state deferred tax assets and the offsetting valuation allowance. We recognized $0.5 million in interest and penalty expenses for the year ended December 31, 2023 relating to these uncertain tax positions. These unrecognized tax benefits, if recognized, would reduce the effective tax rate and also reverse associated accrued interest and penalty expenses.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;A reconciliation of the beginning and ending balance of unrecognized tax benefits are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:0pt;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:26.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31,&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (271)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (122)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (546)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Decreases in unrecognized tax benefits related to settlements with tax authorities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (708)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (472)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during the current period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,754&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,312&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 935&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 11,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Recorded as other long-term liability&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,344&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,190&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Recorded as a decrease in deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,582&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,253&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 11,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
    <us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_uurBE3VZKkWshNQ0DxATrw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.81%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 270,842&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 198,028&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 116,380&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,757&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,857&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,048&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.67%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Income before income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.77%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 278,599&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 204,885&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.75%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 120,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfIncomeBeforeIncomeTaxDomesticAndForeignTableTextBlock>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_DIKbzVYkfkyVbZnQ-l2Akw_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">270842000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_WQxm7lusm0ahBgdadz2s3A_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">198028000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_Bx6DIGpKHEC4bq8Yp4ZRog_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">116380000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_hatKAAGzQUKcWvCD7IvhCw_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7757000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_DScc9jfzRUmXLaMj3Ecqcw_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6857000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ptK5UKRNXkm9-HGIOtGj6g_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4048000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Ow2Lp8q3kkOkFc4ZVD10uQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">278599000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_ijttRj4lDUebwekHER121w_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">204885000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_ja0R0npnsUmcmNU9aS0A6g_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">120428000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_09kfYBwYREKsXdeHSmKhbw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Current:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;United States&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 46,871&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,430&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;State&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,985&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,716&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 82&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,498&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,124&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,439&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total current&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 52,354&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 13,270&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,521&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Federal&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (18,526)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,097&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,521&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;State&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (440)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (102)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 406&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Foreign&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,052)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (459)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (670)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Total deferred&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,018)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,536&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 20,257&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income tax provision&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,806&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.34%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,778&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.07%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock>
    <us-gaap:CurrentFederalTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_gonqMEhgqkyMa5kjA8hn4Q_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">46871000</us-gaap:CurrentFederalTaxExpenseBenefit>
    <us-gaap:CurrentFederalTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_X8PujVpbX0e-sGGB9jRSIQ_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8430000</us-gaap:CurrentFederalTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_O3n4FVHMDkaJVvC9naAuig_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1985000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_VQ8wDpjRN0qi9FLJQ5anaA_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1716000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentStateAndLocalTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_w4ru1iyfx02tZbIEGK3N-w_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">82000</us-gaap:CurrentStateAndLocalTaxExpenseBenefit>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_umIFLutO8keKfuINjiJmhA_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3498000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_9ifioiP_2kyql_7BFVpfYg_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3124000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentForeignTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_0trMK86a90aXN0jdP_uUwQ_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1439000</us-gaap:CurrentForeignTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_zwHHGY7FQUKLJXodOZCtVw_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">52354000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_YSXIZrr95UWbwedZIKcAJQ_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">13270000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:CurrentIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_sMVF9bVVoUGG2FdAm9iw-g_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1521000</us-gaap:CurrentIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_eVYin-rPbUyPCpSdb2ZNXg_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-18526000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_YExCIdwNx0eVNMm8FPpKyQ_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9097000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredFederalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_6bdVULYOI0-nCJKp_2QzpQ_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20521000</us-gaap:DeferredFederalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_CHDyZwBscUGQrl6Y1kQFEg_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-440000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_c-V5A40hGkG6b5fbOG00hQ_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-102000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_GACqT9iVbESc4HT5FtzQtw_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">406000</us-gaap:DeferredStateAndLocalIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_phoOf2hEDkGqa8VEvcTxtw_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1052000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_5d8GAilb50Ss8u-hXDvGgw_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-459000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <us-gaap:DeferredForeignIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_0T-i20OThkuYmmcUAss_EQ_13_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-670000</us-gaap:DeferredForeignIncomeTaxExpenseBenefit>
    <acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_8OlocWX280uItkB3DoKrxw_14_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-20018000</acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation>
    <acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_QIiKzIxnc0yGoNOd0GzOhg_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8536000</acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation>
    <acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_SJUtTuINCkO969H5a1RtcA_14_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20257000</acls:DeferredIncomeTaxExpenseBenefitAfterValuationAllowanceAllocation>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Y--rpiyMH0K6Unw4RK3sew_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">32336000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_P_TuSaIVfEGlo8LpQrNyyw_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21806000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_esuaCJDyA0SKKXdjrhz8og_15_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21778000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:EffectiveIncomeTaxRateContinuingOperations
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="3"
      id="Narr_zAh86jUV_EampZK5R62jpg"
      unitRef="Unit_Standard_pure_CRldQujk3Eqp4g0kuQ4UrA">0.116</us-gaap:EffectiveIncomeTaxRateContinuingOperations>
    <us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_ixib9ndBoEu-ZqtO3Vbsgw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:29.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Income taxes at the United States statutory rate&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 58,506&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 43,026&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 25,290&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;State income taxes&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,075&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 387&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Effect of change in valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,978&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 680&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,443)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign income tax rate differentials&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 329&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 289&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 152&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Stock-based compensation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,718)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,818)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,658)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Internal revenue code section 162(m) limitation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,488&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,692&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,481&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Credit expirations&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 784&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,181&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,342&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Rate change&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 44&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 94&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 159&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Credit generation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (6,900)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (4,764)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (3,096)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Discrete items, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,161&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 206&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 72&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;GILTI inclusion&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 45&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 69&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 301&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Foreign-derived intangible income&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (24,052)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (20,526)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Other, net&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 638&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (209)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:67.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Income tax provision&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 32,336&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.38%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,806&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.18%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 21,778&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_rLakQ9V-Xk2NdyUqV_6Kvw_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">58506000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_FGpfiGxEAk26wHQMe4VWvQ_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">43026000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_YgE58JWXVEaq91YznQXmaw_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">25290000</us-gaap:IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_-4_SdC3NQUWQ8MfwFJl5gA_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1033000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_vwXSv0QQg0aZ6wCYaBxyzA_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1075000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_rEei9TJKBUWC8rnji8p3Pw_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">387000</us-gaap:IncomeTaxReconciliationStateAndLocalIncomeTaxes>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_0cHClhb11Uu77J4EYWdJHg_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1978000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_xPcYqoeSKU2UmyK8LIQRPg_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">680000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_riJACm2dnEC7fvMYvzocoA_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-1443000</us-gaap:IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_JVDvghqgMke1TNOc0X7eyw_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">329000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_vgpZAkKJBUWtzcfRmipmGg_7_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">289000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_mS5Onpq2CkSPywR5zrcekw_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">152000</us-gaap:IncomeTaxReconciliationForeignIncomeTaxRateDifferential>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_ZoKikyAcqUC635hAxWY9rw_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-6718000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_9BEOZyBG30WIkC7l1IQW7g_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-3818000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_owdv2HmO4UqfQPtTqQyINw_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-3658000</us-gaap:IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost>
    <acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_MYTXmBd48kePX95SCJ3-Cw_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4488000</acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation>
    <acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_QzLqeAfpi0OBG9WTb3zq6g_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2692000</acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation>
    <acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_RG6OfJGstUmGP-swn9tckQ_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1481000</acls:DeferredTaxLiabilitiesInternalRevenueCodeLimitation>
    <acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_Fl7Pv9Af1UmGus3DMbm_1g_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">784000</acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount>
    <acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_-4rkIoqsIUi55jLQIGBKVw_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1181000</acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount>
    <acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_VGEUTcynP06jNurWRJvccg_10_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2342000</acls:EffectiveIncomeTaxRateReconciliationNondeductibleExpenseCreditExpirationsAmount>
    <us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_hpsDPMlVxkSZvgRxP5S76A_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">44000</us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate>
    <us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_QyIohW_oEka-veeMkfIw1g_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">94000</us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate>
    <us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_6dltLDZjXEOVDmNDH7rYiQ_11_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">159000</us-gaap:IncomeTaxReconciliationChangeInEnactedTaxRate>
    <us-gaap:IncomeTaxReconciliationTaxCredits
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_LMEI7L4I2kas-0gOlRmJ6w_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6900000</us-gaap:IncomeTaxReconciliationTaxCredits>
    <us-gaap:IncomeTaxReconciliationTaxCredits
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_788LAQdaP0y7nB2z6uhh2Q_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4764000</us-gaap:IncomeTaxReconciliationTaxCredits>
    <us-gaap:IncomeTaxReconciliationTaxCredits
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_7JoUgKUN4Ua30vEAOcJkAg_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3096000</us-gaap:IncomeTaxReconciliationTaxCredits>
    <us-gaap:IncomeTaxReconciliationOtherReconcilingItems
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_pajcGCMP20e_7d2ugt6GXg_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2161000</us-gaap:IncomeTaxReconciliationOtherReconcilingItems>
    <us-gaap:IncomeTaxReconciliationOtherReconcilingItems
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_AfNVhtm-V02Nx2ssr4O5og_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">206000</us-gaap:IncomeTaxReconciliationOtherReconcilingItems>
    <us-gaap:IncomeTaxReconciliationOtherReconcilingItems
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_uS0YdPdGu0Wwj35pWQzpjA_13_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">72000</us-gaap:IncomeTaxReconciliationOtherReconcilingItems>
    <us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_37Ueut44TEegF3aQdadO3Q_14_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">45000</us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount>
    <us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_i2T5_A6IM0-2le4ZwqU8Gw_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">69000</us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount>
    <us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_2am7uDhsVUGUJwNtiLvx9Q_14_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">301000</us-gaap:EffectiveIncomeTaxRateReconciliationGiltiAmount>
    <us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_OgKHy_-GNEmcmyLsEVi_6Q_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">24052000</us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount>
    <us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_uhSA69taok67W7mEQNlMYQ_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20526000</us-gaap:EffectiveIncomeTaxRateReconciliationFdiiAmount>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_YN2S9DEurEe09qXIoSvEMw_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">638000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_VNzCQQerhESguWE6UgaLKA_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1602000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxReconciliationOtherAdjustments
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc__MYE1X9YoU--82Z6aLpDvA_16_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-209000</us-gaap:IncomeTaxReconciliationOtherAdjustments>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_MAm53P6f2kKY4-qf87mxIw_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">32336000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_KNx4_P87wUSiaKYrmV96YQ_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21806000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_jFrasxU4V0OIKvoHx9nOsg_17_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">21778000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_CT0qu7pqAk6KDEx6CU6ZQw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31,&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax assets:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:20.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    State net operating loss carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 96&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 291&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Foreign net operating loss carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 182&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 276&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Federal tax credit carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,999&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    State tax credit carryforwards&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,560&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,683&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Property, plant and equipment&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,979&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,755&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Operating lease liability&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 5,564&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,564&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Accrued compensation&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 242&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 276&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Inventories&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 804&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,613&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Stock compensation&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,790&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,620&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Warranty&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,108&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,993&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 6,389&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 4,501&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Capitalized research and development costs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 38,036&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 18,067&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Gross deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 74,749&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 47,639&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Valuation allowance&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,963)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (8,370)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Net deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 63,786&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 39,269&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax liabilities:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Intangible assets&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (176)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Right-of-use asset&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (9,155)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (5,400)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Other&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,203)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (1,992)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Gross deferred tax liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (10,358)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (7,568)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:76.21%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Deferred taxes, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 53,428&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.34%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.43%;background:#cceeff;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 31,701&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_lDoeJWv1cEWlUfE0GfN3eg_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">96000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_3rfS7lgHAE6YDYHWomWxkQ_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">291000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsStateAndLocal>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Ho32baDKsk6dazfDsKYOqQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">182000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign>
    <us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_ov3DiUzLykyBh2kcoY9Gng_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">276000</us-gaap:DeferredTaxAssetsOperatingLossCarryforwardsForeign>
    <us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_SXxacdp3nEGAW7uAnM7O5w_7_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1999000</us-gaap:DeferredTaxAssetsTaxCreditCarryforwardsGeneralBusiness>
    <acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_knTXLyw1YUC_hnQWFTjnAg_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9560000</acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal>
    <acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_75m71c6KV0y43_NHUw_KEQ_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8683000</acls:DeferredTaxAssetsTaxCreditCarryforwardsStateAndLocal>
    <us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_d0skMcJoeUihIQquxJCtqQ_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6979000</us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment>
    <us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc__YokG5-eV02eojko6tFzkw_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8755000</us-gaap:DeferredTaxAssetsPropertyPlantAndEquipment>
    <acls:DeferredTaxAssetOperatingLeaseLiabilities
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_zvUigwUZJEiOHAazRbUyBg_10_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5564000</acls:DeferredTaxAssetOperatingLeaseLiabilities>
    <acls:DeferredTaxAssetOperatingLeaseLiabilities
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_MB64XcWwG0eALMVj6dVAYw_10_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1564000</acls:DeferredTaxAssetOperatingLeaseLiabilities>
    <acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_rUGEarCpfkyw_o6wHvzLwg_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">242000</acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent>
    <acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_txGVa8h4y0ip2nBRMQLlsA_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">276000</acls:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsEmployeeCompensationNoncurrent>
    <us-gaap:DeferredTaxAssetsInventory
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_nggt4Av4r0qJjp93iWsxgg_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">804000</us-gaap:DeferredTaxAssetsInventory>
    <us-gaap:DeferredTaxAssetsInventory
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_90_e9aUh80Oiykzw5ZwQ7A_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1613000</us-gaap:DeferredTaxAssetsInventory>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_5uZqsTjiVUqfg6lzESlTAg_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1790000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_5CXUOtCt2UaOEw8IW0CEdA_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1620000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseCompensationAndBenefitsShareBasedCompensationCost>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_wXFLKh3gOEmkBVjJWL48Ag_14_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3108000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Cv8uug_e2k6w4HytdZN9PA_14_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1993000</us-gaap:DeferredTaxAssetsTaxDeferredExpenseReservesAndAccrualsWarrantyReserves>
    <us-gaap:DeferredTaxAssetsDeferredIncome
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_0Kq8m5rVmUy5GmavV4oovw_15_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">6389000</us-gaap:DeferredTaxAssetsDeferredIncome>
    <us-gaap:DeferredTaxAssetsDeferredIncome
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_LR-wvW6R-kePnrjaEEDiPw_15_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">4501000</us-gaap:DeferredTaxAssetsDeferredIncome>
    <acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_Lt81yyIf70m8krFuDjps0w_16_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">38036000</acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts>
    <acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Teb-deGC1k-2eXQivnu0lg_16_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">18067000</acls:DeferredTaxAssetsCapitalizedResearchAndDevelopmentCosts>
    <acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_O5jTma2Vg0WONVDmmee7PA_17_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">74749000</acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent>
    <acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_6-9VfjGPYUi3fWv430zAww_17_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">47639000</acls:DeferredTaxAssetsLiabilitiesGrossNoncurrent>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_hvhnED0_CkSwG4N2z4BkiQ_18_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10963000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_Gfk2P732VEe3iB0WpOn75Q_18_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8370000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:DeferredTaxAssetsGross
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_J0U7HGCP1U-aVvpmISvQeQ_19_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">63786000</us-gaap:DeferredTaxAssetsGross>
    <us-gaap:DeferredTaxAssetsGross
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_0sl2DPeoQEe6bMZWetfQjQ_19_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">39269000</us-gaap:DeferredTaxAssetsGross>
    <us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_ImVYgegLaEK5ZvhT4uVL2w_21_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">176000</us-gaap:DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets>
    <us-gaap:DeferredTaxLiabilitiesLeasingArrangements
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_wpC5dbVWBECoAN9Lrh0elQ_22_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9155000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
    <us-gaap:DeferredTaxLiabilitiesLeasingArrangements
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_InenGW_cB0KpGL1OQT7ZsQ_22_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">5400000</us-gaap:DeferredTaxLiabilitiesLeasingArrangements>
    <us-gaap:DeferredTaxLiabilitiesOther
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_fTIRTr7VqEKlgfwoSXgu9Q_23_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1203000</us-gaap:DeferredTaxLiabilitiesOther>
    <us-gaap:DeferredTaxLiabilitiesOther
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_A8dDKRPFck-YYFyZ_qjPhQ_23_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1992000</us-gaap:DeferredTaxLiabilitiesOther>
    <us-gaap:DeferredIncomeTaxLiabilities
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_ndB03VLgyUqz9zvcK8EShQ_24_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10358000</us-gaap:DeferredIncomeTaxLiabilities>
    <us-gaap:DeferredIncomeTaxLiabilities
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_3KWeMqaLFEKiZ_iA3kScDg_24_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7568000</us-gaap:DeferredIncomeTaxLiabilities>
    <us-gaap:DeferredTaxAssetsLiabilitiesNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_AS_Vp4NBJUC4mTEQaepsEw_25_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53428000</us-gaap:DeferredTaxAssetsLiabilitiesNet>
    <us-gaap:DeferredTaxAssetsLiabilitiesNet
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_q1TohZ6A0k-nS59sn0rdOQ_25_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">31701000</us-gaap:DeferredTaxAssetsLiabilitiesNet>
    <us-gaap:DeferredTaxAssetsLiabilitiesNet
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_Kg6BYC62KEqVO_Xao0DZsg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">53400000</us-gaap:DeferredTaxAssetsLiabilitiesNet>
    <acls:IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_yqwJsIO0UEiEjbP_BC3nIA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">20000000.0</acls:IncreaseInDeferredAssetCapitalizedResearchAndDevelopmentCost>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_9WI1szKlS0-3mCdkw6oaZg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11000000.0</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_JqtyyaiAN0KndBH_XX9ArQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">2600000</us-gaap:ValuationAllowanceDeferredTaxAssetChangeInAmount>
    <us-gaap:OperatingLossCarryforwards
      contextRef="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_acls_FederalMember_JyU6u3-cI0OeKObqNKstMQ"
      decimals="-5"
      id="Narr_47ztwQFshUOm2R1-kJ5MRg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">100000</us-gaap:OperatingLossCarryforwards>
    <us-gaap:OperatingLossCarryforwards
      contextRef="As_Of_12_31_2023_us-gaap_IncomeTaxAuthorityAxis_us-gaap_ForeignCountryMember_9fes20YJ4Ea1NPN1ZK-OqQ"
      decimals="-5"
      id="Narr_EYqSV8Fcakejsxv9G3UG2Q"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">200000</us-gaap:OperatingLossCarryforwards>
    <us-gaap:OperatingLossCarryforwards
      contextRef="As_Of_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_qjTxbwBIV0alaooQFCEIKg"
      decimals="-5"
      id="Narr_wWL3-FAYJUSgf-DTVS0GtQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">15200000</us-gaap:OperatingLossCarryforwards>
    <acls:OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_TaxCreditCarryforwardAxis_acls_ResearchDevelopmentAndOtherTaxCreditMember_TivY9CKrdEqLO9QwWaSgbg"
      decimals="-5"
      id="Narr_vShI-bBdT06ipJNPjVXoiQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3000000.0</acls:OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve>
    <us-gaap:UndistributedEarningsOfForeignSubsidiaries
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_k9N3BApcNEyzK7SNUh10vQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11800000</us-gaap:UndistributedEarningsOfForeignSubsidiaries>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_Lnxw3nwXCkOFnBtyHt1mlg"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11900000</us-gaap:UnrecognizedTaxBenefits>
    <acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-5"
      id="Narr_UdN_Bxr8pE6sAJLUSWLnjA"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8300000</acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability>
    <us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-5"
      id="Narr_1hmkeCVFLk-cZTG_FHOaMQ"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">500000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestExpense>
    <us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_xJwONT19fkKZBQIVnkUOmA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="position:absolute;top:0pt;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;white-space:nowrap;width:26.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31,&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:27.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at beginning of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:top;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,044&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Decrease in unrecognized tax benefits as a result of tax positions taken during a prior period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (271)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (122)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (546)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Decreases in unrecognized tax benefits related to settlements with tax authorities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (708)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Reductions to unrecognized tax benefits as a result of a lapse of the applicable statute of limitation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (472)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Increases in unrecognized tax benefits as a result of tax positions taken during the current period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,754&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,312&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 935&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 11,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Recorded as other long-term liability&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,344&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,190&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Recorded as a decrease in deferred tax assets&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,582&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,253&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;background:#cceeff;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Balance at end of year&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 11,926&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,443&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.96%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,961&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.95%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;background:#ffff00;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_39a7BbhzQ0Wr-w3fY7Yk7A_4_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10443000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_hf1UNwYt1EOggLFhUZjzkA_4_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9961000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2020_LKL9-UnxSU-1cDhSzkg2dQ"
      decimals="-3"
      id="Tc_1m8-FjEEJECOe4imXpOVYQ_4_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10044000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc_gr26fnpczk6No00y7-bHxQ_5_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">271000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_EKkv6UWKgUWYdXk3Z7vwFQ_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">122000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_f2CqnYQjW0S6oyhRnwX8vg_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">546000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromPriorPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_wAz-fH4yQEKSkSvPMWk2Hw_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">708000</us-gaap:UnrecognizedTaxBenefitsDecreasesResultingFromSettlementsWithTaxingAuthorities>
    <us-gaap:UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_sm6NPkQ-_0iQIij0sJI94w_7_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">472000</us-gaap:UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      decimals="-3"
      id="Tc__qEk24aFxEiIRLCE108uFA_8_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1754000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2022_To_12_31_2022_kSGUoyZlT06ZCezwdv88fw"
      decimals="-3"
      id="Tc_YHEw0capEU-hcH-Pyn607g_8_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1312000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions
      contextRef="Duration_1_1_2021_To_12_31_2021_DzGhfDMUP0uZUKQcqYklrw"
      decimals="-3"
      id="Tc_kym8pZ0Ux0WX-l8y2EVhNw_8_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">935000</us-gaap:UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_FoI9obOBAkWjZvZGuGyI_A_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11926000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_uWNUs2CAwkOHfQihiYY0sA_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10443000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_EUwl39aEVEm7xSKxae-pRg_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9961000</us-gaap:UnrecognizedTaxBenefits>
    <acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_i7qJ7v_20EWEJyhLbMem1g_11_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8344000</acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability>
    <acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_EtzaIPnbrkCMgr6SzTag-Q_11_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7190000</acls:UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability>
    <acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_qzm_oJKZ-UCIFaRKwAJNoQ_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3582000</acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance>
    <acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_eNzgV8eDn0WGi_2ODsdvVw_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3253000</acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance>
    <acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_tvuNSbsFJUS63WanWPQ6gQ_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9961000</acls:UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2023_sKibNhUkF0uUEFIILUvl9Q"
      decimals="-3"
      id="Tc_63k4XntXcUumjD5KZPzKcw_13_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">11926000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2022_Ymw4Jg2aNEmmO35VwcNUQQ"
      decimals="-3"
      id="Tc_jIan4smwkk2nwvBLaVfx8w_13_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10443000</us-gaap:UnrecognizedTaxBenefits>
    <us-gaap:UnrecognizedTaxBenefits
      contextRef="As_Of_12_31_2021_ggc3NzK27kCWbeMmPUv17g"
      decimals="-3"
      id="Tc_u3vsnVennEG6FJLB6374xA_13_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9961000</us-gaap:UnrecognizedTaxBenefits>
    <srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock
      contextRef="Duration_1_1_2023_To_12_31_2023_r1vzli0vR0OUEb4zBloGrA"
      id="Tb_gFuQdrCnZUiOLLmKbJ3ugw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Charged&#160;to&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Balance&#160;at&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Beginning&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Costs&#160;and&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;End&#160;of&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Expenses&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Deductions&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Period&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, 2023&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Allowance for doubtful accounts and returns&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,117&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 657&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 460&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,370&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 3,196&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 603&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 10,963&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, 2022&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Allowance for doubtful accounts and returns&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,689&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 1,529&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 848&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 8,370&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Year ended December 31, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:59.55%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Allowance for doubtful accounts and returns&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;background:#cceeff;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:59.55%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Deferred tax valuation allowance&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 9,133&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 780&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 2,224&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 7,689&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.72%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</srt:ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw"
      decimals="-3"
      id="Tc_7VomIgveA0qOD77XkB31mA_5_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1117000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_l14umqAIZE-ZvpH7ak4ELw"
      decimals="-3"
      id="Tc_a1RLJrE9IEaBMR1I_XURRQ_5_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-657000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_acls_AllowanceForDoubtfulAccountsAndReturnsMember_34gSCZl-h0errxThK-8WCg"
      decimals="-3"
      id="Tc_rpb5VTrh-0WhZoF21aO2ww_5_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">460000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw"
      decimals="-3"
      id="Tc_zIXnNH6DwEaMbPC7b5MvIQ_6_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8370000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA"
      decimals="-3"
      id="Tc_ZpaUBFY2qEOYw9gSzPqqCg_6_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">3196000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2023_To_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_BPdJ7sTrUUeZiQ45sQtnqA"
      decimals="-3"
      id="Tc_mN4FQl3W1UOjb4nHDfNOPQ_6_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-603000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2023_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_Q9QhiFBD9UypWV-wU4smdg"
      decimals="-3"
      id="Tc_iuBLpWgioU27geCVe62v9w_6_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">10963000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w"
      decimals="-3"
      id="Tc_OPBC9zY-UUCAtXCdwsxHAw_9_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7689000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw"
      decimals="-3"
      id="Tc_sBPpAk7CMUSB1z5A_T4jOA_9_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">1529000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2022_To_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_yowMHeJQSk-owEOFxmZRZw"
      decimals="-3"
      id="Tc_tUAZzz1DCUG8PcMIn2_rJA_9_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-848000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2022_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_r8KCVVsfp0ifZbtWG22ohw"
      decimals="-3"
      id="Tc_pBVxSyMFSUO-p8hP0Mc7oA_9_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">8370000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2020_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_MdUgjQT3H0-8E9eEhKTIDQ"
      decimals="-3"
      id="Tc_96dd6r2j3EGKNTkSRqKy1Q_12_3"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">9133000</us-gaap:ValuationAllowancesAndReservesBalance>
    <us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg"
      decimals="-3"
      id="Tc_jcp4sFY08Uy-_Y0MPAnGbQ_12_6"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">780000</us-gaap:ValuationAllowancesAndReservesChargedToCostAndExpense>
    <us-gaap:ValuationAllowancesAndReservesDeductions
      contextRef="Duration_1_1_2021_To_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_TIbKE3k5sUGLHJ2_XmwsFg"
      decimals="-3"
      id="Tc_zMwa9559HUCGWB2GNDUWdQ_12_9"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">-2224000</us-gaap:ValuationAllowancesAndReservesDeductions>
    <us-gaap:ValuationAllowancesAndReservesBalance
      contextRef="As_Of_12_31_2021_us-gaap_ValuationAllowancesAndReservesTypeAxis_us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_xl0MHhPp_0y3kkcmRwpj2w"
      decimals="-3"
      id="Tc_JcPwjxSWt0aGnxYS5WWA0g_12_12"
      unitRef="Unit_Standard_USD_RkrwvvC_Jk6A8BBipLaMBw">7689000</us-gaap:ValuationAllowancesAndReservesBalance>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
